Coating device

Abstract

A coating device comprises: a first clamping plate; the second clamping plate is arranged opposite to the first clamping plate; the guide plate is arranged between the first clamping plate and the second clamping plate and comprises a middle part, and the extension direction of the middle part is the same as that of the first clamping plate and that of the second clamping plate; the first hooking part and the second hooking part are arranged at the two ends of the extending direction of the middle part, the first hooking part and the second hooking part are connected with the middle part, a first included angle is formed between the first hooking part and the middle part, and a second included angle is formed between the second hooking part and the middle part. The photoresist coated by the coating device is good in thickness uniformity and convenient to clean.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, and in particular to a coating device. BACKGROUND

[0002] In recent years, with the development of information communication field, the demand for various types of display devices is increasing. The mainstream display devices currently include liquid crystal display, plasma display, electroluminescent display and vacuum fluorescent display, etc. Since the liquid crystal display has the advantages of light, thin, small volume, low power consumption, low radiation, etc., it is widely used in various data processing devices, such as television, notebook, mobile phone, personal digital assistant, etc.

[0003] The liquid crystal display generally includes two substrates and a liquid crystal layer sandwiched between the two substrates. The two substrates are generally called thin film transistor substrate (TFT substrate) and color filter substrate (CF substrate). The color filter substrate generally has a plurality of color filters and a common electrode, and the thin film transistor substrate generally has a plurality of parallel scan lines, a plurality of parallel data lines perpendicular to the scan lines, and a plurality of thin film transistors and pixel electrodes arranged in a matrix at the intersection of the scan lines and the data lines. The two substrates are generally provided with spacers to define the spacing between the substrates.

[0004] In the process of manufacturing the liquid crystal display, the pixel electrodes and circuit patterns (i.e. the scan lines and data lines) on the thin film transistor substrate or the color filters on the color filter substrate are formed by a photolithographic technique similar to that used in semiconductor manufacturing, which generally includes cleaning the glass substrate to be processed, forming a thin layer of photoresist on its surface using a coating machine after it cools down, and then baking, exposing, developing, cleaning and drying the coated photoresist substrate.

[0005] However, the nozzle structure of the coating machine in the prior art still has many problems. SUMMARY

[0006] The technical problem solved by the present application is to provide a coating device to improve the nozzle structure of the coating machine and improve the coating quality.

[0007] To solve the above technical problems, the technical scheme of the present application provides a coating device, comprising: a first clamping plate; a second clamping plate arranged opposite to the first clamping plate; a flow guide plate arranged between the first clamping plate and the second clamping plate, the flow guide plate comprising: a middle part, the extension direction of the middle part being the same as the extension direction of the first clamping plate and the second clamping plate; a first hooking part and a second hooking part arranged at both ends of the extension direction of the middle part, the first hooking part and the second hooking part being connected with the middle part, and the first hooking part and the middle part having a first included angle therebetween, and the second hooking part and the middle part having a second included angle therebetween.

[0008] Optionally, a first included angle top corner region formed by the intersection of the first hooking part and the middle part is provided with a continuously transitioned first arc-shaped structure; and a second included angle top corner region formed by the intersection of the second hooking part and the middle part is provided with a continuously transitioned second arc-shaped structure.

[0009] Optionally, the flow guide plate is an axisymmetric structure, and the axis of symmetry is a middle line of the middle part perpendicular to the extension direction.

[0010] Optionally, the first hooking part and the second hooking part are the same in shape and size.

[0011] Optionally, the shape of the first hooking part comprises a triangle, and the outer side wall of the first hooking part is flush with the outer side wall of the middle part; and the shape of the second hooking part comprises a triangle, and the outer side wall of the second hooking part is flush with the outer side wall of the middle part.

[0012] Optionally, the shape of the first hooking part comprises a right-angled triangle, the right-angled side outer side wall of the first hooking part is flush with the outer side wall of the middle part, and the oblique angle side of the first hooking part forms a first included angle with the middle part; and the shape of the second hooking part comprises a right-angled triangle, the right-angled side outer side wall of the second hooking part is flush with the outer side wall of the middle part, and the oblique angle side of the second hooking part forms a second included angle with the middle part.

[0013] Optionally, the width of the middle part gradually increases in the direction from the axis of symmetry to the first hooking part; and the width of the middle part gradually increases in the direction from the axis of symmetry to the second hooking part.

