A six-dimensional force sensor

Abstract

This invention relates to the field of force sensor technology, and discloses a six-dimensional force sensor, comprising: a mounting base; an inner core and a cover plate, the cover plate being rotatable relative to the inner core around a first direction and a second direction, driving the inner core to rotate around a third direction and move along the first direction, the second direction, and the third direction; a first rotational connection assembly; a first tangential force-sensitive core for detecting a first tangential force; a second rotational connection assembly; a second tangential force-sensitive core for detecting a second tangential force; a third tangential force-sensitive core for detecting a third tangential force; a force transmission element sleeved on the inner core; a first-direction force-sensitive core for detecting a first applied force; a second-direction force-sensitive core for detecting a second applied force; a second force transmission element fixed to a movable component; and a third-direction force-sensitive core for detecting a third applied force. The six-dimensional force sensor disclosed in this invention improves upon the shortcomings of strain gauge-type six-dimensional force sensors, such as low detection accuracy, poor creep resistance, low frequency response, and significant temperature drift.

Description

Technical Field

[0001] This invention relates to the field of force sensor technology, and more particularly to a six-dimensional force sensor. Background Technology

[0002] In modern industrial automation, robotics, and other fields, six-dimensional force sensors are crucial sensing devices capable of detecting forces in various directions in real time, providing accurate force feedback information to the control system. With the widespread application of six-dimensional force sensors, the requirements for their parameters, such as crosstalk immunity, high precision, overload resistance, and high frequency response, are becoming increasingly stringent. However, most existing six-dimensional force sensors utilize strain gauge sensors, which are easy to manufacture, inexpensive, and have a certain degree of versatility. But considering the increasing complexity of application environments and the high requirements for parameter specifications, strain gauge six-dimensional force sensors face the following problems in practical applications.

[0003] First, the detection accuracy is relatively low. Since strain gauge sensors work by measuring the deformation of a material under stress to calculate the force, their detection accuracy is significantly affected by material properties and manufacturing processes. Therefore, it is difficult for these sensors to achieve high-precision detection of minute forces in practical applications. Second, they have poor creep resistance. After prolonged stress, the sensitive element of a strain gauge sensor will creep, causing the sensor's output signal to drift, thus affecting the accuracy of the detection. Third, the frequency response is low. Strain gauge sensors are typically bonded to stress concentration points with structural adhesive, resulting in low long-term reliability and a tendency to generate additional stress that leads to drift. Furthermore, deformation of the structural adhesive can also cause hysteresis and deterioration of the repeatability of the strain gauge sensor, resulting in a low frequency response that cannot meet increasingly stringent high-frequency requirements. Finally, temperature drift is significant. In practical applications, it is difficult to eliminate the influence of temperature on the output signal of a strain gauge sensor, increasing detection errors and further reducing detection accuracy. Summary of the Invention

[0004] Based on the above, the purpose of this invention is to provide a six-dimensional force sensor that improves upon the shortcomings of existing strain gauge six-dimensional force sensors, such as low detection accuracy, poor creep resistance, low frequency response, and significant temperature drift, thereby promoting the application of six-dimensional force sensors in the field of high-precision force control.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A six-dimensional force sensor, comprising:

[0007] The mounting base has a mounting cavity inside;

[0008] The inner core and the cover plate are provided. The inner core is located in the mounting cavity. The cover plate is disposed on the inner core and spaced apart from the mounting base. The cover plate is rotatable relative to the inner core around a first direction and a second direction. The cover plate can also drive the inner core to rotate around a third direction and can move along the first direction, the second direction and the third direction.

[0009] The first rotating connection assembly includes a first rotating main bracket disposed on the inner core and fixedly connected to the cover plate, the first rotating main bracket being capable of rotating relative to the inner core about the first direction;

[0010] A first tangential force-sensitive core is disposed on the inner core or the first rotating main support. The first tangential force-sensitive core can abut against the first rotating main support or the inner core to detect the first tangential force generated when the cover plate rotates around the first direction.

[0011] The second rotating connection assembly includes a second rotating main bracket disposed on the inner core and fixedly connected to the cover plate, the second rotating main bracket being capable of rotating relative to the inner core about the second direction;

[0012] A second tangential force-sensitive core is disposed in the inner core or the first rotating main support. The second tangential force-sensitive core can abut against the second rotating main support or the inner core to detect the second tangential force generated when the cover plate rotates in the second direction.

[0013] A third tangential force-sensitive core is disposed within the mounting cavity, and the inner core is capable of abutting against the third tangential force-sensitive core to detect the third tangential force generated when the inner core rotates around the third direction;

[0014] A force transmission component is sleeved on the inner core and can move with the inner core along the first direction and the second direction, while the inner core can move relative to the force transmission component along the third direction.

[0015] A first-direction force-sensitive core is disposed on the side wall of the mounting cavity or on the force transmission component. The first-direction force-sensitive core can abut against the force transmission component or the mounting base to detect the first force in the first direction.

[0016] A second-direction force-sensitive core is disposed on the side wall of the mounting cavity or on the force transmission component. The second-direction force-sensitive core can abut against the force transmission component or the mounting base to detect the second force in the second direction.

[0017] A third-direction force-sensitive core is disposed on the inner wall of the mounting cavity or on the inner core. The third-direction force-sensitive core can abut against the inner core or the mounting base to detect the third-direction third force.

[0018] The first tangential force-sensitive core, the second tangential force-sensitive core, the third tangential force-sensitive core, the first directional force-sensitive core, the second directional force-sensitive core, and the third directional force-sensitive core are all chip-type force-sensitive cores.

[0019] As a preferred embodiment of a six-dimensional force sensor, the first rotating connection assembly further includes a first decoupling rotating bracket, which is disposed at the top of the inner core and fixedly connected to the cover plate, so that the cover plate can rotate relative to the inner core in the first direction.

[0020] The second rotating connection assembly further includes a second decoupling rotating bracket, which is disposed at the top of the inner core and fixedly connected to the cover plate, so that the cover plate can rotate relative to the inner core in the second direction;

[0021] The line connecting the rotation centers of the first decoupled rotating bracket, the second decoupled rotating bracket, the first rotating main bracket, and the second rotating main bracket extends along the third direction.

[0022] As a preferred embodiment of a six-dimensional force sensor, there are two first tangential force-sensitive cores. The first rotating main support includes a first rotating crossbeam, two first rotating connecting main beams, and two first rotating vertical beams. The first rotating crossbeam is hinged to the inner core and can rotate relative to the inner core around the first direction. The two first rotating connecting main beams are symmetrically arranged on the first rotating crossbeam and are both fixedly connected to the cover plate. The two first rotating vertical beams are symmetrically arranged on the first rotating crossbeam and correspond one-to-one with the two first tangential force-sensitive cores.

