Diamond wire cutting equipment and cutting method for polycrystalline silicon

Abstract

The invention relates to the technical field of polycrystalline silicon processing, and particularly discloses diamond wire cutting equipment for polycrystalline silicon. A support roller; and a plurality of first driving pieces are installed on the workbench, and the first driving pieces are in transmission connection with the shell through transmission pieces. According to the device, when the supporting rollers are abraded, the shell rotates through the first driving part and the transmission part, in this way, the unabraded supporting rollers in other positions can make contact with the diamond wire, the abraded supporting rollers can be away from the diamond wire, and the supporting rollers making contact with the diamond wire are kept in the unabraded state all the time; therefore, the diamond wire is effectively prevented from being in a tightened state when the diamond wire is moved to other areas of the supporting roller after the tensioning assembly adjusts the tensioning degree of the diamond wire when the diamond wire makes contact with the abraded supporting roller, and the risk of breakage of the diamond wire is reduced. In other words, the tensioning assembly only adjusts the tensioning degree of the diamond wire under the condition that the diamond wire is loosened after being used for a long time.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of polycrystalline silicon processing, and in particular to a diamond wire cutting device and method for polycrystalline silicon. BACKGROUND

[0002] The diamond wire cutting machine adopts the mode of one-way circulation or reciprocating circulation of diamond wire to form relative grinding motion between the diamond wire and the cut object, thereby achieving the purpose of cutting. Its cutting principle is similar to that of a bow saw, and it is an important tool for processing silicon wafers.

[0003] At present, when the diamond wire cutting machine cuts polycrystalline silicon, the diamond wire is prone to relaxation after long-term use, which affects the cutting quality. In view of the above technical problems, the applicant has searched some prior art to solve the problem of relaxation of the diamond wire after long-term use. For example, the patent publication No. CN220261545U discloses a polycrystalline silicon wafer diamond wire cutting device, which mainly has the function of adjusting the tightness of the diamond wire by setting an adjusting assembly. By adjusting the tightness of the diamond wire, the diamond wire can always be at an appropriate tightness. Through the analysis of the applicant, the disadvantages of this technical solution are as follows: since the surface of the diamond wire is provided with a plurality of small diamond particles, and the surface of the diamond wire may also be attached with silicon powder when cutting polycrystalline silicon, when the diamond wire runs tightly on the surface of the roller with high tension, a high-pressure stress zone will be formed in the contact area between the two, which will cause the surface of the roller to wear after the diamond particles and silicon powder on the diamond wire come into contact with the roller. The diamond particles on the diamond wire in some areas may fall off when the wire is running, resulting in uneven distribution of the diamond particles on the diamond wire, and uneven attachment of silicon powder on the diamond wire, which may cause local wear on the surface of the roller. When the roller is worn, the diamond wire will be relaxed. At this time, the tightness of the diamond wire can be adjusted by the adjusting assembly. When the diamond wire moves to the local wear area of the surface of the roller, the diamond wire is in a relaxed state. When the diamond wire moves away from the local wear area of the surface of the roller, the tightness of the diamond wire is just right. If the tightness of the diamond wire is adjusted when it moves to the local wear area of the surface of the roller, the tightness of the diamond wire in the local wear area of the surface of the roller is just right. However, when the diamond wire moves away from the local wear area of the surface of the roller after the tightness is adjusted, the diamond wire is in a state of over-tightness, which increases the risk of breaking of the diamond wire, thereby affecting the cutting process and the cutting quality. SUMMARY

[0004] The present application aims to solve the technical problem that the diamond wire may be in a state of over-tightness when it moves to other areas after being adjusted in tightness in the local wear area of the roller, thereby increasing the risk of breaking of the diamond wire.

