Conveying device

Abstract

The purpose of the present invention is to provide a transport device capable of adjusting the position of an end portion of a base material in the width direction. Specifically, the present invention is a transport device provided with: a transport unit that transports a belt-shaped base material in the longitudinal direction of the base material; and at least one group of conveyor units that assist the conveyance of the base material by the conveyance unit, and that conveys the base material in the traveling direction of the suction unit that sucks the base material by causing the belt member to travel in a state in which the suction unit formed on the belt member sucks a predetermined surface of the base material conveyed by the conveyance unit, the conveyance device is configured in such a manner that the set of conveyor units are disposed so that the prescribed surfaces of the base material are adsorbed to the adsorption parts of the belt member in the vicinity of both end portions of the base material in the width direction of the base material, and in the set of conveyor units, the prescribed surfaces of the base material are adsorbed to the adsorption parts of the belt member. A traveling direction adjusting part for adjusting the traveling direction of the suction part of each of the belt members is provided.

Description

Technical Field

[0001] The present invention relates to a conveying device for conveying a belt-shaped substrate. Background Art

[0002] Lithium-ion batteries are produced by applying a slurry of electrode material to a strip of substrate, such as aluminum foil or copper foil, fed in a roll-to-roll manner. This coating is then dried to form the positive and negative electrodes. Furthermore, to achieve higher capacity in lithium-ion batteries, a uniform coating thickness is required on both sides of the substrate.

[0003] As a conventional technology, the following patent document 1 discloses a double-sided coating device that forms a coating film by coating both sides of a substrate conveyed by a conveying device with a slurry. The conveying device comprises: a plurality of rollers that convey the substrate while applying a predetermined tension to the substrate; and a suction conveyor that assists in conveying the substrate by sucking and holding the substrate.

[0004] In this double-sided coating device, a first coating unit for coating the surface of a substrate with slurry is arranged in a manner opposite to the substrate (which is wound around a support roller as one of the multiple rollers of the conveying device at a predetermined angle), thereby coating the surface of the substrate with slurry while maintaining a constant interval between the first coating unit and the substrate. Thus, a coating film with a certain thickness is formed on the surface of the substrate. In addition, in the double-sided coating device, a second coating unit for coating the back side of the substrate with slurry is arranged in a manner opposite to the substrate held by a suction conveyor from the surface side of the substrate, thereby coating the back side of the substrate with slurry while maintaining a constant interval between the second coating unit and the substrate. Thus, a coating film with a certain thickness is formed on the back side of the substrate.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application Laid-Open No. 2012-040467 Summary of the Invention

[0008] Problems to be solved by the invention

[0009] However, the aforementioned conveying device suffers from the problem of being unable to convey the substrate in a stable state. Specifically, in order to prevent coating defects caused by the suction conveyor contacting the undried coating film formed on the substrate, the suction conveyor is pre-positioned and fixed in a position where it can attract and hold the uncoated portion of the substrate. Consequently, even if the widthwise end of the substrate shifts due to the weight of the formed coating film and the substrate vibrating near the front of the suction conveyor on the substrate's conveying path, the suction conveyor cannot adjust the widthwise end of the substrate to its normal position.

[0010] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a conveying device capable of adjusting the position of an end portion in the width direction of a substrate.

[0011] Means used to solve problems

[0012] The conveying device of the present invention, which solves the above-mentioned problems, comprises: a conveying part, which conveys a strip-shaped substrate in the length direction of the substrate; and at least one group of conveyor units, which assist the conveying part in conveying the substrate, and conveys the substrate in the travel direction of the adsorption part having the substrate adsorbed thereon by causing the belt part to move in a state in which the adsorption part formed on the belt part adsorbs a specified surface of the substrate conveyed by the conveying part, and is characterized in that the group of conveyor units is configured to adsorb the specified surface of the substrate to the adsorption part of the belt part near both end portions of the substrate in the width direction of the substrate, and the group of conveyor units is provided with a travel direction adjustment part for adjusting the travel direction of the adsorption part of each belt part.

[0013] According to the above-described conveying device, the travel direction adjustment unit can adjust the travel direction of the suction portions of each belt member of a set of conveyor units so that a predetermined surface of the substrate is suctioned to the suction portion of the belt member near both ends of the substrate in the width direction of the substrate. Therefore, the ends of the substrate can be pulled in the adjusted travel direction of the suction portions of each belt member. Thus, the position of the ends of the conveyed substrate in the width direction can be adjusted.

[0014] Furthermore, the transport device may further include an end position detection unit that detects positions of both end portions of the substrate in the width direction, and the travel direction adjustment unit may adjust the travel direction of the suction unit based on a detection result of the end position detection unit.

[0015] According to this configuration, the traveling direction adjusting unit adjusts the traveling direction of the adsorption unit based on the detection result of the end position detecting unit. Therefore, the position of the end portion in the width direction of the substrate can be adjusted more accurately.

[0016] Furthermore, the traveling direction adjusting unit may adjust the traveling direction of the adsorption unit so that the traveling direction of the adsorption unit is directed outward in the conveying direction of the substrate by the conveying unit in the width direction of the substrate.

[0017] According to this configuration, the base material can be pulled toward the outside of each end portion in the width direction of the base material by a set of conveyor units, and thus overhang of the base material can be alleviated.

[0018] Furthermore, the set of conveyor units may be provided with a speed adjustment unit that adjusts a relative speed of each of the adsorption units with respect to the substrate according to the travel direction of each of the adsorption units adjusted by the travel direction adjustment unit.

[0019] According to this structure, the speed adjustment part can adjust the travel speed of the adsorption part to avoid the substrate being transported being blocked on the adsorption part of the belt parts of each of a group of conveyor units, so that the position of the end part of the substrate in the width direction can be adjusted without hindering the conveying of the substrate by the conveying part.