[0023] As a preferred embodiment of a six-dimensional force sensor, there are two second tangential force-sensitive cores. The second rotating main support includes a second rotating crossbeam, two second rotating connecting main beams, and two second rotating vertical beams. The second rotating crossbeam is hinged to the inner core and can rotate relative to the inner core around the second direction. The two second rotating connecting main beams are symmetrically arranged on the second rotating crossbeam and are both fixedly connected to the cover plate. The two second rotating vertical beams are symmetrically arranged on the second rotating crossbeam and correspond one-to-one with the two second tangential force-sensitive cores.

[0024] As a preferred embodiment of a six-dimensional force sensor, the mounting cavity includes a first movable cavity, a second movable cavity, and a third movable cavity connected in sequence. The inner core includes a main core, a connecting core, and a limiting block that are fixedly connected in sequence. The main core is located in the first movable cavity, the force transmitting element and the limiting block are both located in the third movable cavity, the connecting core is located in the second movable cavity, the force transmitting element is sleeved on the connecting core, and the force transmitting element limits the limiting block in the third movable cavity.

[0025] As a preferred embodiment of a six-dimensional force sensor, the inner core further includes a sleeve fixed to the main core body. The bottom of the first movable cavity is provided with a torque transmission groove. One end of the sleeve is located in the torque transmission groove and can rotate around the third direction. There are two third tangential force-sensitive cores, which are arranged in the torque transmission groove. One third tangential force-sensitive core can detect the third tangential force in a clockwise direction around the third direction, and the other third tangential force-sensitive core can detect the third tangential force in a counterclockwise direction around the third direction.

[0026] As a preferred embodiment of a six-dimensional force sensor, the mounting cavity further includes a receiving groove, and the inner core further includes an annular pressure plate and an annular pressure block disposed on the annular pressure plate. The annular pressure plate is fixed on the main core and located within the receiving groove. The number of third-dimensional force-sensitive cores is at least two. At least one of the third-dimensional force-sensitive cores is disposed at the top of the receiving groove and directly opposite the annular pressure plate to detect the third force acting upward along the third direction. At least one of the third-dimensional force-sensitive cores is disposed at the bottom of the first movable cavity and directly opposite the sleeve to detect the third force acting downward along the third direction.

[0027] As a preferred embodiment of a six-dimensional force sensor, there are two first-direction force-sensitive cores and two second-direction force-sensitive cores. The force transmission component is a cross-shaped component, which includes two first force transmission brackets extending along the first direction and two second force transmission brackets extending along the second direction. The two first force transmission brackets correspond one-to-one with the two first-direction force-sensitive cores, and the two second force transmission brackets correspond one-to-one with the two second-direction force-sensitive cores.

[0028] As a preferred embodiment of a six-dimensional force sensor, the mounting cavity is provided with two first mounting slots and two second mounting slots. Each first mounting slot is fixedly provided with a first directional force-sensitive core. When the measured value of the first directional force-sensitive core reaches a third preset force value, the end face of the first force transmission bracket abuts against the wall of the mounting cavity. Each second mounting slot is fixedly provided with a second directional force-sensitive core. When the measured value of the second directional force-sensitive core reaches a fourth preset force value, the end face of the second force transmission bracket abuts against the wall of the mounting cavity.

[0029] As a preferred embodiment of a six-dimensional force sensor, the chip-type force-sensitive core includes a core base, a force-sensitive chip, and a force-sensitive membrane. The force-sensitive membrane is fixed on the core base, and the two together form a liquid cavity. The liquid cavity is filled with a hydraulic medium. The force-sensitive chip is fixed on the bottom wall of the liquid cavity. The chip-type force-sensitive core can detect the force transmitted to the hydraulic medium through the force-sensitive membrane.

[0030] The beneficial effects of this invention are as follows:

[0031] The six-dimensional force sensor disclosed in this invention comprises a first tangential force-sensitive core, a second tangential force-sensitive core, and a third tangential force-sensitive core, which can respectively detect the first tangential force, the second tangential force, and the third tangential force. Similarly, a first directional force-sensitive core, a second directional force-sensitive core, and a third directional force-sensitive core can respectively detect the first action force, the second action force, and the third action force. Furthermore, all three cores are chip-type force-sensitive cores, which feature high detection accuracy, strong creep resistance, and low temperature drift. This overcomes the technical bias of existing technologies, which are limited by the structure of six-dimensional force sensors and can only use strain gauge sensors to detect stress in various directions. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0033] Figure 1 This is the first cross-sectional view of the six-dimensional force sensor provided in a specific embodiment of the present invention;

[0034] Figure 2 This is the second cross-sectional view of the six-dimensional force sensor provided in a specific embodiment of the present invention;

[0035] Figure 3 This is a cross-sectional view of the mounting base of the six-dimensional force sensor provided in a specific embodiment of the present invention;

[0036] Figure 4 This is a schematic diagram of the mounting base and the third tangential force-sensitive core of the six-dimensional force sensor provided in a specific embodiment of the present invention;

[0037] Figure 5 This is a schematic diagram of the force transmission component of the six-dimensional force sensor provided in a specific embodiment of the present invention;

[0038] Figure 6 This is a schematic diagram of the first and second rotating main supports of the six-dimensional force sensor provided in a specific embodiment of the present invention;

[0039] Figure 7 This is a cross-sectional view of the chip-type force-sensitive core of the six-dimensional force sensor provided in a specific embodiment of the present invention.

[0040] In the picture:

[0041] 1. Mounting base; 101. Mounting cavity; 1011. First movable cavity; 1012. Second movable cavity; 1013. Third movable cavity; 1014. Receiving groove; 102. First mounting groove; 103. Second mounting groove; 104. Torque transmission groove; 105. Third mounting groove; 11. Upper seat; 12. Intermediate connecting seat; 13. Lower seat;

[0042] 2. Inner core; 201. First through hole; 202. Second through hole; 203. Third through hole; 204. Fourth through hole; 21. Main core body; 22. Connecting core; 23. Limiting block; 24. Sleeve; 25. Circular pressure plate; 26. Circular pressure block;

[0043] 3. Cover plate;

[0044] 41. First rotating main support; 411. First rotating crossbeam; 412. First rotating vertical beam; 413. First rotating pressure block; 414. First rotating connecting main beam; 42. First decoupled rotating support; 43. First hinged support;