[0005] The object of the present application can be achieved by the following technical solutions: A diamond wire cutting device for polycrystalline silicon, comprising a workbench, a driving member two, a driving roller, a tensioning assembly and a fixing seat, the device further comprising: A winding roller, a plurality of sets of winding rollers are installed on the workbench, the winding roller comprises a fixed cylinder, the fixed cylinder is fixedly installed on the workbench, an outer shell is rotatably installed on the fixed cylinder, a connecting rod is arranged in the outer shell, the other end of the connecting rod is provided with a limiting plate, the limiting plate is located outside the outer shell, and a gap is formed between the limiting plate and the outer shell; A support roller, a plurality of shaft tubes are arranged in an annular array in the outer shell, a support roller is movably sleeved on the shaft tube, one end of the support roller penetrates through the limiting plate, and the diamond wire abuts against the surfaces of the plurality of support rollers when winding around the winding roller, and the diamond wire is located in the gap region; A driving member one, a plurality of driving member ones are installed on the workbench, and the driving member one is in driving connection with the outer shell through a transmission member.

[0006] As a preferred embodiment of the above technical solution, a detection assembly is installed on the periphery of the connecting rod, and the detection assembly comprises: A fixed ring, the fixed ring is fixed on the periphery of the connecting rod; A contact rod, a plurality of contact rods are movably installed on the periphery of the fixed ring, the plurality of contact rods are arranged in an annular array, the number of the contact rods is the same as that of the support rollers, each contact rod abuts against the periphery of a group of support rollers, an elastic member one is connected between the contact rod and the inner wall of the fixed ring, and the contact rod is located in the gap region; A sensor, a plurality of sensors are installed on the inner wall of the inner ring of the fixed ring, and the sensors are in signal connection with the driving member one.

[0007] As a preferred embodiment of the above technical solution, a guide assembly is installed in the fixed cylinder, the guide assembly comprises a guide plate, the guide assembly is installed outside the fixed cylinder, the guide assembly comprises a guide plate, a support plate is rotatably installed on the support roller, a plurality of guide rods are arranged on the limiting plate, one end of the support plate is sleeved on the periphery of the guide rod, the end portion of the guide plate is in a circular arc shape, and the distance between the end portion of the guide plate and the limiting plate is greater than the distance between the support plate and the limiting plate.

[0008] As a preferred embodiment of the above technical solution, a locking assembly one is installed between the support roller and the shaft tube, and the locking assembly one comprises: A U-shaped frame, a plurality of U-shaped frames are fixedly installed at one end of the support roller; A toothed plate, a toothed plate is arranged in the U-shaped frame; A rotating ring, a rotating ring is rotatably installed on the periphery of the shaft tube; The ratchet teeth are installed on the periphery of the rotating ring and are clamped on the tooth plate, and elastic members two are connected between the ratchet teeth and the rotating ring.

[0009] As a preferred technical scheme of the above, the support roller is internally provided with a gas storage cavity, one end of the shaft tube is located in the gas storage cavity, the one end of the shaft tube is provided with a piston, the piston is attached to the inner wall of the gas storage cavity, a through hole is formed on the periphery of the shaft tube, the through hole is in communication with the hollow part inside the shaft tube, the through hole is located in the gas storage cavity, a gas collecting assembly is installed in the fixed cylinder, and one end of the shaft tube installed on the shell is connected with the gas collecting assembly.

[0010] As a preferred technical scheme of the above, the gas collecting assembly comprises: a gas bag, which is installed in the fixed cylinder; a main gas pipe, which is connected to the gas bag; a plurality of connecting pipes, which are connected to the end of the shaft tube and are in communication with the plurality of shaft tubes; the guide assembly further comprises a fixed sleeve, the fixed sleeve is installed outside the fixed cylinder through a mounting plate, the guide plate is movably sleeved in the fixed sleeve, and a guide pipe is connected between the gas bag and the fixed sleeve; a one-way valve is installed on the connecting pipe and the guide pipe, and a pressure relief valve is arranged at the connecting part of the gas bag and the guide pipe.

[0011] As a preferred technical scheme of the above, a locking assembly two is installed between the guide plate and the fixed sleeve, and the structure of the locking assembly two is the same as that of the locking assembly one.

