A steady flow wind bag pump and semiconductor wet process liquid delivery system

Abstract

The application discloses a steady flow air bag pump and a semiconductor wet process liquid delivery system, and belongs to the technical field of semiconductor manufacturing devices. The air bag pump comprises a pump head, a cylinder, a pump shell and a sealing plate arranged on both sides of the pump head, one end of the pump shell is connected with the pump head, and the other end is threadedly connected with the sealing plate; a gas phase working chamber is formed between the pump shell, the sealing plate and the pump head; an air bag is arranged in the gas phase working chamber and is hollow inside to form a liquid phase working chamber; at least three openings are arranged on the pump head, a second connecting rod is fixed in each opening, a first flange is arranged on the outer periphery of the first end of the air bag, a second through hole is arranged on the first flange, and the second connecting rod passes through the second through hole to fixedly connect the air bag and the pump head. The design of the air bag pump structure and the liquid delivery system makes the liquid flow in the semiconductor wet process more stable and controllable, and is favorable for improving production quality and production efficiency.

Description

TECHNICAL FIELD

[0001] The application relates to a stable-flow air bag pump and a semiconductor wet process liquid delivery system, and belongs to the technical field of semiconductor manufacturing devices. BACKGROUND

[0002] With the development of large-size silicon wafer and high-density integration of integrated circuits, the tolerance of product yield to defects will be lower and lower. How to reduce wafer defects on the production line and improve product yield is one of the great challenges faced by wafer manufacturing.

[0003] The semiconductor wet process uses chemicals (acid, alkali, solvent, etc.) and liquid such as ultrapure water as process medium to process the wafer surface. The typical representatives are wet etching and wet cleaning. As a basic process of semiconductor manufacturing, wet etching selectively removes the materials on the wafer surface that are not needed by using chemicals, so as to realize correct replication of the mask pattern. Wet cleaning is used throughout the entire semiconductor process to strip the particles and organic matter on the wafer surface by using ultrapure water and ultrapure acid, alkali and solvent chemicals. The above processes all need a pump as the power for delivering the liquid medium. The air bag pump, as a kind of pump without shaft seal, has large flow and low risk of liquid leakage, and is gradually applied to semiconductor production.

[0004] The two pump chambers of the air bag pump pump liquid flow alternately, generating flow pulsation. Such pulsation has adverse effects on semiconductor manufacturing. For example, in the chemical supply system (CDS), the particles clogging in the filter are squeezed out into the downstream contaminated chemical liquid due to the pulsation, or the particles leak from the joint due to the shaking of the pipeline. In the process of wafer cleaning, the pulsation causes the liquid level of the cleaning tank to fluctuate, the front section of the nozzle to vibrate, and the cleaning efficiency to decrease. In the chemical mechanical polishing (CMP) process, it can also cause uneven polishing of the wafer, and the particle agglomeration caused by the pulsation can even scratch the wafer surface, reducing the yield. Therefore, it is an urgent problem to be solved in semiconductor production to ensure stable operation of the pump, easy control of liquid flow delivery, and to minimize the introduction of new impurities. SUMMARY

[0005] To solve the above problems, the application provides a stable-flow air bag pump and a semiconductor wet process liquid delivery system. Through the control of the structure of the air bag pump and various devices in the liquid delivery system, the liquid flow delivery can be more stable and controllable, the risk of introducing impurities can be reduced, and the quality of wafer production can be improved and the maintenance cost can be saved.

[0006] According to one aspect of the application, a stable-flow air bag pump is provided, comprising:

[0007] a pump head, the pump head comprising an inlet channel and an outlet channel;

[0008] The cylinder includes a pump housing and a sealing plate disposed on both sides of the pump head. The pump housing is cylindrical. One end of the pump housing is connected to the pump head, and the other end is threaded to the sealing plate. The sealing plate is provided with a first through hole. The first through holes on the sealing plates on both sides of the pump head correspond one-to-one and are used to fix the cylinder through a first connecting rod.

[0009] A gas phase working chamber is formed between the pump casing, the sealing plate, and the pump head;

[0010] The air bag is installed in the gas phase working chamber. The first end of the air bag is connected to the pump head, the second end is closed, and the interior is hollow to form a liquid phase working chamber.