[0045] 51. Second rotating main support; 511. Second rotating crossbeam; 512. Second rotating vertical beam; 513. Second rotating pressure block; 514. Second rotating connecting main beam; 52. Second decoupled rotating support; 53. Second hinged support;

[0046] 601, Core base; 6010, Liquid chamber; 602, Force-sensitive chip; 603, Force-sensitive film; 61, First tangential force-sensitive core; 62, Second tangential force-sensitive core; 63, Third tangential force-sensitive core; 64, First direction force-sensitive core; 65, Second direction force-sensitive core; 66, Third direction force-sensitive core;

[0047] 7. Force transmission component; 71. First force transmission bracket; 72. Second force transmission bracket; 73. Force transmission connecting block; 74. First force transmission pressure block; 75. Second force transmission pressure block;

[0048] 81. Fixed base; 82. Third hinged support; 83. Fourth hinged support;

[0049] 9. PCB. Detailed Implementation

[0050] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0051] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0052] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; or internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0053] This embodiment provides a six-dimensional force sensor, such as... Figures 1 to 6As shown, the assembly includes a mounting base 1, an inner core 2, a cover plate 3, a first rotating connection assembly, a first tangential force-sensitive core 61, a second rotating connection assembly, a second tangential force-sensitive core 62, a third tangential force-sensitive core 63, a force transmission component 7, a first directional force-sensitive core 64, a second directional force-sensitive core 65, and a third directional force-sensitive core 66. The mounting base 1 has a mounting cavity 101, and the inner core 2 is located within the mounting cavity 101. The cover plate 3 is disposed on the inner core 2 and spaced apart from the mounting base 1. The cover plate 3 can rotate relative to the inner core 2 around a first direction and a second direction. The cover plate 3 can not only drive the inner core 2 to rotate around a third direction, but also drive the inner core 2 to move along the first direction, the second direction, and the third direction. The first rotating connection assembly includes a first rotating main support 41 disposed on the inner core 2 and fixedly connected to the cover plate 3. The first rotating main support 41 can... For the inner core 2 to rotate around the first direction, a first tangential force sensitive core 61 is disposed on the inner core 2. The first tangential force sensitive core 61 can abut against the first rotating main support 41 to detect the first tangential force generated when the cover plate 3 rotates around the first direction. The second rotating connection assembly includes a second rotating main support 51 disposed on the inner core 2 and fixedly connected to the cover plate 3. The second rotating main support 51 can rotate relative to the inner core 2 around the second direction. A second tangential force sensitive core 62 is disposed on the inner core 2. The second tangential force sensitive core 62 can abut against the second rotating main support 51 to detect the second tangential force generated when the cover plate 3 rotates around the second direction. A third tangential force sensitive core 63 is disposed in the mounting cavity 101. The inner core 2 can abut against the third tangential force sensitive core 63 to detect the third tangential force generated when the cover plate 3 drives the inner core 2 to rotate around the third direction.

[0054] like Figure 1 and Figure 2 As shown, the aforementioned force transmission component 7 is sleeved on the inner core 2 and can move along the first and second directions with the inner core 2. The inner core 2 can move up and down along a third direction relative to the force transmission component 7, while the force transmission component 7 does not move along the third direction with the inner core 2. The first direction force-sensitive core 64 is disposed on the side wall of the mounting cavity 101 and can abut against the force transmission component 7 to detect the first force in the first direction. The second direction force-sensitive core 65 is disposed on the side wall of the mounting cavity 101 and can abut against the force transmission component 7 to detect the second force in the second direction. The third direction force-sensitive core 66 is disposed on the inner wall of the mounting cavity 101 and can abut against the inner core 2 to detect the third force in the third direction.

[0055] It should be noted that, in other embodiments of the present invention, a first tangential force-sensitive core 61 may be disposed at the end of the first rotating main support 41, and the first tangential force-sensitive core 61 may abut against the inner core 2 to detect the first tangential force generated when the cover plate 3 rotates around the first direction; a second tangential force-sensitive core 62 may be disposed at the end of the second rotating main support 51, and the second tangential force-sensitive core 62 may abut against the inner core 2 to detect the second tangential force generated when the cover plate 3 rotates along the second direction; a third tangential force-sensitive core 62 may also .... A force-sensitive core 64 in one direction is disposed on the force transmission component 7, and the force-sensitive core 64 in the first direction can abut against the mounting base 1 to detect the first force in the first direction; a force-sensitive core 65 in the second direction can also be disposed on the force transmission component 7, and the force-sensitive core 65 in the second direction can abut against the mounting base 1 to detect the second force in the second direction; a force-sensitive core 66 in the third direction can also be disposed on the inner core 2, and the force-sensitive core 66 in the third direction can abut against the mounting base 1 to detect the third force in the third direction, depending on actual needs.

[0056] like Figure 1 and Figure 2 As shown, in this embodiment, the first direction, second direction, and third direction are the X-axis direction, Y-axis direction, and Z-axis direction, respectively. It should be noted that the first tangential force-sensitive core 61, second tangential force-sensitive core 62, third tangential force-sensitive core 63, first direction force-sensitive core 64, second direction force-sensitive core 65, and third direction force-sensitive core 66 in this embodiment are all chip-type force-sensitive cores. The cover plate 3 can rotate very small angles around the first, second, and third directions, all within 2°. The cover plate 3 can also drive the force transmission component 7 to move very small distances along the first, second, and third directions, all within 2mm. In other embodiments of the present invention, the rotation angle can be greater than 2°, and the movement distance can be greater than 2mm, depending on actual needs.

[0057] The six-dimensional force sensor provided in this embodiment includes a first tangential force-sensitive core 61, a second tangential force-sensitive core 62, and a third tangential force-sensitive core 63, which can detect the first tangential force, the second tangential force, and the third tangential force, respectively. A first directional force-sensitive core 64, a second directional force-sensitive core 65, and a third directional force-sensitive core 66, which can detect the first action force, the second action force, and the third action force, respectively. Furthermore, all three cores are chip-type force-sensitive cores. Chip-type force-sensitive cores have the characteristics of high detection accuracy, strong creep resistance, and small temperature drift, overcoming the technical bias of the prior art, which is limited by the structure of the six-dimensional force sensor and can only use strain gauge sensors to detect stress in each direction.