[0012] A cutting method for a diamond wire cutting device for polycrystalline silicon, the method is applied to the diamond wire cutting device for polycrystalline silicon as described above, and the method comprises the following steps: Step S1: first, install the polycrystalline silicon on the fixed seat, then wind the diamond wire around the driving roller, a plurality of tensioning assemblies and a plurality of winding rollers, and complete the preparation work; Step S2: start the driving part two to drive the driving roller to move the diamond wire, so that the diamond wire cuts the polycrystalline silicon, and the fixed seat drives the polycrystalline silicon to move upwards to increase the cutting depth; Step S3: when the support roller is worn out, start the driving part one to rotate the shell, so that the worn support roller moves away from the diamond wire, and the unworn support roller contacts the diamond wire; when the worn support roller moves to the guide plate, it moves outward, the worn part of the support roller moves away from the gap, and the unworn part of the support roller moves to the gap; Step S4: when the diamond wire passes through the polycrystalline silicon, one cutting is completed.

[0013] The beneficial effects of the present application are: 1. In the present invention, when the support roller is worn, the housing is rotated by the driving member 1 and the transmission member, so that the unworn support rollers in other positions will contact the diamond wire, while the worn support rollers will move away from the diamond wire, so that the support rollers in contact with the diamond wire always remain in an unworn state, thereby effectively avoiding the tensioning of the diamond wire by the tensioning assembly when the diamond wire contacts the worn support roller and then being in a taut state when the diamond wire moves to other areas of the support roller, thereby reducing the risk of diamond wire breakage. In other words, the tensioning assembly only adjusts the tension of the diamond wire when the diamond wire becomes loose after long-term use; 2. In the present invention, when the housing rotates, the support plate on the support roller close to the guide plate will move along the arc surface of the guide plate. Under the guidance of the guide rod, the support roller moves outward, so that the worn area on the support roller is away from the gap, and the unworn area on the support roller moves to the gap. This can increase the service life of the support roller and ensure that the diamond wire can always contact the unworn support roller, thereby ensuring that the tension of the diamond wire always remains in an appropriate state except for its own relaxation, effectively avoiding the diamond wire from being in a tight state, and further reducing the risk of diamond wire breakage; 3. In the present invention, when the support roller moves outward, the piston will squeeze part of the gas in the air storage chamber into the shaft tube through the through hole, and finally enter the airbag through the connecting tube to expand the airbag. When all the support rollers move once, the limit of the pressure relief valve will be reached. The excess gas in the airbag will be filled into the fixed sleeve through the conduit through the pressure relief valve. The gas entering the fixed sleeve will squeeze the guide plate, causing the guide plate to move outward. In this way, when the support roller moves to the guide plate again, the support plate will move along the arc surface of the guide plate again, thereby driving the support roller to move outward again. This can further increase the service life of the support roller, and at the same time further ensure that the diamond wire can always be in contact with the unworn support roller, thereby ensuring that the tension of the diamond wire always maintains an appropriate state except for its own relaxation, effectively avoiding the diamond wire from being in a tight state, and further reducing the risk of diamond wire breakage. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the structure of the diamond wire winding around the winding roller; Figure 3 Schematic diagram of the internal structure of the shell; Figure 4 Schematic diagram of the internal structure of the winding roller; Figure 5 Schematic diagram of the internal planar structure of the shell; Figure 6 Schematic diagram of the detection component structure; Figure 7Supporting roller and connecting pipe connecting structure schematic view; Figure 8 Supporting roller internal structure and locking assembly one structure schematic view; Figure 9 Gas collecting assembly structure schematic view.

