Laser-induced breakdown spectroscopy system and method for detecting surface quality of spline in deep hole
The surface quality of splines in deep holes is tested using a laser-induced breakdown spectroscopy system, which solves the problems that traditional methods are difficult to implement and achieves efficient and non-destructive testing results.
Patent Information
- Application Number
- CN202511141354.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-15
- Publication Date
- 2025-10-14
AI Technical Summary
Existing surface quality inspection technologies are difficult to implement inside deep hole splines, are highly destructive, have many blind spots, and have poor operational convenience, inspection efficiency, and inspection accuracy.
A laser-induced breakdown spectroscopy system is used, including a base, a laser-induced breakdown spectroscopy detection module, a probe motion detection module and a workpiece clamping device. The laser emits a detection laser to excite plasma on the spline surface in the deep hole and generate a spectral signal. Combined with the probe motion detection module and the workpiece clamping device, non-destructive detection of the surface quality of the spline in the deep hole can be achieved.
The operation convenience, detection efficiency and detection accuracy of the surface quality inspection of splines in deep holes are improved, the detection blind spots of traditional methods are overcome, and non-destructive detection is realized.
Smart Images
Figure CN120778705A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of surface quality detection, in particular to a laser-induced breakdown spectroscopy system and method for detecting the surface quality of internal splines in deep holes. BACKGROUND
[0002] As important transmission parts, internal splines in deep holes are usually used for the connection and torque transmission of mechanical structures. Due to the complex geometric structure and difficult processing, surface defects such as uneven roughness, burn, and micro-cracks are prone to occur. These microscopic surface quality problems will directly affect the meshing performance, transmission accuracy, and fatigue life of the spline. Small imperfections may rapidly evolve into fatigue sources or wear initiation points during service, thereby causing unstable transmission, jamming, and even early failure. Therefore, the surface quality detection of internal splines in deep holes is crucial for the performance and life of the entire transmission system.
[0003] Traditional surface quality detection methods such as color observation, acid etching, surface microhardness, and metallographic method, although widely used, are tedious and time-consuming in operation, and most are destructive. For complex components such as internal splines in deep holes with narrow space and special profile structure, if the above methods are used, the sample or cross-section sample needs to be cut, which will directly damage the workpiece body and cannot achieve full-sample detection.
[0004] In summary, the existing surface quality detection technology is difficult to implement inside the internal spline in deep hole, has strong destructiveness, has many blind areas of detection, and has poor operation convenience, detection efficiency, and detection accuracy. SUMMARY
[0005] The present application provides a laser-induced breakdown spectroscopy system and method for detecting the surface quality of internal splines in deep holes, to solve the problems of the existing surface quality detection technology, such as difficulty in implementation inside the internal spline in deep hole, strong destructiveness, many blind areas of detection, poor operation convenience, detection efficiency, and detection accuracy.
[0006] In one aspect, the present application provides a laser-induced breakdown spectroscopy system and method for detecting the surface quality of internal splines in deep holes, comprising: a base, a laser-induced breakdown spectroscopy detection module, a probe motion detection module, and a workpiece clamping device.
[0007] The laser-induced breakdown spectroscopy detection module, the probe motion detection module, and the workpiece clamping device are fixedly installed on the base.
[0008] The workpiece clamping device is used to clamp and fix the internal spline in deep hole, and to change the circumferential detection position.
[0009] The laser-induced breakdown spectroscopy detection module is used for emitting detection laser, exciting plasma on the machined surface of the spline in the deep hole and generating a spectrum signal, analyzing the spectrum signal, and realizing the machining surface quality detection of the spline in the deep hole.
[0010] The probe movement detection module is used for driving the reflective detection probe of the laser-induced breakdown spectroscopy detection module to move and adjusting the inclination angle of the reflective detection probe.
[0011] In a possible implementation, the workpiece clamping device comprises a driving motor and a three-jaw chuck.
[0012] The bottom of the driving motor is fixedly installed on the base, and the three-jaw chuck is fixedly installed on the driving shaft of the driving motor.