[0058] Specifically, when detecting the first torque in the first direction, the second torque in the second direction, and the third torque in the third direction, the cover plate 3 can rotate relative to the inner core 2 around the first direction, and the first rotating main support 41 abuts against the first tangential force-sensitive core 61, realizing the detection of the first tangential force by the first tangential force-sensitive core 61; the cover plate 3 can rotate relative to the inner core 2 around the second direction, and the second rotating main support 51 abuts against the second tangential force-sensitive core 62, realizing the detection of the second tangential force by the second tangential force-sensitive core 62; the cover plate 3 can also drive the inner core 2 to rotate around the second direction. Rotating in the third direction, the inner core 2 comes into contact with the third tangential force-sensitive core 63, realizing the detection of the third tangential force by the third tangential force-sensitive core 63. Since the first lever arm is the distance from the rotation center of the first tangential force-sensitive core 61 to the first rotating main support 41 and is a constant, the second lever arm is the distance from the rotation center of the second tangential force-sensitive core 62 to the second rotating main support 51 and is a constant, and the third lever arm is the distance from the central axis of the third tangential force-sensitive core 63 to the inner core 2 and is a constant, the first torque, the second torque, and the third torque can be obtained respectively.

[0059] like Figure 1 and Figure 2 As shown, the six-dimensional force sensor in this embodiment also includes a fixed base 81, a third hinge support 82, and a fourth hinge support 83. The fixed base 81 is fixed to the top of the inner core 2 and spaced apart from the cover plate 3. The third hinge support 82 and the fourth hinge support 83 are both mounted on the fixed base 81. The first rotating connection assembly also includes a first decoupling rotating bracket 42, which is hinged to the third hinge support 82 and fixedly connected to the cover plate 3, so that the cover plate 3 can rotate relative to the inner core 2 in a first direction. The second rotating connection assembly also includes a second decoupling rotating bracket 52, which is hinged to the fourth hinge support 83 and fixedly connected to the cover plate 3, so that the cover plate 3 can rotate relative to the inner core 2 around a second direction. The line connecting the rotation center of the first decoupling rotating bracket 42, the rotation center of the second decoupling rotating bracket 52, the rotation center of the first rotating main bracket 41, and the rotation center of the second rotating main bracket 51 extends along a third direction, and the rotation centers of the above four brackets are all located on the central axis of the inner core 2.

[0060] In this embodiment, there are two first tangential force-sensitive cores 61, such as... Figure 6As shown, the first rotating main support 41 includes a first rotating crossbeam 411, two first rotating connecting main beams 414, two first rotating vertical beams 412, and two first rotating pressure blocks 413. The first rotating crossbeam 411 is hinged to the inner core 2 and can rotate relative to the inner core 2 around a first direction. The two first rotating connecting main beams 414 are symmetrically arranged on the first rotating crossbeam 411 and are both fixedly connected to the cover plate 3. The two first rotating vertical beams 412 are symmetrically arranged on the first rotating crossbeam 411 and correspond one-to-one with the two first tangential force-sensitive cores 61. The first rotating pressure blocks 413 are arranged on the first rotating vertical beams 412, and the two second rotating pressure blocks 513 are respectively arranged one-to-one with the two second rotating vertical beams 512.

[0061] like Figure 1 and Figure 2 As shown, the inner core 2 of this embodiment is provided with a first through hole 201 extending along the second direction. A first hinge support 43 is provided in the first through hole 201. A first rotating main support 41 is hinged to the first hinge support 43 and extends through the first through hole 201. The first rotating main support 41 can rotate around the first direction and abut against the first tangential force sensitive core 61 to realize the detection of the third tangential force. When the end face of the first rotating main support 41 abuts against the inner core 2, the measured value of the first tangential force sensitive core 61 reaches the first preset force value, and the measured value of the first tangential force sensitive core 61 reaches the maximum.

[0062] When the first tangential force-sensitive core 61 detects the first tangential force, the cover plate 3 rotates relative to the inner core 2 around the first direction. At this time, the first decoupling rotation bracket 42 and the first rotation main bracket 41 rotate synchronously. Therefore, the cover plate 3 does not directly drive the inner core 2 to rotate. The inner core 2 is only affected by the first rotation main bracket 41. Since the inner core 2 is long enough, the bottom end of the inner core 2 abuts against the bottom wall of the mounting cavity 101 and does not rotate around the first direction. The first rotation pressure block 413 on the first rotation vertical beam 412 abuts against the first tangential force-sensitive core 61. The force-sensitive membrane 603 of the first tangential force-sensitive core 61 continues to deform. When the top surface of the first rotation vertical beam 412 abuts against the wall surface of the inner core 2, the deformation of the force-sensitive membrane 603 of the first tangential force-sensitive core 61 is the largest, and the measured value of the first tangential force-sensitive core 61 reaches the first preset force value. The first preset force value is the maximum measurement value that the first tangential force-sensitive core 61 can achieve when measuring the first tangential force. The top surface of the first rotating vertical beam 412 abuts against the wall surface of the inner core 2, which can prevent the first rotating pressure block 413 from continuing to press the first tangential force-sensitive core 61. In other embodiments of the present invention, the first rotating pressure block 413 may have a first protrusion, which abuts against the first tangential force-sensitive core 61. When the first rotating pressure block 413 abuts against the wall surface of the inner core 2, the measurement value of the first tangential force-sensitive core 61 reaches the first preset force value, which can be set according to actual needs.

[0063] In this embodiment, there are two second tangential force-sensitive cores 62, such as... Figure 6 As shown, the second rotating main support 51 includes a second rotating crossbeam 511, two second rotating connecting main beams 514, two second rotating vertical beams 512, and two second rotating pressure blocks 513. The second rotating crossbeam 511 is hinged to the inner core 2 and can rotate relative to the inner core 2 around a second direction. The two second rotating connecting main beams 514 are symmetrically arranged on the second rotating crossbeam 511 and are both fixedly connected to the cover plate 3. The two second rotating vertical beams 512 are symmetrically arranged on the second rotating crossbeam 511 and are respectively arranged in a one-to-one correspondence with the two second tangential force-sensitive cores 62. The second rotating pressure blocks 513 are arranged on the second rotating vertical beams 512, and the two second rotating pressure blocks 513 are arranged in a one-to-one correspondence with the two second rotating vertical beams 512.

[0064] like Figure 1 and Figure 2 As shown, the inner core 2 is also provided with a second through hole 202 that runs through the first direction. A second hinge support 53 is provided in the second through hole 202. The second rotating main support 51 is hinged to the second hinge support 53 and runs through the second through hole 202. The second rotating main support 51 can rotate around the second direction and abut against the second tangential force sensitive core 62 to realize the detection of the second tangential force. When the end face of the second rotating main support 51 abuts against the inner core 2, the measured value of the second tangential force sensitive core 62 reaches the maximum, which is the second preset force value.