[0015] In the figure: 1, workbench; 2, winding roller; 21, shell; 22, limiting plate; 221, connecting rod; 222, guide rod; 23, gap; 24, fixed cylinder; 3, driving part one; 31, transmission part; 4, diamond wire; 5, supporting roller; 51, gas storage cavity; 52, support plate; 6, shaft pipe; 61, piston; 62, through hole; 7, detection assembly; 71, fixed ring; 72, contact rod; 73, elastic part one; 74, sensor; 8, guide assembly; 81, fixed sleeve; 82, guide plate; 83, locking assembly two; 84, mounting plate; 9, locking assembly one; 91, V-shaped frame; 92, toothed plate; 93, rotating ring; 94, ratchet; 95, elastic part two; 10, gas collecting assembly; 101, air bag; 102, main gas pipe; 103, connecting pipe; 11, driving part two; 12, driving roller; 13, tensioning assembly; 14, fixed seat. DETAILED DESCRIPTION

[0016] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of the present application.

[0017] As Figures 1-7 shown, a diamond wire cutting device for polycrystalline silicon includes a workbench 1, a driving part two 11, a driving roller 12, a tensioning assembly 13, and a fixed seat 14. The device further includes: The winding roller 2 is installed on the workbench 1 in several groups. The winding roller 2 includes a fixed cylinder 24 fixedly installed on the workbench 1. The fixed cylinder 24 is rotatably installed with a shell 21. The shell 21 is provided with a connecting rod 221. The other end of the connecting rod 221 is provided with a limiting plate 22. The limiting plate 22 is located outside the shell 21. The gap 23 is formed between the limiting plate 22 and the shell 21; The supporting roller 5 is arranged in an annular array in the shell 21. The supporting roller 5 is movably sleeved on the shaft pipe 6. One end of the supporting roller 5 penetrates through the limiting plate 22. The diamond wire 4 abuts against the surface of the supporting roller 5 when winding around the winding roller 2. The diamond wire 4 is located in the gap 23 region; The workbench 1 is provided with a plurality of driving members 3, and the driving member 3 is in transmission connection with the shell 21 through a transmission member 31.

[0018] In actual application, the polycrystalline silicon is installed on the fixing seat 14, and then the diamond wire 4 is sequentially wound around the driving roller 12, the plurality of tensioning assemblies 13 and the plurality of winding rollers 2. When the driving member 11 is started, the driving roller 12 rotates, so that the diamond wire 4 is in a wire running state and cuts the polycrystalline silicon. When the diamond wire 4 is running, the diamond wire 4 is in contact with the surface of the plurality of supporting rollers 5, so that the diamond wire 4 and the surface of a single supporting roller 5 realize point contact. Compared with the continuous line contact realized by a single traditional roller, the contact stress borne by the single supporting roller 5 is relatively small, so that the wear degree of the single supporting roller 5 can be reduced, the service life of the supporting roller 5 is improved, and the diamond wire can be kept in a suitable tensioning state for a long time, so as to ensure the cutting effect of the diamond wire. When the diamond wire 4 is running, the supporting roller 5 in contact with the diamond wire 4 is in a rotating state, so that the surface of the supporting roller 5 forms point contact with the diamond wire 4 at different regions, rather than continuously point contact with the diamond wire 4 at a point. In this way, the wear degree of the single supporting roller 5 can be reduced, and the diamond wire can be kept in a suitable tensioning state for a long time, so as to further ensure the cutting effect of the diamond wire. When the supporting roller 5 is worn, the shell 21 is rotated through the driving member 3 and the transmission member 31, so that the supporting rollers 5 at other positions which are not worn are in contact with the diamond wire 4, and the worn supporting roller 5 is away from the diamond wire 4. The supporting roller 5 in contact with the diamond wire 4 is always kept in a non-worn state, so that the risk of the diamond wire 4 being broken when the diamond wire 4 is in a tight state after the tensioning assembly 13 adjusts the tensioning degree of the diamond wire 4 and then moves to other regions of the supporting roller 5 can be reduced. That is, the tensioning assembly 13 only adjusts the tensioning degree of the diamond wire 4 when the diamond wire 4 is relaxed after being used for a long time.

