High modulus glass

Abstract

Provided is a high-modulus glass having a high Young's modulus and a high light transmittance. The high-modulus glass comprises the following components in percentage by weight: 34 to 46 percent of SiO2; 2 to 10 percent of B2O3; 20 to 32 percent of Al2O3; 5 to 15 percent of ZnO; 5 to 15 percent of MgO; 1% to 10% of Y2O3; and 0.5-8% of TiO2, wherein the ratio of Y2O3 / (B2O3 + ZnO) is 0.1-1.2. Through reasonable component design, the glass obtained by the invention has higher Young modulus and light transmittance, and is suitable for the fields of semiconductor manufacturing and the like.

Description

TECHNICAL FIELD

[0001] The present application relates to a glass, in particular to a glass with high Young's modulus and high light transmittance. BACKGROUND

[0002] With the development of the times, glass has been widely used in various fields, such as the field of building, the field of imaging, the field of medicine, etc. Glass has good mechanical stability, good chemical stability, light transmittance, and can be obtained in large size at low cost, which is a material with great development potential for semiconductor chip packaging carriers.

[0003] The glass as a carrier is often prepared into a large size glass sheet, and the larger the Young's modulus of the glass, the less likely it is to deform in the application process. In particular, the larger the Young's modulus of the glass, the less likely it is to warp and break in the stress link of the packaging process, thereby improving the yield. When glass is applied to the field of semiconductor packaging, ultraviolet laser stripping technology is usually used. Ultraviolet laser stripping technology has the advantages of high yield and low cost compared with traditional stripping technology, but ultraviolet laser stripping technology requires the carrier glass to have high transmittance in the ultraviolet light band. The higher the light transmittance of the glass in the ultraviolet light band, the higher the efficiency of debonding in the packaging process, and the less likely the packaging wafer is to warp. At the same time, if the visible light transmittance of the glass is high, the optical detection equipment in the packaging process can also achieve more efficient and more accurate detection. Therefore, developing glass with high Young's modulus and light transmittance is of great significance to the field of semiconductor manufacturing. SUMMARY

[0004] Based on the above reasons, the technical problem to be solved by the present application is to provide a high modulus glass with high Young's modulus and light transmittance.

[0005] The technical solution adopted by the present application to solve the technical problem is:

[0006] (1) High modulus glass, its components are expressed in weight percentage, containing: SiO2: 34-46%; B2O3: 2-10%; Al2O3: 20-32%; ZnO: 5-15%; MgO: 5-15%; Y2O3: 1-10%; TiO2: 0.5-8%, wherein Y2O3 / (B2O3+ZnO) is 0.1-1.2.

[0007] (2) The high modulus glass according to (1), further comprising, in terms of weight percentage: ZrO2: 0 to 4%; and / or BaO: 0 to 4%; and / or SrO: 0 to 4%; and / or CaO: 0 to 4%; and / or La2O3: 0 to 5%; and / or Gd2O3: 0 to 4%; and / or Nb2O5: 0 to 3%; and / or WO3: 0 to 3%; and / or Ta2O5: 0 to 3%; and / or GeO2: 0 to 3%; and / or Rn2O: 0 to 3%; and / or fining agent: 0 to 2%, the Rn2O being one or more of Li2O, Na2O, K2O, and the fining agent being one or more of Sb2O3, SnO2, CeO2.

[0008] (3) A high modulus glass comprising, in terms of weight percentage, SiO2, B2O3, Al2O3, ZnO, MgO, Y2O3, and TiO2, wherein Y2O3 / (B2O3+ZnO) is 0.1 to 1.2, and the Young's modulus E of the high modulus glass is 91 GPa or more, the light transmittance T550 of 550 nm is 85.0% or more, and the light transmittance T355 of 355 nm is 80.0% or more. 550nm 355nm

[0009] (4) The high modulus glass according to (3), comprising, in terms of weight percentage: SiO2: 34 to 46%; and / or B2O3: 2 to 10%; and / or Al2O3: 20 to 32%; and / or ZnO: 5 to 15%; and / or MgO: 5 to 15%; and / or Y2O3: 1 to 10%; and / or TiO2: 0.5 to 8%; and / or ZrO2: 0 to 4%; and / or BaO: 0 to 4%; and / or SrO: 0 to 4%; and / or CaO: 0 to 4%; and / or La2O3: 0 to 5%; and / or Gd2O3: 0 to 4%; and / or Nb2O5: 0 to 3%; and / or WO3: 0 to 3%; and / or Ta2O5: 0 to 3%; and / or GeO2: 0 to 3%; and / or Rn2O: 0 to 3%; and / or fining agent: 0 to 2%, the Rn2O being one or more of Li2O, Na2O, K2O, and the fining agent being one or more of Sb2O3, SnO2, CeO2.