[0065] When the second tangential force-sensitive core 62 detects the second tangential force, the cover plate 3 rotates relative to the inner core 2 around the second direction. At this time, the second decoupling rotating bracket 52 and the second rotating main bracket 51 rotate synchronously. Therefore, the cover plate 3 will not directly drive the inner core 2 to rotate. The inner core 2 is only affected by the first rotating main bracket 41. Since the inner core 2 is long enough, the bottom end of the inner core 2 abuts against the bottom wall of the mounting cavity 101 and will not rotate around the second direction. The second rotating pressure block 513 on the second rotating vertical beam 512 abuts against the second tangential force-sensitive core 62. The force-sensitive membrane 603 of the second tangential force-sensitive core 62 continues to deform. When the top surface of the second rotating vertical beam 512 abuts against the wall surface of the inner core 2, the deformation of the force-sensitive membrane 603 of the second tangential force-sensitive core 62 is the largest, and the measured value of the second tangential force-sensitive core 62 reaches the second preset force value. The second preset force value is the maximum measured value when the second tangential force-sensitive core 62 measures the second tangential force. The top surface of the second rotating vertical beam 512 abuts against the wall surface of the inner core 2, which can prevent the second rotating pressure block 513 from continuing to press the second tangential force-sensitive core 62. In other embodiments of the present invention, the second rotating pressure block 513 may have a second protrusion, which abuts against the second tangential force-sensitive core 62. When the second rotating pressure block 513 abuts against the wall surface of the inner core 2, the measured value of the second tangential force-sensitive core 62 reaches the second preset force value, which can be set according to actual needs.

[0066] like Figure 3 As shown, the mounting cavity 101 in this embodiment includes a first movable cavity 1011, a second movable cavity 1012, and a third movable cavity 1013 connected in sequence. The inner core 2 includes a main core 21, a connecting core 22, and a limiting block 23 fixedly connected in sequence. The main core 21 is located in the first movable cavity 1011, and the force transmission member 7 and the limiting block 23 are both located in the third movable cavity 1013. The connecting core 22 is located in the second movable cavity 1012, and the force transmission member 7 is sleeved on the connecting core 22. The force transmission member 7 limits the limiting block 23 in the third movable cavity 1013 to restrict the distance by which the main core 21 drives the limiting block 23 to move upward along the Z-axis direction through the connecting core 22. The limiting block 23 can also move along the first direction, the second direction, and the third direction. Specifically, the first movable cavity 1011 includes two cylindrical cavities with different diameters, and the second movable cavity 1012 and the third movable cavity 1013 are also cylindrical cavities.

[0067] When the cover plate 3 is subjected to a first force in a first direction, the cover plate 3 drives the force transmission component 7 to move along the first direction through the inner core 2, so that the force transmission component 7 abuts against the force-sensitive core 64 in the first direction, and the first force is transmitted to the force-sensitive core 64 in the first direction, realizing the measurement of the first force by the force-sensitive core 64 in the first direction; when the cover plate 3 is subjected to a second force in a second direction, the cover plate 3 drives the force transmission component 7 to move along the second direction through the inner core 2, so that the force transmission component 7 abuts against the force-sensitive core 65 in the second direction, and the second force is transmitted to the force-sensitive core 65 in the second direction, realizing the measurement of the second force by the force-sensitive core 65 in the second direction; when the cover plate 3 is subjected to a third force in a third direction, the cover plate 3 drives the inner core 2 to move along the third direction, and the inner core 2 abuts against the force-sensitive core 66 in the third direction, and the third force is transmitted to the force-sensitive core 66 in the third direction, realizing the measurement of the third force by the force-sensitive core 66 in the third direction.

[0068] like Figure 2 and Figure 3 As shown, the inner core 2 also includes a sleeve 24 fixed on the main core 21. The bottom of the first movable cavity 1011 is provided with a torque transmission groove 104. One end of the sleeve 24 is located in the torque transmission groove 104 and can rotate around a third direction. There are two third tangential force sensitive cores 63. The two third tangential force sensitive cores 63 are arranged in the torque transmission groove 104. One third tangential force sensitive core 63 can detect the third tangential force in the clockwise direction around the third direction, and the other third tangential force sensitive core 63 can detect the third tangential force in the counterclockwise direction around the third direction.

[0069] Specifically, in this embodiment, the torque transmission groove 104 consists of two torque arc-shaped grooves, and there are two third tangential force-sensitive cores 63, each of which is as follows: Figure 4 The crescent-shaped force-sensitive core shown has two cores fixed at the ends of two torque arc-shaped grooves. The sleeve 24 includes two arc-shaped cylinders corresponding to the two torque arc-shaped grooves. When detecting the third tangential force, the two arc-shaped cylinders can rotate within the two torque arc-shaped grooves, and both ends of one arc-shaped cylinder can abut against the two crescent-shaped force-sensitive cores. It should be noted that in other embodiments of the present invention, the shape of the third tangential force-sensitive core 63 is not limited to the crescent shape described above, but can also be other shapes; the torque transmission groove 104 can also be a torque annular transmission groove, with the two third tangential force-sensitive cores 63 fixed at intervals within the torque annular transmission groove, specifically set according to actual needs.

[0070] like Figure 2 and Figure 3As shown, the mounting cavity 101 in this embodiment also includes a receiving groove 1014, and the inner core 2 also includes an annular pressure plate 25 and an annular pressure block 26 fixed on the annular pressure plate 25. The annular pressure plate 25 is fixed on the main core 21 and located in the receiving groove 1014. There are four third-direction force-sensitive cores 66. Two third-direction force-sensitive cores 66 are set at the top of the receiving groove 1014 and face the annular pressure plate 25 to detect the third force along the third direction upward; two third-direction force-sensitive cores 66 are set at the bottom of the first movable cavity 1011 and face the sleeve 24 to detect the third force along the third direction downward. When the end face of the annular pressure plate 25 or the bottom end of the sleeve 24 abuts against the wall of the mounting cavity 101, the measured value of the third-direction force-sensitive core 66 reaches its maximum, and the measured value of the third-direction force-sensitive core 66 reaches the fifth preset force value.

[0071] Specifically, such as Figure 1 and Figure 2 As shown, the top of the receiving groove 1014 is provided with a third mounting groove 105, in which two third-direction force-sensitive cores 66 are installed in the third mounting groove 105, and the other two third-direction force-sensitive cores 66 are installed at the bottom of the first movable cavity 1011. In other embodiments, the number of third-direction force-sensitive cores 66 is not limited to the four in this embodiment, but can also be two, three or more than four, and at least one third-direction force-sensitive core 66 is installed in the third mounting groove 105 at the top of the receiving groove 1014 to realize the detection of the third force in the third direction upward; at least one third-direction force-sensitive core 66 is installed in the third mounting groove 105 at the bottom of the first movable cavity 1011 to realize the detection of the third force in the third direction downward.