[0013] The three-jaw chuck is used for clamping and fixing the spline in the deep hole, and the driving motor is used for driving the three-jaw chuck to rotate, so as to change the circumferential detection position.
[0014] In a possible implementation, the centering axis of the three-jaw chuck and the axis of the reflective detection probe are in the same vertical plane.
[0015] In a possible implementation, the laser-induced breakdown spectroscopy detection module comprises a reflective detection probe, a fiber jumper, a probe optical fiber, a fiber laser, a spectrometer, an intensified charge-coupled device, a spectrum analysis module, and a delay generator.
[0016] The reflective detection probe is installed on the probe movement detection module.
[0017] The fiber laser, the spectrometer, the spectrum analysis module, and the delay generator are fixedly installed on the base, the spectrometer is connected with the spectrum analysis module through the intensified charge-coupled device, and the delay generator is connected with the fiber laser and the spectrometer respectively.
[0018] The probe optical fiber is configured in a Y shape, and the branch ends of the probe optical fiber are connected with the fiber laser and the spectrometer respectively, wherein the branch end connected with the fiber laser is called a probe emission optical fiber, the branch end connected with the spectrometer is called a probe receiving optical fiber, and the main trunk end is connected with the reflective detection probe.
[0019] The fiber jumper is connected between the fiber laser and the probe emission optical fiber.
[0020] The fiber laser is used for emitting detection laser, and the detection laser is emitted to the reflective detection probe through the fiber jumper and the probe emission optical fiber.
[0021] The reflection type detection probe is used for emitting detection laser to the machining surface of the spline in the deep hole, exciting plasma and generating a spectrum signal, and outputting the spectrum signal to the spectrometer through the probe receiving optical fiber.
[0022] The spectrometer is used for decomposing the received spectrum signal into different wavelength components and sending to the spectrum analysis module through the intensified charge coupled device.
[0023] The spectrum analysis module is used for analyzing the decomposed spectrum signal to realize the machining surface quality detection of the spline in the deep hole.
[0024] The delay generator is used for controlling the delay time between the emission of the detection laser and the collection of the spectrum signal.
[0025] In a possible implementation, the probe optical fiber has a multi-core common end at the reflection type detection probe, including six surrounding optical fibers and one middle optical fiber.
[0026] The six surrounding optical fibers are the probe emitting optical fibers connected to the fiber laser, and the one middle optical fiber is the probe receiving optical fiber connected to the spectrometer.
[0027] The six surrounding optical fibers are used for emitting the detection laser emitted by the fiber laser to the machining surface of the spline in the deep hole.
[0028] The one middle optical fiber is used for outputting the spectrum signal reflected by the plasma to the spectrometer.
[0029] In a possible implementation, the front part of the reflection type detection probe is integrated with a micro lens for light path focusing.
[0030] In a possible implementation, the probe motion detection module includes a linear guide rail, a sliding block, an electric swing sliding table and a probe support frame.
[0031] The linear guide rail is fixedly installed on the base, the sliding block is in sliding connection with the linear guide rail, the base of the electric swing sliding table is fixedly connected to the sliding block, the upper end of the probe support frame is installed with the reflection type detection probe, and the lower end is fixedly connected to the electric swing sliding table.
[0032] The sliding block is used for moving horizontally on the linear guide rail, so as to drive the electric swing sliding table, the probe support frame and the reflection type detection probe to move horizontally.
[0033] The electric swing sliding table is used for adjusting the inclination angle of the probe support frame, so as to adjust the inclination angle of the reflection type detection probe to determine the optimal excitation position of the plasma.
[0034] In a possible implementation, the probe support frame comprises a clamping frame and a support column.
[0035] The clamping frame is composed of two semicircular arc structures, both ends of the two semicircular arc structures are provided with screw holes, and the two semicircular arc structures are connected by bolts.
[0036] The bottom of the clamping frame is fixedly provided with a threaded stud, and the clamping frame is fixedly connected with the top threaded hole of the support column through the threaded stud.
[0037] On the other hand, the application provides a use method of the laser-induced breakdown spectroscopy system for detecting the surface quality of the internal spline in the deep hole as described above, comprising the following steps:
[0038] Step one, according to the structural characteristics of the internal spline in the deep hole and the reflective detection probe, calculate the theoretical limit tilt angle of the reflective detection probe, and adjust the tilt angle of the reflective detection probe.