[0011] The pump head is provided with at least three openings, and a second connecting rod is fixed in each opening. The first end of the air bag is provided with a first flange, and the first flange is provided with a second through hole corresponding to each of the openings. The second connecting rod passes through the second through hole to fix the air bag and the pump head.

[0012] Specifically, the number of the first connecting rods is no less than four.

[0013] Specifically, the pump housing is provided with a third groove at one end where it connects to the pump head, and a sealing gasket is provided in the groove; the pump housing is provided with an annular protrusion that matches the third groove; when installing the airbag pump, the seal between the cylinder and the pump head is achieved by pressing the gasket between the pump housing and the pump head together.

[0014] Optionally, the sealing plate has a first groove on the side near the pump housing, the inner wall of the first groove is threaded, and the end of the pump housing near the sealing plate is threaded to mate with the inner wall of the first groove; a gasket is provided in the first groove to seal the connection between the pump housing and the sealing plate.

[0015] Optionally, the second end of the airbag is provided with a second flange, and the second flange is provided with a third through hole. The second connecting rod also passes through the third through hole, and the third through hole can slide along the second connecting rod.

[0016] Specifically, the material of the second connecting rod is one of the following: a smooth polymer material, a ceramic material, a carbon fiber composite material, or a metal material.

[0017] Optionally, the second end of the airbag is provided with a spring, which is fixedly connected to the airbag and extends toward the sealing plate; the other end of the spring is a free end or connected to the sealing plate.

[0018] Specifically, when the other end of the spring is connected to the sealing plate, the sealing plate is provided with a groove that cooperates with the spring, and the second end of the spring is engaged with the groove.

[0019] Optionally, a sleeve is provided on the inner side of the sealing plate, the sleeve cooperates with the spring, and the length of the sleeve does not exceed the compressed length of the spring;

[0020] The sealing plate has a second groove on the inner circumference of the sleeve.

[0021] Optionally, the wall thickness of the airbag gradually increases from the first end to the second end, and the ratio of the maximum thickness to the minimum thickness of the airbag is 1.4-1.8.

[0022] Specifically, the minimum wall thickness of the airbag is 1.5 mm, and the maximum wall thickness is 2-2.7 mm.

[0023] According to another aspect of this application, a liquid delivery system for a semiconductor wet process is disclosed, including the above-mentioned constant flow airbag pump, and further including: an air compressor, pneumatically connected to the airbag pump, for providing power to the airbag pump;

[0024] The bubble filter device is connected to the airbag pump via a pipe;

[0025] A flow meter, which is fixed on a pipe upstream of the bubble filter device;

[0026] A controller, which is signal-connected to the flow meter and the air compressor.

[0027] Specifically, the bubble filter is positioned above the pipe in the vertical direction.

[0028] Optionally, a filter shut-off valve is provided between the bubble filter device and the pipeline, and the filter shut-off valve is signal-connected to the controller.

[0029] Optionally, the filter shut-off valve is a normally closed valve that opens upon receiving an electrical signal from the controller.

[0030] Optionally, the system further includes a liquid storage device, which is connected to the airbag pump via a pipeline. A delivery shut-off valve is provided between the liquid storage device and the airbag pump, and the delivery shut-off valve is set to be normally open.

[0031] Specifically, the flow meter includes:

[0032] At least one pair of ultrasonic transducers, each ultrasonic transducer including an external clamping component rotatably connected to the ultrasonic transducer;

[0033] A transducer control device, comprising a timing component and a signal transmission component;

[0034] A control terminal, which is signal-connected to the transducer control device;

[0035] A display device, wherein the display device is signal-connected or electrically connected to the processor.

[0036] Specifically, the control terminal includes:

[0037] The memory is used to store the data and processing programs acquired by the flow metering system of the ultrasonic sensor;

[0038] The processor is used to execute the flow meter data processing program;

[0039] The communication unit is used to receive acquired data or transmit processed data and establish a communication channel.

[0040] Specifically, the data processing program of the flow meter processes the data in the following way:

[0041] The time of ultrasonic waves emitted and received by several sets of ultrasonic transducers and the wave velocity of the ultrasonic waves were collected.

[0042] Calculate the time difference based on the time, determine the standard threshold, and filter valid data and offset data based on the standard threshold.

[0043] The wave velocity reduction ratio is calculated based on the wave velocity, and the bubble content is calculated based on the wave velocity reduction ratio. Then, the offset data is compensated based on the bubble content. The compensated time difference is updated with the valid data to form new valid data, and a valid data group is established.

