Pulse ion beam control system and method for aspheric optical element reshaping

Abstract

The application discloses a kind of pulse ion beam control system and method for aspheric optical element modification, it is related to optical element manufacturing technical field, the temperature rise behavior of the scanning path point is predicted by simulation, temperature rise prediction data Tpk is output, and further adjust time interval based on the result, generate optimized path control instruction set Opt, in actual modification process, by dynamic comparison of real-time temperature rise response value Trl With the temperature rise prediction data Tpk, temperature rise deviation data Dev is obtained, and a thermal feedback deviation set DevSet is formed, the closed-loop verification and thermal control correction capability of prediction and actual processing behavior is realized, based on the modification residual diagram Res formed by secondary surface shape detection, the quantitative determination of modification effect is realized, effectively solve the technical short board in the prior art, without considering the thermal coupling cumulative effect, unable to dynamically identify thermal abnormal area and scanning path cannot fuse thermal structure sensitivity.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical element manufacturing, in particular to a pulse ion beam control system and method for aspheric optical element shaping. BACKGROUND

[0002] With the wide application of optical systems in the fields of aerospace, astronomical observation, laser communication and other frontier technologies, the manufacturing precision of optical elements is continuously improved. In particular, in these systems, the transmission quality of the optical wavefront directly determines the imaging performance and signal processing capability of the overall system, so extremely strict standards are put forward for the control of the surface topography of optical elements. In this broad field of optical manufacturing, aspheric optical elements are widely used in high-precision fields such as space telescopes and large-aperture infrared optical systems because they can effectively eliminate spherical aberration, improve system compactness and imaging quality. Compared with traditional spherical elements, aspheric surfaces have more complex topography, higher manufacturing difficulty and more sensitive error correction, which puts higher requirements on the manufacturing process.

[0003] In the pulse ion beam shaping process of aspheric elements, due to the uneven distribution of the shaping area, the sharp change of the curvature, and the local high-frequency characteristics of the error, multiple ion beam scans are usually required in a small area, i.e. the so-called "local pulse stacking processing". However, the existing process methods mostly use equal paths or fixed sequences for scanning, without considering the thermal coupling effect of adjacent pulses in time and space dimensions. Since the high-energy ion beam released by each pulse will cause local energy deposition on the material at the micro level, even if the surface of the material does not significantly heat up, the thermal accumulation effect of the micro area cannot be ignored under the stacking effect of continuous pulses. The existing control strategy does not predict or adjust the micro area thermal field evolution, resulting in the appearance of "thermal lag area" or "thermal peak overlapping area" in some areas during repeated irradiation.

[0004] In addition, the fixed scanning path also makes the thermal field distribution in the shaping process present uneven accumulation characteristics. Some areas have a temperature rise due to continuous processing, while other areas cannot maintain thermal balance due to long scanning intervals. This unevenness will further cause inconsistent responses of the microstructure of the material, affecting the removal uniformity, and even causing disturbance to the surface substructure. SUMMARY

[0005] In view of the deficiencies of the prior art, the present application provides a pulse ion beam control system and method for aspheric optical element shaping, which solves the problems mentioned in the background art.

[0006] To achieve the above purpose, the present application is implemented by the following technical scheme: a pulse ion beam control method for aspheric optical element shaping, comprising the following steps:

[0007] S1. Perform surface shape detection on aspherical optical elements, collect the initial surface shape error map Err and the target curvature response map Cur, and combine them to form the error and curvature feature set ErrSet;

[0008] S2. Based on the error and curvature feature set ErrSet, combined with the pulsed ion beam input power parameters and the thermal diffusion characteristics of the optical element materials, a thermal conduction response model is established to predict the heat accumulation trend map Tmp and the thermal response sensitive area map Hot during the scanning process, and generate the thermal sensitive feature set HotSet.

[0009] S3. Combining the curvature information in the thermally sensitive feature set HotSet and the error and curvature feature set ErrSet, construct the regional thermal-geometric overlay priority scoring map Seq, and generate the scan path control vector sequence Vec, which are then combined to form the scan planning feature set SeqSet;

[0010] S4. Based on the scan planning feature set SeqSet, input the thermal simulation module to predict and optimize the temperature rise peak of the path point and the interval adjustment, and output the path control instruction set Opt and the temperature rise prediction data Tpk to form the optimized control feature set OptSet.

[0011] S5. Perform pulsed ion beam shaping operation according to the optimized control feature set OptSet, and at the same time collect the real-time temperature rise response value Trl of each path point, and compare and analyze it with the predicted temperature rise data Tpk to obtain the temperature rise deviation data Dev, and combine them to form the thermal feedback deviation set DevSet.

[0012] S6. Perform secondary surface shape detection on the aspherical optical element after the shape modification, obtain the modified error map Epr, and compare it with the initial surface shape error map Err in the error and curvature feature set ErrSet to obtain the modified residual map Res, which is used to determine whether the surface shape convergence requirement is met.

[0013] Preferably, S1 includes S11 and S12;

[0014] S11. Using a phase shift interferometer or other high-resolution surface shape detection equipment, perform surface scanning on the aspherical optical element to be modified, obtain the current real surface shape data of the aspherical optical element, and compare it point by point with the aspherical theoretical target surface shape model, calculate the height deviation of each point in space, and form a two-dimensional distributed initial surface shape error map Err. The initial surface shape error map Err is used to identify the degree of local material removal requirements in each region.