[0014] Optionally, the first clamping plate and the second clamping plate are combined to form a spraying end, and the first hooking part and the second hooking part are located in the combined region of the first clamping plate and the second clamping plate.

[0015] Optionally, the device further comprises a flow guide groove arranged in the first clamping plate, a flow guide plate is arranged between the flow guide groove and the second clamping plate, the extension direction of the flow guide groove is parallel to the extension direction of the first clamping plate, the first included angle and the second included angle are located at two ends of the extension direction of the flow guide groove, and the flow guide plate exposes the flow guide groove.

[0016] Optionally, the flow guide groove is an axisymmetric structure, the axis of symmetry is a center line of the flow guide groove in the direction perpendicular to the extension direction, the width of the flow guide groove gradually decreases in the direction from the first hooking part to the second hooking part along the axis of symmetry.

[0017] Compared with the prior art, the technical scheme of the present application has the following beneficial effects:

[0018] The coating device of the present application is designed by the structure of the flow guide plate, the first hooking part and the second hooking part are arranged at two ends of the extension direction of the middle part of the flow guide plate, the first hooking part and the middle part have a first included angle, the second hooking part and the middle part have a second included angle, the first hooking part and the second hooking part facilitate drainage, the coating area can be changed by the position of the tip of the first hooking part and the second hooking part, the cost of raw materials can be reduced, the uniformity of the photoresist thickness of the coating can be improved, and the structure of the flow guide plate is simple, the flow guide plate is easy to be washed and wiped, the loss is reduced, and the utilization rate is improved. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 And Figure 2 is a structural schematic diagram of a coating device;

[0020] Figures 3 to 12 is a structural schematic diagram of a coating device in the embodiment of the present application. DETAILED DESCRIPTION

[0021] As described in the background, the nozzle structure of the coating machine in the prior art still has many problems. First, specific embodiments will be analyzed and described.

[0022] Figure 1 And Figure 2 is a structural schematic diagram of a coating device.

[0023] Please refer to Figure 1 And Figure 2 , Figure 1 is a structural schematic diagram of a coating device, Figure 2 is Figure 1The middle guide plate has a plane structure as shown in the figure. The coating device comprises a first clamping plate 101, a second clamping plate 102 arranged opposite to the first clamping plate 101, and a guide plate 103 arranged between the first clamping plate 101 and the second clamping plate 102. The guide plate 103 has a plurality of sawteeth 1031, and the coating device comprises a spraying end A. The plurality of sawteeth 1031 are directed towards the spraying end A.

[0024] The coating device is used for coating photoresist. The guide plate 103 guides the photoresist to flow out from the spraying end A. However, in the production process, the photoresist residues are concentrated on the edge of the guide plate 103. The residues cannot be completely removed by using a cleaning liquid to flush and a scraping blade to scrape. In addition, the guide plate 103 has a plurality of sawteeth 1031, and the structure of the guide plate 103 is complex and easy to be damaged, which causes high loss. As an important component of the coating device, the state of the guide plate 103 affects the level of the photoresist coated by the coating device, such as uneven thickness. The level of the photoresist coated by the coating device also affects the quality of the product. Therefore, the level of the photoresist coated by the coating device needs to be improved.

[0025] In order to solve the above problems, the technical scheme of the present application provides a coating device. The structure of the guide plate is designed. First hooking parts and second hooking parts are arranged at both ends of the extension direction of the middle part of the guide plate. The first hooking parts and the middle part have a first included angle, and the second hooking parts and the middle part have a second included angle. The first hooking parts and the second hooking parts facilitate the flow guide, can change the coating area by the position of the tips of the first hooking parts and the second hooking parts, can reduce the cost of raw materials, and can achieve the purpose of improving the uniformity of the thickness of the photoresist coated. In addition, the first hooking parts and the second hooking parts make the structure of the guide plate simple, facilitate the flushing and scraping of the guide plate, reduce the loss, and improve the utilization rate.

[0026] In order to make the above-mentioned purposes, characteristics and beneficial effects of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings.

[0027] Figures 3 to 12 The figure is a structure diagram of the coating device in the embodiment of the present application.