[0039] Step two, fix the internal spline in the deep hole on the workpiece clamping device.
[0040] Step three, move the reflective detection probe, and extend the reflective detection probe into the position to be detected of the internal spline in the deep hole.
[0041] Step four, set the delay time between the emission of the detection laser and the collection of the spectral signal, emit the detection laser, and the detection laser excites plasma on the machined surface of the internal spline in the deep hole and generates a spectral signal.
[0042] Step five, continue to adjust the tilt angle of the reflective detection probe, and when the spectral line of the spectral signal is the strongest, fix the tilt angle of the reflective detection probe and record the current spectral signal.
[0043] Step six, rotate the internal spline in the deep hole to change the circumferential detection position, record the spectral signal at the circumferential detection position and analyze the spectral signals at different positions, and realize the machining surface quality detection of the internal spline in the deep hole.
[0044] The laser-induced breakdown spectroscopy system and method for detecting the surface quality of the internal spline in the deep hole have the following advantages:
[0045] By combining the laser-induced breakdown spectroscopy detection module, the probe movement detection module and the workpiece clamping device, the problems of difficulty in implementation, strong destructiveness and many blind areas of detection in the internal spline in the deep hole by conventional means are overcome, and the operation convenience, detection efficiency and detection accuracy are improved.
[0046] The proposed laser-induced breakdown spectroscopy detection module comprises a reflective detection probe, a fiber jumper, a probe fiber, a fiber laser, a spectrometer, an enhanced charge-coupled device, a spectral analysis module, and a delay generator, is compact in structure, high in optical path integration, and capable of detecting the internal spline inside a deep hole with limited space; the delay generator is connected with the fiber laser and the spectrometer, and capable of controlling the delay time between the emission of detection laser and the collection of spectral signals.
[0047] The proposed probe fiber has a multi-core common end at the reflective detection probe, comprising six surrounding fibers and one middle fiber, the six surrounding fibers are used for emitting the detection laser emitted by the fiber laser to the machining surface of the internal spline in the deep hole, and the middle fiber is used for outputting the spectral signals reflected by the plasma to the spectrometer, realizing efficient focusing emission of the laser and synchronous recovery of the signals, and effectively improving the sensitivity and spatial adaptability of the internal spline surface quality detection in the deep hole.
[0048] The proposed probe movement detection module comprises a linear guide rail, a sliding block, an electric swing sliding table, and a probe support frame, and is capable of conveniently moving the reflective detection probe and adjusting the inclination angle of the reflective detection probe. BRIEF DESCRIPTION OF DRAWINGS
[0049] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.
[0050] Figure 1 The structural schematic diagram of the laser-induced breakdown spectroscopy system for deep-hole internal spline surface quality detection provided by the embodiments of the present application is shown in the figure.
[0051] Figure 2 The detection process schematic diagram of the laser-induced breakdown spectroscopy system for deep-hole internal spline surface quality detection provided by the embodiments of the present application is shown in the figure.
[0052] Figure 3 The structural schematic diagram of the probe movement detection module provided by the embodiments of the present application is shown in the figure.
[0053] Figure 4 The structural schematic diagram of the probe support frame provided by the embodiments of the present application is shown in the figure.
[0054] Figure 5 The inclination angle calculation schematic diagram of the reflective detection probe provided by the embodiments of the present application is shown in the figure.
[0055] BRIEF DESCRIPTION OF DRAWINGS
[0056] 1-base, 2-driving motor, 3-three-jaw chuck, 4-deep hole internal spline, 5-optoelectronic sensor transmitting end, 6-sliding block, 7-electric swing sliding table, 8-probe support frame, 9-reflection detection probe, 10-linear guide rail, 11-optical fiber jumper, 12-probe optical fiber, 13-optical fiber laser, 14-delay generator, 15-spectrometer, 16-enhanced charge-coupled device, 17-spectrum analysis module, 18-optoelectronic sensor receiving end, 19-pressing block, 81-clamping frame, 82-supporting column. DETAILED DESCRIPTION
[0057] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0058] As shown in the drawings, Figure 1 The deep hole internal spline surface quality detection laser-induced breakdown spectroscopy system provided by the embodiments of the present application comprises a base 1, a laser-induced breakdown spectroscopy detection module, a probe movement detection module, and a workpiece clamping device.