[0015] S12, based on the curved surface parameter equation defined by the aspheric theoretical target surface shape model, performing local geometric structure analysis on different spatial positions of the aspheric optical element, calculating the curvature change rate at each position, and obtaining a two-dimensional spatial curvature distribution reflecting the degree of local surface mutation, the two-dimensional spatial curvature distribution result being output in the form of an image, named as a target curvature response map Cur, used to indicate the geometric complexity and processing response sensitivity of each region of the aspheric optical element surface, and integrated with the initial surface error map Err to obtain an error and curvature feature set ErrSet.

[0016] Preferably, the S2 comprises S21 and S22.

[0017] S21, based on the initial surface error map Err and the target curvature response map Cur contained in the error and curvature feature set ErrSet, combining the input power parameter of the pulsed ion beam used for reshaping, and the material thermal diffusion coefficient of the aspheric optical element, constructing a two-dimensional spatial heat conduction response model, simulating the instantaneous energy injection process generated by pulsed scanning at each processing point through simulation, calculating the diffusion behavior of thermal energy on the surface and near-surface layer region of the aspheric optical element, and accumulating to form a heat accumulation trend map Tmp in the time dimension, used to describe the local temperature rise evolution characteristics in the scanning process;

[0018] S22, based on the heat accumulation trend map Tmp, setting a thermal stability threshold, and identifying the region where the local temperature rise exceeds the threshold in the heat accumulation trend map Tmp, marking the identified high-temperature response region in the spatial dimension to form a heat response sensitive region map Hot, used to divide the thermal safety zone and the thermal coupling risk zone, combining the heat accumulation trend map Tmp and the heat response sensitive region map Hot to form a unified output result, named as a heat sensitive feature set HotSet.

[0019] Preferably, the S3 comprises S31 and S32.

[0020] S31, based on the heat response sensitive region map Hot in the heat sensitive feature set HotSet and the target curvature response map Cur in the error and curvature feature set ErrSet, performing fusion analysis on the surface region of the aspheric optical element, comprehensively considering the heat response sensitivity and geometric structure mutation degree of the high-temperature response region, and giving a processing priority score to each high-temperature response region through weighted combination to form a spatial distribution type of regional heat-geometric superposition priority score map Seq.

[0021] S32, based on the constructed regional thermal-geometric superposition priority score map Seq, in the order of score value from high to low, all scanning coordinate points in the high temperature response region marked by the thermal response sensitive region map Hot in the aspheric optical element are sorted, the spatial position of each scanning coordinate point and its corresponding initial scanning time are determined, a structured path vector sequence is generated, named as a scanning path control vector sequence Vec, the scanning path control vector sequence Vec is combined with the regional thermal-geometric superposition priority score map Seq to form a unified output set, named as a scanning planning feature set SeqSet.

[0022] Preferably, the S4 comprises S41 and S42.

[0023] S41, based on the scanning path control vector sequence Vec in the scanning planning feature set SeqSet, the scanning coordinate points in each vector and their initial scanning time are input to a thermal response simulation module, the material thermal diffusion characteristics of the aspheric optical element and the pulsed ion beam input power parameters are combined to calculate the peak temperature rise of each scanning coordinate point in the scanning process, and the temperature rise prediction result is output, named as temperature rise prediction data Tpk.

[0024] Preferably, S42, according to the temperature rise prediction data Tpk, the initial time of each scanning coordinate point in the scanning path control vector sequence Vec is adjusted, for the scanning coordinate points with temperature rise peak value exceeding the preset safety threshold, the scanning interval time is dynamically increased; for the coordinate points with safe temperature rise, the original rhythm is maintained, the adjusted time data and the original spatial coordinates are combined to generate the optimized path instructions, named as a path control instruction set Opt, the path control instruction set Opt and the temperature rise prediction data Tpk are combined to form a unified output set, named as an optimized control feature set OptSet.

[0025] Preferably, the S5 comprises S51 and S52.

[0026] S51, according to the path control instruction set Opt contained in the optimized control feature set OptSet, the pulsed ion beam equipment is controlled to perform the shape modification operation of the aspheric optical element according to the specified scanning path and scanning time sequence, in the shape modification process, for each scanning coordinate point from the scanning path control vector sequence Vec, real-time temperature response is collected through non-contact thermal field sensing means, actual temperature rise data of each coordinate point in the processing process is output, named as real-time thermal response data Trl.

[0027] Preferably, S52, the real-time thermal response data Trl is compared with the temperature rise prediction data Tpk by coordinate points one by one, the prediction error is calculated, the data set representing the degree of prediction deviation is generated, named temperature rise deviation data Dev, the real-time thermal response data Trl and the temperature rise deviation data Dev are combined to form a unified output set, named thermal feedback deviation set DevSet, which is used to evaluate the simulation accuracy and the thermal stability of the processing process.

[0028] Preferably, the S6 includes S61 and S62;

[0029] S61, using a phase shift interferometer or other high-resolution surface shape detection equipment, the aspheric optical element after completing the pulse ion beam reshaping is detected for the second time to obtain the current actual surface shape data, and the actual surface shape data is compared with the aspheric theoretical target surface shape model to form the post-reshaping error map Epr, and the post-reshaping error map Epr is compared with the initial surface shape error map Err point by point to output a two-dimensional image representing the surface shape error change, named as the reshaping residual error map Res;

[0030] S62, analyzing the reshaping residual error map Res, comparing the error residual values of all scanning coordinate points in the high-temperature response area marked in the thermal response sensitive area map Hot in the reshaping residual error map Res with the set surface shape error convergence threshold value point by point;

[0031] When the error residual values of all scanning coordinate points are less than the surface shape error convergence threshold value, it is determined that the reshaping process meets the error convergence requirement;

[0032] When the error residual value of any scanning coordinate point exceeds the surface shape error convergence threshold value, it is determined that the error has not completely converged, and the next round of reshaping process is automatically triggered, the reshaping residual error map Res is used as a new input error map to replace the original initial surface shape error map, and the original target curvature response map Cur and the thermal response sensitive area map Hot are used together to regenerate the updated error and curvature feature set ErrSet.