[0028] Please refer to 3 to Figure 12 , Figure 3 The figure is a perspective view of the first clamping plate 21. Figure 4 The figure is a perspective view of the second clamping plate 22. Figure 3 The figure is a sectional structure diagram along the direction of the section line BB1. Figure 5 The figure is a top view of the guide groove 211 in the first clamping plate 21. Figure 6 The figure is a perspective view of the second clamping plate 22. Figure 7A schematic view of the guide plate 23 is provided between the first clamping plate 21 and the second clamping plate 22, Figure 8 A schematic view of the guide plate 23 is provided between the first clamping plate 21 and the second clamping plate 22, Figure 7 A schematic view of the guide plate 23 is provided between the first clamping plate 21 and the second clamping plate 22, Figure 9 A schematic view of the guide plate 23 is provided between the first clamping plate 21 and the second clamping plate 22, Figure 10 A schematic view of the guide plate 23 is provided between the first clamping plate 21 and the second clamping plate 22, Figure 9 A schematic view of the guide plate 23 is provided between the first clamping plate 21 and the second clamping plate 22, Figure 11 A schematic view of the guide plate 23 is provided between the first clamping plate 21 and the second clamping plate 22, Figure 9 A schematic view of the guide plate 23 is provided between the first clamping plate 21 and the second clamping plate 22, Figure 12 A schematic view of the guide plate 23 is provided between the first clamping plate 21 and the second clamping plate 22, Figure 9 A schematic view of the guide plate 23 is provided between the first clamping plate 21 and the second clamping plate 22.

[0029] The coating device comprises:

[0030] The first clamping plate 21;

[0031] The second clamping plate 22 is arranged opposite to the first clamping plate 21;

[0032] The guide plate 23 is arranged between the first clamping plate 21 and the second clamping plate 22, and the guide plate 23 comprises: an intermediate part 231, the extension direction X of the intermediate part 231 is the same as the extension direction X of the first clamping plate 21 and the second clamping plate 22; a first hooking part 232 and a second hooking part 233 arranged at both ends of the extension direction X of the intermediate part 231, the first hooking part 232 and the second hooking part 233 are connected with the intermediate part 231, and the first hooking part 232 and the intermediate part 231 have a first included angle α1, and the second hooking part 233 and the intermediate part 231 have a second included angle α2.

[0033] The coating device is designed by arranging the first hooking part 232 and the second hooking part 233 at both ends of the extension direction X of the intermediate part 231 of the guide plate 23, and the first hooking part 232 and the intermediate part 231 have a first included angle α1, and the second hooking part 233 and the intermediate part 231 have a second included angle α2, so that the first hooking part 232 and the second hooking part 233 facilitate the flow of water, and the position of the tip of the first hooking part 232 and the second hooking part 233 can change the coating area, which can reduce the cost of raw materials and improve the uniformity of the photoresist thickness. In addition, the first hooking part 232 and the second hooking part 233 make the structure of the guide plate 23 simple, which facilitates the flushing and wiping of the guide plate 23, reduces the loss, and improves the utilization rate.

[0034] Please continue to refer to Figures 9 to 12, the first hooking part 232 and the intermediate part 231 intersect to form a first included angle α1 top corner area provided with a first arc-shaped structure A1 continuously transitioned; the second hooking part 233 and the intermediate part 231 intersect to form a second included angle α2 top corner area provided with a second arc-shaped structure C1 continuously transitioned.

[0035] The first arc-shaped structure A1 and the second arc-shaped structure C1 play a role in guiding the flow of fluid, guiding the photoresist from both ends of the flow guide plate 23 to form the same horizontal plane for uniform coating.

[0036] In this embodiment, the opening of the first included angle α1 and the opening of the second included angle α2 are oppositely arranged. Thus, the oppositely arranged first hooking part 232 and the second hooking part 233 can limit the area of the coated photoresist to the area between the first hooking part 232 and the second hooking part 233, defining the coating range.

[0037] In this embodiment, the first included angle α1 is an acute angle, and the second included angle α2 is an acute angle, so as to better play a role in guiding the flow.

[0038] The angle range of the first included angle α1 is the same as the angle range of the second included angle α2, so that the first hooking part 232 and the second hooking part 233 are easy to arrange. In this embodiment, the angle range of the first included angle α1 is 15 degrees to 25 degrees; the angle range of the second included angle α2 is 15 degrees to 25 degrees.