[0010] (5) The high modulus glass according to any one of (1) to (4), comprising, in terms of weight percentage, one or more of the following nine cases:

[0011] 1) MgO / Y2O3 is 0.7 to 8.0, preferably MgO / Y2O3 is 1.0 to 6.0, more preferably MgO / Y2O3 is 1.2 to 4.0, further preferably MgO / Y2O3 is 1.3 to 3.0; ​​

[0012] 2) Al203 / Si02is 0.46 to 0.85, preferably Al203 / Si02is 0.50 to 0.80, more preferably Al203 / Si02is 0.53 to 0.73;

[0013] 3) Al203 / Y203is 2.5 to 10.0, preferably Al203 / Y203is 3.0 to 8.0, more preferably Al203 / Y203is 3.5 to 7.0, further preferably Al203 / Y203is 4.0 to 6.0;

[0014] 4) MgO / B203is 0.7 to 6.0, preferably MgO / B203is 1.0 to 5.0, more preferably MgO / B203is 1.0 to 3.5, further preferably MgO / B203is 1.2 to 2.5;

[0015] 5) MgO / (Zr02+Ti02) is 0.5 to 10.0, preferably MgO / (Zr02+Ti02) is 1.0 to 8.0, more preferably MgO / (Zr02+Ti02) is 1.5 to 5.0, further preferably MgO / (Zr02+Ti02) is 1.5 to 3.5;

[0016] 6) Y203 / (B203+ZnO) is 0.1 to 1.0, preferably Y203 / (B203+ZnO) is 0.15 to 0.8, more preferably Y203 / (B203+ZnO) is 0.2 to 0.6;

[0017] 7) Ti02 / ZnO is 0.1 to 1.5, preferably Ti02 / ZnO is 0.15 to 1.0, more preferably Ti02 / ZnO is 0.2 to 0.8, further preferably Ti02 / ZnO is 0.25 to 0.6;

[0018] 8) CaO / ZnO is 0.6 or less, preferably CaO / ZnO is 0.5 or less, more preferably CaO / ZnO is 0.3 or less, further preferably CaO / ZnO is 0.1 or less;

[0019] 9) Rn20 / Al203is 0.13 or less, preferably Rn20 / Al203is 0.1 or less, more preferably Rn20 / Al203is 0.08 or less, further preferably Rn20 / Al203is 0.05 or less, the Rn20 being one or more of Li20, Na20, K20.

[0020] (6) The high modulus glass according to any one of (1) to (4), wherein the components are expressed in weight percentage, and wherein: SiO2: 36 to 45%, preferably SiO2: 37 to 43%; and / or B2O3: 3 to 9%, preferably B2O3: 4 to 8%; and / or Al2O3: 21 to 30%, preferably Al2O3: 23 to 28%; and / or ZrO2: 0 to 3%, preferably ZrO2: 0 to 2%; and / or TiO2: 1 to 7%, preferably TiO2: 2 to 6%; and / or ZnO: 6 to 13%, preferably ZnO: 8 to 12%; and / or BaO: 0 to 2%, preferably BaO: 0 to 1%; and / or SrO: 0 to 2%, preferably SrO: 0 to 1%; and / or CaO: 0 to 2%, preferably CaO: 0 to 1%; and / or MgO: 6 to 13%, preferably MgO: 8 to 12%; and / or La2O3: 0 to 3%, preferably La2O3: 0 to 2%; and / or Y2O3: 2 to 8%, preferably Y2O3: 3 to 7%; and / or Gd2O3: 0 to 3%, preferably Gd2O3: 0 to 1%; and / or Nb2O5: 0 to 2%, preferably Nb2O5: 0 to 1%; and / or WO3: 0 to 2%, preferably WO3: 0 to 1%; and / or Ta2O5: 0 to 2%, preferably Ta2O5: 0 to 1%; and / or GeO2: 0 to 2%, preferably GeO2: 0 to 1%; and / or Rn2O: 0 to 2%, preferably Rn2O: 0 to 1%, the Rn2O being one or more of Li2O, Na2O, K2O; and / or a fining agent: 0 to 1%, preferably a fining agent: 0 to 0.5%, the fining agent being one or more of Sb2O3, SnO2, CeO2.

[0021] (7) The high modulus glass according to any one of (1) to (4), wherein the components do not contain BaO; and / or do not contain CaO; and / or do not contain SrO; and / or do not contain Gd2O3; and / or do not contain Nb2O5; and / or do not contain WO3; and / or do not contain Ta2O5; and / or do not contain GeO2; and / or do not contain Li2O; and / or do not contain Na2O; and / or do not contain K2O; and / or do not contain P2O5; and / or do not contain Fe2O3; and / or do not contain F.

[0022] (8) The high modulus glass according to any one of (1) to (4), wherein the coefficient of thermal expansion a of the high modulus glass is 20 / 300℃ 30 x 10 -7 / K to 45 x 10 -7 / K, preferably 32 x 10 -7 / K to 42 x 10 -7 / K, more preferably 35 x 10 -7 / K to 40 x 10 -7 / K; and / or the acid resistance stability DA is 3 or more, preferably 2 or more; and / or water resistance stability D W is 3 or more, preferably 2 or more; and / or refractive index n d is 1.56 to 1.61, preferably 1.57 to 1.60, more preferably 1.58 to 1.60; and / or Abbe number v d is 49 to 55, preferably 50 to 54, more preferably 51 to 53.5; and / or Young's modulus E is 91 GPa or more, preferably 93 GPa or more, more preferably 95 GPa or more; and / or transition temperature T g is 680°C or more, preferably 700°C or more, more preferably 710°C or more, further preferably 710 to 735°C; and / or density p is 3.00 g / cm 3 or less, preferably 2.90 g / cm 3 or less, more preferably 2.85 g / cm 3 or less; and / or light transmittance T 550nm at 550 nm is 85.0% or more, preferably 87.0% or more, more preferably 89.0% or more; and / or light transmittance T 355nm at 355 nm is 80.0% or more, preferably 82.0% or more, more preferably 84.0% or more; and / or Knoop hardness H K is 520 x 10 7 Pa or more, preferably 540 x 10 7 Pa or more, more preferably 560 x 10 7 Pa or more.

[0023] (9) An encapsulation carrier made of the high modulus glass according to any one of (1) to (8).

[0024] (10) A glass element made of the high modulus glass according to any one of (1) to (8).

