Movement mechanism

Abstract

The invention provides a movement mechanism, and relates to the technical field of semiconductor manufacturing. The movement mechanism comprises a bottom plate, a first movement plate arranged above the bottom plate, a first driving mechanism connected with the first movement plate through a first direction reed module, a second movement plate arranged above the first movement plate and a second driving mechanism connected with the second movement plate. The two first driving mechanisms are used for driving the first moving plate to move along a first direction or rotate around a third direction relative to the bottom plate through the corresponding first direction reed modules; the second driving mechanism is used for driving the second moving plate to move along a second direction relative to the first moving plate; the second direction is perpendicular to the first direction, the plane where the first direction and the second direction are located and the bottom plate are located, and the third direction is perpendicular to the first direction and the second direction.

Description

Technical Field

[0001] This specification relates to the technical field of semiconductor manufacturing, and in particular to a motion mechanism. Background Art

[0002] The XYT motion module is a motion module that can simultaneously control two linear translation axes and one rotation axis. The XYT motion module can control the translation of the driven component along the X-axis and / or Y-axis on a plane, and at the same time control the driven component to perform rotational motion around an axis perpendicular to the XY plane, where T can represent the rotation angle. The XYT motion module may include a base plate, a carrier plate supported by air floating on the base plate, and a linear motion system. The carrier plate is used to carry, connect or fix the driven component, and the linear motion system can drive the carrier plate to achieve planar movement or rotation relative to the base plate. However, the XYT motion module with air floating support has many pipelines, and the control and structural complexity are relatively high. In addition, the XYT motion module with air floating support occupies a large plane size space and cannot achieve large-angle precision rotational motion. Summary of the Invention

[0003] One or more embodiments of the present specification provide a motion mechanism, including: a base plate, a first motion plate arranged above the base plate, a first driving mechanism connected to the first motion plate through a first direction spring module, a second motion plate arranged above the first motion plate, and a second driving mechanism connected to the second motion plate; the two first driving mechanisms are used to drive the first motion plate to move in a first direction or rotate around a third direction relative to the base plate through the corresponding first direction spring modules; the second driving mechanism is used to drive the second motion plate to move in a second direction relative to the first motion plate; the second direction is perpendicular to the first direction, the plane where the first direction and the second direction are located is in the same plane as the base plate, and the third direction is perpendicular to the first direction and the second direction.

[0004] In some embodiments, the first moving plate is configured to rotate around a rotation axis, and the two first driving mechanisms are arranged symmetrically relative to the rotation axis; the first direction reed module is configured so that a portion of the first direction reed module can translate along the first direction; the first driving mechanism is configured so that it can provide linear power along the first direction to the corresponding first direction reed module, and can translate along the second direction at the same time.

[0005] In some embodiments, the first direction spring module includes: a first direction compensating decoupling mechanism connected to the first driving mechanism and a first direction differential decoupling mechanism connecting the first direction compensating decoupling mechanism and the first moving plate; the first direction compensating decoupling mechanism is configured to: have rigidity in the first direction, and have flexibility for rotation around the second direction and rotation around the third direction; the first direction differential decoupling mechanism is configured to: have rigidity in the third direction, have rigidity for rotation around the first direction and rotation around the second direction, and have flexibility for rotation around the third direction.

[0006] In some embodiments, the first direction differential decoupling mechanism includes: a first component, a second component, and a first direction differential decoupling reed connecting the first component and the second component; the first component and the second component are both rigid components; the first component connects the first moving plate and the first direction compensation decoupling mechanism; the second component is configured to be able to translate along the first direction; the first direction differential decoupling reed is configured to be rigid in the third direction, rigid for rotation around the first direction and rotation around the second direction, and flexible for rotation around the third direction.

[0007] In some embodiments, the first-direction differential decoupling mechanism further includes: a first-direction guiding module, which is disposed between the second component and the base plate and is used to guide the second component in the first direction.

[0008] In some embodiments, the first-direction differential decoupling spring includes a first portion extending in a first direction and a second portion extending in a second direction connected to the first portion; one of the first portion and the second portion is fixedly connected to the first member, and the other of the first portion and the second portion is fixedly connected to the second member.

[0009] In some embodiments, the motion mechanism further includes: a parasitic displacement compensation guide module, which is provided between the first drive mechanism and the base plate and is used to guide the first drive mechanism in the second direction.

[0010] In some embodiments, the first direction differential decoupling mechanism includes one or more first direction differential decoupling reed groups; each of the first direction differential decoupling reed groups includes two first direction differential decoupling reeds arranged axially symmetrically.

[0011] In some embodiments, one of the first component and the second component is provided with one or more reed limiting structures, and the other of the first component and the second component is provided with one or more reed limiting grooves matching the shape of the reed limiting structure; the reed limiting structure and the reed limiting groove match to limit the position of the first component relative to the second component in the first direction, the position in the second direction, and / or the rotational position around the third direction.

[0012] In some embodiments, the motion mechanism also includes: a first direction intermediate guide module provided on the base plate, the first direction intermediate guide module including: an intermediate guide rail fixedly connected to the base plate, an intermediate guide slider provided on the intermediate guide rail, and a rotating member fixedly connected to the intermediate guide slider, the first motion plate can rotate around a third direction relative to the rotating member; the rotating member provides a rotation axis, and the first motion plate is configured to be able to rotate around the rotation axis.

[0013] In some embodiments, the rotating component includes: a bearing mounting seat fixedly connected to the intermediate guide slider, a bearing pressure cover provided on the bearing mounting seat, and a bearing provided between the bearing mounting seat and the bearing pressure cover; the first moving plate is interference fit with the bearing; the first moving plate is configured to be displaceable and fixed in the third direction relative to the bearing.

[0014] In some embodiments, the bearing mounting seat has one or more bearing mounting seat extension structures; the motion mechanism also includes: a first direction position measuring mechanism and / or a third direction rotation position measuring mechanism; the first direction position measuring mechanism is arranged on one of the bearing mounting seat extension structures, and the third direction rotation position measuring mechanism is arranged on another of the bearing mounting seat extension structures.

[0015] In some embodiments, the motion mechanism also includes: a brake assembly, the brake assembly including: a fixed base fixedly connected to the second motion plate, an air-floating brake block arranged between the base plate and the first motion plate, and a brake spring connecting the fixed base and the air-floating brake block; the air-floating brake block is configured to be able to provide positive pressure, negative pressure or no gas to the base plate; the brake spring is configured to be flexible in the third direction.

[0016] In some embodiments, the two first driving mechanisms are arranged in mirror symmetry with respect to a plane where the rotation axis is located; or, the two first driving mechanisms are arranged in central symmetry with respect to a point on the rotation axis.