[0019] Further, the connecting rod 221 is provided with a detection assembly 7 outside, and the detection assembly 7 comprises: A fixing ring 71 is fixed outside the connecting rod 221. A plurality of contact rods 72 are movably installed outside the fixing ring 71, the plurality of contact rods 72 are arranged in an annular array, the number of the contact rods 72 is the same as that of the supporting rollers 5, each contact rod 72 abuts against the periphery of a group of supporting rollers 5, and an elastic member 73 is connected between the contact rod 72 and the inner wall of the fixing ring 71, and the contact rod 72 is located in the gap 23. A plurality of sensors 74 are installed on the inner wall of the inner ring of the fixing ring 71, and the sensors 74 are in signal connection with the driving member 3.

[0020] In one case of the embodiment, the sensor 74 is used to detect the distance between the contact rod 72 and the sensor 74, which is normally kept unchanged, and if the distance changes, the sensor 74 will transmit a signal to the driving member 3 to start the driving member 3.

[0021] In actual application of the embodiment, when the surface of the supporting roller 5 is worn, the worn area will pass the contact rod 72 when the supporting roller 5 rotates, the contact rod 72 will move outward, the sensor 74 will transmit a signal to the external processor, so as to start the driving member 3, and thus the shell 21 rotates to move the supporting roller 5 with worn surface away from the diamond wire 4, so as to ensure that the supporting roller 5 in contact with the diamond wire 4 always keeps the state of no wear, and ensure the continuity of the switching of the supporting roller 5, so as to ensure that the tension of the diamond wire 4 always keeps the appropriate state except for the self-relaxation of the diamond wire 4, effectively avoid the diamond wire 4 in the tight state, and further reduce the risk of the breakage of the diamond wire 4.

[0022] Further, the fixed cylinder 24 is externally provided with a guide assembly 8, the guide assembly 8 comprises a guide plate 82, the supporting roller 5 is rotatably provided with a supporting plate 52, the limiting plate 22 is provided with a plurality of guide rods 222, one end of the supporting plate 52 is sleeved on the outer periphery of the guide rod 222, the end of the guide plate 82 is arc-shaped, and the distance between the end of the guide plate 82 and the limiting plate 22 is greater than the distance between the supporting plate 52 and the limiting plate 22.

[0023] It should be noted that if the surfaces of all the supporting rollers 5 are worn, the switching of the supporting roller 5 in contact with the diamond wire 4 cannot guarantee the tension of the diamond wire 4 in the appropriate state.

[0024] In actual application of the embodiment, when the shell 21 rotates, the supporting plate 52 on the supporting roller 5 close to the guide plate 82 will move along the arc surface of the guide plate 82, and under the guidance of the guide rod 222, the supporting roller 5 moves outward, so that the worn area on the supporting roller 5 moves away from the gap 23, and the unworn area on the supporting roller 5 moves to the gap 23, which can improve the service life of the supporting roller 5, and ensure that the diamond wire 4 is always in contact with the unworn supporting roller 5, so as to ensure that the tension of the diamond wire 4 always keeps the appropriate state except for the self-relaxation of the diamond wire 4, effectively avoid the diamond wire 4 in the tight state, and further reduce the risk of the breakage of the diamond wire 4.

[0025] As shown in Figure 7 and Figure 8 , the supporting roller 5 and the shaft tube 6 are provided with a locking assembly 9, and the locking assembly 9 comprises: a U-shaped frame 91, one end of the supporting roller 5 is fixedly provided with a plurality of U-shaped frames 91; a toothed plate 92, the U-shaped frame 91 is provided with the toothed plate 92; Rotary joint 93, the outer periphery of the shaft tube 6 is rotatably mounted with a rotary joint 93; Ratchet 94, a plurality of ratchets 94 are rotatably mounted on the outer periphery of the rotary joint 93, the ratchets 94 are clamped on the toothed plate 92, and the ratchets 94 are connected with elastic members two 95 between the rotary joint 93.