[0025] (11) An apparatus containing the high modulus glass according to any one of (1) to (8), or containing the glass element according to (10).

[0026] The present application has the following advantageous effects: through rational component design, the glass obtained by the present application has a high Young's modulus and light transmittance, and is suitable for use in the field of semiconductor manufacturing and the like. DETAILED DESCRIPTION

[0027] Hereinafter, the embodiments of the high modulus glass of the present application will be described in detail, but the present application is not limited to the following embodiments, and can be implemented by making appropriate changes within the scope of the objects of the present application. Also, as for the repeatedly described parts, although there are appropriately omitted descriptions, the gist of the application will not be limited thereby. The "high modulus" described in the present specification means having a higher Young's modulus, and the high modulus glass of the present application will be sometimes referred to simply as glass in the present specification.

[0028] [GLASS]

[0029] Hereinafter, the ranges of the components of the high modulus glass of the present application will be described. In the present application, if not otherwise specified, the content, the total content, and the overall content of each component are all expressed in terms of weight percent (wt%), i.e., the content, the total content, and the overall content of each component are expressed in terms of weight percent with respect to the total amount of the glass material converted into an oxide composition. Here, the "converted into an oxide composition" means that, in the case where the oxides, complex salts, and hydroxides, etc. used as raw materials for the components of the high modulus glass of the present application are decomposed and converted into oxides upon melting, the total amount of the oxides is taken as 100%.

[0030] Unless otherwise indicated in specific cases, the numerical ranges set forth in the present application include the upper and lower limit values, "and / or" includes the end point values, and all integers and fractions within the range, and are not limited to the specific values listed in the defined range. As used herein, "and / or" is inclusive, e.g., "A and / or B" means only A, or only B, or both A and B.

[0031] <Necessary components and optional components>

[0032] SiO2is a main component constituting the glass framework, and has an important influence on the high temperature viscosity and the coefficient of thermal expansion of the glass. If the content of SiO2is less than 34%, the coefficient of thermal expansion of the glass increases, and it is difficult to achieve the desired coefficient of thermal expansion of the present application, and the transition temperature and the devitrification resistance decrease. If the content of SiO2exceeds 46%, the high temperature viscosity of the glass becomes large, and it is not good for obtaining a large-sized high-quality glass. Therefore, in the present application, the content of SiO2is 34 to 46%, preferably 36 to 45%, and more preferably 37 to 43%.

[0033] Al2O3can increase the Young's modulus of the glass, and is advantageous for improving the warpage and breakage resistance of the glass, and can decrease the coefficient of thermal expansion of the glass. In the present application, the above effects are obtained by containing 20% or more of Al2O3. However, if the content of Al2O3is too high, the melting property of the glass decreases, and the anti-crystallization property decreases. Therefore, in the present application, the content of Al2O3is 20 to 32%, preferably 21 to 30%, and more preferably 23 to 28%.

[0034] In some embodiments, the ratio between the content of Al2O3 and the content of SiO2, Al2O3 / SiO2, is controlled in the range of 0.46 to 0.85, so as to increase the Young's modulus of the glass while obtaining a suitable coefficient of thermal expansion. Therefore, it is preferred that Al2O3 / SiO2 is in the range of 0.46 to 0.85, more preferably Al2O3 / SiO2 is in the range of 0.50 to 0.80, and further preferably Al2O3 / SiO2 is in the range of 0.53 to 0.73.

[0035] B2O3 can improve the melting property and devitrification resistance of the glass. In the present application, B2O3 is contained in an amount of 2% or more to obtain the above-mentioned effects, but if the content of B2O3 exceeds 10%, it is difficult to obtain a desired coefficient of thermal expansion of the glass. Therefore, the content of B2O3 in the present application is in the range of 2 to 10%, preferably in the range of 3 to 9%, and more preferably in the range of 4 to 8%.

[0036] ZnO can improve the melting property of the glass and adjust the high-temperature viscosity of the glass, but if the content of ZnO is too high, the transition temperature of the glass decreases, the glass is not suitable for use in a high-temperature environment, and the chemical stability of the glass decreases. Therefore, the content of ZnO is in the range of 5 to 15%, preferably in the range of 6 to 13%, and more preferably in the range of 8 to 12%.

[0037] MgO can improve the light transmittance of the glass and decrease the density of the glass, but if the content of MgO is too high, the chemical stability of the glass decreases. Therefore, the content of MgO in the present application is in the range of 5 to 15%, preferably in the range of 6 to 13%, and more preferably in the range of 8 to 12%.

[0038] In some embodiments, the ratio between the content of MgO and the content of B2O3, MgO / B2O3, is controlled in the range of 0.7 to 6.0, so as to improve the acid resistance of the glass while obtaining a suitable coefficient of thermal expansion. Therefore, it is preferred that MgO / B2O3 is in the range of 0.7 to 6.0, more preferably MgO / B2O3 is in the range of 1.0 to 5.0, further preferably MgO / B2O3 is in the range of 1.0 to 3.5, and more further preferably MgO / B2O3 is in the range of 1.2 to 2.5.

[0039] CaO can improve the melting property of the glass, but if the content of CaO is too high, the anti-crystallization property of the glass decreases. Therefore, the content of CaO is in the range of 0 to 4%, preferably in the range of 0 to 2%, and more preferably in the range of 0 to 1%. In some embodiments, it is further preferred that CaO is not contained.

[0040] In some embodiments, the ratio between the content of CaO and the content of ZnO, CaO / ZnO, is controlled to be below 0.6, which can reduce the density of the glass while preventing the water resistance of the glass from deteriorating. Therefore, it is preferable that CaO / ZnO be below 0.6, more preferable that CaO / ZnO be below 0.5, further preferable that CaO / ZnO be below 0.3, and more further preferable that CaO / ZnO be below 0.1.