[0033] A pulse ion beam control system for aspheric optical element reshaping, comprising an element detection module, a thermal conduction response model construction module, a region scoring and marking module, a thermal simulation module, a reshaping operation module, and a secondary shape detection optimization module;

[0034] The element detection module detects the surface shape of the aspheric optical element, collects the initial surface shape error map Err and the target curvature response map Cur, and combines to form the error and curvature feature set ErrSet;

[0035] The heat conduction response model construction module establishes a heat conduction response model based on the error and curvature feature set ErrSet, in combination with the pulse ion beam input power parameter and the thermal diffusion characteristics of the optical element material, predicts a heat accumulation trend graph Tmp and a heat response sensitive area graph Hot in the scanning process, and generates a heat sensitive feature set HotSet;

[0036] The area score marking module combines the heat sensitive feature set HotSet and the curvature information in the error and curvature feature set ErrSet, constructs an area heat-geometry superposition priority score graph Seq, and generates a scanning path control vector sequence Vec, which are combined to form a scanning planning feature set SeqSet;

[0037] The heat simulation module inputs the scanning planning feature set SeqSet into the heat simulation module, predicts and interval adjusts and optimizes the temperature rise peak value of the path point, outputs a path control instruction set Opt and a temperature rise prediction data Tpk, and constitutes an optimized control feature set OptSet;

[0038] The reshaping operation module performs pulse ion beam reshaping operation according to the optimized control feature set OptSet, simultaneously collects real-time temperature rise response values Trl of each path point, and compares and analyzes the real-time temperature rise response values Trl with the predicted temperature rise data Tpk to obtain temperature rise deviation data Dev, which are combined to form a heat feedback deviation set DevSet;

[0039] The secondary surface shape detection optimization module performs secondary surface shape detection on the aspheric optical element after the reshaping is completed, obtains a reshaped error graph Epr, and compares the reshaped error graph Epr with an initial surface shape error graph Err in the error and curvature feature set ErrSet to obtain a reshaping residual error graph Res, which is used to judge whether the surface shape convergence requirement is met.

[0040] The present application provides a kind of pulse ion beam control system and method of aspheric optical element reshaping, with the following beneficial effects:

[0041] (1) By simulating the temperature rise behavior of the scanning path points, outputting temperature rise prediction data Tpk, and further adjusting the time interval based on the results, generating an optimized path control instruction set Opt to control thermal stacking behavior, significantly suppressing the sub-surface stress accumulation phenomenon induced by micro-region thermal coupling, in the actual shaping process, by dynamically comparing the real-time temperature rise response value Trl with the temperature rise prediction data Tpk, obtaining temperature rise deviation data Dev, and forming a thermal feedback deviation set DevSet, realizing the closed-loop verification and thermal control correction ability of prediction and actual processing behavior, based on the residual error map Res formed by the secondary surface shape detection, realizing the quantitative judgment of the shaping effect, ensuring that the shaping termination judgment has the precision response ability of the thermal field abnormal area, The overall scheme effectively solves the technical shortcomings in the prior art that do not consider the cumulative effect of thermal coupling, cannot dynamically identify thermal abnormal areas, and the scanning path cannot integrate thermal structure sensitivity, greatly improving the stability, accuracy and process adaptive ability of aspheric optical element shaping.

[0042] (2) By fusing the thermal response sensitive area graph Hot in the thermal sensitive feature set HotSet and the target curvature response graph Cur in the error and curvature feature set ErrSet, forming a regional thermal-geometric superposition priority scoring graph Seq through weighted calculation, accurately expressing the comprehensive processing sensitivity of each region in the spatial dimension; then, combined with the scoring and sorting results, generate a scanning path control vector sequence Vec containing coordinate position and initial time, calculate the peak temperature rise of each scanning coordinate point, form the temperature rise prediction data Tpk; further according to the time sequence fluctuation characteristics of the temperature rise prediction data Tpk, dynamically adjust the scanning time rhythm of the thermal high-risk points, output the path control instruction set Opt with time-space adaptability, so as to realize the time avoidance and order regularization of high-temperature coupling points in the path planning stage, effectively avoid the risk of structure distortion caused by local thermal focusing and accumulation, significantly improve the thermal field uniformity and control foresight in the shaping process of aspheric optical elements.

[0043] (3) the aspheric optical element is shaped by the pulse ion beam, the temperature response value of each coordinate point from the scanning path control vector sequence Vec is collected in real time by using the thermal field sensing technology, real-time thermal response data Trl is output, the simulation model accuracy is verified and potential thermal stability abnormalities in the processing process are perceived, the aspheric optical element after shaping is subjected to a second surface shape detection, the shaping error graph Epr is output, and is compared with the initial surface shape error graph Err point by point to form a shaping residual error graph Res, a judgment result is generated, if the error convergence standard is met, the shaping error graph Epr is archived, which is used for detection verification and subsequent process data accumulation; if not, the next round of shaping is automatically triggered to form a closed-loop iteration process. The method significantly enhances the data driving capability and abnormality coping capability in the shaping process, realizes the dynamic cooperative judgment of the thermal behavior and error response in the processing process, and builds an intelligent shaping mechanism which is iterative, terminable and evolvable through the error tracking control model, and overcomes the problems of feedback loss, weak precision convergence control and unquantifiable shaping effect in the prior art. BRIEF DESCRIPTION OF DRAWINGS

[0044] Figure 1 A pulse ion beam control method block diagram flowchart for aspheric optical element shaping of the present application;