[0044] Based on the valid data set, calculate the fluid velocity and establish a velocity data set;

[0045] The flow velocity data sets are corrected for fluid state and angle, and then averaged to obtain the flow velocity data.

[0046] Specifically, each data collection session yields at least 5 valid data sets.

[0047] Specifically, it also includes establishing a digital twin model of the flow meter based on the flow velocity data, ultrasonic wave velocity, and time difference obtained from each measurement. This model is used to construct a functional relationship between the flow velocity data and the ultrasonic wave velocity, thereby playing a predictive and reliability judgment role in subsequent flow meter data processing.

[0048] Specifically, the fluid state correction is as follows:

[0049] First, determine the fluid state: the Reynolds coefficient of the fluid is Re = ;

[0050] Where ρ is the fluid density, μ is the fluid dynamic viscosity, D is the pipe diameter, and v n The fluid velocity is obtained from any set of data; when Re>2000, it is turbulent, and when Re<2000, it is laminar.

[0051] Then, the flow rate is corrected based on the fluid state:

[0052] In laminar flow, v n 1 =4 / 3v n ;

[0053] In turbulent flow, v n 1 =( )v n ;

[0054] v n 1 Fluid velocity corrected for the fluid state of any set of data.

[0055] Specifically, the included angle is corrected as follows:

[0056] For the angle θ between the connection between the ultrasonic transducers and the pipe, v n 2 =v n 1 cosθ, the v n 2 This represents the fluid velocity obtained after the included angle correction.

[0057] Specifically, the determination of the standard threshold includes:

[0058] Find the minimum value based on the time difference calculated from several sets of data, and take the minimum value as Δt, which is the time difference when the bubble content is 0.

[0059] When any time difference Δt n When the value is equal to Δt, the data is valid.

[0060] When any time difference Δt n When ≠Δt, if Δt≦Δt n ≤1.2Δt, representing offset data;

[0061] If Δt n Values ​​≥1.2Δt are invalid.

[0062] n = 1, 2, 3, ...

[0063] Specifically, at least five sets of time differences are used as an array to find the minimum value, and the new time difference is compared with Δt in real time, and the minimum value of the comparison is iterated into a new Δt.

[0064] Specifically, the wave speed reduction ratio calculated based on the wave speed is: the ratio of the difference between the emitted wave speed and the received wave speed to the emitted wave speed is the wave speed reduction ratio.

[0065] The calculation of bubble content based on the wave velocity reduction ratio specifically involves calculating the bubble content based on the wave velocity reduction ratio using a formula fitted to the flow meter calibration data.

[0066] X=aq 2 +bq+c, 0≦X≦0.2

[0067] Where q is the wave velocity reduction ratio and X is the bubble content.

[0068] Specifically, due to the discreteness of the data and the statistical nature of parameter estimation, the values ​​of parameters a, b, and c are all within a range. When calculating the bubble content, the maximum likelihood estimation method is used to solve for the parameters of each data point and calculate the bubble content.

[0069] Optionally, the offset data is compensated based on the bubble content as follows:

[0070] ;

[0071] Where ∑dt n The compensation time difference for arbitrary offset data; c0 is the sound velocity of ultrasound in the bubble; c is the sound velocity of ultrasound in the fluid being measured; L is the horizontal distance between the ultrasonic transducers; X n The bubble content corresponds to any time difference; r is the radius of the pipe through which the measured flow rate is located;

[0072] Compensated offset data Δt n '=Δt n +∑dt n ; will Δt n 'As the new Δt n .

[0073] Specifically, the formula for calculating the fluid velocity is:

[0074] v n L0 represents the fluid velocity obtained from any set of data; L0 is the straight-line distance between the ultrasonic transducers.

[0075] Specifically, the fluid flow rate Q = πr 2 *v, where v is the flow rate obtained from the corrected first measurement.

[0076] The beneficial effects that this application may produce include, but are not limited to:

[0077] 1. The steady-flow airbag pump and semiconductor wet process liquid delivery system provided in this application enable the airbag pump to operate more smoothly by setting the structure of the airbag pump, limiting the movement mode of the airbag and the connection structure between the various components of the airbag pump, thereby improving the overall stability of the liquid delivery.