[0041] SrO can adjust the high-temperature viscosity and melting property of the glass, but if its content is too high, the chemical stability of the glass decreases. Therefore, the content of SrO is 0-4%, preferably 0-2%, and more preferably 0-1%. In some embodiments, it is further preferable that SrO not be contained.

[0042] BaO can increase the refractive index of the glass and adjust the high-temperature viscosity of the glass, but if its content is too high, the thermal expansion coefficient and the density of the glass increase. Therefore, the content of BaO in the present application is 0-4%, preferably 0-2%, and more preferably 0-1%. In some embodiments, it is further preferable that BaO not be contained.

[0043] TiO2 can increase the refractive index and dispersion of the glass and adjust the thermal expansion coefficient of the glass. But if the content of TiO2 exceeds 8%, the light transmittance of the glass rapidly decreases, making subsequent laser stripping difficult, and the thermal expansion coefficient of the glass is difficult to meet design requirements. Therefore, the content of TiO2 is 0.5-8%, preferably 1-7%, and more preferably 2-6%.

[0044] In some embodiments, the ratio between the content of TiO2 and the content of ZnO, TiO2 / ZnO, is controlled to be in the range of 0.1-1.5, which can increase the hardness of the glass while preventing the acid resistance of the glass from deteriorating. Therefore, it is preferable that TiO2 / ZnO be 0.1-1.5, more preferable that TiO2 / ZnO be 0.15-1.0, further preferable that TiO2 / ZnO be 0.2-0.8, and more further preferable that TiO2 / ZnO be 0.25-0.6.

[0045] ZrO2 can increase the refractive index and chemical stability of the glass, reduce the thermal expansion coefficient of the glass, and optimize the high-temperature viscosity, but when the content of ZrO2 is too high, the resistance to devitrification of the glass decreases and the ultraviolet light transmittance decreases. Therefore, the content of ZrO2 is 0-4%, preferably 0-3%, and more preferably 0-2%.

[0046] In some embodiments, the ratio between the content of MgO and the total content of ZrO2 and TiO2, MgO / (ZrO2+TiO2), is controlled in the range of 0.5 to 10.0, which can reduce the density of the glass while improving the water resistance of the glass. Therefore, it is preferred that MgO / (ZrO2+TiO2) is in the range of 0.5 to 10.0, more preferably, MgO / (ZrO2+TiO2) is in the range of 1.0 to 8.0, further preferably, MgO / (ZrO2+TiO2) is in the range of 1.5 to 5.0, and more further preferably, MgO / (ZrO2+TiO2) is in the range of 1.5 to 3.5.

[0047] La2O3 can increase the refractive index and Abbe number of the glass, and improve the chemical stability and devitrification resistance of the glass. However, if the content of La2O3 is too high, the ultraviolet light transmittance of the glass will decrease. Therefore, the content of La2O3 is in the range of 0 to 5%, preferably in the range of 0 to 3%, and more preferably in the range of 0 to 2%.

[0048] Y2O3 can increase the refractive index and devitrification resistance of the glass, and increase the Young's modulus of the glass. However, if the content of Y2O3 is too high, the chemical stability and ultraviolet light transmittance of the glass will decrease. Therefore, the content of Y2O3 is in the range of 1 to 10%, preferably in the range of 2 to 8%, and more preferably in the range of 3 to 7%.

[0049] In some embodiments, the ratio between the content of Al2O3 and the content of Y2O3, Al2O3 / Y2O3, is controlled in the range of 2.5 to 10.0, which can improve the hardness of the glass while preventing the transition temperature of the glass from deteriorating. Therefore, it is preferred that Al2O3 / Y2O3 is in the range of 2.5 to 10.0, more preferably, Al2O3 / Y2O3 is in the range of 3.0 to 8.0, further preferably, Al2O3 / Y2O3 is in the range of 3.5 to 7.0, and more further preferably, Al2O3 / Y2O3 is in the range of 4.0 to 6.0.

[0050] In some embodiments, the ratio between the content of MgO and the content of Y2O3, MgO / Y2O3, is controlled in the range of 0.7 to 8.0, which is beneficial to improve the light transmittance of the glass and reduce the density of the glass. Therefore, it is preferred that MgO / Y2O3 is in the range of 0.7 to 8.0, more preferably, MgO / Y2O3 is in the range of 1.0 to 6.0, further preferably, MgO / Y2O3 is in the range of 1.2 to 4.0, and more further preferably, MgO / Y2O3 is in the range of 1.3 to 3.0.

[0051] In some embodiments, the ratio Y2O3 / (B2O3+ZnO) between the content of Y2O3 and the total content of B2O3 and ZnO (B2O3+ZnO) is controlled in the range of 0.1 to 1.2, which can improve the Young's modulus of the glass while preventing the light transmittance of the glass from deteriorating. Therefore, it is preferable that Y2O3 / (B2O3+ZnO) be 0.1 to 1.2, more preferable that Y2O3 / (B2O3+ZnO) be 0.1 to 1.0, further preferable that Y2O3 / (B2O3+ZnO) be 0.15 to 0.8, and more further preferable that Y2O3 / (B2O3+ZnO) be 0.2 to 0.6.

[0052] Gd2O3 can improve the refractive index and chemical stability of the glass, but if its content is too high, the devitrification resistance of the glass deteriorates and the density increases. Therefore, the content of Gd2O3 is 0 to 4%, preferably 0 to 3%, and more preferably 0 to 1%. In some embodiments, it is further preferable that Gd2O3 not be contained.