[0017] The beneficial effects that may be brought about by the embodiments of this specification include but are not limited to: (1) the first direction spring module is used to realize the motion guidance of the first moving plate relative to the base plate, avoiding the use of air floating guidance, reducing the number of pipelines, and having low control and structural complexity; (2) the first drive mechanism is configured to be able to translate along the second direction, avoiding the influence of the first moving plate on the freedom degree caused by the parasitic motion of the first drive mechanism when rotating, while maintaining the driving accuracy of the first drive mechanism in the first direction; (3) the first direction compensation decoupling mechanism is used to avoid the influence of the installation position deviation of the first drive mechanism on the output of the first drive mechanism; (4) the first direction differential decoupling mechanism is used to avoid the influence of the rotation of the first moving plate on the output of the first drive mechanism; (5) the spring limit structure of the first direction differential decoupling mechanism can limit the displacement and rotation between the first component and the second component, preventing unexpected situations from causing plastic deformation of the weak part of the first direction differential decoupling spring; (6) the intermediate guide module can It can improve the rigidity of the first moving plate in the second direction, reduce or avoid the displacement of the first moving plate in the second direction; (7) the intermediate guide module can implement rotational guidance for the first moving plate, and the intermediate guide module will not affect the displacement of the first moving plate in the first direction; (8) the bearing mounting seat extension structure allows the first direction position measurement mechanism and / or the third direction rotation position measurement mechanism to be arranged on the intermediate guide module, so that the first direction position measurement mechanism and / or the third direction rotation position measurement mechanism can be close to the geometric center of the first moving plate, thereby avoiding signal loss caused by translation or rotation of the first moving plate and obtaining a larger measurement range; (9) the brake assembly can achieve position locking of the second moving plate after it is in place; (10) the mirror symmetrical arrangement of the two first drive mechanisms can make the output directions of the two first drive mechanisms on the same side, simplifying wiring; (11) the central symmetrical arrangement of the two first drive mechanisms can avoid the use of additional mirror processing parts. It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other possible beneficial effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] This specification will be further described in the form of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. The same numbers in the drawings represent the same structures or steps.

[0019] Figure 1 It is a three-dimensional schematic diagram of a motion mechanism according to some embodiments of this specification.

[0020] Figure 2 It is a side view schematic diagram of the motion mechanism shown in some embodiments of this specification.

[0021] Figure 3is a schematic diagram of an inverted state of a motion mechanism according to some embodiments of this specification.

[0022] Figure 4 Schematic diagram of an exploded view of a first moving plate and a second moving plate of a moving mechanism according to some embodiments of the present specification.

[0023] Figure 5 Schematic diagram of a second driving mechanism and a second direction compensation decoupling mechanism of a motion mechanism according to some embodiments of this specification.

[0024] Figure 6 Schematic diagram of a second direction compensation decoupling mechanism of a motion mechanism according to some embodiments of this specification.

[0025] Figure 7 、 Figure 8 It is an exploded schematic diagram of a motion mechanism according to some embodiments of this specification.

[0026] Figure 9 Schematic diagram of a first driving mechanism and a first direction spring module of a motion mechanism according to some embodiments of this specification.

[0027] Figure 10 is a schematic diagram of parasitic displacement of a motion mechanism according to some embodiments of this specification.

[0028] Figure 11 Schematic diagram of a first direction spring module according to some embodiments of this specification.

[0029] Figure 12 Schematic diagram of a first direction spring module according to other embodiments of this specification.

[0030] Figure 13 This is a schematic diagram of a first direction intermediate guide module according to some embodiments of this specification.

[0031] Figure 14 It is a cross-sectional schematic diagram of the first direction intermediate guide module shown in some embodiments of this specification.

[0032] Figure 15 It is a schematic diagram of a first direction intermediate guide module according to other embodiments of this specification.

[0033] Figure 16 It is a cross-sectional schematic diagram of the first direction intermediate guide module shown in other embodiments of this specification.

[0034] Figure 17 is a schematic diagram of a brake assembly according to some embodiments of this specification.

[0035] Figure 18 Schematic diagram of a brake spring according to some embodiments of this specification.

[0036] Reference numerals in the figure: 1 bottom plate; 2 first moving plate; 3 first directional reed module; 31 first directional compensating decoupling mechanism; 311 first structural member of first directional compensating decoupling mechanism; 312 first reed of first directional compensating decoupling mechanism; 313 second structural member of first directional compensating decoupling mechanism; 314 second reed of first directional compensating decoupling mechanism; 32 first directional differential decoupling mechanism; 321 first component; 322 second component; 323 first directional differential decoupling reed; 3231 first portion; 3232 second portion; 324 first directional guide module; 325 reed limiting structure; 326 reed limiting groove; 4 first driving mechanism; 41 parasitic displacement compensating guide module; 5 second moving plate; 6 second driving mechanism; 61 second directional compensating decoupling mechanism; 611 first structural member of second directional compensating decoupling mechanism; 612 first reed of second directional compensating decoupling mechanism; 613 Second structural member of second-direction compensating decoupling mechanism; 614 Second reed of second-direction compensating decoupling mechanism; 7 First-direction intermediate guide module; 71 Intermediate guide rail; 72 Intermediate guide slider; 73 Rotating component; 731 Bearing mounting seat; 7311 Bearing mounting seat extension structure; 732 Bearing cover; 733 Bearing; 81 First-direction position measuring mechanism; 811 First-direction position measuring head; 812 First-direction position measuring grating scale; 82 Third-direction rotational position measuring mechanism; 821 Third-direction rotational position measuring head; 822 Third-direction rotational position measuring grating scale; 9 Brake assembly; 91 Fixed base; 92 Air-floating brake block; 93 Brake reed; 931 Brake reed first part; 932 Brake reed second part. DETAILED DESCRIPTION

[0037] To more clearly illustrate the technical solutions of the embodiments of this specification, the embodiments will be described in detail below with reference to the accompanying drawings. Obviously, the following descriptions are some examples or embodiments of this specification, and those skilled in the art can apply the technical solutions or methods disclosed in this specification to other scenarios based on these technical contents without inventive effort.

[0038] It should be understood that the terms "system," "device," "equipment," "portion," and / or "component," "unit," and / or "module" used in this specification are a method for distinguishing different components, elements, parts, portions, or assemblies at different levels. However, if other terms can achieve the same purpose, the terms may be replaced by other expressions.

[0039] Unless otherwise specified, technical terms used in this specification to describe components, elements, and the like do not necessarily refer to the singular but may include the plural. Generally speaking, terms such as "include" and "comprising" only indicate the inclusion of the steps, elements, or components specifically identified, and these steps, elements, and components do not constitute an exclusive list. For example, the method or device being described may also include other steps or components.

[0040] In the description of this specification, it should be understood that the descriptions involving directions, such as up, down, front, back, left, and right, and the directions or positional relationships indicated are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on this application. In the description of this specification, unless otherwise expressly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meaning of the above terms in this specification in combination with the specific content of the technical solution.