[0020] Furthermore, the transport device may further include a first moving mechanism that moves the conveyor unit forward and backward in a transport direction in which the substrate is transported to the transport section.

[0021] According to this configuration, the first moving mechanism can move each of the conveyor units forward and backward in the substrate conveying direction, and thus the direction in which the end of the substrate is pulled by each conveyor unit can be set to a wide range.

[0022] Furthermore, the conveying device may further include a second moving mechanism that moves the conveyor unit in a direction approaching the predetermined surface of the substrate and in a direction away from the predetermined surface of the substrate.

[0023] According to this configuration, the position of the substrate can be adjusted also in a direction perpendicular to a predetermined surface of the substrate.

[0024] The conveying device may further include an overhang amount detecting unit that detects a height position of a center portion of the substrate in a width direction of the substrate, and the traveling direction adjusting unit may adjust the traveling direction of the adsorption unit based on a detection result of the overhang amount detecting unit.

[0025] According to this configuration, the traveling direction adjusting unit adjusts the traveling direction of the adsorption unit based on the detection result of the overhang amount detecting unit, and thus overhang of the substrate can be easily alleviated.

[0026] Effects of the Invention

[0027] According to the conveying device of the present invention, the position of the end portion in the width direction of the substrate can be adjusted. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is a diagram schematically showing a double-sided coating system including a conveying device according to one embodiment of the present invention.

[0029] Figure 2 1 and 2 are views showing a conveyor unit included in a conveying device according to an embodiment of the present invention. (a) is a side view of the conveyor unit 3 , and (b) is a view for explaining the operation of a travel direction adjusting portion.

[0030] Figure 3 This is a diagram showing a group of conveyor units included in the conveying device according to one embodiment of the present invention as viewed from the surface side of the substrate.

[0031] Figure 4 These are diagrams for explaining the state of a substrate in one embodiment of the present invention, and (a) and (b) are diagrams showing a state in which the positions of both end portions in the width direction of the substrate are shifted.

[0032] Figure 5 It is a diagram for explaining a first moving mechanism included in the conveying device in one embodiment of the present invention.

[0033] Figure 6 It is a diagram for explaining a second moving mechanism included in the conveying device in one embodiment of the present invention.

[0034] Figure 7 This is a diagram showing a modification of the conveyor unit included in the conveying device according to one embodiment of the present invention.

[0035] Figure 8 It is a diagram showing a variation of the arrangement of the conveyor unit included in the conveying device according to one embodiment of the present invention.

[0036] Figure 9 This is a diagram showing a variation of the conveyor unit in one embodiment of the present invention. DETAILED DESCRIPTION

[0037] An embodiment of a conveying device 100 according to the present invention will be described with reference to the accompanying drawings. In the following description, the three axes of an orthogonal coordinate system are designated as X, Y, and Z. The horizontal directions are designated as the X-axis and Y-axis directions, and the direction perpendicular to the XY plane (i.e., the vertical direction) is designated as the Z-axis direction.

[0038] Figure 1This figure schematically illustrates a double-sided coating system 900 including a conveyor device 100 according to one embodiment of the present invention. While the following description uses an example in which the conveyor device 100 is provided in the double-sided coating system 900 for forming electrodes for lithium-ion batteries, any device that conveys a belt-shaped substrate is suitable, and the system is not limited to the double-sided coating system 900.

[0039] like Figure 1 As shown, the double-sided coating system 900 includes: a conveying device 100 that continuously conveys a substrate 1; a coating mechanism 910 that applies a coating liquid on both sides of the substrate 1 to form a coating film 11; and a drying mechanism 920 that heats and dries the coating film 11 formed on the substrate 1. The coating mechanism 910 applies a slurry of an electrode material (hereinafter referred to as a coating liquid) to both sides of the strip-shaped substrate 1 conveyed by the conveying device 100 to form the coating film 11 (see Figure 4 (a)), the formed coating film 11 is dried by the drying mechanism 920, thereby forming a positive electrode or a negative electrode of a lithium ion battery.

[0040] The substrate 1 is a metal foil that becomes a battery plate for a lithium-ion battery. Aluminum foil or the like is used for the positive electrode, and copper foil or the like is used for the negative electrode. The substrate 1 is a strip-shaped sheet that is long in one direction and is conveyed by a conveyor device 100 through the various components that constitute the double-sided coating system 900.

[0041] The coating liquid is a slurry formed by mixing an active material, a binder, and a conductive additive using a solvent, and is used as a material for a battery plate of a lithium-ion battery (so-called electrode material). The coating liquid is applied to the substrate 1 by a coating mechanism 910, thereby forming a coating film 11. In addition, in this embodiment, the coating film 11 is formed into a stripe shape. Forming the coating film 11 into a stripe shape means that, for example, Figure 3 and Figure 4 As shown in (a), the coating film 11 is formed in the width direction of the substrate 1 so that the substrate 1 has a plurality of coating portions 12 where the coating film 11 is formed and uncoated portions 13 where the coating film 11 is not formed between the plurality of coating portions.

[0042] The conveying device 100 is used to convey the substrate 1. Figure 1 As shown, the conveying device 100 includes a conveying section 2 for conveying a substrate 1 and a plurality of conveyor units 3 that assist the conveying section 2 in conveying the substrate 1 .

[0043] The conveying portion 2 is used to continuously convey the substrate 1 in the longitudinal direction of the substrate 1. Figure 1 As shown, the conveying unit 2 includes a feed roller 21, a take-up roller 22, a plurality of conveying rollers 23, and a coating roller 24. Each roller included in the conveying unit 21 is formed in a cylindrical shape and rotates about the central axis of the cylinder.