[0053] Nb2O5 is a high-refractive high-dispersive component, which can improve the refractive index and devitrification resistance of the glass and reduce the thermal expansion coefficient of the glass, but if its content is too high, the ultraviolet light transmittance of the glass decreases and the thermal expansion coefficient of the glass is too low. Therefore, the content of Nb2O5 is 0 to 3%, preferably 0 to 2%, and more preferably 0 to 1%. In some embodiments, it is further preferable that Nb2O5 not be contained.

[0054] WO3 is a high-refractive high-dispersive component, which can improve the refractive index and devitrification resistance of the glass, but if its content is too high, the visible light transmittance of the glass decreases. Therefore, the content of WO3 is 0 to 3%, preferably 0 to 2%, and more preferably 0 to 1%. In some embodiments, it is further preferable that WO3 not be contained.

[0055] Ta2O5 can improve the refractive index of the glass, but its high content can greatly increase the cost of the glass and deteriorate the melting performance of the glass and increase the density. Therefore, the content of Ta2O5 is 0 to 3%, preferably 0 to 2%, and more preferably 0 to 1%. In some embodiments, it is further preferable that Ta2O5 not be contained.

[0056] GeO2 can improve the refractive index and devitrification resistance of the glass, but its high content can deteriorate the chemical stability of the glass and its high content is not conducive to the control of the cost of the raw materials of the glass. Therefore, the content of GeO2 is 0 to 3%, preferably 0 to 2%, and more preferably 0 to 1%. In some embodiments, it is further preferable that GeO2 not be contained.

[0057] Rn2O (one or more of Li2O, Na2O, K2O) can lower the glass melting temperature and density, but when the content is high, the transition temperature of the glass is lowered. On the other hand, when the glass containing Rn2O is used as a carrier, alkali metal ions Li + , Na + , K + may enter the single crystal silicon substrate and contaminate the chip circuit. Therefore, the content of Rn2O in the present application is 0 to 3%, preferably 0 to 2%, and more preferably 0 to 1%. In some embodiments, it is further preferred that Li2O is not contained; and / or Na2O is not contained; and / or K2O is not contained.

[0058] In some embodiments, the ratio between the content of Rn2O and the content of Al2O3, Rn2O / Al2O3, is controlled to be 0.13 or less, which can make the glass have a good coefficient of thermal expansion while preventing the Young's modulus of the glass from deteriorating. Therefore, it is preferred that Rn2O / Al2O3 is 0.13 or less, more preferably Rn2O / Al2O3 is 0.1 or less, further preferably Rn2O / Al2O3 is 0.08 or less, and more further preferably Rn2O / Al2O3 is 0.05 or less.

[0059] In the present application, one or more components of 0 to 2% of Sb2O3, SnO2, CeO2 are contained as fining agents to improve the fining effect of the glass. It is preferred that the content of the fining agent is 0 to 1%, and more preferably 0 to 0.5%.

[0060] <Components not to be contained>

[0061] P2O5 can easily generate microsegregation in the glass, which scatters a portion of short wavelengths and makes it difficult to achieve the designed transmittance. Therefore, in some embodiments, it is preferred that P2O5 is not contained.

[0062] Fe2O3 can cause the glass to be colored, which is not conducive to achieving excellent light transmittance of the glass. Therefore, in some embodiments, it is preferred that Fe2O3 is not contained.

[0063] F (fluorine) can lower the transition temperature of the glass, and volatilize during the glass melting process, causing the glass components to become unstable and the quality of the glass to be lowered. Therefore, in some embodiments, it is preferred that F is not contained.

[0064] In the glass of the present application, even if the oxides of transition metals such as V, Cr, Mn, Fe, Co, Ni, Cu, Ag, and Mo are contained in a small amount, alone or in combination, the glass is colored, and absorption occurs at a specific wavelength in the visible region, thereby reducing the property of improving the visible light transmittance of the present application. Therefore, for a glass in which the transmittance at a wavelength in the visible region is required, it is preferable that the above components are not contained at all.

[0065] The oxides of Th, Cd, Tl, Os, Be, and Se have a tendency to be controlled in use as harmful chemical substances in recent years, and measures for environmental protection are necessary not only in the manufacturing process of the glass, but also in the processing process and disposal after productization. Therefore, in the case where the influence on the environment is taken into consideration, it is preferable that they are not contained at all except for inevitable admixing. Thus, the glass becomes practically free from substances that pollute the environment. Therefore, the glass of the present application can be manufactured, processed, and discarded without taking special measures for environmental countermeasures.

[0066] In order to realize environmental friendliness, the glass of the present application preferably does not contain As2O3and PbO.

[0067] The "does not contain" and "0%" described herein mean that the compound, molecule, or element is not intentionally added as a raw material to the glass of the present application, but some impurities or components that are not intentionally added can be contained in a small amount or a trace amount in the final glass as a raw material and / or equipment for producing the glass, and such a case is also within the scope of the present application.

[0068] Next, the properties of the high modulus glass of the present application will be described.

[0069] <Refractive index and Abbe number>

[0070] The refractive index (n d ) and Abbe number (v d ) of the glass were measured according to the method prescribed in the national standard "GB / T 7962.1-2010".

[0071]

[0072] In some embodiments, the lower limit of the refractive index (n d ) of the high modulus glass of the present application is 1.56, preferably 1.57, and more preferably 1.58. In some embodiments, the upper limit of the refractive index (n d ) of the high modulus glass of the present application is 1.61, preferably 1.60.