[0026] In actual application, the support roller 5 may be in an unstable state when rotating and moving outward, which may cause the originally worn area of the support roller 5 to return to the gap 23 area, thereby affecting the tension of the diamond wire 4. Therefore, by clamping the ratchet 94 on the toothed plate 92, the support roller 5 can be effectively prevented from moving along the shaft tube 6 into the housing 21, that is, the worn area of the support roller 5 will not return to the gap 23 area, thereby further ensuring that the diamond wire 4 can always be in contact with the unworn support roller 5, thereby ensuring that the tension of the diamond wire 4 remains appropriate except for its own relaxation, effectively avoiding the diamond wire 4 in a tight state, and further reducing the risk of breaking of the diamond wire 4.

[0027] As shown in Figure 8 and Figure 9 , a gas storage cavity 51 is formed in the support roller 5, one end of the shaft tube 6 is located in the gas storage cavity 51, the shaft tube 6 is provided with a piston 61 at this end, the piston 61 is attached to the inner wall of the gas storage cavity 51, a through hole 62 is formed on the outer periphery of the shaft tube 6, the through hole 62 is in communication with the hollow part inside the shaft tube 6, the through hole 62 is located in the gas storage cavity 51, a gas collecting assembly 10 is installed in the fixed cylinder 24, and one end of the shaft tube 6 installed on the housing 21 is connected with the gas collecting assembly 10.

[0028] The gas collecting assembly 10 comprises: Air bag 101, the air bag 101 is installed in the fixed cylinder 24; Main gas pipe 102, the main gas pipe 102 is connected to the air bag 101; Connecting pipe 103, a plurality of connecting pipes 103 are connected to the main gas pipe 102, and the plurality of connecting pipes 103 are in communication with the ends of the plurality of shaft tubes 6; The guide assembly 8 further comprises a fixed sleeve 81, the fixed sleeve 81 is installed outside the fixed cylinder 24 through a mounting plate 84, the guide plate 82 is movably sleeved in the fixed sleeve 81, and a guide pipe is connected between the air bag 101 and the fixed sleeve 81. A one-way valve is installed on each of the connecting pipe 103 and the guide pipe, and a pressure relief valve is arranged at the connection part of the air bag 101 and the guide pipe.

[0029] A locking assembly two 83 is installed between the guide plate 82 and the fixed sleeve 81, and the structure of the locking assembly two 83 is the same as that of the locking assembly one 9.

[0030] It should be noted that the guide plate 82 can only move the supporting roller 5 once, and if all the supporting rollers 5 are moved once and all are worn out, switching the supporting roller 5 in contact with the diamond wire 4 cannot guarantee that the tension of the diamond wire 4 is in a suitable state.

[0031] In actual application, when the supporting roller 5 moves outward, the piston 61 will squeeze part of the gas in the gas storage cavity 51 into the shaft pipe 6 through the through hole 62, and finally into the air bag 101 through the connecting pipe 103, so that the air bag 101 expands. When all the supporting rollers 5 are moved once, all the gas storage cavities 51 in the supporting rollers 5 will charge the same amount of gas into the air bag 101. At this time, the limit of the pressure relief valve will be reached, and the excess gas in the air bag 101 will be filled into the fixed sleeve 81 through the guide pipe through the pressure relief valve. The gas entering the fixed sleeve 81 will squeeze the guide plate 82, so that the guide plate 82 moves outward. When the supporting roller 5 moves to the guide plate 82 again, the supporting plate 52 will move along the circular surface of the guide plate 82 again, thereby driving the supporting roller 5 to move outward again. In this way, the worn area of the supporting roller 5 is away from the gap 23, and the unworn area of the supporting roller 5 moves to the gap 23. This can further improve the service life of the supporting roller 5, and further ensure that the diamond wire 4 can always be in contact with the unworn supporting roller 5, so as to ensure that the tension of the diamond wire 4 is always in a suitable state except for its own relaxation, effectively avoiding the diamond wire 4 in a tight state, and further reducing the risk of breaking of the diamond wire 4. After the guide plate 82 moves outward, the locking assembly two 83 can effectively prevent the guide plate 82 from retracting, thereby ensuring that the supporting roller 5 can move outward again.