[0044] The unwinding roller 21 is used to unwind and feed the substrate 1 downstream. Its rotation is driven and controlled by a control unit (not shown), unwinding and feeding the substrate 1 at a predetermined speed. The control unit is, for example, a general-purpose computer device, and will be treated similarly in the following description. Furthermore, the take-up roller 22 is used to wind up the substrate 1. Like the unwinding roller 21, its rotation is driven and controlled by the control unit, applying a predetermined tension to the substrate 1 while winding it. The tension referred to here refers to the tension in the direction of conveyance of the substrate 1.

[0045] The conveying roller 23 allows the substrate 1 unwound from the unwinding roller 21 to pass through until it is wound on the winding roller 22. Figure 1 As shown, a plurality of conveyor rollers 23 are provided so as to allow the substrate 1 to pass through the various components constituting the double-sided coating system 900. Like the unwinding roller 21 and the winding roller 22, some or all of the plurality of conveyor rollers 23 are driven and controlled by the control unit to rotate, and the substrate 1 is conveyed while applying a predetermined tension to the substrate 1.

[0046] The coating roller 24 is used to guide the substrate 1 to the position where the coating liquid is applied by the first coating unit 911. Figure 1 As shown, the coating roller 24 is arranged to face the first coating unit 911 and supports the substrate 1 at a predetermined wrap angle from the back side of the substrate 1. This allows the substrate 1 to be conveyed while maintaining a constant distance from the first coating unit 911.

[0047] According to these configurations, the transport unit 2 transports the substrate 1 at a predetermined speed while applying a predetermined tension to the substrate 1 .

[0048] In addition, if Figure 1 As shown, along the conveying path of the substrate 1 formed by the coating roller 24 and the conveying roller 23 (hereinafter referred to as the conveying roller 25) through which the substrate 1 passes next, a second coating section 912 for forming a coating film 11 on the back surface of the substrate 1 and a heating section 920 are arranged. That is, before the substrate 1 unwound and released by the unwinding roller 21 reaches the conveying roller 25, the coating film 11 is formed on both sides of the substrate 1 and the coating film 11 is dried. This prevents the various rollers of the conveying section 2 from coming into contact with the undried coating film 11. In addition, the conveyor unit 3 assists in conveying the substrate 1 during the period from when the substrate 1 unwound and released by the unwinding roller 21 passes through the coating roller 24 to when it reaches the conveying roller 25.

[0049] The conveyor unit 3 is used to assist the conveying unit 2 in conveying the substrate 1. Figure 2As shown in (a), the conveyor unit 3 includes an endless belt member 31; two rollers 32 that rotate to move the belt member 31; a main body 33 that houses a drive mechanism (not shown) for rotating the two rollers 32; and a suction portion 34 that applies suction to a portion of the surface of the belt member 31. The conveyor unit 3 moves the belt member 31 while causing a suction portion 37 formed by applying suction to the surface of the belt member 31 to adsorb a predetermined surface of the substrate 1, thereby conveying the substrate 1 in the direction of travel of the suction portion 37.

[0050] The roller 32 is formed into a cylindrical shape and rotates with the central axis of the cylinder as the rotation axis. Figure 2 As shown in (a), two rollers 32 are fixed to the main body 33 at positions separated from each other, and the belt member 31 is stretched across these two rollers 32. Furthermore, a drive mechanism for rotating each roller 32 is connected to the two rollers 32. When the drive mechanism is activated, the two rollers 32 rotate, and the belt member 31 travels while stretched across the two rollers 32. Furthermore, when the belt member 31 is formed of a chain, a sprocket may be used instead of the rollers 32.

[0051] The main body 33 is used to accommodate the driving mechanism. Two rollers 32 are installed on the main body 33.

[0052] The suction unit 34 is a housing provided between the two rollers 32. In the wall portion of the housing, at a portion facing the back surface of the belt member 31 between the two rollers 32, as shown in FIG. Figure 2 As shown in (a), an opening 35 having a size substantially the same as the size between the two rollers 31 is formed. Furthermore, a pressure reducing mechanism (not shown) for reducing pressure inside the suction portion 34 is connected to the suction portion 34. When the pressure reducing mechanism is activated, the pressure inside the suction portion 34 becomes negative relative to the pressure outside, thereby generating suction at the opening 35. The pressure reducing mechanism mentioned here may be, for example, a blower, a pump, or an ejector.

[0053] In addition, on the belt member 31, as shown in FIG. Figure 2 As shown in (b), circular through-holes 36 are formed. During the travel of the belt member 31, the through-holes 36 are positioned opposite the openings 35. The through-holes 36 are arranged in a row along the entire circumference of the belt member 31 in the travel direction. When these through-holes 36 are positioned opposite the openings 35 with the pressure-reducing mechanism engaged, suction is generated through the openings 35. In this embodiment, each through-hole 36 generating suction serves as a suction portion 37. The substrate 1, suctioned by the suction portion 37, is then transported in the direction of travel of the suction portion 37 while being suctioned.

[0054] The conveyor units 3 having these structures are arranged in pairs. Figure 3As shown, a group of conveyor units 3 includes: a conveyor unit 3a, which causes the adsorption portion 37 to adsorb the non-coated portion 13 on a specified surface of the substrate 1 near the end 1a in the width direction of the substrate 1; and a conveyor unit 3b, which causes the adsorption portion 37 to adsorb the non-coated portion 13 on a specified surface of the substrate 1 near the end 1b in the width direction of the substrate 1. These conveyor units 3a and conveyor units 3b are arranged in parallel in the width direction of the substrate 1.

[0055] Furthermore, the set of conveyor units 3 conveys the substrate 1 in the direction of travel of the suction units 37 while causing each suction unit 37 to suction a predetermined surface of the substrate 1. At this time, the set of conveyor units 3 suctions the uncoated portion 13 on the predetermined surface of the substrate 1 to the suction units 37 near each end in the width direction of the substrate 1. Therefore, the set of conveyor units 3 does not come into contact with the coating film 11, and the substrate 1 can be conveyed in the direction of travel of each suction unit 37, thereby maintaining the posture of the substrate 1 conveyed by the conveyor unit 2. In the following description, when no particular distinction is made between the conveyor unit 3a and the conveyor unit 3b, they are simply referred to as the conveyor unit 3.