[0078] 2. The steady-flow airbag pump and semiconductor wet process liquid delivery system provided in this application monitor and adjust the liquid delivery system by treating the airbag pump, air compressor, flow meter and controller as a whole, and taking the airbag pump as the main liquid flow delivery control object, thereby improving the control efficiency of liquid delivery and avoiding fatigue damage caused by frequent opening and closing of valves. Attached Figure Description

[0079] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0080] Figure 1 This is a schematic cross-sectional view of the airbag pump involved in Embodiment 1 of this application;

[0081] Figure 2 This is a partial schematic diagram of the airbag pump head involved in Embodiment 1 of this application;

[0082] Figure 3 This is a front view of the airbag of the airbag pump involved in Embodiment 1 of this application;

[0083] Figure 4 This is a schematic diagram of the wind bag pump involved in Embodiment 1 of this application;

[0084] Figure 5 This is a schematic flowchart illustrating the method involved in Embodiment 2 of this application;

[0085] Figure 6 This is another illustrative flowchart of the method involved in Embodiment 2 of this application;

[0086] Figure 7 This is a schematic block diagram of the system involved in Embodiment 2 of this application;

[0087] Figure 8 This is a schematic diagram of the structure of a terminal according to Embodiment 2 of this application.

[0088] Components and reference numerals: 1. Pump head; 2. Cylinder; 3. Pump housing; 4. Sealing plate; 5. First through hole; 6. First connecting rod; 7. Gas phase working chamber; 8. Liquid phase working chamber; 9. First groove; 10. Opening; 11. Second connecting rod; 12. First flange; 13. Second through hole; 14. Second flange; 15. Third through hole; 16. Spring; 17. Second groove; 18. Sleeve. Detailed Implementation

[0089] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.

[0090] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0091] The data processing method for the flow meter provided in this embodiment of the invention is executed by a computer device, and correspondingly, the flow meter and its data processing system run in the computer device.

[0092] Example 1

[0093] like Figures 1-4 A constant flow airbag pump is provided, comprising:

[0094] Pump head 1, which includes an inlet channel and an outlet channel;

[0095] Cylinder 2 includes a pump housing 3 and a sealing plate 4 disposed on both sides of the pump head 1. The pump housing 3 is cylindrical. One end of the pump housing 3 is connected to the pump head 1, and the other end is threaded to the sealing plate 4. The sealing plate 4 is provided with a first through hole 5. The first through holes 5 on the sealing plates 4 on both sides of the pump head 1 correspond one-to-one and are used to fix the cylinder 2 through the first connecting rod 6.

[0096] A gas phase working chamber 7 is formed between the pump casing 3, the sealing plate 4, and the pump head 1;

[0097] The air bag is installed in the gas phase working chamber 7. The first end of the air bag is connected to the pump head 1, the second end is closed, and the interior is hollow to form the liquid phase working chamber 8.

[0098] The pump head 1 is provided with at least three openings 10, and a second connecting rod 11 is fixed in each opening 10; a first flange 12 is provided on the outer periphery of the first end of the air bag, and a second through hole 13 corresponding to the opening 10 is provided on the first flange 12. The second connecting rod 11 passes through the second through hole 13 to fix and connect the air bag and the pump head 1.

[0099] By setting the cylinder 2 to consist of a pump housing 3 and a sealing plate 4, and setting a first connecting rod 6 between the two sealing plates 4, the cylinder 2 is fixed by pressing, thus achieving a seal between the cylinder 2 and the pump head 1. At the same time, this setting allows the airbag pump to be repaired without disassembling the pump housing 3, which can save disassembly and assembly time and improve production efficiency.

[0100] In one embodiment, the sealing plate 4 is provided with a first groove 9 on the side near the pump housing 3, the inner wall of the first groove 9 is provided with threads, and the end of the pump housing 3 near the sealing plate 4 is provided with threads that mate with the inner wall of the first groove 9; a gasket is provided in the first groove 9 to seal the connection between the pump housing 3 and the sealing plate 4.

[0101] The threaded connection and the gasket not only improve the sealing performance of cylinder 2, but also increase the friction between pump housing 3 and sealing plate 4, reduce the shaking of cylinder 2 caused by the extension and retraction of the airbag, and improve the stability of the airbag pump.

[0102] In one embodiment, the second end of the airbag is provided with a second flange 14, and the second flange 14 is provided with a third through hole 15. The second connecting rod 11 also passes through the third through hole 15, and the third through hole 15 can slide along the second connecting rod 11.