[0072] When detecting the third force in the third direction, the cover plate 3 moves the inner core 2 upward, and the annular pressure block 26 abuts against the force-sensitive membrane 603 of the third-direction force-sensitive core 66. The force-sensitive membrane 603 undergoes slight deformation under pressure, and the hydraulic medium transmits the third force to the force-sensitive chip 602. When the upper end face of the annular pressure plate 25 abuts against the wall of the mounting cavity 101, the force-sensitive membrane 603 of the third-direction force-sensitive core 66 reaches its maximum deformation. At this time, the measured value of the third-direction force-sensitive core 66 is the maximum, which is the fifth preset force value. In this embodiment, the fifth preset force value is the maximum range of the third-direction force-sensitive core 66, which can be set according to actual needs. When detecting the third force acting downwards, the cover plate 3 drives the inner core 2 to move downwards, and the sleeve 24 abuts against the force-sensitive membrane 603 of the third-direction force-sensitive core 66. The force-sensitive membrane 603 undergoes slight deformation under pressure, and the hydraulic medium transmits the third force to the force-sensitive chip 602 to detect the third force acting downwards. When the third force reaches the fifth preset force value, the measured value of the third-direction force-sensitive core 66 is at its maximum, the lower end face of the annular pressure plate 25 abuts against the wall of the mounting cavity 101, and the force-sensitive membrane 603 of the third-direction force-sensitive core 66 reaches its maximum deformation.

[0073] like Figure 5 As shown, there are two force-sensitive cores 64 in the first direction and two force-sensitive cores 65 in the second direction. The force transmission component 7 is a cross-shaped component, which includes two first force transmission brackets 71 extending along the first direction and two second force transmission brackets 72 extending along the second direction. The two first force transmission brackets 71 correspond one-to-one with the two first force-sensitive cores 64, and the two second force transmission brackets 72 correspond one-to-one with the two second force-sensitive cores 65.

[0074] Specifically, such as Figure 3 As shown, the mounting cavity 101 is provided with two first mounting slots 102 and two second mounting slots 103. Each first mounting slot 102 is fixedly provided with a first directional force-sensitive core 64. When the end face of the first force transmission bracket 71 abuts against the wall of the mounting cavity 101, the measured value of the first directional force-sensitive core 64 reaches its maximum and reaches a third preset force value. Each second mounting slot 103 is provided with a second directional force-sensitive core 65. When the end face of the second force transmission bracket 72 abuts against the wall of the mounting cavity 101, the measured value of the second directional force-sensitive core 65 reaches its maximum and reaches a fourth preset force value.

[0075] like Figure 5As shown, the cross-shaped component in this embodiment also includes a force-transmitting connecting block 73, a first force-transmitting pressure block 74, and a second force-transmitting pressure block 75. The force-transmitting connecting block 73 has a through hole, through which one end of the connecting core 22 passes. Each first force-transmitting pressure block 74 is disposed at the end of a first force-transmitting bracket 71 and corresponds to a first directional force-sensitive core 64. When the first force-transmitting pressure block 74 abuts against the inner wall of the mounting cavity 101, the measured value of the first directional force-sensitive core 64 reaches its maximum, which is the third preset force value. The abutment between the first force-transmitting pressure block 74 and the inner wall of the mounting cavity 101 can prevent the first directional force-sensitive core 64 from being further squeezed, thus protecting the first directional force-sensitive core 64. Each second force transmission block 75 is disposed at the end of a second force transmission bracket 72 and corresponds to a second directional force-sensitive core 65. When the second force transmission block 75 abuts against the inner wall of the mounting cavity 101, the measured value of the second directional force-sensitive core 65 reaches its maximum, which is the fourth preset force value. The abutment between the second force transmission block 75 and the inner wall of the mounting cavity 101 can prevent the second directional force-sensitive core 65 from being squeezed further, thus protecting the second directional force-sensitive core 65.

[0076] In this embodiment, the cross-sectional shape of the force-transmitting connecting block 73 is square, and both the first force-transmitting bracket 71 and the second force-transmitting bracket 72 are cuboids with square longitudinal sections. In other embodiments, the cross-section of the force-transmitting connecting block 73 can also be circular, hexagonal, octagonal, or other shapes, and the first force-transmitting bracket 71 and the second force-transmitting bracket 72 can also be cylindrical brackets or brackets of other shapes, depending on actual needs.

[0077] It should be noted that, in other embodiments of the present invention, the diameter of the first force-transmitting block 74 may be smaller than the side length of the first force-transmitting bracket 71. When the end face of the first force-transmitting bracket 71 abuts against the inner wall of the mounting cavity 101, the measured value of the first directional force-sensitive core 64 reaches its maximum, which is the third preset force value. The abutment between the end face of the first force-transmitting bracket 71 and the inner wall of the mounting cavity 101 can limit the force-sensitive membrane 603 of the first directional force-sensitive core 64 from undergoing a greater first force and thus more severe deformation. The diameter of the second force-transmitting block 75 may be smaller than the side length of the second force-transmitting bracket 72. When the end face of the second force-transmitting bracket 72 abuts against the inner wall of the mounting cavity 101, the measured value of the second directional force-sensitive core 65 reaches its maximum, which is the fourth preset force value. The abutment between the end face of the second force-transmitting bracket 72 and the inner wall of the mounting cavity 101 can limit the force-sensitive membrane 603 of the second directional force-sensitive core 65 from undergoing a greater second force and thus more severe deformation.

[0078] In this embodiment, both the first force-transmitting block 74 and the second force-transmitting block 75 are abutting blocks. Each abutting block includes an abutting piece and an abutting boss. The abutting boss of the first force-transmitting block 74 corresponds to the first-direction force-sensitive core 64, and the abutting boss of the second force-transmitting block 75 corresponds to the second-direction force-sensitive core 65. Specifically, when detecting the first force in the first direction, the first force-transmitting block 74 can transmit the first force to the first-direction force-sensitive core 64. The force-sensitive membrane 603 of the first-direction force-sensitive core 64 undergoes slight deformation under pressure. The hydraulic medium transmits the first force to the force-sensitive chip 602. When the abutting piece of the first force-transmitting block 74 abuts against the inner wall of the mounting cavity 101, the force-sensitive membrane 603 of the first-direction force-sensitive core 64 reaches its maximum deformation. At this time, the measured value of the first-direction force-sensitive core 64 is the maximum, and the first force reaches the third preset force value. When detecting the second force in the second direction, the second force-transmitting block 75 can transmit the second force to the force-sensitive core 65 in the second direction. The force-sensitive diaphragm 603 of the force-sensitive core 65 undergoes slight deformation under pressure. The hydraulic medium transmits the second force to the force-sensitive chip 602. When the abutting piece of the second force-transmitting block 75 abuts against the inner wall of the mounting cavity 101, the force-sensitive diaphragm 603 of the force-sensitive core 65 in the second direction reaches its maximum deformation. At this time, the measured value of the force-sensitive core 65 in the second direction is the maximum, and the second force reaches the fourth preset force value. In this embodiment, the third preset force value is the maximum range of the force-sensitive core 64 in the first direction, and the fourth preset force value is the maximum range of the force-sensitive core 65 in the second direction. The specific values ​​of the third and fourth preset force values ​​are set according to actual needs.