[0056] In addition, in this embodiment, a plurality of conveyor units 3 are provided. Figure 1 In the example, a set of conveyor units 3a that adsorb the back surface of the substrate 1, a set of conveyor units 3b that adsorb the surface of the substrate 1, and a set of conveyor units 3C that adsorb the back surface of the substrate 1 are provided along the conveying path of the substrate 1. These three sets of conveyor units 3 assist the conveying of the substrate 1 by the conveying section 2, thereby ensuring more stable conveyance of the substrate 1 than when only one set of conveyor units 3 assists in conveying the substrate 1. Furthermore, in the double-sided coating system 900, the coating mechanism 910 and the drying mechanism 920 perform their respective processes on the substrate 1 conveyed by the conveying device 100 of the above structure. In the following description, when no particular distinction is made between a set of conveyor units 3A, a set of conveyor units 3B, and a set of conveyor units 3C, they are simply referred to as a set of conveyor units 3.

[0057] The coating mechanism 910 is used to apply the coating liquid on both sides of the substrate 1 to form a coating film 11. Figure 1 As shown, the coating mechanism 910 includes: a first coating section 911 that coats the coating liquid on the surface of the substrate 1; a second coating section 912 that coats the coating liquid on the back surface of the substrate 1; and a film thickness measuring section 913 that measures the thickness of the coating film formed on the substrate 1.

[0058] The first coating section 911 is used to apply a coating liquid to the surface of the substrate 1 to form a striped coating film 11. The first coating section 911 is formed to be elongated in one direction and is arranged so as to extend in the width direction of the substrate 1. Furthermore, the coating roller 24 is arranged at a predetermined distance from the first coating section 911 so that the rotation axis direction of the coating roller 24 is parallel to the longitudinal direction of the first coating section 911. In the following description, the longitudinal direction of the first coating section 911 is referred to as the width direction of the first coating section 911.

[0059] And, as Figure 1 As shown, the first coating section 911 is composed of the following components: a manifold 915, which is a space connected to the supply path 914 and is long in the width direction for storing the coating liquid; a slit 916, which is connected to the manifold 915 and is wide in the width direction; and an outlet 917, which is open in the width direction with the same length as the slit 916 and outputs the coating liquid. Thus, the coating liquid accumulated in the manifold 915 is discharged from the outlet 917 to the substrate 1 via the slit 916. Furthermore, the outlet 917 is opposite the coating roller 24 with the substrate 1 interposed therebetween. In other words, the outlet 917 is opposite the substrate 1 on the surface side of the substrate 1. This allows the coating liquid to be applied to the substrate 1 while maintaining a constant distance between the outlet 917 and the substrate 1, thereby forming a coating film 11 with a uniform thickness on the surface of the substrate 1.

[0060] Furthermore, the first coating mechanism 911 is provided with a backing plate (not shown) for forming the coating film 11 on the substrate 1 into a striped pattern. The backing plate has, for example, a substantially comb-like shape and is arranged to divide the slits 916 in the width direction. When the coating liquid is applied with the backing plate dividing the slits 916 in the width direction, the coating liquid is applied to the portion without the backing plate, and not to the portion with the backing plate. In other words, the coating film 11 can be formed into a striped pattern.

[0061] Supply path 914 connects manifold 915 to tank 918 storing the coating liquid. The coating liquid is supplied from tank 918 to manifold 915 via supply path 915 by a pump (not shown), and is applied to substrate 1 from outlet 917 via slit 916.

[0062] The first coating section 911 having such a structure can form the coating film 11 in a stripe shape on the surface of the substrate 1 .

[0063] The second coating part 912 has the same structure as the first coating part 911, such as Figure 1As shown, on the downstream side of the first coating section 911, the delivery port 917 of the second coating section 912 is arranged on the back side of the substrate 1, facing the substrate 1. Furthermore, the conveyor unit 3A and the conveyor unit 3B are arranged so that the delivery port 917 of the second coating section 912 is sandwiched between the conveyor unit 3A and the conveyor unit 3B on the conveyance path of the substrate 1.

[0064] In this manner, the substrate 1 can be sucked by a set of conveyor units 3A and a set of conveyor units 3B, and thus the coating liquid can be applied to the substrate 1 while maintaining a constant distance between the outlet 917 and the substrate 1. Consequently, a striped coating film 11 having a uniform thickness can be formed on the back surface of the substrate 1. Furthermore, the width of the coating film 11 formed on the back surface of the substrate 1 by the second coating unit 912 can be the same as the width of the coating film 11 formed on the front surface of the substrate 1 by the first coating unit 911.

[0065] The first coating section 911 and the second coating section 912 form stripe-shaped coating films 11 on both surfaces of the substrate 1 .

[0066] The film thickness measuring unit 913 is used to measure the thickness of the coating film 11 formed on both sides of the substrate 1. The film thickness measuring unit 913 is, for example, a non-contact displacement meter, such as Figure 1 As shown, one coating unit 913 is provided between the first coating unit 911 and the second coating unit 912, and one coating unit 913 is provided between the second coating unit 912 and the drying mechanism 920, respectively, on the conveyance path of the substrate 1. Specifically, the film thickness measuring unit 913 measures the thickness of the coating film 11 formed by the first coating unit 911 and the second coating unit 912, respectively.

[0067] The measurement results of the film thickness measuring unit 913 are reflected in the application of the coating liquid by the first coating unit 911 and the second coating unit 912, and, for example, the amount of coating liquid applied by the first coating unit 911 and the second coating unit 912 is adjusted. In this way, a coating film 11 having a predetermined film thickness can be formed on both surfaces of the substrate 1.