[0045] Figure 2 A pulse ion beam control system step diagram for aspheric optical element shaping of the present application. DETAILED DESCRIPTION

[0046] The technical solutions in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application. Embodiment 1

[0047] The present application provides a pulse ion beam control method for aspheric optical element shaping, please refer to Figure 1 , comprising the following steps:

[0048] S1, the surface shape of the aspheric optical element is detected, the initial surface shape error graph Err and the target curvature response graph Cur are collected, and the error and curvature feature set ErrSet is formed by combination;

[0049] S2, based on the error and curvature feature set ErrSet, combined with the input power parameter of the pulsed ion beam and the thermal diffusion characteristics of the optical element material, a heat conduction response model is established to predict the heat accumulation trend graph Tmp and the heat response sensitive area graph Hot in the scanning process, and a heat sensitive feature set HotSet is generated;

[0050] S3, combined with the heat sensitive feature set HotSet and the curvature information in the error and curvature feature set ErrSet, a regional heat-geometry superposition priority score graph Seq is constructed, and a scanning path control vector sequence Vec is generated to form a scanning planning feature set SeqSet;

[0051] S4, based on the scanning planning feature set SeqSet, input the heat simulation module, predict and interval adjust the temperature rise peak value of the path point, output the path control instruction set Opt and the temperature rise prediction data Tpk, and constitute an optimized control feature set OptSet;

[0052] S5, according to the optimized control feature set OptSet, the pulsed ion beam is operated for shaping, the real-time temperature rise response value Trl of each path point is collected, and the real-time temperature rise response value Trl is compared with the predicted temperature rise data Tpk to obtain the temperature rise deviation data Dev, and a heat feedback deviation set DevSet is formed;

[0053] S6, the aspheric optical element after the shaping is detected for secondary surface shape, the error graph Epr after the shaping is obtained, and the error graph Epr after the shaping is compared with the initial surface shape error graph Err in the error and curvature feature set ErrSet to obtain the shaping residual error graph Res, which is used to judge whether the surface shape convergence requirement is met.

[0054] In this embodiment, by structurally describing the surface error and geometric complexity of the aspherical optical element, the heat accumulation trend graph Tmp and the heat response sensitive area graph Hot generated by the heat conduction response modeling are first integrated before the path planning, so that the scanning path can be dynamically adjusted based on the regional heat-geometric superposition priority score graph Seq, and the temperature rise behavior of the scanning path point is predicted by simulation to output the temperature rise prediction data Tpk. Based on the results, the time interval is further adjusted to generate the optimized path control instruction set Opt to control the heat stacking behavior, thereby significantly suppressing the sub-surface stress accumulation phenomenon induced by micro-region heat coupling. In the actual shaping process, by dynamically comparing the real-time temperature rise response value Trl and the temperature rise prediction data Tpk, the temperature rise deviation data Dev is obtained, and a heat feedback deviation set DevSet is formed to realize the closed-loop verification and thermal control correction capability of the predicted and actual processing behavior. Finally, based on the residual error graph Res formed by the secondary surface detection, the shaping effect is quantitatively judged to ensure that the shaping termination judgment has the precision response capability of the thermal field abnormal area, and the overall scheme effectively solves the technical shortcomings of not considering the heat coupling accumulation effect, unable to dynamically identify the thermal abnormal area, and the scanning path cannot integrate the heat structure sensitivity in the prior art, greatly improving the stability, accuracy and process adaptive ability of the aspherical optical element shaping. Embodiment 2

[0055] This embodiment is an explanation and description in embodiment 1, please refer to Figure 1 , in particular: the S1 includes S11 and S12;

[0056] S11, using a phase shift interferometer or other high-resolution surface detection equipment, surface scanning is performed on the aspherical optical element to be shaped, the current real surface shape data of the aspherical optical element is obtained, and point-by-point comparison is performed with the aspherical theoretical target surface shape model, the height deviation of each point in space is calculated, and an initial surface error graph Err in two-dimensional distribution is formed. The initial surface error graph Err is used to identify the local material removal requirement degree of each region;

[0057] S12, based on the curved surface parameter equation defined by the aspherical theoretical target surface shape model, local geometric structure analysis is performed on different spatial positions of the aspherical optical element, the curvature change rate at each position is calculated, and a two-dimensional spatial curvature distribution reflecting the local curvature mutation degree is obtained. The two-dimensional spatial curvature distribution result is output in the form of an image, named as a target curvature response graph Cur, which is used to indicate the geometric complexity and processing response sensitivity of each region of the aspherical optical element surface, and is integrated with the initial surface error graph Err to obtain an error and curvature feature set ErrSet.

[0058] The S2 includes S21 and S22;

[0059] S21, based on the error and curvature feature set ErrSet containing the initial surface error map Err and the target curvature response map Cur, combining the input power parameter of the pulse ion beam for shaping, and the thermal diffusivity of the material of the aspheric optical element, a two-dimensional space heat conduction response model is constructed, the instantaneous energy injection process generated by pulse scanning at each processing point is simulated by simulation method, the diffusion behavior of thermal energy on the surface and near surface layer region of the aspheric optical element is calculated, and the heat accumulation trend graph Tmp is accumulated in time dimension, which is used to describe the local temperature rise evolution characteristics in the scanning process;

[0060] S22, based on the heat accumulation trend graph Tmp, setting a thermal stability threshold, and identifying the area where the local temperature rise exceeds the threshold in the heat accumulation trend graph Tmp, marking the identified high temperature response area in the spatial dimension to form a heat response sensitive area graph Hot, which is used to divide the heat safety zone and the heat coupling risk zone, combining the heat accumulation trend graph Tmp and the heat response sensitive area graph Hot to form a unified output result, named as heat sensitive feature set HotSet.