[0079] like Figure 1 and Figure 2 As shown, in this embodiment, the first through hole 201 and the second through hole 202 are both provided on the main core 21. The sleeve 24 is provided with a third through hole 203 facing the first through hole 201 and a fourth through hole 204 facing the second through hole 202. The first rotating main support 41 is hinged to the first hinge support 43 and passes through the first through hole 201 and the third through hole 203. The second rotating main support 51 is hinged to the second hinge support 53 and passes through the second through hole 202 and the fourth through hole 204. The main core 21 in this embodiment is also provided with a first mounting hole (not shown in the figure) extending in the second direction and a second mounting hole (not shown in the figure) extending in the first direction. A tightening tool can install the first rotating main support 41 on the first hinge support 43 through the first mounting hole, and a tightening tool can install the second rotating main support 51 on the second hinge support 53 through the second mounting hole.

[0080] like Figure 1 and Figure 2As shown, the six-dimensional force sensor in this embodiment also includes a PCB 9. The PCB 9 is electrically connected to the first tangential force-sensitive core 61, the second tangential force-sensitive core 62, the third tangential force-sensitive core 63, the first directional force-sensitive core 64, the second directional force-sensitive core 65, and the third directional force-sensitive core 66, respectively. The mounting base 1 includes an upper base 11, an intermediate connecting base 12, and a lower base 13 that are fixedly connected in sequence from top to bottom.

[0081] like Figure 7 As shown, the chip-type force-sensitive core of this embodiment includes a core base 601, a force-sensitive chip 602, and a force-sensitive membrane 603. The force-sensitive membrane 603 is fixed on the core base 601, and the two together form a liquid cavity 6010. The liquid cavity 6010 is filled with a hydraulic medium. The force-sensitive chip 602 is fixed on the bottom wall of the liquid cavity 6010. The force-sensitive chip 602 can detect the force transmitted to the hydraulic medium through the force-sensitive membrane 603. In this embodiment, the hydraulic medium is silicone oil or other incompressible and stable liquids, which are filled according to actual needs. Specifically, when the chip-type force-sensitive core is a first-direction force-sensitive core 64, a second-direction force-sensitive core 65, a third-direction force-sensitive core 66, a first-tangential force-sensitive core 61, or a second-tangential force-sensitive core 62, the outer contour of the core base 601 is cylindrical; when the chip-type force-sensitive core is a third-tangential force-sensitive core 63, the outer contour of the core base 601 is crescent-shaped. It should be noted that in other embodiments of the present invention, the structure of the chip-type force-sensitive core is not limited to the above limitation, and may also be a ceramic capacitive pressure core including the force-sensitive chip 602 or other chip-type force-sensitive cores including the force-sensitive chip 602, depending on actual needs.

[0082] The following steps can be followed when assembling this six-dimensional force sensor:

[0083] The PCB 9 is fixed to the top of the upper seat 11, and the two third-direction force-sensitive cores 66 for detecting the third direction are fixed in the third mounting slot 105 of the upper seat 11.

[0084] The first rotating crossbeam 411 and the second rotating crossbeam 511 are respectively installed on the main core 21. The main core 21, sleeve 24, annular pressure plate 25 and annular pressure block 26 are an integral structure.

[0085] Two first rotating vertical beams 412 with first rotating pressure blocks 413 are fixed at both ends of the first rotating horizontal beam 411, and two second rotating vertical beams 512 with second rotating pressure blocks 513 are fixed at both ends of the second rotating horizontal beam 511.

[0086] Two first rotating connecting main beams 414 are respectively installed at both ends of the first rotating crossbeam 411, and two second rotating connecting main beams 514 are respectively installed at both ends of the second rotating crossbeam 511.

[0087] The above structure is installed into the mounting cavity 101, and the connecting core 22 is fixed on the main core 21;

[0088] After installing two third tangential force-sensitive cores 63 and two third tangential force-sensitive cores 66 on the intermediate connecting seat 12, fix the intermediate connecting seat 12 on the upper seat 11, fix the two first directional force-sensitive cores 64 and the second directional force-sensitive cores 65 in the first mounting groove 102 and the second mounting groove 103 of the intermediate connecting seat 12, and at the same time, sleeve the force transmission component 7 on the connecting core 22 so that the force transmission component 7 faces the first directional force-sensitive core 64 and the second directional force-sensitive core 65.

[0089] The limiting block 23 is fixedly installed at the end of the connecting core 22, and the lower seat 13 is fixedly installed on the intermediate connecting seat 12;

[0090] The fixing seat 81, on which the first decoupling rotating bracket 42 and the second decoupling rotating bracket 52 are installed, is fixedly installed on the cover plate 3, so that both ends of the first decoupling rotating bracket 42 and both ends of the second decoupling rotating bracket 52 are fixedly connected to the cover plate 3.

[0091] The fixing base 81 is fixedly installed on the top of the inner core 2, and the two first rotating connecting main beams 414 and the two second rotating connecting main beams 514 are fixed on the cover plate 3. At this point, the six-dimensional force sensor is assembled.

[0092] It should be noted that the above assembly steps are only one method of assembling a six-dimensional force sensor provided in this embodiment. The specific method can be adjusted according to actual needs, and will not be limited here.