[0068] Furthermore, a set of conveyor units 3A is disposed on the back side of the substrate 1 between the film thickness measuring unit 913, which measures the film thickness of the coating film 11 formed by the first coating unit 911, and the second coating unit 912, along the conveyance path of the substrate 1. The film thickness measuring unit 913 measures the film thickness of the coating film 11 formed on the surface of the substrate 1 while the substrate 1 is being held by the set of conveyor units 3A. This improves the measurement accuracy of the film thickness measuring unit 913.

[0069] Furthermore, the conveyor unit 3B and the conveyor unit 3C are arranged such that a film thickness measuring unit 913 is sandwiched between the conveyor unit 3B and the conveyor unit 3C on the conveyance path of the substrate 1. The film thickness measuring unit 913 measures the thickness of the coating film 11 formed by the second coating unit 912. Furthermore, the film thickness measuring unit 913 measures the thickness of the coating film 11 formed on the back surface of the substrate 1 while the substrate 1 is being sucked by the conveyor unit 3B and the conveyor unit 3C. This improves the measurement accuracy of the film thickness measuring unit 913.

[0070] The drying mechanism 920 is used to heat and dry the coating film 11 formed on both sides of the substrate 1 by the coating mechanism 910. Figure 1 As shown, the drying mechanism 920 is provided on the conveying path of the substrate 1 at a position downstream of the coating mechanism 910 and includes a housing 921 and a heating nozzle 922 (see FIG. Figure 8 ).

[0071] The housing 921 is a box formed long in the direction in which the substrate 1 is conveyed. It has a space within it for the substrate 1 to pass through, and an entrance and an exit for the substrate 1 to enter and exit the space. The substrate 1, having the coating film 11 formed thereon, is conveyed by the conveyor unit 2 through the interior of the housing 921.

[0072] The heating nozzle 922 is used to heat the coating film 11 by blowing hot air toward the substrate 1. The heating nozzle 922 is formed to be elongated in the width direction of the substrate 1 and has an opening (not shown) for blowing hot air in a portion facing the front or back surface of the substrate 1. The hot air blown from the heating nozzle 922 creates a high-temperature environment within the housing 921, and the coating film 11 is exposed to this high-temperature environment, thereby being heated and dried.

[0073] Furthermore, the heating nozzle 922 has a lower nozzle 922a (see Figure 8 ), which is arranged below the substrate 1 in the housing portion 921 and blows hot air to the back of the substrate 1; and an upper nozzle 922b (refer to Figure 8 ), which are arranged above the substrate 1 in the housing 921 and blow hot air onto the surface of the substrate 1. These lower nozzles 922a and upper nozzles 922b are alternately arranged in the conveying direction of the substrate 1. Therefore, the substrate 1 is conveyed in a substantially straight direction while applying a lifting force to the substrate 1 so that the substrate 1 floats.

[0074] The drying mechanism 920 having such a structure can dry the coating films 11 formed on both surfaces of the substrate 1 .

[0075] Furthermore, during the period from when the substrate 1 is unwound and fed by the unwinding roller 21 to when it is wound onto the take-up roller 22 via the conveying roller 23, positional deviation may occur at the widthwise ends of the substrate 1. In particular, the likelihood of such positional deviation occurring between the coating roller 24 and the conveying roller 25 along the conveying path of the substrate 1 in the conveyor unit 2 is high. This is because the weight of the coating film 11 formed on the substrate 1 by the coating mechanism 910 causes the substrate 1 to sag, or because the hot air blown by the drying mechanism 920 causes the substrate 1 to vibrate.

[0076] Here, a set of conveyor units 3 is provided with a traveling direction adjusting portion 38 for adjusting the traveling direction of the adsorption portion 37 of each belt member 31. In this embodiment, as shown in FIG. Figure 2 As shown in FIG. 5 ( a ), the traveling direction adjusting portion 38 includes a rotating mechanism 38 a that rotates the main body 33 in the Zθ direction and makes it stop at an arbitrary angle.

[0077] like Figure 2 As shown in (a), the rotation mechanism 38a includes a support portion 38b that supports the main body 33, and a drive shaft 38c that is a rotational shaft for rotating the main body 33 and connects the main body 33 and the support portion 38b. The drive shaft 38c is connected to a drive mechanism (not shown), and the main body 33 is rotated by operating the drive mechanism. Furthermore, by rotating the main body 33 using the rotation mechanism 38a, the travel direction of the suction portion 37 can be adjusted, and the width end of the substrate 1 sucked by the suction portion 37 can be pulled toward the adjusted travel direction of the suction portion 37. In this way, the position of the width end of the substrate 1 can be adjusted.

[0078] In addition, if Figure 1 As shown, the conveyor device 100 further includes an end position detection unit 41 for detecting the positions of both ends in the width direction of the substrate 1. The end position detection unit 41 is a sensor for detecting the positions of the ends in the width direction of the substrate 1. The end position detection unit 41 is arranged near each of the two ends in the width direction of the substrate 1 so as to be located near a set of conveyor units 3. The end position detection unit 41 transmits position information of the ends in the width direction of the substrate 1 to the control unit.

[0079] Furthermore, the control unit controls the operation of the travel direction adjustment unit 38 based on the position information of the two end portions in the width direction of the substrate 1 transmitted by the end position detection unit 41, thereby adjusting the travel direction of the suction unit 37. In other words, the travel direction adjustment unit 38 adjusts the travel direction of the suction unit 37 based on the detection results of the positions of the two end portions in the width direction of the substrate 1 by the end position detection unit 41.