[0103] The second connecting rod 11 connects the air bag to the pump head 1 through the second through hole 13 and passes through the third through hole 15, thus limiting the extension and retraction trajectory of the air bag pump to multiple second connecting rods 11, preventing swaying in the up-down or back-and-forth direction, avoiding pulses and disturbances to the liquid flow delivery, and improving the stability of the liquid flow delivery.

[0104] In one embodiment, the second end of the air bag is provided with a spring 16, which is fixedly connected to the air bag and extends toward the sealing plate 4; the other end of the spring 16 is a free end or connected to the sealing plate 4.

[0105] The design of the spring 16 at the end of the air bag serves two purposes. First, it provides appropriate reaction force according to the degree of deformation of the air bag during expansion and contraction, ensuring that the air bag quickly returns to its original shape when the gas pressure changes in the gas phase working chamber 7, thereby improving the pump's working efficiency and response speed. Second, it also provides a certain reaction force to the air bag to prevent it from over-stretching, thus preventing a reduction in its lifespan due to overstretching. In addition, the spring 16 can effectively reduce the vibration and noise of the air bag, improving the overall stability of the air bag pump operation.

[0106] In one embodiment, a sleeve 18 is provided on the inner side of the sealing plate 4. The sleeve 18 cooperates with the spring 16, and the length of the sleeve 18 does not exceed the compressed length of the spring 16.

[0107] The sealing plate 4 has a second groove 17 on the inner circumference of the sleeve 18.

[0108] The design of the sleeve 18 can limit the extension and retraction path of the spring 16, so that the spring 16 can maintain extension and retraction in a straight line, avoiding the arc-shaped rebound of the spring 16 due to bias, which would affect the stability of the wind bag extension and retraction.

[0109] In one implementation, the wall thickness of the airbag gradually increases from the first end to the second end, and the ratio of the maximum thickness to the minimum thickness of the airbag is 1.4-1.8.

[0110] Specifically, the minimum wall thickness of the airbag is 1.5 mm, and the maximum wall thickness is 2-2.7 mm.

[0111] The minimum wall thickness is set at the first end of the airbag, where the stress on the airbag is minimal, and a smaller wall thickness will not affect the durability of the airbag; the difference in airbag wall thickness provides a difference in the sensitivity of airbag extension and contraction, enabling more precise adjustment of airbag extension and contraction.

[0112] Example 2

[0113] The semiconductor wet process liquid delivery system, including the aforementioned constant flow airbag pump, also includes:

[0114] An air compressor, pneumatically connected to the airbag pump, is used to provide power to the airbag pump;

[0115] The bubble filter device is connected to the airbag pump via a pipe;

[0116] The flow meter is fixed on the pipe upstream of the bubble filter device;

[0117] The controller is connected to the flow meter and air compressor via signal.

[0118] With the above liquid delivery system setup, the pumping volume of the airbag pump can be adjusted by the controller based on the flow meter detection data, without the need for opening and closing numerous valves, thus avoiding the problem of inaccurate flow control caused by valve fatigue.

[0119] In one implementation, a filter shut-off valve is provided between the bubble filter device and the pipeline, and the filter shut-off valve is connected to the controller signal.

[0120] In one implementation, the filter shut-off valve is a normally closed valve that opens upon receiving an electrical signal from the controller.

[0121] The bubble filter can determine its working status based on the opening and closing of the filter shut-off valve.

[0122] In one implementation, the system also includes a liquid storage device, which is connected to the airbag pump via a pipeline. A delivery shut-off valve is provided between the liquid storage device and the airbag pump, and the delivery shut-off valve is set to be normally open.

[0123] The normally open position of the delivery shut-off valve ensures the normal delivery of fluid. In the event of an emergency downstream, the delivery shut-off valve closes to ensure production safety.

[0124] As one specific implementation method, the flow meter includes:

[0125] At least one pair of ultrasonic transducers, each ultrasonic transducer including an external clamping component, the external clamping component being rotatably connected to the ultrasonic transducer;

[0126] A transducer control device, comprising a timing component and a signal transmission component;

[0127] The control terminal is signal-connected to the transducer control device.

[0128] The display device is connected to the processor via signals or electrical connection.