[0039] In this embodiment, the first included angle α1 is the same as the second included angle α2, so that the first hooking part 232 and the second hooking part 233 can be symmetrically arranged, and the effect of guiding the flow is easy to control.

[0040] In this embodiment, the center of the first arc-shaped structure A1 is located on the extension line of the first included angle α1 angle bisector; the center of the second arc-shaped structure C1 is located on the extension line of the second included angle α2 angle bisector.

[0041] In this embodiment, the radius R1 of the first arc-shaped structure A1 ranges from 2 mm to 10 mm; the radius R2 of the second arc-shaped structure C1 ranges from 2 mm to 10 mm.

[0042] Please continue to refer to Figure 9 In this embodiment, the flow guide plate 23 is an axisymmetric structure, and the axis of symmetry is the center line L1 of the intermediate part 231 perpendicular to the extension direction X. The extension direction X is the length direction of the flow guide plate 23, that is, the intermediate part 231 is symmetric about the center line L1 in the extension direction X.

[0043] In the present embodiment, the first hooking portion 232 and the second hooking portion 233 are identical in shape and size.

[0044] The first hooking portion 232 and the second hooking portion 233 are identical in shape, i.e. the projection shapes of the first hooking portion 232 and the second hooking portion 233 can coincide.

[0045] The first hooking portion 232 and the second hooking portion 233 are identical in size, i.e. the side length and area of the first hooking portion 232 and the second hooking portion 233 are identical.

[0046] In other embodiments, the deflector can not be provided as an axisymmetric figure, and the first hooking portion and the second hooking portion can not be identical in shape and size.

[0047] The shape of the first hooking portion 232 comprises a triangle, and the outer side wall of the first hooking portion 232 is flush with the outer side wall of the intermediate portion 231; the shape of the second hooking portion 233 comprises a triangle, and the outer side wall of the second hooking portion 233 is flush with the outer side wall of the intermediate portion 231. The outer side wall is the side wall at both ends of the extension direction X of the deflector 23.

[0048] In the present embodiment, the shape of the first hooking portion 232 comprises a right-angled triangle, one of the right-angled sides of the first hooking portion 232 is flush with the outer side wall of the intermediate portion 231, and the oblique side of the first hooking portion 232 forms a first included angle a1 with the intermediate portion 231.

[0049] In the present embodiment, the other right-angled side of the first hooking portion 232 is parallel to the extension direction X. In other embodiments, the other right-angled side of the first hooking portion can not be parallel to the extension direction.

[0050] In other embodiments, the shape of the first hooking portion comprises an acute-angled triangle.

[0051] In the present embodiment, the shape of the second hooking portion 233 comprises a right-angled triangle, one of the right-angled sides of the second hooking portion 233 is flush with the outer side wall of the intermediate portion 231, and the oblique side of the second hooking portion 233 forms a second included angle a2 with the intermediate portion 231.

[0052] In the present embodiment, the other right-angled side of the second hooking portion 233 is parallel to the extension direction X. In other embodiments, the other right-angled side of the second hooking portion can not be parallel to the extension direction.

[0053] In other embodiments, the shape of the second hooking portion comprises an acute-angled triangle.

[0054] One straight edge outer wall of the first hooking part 232 is flush with the outer wall of the intermediate part 231, the other straight edge outer wall of the first hooking part 232 is parallel to the extension direction X, one straight edge outer wall of the second hooking part 233 is flush with the outer wall of the intermediate part 231, the other straight edge outer wall of the second hooking part 233 is parallel to the extension direction X, so that the deflector 23 is not easy to protrude from the spraying end formed by the combination of the first clamping plate 21 and the second clamping plate 22, and is easy to design and install.

[0055] Please continue to refer to Figure 10 and Figure 11 In the present embodiment, the first hooking part 232 includes a first drainage end A2, and the shape of the first hooking part 232 includes a triangle, and the shape of the first drainage end A2 is an acute angle; the second hooking part 233 includes a second drainage end C2, and the shape of the second hooking part 233 includes a triangle, and the shape of the second drainage end C2 is an acute angle.

[0056] The first drainage end A2 and the second drainage end C2 are used to define the coating range, and the size of the coating area is adjusted by adjusting the distance between the first drainage end A2 and the second drainage end C2.

