Ozone treatment testing device

Abstract

The invention provides an ozone treatment testing device, and relates to the field of electronic component testing. Comprising a gas source group which comprises at least one gas cylinder and is used for providing dry air or other to-be-treated gas; a gas inlet of the mass flow controller is connected with a gas cylinder outlet through a first pipeline; an inlet of the ozone generator is connected with an outlet of the mass flow controller; an air inlet of the test chamber is communicated with an outlet of the ozone generator, and an air outlet is connected with an air pump through a second pipeline; a replaceable heating circuit board card is arranged in the test chamber; the heating circuit board card is electrically connected to an external power supply device; the input end of the resistance signal acquisition board card is connected with an electrode of the MOS gas sensor, and the output end of the resistance signal acquisition board card is connected with a data interface of the computer; and the computer is connected with the resistance signal acquisition board card. According to the invention, the problems of high cost and high complexity in improving the performance of the sensor in the prior art are solved.

Description

Technical Field

[0001] The present invention relates to the technical field of electronic component testing, in particular to an ozone treatment testing device. Background Art

[0002] Gas sensing technology is widely used in numerous fields. MOS sensors are a popular choice due to their high sensitivity, fast response, and ease of integration. However, they can suffer from baseline drift in high-temperature environments, leading to increased zero-point voltage and false alarms. Existing solutions, such as doping, composite materials, and algorithm improvements, are limited by complex processes, high costs, and the potential for impurities that could affect other performance characteristics. This makes it difficult to effectively improve sensor performance without significantly increasing cost and complexity. Summary of the Invention

[0003] In order to overcome the deficiencies of the prior art, the purpose of the present invention is to provide an ozone treatment testing device, which solves the problems of high cost and great complexity in improving sensor performance in the prior art.

[0004] To achieve the above object, the present invention provides the following solutions:

[0005] An ozone treatment testing device, comprising:

[0006] A gas source group, comprising at least one gas cylinder, for providing dry air or other gas to be processed;

[0007] a mass flow controller, the gas inlet of which is connected to the outlet of the gas cylinder via a first pipeline, and is used to accurately adjust the gas flow within a preset flow range;

[0008] an ozone generator, the inlet of which is connected to the outlet of the mass flow controller, for converting the gas into an ozone-gas mixture within a preset concentration range;

[0009] A test chamber, wherein the air inlet is connected to the outlet of the ozone generator, and the air outlet is connected to the air pump through a second pipeline; a replaceable heating circuit board is provided inside the test chamber;

[0010] A heating circuit board card is electrically connected to an external power supply device and is used to provide continuously adjustable heating power to the MOS gas sensor placed on the heating circuit board card;

[0011] A resistance signal acquisition board, the input end of which is connected to the electrode of the MOS gas sensor and the output end of which is connected to the data interface of the computer, for collecting resistance change data of the MOS gas sensor;

[0012] The computer is connected to the resistance signal acquisition board and is used to upload the collected real-time resistance change data to the host computer software LabVIEW for real-time display.

[0013] Preferably, the preset flow rate range is 0.01–2 L / min.

[0014] Preferably, the preset concentration range is 0–3 g / h.

[0015] Preferably, the test chamber is fixed by a metal bracket.

[0016] The present invention discloses the following technical effects:

[0017] The present invention provides an ozone treatment test device, comprising: a gas source group, comprising at least one gas cylinder, for providing dry air or other gas to be treated; a mass flow controller, whose air inlet is connected to the gas cylinder outlet through a first pipeline, for accurately adjusting the gas flow within a preset flow range; an ozone generator, whose inlet is connected to the outlet of the mass flow controller, for converting the gas into an ozone-gas mixture within a preset concentration range; a test chamber, whose air inlet is connected to the ozone generator outlet, and whose air outlet is connected to an air pump through a second pipeline; a replaceable heating circuit board provided inside the test chamber; the heating circuit board electrically connected to an external power supply device, for providing continuously adjustable heating power to a MOS gas sensor disposed on the heating circuit board; a resistance signal acquisition board, whose input end is connected to the MOS gas sensor electrode and whose output end is connected to a computer data interface, for acquiring resistance change data of the MOS gas sensor; and a computer connected to the resistance signal acquisition board, for uploading the acquired real-time resistance change data to a host computer software LabVIEW for real-time display. The present invention performs secondary processing on the sensor by precisely controlling the heating power, heating time, and ozone concentration. This specific processing process can change the surface properties of the sensor material, thereby increasing the zero-point resistance. After the zero-point resistance is increased, the baseline drift problem of the sensor in a high-temperature environment is effectively alleviated, and the zero-point voltage no longer increases easily, thereby reducing the occurrence of false alarms and enhancing the stability and reliability of the sensor in practical applications. This ozone treatment process does not require large-scale modification of the existing sensor manufacturing process or the introduction of complex steps such as doping modification and composite material preparation. Only processing is required on the original basis to optimize the sensor performance. The operation process is relatively simple and easy. The ozone treatment process of the present invention is easy to implement, and the required experimental equipment and operating procedures are relatively mature and easy to obtain, reducing the difficulty and cost of implementation. At the same time, this method provides a new solution to the baseline drift problem of MOS gas sensors in high-temperature environments and expands the technical approach to optimizing gas sensor performance. This experimental device can not only be used for ozone treatment processes, but also can be used to explore and study other gas treatment processes by changing the gas source and adjusting the corresponding parameters such as the heating test chamber. This enables the experimental device to test and optimize the characteristics of the sensor under various gas environments, further improving its practical value and application potential. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 A schematic structural diagram of an ozone treatment testing device provided in an embodiment of the present invention;