[0080] In addition, the control unit compares the positions of the two end portions in the width direction of the substrate 1 transmitted by the end position detection unit 41 with the positions of the two end portions in the width direction of the substrate 1 during normal transportation, and determines whether the positions of the two end portions in the width direction of the substrate 1 have shifted. Normal transportation here refers to the time when the substrate 1 is transported within a prescribed allowable error range centered on an ideal transportation state in which the substrate 1 is transported without any positional shift on the substrate 1. In addition, the positions of the two end portions in the width direction of the substrate 1 under the ideal transportation state are Figure 4 (a) and Figure 4 The position T is shown by the dotted line in (b).

[0081] Furthermore, if the control unit determines that the positions of the two end portions in the width direction of the substrate 1 have shifted, the travel direction adjustment unit 38 adjusts the travel direction of the suction unit 37, thereby adjusting the positions of the two end portions in the width direction of the substrate 1 to normal positions. Furthermore, the travel direction adjustment unit 38 continues to adjust the travel direction of the suction units 37 of each of the conveyor units 3 until the control unit determines that the two end portions in the width direction of the substrate 1 are in normal positions based on the position information of each end portion in the width direction of the substrate 1 detected by the end position detection unit 41.

[0082] Specifically, each time the traveling direction of the suction unit 37 of each of the conveyor units 3 is adjusted, the traveling direction adjustment unit 38 receives feedback from the control unit regarding the positions of the two end portions in the width direction of the substrate 1, and adjusts the traveling direction of the suction unit 37 of each of the conveyor units 3 based on the feedback. By repeating this operation, the positions of the two end portions in the width direction of the substrate 1 can be maintained at normal positions.

[0083] For example, near a group of conveyor units 3, such as Figure 4 As shown in (a) of FIG. 2 , when the substrate 1 overhangs and the positions of both ends in the width direction of the substrate 1 are shifted toward the center, the travel direction adjusting unit 38 adjusts the travel direction of the suction portions 37 of each of the conveyor units 3 in the width direction of the substrate 1 so that the travel direction of the suction portions 37 of each of the conveyor units 3 is directed toward the outside of the conveying direction of the conveying unit 2 in the width direction of the substrate 1, compared to the travel direction of each suction portion 37 before adjustment. As a result, the conveyor units 3 in the group can pull the substrate 1 toward the outside of each end in the width direction of the substrate 1, compared to the state before adjustment of the travel direction of each suction portion 37 by the travel direction adjusting unit 38. Therefore, the overhang of the substrate 1 can be alleviated and the positions of both ends in the width direction of the substrate 1 can be brought closer to normal positions.

[0084] In addition, near a group of conveyor units 3, such as Figure 4As shown in (b), when the end portion 1a on one side of the substrate 1 in the width direction is displaced, the travel direction adjustment unit 38 is adjusted so that the travel direction of the suction portion 37 of the conveyor unit 3b that suctions the end portion 1b that is paired with the end portion 1a in the set of conveyor units 3 is directed toward the outside of the conveying direction of the substrate 1 by the conveyor unit 2, compared to the travel direction of the suction portion 37 of the conveyor unit 3b before the adjustment. As a result, the conveyor unit 3b can pull the substrate 1 toward the outside of the end portion 1b in the width direction of the substrate 1, compared to the state before the suction portion 37 is adjusted by the travel direction adjustment unit 38. Therefore, the substrate 1 is pulled toward the end portion 1b in the width direction, and the positions of both ends of the substrate 1 in the width direction can be brought closer to normal positions.

[0085] Then, the above-mentioned adjustment of the travel direction of each suction portion 37 of a group of conveyor units 3 by the travel direction adjustment unit 38 is repeated until the control unit determines that the two end portions in the width direction of the substrate 1 are in normal positions based on the position information of each end portion in the width direction of the substrate 1 detected by the end position detection unit 41. In this way, the positions of the two end portions in the width direction of the substrate 1 can be adjusted and maintained at normal positions.

[0086] Furthermore, the travel direction adjusting unit 38 adjusts the position of the widthwise end portions of the substrate 1 such that, while the substrate 1 is being conveyed by the conveying unit 2, the travel direction of the suction unit 37 is directed toward the outside of the conveying direction of the substrate 1 in the width direction of the substrate 1. Thus, the substrate 1 can be pulled toward the outside of each widthwise end portion of the substrate 1 being conveyed by the set of conveyor units, thereby reducing overhang of the substrate 1.

[0087] In addition, a speed adjustment unit (not shown) is provided in each set of conveyor units 3 for adjusting the relative speed of each suction unit 37 with respect to the substrate 1. In this embodiment, the speed adjustment unit is the aforementioned drive mechanism and control unit that rotate the two rollers 32. The control unit controls the operation of the drive mechanism to control the rotation speed of the two rollers 32, thereby adjusting the running speed of the belt member 31, that is, the travel speed of the suction unit 37.

[0088] Furthermore, the speed adjustment unit adjusts the relative speed of each adsorption unit 37 with respect to the substrate 1 according to the travel direction of each adsorption unit 37 adjusted by the travel direction adjustment unit 38. Specifically, Figure 2 As shown in (b), the speed adjustment unit adjusts the travel speed Vxy of the adsorption unit 37 each time the travel direction of the adsorption unit 37 is adjusted, so that the conveying direction component Vx of the conveying unit 2 conveying the substrate 1 in the travel speed Vxy of the adsorption unit 37 is equal to the conveying speed V of the conveying unit 2 conveying the substrate 1.

[0089] Thus, the relative speed of each adsorption portion 37 relative to the substrate 1 can be adjusted according to the travel direction of each adsorption portion 37 adjusted by the travel direction adjustment portion 38, so that the substrate 1 being transported by the conveying portion 2 will not be blocked on the adsorption portion 37 of each belt component 31 of a group of conveyor units 3, so the conveyor unit 3 can adjust the position of the end portion of the substrate 1 in the width direction without hindering the conveying of the substrate 1 by the conveying portion 2.