[0057] Please continue to refer to Figure 12 In other embodiments, the shape of the first hooking part includes a truncated triangle, and the shape of the first drainage end A2 is a flat angle; the shape of the second hooking part includes a truncated triangle, and the shape of the second drainage end is a flat angle.

[0058] Please continue to refer to Figure 9 In the present embodiment, the width of the intermediate part 231 gradually increases along the direction D1 of the first hooking part 232 along the symmetry axis L1, and the width of the intermediate part 231 gradually increases along the direction D2 of the second hooking part 233 along the symmetry axis L1.

[0059] The width of the intermediate part 231 gradually increases along the direction D1 of the first hooking part 232 along the symmetry axis L1, and the width of the intermediate part 231 gradually increases along the direction D2 of the second hooking part 233 along the symmetry axis L1, so that when the photoresist enters from the center, the fluid is guided to the two sections of the deflector 23 through the fan-shaped arc-shaped diffusion section with gradually changing width, and then guided to the same horizontal line through the first circular arc-shaped structure A1 and the second circular arc-shaped structure C1 on both sides, preventing unstable flow caused by sudden contraction of the fluid, and further preventing uneven coating.

[0060] The trend of gradually increasing width of the intermediate part 231 is mainly designed through material fluid mechanics design, fluid pressure balance and other manufacturing process optimization to achieve high-precision coating uniformity and reduce the occurrence of coating defects.

[0061] In the present embodiment, the width of the intermediate portion 231 gradually increases by a preset value per 100 mm in the direction D1 from the first hooking portion 232 along the symmetry axis L1 and in the direction D2 from the second hooking portion 233 along the symmetry axis L1. This ensures that the width of the intermediate portion 231 changes uniformly, in accordance with the design of fluid dynamics, the balance of fluid pressure, and the like.

[0062] In the present embodiment, the preset value is in the range of 5 mm to 8 mm.

[0063] In other embodiments, the width of the intermediate portion is the same in the extension direction of the intermediate portion.

[0064] In the present embodiment, the intermediate portion 231 has a first side S1 and a second side S2 in the width direction, the second side S2 forms a first included angle a1 with the first hooking portion 232, and the second side S2 forms a second included angle a2 with the second hooking portion 233; the side wall of the first side S1 is perpendicular to the side wall at both ends of the extension direction X of the intermediate portion 231.

[0065] Please refer to Figure 7 and Figure 8 , the first clamping plate 21 and the second clamping plate 22 combine to form a spraying end P, and the first hooking portion 232 and the second hooking portion 233 are located in the combined area of the first clamping plate 21 and the second clamping plate 22.

[0066] The first hooking portion 232 and the second hooking portion 233 are located in the combined area of the first clamping plate 21 and the second clamping plate 22, i.e. the first hooking portion 232 and the second hooking portion 233 do not protrude from the spraying end P, the first hooking portion 232 and the second hooking portion 233 are flush with the top surface of the spraying end P, or the first hooking portion 232 and the second hooking portion 233 are lower than the top surface of the spraying end P.

[0067] The first hooking portion 232 and the second hooking portion 233 do not protrude from the spraying end P, so that the first hooking portion 232 and the second hooking portion 233 are not easy to cause uneven coating or scratching and other adverse conditions during coating.

[0068] Please refer to Figure 8 , the thickness of the first clamping plate 21 and the thickness of the flow guide plate 23 are in the ratio range of 1:380 to 1:280; the thickness of the second clamping plate 22 and the thickness of the flow guide plate 23 are in the ratio range of 1:300 to 1:200.

[0069] In the embodiment, the thickness of the first clamping plate 21 is greater than the thickness of the second clamping plate 22, so as to set the flow guide groove in the first clamping plate 21.

[0070] In other embodiments, the thickness of the first clamping plate and the thickness of the second clamping plate can be different.

[0071] In the embodiment, the thickness of the flow guide plate 23 ranges from greater than or equal to 125 microns.

[0072] The thickness of the flow guide plate 23 is thick, on the one hand, the flow guide plate 23 can provide better structural support for the first clamping plate 21 and the second clamping plate 22, on the other hand, the thickened flow guide plate 23 increases the gap between the first clamping plate 21 and the second clamping plate 22, and the smooth conversion of fluid kinetic energy is realized by geometric optimization, which is the core of controlling pressure balance and uniform distribution of flow. The photoresist is connected to a slit at the end of the flow channel (spraying end P) to uniformly coat the substrate.