[0041] An XYT motion module (or XYθ motion module) is a motion module that can simultaneously control two linear translation axes (e.g., the X and Y axes) and one rotational axis (e.g., the T, Theta, or θ axis). In some embodiments, the XYT motion module can control the translation of a driven component along the X and / or Y axes in a plane, while simultaneously controlling the rotation of the driven component around an axis perpendicular to the XY plane (e.g., the Z axis), where T or θ can represent the angle of rotation.

[0042] In some related embodiments, an XYT motion module may include a base plate, a carrier plate air-supported on the base plate, and a linear motion system. The carrier plate is used to support, connect, or secure the driven component, and the linear motion system is capable of driving the carrier plate to achieve planar translation or rotation relative to the base plate. However, XYT motion modules using air-supports require numerous piping systems, resulting in high control and structural complexity. Furthermore, XYT motion modules using air-supports occupy a large planar footprint and cannot achieve large-angle precision rotational motion.

[0043] Based on this, one or more embodiments of this specification provide a motion mechanism that is decoupled through a reed module and a guide, does not require an air flotation mechanism, reduces pipeline layout, has a relatively simple control and structure, and occupies a small plane size space.

[0044] Figure 1 is a three-dimensional schematic diagram of a motion mechanism according to some embodiments of this specification, Figure 2 is a side view schematic diagram of a motion mechanism according to some embodiments of this specification, Figure 3 is a schematic diagram of an inverted state of a motion mechanism according to some embodiments of this specification, Figure 4 FIG is an exploded schematic diagram of the first moving plate and the second moving plate of the motion mechanism according to some embodiments of the present invention. Figures 1 to 4 As shown, in one or more embodiments of the present specification, the motion mechanism may include: a base plate 1, a first motion plate 2 provided above the base plate 1, a first drive mechanism 4 connected to the first motion plate 2 via a first direction spring module 3, a second motion plate 5 provided above the first motion plate 2, and a second drive mechanism 6 connected to the second motion plate 5. In some embodiments, the base plate 1 is used as a fixed base for the motion mechanism. In some embodiments, the base plate 1 can be fixed to the upper surface of a structure such as the ground, a bracket, or a base. In other embodiments, the base plate 1 can also be arranged on the lower surface of a structure such as a ceiling or a beam. In other words, the motion mechanism in one or more embodiments of the present specification can be arranged in a forward direction or in a reverse direction (i.e., a suspended arrangement). In some embodiments, the second motion plate 5 is used to achieve connection with a driven component. In some embodiments, the second motion plate 5 can form a carrier plate for carrying a driven component, or the second motion plate 5 can be connected to a carrier plate for carrying a driven component.

[0045] In some embodiments, the two first drive mechanisms 4 are used to drive the first moving plate 2 to move relative to the base plate 1 along the first direction Y or rotate around the third direction Z through the corresponding first direction spring modules 3. In some embodiments, the two first drive mechanisms 4 can be linear drive mechanisms, such as shaft motors.

[0046] In some embodiments, see Figure 7 As shown, the two first drive mechanisms 4 can be arranged in parallel, with the drive components of the two first drive mechanisms 4 arranged in the same direction. In this embodiment, the drive components of the two first drive mechanisms 4 move synchronously in the same direction (for example, the drive components of the two first drive mechanisms 4 extend simultaneously), thereby achieving movement (for example, translation) of the first moving plate 2 relative to the base plate 1 in a first direction Y. In this embodiment, the drive components of the two first drive mechanisms 4 move in opposite directions (for example, the drive component of one first drive mechanism 4 extends while the drive component of the other first drive mechanism 4 retracts), thereby achieving rotation of the first moving plate 2 relative to the base plate 1 about a third direction Z.

[0047] In some embodiments, see Figure 8As shown, the two first drive mechanisms 4 can be arranged in parallel, with the drive components of the two first drive mechanisms 4 arranged in different directions. In this embodiment, the drive components of the two first drive mechanisms 4 move synchronously in opposite directions (for example, the drive component of one first drive mechanism 4 extends a certain distance, while the drive component of the other first drive mechanism 4 retracts the same distance), thereby achieving movement (for example, translation) of the first moving plate 2 relative to the base plate 1 in a first direction Y. In this embodiment, the drive components of the two first drive mechanisms 4 move in the same direction (for example, the drive components of the two first drive mechanisms 4 extend simultaneously), thereby achieving rotation of the first moving plate 2 relative to the base plate 1 about a third direction Z.

[0048] In some embodiments, the first-direction reed module 3 is used to achieve decoupling between the first drive mechanism 4 and the first moving plate 2. In some embodiments, decoupling refers to decomposing the motion of a component (e.g., the first moving plate 2) in its direction of motion into motion in one or more other directions, thereby eliminating or significantly reducing the mutual influence (or coupling) between different degrees of freedom (different directions or types of motion).

[0049] Exemplarily, the two first drive mechanisms 4 are configured to provide power to the first moving plate 2 along the first direction Y, the synchronous movement of the two first drive mechanisms 4 drives the translation of the first moving plate 2, and the differential movement of the two first drive mechanisms 4 drives the rotation of the first moving plate 2. Since the first moving plate 2 may translate, rotate, or rotate while translating, the connection position where the first moving plate 2 is connected to the first drive mechanism 4 may translate or rotate. If the driving part of the first drive mechanism 4 is directly connected to the connection position, problems such as interference between different movements may occur during the translation or rotation process. In some embodiments, the first drive mechanism 4 is connected to the connection position of the first moving plate 2 through the first direction spring module 3, and the decoupling of the first direction spring module 3 avoids problems such as interference between the above-mentioned different movements.

[0050] In some embodiments, the first direction reed module 3 is configured to be flexible with respect to rotation around the third direction Z. In some embodiments, the first direction reed module 3 may be further configured to be flexible with respect to rotation around the second direction X.

[0051] In some embodiments, the second driving mechanism 6 is used to drive the second moving plate 5 to move relative to the first moving plate 2 along the second direction X. In some embodiments, see Figure 5 As shown, the second driving mechanism 6 can be a linear driving mechanism, such as a shaft motor.

[0052] In some embodiments, the second direction X is perpendicular to the first direction Y, the plane XY in which the first and second directions Y lie is coplanar with the base plate 1, and the third direction Z is perpendicular to the first and second directions Y and X. In some embodiments, the first moving plate 2 is parallel to the base plate 1. In some embodiments, the second moving plate 5 is parallel to the first moving plate 2. In other embodiments, the second direction X may intersect with the first direction Y, and the third direction Z is perpendicular to the first and second directions Y and X.

[0053] In one or more embodiments of the present specification, the first moving plate 2 is configured to rotate about a rotation axis, and the two first drive mechanisms 4 are symmetrically arranged with respect to the rotation axis. In some embodiments, the first moving plate 2 can rotate about a rotation axis that provides the aforementioned rotation axis. In some embodiments, a hole is defined in the center of the first moving plate 2, and the rotation axis is disposed within the hole.

[0054] In some embodiments, the first direction reed module 3 is configured such that a portion of the first direction reed module 3 can translate along the first direction Y, allowing the portion of the first direction reed module 3 to translate along with the translation of the first moving plate 2 .