[0059] The laser-induced breakdown spectroscopy detection module, the probe movement detection module, and the workpiece clamping device are all fixedly installed on the base 1.
[0060] The workpiece clamping device is used for clamping and fixing the deep hole internal spline 4 and changing the circumferential detection position.
[0061] The laser-induced breakdown spectroscopy detection module is used for emitting detection laser, exciting plasma on the machined surface of the deep hole internal spline 4 and generating a spectrum signal, analyzing the spectrum signal, and realizing the machining surface quality detection of the deep hole internal spline 4.
[0062] The probe movement detection module is used for moving the reflection detection probe 9 of the laser-induced breakdown spectroscopy detection module and adjusting the inclination angle of the reflection detection probe 9.
[0063] Specifically, in the present embodiment, the base 1 adopts an air floating base, which is used for keeping the whole detection system stable and reducing the influence of system vibration. Preformed mounting holes are provided on the base 1, which are used for fixedly installing the laser-induced breakdown spectroscopy detection module, the probe movement detection module, and the workpiece clamping device.
[0064] Exemplarily, the workpiece clamping device comprises a driving motor 2 and a three-jaw chuck 3.
[0065] The bottom of the driving motor 2 is fixedly installed on the base 1, and the three-jaw chuck 3 is fixedly installed on the driving shaft of the driving motor 2.
[0066] The three-jaw chuck 3 is used for clamping and fixing the internal spline 4 in the deep hole, and the driving motor 2 is used for driving the three-jaw chuck 3 to rotate, so as to change the circumferential detection position.
[0067] Exemplarily, the centering axis of the three-jaw chuck 3 and the axis of the reflective detection probe 9 are in the same vertical plane.
[0068] Exemplarily, the laser-induced breakdown spectroscopy detection module comprises a reflective detection probe 9, a fiber jumper 11, a probe fiber 12, a fiber laser 13, a spectrometer 15, an intensified charge-coupled device 16, a spectral analysis module 17, and a delay generator 14.
[0069] The reflective detection probe 9 is installed on the probe motion detection module.
[0070] The fiber laser 13, the spectrometer 15, the spectral analysis module 17, and the delay generator 14 are fixedly installed on the base 1, the spectrometer 15 is connected with the spectral analysis module 17 through the intensified charge-coupled device 16, and the delay generator 14 is connected with the fiber laser 13 and the spectrometer 15 respectively.
[0071] The probe fiber 12 is configured in a Y shape, and the branch ends of the probe fiber 12 are connected with the fiber laser 13 and the spectrometer 15 respectively, wherein the branch end connected with the fiber laser 13 is called a probe emission fiber, the branch end connected with the spectrometer 15 is called a probe receiving fiber, and the main trunk end is connected with the reflective detection probe 9.
[0072] The fiber jumper 11 is connected between the fiber laser 13 and the probe emission fiber.
[0073] The fiber laser 13 is used for emitting detection laser, and the detection laser is emitted to the reflective detection probe 9 through the fiber jumper 11 and the probe emission fiber.
[0074] The reflective detection probe 9 is used for emitting detection laser to the machining surface of the internal spline 4 in the deep hole, exciting plasma and generating a spectrum signal, and outputting the spectrum signal to the spectrometer 15 through the probe receiving fiber.
[0075] The spectrometer 15 is used for decomposing the received spectrum signal into components of different wavelengths, and sending the components to the spectral analysis module 17 through the intensified charge-coupled device 16.
[0076] The spectrum analysis module 17 is used for analyzing the decomposed spectrum signal, so as to realize the processing surface quality detection of the spline 4 in the deep hole.
[0077] The delay generator 14 is used for controlling the delay time between the emission of the detection laser and the collection of the spectrum signal.