[0032] A cutting method for a diamond wire cutting device for polycrystalline silicon, the method is applied to the diamond wire cutting device for polycrystalline silicon as described above, and the method comprises the following steps: Step S1: First, install the polycrystalline silicon on the fixed seat 14, and then wind the diamond wire 4 around the driving roller 12, the plurality of tensioning assemblies 13 and the plurality of winding rollers 2, and complete the preparation work; Step S2: Start the driving member two 11 to drive the driving roller 12 to drive the diamond wire 4 to cut the polycrystalline silicon, and drive the polycrystalline silicon to move upward through the fixed seat 14 to increase the cutting depth; Step S3: When the supporting roller 5 is worn, start the driving member one 3 to rotate the housing 21, so that the worn supporting roller 5 is away from the diamond wire 4, and the unworn supporting roller 5 is in contact with the diamond wire 4. When the worn supporting roller 5 moves to the guide plate 82, it moves outward, the worn part of the supporting roller 5 is away from the gap 23, and the unworn part of the supporting roller 5 moves to the gap 23; Step S4: Complete a cutting when the diamond wire 4 passes through the polycrystalline silicon.

[0033] The above shows and describes the basic principles, main features and advantages of the present application. Those skilled in the art should understand that the present application is not limited to the above-mentioned embodiments, and the above-mentioned embodiments and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application.

Claims

1. A diamond wire cutting device for polysilicon, comprising a workbench (1), a second driving member (11), a driving roller (12), a tensioning assembly (13) and a fixing seat (14), characterized in that: The device further comprises: Winding rollers (2), wherein a plurality of winding rollers (2) are mounted on the workbench (1), the winding rollers (2) comprising a fixed cylinder (24), the fixed cylinder (24) being fixedly mounted on the workbench (1), a housing (21) being rotatably mounted on the fixed cylinder (24), a connecting rod (221) being disposed within the housing (21), a limiting plate (22) being disposed at the other end of the connecting rod (221), the limiting plate (22) being located outside the housing (21), and a gap (23) being formed between the limiting plate (22) and the housing (21); Support roller (5), a plurality of shaft tubes (6) are provided in an annular array in the housing (21), the support roller (5) is movably sleeved on the shaft tube (6), one end of the support roller (5) passes through the limit plate (22), and the diamond wire (4) abuts against the surfaces of the plurality of support rollers (5) when passing around the winding roller (2), and the diamond wire (4) is located in the gap (23); Driving member one (3), a plurality of driving members one (3) are installed on the workbench (1), and the driving member one (3) is connected to the housing (21) through a transmission member (31).

2. The diamond wire cutting device for polysilicon according to claim 1, characterized in that: A detection assembly (7) is installed on the periphery of the connecting rod (221), and the detection assembly (7) comprises: A fixing ring (71), wherein the fixing ring (71) is fixed to the periphery of the connecting rod (221); Contact rods (72), a plurality of contact rods (72) are movably mounted on the periphery of the fixed ring (71), the plurality of contact rods (72) are arranged in a ring array, the number of the contact rods (72) is the same as the number of the support rollers (5), each contact rod (72) abuts against the periphery of a group of support rollers (5), an elastic member (73) is connected between the contact rods (72) and the inner wall of the fixed ring (71), and the contact rods (72) are located in the gap (23); Sensors (74), a plurality of sensors (74) are mounted on the inner wall of the inner ring of the fixed ring (71), and the sensors (74) are connected to the driving member 1 (3) for signal.

3. The diamond wire cutting device for polysilicon according to claim 2, characterized in that: A guide assembly (8) is installed outside the fixed cylinder (24), and the guide assembly (8) includes a guide plate (82). A support plate (52) is rotatably installed on the support roller (5). A plurality of guide rods (222) are provided on the limit plate (22), and one end of the support plate (52) is sleeved on the outer periphery of the guide rod (222). The end of the guide plate (82) is arc-shaped, and the distance between the end of the guide plate (82) and the limit plate (22) is greater than the distance between the support plate (52) and the limit plate (22).