[0073] In some embodiments, the Abbe number (v d ​) is 49, preferably 50, and more preferably 51. In some embodiments, the Abbe number (ν d ) has an upper limit of 55, a preferred upper limit of 54, and a more preferred upper limit of 53.5.

[0074] <Coefficient of Thermal Expansion>

[0075] Thermal expansion coefficient of glass (α 20 / 300℃ ) Data was tested at 20-300°C according to the method specified in the national standard "GB / T 7962.16-2010." The thermal expansion coefficient of glass should not be too high or too low. It needs to be thermally matched with the encapsulation medium (such as resin material) to prevent excessive differences in thermal expansion coefficients, which can cause stress in the interface layer and lead to cracking.

[0076] In some embodiments, the thermal expansion coefficient (α 20 / 300℃ ) is 30×10 -7 / K~45×10 -7 / K, preferably 32×10 -7 / K~42×10 -7 / K, more preferably 35×10 -7 / K~40×10 -7 / K.

[0077] <Acid resistance stability>

[0078] Acid resistance of glass (D A (Powder method) Tested in accordance with the national standard GB / T 17129. Acid resistance stability is sometimes referred to as acid resistance or acid stability in this specification. When glass is used in a highly acidic environment, the better the acid resistance, the less likely it is to fail.

[0079] In some embodiments, the acid resistance stability (D A ) is 3 or more, preferably 2 or more.

[0080] <Water resistance stability>

[0081] Water resistance stability of glass (D W (Powder method) Tested in accordance with the national standard "GB / T 17129." Water resistance stability is sometimes referred to as water resistance or water stability in this specification. The better the water resistance of the glass, the less susceptible it is to water erosion during use. In particular, glass with excellent water resistance is more susceptible to water erosion during the packaging process. Poor water resistance can, at best, reduce the glass's transmittance and debonding efficiency, and in severe cases, lead to carrier board cracking and failure.

[0082] In some embodiments, the high modulus glass of the present application has a water resistance stability (D W ) of Class 3 or higher, preferably Class 2 or higher.

[0083] <Young's modulus>

[0084] The Young's modulus (E) of the glass is calculated by measuring the longitudinal wave velocity and the transverse wave velocity of the glass using ultrasonic waves, and then applying the following formula.

[0085] The following formula is applied to calculate:

[0086]

[0087] Wherein, G = V S 2 ρ

[0088] In the formula:

[0089] E is the Young's modulus, Pa;

[0090] G is the shear modulus, Pa;

[0091] V T is the longitudinal wave velocity, m / s;

[0092] V S is the transverse wave velocity, m / s;

[0093] ρ is the density of the glass, g / cm 3 .

[0094] The greater the Young's modulus of the glass, the less likely the glass is to deform during application. In particular, the greater the Young's modulus of the glass, the less likely the stress link in the packaging process is to warp and break.

[0095] In some embodiments, the high modulus glass of the present application has a Young's modulus (E) of 91 GPa or higher, preferably 93 GPa or higher, and more preferably 95 GPa or higher.

[0096] <Transition temperature>

[0097] The transition temperature (T g ) of the glass is tested according to the method specified in the national standard GB / T 7962.16-2010.

[0098] If the transition temperature of the glass is low, the heat resistance of the glass decreases, and softening deformation easily occurs during high-temperature processing. If the transition temperature of the glass is too high, it will cause design difficulties in the heat resistance of precision annealing equipment, resulting in a decrease in the reliability of the precision annealing equipment. In particular, when large-diameter glass blanks are precision annealed, they need to be kept at a temperature near the transition temperature for a long time. If the transition temperature is too high, the reliability of the precision annealing equipment will be greatly reduced.

[0099] In some embodiments, the high modulus glass of the present application has a transition temperature (T g ) of 680°C or greater, preferably 700°C or greater, more preferably 710°C or greater, and even more preferably 710-735°C.

[0100] <density>

[0101] The density (p) of the glass is tested according to the method specified in the national standard GB / T 7962.20-2010. The lower the density of the glass, the more conducive to the lightweight of the application terminal. In particular, the lower the density of the glass, the lower the weight that the support equipment in the packaging process bears, and the higher the precision and efficiency can be achieved.

[0102] In some embodiments, the high modulus glass of the present application has a density (p) of 3.00 g / cm 3 or less, preferably 2.90 g / cm 3 or less, and more preferably 2.85 g / cm 3 or less.

[0103] <light transmittance>

[0104] The light transmittance of the glass is tested according to the following method: the glass sample to be tested is processed to a certain thickness and the opposite surfaces are polished to be parallel, and the method specified in the national standard GB / T 7962.12-2010 is used for testing. In the present application, the glass is processed to a thickness of 1±0.1 mm, and the light transmittance (T 550nm ) at 550 nm and the light transmittance (T 355nm ) at 355 nm are tested. The higher the light transmittance of the glass at 550 nm, the higher the efficiency and precision of the optical detection equipment in the packaging process; the higher the light transmittance of the glass at 355 nm, the higher the efficiency of the debonding in the packaging process, and the smaller the risk of warping of the packaging wafer.

[0105] In some embodiments, the high modulus glass of the present application has a light transmittance (T 550nm ) at 550 nm of 85.0% or greater, preferably 87.0% or greater, and more preferably 89.0% or greater.

[0106] In some embodiments, the high modulus glass of the present application has a light transmittance (T 355nm ) at 355 nm of 80.0% or greater, preferably 82.0% or greater, and more preferably 84.0% or greater.

[0107] <Knoop hardness>

[0108] The Knoop hardness (H K) according to the test method stipulated in the national standard "GB / T 7962.18-2010".