[0078] Specifically, in the embodiment, the spectrum analysis module 17 adopts a PC, and the PC is provided with spectrum analysis software, so as to realize the processing surface quality detection of the spline 4 in the deep hole.
[0079] The delay generator 14 ensures that the spectrum signal is collected in the optimal time window in which the plasma radiation is the strongest and the background interference is the smallest.
[0080] As shown in Figure 2 , before detection, the delay time between the emission of the detection laser and the collection of the spectrum signal is set by the delay generator 14. During detection, the switch of the fiber laser 13 is turned on, and the output detection laser is transmitted to the reflective detection probe 9 by the fiber jumper 11 and the probe transmission fiber, so as to excite the plasma on the processing surface of the spline 4 in the deep hole. After the set delay time, the spectrometer 15 starts to receive and pretreat the spectrum signal generated by the plasma, and then the spectrum signal is transmitted to the spectrum analysis module 17 by the intensified charge coupled device 16, so that the spectrum analysis software analyzes the spectral line components, and the related information of the surface quality of the spline 4 in the deep hole is obtained.
[0081] Exemplarily, the probe fiber 12 has a multi-core common end at the reflective detection probe 9, which includes six surrounding fibers and one middle fiber.
[0082] The six surrounding fibers are connected to the fiber laser 13 as the probe transmission fiber, and the one middle fiber is connected to the spectrometer 15 as the probe receiving fiber.
[0083] The six surrounding fibers are used for emitting the detection laser emitted by the fiber laser 13 to the processing surface of the spline 4 in the deep hole.
[0084] The one middle fiber is used for outputting the spectrum signal reflected by the plasma to the spectrometer 15.
[0085] Exemplarily, the front part of the reflective detection probe 9 is integrated with a micro lens, which is used for light path focusing.
[0086] As shown in Figure 3 , exemplarily, the probe motion detection module includes a linear guide rail 10, a sliding block 6, an electric swing sliding table 7, and a probe support frame 8.
[0087] The linear guide rail 10 is fixedly installed on the base 1, the sliding block 6 is in sliding connection with the linear guide rail 10, the base of the electric swing sliding table 7 is fixedly connected to the sliding block 6, the upper end of the probe support frame 8 is installed with the reflective detection probe 9, and the lower end is fixedly connected with the electric swing sliding table 7.
[0088] The sliding block 6 is used for horizontal movement on the linear guide rail 10, so as to drive the electric swing sliding table 7, the probe support frame 8 and the reflective detection probe 9 to move horizontally.
[0089] The electric swing sliding table 7 is used for adjusting the inclination angle of the probe support frame 8, so as to adjust the inclination angle of the reflective detection probe 9, so as to determine the optimal excitation position of the plasma.
[0090] As shown in Figure 4 Exemplarily, the probe support frame 8 comprises a clamping frame 81 and a support column 82.
[0091] The clamping frame 81 is composed of two semicircular arc structures, both ends of the two semicircular arc structures are provided with screw holes, the two semicircular arc structures are connected by bolts, and the reflective detection probe 9 is clamped and installed between the two semicircular arc structures.
[0092] A screw post is fixedly arranged at the bottom of the clamping frame 81, the clamping frame 81 is fixedly connected with the top threaded hole of the support column 82 through the screw post, and the base of the support column 82 is screwed to the electric swing sliding table 7 through the pressing block 19.
[0093] The application further provides a use method of the laser-induced breakdown spectroscopy system for detecting the surface quality of the deep hole internal spline 4.
[0094] Step one, according to the structural characteristics of the deep hole internal spline 4 and the reflective detection probe 9, the theoretical limit inclination angle of the reflective detection probe 9 is calculated, and the inclination angle of the reflective detection probe 9 is adjusted.
[0095] Step two, the deep hole internal spline 4 is fixed on the workpiece clamping device.
[0096] Step three, the reflective detection probe 9 is moved, and the reflective detection probe 9 is inserted into the position to be detected of the deep hole internal spline 4.
[0097] Step four, the delay time between the emission of the detection laser and the collection of the spectral signal is set, the detection laser is emitted, the detection laser excites the plasma on the machined surface of the deep hole internal spline 4 and generates a spectral signal.