[0129] Figures 5-8 This is a schematic flowchart of this embodiment. Wherein, Figure 5 The implementing entity can be a flow metering system using an ultrasonic sensor. Depending on the specific requirements, the order of the steps in this flowchart can be changed, and some steps can be omitted.

[0130] like Figure 5 As shown, the specific method of the flow meter data processing program executed by the processor is as follows:

[0131] Step 510: Collect the time of ultrasonic waves emitted and received by several sets of ultrasonic transducers and the wave velocity of ultrasonic waves.

[0132] Step 520: Calculate the time difference based on the time, determine the standard threshold, and filter valid data and offset data based on the standard threshold;

[0133] Step 530: Calculate the wave velocity reduction ratio based on the wave velocity and the bubble content based on the wave velocity reduction ratio. Then, compensate the offset data based on the bubble content, update the compensated time difference with the valid data to the new valid data, and establish a valid data group.

[0134] Step 540: Calculate the fluid velocity based on the valid data set and establish a velocity data set;

[0135] Step 550: Perform fluid state correction and angle correction on the flow velocity data set, and take the average to obtain the flow velocity data.

[0136] To facilitate understanding of the present invention, the following description further illustrates the data processing method of the flow meter provided by the present invention, based on the principle of the data processing method of the flow meter in the embodiments.

[0137] For details, please refer to Figure 5 ,Figure 6 The specific data processing methods for flow meters include:

[0138] S1. Collect the time of ultrasonic waves emitted and received by several sets of ultrasonic transducers and the wave velocity of the ultrasonic waves.

[0139] The excitation of the ultrasonic transducer is controlled by a preset time and the time is recorded; based on the recorded time and the excitation of the ultrasonic transducer, the specific time of ultrasonic wave emission and reception, as well as the ultrasonic wave velocity emitted and received by the ultrasonic transducer, are obtained.

[0140] The ultrasonic transducers are installed in pairs. One is located upstream of the pipe and is called the upstream ultrasonic transducer. The other is located downstream of the pipe and is called the downstream ultrasonic transducer. The upstream ultrasonic transducer transmits ultrasonic signals to the downstream ultrasonic transducer and receives them. The downstream ultrasonic transducer transmits ultrasonic signals to the upstream ultrasonic transducer and receives them.

[0141] The upstream ultrasonic transducer transmits ultrasonic signals to the downstream ultrasonic transducer, and its built-in clock records time 1. After the downstream ultrasonic transducer receives the ultrasonic signal, its built-in clock records time 2. The difference between time 1 and time 2 is recorded as the downstream time difference. The principle of the upstream time difference is the same as above, and will not be repeated here.

[0142] S2. Calculate the time difference based on the time, determine the standard threshold, and filter valid data and offset data based on the standard threshold.

[0143] Calculate the time difference; set the upper and lower limits of the threshold based on the function; filter the offset data that falls within the upper and lower limits of the threshold from the time difference.

[0144] Find the minimum value based on the time difference calculated from several sets of data, and take the minimum value as Δt, which is the time difference when the bubble content is 0.

[0145] When any time difference Δt n When the value is equal to Δt, the data is valid.

[0146] When any time difference Δt n When ≠Δt, if Δt≦Δt n ≤1.2Δt, representing offset data;

[0147] If Δt n Values ​​≥1.2Δt are invalid.

[0148] n = 1, 2, 3, ...

[0149] S3. Calculate the wave velocity reduction ratio based on the wave velocity and the bubble content based on the wave velocity reduction ratio. Then, compensate the offset data based on the bubble content, update the compensated time difference with the valid data to the new valid data, and establish a valid data group.

[0150] The experiment calibrated the functional relationship between the wave velocity reduction rate and the bubble content; the wave velocity reduction rate was calculated based on the ultrasonic wave velocity, and the bubble content was calculated based on the functional relationship between the wave velocity reduction rate and the bubble content; the offset data was compensated based on the bubble content; the compensated data was updated as valid data, and a valid data set was established.

[0151] The calculation of bubble content based on the wave velocity reduction ratio is specifically as follows: The bubble content is calculated based on the measured received wave velocity using a fitting formula derived from the flowmeter calibration data.

[0152] X=aq 2 +bq+c, 0≦X≦0.2,

[0153] Where q is the wave velocity reduction ratio and X is the bubble content.