4. The diamond wire cutting device for polysilicon according to claim 3, characterized in that: A locking assembly (9) is installed between the support roller (5) and the shaft tube (6), and the locking assembly (9) includes: A U-shaped frame (91), wherein one end of the support roller (5) is fixedly mounted with a plurality of U-shaped frames (91); A tooth plate (92), wherein the tooth plate (92) is provided in the U-shaped frame (91); A swivel (93), the outer periphery of the shaft tube (6) is rotatably mounted with a swivel (93); Ratchet (94), a plurality of ratchet teeth (94) are rotatably mounted on the outer periphery of the rotating ring (93), the ratchet teeth (94) are clamped on the tooth plate (92), and a second elastic member (95) is connected between the ratchet teeth (94) and the rotating ring (93).

5. The diamond wire cutting device for polysilicon according to claim 3, characterized in that: An air storage chamber (51) is provided in the support roller (5), one end of the shaft tube (6) is located in the air storage chamber (51), a piston (61) is provided at this end of the shaft tube (6), the piston (61) is in contact with the inner wall of the air storage chamber (51), a through hole (62) is provided on the periphery of the shaft tube (6), the through hole (62) is communicated with the hollow portion inside the shaft tube (6), the through hole (62) is located in the air storage chamber (51), a gas collecting assembly (10) is installed in the fixing cylinder (24), and one end of the shaft tube (6) installed on the outer shell (21) is connected to the gas collecting assembly (10).

6. The diamond wire cutting equipment for polycrystalline silicon according to claim 5, characterized in that The gas collecting assembly (10) comprises: An airbag (101), the airbag (101) being installed in the fixing cylinder (24); A main airway (102), the airbag (101) being connected to the main airway (102); Connecting pipes (103), wherein a plurality of connecting pipes (103) are connected to the main air pipe (102), and the plurality of connecting pipes (103) are in communication with the ends of the plurality of shaft pipes (6); The guide assembly (8) further includes a fixed sleeve (81), the fixed sleeve (81) being mounted on the outside of the fixed cylinder (24) via a mounting plate (84), the guide plate (82) being movably sleeved in the fixed sleeve (81), and a catheter being connected between the airbag (101) and the fixed sleeve (81); One-way valves are installed on both the connecting pipe (103) and the catheter, and a pressure relief valve is provided at the connection portion between the air bag (101) and the catheter.

7. The diamond wire cutting device for polysilicon according to claim 6, characterized in that: A locking assembly 2 (83) is installed between the guide plate (82) and the fixing sleeve (81), and the structure of the locking assembly 2 (83) is the same as that of the locking assembly 1 (9).

8. A cutting method for a diamond wire cutting device for polysilicon, characterized in that: The method is applied to the diamond wire cutting equipment for polysilicon according to any one of claims 1 to 7, and the method comprises the following steps: Step S1: first, polysilicon is mounted on a fixing seat (14), and then the diamond wire (4) is wound around a driving roller (12), a plurality of tensioning components (13) and a plurality of winding rollers (2), completing the preparation work; Step S2: starting the second driving member (11) to make the driving roller (12) drive the diamond wire (4) to move along the line, so that the diamond wire (4) cuts the polysilicon, and drives the polysilicon to move upward through the fixing seat (14) to increase the cutting depth; Step S3: When the support roller (5) is worn, the driving member 1 (3) is started to rotate the housing (21), so that the worn support roller (5) is away from the diamond wire (4), and the unworn support roller (5) is in contact with the diamond wire (4); when the worn support roller (5) moves to the guide plate (82), it moves outward, and the worn portion of the support roller (5) is away from the gap (23), and the unworn portion of the support roller (5) moves to the gap (23); Step S4: When the diamond wire (4) passes through the polysilicon, a cutting is completed.

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