[0098] Step 5: Continue to adjust the tilt angle of the reflective detection probe 9. When the spectrum line of the spectrum signal is the strongest, fix the tilt angle of the reflective detection probe 9 and record the current spectrum signal.
[0099] Step six, rotate the deep hole internal spline 4, change the circumferential detection position, record the spectral signals at the circumferential detection position and analyze the spectral signals at different positions to realize the processing surface quality detection of the deep hole internal spline 4.
[0100] Specifically, before the detection, the theoretical limit tilt angle of the reflective detection probe 9 is calculated and the tilt angle of the reflective detection probe 9 is adjusted to prevent collision. Figure 5 As shown in the figure: L1 represents the total length from the end face of the spline 4 in the deep hole to the end of the spline part, L2 is the effective length of the reflective detection probe 9, and D represents the diameter of the spline hole of the spline 4 in the deep hole. It can be seen that if the measurement is completed, the effective length L2 of the reflective detection probe 9 should be: L1 <L2。
[0101] Calculate the inclination angle of the reflective detection probe 9 at this time The cosine of is:
[0102]
[0103] That is, the tilt angle is Therefore, the working inclination angle θ of the reflective detection probe 9 during detection should satisfy The effective non-interference moving length L of the slider 6 on the linear guide rail 10 should be greater than L1.
[0104] It should be noted that the above calculation is an extreme detection state. In actual situations, the horizontal detection path of the spline 4 in the deep hole can be covered by reducing the inclination angle θ of the reflective detection probe 9 or extending the length L3 of the reflective detection probe 9.
[0105] Photoelectric sensors (such as Figure 1 As shown, it includes a photoelectric sensor transmitting end 5 and a photoelectric sensor receiving end 18. When the reflective detection probe 9 passes through the end face of the deep hole spline 4, it is triggered and records the current position. At the same time, the displacement value of the slider 6 is set to L1 to cover the horizontal detection path of the deep hole spline 4.
[0106] In step 1, the tilt angle of the probe support frame 8 is adjusted by the electric swing slide 7, thereby adjusting the tilt angle of the reflective detection probe 9.
[0107] In step 2, the deep hole inner spline 4 is fixed by a three-jaw chuck 3.
[0108] In step three, the slider 6 moves horizontally on the linear guide rail 10, thereby moving the reflective detection probe 9.
[0109] In step four, the delay generator 14 sets the delay time between the emission of the detection laser and the collection of the spectral signal, the fiber laser 13 emits the detection laser, the detection laser is emitted to the reflective detection probe 9 through the fiber jumper 11 and the probe fiber, the detection laser excites the plasma on the machining surface of the deep hole internal spline 4 and generates the spectral signal, the spectral signal is output to the spectrometer 15 from the reflective detection probe 9 through the probe receiving fiber, the spectrometer 15 decomposes the received spectral signal into different wavelength components and sends them to the spectral analysis module 17 through the intensified charge-coupled device 16.
[0110] In step five, the tilt angle of the probe support frame 8 is adjusted by the electrically driven swing sliding table 7, so that the reflective detection probe 9 slowly swings from top to bottom, when the spectral line of the spectral signal is the strongest, the tilt angle of the reflective detection probe 9 is fixed and the current spectral signal is recorded.
[0111] In step six, the deep hole internal spline 4 is rotated by the three-jaw chuck 3, the circumferential detection position is changed, the spectral signal at the circumferential detection position is recorded, and the spectral signals at different positions are analyzed, thereby realizing the machining surface quality detection of the deep hole internal spline 4.
[0112] The embodiment of the application overcomes the problems of conventional methods, such as difficulty in implementation inside the deep hole internal spline 4, strong destructiveness, and many blind areas of detection, improves the operation convenience, detection efficiency and detection accuracy by combining the laser-induced breakdown spectroscopy detection module, the probe movement detection module and the workpiece clamping device.