[0055] In some embodiments, the first driving mechanism 4 is configured to provide a linear force along the first direction Y to the corresponding first direction reed module 3 , while being capable of translation along the second direction X.

[0056] In some embodiments, when the two first driving mechanisms 4 drive the first moving plate 2 to rotate, since the shape of the first moving plate 2 is fixed, the span between the two first driving mechanisms 4 will change, thereby causing each first driving mechanism 4 to generate a parasitic motion along the second direction X. For example, see Figure 10 As shown, the length of the first moving plate 2 remains unchanged. The first moving plate 2 extends in the second direction X in the initial state. The driving directions of the two first driving mechanisms 4 are set along the first direction Y. The initial span of the two first driving mechanisms 4 is When the first moving plate 2 rotates by an angle of θ, the span between the two first driving mechanisms 4 changes from the initial span Transformed into a rotation span , < , .

[0057] In some embodiments, the extent of span reduction is related to the initial span value and the rotation angle θ. When the value θ is sufficiently small, the span can be considered unchanged. However, when a larger angle of rotation of the first moving plate 2 is required, the change in span acts on the first drive mechanism 4, causing it to shift or rotate, resulting in a change in the drive direction of the first drive mechanism 4. This, in turn, causes interference between the rotational motion of the first moving plate 2 and the change in the drive direction of the first drive mechanism 4.

[0058] In some embodiments, since the first drive mechanism 4 is configured to be able to translate along the second direction X, the translation provides displacement compensation for the first drive mechanism 4, so that the two first drive mechanisms 4 can adaptively adjust the span of the two first drive mechanisms 4 to avoid rotation of the first drive mechanism 4, so that the driving direction of the two first drive mechanisms 4 can maintain driving along the first direction Y, thereby avoiding interference between the rotational movement of the first moving plate 2 and the change in the driving direction of the first drive mechanism 4.

[0059] In some embodiments, see Figures 7 to 9 As shown, the motion mechanism further includes a parasitic displacement compensation guide module 41, which is disposed between the first drive mechanism 4 and the base plate 1 and is used to guide the first drive mechanism 4 in the second direction X. In some embodiments, the parasitic displacement compensation guide module 41 may include a guide rail extending along the second direction X and a slider matching the guide rail. In some embodiments, the guide rail of the parasitic displacement compensation guide module 41 may be fixedly connected to the base plate 1, and the slider of the parasitic displacement compensation guide module 41 may be fixedly connected to the first drive mechanism 4, thereby guiding the translation of the first drive mechanism 4 in the second direction X.

[0060] In some embodiments, the first drive mechanism 4 can be arranged on the first drive mechanism seat, and the slider of the parasitic displacement compensation guide module 41 can be fixedly connected to the first drive mechanism seat. In some embodiments, the number of the parasitic displacement compensation guide module 41 can be multiple.

[0061] In one or more embodiments of this specification, see Figure 9 As shown, the first direction spring module 3 includes: a first direction compensation decoupling mechanism 31 connected to the first driving mechanism 4 and a first direction differential decoupling mechanism 32 connecting the first direction compensation decoupling mechanism 31 and the first moving plate 2 .

[0062] In some embodiments, the first direction compensation decoupling mechanism 31 is configured to be rigid in the first direction Y and flexible with respect to rotation in the second direction X and rotation in the third direction Z.

[0063] In some embodiments, see Figure 9, combined with Figure 11 、 Figure 12 As shown, the first direction compensating decoupling mechanism 31 may include: a first direction compensating decoupling mechanism first structural member 311, a first direction compensating decoupling mechanism first reed 312, a first direction compensating decoupling mechanism second structural member 313, and a first direction compensating decoupling mechanism second reed 314. In some embodiments, the first direction compensating decoupling mechanism first structural member 311 is directly or indirectly fixedly connected to the driving portion of the first driving mechanism 4. In some embodiments, the first direction compensating decoupling mechanism first reed 312 connects the first direction compensating decoupling mechanism first structural member 311 and the first direction compensating decoupling mechanism second structural member 313. In some embodiments, the first direction compensating decoupling mechanism second reed 314 directly or indirectly connects the first direction compensating decoupling mechanism second structural member 313 and the first direction differential decoupling mechanism 32.

[0064] In some embodiments, the first reed 312 of the first direction compensation decoupling mechanism may be parallel to the XY plane, allowing the second structural member 313 of the first direction compensation decoupling mechanism to rotate around the second direction X relative to the first structural member 311 of the first direction compensation decoupling mechanism.

[0065] In some embodiments, the second reed 314 of the first direction compensation decoupling mechanism may be parallel to the YZ plane, which allows the first direction differential decoupling mechanism 32 to rotate around the third direction Z relative to the second structural member 313 of the first direction compensation decoupling mechanism.

[0066] The thickness, length, and other dimensions of the first and second reeds 312, 314 of the first-direction compensating decoupling mechanism affect their stiffness and require reasonable design to ensure high stiffness in the first direction Y and low stiffness in other directions. In some embodiments, the first and second reeds 312, 314 of the first-direction compensating decoupling mechanism can be designed using simulation.

[0067] In some embodiments, the first direction compensation decoupling mechanism 31 can be used to compensate for the driving deviation and / or guiding direction deviation of the first driving mechanism 4 caused by insufficient machining accuracy and / or installation accuracy.

[0068] In some embodiments, the first direction differential decoupling mechanism 32 is configured to be rigid in the third direction Z, rigid for rotation around the first direction Y and the second direction X, and flexible for rotation around the third direction Z.

[0069] In some embodiments, the first directional differential decoupling mechanism 32 includes a first member 321, a second member 322, and a first directional differential decoupling reed 323 connecting the first and second members 321, 322. In some embodiments, the first and second members 321, 322 are both rigid members. In some embodiments, the first member 321 connects the first moving plate 2 and the first directional compensating decoupling mechanism 31.

[0070] In some embodiments, the first member 321 can be C-shaped. In some embodiments, the second member 322 can be substantially rectangular. In some embodiments, one end of the first member 321 can protrude from the second member to form a connection structure with the first direction compensating decoupling mechanism 31 (e.g., the first direction compensating decoupling mechanism second reed 314 of the first direction compensating decoupling mechanism 31).

[0071] In some embodiments, the second member 322 can be arranged within the C-shaped range of the first member 321. In some embodiments, a gap is provided between the second member 322 and the first member 321. Exemplarily, a gap is provided between the second member 322 and the first member 321 in both the first direction Y and the second direction X to allow the second member 322 to rotate relative to the first member 321 about the third direction Z.