[0090] In addition, the conveying device 100 further includes a first moving mechanism (not shown) that moves the conveyor unit 3 forward and backward in the conveying direction of the substrate 1 to the conveying section 2. In this embodiment, the first moving mechanism is composed of a track extending along the conveying direction of the substrate 1 and a slider portion that moves on the track, and the support portion 38b described above is connected to the slider portion. Furthermore, a driving mechanism (not shown) that moves and stops the slider portion is connected to the slider portion. The driving mechanism moves the slider portion on the track, thereby moving the conveyor unit 3 forward and backward in the conveying direction of the substrate 1. Moreover, by moving each group of conveyor units 3 forward and backward in the conveying direction of the substrate 1, the direction in which the width end of the substrate 1 is pulled by each conveyor unit 3 can be set to a wide range.

[0091] In addition, if Figure 5 As shown, the first moving mechanism may also move each of the conveyor units 3 so that the conveyor units 3 are arranged so as to be staggered in the front and rear directions of the conveyance direction of the substrate 1. In this case, compared to arranging the conveyor units 3 in parallel in the width direction of the substrate 1, it is easier to pull the substrate 1 in the direction of travel of the suction portion 37 of the conveyor unit 3 on one side. This makes it easier to adjust the position of the widthwise end of the substrate 1.

[0092] The conveyor units 3 use a decompression mechanism to adjust the suction force applied to the suction parts 37. In this embodiment, when adjusting the positions of the widthwise ends of the substrate 1, the suction forces applied to the suction parts 37 of each conveyor unit 3 are adjusted to have a difference.

[0093] For example, if the suction force applied to the suction portion 37 of the conveyor unit 3a in a pair of conveyor units 3 is adjusted so that the suction force applied to the suction portion 37 of the conveyor unit 3b is larger and the suction force applied to the suction portion 37 of the conveyor unit 3b is smaller, the force of the conveyor unit 3a pulling the substrate 1 toward the outside of the end portion 1a in the width direction of the substrate 1 causes the substrate 1 located on the suction portion 37 of the conveyor unit 3b to slide on the suction portion 37 in the direction of travel of the suction portion 37 of the conveyor unit 3a. This makes it easier to pull the substrate 1 in the direction of travel of the suction portion 37 of the conveyor unit 3a on one side. This makes it easier to adjust the position of the width end portion of the substrate 1.

[0094] The conveyor device 2 also includes a second moving mechanism (not shown) that moves the conveyor unit 3 toward and away from the predetermined surface of the substrate 1. In this embodiment, the second moving mechanism is composed of the aforementioned support portion 38b and drive shaft 38c. The conveyor unit 3 is raised and lowered by retracting the drive shaft 38c into and extending it outward from the support portion 38b. The drive shaft 38c is actuated by a drive mechanism (not shown). This allows the position of the substrate 1 to be adjusted in a direction perpendicular to the predetermined surface of the substrate 1.

[0095] And, as Figure 6 As shown, by utilizing a second moving mechanism to move a group of conveyor units 3A and a group of conveyor units 3B, or a group of conveyor units 3A and a group of conveyor units 3B in any direction close to or away from a prescribed surface of the substrate 1, the distance between the output port 917 of the second coating section 912 and the substrate 1 can be adjusted.

[0096] Thus, according to the conveyor device 2 of the above embodiment, the traveling direction adjusting portion 38 can adjust the traveling direction of the suction portion 37 of each of the belt members 31 of a group of conveyor units 3 so that a predetermined surface of the substrate 1 is suctioned to the suction portion 37 of the belt member 31 near both ends of the substrate 1 in the width direction of the substrate 1. Therefore, the ends of the substrate 1 can be pulled in the adjusted traveling direction of the suction portion 37 of each belt member 31. Thus, the position of the ends of the conveyed substrate 1 in the width direction can be adjusted.

[0097] Furthermore, the double-sided coating system 900 in this embodiment includes the conveying device 100 in the above-described embodiment, and thus can apply the coating liquid to the substrate 1 that is stably conveyed without positional deviation at both ends in the width direction of the substrate 1 by the coating mechanism 910, and can dry the coating film 11 by the drying mechanism 920. Therefore, the double-sided coating system 900 can form a coating film 11 having a uniform thickness on both sides of the substrate 1.

[0098] The embodiments of the present invention have been described in detail above with reference to the drawings. However, the structures and combinations thereof in the embodiments are merely examples, and additions, omissions, substitutions, and other changes to the structures may be made without departing from the spirit of the present invention.

[0099] For example, in the above embodiment, the traveling direction regulating portion 38 is described as being composed of the rotating mechanism 38a, but it may also be composed of a plurality of guide portions 38d. The following is a detailed description. The guide portion 38d is used to define the traveling path of the belt member 31, such as Figure 7As shown in (a), two groups are provided in such a manner that both ends of the belt member 31 are held near each of the two rollers 32 in a direction perpendicular to the traveling direction of the adsorption portion 37. Figure 7 As shown in (b), by shifting the positions of the two sets of guide portions 38d in different directions perpendicular to the moving direction of the suction portion 37, the belt member 31 is tilted, and the moving direction of the suction portion 37 can be adjusted.

[0100] Furthermore, in the above embodiment, an example is described in which the end position detection unit 41 detects the position of the widthwise end of the substrate 1, and the travel direction adjustment unit 38 adjusts the travel direction of the adsorption unit 37 based on the detection result. However, the present invention is not limited to this. For example, an overhang amount detection unit (not shown) may be provided to detect the position of the widthwise center of the substrate 1, and the travel direction of the adsorption unit 37 may be adjusted based on the detection result of the overhang amount detection unit.

[0101] The overhang amount detector is a sensor that detects the height position of the widthwise center portion of the substrate 1 and transmits the detected position information to the control unit. The control unit calculates the overhang amount of the substrate 1 based on the height position information of the widthwise center portion of the substrate 1 transmitted by the overhang amount detector. Furthermore, the control unit controls the operation of the travel direction adjustment unit 38 based on the calculated overhang amount of the substrate 1, adjusting the travel direction of the suction units 37 of each of the conveyor units 3. This makes it easier to reduce overhang of the substrate 1.