[0113] The proposed laser-induced breakdown spectroscopy detection module includes a reflective detection probe 9, a fiber jumper 11, a probe fiber 12, a fiber laser 13, a spectrometer 15, an intensified charge-coupled device 16, a spectral analysis module 17 and a delay generator 14, which has a compact structure and high optical integration degree, and can perform detection inside the space-limited deep hole internal spline 4; the delay generator 14 is connected with the fiber laser 13 and the spectrometer 15, and can control the delay time between the emission of the detection laser and the collection of the spectral signal.
[0114] The proposed probe fiber 12 has a multi-core common end at the reflective detection probe 9, including six surrounding fibers and one middle fiber, the six surrounding fibers are used to emit the detection laser emitted by the fiber laser 13 to the machining surface of the deep hole internal spline 4, and the one middle fiber is used to output the spectral signal reflected by the plasma to the spectrometer 15, thereby realizing efficient focusing emission of the laser and synchronous recovery of the signal, and effectively improving the sensitivity and spatial adaptability of the deep hole internal spline surface quality detection.
[0115] The proposed probe motion detection module comprises a linear guide rail 10, a sliding block 6, an electric swing sliding table 7, a probe support frame 8, which can conveniently drive the reflective detection probe 9 to move and adjust the inclination angle of the reflective detection probe 9.
[0116] Although preferred embodiments of the application have been described herein, additional changes and modifications can be suggested to one skilled in the art, particularly in light of the essential novel teachings herein. The disclosures herein are intended to embrace all such changes and modifications in the scope of the dependent claims appended hereto.
[0117] Obviously, various modifications and changes can be made to the present application without departing from the spirit and scope thereof. Accordingly, it is intended that the application embrace all such modifications and changes as fall within the scope of the appended claims and their equivalents.
Claims
1. Laser induced breakdown spectroscopy system for deep hole spline surface quality inspection, characterized by: include: Base, laser-induced breakdown spectroscopy detection module, probe motion detection module, and workpiece clamping device; The laser induced breakdown spectroscopy detection module, the probe motion detection module, and the workpiece clamping device are all fixedly mounted on the base; The workpiece clamping device is used to clamp and fix the spline in the deep hole and to change the circumferential detection position; The laser-induced breakdown spectroscopy detection module is used to emit a detection laser, which excites plasma on the processing surface of the deep hole spline and generates a spectrum signal, and analyzes the spectrum signal to realize the detection of the processing surface quality of the deep hole spline; The probe motion detection module is used to drive the reflective detection probe of the laser induced breakdown spectroscopy detection module to move and adjust the tilt angle of the reflective detection probe.
2. The laser induced breakdown spectroscopy system for detecting surface quality of splines in deep holes according to claim 1 is characterized in that: The workpiece clamping device includes: a driving motor and a three-jaw chuck; The bottom of the driving motor is fixedly mounted on the base, and the three-jaw chuck is fixedly mounted on the driving shaft of the driving motor; The three-jaw chuck is used to clamp and fix the spline in the deep hole, and the drive motor is used to drive the three-jaw chuck to rotate to achieve the change of the circumferential detection position.
3. The laser induced breakdown spectroscopy system for detecting surface quality of splines in deep holes according to claim 2, characterized in that: The centering axis of the three-jaw chuck and the axis of the reflective detection probe are in the same vertical plane.
4. The laser induced breakdown spectroscopy system for detecting surface quality of splines in deep holes according to claim 1, characterized in that: The laser induced breakdown spectroscopy detection module includes: a reflective detection probe, an optical fiber jumper, a probe optical fiber, an optical fiber laser, a spectrometer, an enhanced charge coupled device, a spectrum analysis module, and a delay generator; The reflective detection probe is installed on the probe motion detection module; The fiber laser, the spectrometer, the spectrum analysis module, and the delay generator are all fixedly mounted on the base, the spectrometer is connected to the spectrum analysis module via the enhanced charge coupled device, and the delay generator is connected to the fiber laser and the spectrometer respectively; The probe optical fiber is in a Y-shaped configuration, and the branch ends of the probe optical fiber are respectively connected to the fiber laser and the spectrometer, wherein the one connected to the fiber laser is called the probe transmitting optical fiber, and the one connected to the spectrometer is called the probe receiving optical fiber, and the trunk end is connected to the reflective detection probe; The optical fiber jumper is connected between the optical fiber laser and the probe transmitting optical fiber; The fiber laser is used to emit detection laser, and transmits the detection laser to the reflective detection probe through the fiber jumper and the probe emitting optical fiber; The reflective detection probe is used to emit a detection laser to the processing surface of the spline in the deep hole, excite plasma and generate a spectrum signal, and output the spectrum signal to the spectrometer through the probe receiving optical fiber; The spectrometer is used to decompose the received spectral signal into components of different wavelengths and send the components to the spectral analysis module through the enhanced charge coupled device; The spectrum analysis module is used to analyze the decomposed spectrum signal to realize the surface quality detection of the deep hole internal spline; The delay generator is used to control the delay time between the emission of the detection laser and the collection of the spectrum signal.