[0061] In this embodiment, by jointly modeling the surface error state and thermal response characteristics of the aspheric optical element, the structural and regional processing sensitivity recognition ability is provided before the shaping stage, the initial surface error map Err is calculated by point height deviation, which accurately describes the removal amount requirement distribution of each region, and the target curvature response map Cur is constructed based on the aspheric theory target surface model, which reveals the local geometric mutation degree and response sensitivity. The error and curvature feature set ErrSet obtained by integrating the two provides a structural prior basis for subsequent simulation and path planning. Further, by fusing the error and curvature feature set ErrSet, the input power parameter of the pulse ion beam and the thermal diffusivity of the material of the aspheric optical element, a heat conduction response simulation model in two-dimensional space is established, which effectively simulates the heat diffusion and time accumulation behavior after energy injection, and outputs the quantifiable heat accumulation trend graph Tmp. Based on the result, the local high temperature risk area is identified and the heat response sensitive area graph Hot is generated, and the heat sensitive feature set HotSet composed of the two realizes the processing risk forward identification in two dimensions of "structural complexity" and "thermal reaction complexity" in the shaping preparation stage. Overall, this method significantly improves the parameter perception depth and multi-physical field prediction ability in the early stage of aspheric optical element processing, so that the subsequent path planning and thermal control not only depend on the error size, but also have a structure screening and response suppression pre-mechanism based on the thermal evolution trend, effectively avoiding the one-sided control problem of "decoupling of path setting and thermal behavior" in the previous scheme. Embodiment 3

[0062] This embodiment is an explanation in embodiment 1, please refer to Figure 1 , Specifically: the S3 includes S31 and S32;

[0063] S31, based on the heat response sensitive area map Hot in the heat sensitive feature set HotSet and the target curvature response map Cur in the error and curvature feature set ErrSet, the surface area of the aspheric optical element is analyzed, the heat response sensitivity and the geometric structure mutation degree of the high temperature response area are considered comprehensively, the processing priority score of each high temperature response area is given by weighted combination, and a spatial distribution type of regional heat-geometric superposition priority score map Seq is formed, which is used for subsequent scanning path order and processing control rhythm arrangement;

[0064] S32, based on the constructed regional heat-geometric superposition priority score map Seq, all scanning coordinate points in the high temperature response area marked by the heat response sensitive area map Hot in the aspheric optical element are sorted in order from high to low according to the score value, the spatial position of each scanning coordinate point and its corresponding initial scanning time are determined, a structured path vector sequence is generated, named as scanning path control vector sequence Vec, the scanning path control vector sequence Vec and the regional heat-geometric superposition priority score map Seq are combined to form a unified output set, named as scanning planning feature set SeqSet.

[0065] The S4 includes S41 and S42;

[0066] S41, based on the scanning path control vector sequence Vec in the scanning planning feature set SeqSet, the scanning coordinate points and their initial scanning time in each vector are input into a heat response simulation module, the material thermal diffusion characteristics of the aspheric optical element and the pulse ion beam input power parameters are combined, the peak temperature rise of each scanning coordinate point in the scanning process is calculated, the temperature rise prediction result is output, named as temperature rise prediction data Tpk.

[0067] S42, according to the temperature rise prediction data Tpk, the initial time of each scanning coordinate point in the scanning path control vector sequence Vec is adjusted, for the scanning coordinate point with temperature rise peak value exceeding the preset safety threshold, the scanning interval time is dynamically increased; for the safe coordinate point of temperature rise, the original rhythm is maintained, the adjusted time data and the original spatial coordinates are combined to generate the optimized path instruction, named as path control instruction set Opt, the path control instruction set Opt and the temperature rise prediction data Tpk are combined to form a unified output set, named as optimization control feature set OptSet.

[0068] In this embodiment, by introducing the thermal structure sensitivity of aspheric optical elements into the integrated linkage design in the processing path construction and dynamic time regulation process, a scanning path adaptive optimization mechanism under the triple constraint of "thermal-geometric-time" is established. First, the thermal response sensitive area graph Hot in the thermal sensitive feature set HotSet and the target curvature response graph Cur in the error and curvature feature set ErrSet are fused, and a regional thermal-geometric superposition priority score graph Seq is formed by weighted calculation to accurately express the comprehensive processing sensitivity of each region in the spatial dimension. Then, combined with the scoring and sorting results, a scanning path control vector sequence Vec containing coordinate positions and initial times is generated, and combined with the scoring graph to construct a scanning planning feature set SeqSet. On this basis, the path control vector information is input into the thermal response simulation module, combined with the material thermal diffusion and energy input parameters, to calculate the peak temperature rise of each scanning coordinate point to form the temperature rise prediction data Tpk. Further, according to the timing fluctuation characteristics of the temperature rise prediction data Tpk, the scanning time rhythm of the thermal high-risk points is dynamically adjusted, and the path control instruction set Opt with time-space adaptability is output. Combined with the temperature rise prediction data Tpk, the optimized control feature set OptSet is formed. This integrated method breaks through the defects of separation of path construction and thermal simulation and decoupling of processing rhythm and thermal stacking in traditional processing, so that the scanning path not only considers the geometric morphology, but also actively responds to the change trend of the thermal sensitive area, thereby realizing time avoidance and order regularization of high temperature coupling points in the path planning stage, effectively avoiding the risk of structure distortion caused by local thermal focusing and accumulation, and significantly improving the thermal field uniformity and regulation foresight in the reshaping process of aspheric optical elements. Embodiment 4

[0069] This embodiment is an explanation and description in embodiment 1, please refer to Figure 1 , in particular: the S5 includes S51 and S52;

[0070] S51, according to the path control instruction set Opt contained in the optimized control feature set OptSet, controls the pulsed ion beam equipment to perform the reshaping operation of the aspheric optical element according to the specified scanning path and scanning time sequence. In the reshaping process, for each scanning coordinate point from the scanning path control vector sequence Vec, the real-time temperature response is collected by non-contact thermal field sensing means such as infrared temperature measurement and thermal radiation imaging, and the actual temperature rise data of each coordinate point in the processing process is output, named as real-time thermal response data Trl.