[0073] Please continue to refer to Figures 3 to 8 , the coating device further comprises: at least a flow guide groove 211 provided in the first clamping plate 21, the flow guide plate 23 is located between the flow guide groove 211 and the second clamping plate 22, the extension direction of the flow guide groove 211 is parallel to the extension direction X of the first clamping plate 21, the first included angle α1 and the second included angle α2 are located at both ends of the extension direction X of the flow guide groove 211, and the flow guide plate 203 exposes the flow guide groove 211.

[0074] The flow guide groove 211 is used to receive the photoresist reagent stored externally, so as to provide sufficient amount of photoresist reagent to pass through the flow guide plate 23 by the flow guide effect, and to be introduced and positioned through the first drainage end A2 and the second drainage end C2, and to be coated with photoresist through the spraying end P.

[0075] In the embodiment, the flow guide groove 211 is located in the first clamping plate 21.

[0076] In other embodiments, the flow guide groove can also be provided in the second clamping plate.

[0077] Please continue to refer to Figure 4 , in the embodiment, the bottom of the flow guide groove 211 is a circular arc transition. The flow guide groove 211 is a round bottom groove, and the circular arc design is adopted at the bottom of the flow guide groove 211 to reduce the resistance when the photoresist reagent flows, and also facilitates cleaning.

[0078] In the embodiment, the radius of the circular arc bottom of the flow guide groove 211 ranges from 3 mm to 7 mm.

[0079] In other embodiments, the bottom of the flow guide groove is a right angle or a flat bottom.

[0080] In the embodiment, the flow guide groove 211 is an axisymmetric structure, and the axis of symmetry L2 is the center line of the flow guide groove 211 in the vertical direction X, that is, the flow guide groove 211 is symmetrically arranged in the vertical direction X.

[0081] In the embodiment, the width of the flow guide groove 211 gradually decreases in the direction D1 along the axis of symmetry L2 to the first hooking part 232; and the width of the flow guide groove 211 gradually decreases in the direction D2 along the axis of symmetry L2 to the second hooking part 233.

[0082] In the embodiment, the shape of the flow guide groove 211 is fitted with the shape of the flow guide plate 23, that is, the flow guide groove 211 can be embedded in the area formed by the intermediate part 231, the first hooking part 232 and the second hooking part 233, the second side S2 of the intermediate part 231 is in contact with the side wall of the flow guide groove 211 close to the second side S2, and the projection of the second side S2 of the intermediate part 231 on the side wall of the flow guide groove 211 close to the second side S2 is coincident, so that the flow guide plate 23 is exposed and the flow of the photoresist reagent is not blocked by the flow guide groove 211, the photoresist reagent in the flow guide groove 211 flows out through the area between the first hooking part 232 and the second hooking part 233, and the coating speed and coating quality are facilitated to be controlled.

[0083] In the embodiment, the width variation trend of the flow guide groove 211 is opposite to the width variation trend of the intermediate part 231, so that when the flow guide plate 23 is arranged between the first clamping plate 21 and the second clamping plate 22, the flow guide plate 23 can expose the flow guide groove 211.

[0084] The length of the flow guide plate 23 is less than or equal to the length of the first clamping plate 21; and the length of the flow guide plate 23 is less than or equal to the length of the second clamping plate 22.

[0085] In the embodiment, the length of the first clamping plate 21 and the length of the second clamping plate 22 are the same, the length of the flow guide plate 23 is equal to the length of the first clamping plate 21, and the length of the flow guide plate 23 is equal to the length of the second clamping plate 22, so that mechanical design and installation are facilitated.

[0086] In other embodiments, the length of the first clamping plate and the length of the second clamping plate can be different; the length of the flow guide plate is less than the length of the first clamping plate; and the length of the flow guide plate is less than the length of the second clamping plate.

[0087] In the embodiment, the width of the first clamping plate 21 and the width of the second clamping plate 22 are the same.

[0088] The width of the intermediate part 231 is less than or equal to the width of the first clamping plate 21; the width of the intermediate part 231 is less than or equal to the width of the second clamping plate 22.

[0089] In this embodiment, the width of the intermediate part 231 is less than the width of the first clamping plate 21; the width of the intermediate part 231 is less than the width of the second clamping plate 22.