5. The laser induced breakdown spectroscopy system for detecting surface quality of splines in deep holes according to claim 4, characterized in that: The probe optical fiber has a multi-core common end at the reflective detection probe, including six surrounding optical fibers and one middle optical fiber; Six surrounding optical fibers, i.e., the probe transmitting optical fibers, are connected to the fiber laser, and one middle optical fiber, i.e., the probe receiving optical fiber, is connected to the spectrometer; Six surrounding optical fibers are used to transmit the detection laser emitted by the fiber laser to the processing surface of the spline in the deep hole; An intermediate optical fiber is used to output the spectrum signal reflected by the plasma to the spectrometer.
6. The laser induced breakdown spectroscopy system for detecting surface quality of splines in deep holes according to claim 4, characterized in that: A micro lens is integrated at the front of the reflective detection probe for focusing the light path.
7. The laser induced breakdown spectroscopy system for detecting surface quality of splines in deep holes according to claim 1, characterized in that: The probe motion detection module includes: a linear guide rail, a slider, an electric swing slide, and a probe support frame; The linear guide rail is fixedly mounted on the base, the slider is slidably connected to the linear guide rail, the base of the electric swing slide is fixedly connected to the slider, the upper end of the probe support frame is mounted with the reflective detection probe, and the lower end is fixedly connected to the electric swing slide; The slider is used to move horizontally on the linear guide rail, thereby driving the electric swing slide, the probe support frame, and the reflective detection probe to move horizontally; The electric swing slide is used to adjust the tilt angle of the probe support frame, thereby adjusting the tilt angle of the reflection detection probe to determine the optimal excitation position of the plasma.
8. The laser induced breakdown spectroscopy system for detecting surface quality of splines in deep holes according to claim 7, characterized in that: The probe support frame includes: a clamping frame and a support column; The clamping frame is composed of two semicircular arc structures, both ends of which are provided with screw holes and connected by bolts. The two semicircular arc structures are used to clamp and install the reflective detection probe; The bottom of the clamping frame is fixedly provided with a stud, and the clamping frame is fixedly connected to the top threaded hole of the support column through the stud, and the base of the support column is screwed to the electric swing slide through a pressure block.
9. The method for using the laser induced breakdown spectroscopy system for detecting the surface quality of splines in deep holes according to any one of claims 1 to 8, characterized in that: The following steps are involved: Step 1: Calculate the theoretical limit tilt angle of the reflective detection probe based on the structural characteristics of the deep hole spline and the reflective detection probe, and adjust the tilt angle of the reflective detection probe; Step 2: Fix the deep hole internal spline on the workpiece clamping device; Step 3: Move the reflective detection probe and insert it into the position of the spline to be detected in the deep hole; Step 4: setting a delay time between the emission of the detection laser and the collection of the spectrum signal, emitting the detection laser, and exciting the plasma on the machined surface of the spline in the deep hole and generating a spectrum signal; Step 5: Continue adjusting the tilt angle of the reflective detection probe. When the spectrum line of the spectral signal is the strongest, fix the tilt angle of the reflective detection probe and record the current spectral signal. Step six: rotate the deep hole internal spline, change the circumferential detection position, record the spectral signal at the circumferential detection position and analyze the spectral signals at different positions to realize the machining surface quality detection of the deep hole internal spline.