[0071] S52, compare the real-time thermal response data Trl with the temperature rise prediction data Tpk by coordinate points one by one, calculate the prediction error, generate a data set representing the degree of prediction deviation, named temperature rise deviation data Dev, combine the real-time thermal response data Trl with the temperature rise deviation data Dev to form a unified output set, named thermal feedback deviation set DevSet, which is used to evaluate the simulation accuracy and the thermal stability of the processing process.

[0072] The S6 includes S61 and S62;

[0073] S61, using a phase shift interferometer or other high-resolution surface shape detection equipment, the aspheric optical element after completing the pulse ion beam reshaping is detected for the second time, the current actual surface shape data is obtained, and the actual surface shape data is compared with the aspheric theoretical target surface shape model, the error map Epr after reshaping is formed, the error map Epr after reshaping is compared with the initial surface shape error map Err point by point, a two-dimensional image representing the change of surface shape error is output, and is named as a residual error map Res;

[0074] S62, analyze the residual error map Res, compare the error residual value of all scanning coordinate points in the high temperature response area marked in the thermal response sensitive area map Hot in the residual error map Res with the set surface shape error convergence threshold point by point;

[0075] When the error residual value of all scanning coordinate points is less than the surface shape error convergence threshold, it is determined that the reshaping process meets the error convergence requirement, the error map Epr after reshaping is archived and saved for product detection and verification, and is used for processing strategy recommendation or machine learning modeling of the next similar aspheric optical element;

[0076] When the error residual value of any scanning coordinate point exceeds the surface shape error convergence threshold, it is determined that the error is not completely converged, and the next round of reshaping process is automatically triggered, the residual error map Res is used as a new input error map to replace the original initial surface shape error map, the original target curvature response map Cur and the thermal response sensitive area map Hot are used jointly, the updated error and curvature feature set ErrSet is regenerated, and the step S2 is returned to perform the next round of thermal response identification and path planning.

[0077] In this embodiment, the thermal response dynamic monitoring and surface shape error multi-round self-adaptive correction mechanism of the pulse ion beam shaping process are realized, a closed-loop processing model integrating simulation verification, real-time feedback and intelligent iterative control is constructed, specifically, the non-spherical optical element is shaped by pulse ion beam through executing the path control instruction set Opt contained in the optimization control feature set OptSet, and the temperature response value of each coordinate point from the scanning path control vector sequence Vec is collected in real time by using the thermal field sensing technology, and the real-time thermal response data Trl is output; then compared with the temperature rise prediction data Tpk generated by simulation point by point, the deviation value is calculated to form the temperature rise deviation data Dev, and the thermal feedback deviation set DevSet is combined and output, which is used to verify the simulation model accuracy and perceive the potential thermal stability abnormality in the processing process, the non-spherical optical element after shaping is detected for the second time, the error map Epr after shaping is output, and compared with the initial surface shape error map Err point by point to form the shaping residual error map Res, the system judges the error residual value and the set convergence threshold based on all scanning coordinate points in the high temperature response area marked in the thermal response sensitive area graph Hot in the shaping residual error map Res, generates a judgment result, if the error convergence standard is met, the error map Epr after shaping is archived for detection verification and subsequent process data accumulation; if not, the next round of shaping is automatically triggered, the shaping residual error map Res is used as a new input error map, the target curvature response map Cur and the thermal response sensitive area graph Hot are used together to reconstruct and update the error and curvature feature set ErrSet and return to step S2, forming a closed-loop iterative process. This method significantly enhances the data driving ability and abnormality coping ability in the shaping process, realizes the dynamic collaborative judgment of the thermal behavior and error response in the processing process, and through the error tracking control model, an intelligent shaping mechanism that can be iterated, terminated and evolved is constructed, overcoming the problems of feedback missing, weak precision convergence control and unquantifiable shaping effect in the prior art. Embodiment 5

[0078] A pulse ion beam control system for non-spherical optical element shaping, please refer to Figure 2 , specifically: including element detection module, thermal conduction response model construction module, region scoring marking module, thermal simulation module, shaping operation module and secondary shape detection optimization module;

[0079] The element detection module detects the surface shape of the non-spherical optical element, collects the initial surface shape error map Err and the target curvature response map Cur, and combines to form the error and curvature feature set ErrSet;

[0080] The heat conduction response model construction module establishes a heat conduction response model based on the error and curvature feature set ErrSet, in combination with the pulse ion beam input power parameter and the thermal diffusion characteristics of the optical element material, predicts a heat accumulation trend graph Tmp and a heat response sensitive area graph Hot in the scanning process, and generates a heat sensitive feature set HotSet;

[0081] The region score marking module combines the heat sensitive feature set HotSet and the curvature information in the error and curvature feature set ErrSet, constructs a region heat-geometry superposition priority score graph Seq, and generates a scanning path control vector sequence Vec, which are combined to form a scanning planning feature set SeqSet;

[0082] The heat simulation module inputs the scanning planning feature set SeqSet into the heat simulation module, predicts and optimizes the temperature rise peak value of the path point and the interval, outputs a path control instruction set Opt and a temperature rise prediction data Tpk, and constitutes an optimized control feature set OptSet;

[0083] The reshaping operation module performs pulse ion beam reshaping operation according to the optimized control feature set OptSet, simultaneously collects real-time temperature rise response values Trl of each path point, and compares and analyzes the real-time temperature rise response values Trl with the predicted temperature rise data Tpk to obtain temperature rise deviation data Dev, which are combined to form a heat feedback deviation set DevSet;

[0084] The secondary surface shape detection optimization module performs secondary surface shape detection on the aspheric optical element after the reshaping operation, obtains a reshaped error graph Epr, and compares the reshaped error graph Epr with an initial surface shape error graph Err in the error and curvature feature set ErrSet to obtain a reshaping residual error graph Res, which is used to determine whether the surface shape convergence requirement is met.