[0020] Figure 2 The resistance change curve of the sensor provided in the embodiment of the present invention is a graph of the resistance change of the sensor when heated for 60 minutes at different heating powers without ozone treatment, wherein: Figure 2 (a) is the resistance change curve under 400mW heating power, Figure 2 (b) is the resistance change curve under 450mW heating power. Figure 2 (c) is the resistance change curve under 500mW heating power. Figure 2 (d) is the resistance change curve under 550W heating power. Figure 2 (e) is the resistance change curve under 600mW heating power. Figure 2 (f) is a graph showing the percentage change of resistance increase at each power level;

[0021] Figure 3 The resistance change curve of the sensor under the ozone treatment condition of 1g / h concentration provided by the embodiment of the present invention is heated for 60 minutes at different heating powers, wherein: Figure 3 (a) is the resistance change curve under 400mW heating power, Figure 3 (b) is the resistance change curve under 450mW heating power. Figure 3 (c) is the resistance change curve under 500mW heating power. Figure 3 (d) is the resistance change curve under 550mW heating power. Figure 3 (e) is the resistance change curve under 600mW heating power. Figure 3 (f) is a graph showing the percentage change of resistance increase at each power level;

[0022] Figure 4 The resistance change curve of the sensor when heated at 600mW power at different heating times under the ozone treatment condition of 1g / h concentration provided by the embodiment of the present invention, wherein: Figure 4 (a) is the resistance change curve under 10 minutes heating time, Figure 4 (b) is the resistance change curve under 20 minutes of heating time. Figure 4 (c) is the resistance change curve under 30 minutes of heating time, Figure 4 (d) is the resistance change curve under 60 minutes of heating time. Figure 4 (e) is the resistance change curve under 120 minutes of heating time, Figure 4 (f) is a graph showing the percentage change of resistance increase at each heating time;

[0023] Figure 5 The resistance change curve of the sensor under the condition of 600mW heating power for 60 minutes under the conditions of ozone treatment of different concentrations provided by the embodiment of the present invention, wherein: Figure 5 (a) is the resistance change curve at 0g / h concentration, Figure 5 (b) is the resistance change curve at a concentration of 1g / h. Figure 5 (c) is the resistance change curve at a concentration of 2g / h. Figure 5 (d) is the resistance change curve at a concentration of 3g / h. Figure 5 (e) is a graph showing the percentage change in resistance increase at each concentration.

[0024] Reference numerals:

[0025] Gas cylinder-1; mass flow controller-2; ozone generator-3; test chamber-4; heating circuit board-5; vacuum pump-6; resistance signal acquisition board-7; computer-8; external power supply unit-9. DETAILED DESCRIPTION

[0026] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0027] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0028] like Figure 1 As shown, the present invention provides an ozone treatment testing device, comprising:

[0029] A gas source group, comprising at least one gas cylinder 1, for providing dry air or other gas to be processed;

[0030] Mass flow control 2, the gas inlet is connected to the outlet of the gas cylinder 1 through a first pipeline, and is used to accurately adjust the gas flow within a preset flow range;

[0031] an ozone generator 3, the inlet of which is connected to the outlet of the mass flow control 2, for converting the gas into an ozone-gas mixture within a preset concentration range;

[0032] The test chamber 4 has an air inlet connected to the outlet of the ozone generator 3 and an air outlet connected to the air pump 6 through a second pipeline; a replaceable heating circuit board card 5 is provided inside the test chamber 4;

[0033] The heating circuit board card 5 is electrically connected to the external power supply device 9 and is used to provide continuously adjustable heating power to the MOS gas sensor placed on the heating circuit board card 5;

[0034] The resistance signal acquisition board 7 has an input end connected to the electrode of the MOS gas sensor and an output end connected to the data interface of the computer 8, and is used to collect resistance change data of the MOS gas sensor;

[0035] The computer 8 is connected to the resistance signal acquisition board 7 and uploads the collected real-time resistance change data to the host computer software LabVIEW for real-time display.