[0072] In some embodiments, the second member 322 is configured to be capable of translation along the first direction Y. In some embodiments, the first-direction differential decoupling mechanism 32 further includes a first-direction guide module 324, which is disposed between the second member 322 and the base plate 1 and is used to guide the second member 322 in the first direction Y. In some embodiments, the first-direction guide module 324 may include a guide rail extending along the first direction Y and a slider matching the guide rail. In some embodiments, the guide rail of the first-direction guide module 324 may be fixedly connected to the base plate 1, and the slider of the first-direction guide module 324 may be fixedly connected to the second member 322, thereby guiding the translation of the second member 322 in the first direction Y.

[0073] In some embodiments, the first direction differential decoupling reed 323 is configured to be rigid in the third direction Z, rigid for rotation around the first direction Y and the second direction X, and flexible for rotation around the third direction Z.

[0074] In some embodiments, see Figure 9 , combined with Figure 11 、 Figure 12As shown, the first-direction differential decoupling reed 323 includes a first portion 3231 extending in the first direction Y and a second portion 3232 connected to the first portion 3231 and extending in the second direction X. In some embodiments, one of the first portion 3231 and the second portion 3232 is fixedly connected to the first member 321, and the other of the first portion 3231 and the second portion 3232 is fixedly connected to the second member 322.

[0075] In some embodiments, the first-direction reed module 3 includes one or more first-direction differential decoupling reed groups. In some embodiments, each first-direction differential decoupling reed group includes two first-direction differential decoupling reeds 323 arranged axially symmetrically. In some embodiments, the two first-direction differential decoupling reeds 323 can be arranged axially symmetrically with respect to an axis of symmetry extending along the second direction X (e.g., an axis of symmetry located in the middle of the first-direction reed module 3).

[0076] In some embodiments, see Figure 11 As shown, the first direction differential decoupling mechanism 32 includes two axisymmetrically arranged first direction differential decoupling reeds 323 (i.e., a first direction differential decoupling reed group). In some embodiments, the two first direction differential decoupling reeds 323 are both arranged on the side of the second member 322 facing the first drive mechanism 4.

[0077] In some embodiments, see Figure 11 As shown, one of the first and second components 321, 322 is provided with a reed retaining structure 325, and the other of the first and second components 321, 322 is provided with a reed retaining groove 326 that matches the shape of the reed retaining structure 325. In some embodiments, the reed retaining structure 325 and the reed retaining groove 326 match to limit the position of the first component 321 relative to the second component 322 in the first direction Y, the second direction X, and / or the rotational position about the third direction Z. In some embodiments, the reed retaining groove 326 is located on the side of the second component 322 facing away from the first drive mechanism 4. In some embodiments, the reed retaining structure 325 is T-shaped, with a gap between the reed retaining structure 325 and the reed retaining groove 326 in both the first direction Y and the second direction X, allowing and limiting the rotation of the reed retaining structure 325 relative to the reed retaining groove 326 about the third direction Z.

[0078] In some embodiments, the reed limiting structure 325 and the reed limiting groove 326 can be used to prevent unexpected situations from causing plastic deformation of the weak parts of the first direction differential decoupling reed 323. The shape of the reed limiting structure and the reserved gap between the reed limiting structure and the reed limiting groove can be reasonably designed according to actual needs.

[0079] In other embodiments, see Figure 12 As shown, the first direction differential decoupling mechanism 32 includes four groups of first direction differential decoupling springs, each group of which includes two first direction differential decoupling springs 323 arranged symmetrically. In some embodiments, one group of the first direction differential decoupling springs is arranged on the side of the second member 322 facing the first drive mechanism 4, and the remaining three groups of the first direction differential decoupling springs are arranged on the side of the second member 322 facing away from the first drive mechanism 4. In some embodiments, see Figure 12 As shown in the first direction differential decoupling reed group located in the middle of the upper side, in the same first direction differential decoupling reed group, two first direction differential decoupling reeds 323 can share the same second portion 3232 .

[0080] It should be noted that the increase in the number of the first-direction differential decoupling reeds 323 can enhance the stiffness of the first-direction differential decoupling mechanism 32 in the third direction Z.

[0081] In other embodiments, see Figure 12 As shown, one of the first member 321 and the second member 322 is provided with two reed limiting structures 325, and the other of the first member 321 and the second member 322 is provided with two reed limiting grooves 326 that match the shape of the reed limiting structures 325. In some embodiments, the reed limiting structures 325 and the reed limiting grooves 326 match each other to limit the position of the first member 321 relative to the second member 322 in the first direction Y, the second direction X, and / or the rotational position around the third direction Z. In some embodiments, see Figure 12 As shown, two reed limiting grooves 326 are respectively opened at the left and right ends of the second component 322. In some embodiments, the reed limiting structure 325 is T-shaped, and the reed limiting structure 325 and the reed limiting groove 326 have gaps in the first direction Y and the second direction X, allowing and limiting the rotation of the reed limiting structure 325 relative to the reed limiting groove 326 around the third direction Z.

[0082] In other embodiments, the reed limiting structure 325 and the reed limiting groove 326 can be used to prevent unexpected situations from causing plastic deformation of weak parts of the first direction differential decoupling reed 323. The shape of the reed limiting structure and the reserved gap between the reed limiting structure and the reed limiting groove can be reasonably designed according to actual needs.

[0083] In yet other embodiments, the first-direction differential decoupling mechanism 32 may be provided with other numbers of first-direction differential decoupling reeds 323, such as three, five, seven, or two, three, or five groups. In yet other embodiments, the first-direction differential decoupling mechanism 32 may be provided with other numbers of reed limiting structures 325 and reed limiting slots 326, such as three, four, or five.

[0084] In one or more embodiments of this specification, see Figure 8 As shown, the two first drive mechanisms 4 are arranged in mirror-symmetry with respect to a plane containing the rotation axis. In one or more embodiments, the first direction spring modules 3 corresponding to the two first drive mechanisms 4 are also arranged in mirror-symmetry with respect to a plane containing the rotation axis. In this embodiment, the mirror-image arrangement of the two first drive mechanisms 4 allows the associated wiring harnesses of the two first drive mechanisms 4 to exit from the same side, simplifying wiring. However, this requires the provision of additional mirror-image processed parts (i.e., at least two mirror-image first direction spring modules 3 are required).

[0085] In one or more embodiments of this specification, see Figure 9 As shown, the two first drive mechanisms 4 are centrally symmetrically arranged relative to a point on the rotation axis. In one or more embodiments, the first direction spring modules 3 corresponding to the two first drive mechanisms 4 are also centrally symmetrically arranged relative to a point on the rotation axis. In this embodiment, the centrally symmetrical arrangement of the two first drive mechanisms 4 allows the two first drive mechanisms 4 and their corresponding first direction spring modules 3 to use identical parts, eliminating the need for additional mirror-machined parts. However, this results in the motor output directions of the first drive mechanisms 4 being located on opposite sides.

[0086] In some embodiments, the two first driving mechanisms 4 can be arranged in a mirror-symmetrical arrangement or a center-symmetrical arrangement according to actual requirements (such as environmental requirements, processing cost requirements, etc.).