[0109] In some embodiments, the high modulus glass of the present application has a Knoop hardness (H K ) of 520 x 10 7 Pa or more, preferably 540 x 10 7 Pa or more, and more preferably 560 x 10 7 Pa or more.

[0110] The high modulus glass of the present application, due to its superior properties described above, can be used to manufacture packaging carriers (substrate materials) for semiconductor processes.

[0111] The high modulus glass of the present application can be used to manufacture various glass elements, and can provide various lenses, prisms and the like glass elements with high optical value. As examples of lenses, various lenses such as meniscus lenses with spherical or aspherical lens surfaces, convex meniscus lenses, lenticular lenses, concave meniscus lenses, plano-convex lenses, and plano-concave lenses can be cited.

[0112] The high modulus glass of the present application, and the glass elements can be used to manufacture various devices (devices described in the present application include instruments, apparatuses and the like), such as imaging devices, sensors, microscopes, medical technology, digital projection, communication, optical communication technology / information transmission, optics / illumination in the automotive field, photolithography technology, excimer lasers, wafers, computer chips and integrated circuits and electronic devices including such circuits and chips, or for video recording devices and apparatuses used in the field of vehicle-mounted devices, surveillance security devices.

[0113] [Manufacturing method]

[0114] The manufacturing method of the high modulus glass of the present application is as follows: the high modulus glass of the present application uses carbonates, nitrates, sulfates, hydroxides, oxides, fluorides and the like as raw materials, and after batching according to conventional methods, the prepared batch is put into a melting furnace at 1300-1500°C for melting, and after refining, stirring and homogenization, a homogeneous molten glass without bubbles and undissolved substances is obtained, which is cast in a mold and annealed to form. Those skilled in the art can appropriately select raw materials, process methods and process parameters according to actual needs.

[0115] [Examples]

[0116] In order to further clearly illustrate and describe the technical solutions of the present application, the following non-limiting examples are provided.

[0117] In this example, the high modulus glass with the composition shown in Tables 1-3 is obtained by the manufacturing method of the high modulus glass described above. In addition, the properties of each glass are determined by the test methods described in the present application, and the test results are shown in Tables 1-3.

[0118] Table 1.

[0119]

[0120]

[0121] Table 2.

[0122]

[0123]

[0124] Table 3.

[0125]

[0126]

Claims

1. High modulus glass, characterized in that: Its components, expressed in weight percentage, include: SiO2: 34-46%; B2O3: 2-10%; Al2O3: 20-32%; ZnO: 5-15%; MgO: 5-15%; Y2O3: 1-10%; TiO2: 0.5-8%, wherein Y2O3 / (B2O3+ZnO) is 0.1-1.

2.

2. The high modulus glass according to claim 1, wherein Its components, expressed in weight percentage, further contain: ZrO2: 0-4%; and / or BaO: 0-4%; and / or SrO: 0-4%; and / or CaO: 0-4%; and / or La2O3: 0-5%; and / or Gd2O3: 0-4%; and / or Nb2O5: 0-3%; and / or WO3: 0-3%; and / or Ta2O5: 0-3%; and / or GeO2: 0-3%; and / or Rn2O: 0-3%; and / or a clarifier: 0-2%, wherein the Rn2O is one or more of Li2O, Na2O, and K2O, and the clarifier is one or more of Sb2O3, SnO2, and CeO2.

3. High modulus glass, characterized in that: Its components include SiO2, B2O3, Al2O3, ZnO, MgO, Y2O3 and TiO2, and its components are expressed in weight percentage, wherein Y2O3 / (B2O3+ZnO) is 0.1-1.2, the Young's modulus E of the high modulus glass is above 91GPa, and the light transmittance T at 550nm is 550nm The light transmittance at 355 nm is 85.0% or more. 355nm It is more than 80.0%.

4. The high modulus glass according to claim 3, characterized in that The composition is expressed in weight percentage and contains: SiO2: 34-46%; and / or B2O3: 2-10%; and / or Al2O3: 20-32%; and / or ZnO: 5-15%; and / or MgO: 5-15%; and / or Y2O3: 1-10%; and / or TiO2: 0.5-8%; and / or ZrO2: 0-4%; and / or BaO: 0-4%; and / or SrO: 0-4%; and / or CaO: 0-4%; and / or La2O3: 0-5%; and / or Gd2O3: 0-4%; and / or Nb2O5: 0-3%; and / or WO3: 0-3%; and / or Ta2O5: 0-3%; and / or GeO2: 0-3%; and / or Rn2O: 0-3%; and / or clarifier: 0-2%, wherein the Rn2O is one or more of Li2O, Na2O, and K2O, and the clarifier is one or more of Sb2O3, SnO2, and CeO2.