[0085] Although the embodiments of the present application have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and modifications can be made to the embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A pulsed ion beam control method for modifying aspherical optical elements, characterized in that: Includes the following steps: S1. Perform surface shape detection on aspherical optical elements, collect the initial surface shape error map Err and the target curvature response map Cur, and combine them to form the error and curvature feature set ErrSet; S2. Based on the error and curvature feature set ErrSet, combined with the pulsed ion beam input power parameters and the thermal diffusion characteristics of the optical element materials, a thermal conduction response model is established to predict the heat accumulation trend map Tmp and the thermal response sensitive area map Hot during the scanning process, and generate the thermal sensitive feature set HotSet. S3. Combining the curvature information in the thermally sensitive feature set HotSet and the error and curvature feature set ErrSet, construct the regional thermal-geometric overlay priority scoring map Seq, and generate the scan path control vector sequence Vec, which are then combined to form the scan planning feature set SeqSet; S4. Based on the scan planning feature set SeqSet, input the thermal simulation module to predict and optimize the temperature rise peak of the path point and the interval adjustment, and output the path control instruction set Opt and the temperature rise prediction data Tpk to form the optimized control feature set OptSet. S5. Perform pulsed ion beam shaping operation according to the optimized control feature set OptSet, and at the same time collect the real-time temperature rise response value Trl of each path point, and compare and analyze it with the predicted temperature rise data Tpk to obtain the temperature rise deviation data Dev, and combine them to form the thermal feedback deviation set DevSet. S6. Perform secondary surface shape detection on the aspherical optical element after the shape modification, obtain the modified error map Epr, and compare it with the initial surface shape error map Err in the error and curvature feature set ErrSet to obtain the modified residual map Res, which is used to determine whether the surface shape convergence requirement is met.

2. The pulsed ion beam control method for modifying aspherical optical elements according to claim 1, characterized in that: S1 includes S11 and S12; S11. Using a phase shift interferometer or other high-resolution surface shape detection equipment, perform surface scanning on the aspherical optical element to be modified, obtain the current real surface shape data of the aspherical optical element, and compare it point by point with the aspherical theoretical target surface shape model, calculate the height deviation of each point in space, and form a two-dimensional distributed initial surface shape error map Err. The initial surface shape error map Err is used to identify the degree of local material removal requirements in each region. S12. Based on the surface parameter equations defined by the target surface model of the aspherical theory, perform local geometric structure analysis on different spatial positions of the aspherical optical element, calculate the rate of curvature change at each position, and obtain a two-dimensional spatial curvature distribution that reflects the degree of abrupt change in local surface curvature. The two-dimensional spatial curvature distribution result is output in the form of an image and named the target curvature response map Cur, which is used to indicate the geometric complexity and processing response sensitivity of each region on the surface of the aspherical optical element. Then, it is integrated with the initial surface error map Err to obtain the error and curvature feature set ErrSet.

3. The pulsed ion beam control method for shaping aspherical optical elements according to claim 2, characterized in that: S2 includes S21 and S22; S21. Based on the initial surface error map Err and the target curvature response map Curr contained in the error and curvature feature set ErrSet, combined with the input power parameters of the pulsed ion beam used for shaping and the material thermal diffusivity of the aspherical optical element, a two-dimensional spatial thermal conduction response model is constructed. The instantaneous energy injection process generated by pulse scanning at each processing point is simulated by simulation. The diffusion behavior of heat energy on the surface and near-surface region of the aspherical optical element is calculated, and a heat accumulation trend map Tmp is accumulated in the time dimension to describe the local temperature rise evolution characteristics during the scanning process. S22. Based on the heat accumulation trend map Tmp, set a thermal stability threshold, and identify areas in the heat accumulation trend map Tmp where the local temperature rise exceeds the threshold. Mark the identified high-temperature response areas in the spatial dimension to form a thermal response sensitive area map Hot, which is used to divide the thermal safety zone and the thermal coupling risk zone. Combine the heat accumulation trend map Tmp and the thermal response sensitive area map Hot to form a unified output result, named the thermal sensitivity feature set HotSet.

4. The pulsed ion beam control method for shaping aspherical optical elements according to claim 3, characterized in that: S3 includes S31 and S32; S31. Based on the thermal response sensitive region map Hot in the thermal sensitive feature set HotSet and the target curvature response map Cur in the error and curvature feature set ErrSet, the surface region of the aspherical optical element is fused and analyzed. Taking into account the thermal response sensitivity and geometric abruptness of the high temperature response region, each high temperature response region is assigned a processing priority score through a weighted combination method to form a spatially distributed regional thermal-geometric superimposed priority score map Seq. S32. Based on the constructed regional thermal-geometric overlay priority scoring map Seq, sort all scanning coordinate points in the aspherical optical element located within the high-temperature response region marked by the thermal response sensitive region map Hot in descending order of score value, determine the spatial position of each scanning coordinate point and its corresponding initial scanning time, generate a structured path vector sequence, named scanning path control vector sequence Vec, and combine the scanning path control vector sequence Vec with the regional thermal-geometric overlay priority scoring map Seq to form a unified output set, named scanning planning feature set SeqSet.