[0087] In one or more embodiments of this specification, see Figures 1 to 5 As shown, the second drive mechanism 6 can drive the second moving plate 5 to move relative to the first moving plate 2 in the second direction X via the second direction compensation decoupling mechanism 61. In some embodiments, a slot is defined in the second moving plate 5, and the second drive mechanism 6 is disposed within the slot. In some embodiments, the housing of the second drive mechanism 6 is fixedly connected to the first moving plate 2, and the drive portion of the second drive mechanism 6 is fixedly connected to the second moving plate 5.

[0088] In some embodiments, the second direction compensation decoupling mechanism 61 is configured to be rigid in the second direction X and flexible with respect to rotation in the first direction Y and rotation in the third direction Z.

[0089] In some embodiments, see Figure 6 As shown, the second direction compensating decoupling mechanism 61 may include: a first structural member 611 of the second direction compensating decoupling mechanism, a first reed 612 of the second direction compensating decoupling mechanism, a second structural member 613 of the second direction compensating decoupling mechanism, and a second reed 614 of the second direction compensating decoupling mechanism. In some embodiments, the first structural member 611 of the second direction compensating decoupling mechanism is directly or indirectly fixedly connected to the driving portion of the second driving mechanism 6. In some embodiments, the first reed 612 of the second direction compensating decoupling mechanism connects the first structural member 611 of the second direction compensating decoupling mechanism and the second structural member 613 of the second direction compensating decoupling mechanism. In some embodiments, the second reed 614 of the second direction compensating decoupling mechanism is directly or indirectly connected to the second structural member 613 of the second direction compensating decoupling mechanism and the second moving plate 5.

[0090] In some embodiments, the first reed 612 of the second direction compensation decoupling mechanism may be parallel to the XY plane, allowing the second structural member 613 of the second direction compensation decoupling mechanism to rotate around the first direction Y relative to the first structural member 611 of the second direction compensation decoupling mechanism.

[0091] In some embodiments, the second reed 614 of the second direction compensation decoupling mechanism may be parallel to the XZ plane, which allows the second moving plate 5 to rotate around the third direction Z relative to the second structural member 613 of the second direction compensation decoupling mechanism.

[0092] The thickness, length, and other dimensions of the first reed 612 and the second reed 614 of the second-direction compensating decoupling mechanism affect their stiffness and require reasonable design to ensure high stiffness in the second direction X and low stiffness in other directions. In some embodiments, the first reed 612 and the second reed 614 of the second-direction compensating decoupling mechanism can be designed using simulation.

[0093] In some embodiments, the second direction compensation decoupling mechanism 61 can be used to compensate for the driving deviation and / or guiding direction deviation of the second driving mechanism 6 caused by insufficient processing accuracy and / or installation accuracy.

[0094] In one or more embodiments of this specification, see Figure 4 、 Figure 7 、 Figure 8 As shown, the motion mechanism further includes: a first direction intermediate guide module 7 provided on the base plate 1. In some embodiments, the first direction intermediate guide module 7 provides the above-mentioned rotation axis. In some embodiments, the first direction intermediate guide module 7 can be arranged at the geometric center of the first motion plate 2.

[0095] In some embodiments, see Figures 13 to 16 As shown, the first-direction intermediate guide module 7 includes an intermediate guide rail 71 fixedly connected to the base plate 1, an intermediate guide slider 72 disposed on the intermediate guide rail 71, and a rotating member 73 fixedly connected to the intermediate guide slider 72. The first moving plate 2 can rotate relative to the rotating member about the third direction Z. In some embodiments, the rotating member 73 provides the aforementioned rotation axis, and the first moving plate 2 is configured to rotate about the rotation axis.

[0096] In some embodiments, the first-direction intermediate guide module 7 limits the movement of the first moving plate 2 relative to the base plate 1 in the second direction X, but does not limit the movement of the first moving plate 2 relative to the base plate 1 in the first direction Y. In some embodiments, the first-direction intermediate guide module 7 and the first moving plate 2 can move along the first direction Y as a whole.

[0097] In some embodiments, the rotating member 73 may include a bearing mounting seat 731 fixedly connected to the intermediate guide slider 72, a bearing pressure cover 732 disposed on the bearing mounting seat 731, and a bearing 733 disposed between the bearing mounting seat 731 and the bearing pressure cover 732. In some embodiments, the first moving plate 2 has an interference fit with the outer ring of the bearing 733, thereby achieving a connection between the first moving plate 2 and the bearing 733.

[0098] In some embodiments, the bearing mount 731 can have a multi-step structure, such as a two-step structure or a three-step structure. In some embodiments, the bearing 733 is sleeved on the bearing mount 731 and can rotate relative to the bearing mount 731. In some embodiments, the bearing cover 732 is fixedly connected to the bearing mount 731, for example, by a threaded connector. In some embodiments, a bearing mounting groove for mounting the bearing 733 is formed between the bearing cover 732 and the bearing mount 731. In some embodiments, the bearing 733 is confined within the bearing mounting groove. In some embodiments, the bearing 733 can be a deep groove ball bearing.

[0099] In some embodiments, the first moving plate 2 is configured to be displaceable and fixed relative to the bearing 733 in the third direction Z. Exemplarily, the thickness of the first moving plate 2 is greater than the thickness of the bearing 733 to facilitate adjustment of the position of the first moving plate 2 in the third direction Z. In some embodiments, the first moving plate 2 has a through hole along the third direction Z, and the bearing 733 can be disposed within the through hole, and its position within the through hole can be adjusted.

[0100] In other embodiments, a step structure may be arranged inside the through hole of the first moving plate 2 , while no step structure may be arranged at the bearing mounting seat 731 .

[0101] In some embodiments, when the first driving mechanism 4 drives the first moving plate 2 to translate along the first direction Y, the first moving plate 2 drives the bearing 733 and further drives the bearing mounting seat 731 to move along the first direction Y based on the guiding action of the intermediate guide rail 71 and the intermediate guide slider 72.

[0102] In some embodiments, when the first moving plate 2 generates movement or vibration along the second direction X, the first moving plate 2 drives the bearing 733 and further drives the bearing mounting seat 731 to generate movement or vibration along the second direction X. This movement or vibration along the second direction X is prevented by the guiding action of the intermediate guide rail 71 and the intermediate guide slider 72, thereby stabilizing the first moving plate 2 in the second direction X. Therefore, the first-direction intermediate guide module 7 can improve the rigidity of the first moving plate 2 in the non-movement direction (i.e., the second direction X).

[0103] In some embodiments, see Figures 15 and 16 As shown, the bearing mount 731 has one or more bearing mount extension structures 7311. In some embodiments, one end of the bearing mount 731 extends outward to form the bearing mount extension structure 7311. In other embodiments, both ends of the bearing mount 731 extend outward to form two bearing mount extension structures 7311.