[0093] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. A six-dimensional force sensor, characterized in that, include: The mounting base has a mounting cavity inside; The inner core and the cover plate are provided. The inner core is located in the mounting cavity. The cover plate is disposed on the inner core and spaced apart from the mounting base. The cover plate is rotatable relative to the inner core around a first direction and a second direction. The cover plate can also drive the inner core to rotate around a third direction and can move along the first direction, the second direction and the third direction. The first rotating connection assembly includes a first rotating main bracket disposed on the inner core and fixedly connected to the cover plate, the first rotating main bracket being capable of rotating relative to the inner core about the first direction; A first tangential force-sensitive core is disposed on the inner core or the first rotating main support. The first tangential force-sensitive core can abut against the first rotating main support or the inner core to detect the first tangential force generated when the cover plate rotates around the first direction. The second rotating connection assembly includes a second rotating main bracket disposed on the inner core and fixedly connected to the cover plate, the second rotating main bracket being capable of rotating relative to the inner core about the second direction; A second tangential force-sensitive core is disposed in the inner core or the first rotating main support. The second tangential force-sensitive core can abut against the second rotating main support or the inner core to detect the second tangential force generated when the cover plate rotates in the second direction. A third tangential force-sensitive core is disposed within the mounting cavity, and the inner core is capable of abutting against the third tangential force-sensitive core to detect the third tangential force generated when the inner core rotates around the third direction; A force transmission component is sleeved on the inner core and can move with the inner core along the first direction and the second direction, while the inner core can move relative to the force transmission component along the third direction. A first-direction force-sensitive core is disposed on the side wall of the mounting cavity or on the force transmission component. The first-direction force-sensitive core can abut against the force transmission component or the mounting base to detect the first force in the first direction. A second-direction force-sensitive core is disposed on the side wall of the mounting cavity or on the force transmission component. The second-direction force-sensitive core can abut against the force transmission component or the mounting base to detect the second force in the second direction. A third-direction force-sensitive core is disposed on the inner wall of the mounting cavity or on the inner core. The third-direction force-sensitive core can abut against the inner core or the mounting base to detect the third-direction third force. The first tangential force-sensitive core, the second tangential force-sensitive core, the third tangential force-sensitive core, the first directional force-sensitive core, the second directional force-sensitive core, and the third directional force-sensitive core are all chip-type force-sensitive cores.

2. The six-dimensional force sensor according to claim 1, characterized in that, The first rotating connection assembly further includes a first decoupling rotating bracket, which is disposed at the top of the inner core and fixedly connected to the cover plate, so that the cover plate can rotate relative to the inner core in the first direction; The second rotating connection assembly further includes a second decoupling rotating bracket, which is disposed at the top of the inner core and fixedly connected to the cover plate, so that the cover plate can rotate relative to the inner core in the second direction; The line connecting the rotation centers of the first decoupled rotating bracket, the second decoupled rotating bracket, the first rotating main bracket, and the second rotating main bracket extends along the third direction.

3. The six-dimensional force sensor according to claim 1, characterized in that, The number of the first tangential force-sensitive cores is two. The first rotating main support includes a first rotating crossbeam, two first rotating connecting main beams and two first rotating vertical beams. The first rotating crossbeam is hinged to the inner core and can rotate relative to the inner core around the first direction. The two first rotating connecting main beams are symmetrically arranged on the first rotating crossbeam and are both fixedly connected to the cover plate. The two first rotating vertical beams are symmetrically arranged on the first rotating crossbeam and correspond one-to-one with the two first tangential force-sensitive cores.

4. The six-dimensional force sensor according to claim 1, characterized in that, The number of the second tangential force-sensitive cores is two. The second rotating main support includes a second rotating crossbeam, two second rotating connecting main beams and two second rotating vertical beams. The second rotating crossbeam is hinged to the inner core and can rotate relative to the inner core around the second direction. The two second rotating connecting main beams are symmetrically arranged on the second rotating crossbeam and are both fixedly connected to the cover plate. The two second rotating vertical beams are symmetrically arranged on the second rotating crossbeam and correspond one-to-one with the two second tangential force-sensitive cores.

5. The six-dimensional force sensor according to claim 1, characterized in that, The mounting cavity includes a first movable cavity, a second movable cavity, and a third movable cavity connected in sequence. The inner core includes a main core, a connecting core, and a limiting block that are fixedly connected in sequence. The main core is located in the first movable cavity. The force transmission component and the limiting block are both located in the third movable cavity. The connecting core is located in the second movable cavity. The force transmission component is sleeved on the connecting core and limits the limiting block in the third movable cavity.

6. The six-dimensional force sensor according to claim 5, characterized in that, The inner core also includes a sleeve fixed to the main core body. The bottom of the first movable cavity is provided with a torque transmission groove. One end of the sleeve is located in the torque transmission groove and can rotate around the third direction. There are two third tangential force sensitive cores. The two third tangential force sensitive cores are arranged in the torque transmission groove. One third tangential force sensitive core can detect the third tangential force in the clockwise direction around the third direction, and the other third tangential force sensitive core can detect the third tangential force in the counterclockwise direction around the third direction.

7. The six-dimensional force sensor according to claim 6, characterized in that, The mounting cavity further includes a receiving groove, and the inner core further includes an annular pressure plate and an annular pressure block disposed on the annular pressure plate. The annular pressure plate is fixed on the main core and located in the receiving groove. The number of the third-direction force-sensitive cores is at least two, and at least one of the third-direction force-sensitive cores is disposed at the top of the receiving groove and directly facing the annular pressure plate to detect the third force along the third direction. At least one of the third-direction force-sensitive cores is disposed at the bottom end of the first active cavity and directly opposite the sleeve, in order to detect the third force acting downward along the third direction.

8. The six-dimensional force sensor according to claim 1, characterized in that, The number of the first directional force-sensitive core and the number of the second directional force-sensitive core are both two. The force transmission component is a cross component, which includes two first force transmission brackets extending along the first direction and two second force transmission brackets extending along the second direction. The two first force transmission brackets correspond one-to-one with the two first directional force-sensitive cores, and the two second force transmission brackets correspond one-to-one with the two second directional force-sensitive cores.

9. The six-dimensional force sensor according to claim 8, characterized in that, The mounting cavity is provided with two first mounting slots and two second mounting slots. Each first mounting slot is fixedly provided with a first directional force-sensitive core. When the measured value of the first directional force-sensitive core reaches a third preset force value, the end face of the first force transmission bracket abuts against the wall of the mounting cavity. Each second mounting slot is fixedly provided with a second directional force-sensitive core. When the measured value of the second directional force-sensitive core reaches a fourth preset force value, the end face of the second force transmission bracket abuts against the wall of the mounting cavity.

10. The six-dimensional force sensor according to claim 1, characterized in that, The chip-type force-sensitive core includes a core base, a force-sensitive chip, and a force-sensitive membrane. The force-sensitive membrane is fixed on the core base, and the two form a liquid cavity. The liquid cavity is filled with hydraulic medium. The force-sensitive chip is fixed on the bottom wall of the liquid cavity. The chip-type force-sensitive core can detect the force transmitted to the hydraulic medium through the force-sensitive membrane.

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