[0090] Please continue to refer to Figure 3 , Figure 4 and Figure 6 The first clamping plate 21 further comprises a plurality of first mounting holes 212 penetrating the first clamping plate 21.

[0091] Please continue to refer to Figure 6 The second clamping plate 22 further comprises a plurality of second mounting holes 222 penetrating the second clamping plate 22, and the positions of the plurality of first mounting holes 221 and the plurality of second mounting holes 222 correspond one by one.

[0092] Please continue to refer to Figure 8 The deflector 23 further comprises a plurality of third mounting holes 234 penetrating the deflector 23, and the positions of the plurality of third mounting holes 234, the plurality of first mounting holes 221 and the plurality of second mounting holes 222 correspond one by one.

[0093] The first mounting holes 221, the second mounting holes 222 and the third mounting holes 234 are used for mounting and fixing the first clamping plate 21, the second clamping plate 22 and the deflector 23.

[0094] The mounting and fixing mode of the first clamping plate 21, the second clamping plate 22 and the deflector 23 includes screws, bolts, rivets, etc.

[0095] In this embodiment, the materials of the first clamping plate 21, the second clamping plate 22 and the deflector 23 include stainless steel.

[0096] Although the present application is disclosed as above, the present application is not limited thereto. Any person skilled in the art, without departing from the spirit and scope of the present application, can make various changes and modifications, therefore the protection scope of the present application should be subject to the range defined by the claims.

Claims

1. A coating device, characterized in that: include: First splint; a second splint disposed opposite to the first splint; A guide plate disposed between the first clamping plate and the second clamping plate, the guide plate comprising: a middle portion, the middle portion extending in the same direction as the first clamping plate and the second clamping plate; A first hook portion and a second hook portion are provided at both ends of the middle portion in an extending direction, the first hook portion and the second hook portion are connected to the middle portion, and a first angle is formed between the first hook portion and the middle portion, and a second angle is formed between the second hook portion and the middle portion.

2. The coating device according to claim 1, wherein A first angle vertex area formed by the intersection of the first hook portion and the middle portion is provided with a first arc-shaped structure with continuous transition; a second angle vertex area formed by the intersection of the second hook portion and the middle portion is provided with a second arc-shaped structure with continuous transition.

3. The coating device according to claim 1, wherein The guide plate is an axisymmetric structure, and the axis of symmetry is the midline of the middle portion perpendicular to the extension direction.

4. The coating device according to claim 3, wherein The first hook portion and the second hook portion have the same shape and size.

5. The coating device according to claim 1, wherein The first hooking portion has a triangular shape, and an outer sidewall of the first hooking portion is flush with an outer sidewall of the middle portion; the second hooking portion has a triangular shape, and an outer sidewall of the second hooking portion is flush with an outer sidewall of the middle portion.

6. The coating device according to claim 5, wherein The shape of the first hook portion includes a right-angled triangle, the outer wall of the right-angled side of the first hook portion is flush with the outer wall of the middle portion, and the oblique angle of the first hook portion and the middle portion form a first angle; the shape of the second hook portion includes a right-angled triangle, the outer wall of the right-angled side of the second hook portion is flush with the outer wall of the middle portion, and the oblique angle of the second hook portion and the middle portion form a second angle.

7. The coating device according to claim 1, wherein The width of the middle portion gradually increases from the symmetry axis to the first hook portion; and the width of the middle portion gradually increases from the symmetry axis to the second hook portion.

8. The coating device according to claim 1, wherein The first clamping plate and the second clamping plate are combined to form a spraying end, and the first hooking portion and the second hooking portion are located in a combined area of ​​the first clamping plate and the second clamping plate.

9. The coating device according to claim 1, wherein Also includes: A guide groove is at least provided in the first clamping plate, the guide plate is located between the guide groove and the second clamping plate, the extension direction of the guide groove is parallel to the extension direction of the first clamping plate, the first angle and the second angle are located at both ends of the extension direction of the guide groove, and the guide plate exposes the guide groove.

10. The coating device according to claim 9, wherein The guide groove is an axisymmetric structure, and the axis of symmetry is the midline of the guide groove perpendicular to the extension direction; the width of the guide groove gradually decreases along the axis of symmetry to the first hook portion; the width of the guide groove gradually decreases along the axis of symmetry to the second hook portion.

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