[0102] In addition, the configuration of a set of conveyor units 3 is not limited to Figure 1 A set of conveyor units 3 may be arranged at a position capable of sucking at least one of the front and back surfaces of the substrate 1 . For example, a plurality of sets of conveyor units 3 may be arranged to suck only one surface of the substrate 1 .

[0103] Alternatively, a set of conveyor units 3 may be arranged in the housing portion 921. In this case, Figure 8 As shown, a set of conveyor units 3 can be provided so as to sandwich the substrate 1 between the respective heating nozzles 922 in the housing 921. Thus, a predetermined surface of the substrate 1 can be suctioned by the set of conveyor units 3 at a position facing the heating nozzles 922, thereby suppressing vibration of the substrate 1 caused by the hot air blown from the heating nozzles 922.

[0104] In the above embodiment, an example is described in which an attractive force is applied to the adsorption portion 37 to cause the adsorption portion 37 to adsorb the substrate 1. However, the present invention is not limited thereto. For example, static electricity may be generated on the surface of the belt member 31, and the portion generating the static electricity may serve as the adsorption portion 37, causing the adsorption portion 37 to adsorb the substrate 1.

[0105] In the above embodiment, the example of adjusting the interval between the second coating unit 912 and the substrate 1 by using the second moving mechanism to move the conveyor unit 3A and the conveyor unit 3B, or the conveyor unit 3A and the conveyor unit 3B, in a direction close to or away from the predetermined surface of the substrate 1 is described. However, the adjustment may be performed by other methods. For example, Figure 9 As shown, a rotating mechanism (not shown) may be provided to rotate the conveyor unit 3 in the Yθ direction and to stop at an arbitrary angle. The rotating mechanism may be used to adjust the angle in the Yθ direction of a group of conveyor units 3A and a group of conveyor units 3B, or a group of conveyor units 3A and a group of conveyor units 3B, thereby adjusting the distance between the second coating section 912 and the substrate 1.

[0106] Description of labels

[0107] 100: conveying device;

[0108] 1: substrate;

[0109] 11: coating;

[0110] 2: Conveying unit;

[0111] 21: unwinding roller;

[0112] 22: take-up roller;

[0113] 23: conveyor roller;

[0114] 24: coating roller;

[0115] 25: conveyor roller;

[0116] 3: Conveyor unit;

[0117] 3A: a set of conveyor units;

[0118] 3B: a set of conveyor units;

[0119] 3C: a group of conveyor units;

[0120] 31: with parts;

[0121] 32: Roller;

[0122] 33: Main body;

[0123] 34: attraction part;

[0124] 35: Opening;

[0125] 36: through hole;

[0126] 37: adsorption part;

[0127] 38: Travel direction adjustment unit;

[0128] 38a: Rotating mechanism;

[0129] 38b: Supporting portion;

[0130] 38c: drive shaft;

[0131] 41: end position detection unit;

[0132] 900: Double-sided coating system;

[0133] 910: coating mechanism;

[0134] 911: first coating section;

[0135] 912: second coating section;

[0136] 913: Film thickness measurement department;

[0137] 914: Supply Road;

[0138] 915: Manifold;

[0139] 916: gap;

[0140] 917: output port;

[0141] 918: can;

[0142] 920: Drying mechanism;

[0143] 921: housing portion;

[0144] 922: Heating nozzle;

[0145] 922a: upper nozzle;

[0146] 922b: Lower nozzle.

Claims

1. A conveying device comprising: a conveying portion that conveys the strip-shaped substrate in a longitudinal direction of the substrate; and At least one conveyor unit assists the conveying portion in conveying the substrate, and conveys the substrate in the direction of travel of the adsorption portion to which the substrate is adsorbed by the conveying portion by running the belt member in a state where the adsorption portion formed on the belt member adsorbs a predetermined surface of the substrate conveyed by the conveying portion, characterized in that The set of the conveyor units is arranged so as to adsorb the predetermined surface of the substrate to the adsorption portion of the belt member near both ends of the substrate in the width direction of the substrate. The set of the conveyor units is provided with a traveling direction adjusting portion that adjusts the traveling direction of the suction portion of each of the belt members.

2. The conveying device according to claim 1, characterized in that The conveying device further includes an end position detection unit for detecting the positions of both end portions in the width direction of the substrate. The traveling direction adjusting portion adjusts the traveling direction of the adsorption portion based on a detection result of the end position detecting portion.

3. The conveying device according to claim 1 or 2, characterized in that The traveling direction adjusting unit adjusts the traveling direction of the adsorption unit so that the traveling direction of the adsorption unit is directed toward the outside of the conveying direction of the substrate in the width direction of the substrate.

4. The conveying device according to claim 1 or 2, characterized in that The set of conveyor units is provided with a speed adjustment unit that adjusts a relative speed of each of the adsorption units with respect to the substrate according to the travel direction of each of the adsorption units adjusted by the travel direction adjustment unit.

5. The conveying device according to claim 1 or 2, characterized in that: The transport device further includes a first moving mechanism that moves the conveyor unit back and forth in a transport direction in which the substrate is transported to the transport section.

6. The conveying device according to claim 1 or 2, characterized in that: The conveying device further includes a second moving mechanism that moves the conveyor unit in a direction approaching the predetermined surface of the substrate and in a direction away from the predetermined surface of the substrate.

7. The conveying device according to claim 1 or 2, characterized in that: The conveying device further includes an overhang amount detection unit that detects the height position of the center portion of the substrate in the width direction of the substrate. The traveling direction adjusting unit adjusts the traveling direction of the adsorption unit based on the detection result of the overhanging amount detecting unit.

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