5. The pulsed ion beam control method for modifying aspherical optical elements according to claim 4, characterized in that: S4 includes S41 and S42; S41. Based on the scan path control vector sequence Vec in the scan planning feature set SeqSet, input the scan coordinate point and its initial scan time in each vector to the thermal response simulation module. Combine the material thermal diffusion characteristics of the aspherical optical element and the pulsed ion beam input power parameters, calculate the peak temperature rise of each scan coordinate point during the scan process, and output the temperature rise prediction result, named temperature rise prediction data Tpk.

6. The pulsed ion beam control method for shaping aspherical optical elements according to claim 5, characterized in that: S42. Based on the temperature rise prediction data Tpk, adjust the initial time of each scanning coordinate point in the scanning path control vector sequence Vec. For scanning coordinate points where the temperature rise peak exceeds a preset safety threshold, dynamically increase the scanning interval time; for coordinate points with safe temperature rise, maintain the original rhythm. Combine the adjusted time data with the original spatial coordinates to generate an optimized path instruction, named the path control instruction set Opt. Combine the path control instruction set Opt with the temperature rise prediction data Tpk to form a unified output set, named the optimized control feature set OptSet.

7. The pulsed ion beam control method for shaping aspherical optical elements according to claim 6, characterized in that: S5 includes S51 and S52; S51. According to the path control instruction set Opt contained in the optimized control feature set OptSet, control the pulsed ion beam device to perform the aspherical optical element shaping operation according to the specified scanning path and scanning time sequence. During the shaping process, for each scanning coordinate point from the scanning path control vector sequence Vec, collect the real-time temperature response through non-contact thermal field sensing means, and output the actual temperature rise data of each coordinate point during the processing, named real-time thermal response data Trl.

8. The pulsed ion beam control method for modifying aspherical optical elements according to claim 7, characterized in that: S52. Compare the real-time thermal response data Trl with the temperature rise prediction data Tpk one by one according to coordinate points, calculate the prediction error, generate a dataset representing the degree of prediction deviation, named temperature rise deviation data Dev, combine the real-time thermal response data Trl and the temperature rise deviation data Dev to form a unified output set, named thermal feedback deviation set DevSet, which is used to evaluate the simulation accuracy and the thermal stability of the processing process.

9. The pulsed ion beam control method for shaping aspherical optical elements according to claim 8, characterized in that: S6 includes S61 and S62; S61. Using a phase shift interferometer or other high-resolution surface shape detection equipment, perform a second surface shape detection on the aspherical optical element after pulsed ion beam shaping to obtain the current actual surface shape data. Compare the actual surface shape data with the aspherical theoretical target surface shape model to form a post-shaping error map Epr. Compare the post-shaping error map Epr with the initial surface shape error map Err point by point to output a two-dimensional image representing the change in surface shape error, named the shaping residual map Res. S62. Analyze the shape correction residual map Res, and compare the error residual values ​​of all scan coordinate points in the shape correction residual map Res located in the high temperature response area marked by the thermal response sensitive area map Hot with the set surface error convergence threshold point by point. When the error residual values ​​of all scanned coordinate points are less than the surface error convergence threshold, the shaping process is determined to have met the error convergence requirement. If the error residual value of any scan coordinate point exceeds the surface error convergence threshold, it is determined that the error has not fully converged, and the next round of shaping process is automatically triggered. The shaping residual map Res is used as a new input error map to replace the original initial surface error map. The original target curvature response map Cur and the thermal response sensitive area map Hot are used together to regenerate the updated error and curvature feature set ErrSet.

10. A pulsed ion beam control system for modifying aspherical optical elements, used to implement the pulsed ion beam control method for modifying aspherical optical elements according to any one of claims 1 to 9, characterized in that: It includes a component inspection module, a thermal conduction response model construction module, a region scoring and marking module, a thermal simulation module, a shape modification operation module, and a secondary shape inspection optimization module; The component detection module performs surface shape detection on the aspherical optical component, collects the initial surface shape error map Err and the target curvature response map Cur, and combines them to form an error and curvature feature set ErrSet. The thermal conduction response model construction module, based on the error and curvature feature set ErrSet, combined with the pulsed ion beam input power parameters and the thermal diffusion characteristics of the optical element materials, establishes a thermal conduction response model, predicts the heat accumulation trend map Tmp and the thermal response sensitive region map Hot during the scanning process, and generates a thermally sensitive feature set HotSet. The region scoring and marking module combines the curvature information in the heat-sensitive feature set HotSet and the error and curvature feature set ErrSet to construct a region thermal-geometric superposition priority scoring map Seq, and generates a scan path control vector sequence Vec, which are combined to form a scan planning feature set SeqSet; The thermal simulation module, based on the scan planning feature set SeqSet, inputs the thermal simulation module to predict and optimize the temperature rise peak of the path points and the interval adjustment, and outputs the path control instruction set Opt and the temperature rise prediction data Tpk, which constitute the optimized control feature set OptSet. The shaping operation module performs pulsed ion beam shaping operation according to the optimized control feature set OptSet, and at the same time collects the real-time temperature rise response value Trl of each path point, and compares and analyzes it with the predicted temperature rise data Tpk to obtain the temperature rise deviation data Dev, which is then combined to form the thermal feedback deviation set DevSet. The secondary shape detection and optimization module performs secondary surface shape detection on the aspherical optical element after the shape correction, obtains the post-correction error map Epr, and compares it with the initial surface shape error map Err in the error and curvature feature set ErrSet to obtain the correction residual map Res, which is used to determine whether the surface shape convergence requirement is met.

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