[0104] In some embodiments, the motion mechanism further includes a first-direction position measurement mechanism 81, which is disposed on a bearing mount extension structure 7311. The first-direction position measurement mechanism 81 is used to measure the displacement of the first motion plate 2 relative to the base plate 1 in the first direction Y. Since the bearing mount extension structure 7311 moves with the movement of the first motion plate 2 in the first direction Y when the first motion plate 2 moves in the first direction Y, the first-direction position measurement mechanism 81 can be disposed between the bearing mount extension structure 7311 and the base plate 1.

[0105] In some embodiments, see Figure 16 As shown, the first direction position measurement mechanism 81 includes a first direction position measurement readhead 811 and a first direction position measurement scale 812. In some embodiments, the first direction position measurement scale 812 of the first direction position measurement mechanism 81 is disposed on the lower surface of a bearing mounting seat extension structure 7311. In some embodiments, the first direction position measurement readhead 811 of the first direction position measurement mechanism 81 is disposed on the upper surface of the base plate 1.

[0106] In some embodiments, see Figures 15 and 16As shown, the motion mechanism further includes a third-direction rotational position measurement mechanism 82, which is disposed on another bearing mount extension structure 7311. The third-direction rotational position measurement mechanism 82 is used to measure the rotation of the first motion plate 2 relative to the base plate 1 in the third direction Z. Because the bearing mount extension structure 7311 does not rotate when the first motion plate rotates in the third direction Z due to the guidance of the intermediate guide rail 71 and the intermediate guide slider 72, the third-direction rotational position measurement mechanism 82 can be disposed between the bearing mount extension structure 7311 and the first motion plate 2.

[0107] In some embodiments, see Figure 16 As shown, the third-directional rotation position measurement mechanism 82 includes a third-directional rotation position measurement reader 821 and a third-directional rotation position measurement scale 822. In some embodiments, the third-directional rotation position measurement scale 822 of the third-directional rotation position measurement mechanism 82 is disposed on the side of another bearing mounting seat extension structure 7311. In some embodiments, the third-directional rotation position measurement scale 822 of the third-directional rotation position measurement mechanism 82 can be a circular arc scale. In some embodiments, the third-directional rotation position measurement reader 821 of the third-directional rotation position measurement mechanism 82 is disposed on the upper surface of the first moving plate 2.

[0108] It should be noted that, since the third directional rotation position measuring head 821 and the third directional rotation position measuring scale 822 of the third directional rotation position measuring mechanism 82 follow the first moving plate 2 when the first moving plate 2 moves relative to the base plate 1 in the first direction Y, the third directional rotation position measuring head 821 will not separate from the third directional rotation position measuring scale 822, which will not cause signal loss and has a larger measurement range. In some related embodiments, if the third directional rotation position measuring head of the third directional rotation position measuring mechanism is disposed on the upper surface of the base plate 1 and the third directional rotation position measuring scale of the third directional rotation position measuring mechanism can be disposed on the lower surface of the first moving plate 2, then due to the displacement in the first direction Y between the first moving plate 2 and the base plate 1, the third directional rotation position measuring scale of the third directional rotation position measuring mechanism may separate from the reading range of the third directional rotation position measuring head of the third directional rotation position measuring mechanism, thereby limiting the travel of the first moving plate 2 in the first direction Y.

[0109] Similarly, since the first direction position measuring mechanism 81 is arranged at the first direction intermediate guide module 7, and the first direction intermediate guide module 7 is located at the geometric center of the first moving plate 2 or near the geometric center, when the first moving plate 2 rotates relative to the base plate 1, the linear displacement of the first direction position measuring mechanism 81 is smaller than when it is arranged at the side of the first moving plate 2. Therefore, the first direction position measurement head 811 of the first direction position measuring mechanism 81 is not easy to separate from the first direction position measurement grating scale 812, which will not cause signal loss and has a larger measurement range.

[0110] In one or more embodiments of the present specification, the first direction position measurement mechanism may also be arranged at a location other than the first direction intermediate guide module 7. In some embodiments, the first direction position measurement mechanism may be arranged between the base plate 1 and the first moving plate 2. For example, the first direction position measurement head of the first direction position measurement mechanism may be provided on the upper surface of the base plate 1, and the first direction position measurement scale of the first direction position measurement mechanism may be provided on the lower surface of the first moving plate 2. In some embodiments, the first direction position measurement mechanism may be located on one or both sides of the first direction intermediate guide module 7.

[0111] In some embodiments, the third-direction rotation position measurement mechanism may also be arranged at a location other than the first-direction intermediate guide module 7. In some embodiments, the third-direction rotation position measurement mechanism may be arranged between the base plate 1 and the first moving plate 2. For example, the third-direction rotation position measurement head of the third-direction rotation position measurement mechanism may be arranged on the upper surface of the base plate 1, and the third-direction rotation position measurement scale of the third-direction rotation position measurement mechanism may be arranged on the lower surface of the first moving plate 2. In some embodiments, the third-direction rotation position measurement mechanism may be located on one or both sides of the first-direction intermediate guide module 7.

[0112] In one or more embodiments of the present specification, the motion mechanism may further include: a second direction position measuring mechanism, the second direction position measuring mechanism being used to measure the displacement of the second motion plate 5 relative to the first motion plate 2 in the second direction X. In some embodiments, the second direction position measuring mechanism may be arranged between the second motion plate 5 and the first motion plate 2. Exemplarily, the second direction position measuring head of the second direction position measuring mechanism may be provided on the upper surface of the first motion plate 2, and the second direction position measuring scale of the second direction position measuring mechanism may be provided on the lower surface of the second motion plate 5.

[0113] In one or more embodiments of this specification, since the motion mechanisms in the above one or more embodiments adopt mechanical guidance rather than air floating guidance, the motion mechanisms not only reduce the air path, but also make the motion mechanisms suitable for vacuum environments.

[0114] In one or more embodiments of this specification, see Figures 1 to 4 , combined with Figure 17 、 Figure 18 As shown, the motion mechanism may further include: a brake assembly 9, which is used to lock the position of the second motion plate 5 relative to the base plate 1 after the first motion plate 2 and / or the second motion plate 5 move into position, and the brake assembly 9 is used to lock the position of the driven component relative to the base plate 1.

[0115] In some embodiments, the brake assembly 9 includes a fixed base 91 fixedly connected to the second moving plate 5, an air-floating brake block 92 disposed between the base plate 1 and the first moving plate 2, and a brake spring 93 connecting the fixed base 91 and the air-floating brake block 92. In some embodiments, the brake spring 93 is configured to be flexible in the third direction Z.

[0116] In some embodiments, see Figure 18 As shown, the brake reed 93 includes a first brake reed portion 931 fixedly connected to the fixed base 91 and a second brake reed portion 932 fixedly connected to the air-floating brake block 92. The first brake reed portion 931 and the second brake reed portion 932 are interconnected. In some embodiments, the first brake reed portion 931 and the second brake reed portion 932 are integrally connected. In some embodiments, an angle is formed between the first brake reed portion 931 and the second brake reed portion 932. In some embodiments, the angle between the first brake reed portion 931 and the second brake reed portion 932 can be acute. In some embodiments, the first brake reed portion 931 and the second brake reed portion 932 adjust the angle between them through elastic deformation, thereby achieving flexibility in the third direction Z.