5. The high modulus glass according to any one of claims 1 to 4, characterized in that: Its components are expressed in weight percentage and meet one or more of the following nine conditions: 1) MgO / Y2O3 is 0.7 to 8.0, preferably MgO / Y2O3 is 1.0 to 6.0, more preferably MgO / Y2O3 is 1.2 to 4.0, and further preferably MgO / Y2O3 is 1.3 to 3.0; 2) Al2O3 / SiO2 is 0.46 to 0.85, preferably Al2O3 / SiO2 is 0.50 to 0.80, and more preferably Al2O3 / SiO2 is 0.53 to 0.73; 3) Al2O3 / Y2O3 is 2.5 to 10.0, preferably Al2O3 / Y2O3 is 3.0 to 8.0, more preferably Al2O3 / Y2O3 is 3.5 to 7.0, and further preferably Al2O3 / Y2O3 is 4.0 to 6.0; 4) MgO / B2O3 is 0.7 to 6.0, preferably MgO / B2O3 is 1.0 to 5.0, more preferably MgO / B2O3 is 1.0 to 3.5, and further preferably MgO / B2O3 is 1.2 to 2.5; 5) MgO / (ZrO2+TiO2) is 0.5 to 10.0, preferably MgO / (ZrO2+TiO2) is 1.0 to 8.0, more preferably MgO / (ZrO2+TiO2) is 1.5 to 5.0, and further preferably MgO / (ZrO2+TiO2) is 1.5 to 3.5; 6) Y2O3 / (B2O3+ZnO) is 0.1 to 1.0, preferably Y2O3 / (B2O3+ZnO) is 0.15 to 0.8, and more preferably Y2O3 / (B2O3+ZnO) is 0.2 to 0.6; 7) TiO2 / ZnO is 0.1 to 1.5, preferably TiO2 / ZnO is 0.15 to 1.0, more preferably TiO2 / ZnO is 0.2 to 0.8, and further preferably TiO2 / ZnO is 0.25 to 0.6; 8) CaO / ZnO is 0.6 or less, preferably CaO / ZnO is 0.5 or less, more preferably CaO / ZnO is 0.3 or less, and further preferably CaO / ZnO is 0.1 or less; 9) Rn2O / Al2O3 is less than 0.13, preferably Rn2O / Al2O3 is less than 0.1, more preferably Rn2O / Al2O3 is less than 0.08, and further preferably Rn2O / Al2O3 is less than 0.05, and the Rn2O is one or more of Li2O, Na2O, and K2O.

6. The high modulus glass according to any one of claims 1 to 4, characterized in that: The components are expressed in weight percentage, wherein: SiO2: 36-45%, preferably SiO2: 37-43%; and / or B2O3: 3-9%, preferably B2O3: 4-8%; and / or Al2O3: 21-30%, preferably Al2O3: 23-28%; and / or ZrO2: 0-3%, preferably ZrO2: 0-2%; and / or TiO2: 1-7%, preferably TiO2: 2-6%; and / or ZnO: 6-13%, preferably ZnO: 8-12%; and / or BaO: 0-2%, preferably BaO: 0-1%; and / or SrO: 0-2%, preferably SrO: 0-1%; and / or CaO: 0-2%, preferably CaO: 0-1%; and / or MgO: 6-13%, preferably MgO: 8-12%; and / or La2O3: 0 ~3%, preferably La2O3: 0~2%; and / or Y2O3: 2~8%, preferably Y2O3: 3~7%; and / or Gd2O3: 0~3%, preferably Gd2O3: 0~1%; and / or Nb2O5: 0~2%, preferably Nb2O5: 0~1%; and / or WO3: 0~2%, preferably WO3: 0~1%; and / or Ta2O5: 0~2%, preferably Ta2O5: 0~1%; and / or GeO2: 0~2%, preferably GeO2: 0~1%; and / or Rn2O: 0~2%, preferably Rn2O: 0~1%; and / or clarifier: 0~1%, preferably clarifier: 0~0.5%, wherein the Rn2O is one or more of Li2O, Na2O, and K2O, and the clarifier is one or more of Sb2O3, SnO2, and CeO2.

7. The high modulus glass according to any one of claims 1 to 4, characterized in that: Its components do not contain BaO; and / or do not contain CaO; and / or do not contain SrO; and / or do not contain Gd2O3; and / or do not contain Nb2O5; and / or do not contain WO3; and / or do not contain Ta2O5; and / or do not contain GeO2; and / or do not contain Li2O; and / or do not contain Na2O; and / or do not contain K2O; and / or do not contain P2O5; and / or do not contain Fe2O3; and / or do not contain F.

8. The high modulus glass according to any one of claims 1 to 4, characterized in that: The thermal expansion coefficient of the high modulus glass is α 20 / 300℃ 30×10 -7 / K~45×10 -7 / K, preferably 32×10 -7 / K~42× 10 -7 / K, more preferably 35×10 -7 / K~40×10 -7 / K; and / or acid resistance stability D A 3 or more, preferably 2 or more; and / or water resistance stability D W 3 or more types, preferably 2 or more types; and / or refractive index n d 1.56 to 1.61, preferably 1.57 to 1.60, more preferably 1.58 to 1.60; and / or Abbe number ν d is 49 to 55, preferably 50 to 54, more preferably 51 to 53.5; and / or Young's modulus E is 91 GPa or more, preferably 93 GPa or more, more preferably 95 GPa or more; and / or transition temperature T g 680°C or higher, preferably 700°C or higher, more preferably 710°C or higher, further preferably 710-735°C; and / or density ρ is 3.00 g / cm 3 Below, preferably 2.90g / cm 3 Below, more preferably 2.85g / cm 3 Below; and / or light transmittance T at 550nm 550nm 85.0% or more, preferably 87.0% or more, more preferably 89.0% or more; and / or the light transmittance T at 355 nm 355nm 80.0% or more, preferably 82.0% or more, more preferably 84.0% or more; and / or Knoop hardness H K 520×10 7 Pa or more, preferably 540×10 7 Pa or more, more preferably 560×10 7 Pa or above.

9. A packaging carrier, characterized in that Made of the high modulus glass according to any one of claims 1 to 8.

10. A glass element, characterized in that Made of the high modulus glass according to any one of claims 1 to 8.

11. A device, characterized in that: A glass element comprising the high modulus glass according to any one of claims 1 to 8, or comprising the glass element according to claim 10.

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