[0036] Furthermore, the preset flow rate range is 0.01–2 L / min.

[0037] Specifically, the ozone treatment process testing system of the present invention comprises a gas cylinder 1, a mass flow control 2 (MFC), an ozone generator 3, a test chamber 4, an air pump 6, a power supply, a resistance signal acquisition board 7, and a computer 8. Gas cylinder 1 serves as the source of experimental gas, and its outlet is connected to the air inlet of the mass flow control 2 (MFC) via a pipe. The MFC precisely controls and regulates the gas flow rate via a host computer program. The outlet of the MFC is connected to the air inlet of the ozone generator 3 via a pipe. The ozone generator 3 converts dry air into ozone of a set concentration, with an adjustable concentration range of 0–3 g / h. The outlet of the ozone generator 3 is connected to the air inlet of the test chamber 4 via a pipe. The outlet at the other end of the chamber is connected to the air pump 6 to ensure that the gas flows evenly through the sensor material sample placed in the chamber. The test chamber 4 is secured by a metal bracket and contains a custom-designed heating circuit board 5. The sensor is directly inserted into the heating board, which is connected to an external power supply via wires to precisely control the heating power (with an adjustable power range) to simulate various high-temperature operating conditions. The sensor's resistance change signal is transmitted via wires to a resistance signal acquisition board 7, which transmits the data via a data cable to a computer 8. Computer 8 uses LabVIEW software to monitor and record experimental data in real time. Through analysis, it determines the optimal combination of processing parameters to improve the zero-point resistance performance of the MOS gas sensor in high-temperature environments.

[0038] The metal oxide semiconductor (MOS) gas sensor was placed in a heating test chamber 4 and treated under the set heating power, heating time and ozone concentration. The experimental groups were mainly divided into the following. During the treatment process, the host computer software LabVIEW was used to obtain real-time information on the sensor resistance change. The resistance change process is as follows: Figures 2 to 4 (a)-(e) and Figure 5 As shown in (a)-(d).

[0039] Experimental group 1: no ozone, heating power of 400-600mW, heating time of 60 minutes;

[0040] Experimental group 2: 1g / h ozone, heating power of 400-600mW, heating time of 60 minutes;

[0041] Experimental group 3: 1g / h ozone, heating power 600mW, heating time 10-120 minutes;

[0042] Experimental group 4: ozone concentration 0-3g / h, heating power 600mW, heating time 60 minutes.

[0043] By comparison, it can be determined that 600mW heating power, 1g / h ozone concentration, and 1 hour processing time are the optimal parameter combination. The zero-point resistance of the sensor can be significantly improved by 65.9% and 57.1% respectively.

[0044] The device can also be used to treat the sensor with other gases to study the effects of different gases on sensor performance under specific conditions. Specifically, the experimental device tests and optimizes the sensor's characteristics under different gas environments by changing the gas source and adjusting parameters such as MFC flow rate and heating power.

[0045] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0046] This document uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only intended to help understand the method and core concept of the present invention. At the same time, those skilled in the art will find that the specific implementation methods and application scopes may vary based on the concept of the present invention. In summary, the contents of this specification should not be construed as limiting the present invention.

Claims

1. An ozone treatment test device, characterized in that: include: A gas source group, comprising at least one gas cylinder, for providing dry air or other gas to be processed; a mass flow controller, the gas inlet of which is connected to the outlet of the gas cylinder via a first pipeline, and is used to accurately adjust the gas flow within a preset flow range; an ozone generator, the inlet of which is connected to the outlet of the mass flow controller, for converting the gas into an ozone-gas mixture within a preset concentration range; A test chamber, wherein the air inlet is connected to the outlet of the ozone generator, and the air outlet is connected to the air pump through a second pipeline; a replaceable heating circuit board is provided inside the test chamber; A heating circuit board card is electrically connected to an external power supply device and is used to provide continuously adjustable heating power to the MOS gas sensor placed on the heating circuit board card; A resistance signal acquisition board, the input end of which is connected to the electrode of the MOS gas sensor and the output end of which is connected to the data interface of the computer, for collecting resistance change data of the MOS gas sensor; The computer is connected to the resistance signal acquisition board and is used to upload the collected real-time resistance change data to the host computer software LabVIEW for real-time display.

2. An ozone treatment testing device according to claim 1, characterized in that: The preset flow rate range is 0.01–2 L / min.

3. An ozone treatment testing device according to claim 1, characterized in that: The preset concentration range is 0–3 g / h.

4. The ozone treatment testing device according to claim 1, characterized in that: The test chamber is fixed by a metal bracket.

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