[0117] In some embodiments, the air-floating brake block 92 is configured to provide positive pressure, negative pressure, or no air to the base plate 1. In some embodiments, when the air-floating brake block 92 does not provide any air to the base plate 1, it allows the first and second moving plates 2 and 5 to move relative to the base plate 1. In some embodiments, when the air-floating brake block 92 provides positive pressure to the base plate 1, it allows the first and second moving plates 2 and 5 to move relative to the base plate 1 while reducing or preventing the possibility of scratches between the air-floating brake block 92 and the base plate 1. In some embodiments, when the air-floating brake block 92 provides negative pressure to the base plate 1, it adheres to the base plate 1, securing the second moving plate 5 relative to the base plate 1 and forming a locked position.

[0118] In some embodiments, the air-floating brake block 92 may have a positive-pressure region for providing positive pressure and a negative-pressure region for providing negative pressure.

[0119] While the basic concepts have been described above, it will be apparent to those skilled in the art that the detailed disclosure is merely illustrative and does not limit this specification. Although not explicitly stated herein, various modifications, improvements, and revisions to this specification may be made by those skilled in the art. Such modifications, improvements, and revisions are taught in this specification and remain within the spirit and scope of the exemplary embodiments of this specification.

Claims

1. A motion mechanism, characterized in that: include: A base plate, a first moving plate disposed above the base plate, a first driving mechanism connected to the first moving plate via a first direction spring module, a second moving plate disposed above the first moving plate, and a second driving mechanism connected to the second moving plate; The two first driving mechanisms are used to drive the first moving plate to move along the first direction or rotate around the third direction relative to the base plate through the corresponding first direction spring modules; The second driving mechanism is used to drive the second moving plate to move relative to the first moving plate along a second direction; The second direction is perpendicular to the first direction, a plane where the first direction and the second direction are located is coplanar with the bottom plate, and the third direction is perpendicular to the first direction and the second direction.

2. The motion mechanism according to claim 1, characterized in that: The first moving plate is configured to be rotatable about a rotation axis, and the two first driving mechanisms are symmetrically arranged relative to the rotation axis; The first direction reed module is configured such that: a portion of the first direction reed module is capable of translationally moving along the first direction; The first driving mechanism is configured to provide linear power along the first direction to the corresponding first-direction reed module, and simultaneously enable translation along the second direction.

3. The motion mechanism according to claim 2, characterized in that: The first direction spring module includes: a first direction compensation decoupling mechanism connected to the first driving mechanism and a first direction differential decoupling mechanism connecting the first direction compensation decoupling mechanism and the first moving plate; The first direction compensating decoupling mechanism is configured to: have rigidity in the first direction and have flexibility with respect to rotation around the second direction and rotation around the third direction; The first-direction differential decoupling mechanism is configured to have rigidity in the third direction, rigidity with respect to rotation around the first direction and rotation around the second direction, and flexibility with respect to rotation around the third direction.

4. The motion mechanism according to claim 3, characterized in that: The first direction differential decoupling mechanism includes: a first component, a second component, and a first direction differential decoupling reed connecting the first component and the second component; The first member and the second member are both rigid members; The first member connects the first moving plate and the first direction compensation decoupling mechanism; The second member is configured to: be capable of translating along the first direction; The first-direction differential decoupling spring is configured to have rigidity in the third direction, rigidity with respect to rotation around the first direction and rotation around the second direction, and flexibility with respect to rotation around the third direction.

5. The motion mechanism according to claim 4, characterized in that: The first-direction differential decoupling mechanism further includes a first-direction guiding module, which is disposed between the second component and the base plate and is used to guide the second component in the first direction.

6. The motion mechanism according to claim 4, characterized in that: The first-direction differential decoupling reed includes a first portion extending in a first direction and a second portion connected to the first portion and extending in a second direction; One of the first portion and the second portion is fixedly connected to the first member, and the other of the first portion and the second portion is fixedly connected to the second member.

7. The motion mechanism according to claim 4, characterized in that: Also includes: A parasitic displacement compensation guide module is provided between the first driving mechanism and the base plate, and is used to guide the first driving mechanism in the second direction.

8. The motion mechanism according to any one of claims 4 to 7, characterized in that: The first direction differential decoupling mechanism includes one or more first direction differential decoupling spring groups; Each of the first direction differential decoupling spring groups includes two first direction differential decoupling springs that are axially symmetrically arranged.

9. The motion mechanism according to any one of claims 4 to 7, characterized in that: One of the first member and the second member is provided with one or more reed limiting structures, and the other of the first member and the second member is provided with one or more reed limiting grooves matching the shape of the reed limiting structures; The reed limiting structure matches the reed limiting groove and is used to limit the position of the first component relative to the second component in the first direction, the second direction, and / or the rotational position around the third direction.

10. The motion mechanism according to claim 1, characterized in that: Also includes: A first direction intermediate guide module is provided on the bottom plate, and the first direction intermediate guide module includes: an intermediate guide rail fixedly connected to the base plate, an intermediate guide slider provided on the intermediate guide rail, and a rotating member fixedly connected to the intermediate guide slider, wherein the first moving plate is capable of rotating about a third direction relative to the rotating member; The rotating member provides a rotation axis, and the first moving plate is configured to be rotatable about the rotation axis.

11. The motion mechanism according to claim 10, characterized in that: The rotating component includes: a bearing mounting seat fixedly connected to the intermediate guide slider, a bearing pressure cover provided on the bearing mounting seat, and a bearing provided between the bearing mounting seat and the bearing pressure cover; The first moving plate is interference fit with the bearing; The first moving plate is configured to be displaceable in the third direction relative to the bearing and fixed.

12. The motion mechanism according to claim 11, characterized in that: The bearing mounting seat is provided with one or more bearing mounting seat extension structures; The motion mechanism further comprises: a first direction position measuring mechanism and / or a third direction rotation position measuring mechanism; The first direction position measuring mechanism is provided on one of the bearing mounting seat extension structures, and the third direction rotation position measuring mechanism is provided on the other of the bearing mounting seat extension structures.

13. The motion mechanism according to claim 1, characterized in that: Also includes: A brake assembly, comprising: a fixed base fixedly connected to the second moving plate, an air-floating brake block provided between the bottom plate and the first moving plate, and a brake spring connecting the fixed base and the air-floating brake block; The air-floating brake block is configured to provide positive pressure, negative pressure or no gas to the bottom plate; The brake reed is configured to be flexible in the third direction.

14. The motion mechanism according to any one of claims 2, 10 to 12, characterized in that: The two first driving mechanisms are arranged in mirror symmetry with respect to a plane where the rotation axis is located; Alternatively, the two first driving mechanisms are arranged centrally symmetrically with respect to a point on the rotation axis.

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