[0154] The specific method for compensating for the offset data based on the bubble content is as follows:

[0155] ;

[0156] Where ∑dt n The compensation time difference for arbitrary offset data; c0 is the sound velocity of ultrasound in the bubble; c is the sound velocity of ultrasound in the fluid being measured; L is the horizontal distance between the ultrasonic transducers; X n The bubble content corresponds to any time difference; r is the radius of the pipe through which the measured flow rate is located;

[0157] Compensated offset data Δt n '=Δt n +∑dt n ; will Δt n 'As the new Δt n ;

[0158] The formula for calculating fluid velocity is:

[0159] v n L0 represents the fluid velocity obtained from any set of data; L0 is the straight-line distance between the ultrasonic transducers.

[0160] Specifically, the fluid flow rate Q = πr 2 *v, where v is the flow rate obtained from the corrected first measurement.

[0161] S4. Calculate the fluid velocity based on the valid data set and establish a velocity data set.

[0162] Based on the effective data set, the flow velocity of any group is calculated according to the time difference method; a flow velocity data set is established based on several groups of flow velocity data.

[0163] S5. Perform fluid state correction and angle correction on the flow velocity data set, and take the average to obtain the flow velocity data.

[0164] The fluid state is determined and corrected based on the Reynolds coefficient; the flow velocity after fluid state correction is further corrected based on the angle θ between the ultrasonic sensor and the pipe; the average value of the corrected flow velocity is then calculated, and the average value is output as the flow velocity measured in this test.

[0165] First, determine the fluid state: the Reynolds coefficient of the fluid is Re = ;

[0166] Where ρ is the fluid density, μ is the fluid dynamic viscosity, D is the pipe diameter, and v n The fluid velocity is obtained from any set of data; when Re>2000, it is turbulent, and when Re<2000, it is laminar.

[0167] Then, the flow rate is corrected based on the fluid state:

[0168] In laminar flow, v n 1 =4 / 3v n ;

[0169] In turbulent flow, v n 1 =( )v n ;

[0170] v n 1 Fluid velocity corrected for fluid state of any set of data;

[0171] Corrected based on the angle between the connection lines between the ultrasonic transducers and the pipe:

[0172] For the angle θ between the connection between the ultrasonic transducers and the pipe, v n 2 =v n 1 cosθ, the v n 2 This represents the fluid velocity obtained after the included angle correction.

[0173] In some embodiments, the flow meter data processing system 700 may include multiple functional modules composed of computer program segments. The computer programs for each program segment in the flow meter data processing system 700 may be stored in the memory of a computer device and executed by at least one processor to perform (see details). Figure 5 (Description) The data processing function of the flow meter.

[0174] In this embodiment, the flow meter's data processing system 700 can be divided into multiple functional modules according to the functions it performs, such as... Figure 7 As shown. The functional modules may include: a data acquisition module 710, a data judgment module 720, a data update module 730, a flow rate calculation module 740, and a flow rate correction module 750. The module referred to in this invention is a series of computer program segments that can be executed by at least one processor and perform a fixed function, and are stored in memory. In this embodiment, the functions of each module will be described in detail in subsequent embodiments.

[0175] As one implementation method, the data update module includes:

[0176] The time difference fitting unit is used to fit the relationship between time difference and time, and to judge the changes in the fitted relationship.

[0177] The threshold setting unit is used to set a standard threshold based on the extreme value being sought.

[0178] The data compensation unit is used to compensate for data that does not meet the standard threshold.

[0179] The data update unit is used to update the compensated data to meet the standard threshold.

[0180] Figure 8 This is a schematic diagram of the structure of a terminal 800 provided in an embodiment of the present invention. The terminal 800 can be used to execute the data processing method of the flow meter provided in the embodiment of the present invention.

[0181] The terminal 800 may include a processor 810, a memory 820, and a communication unit 830. These components communicate via one or more buses. Those skilled in the art will understand that the server structure shown in the figure does not constitute a limitation of the present invention. It may be a bus topology or a star topology, and may include more or fewer components than shown, or combine certain components, or have different component arrangements.

[0182] The memory 820 can be used to store the execution instructions of the processor 810. The memory 820 can be implemented by any type of volatile or non-volatile storage terminal or a combination thereof, such as static random access memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable read-only memory (PROM), read-only memory (ROM), magnetic storage, flash memory, magnetic disk, or optical disk. When the execution instructions in the memory 820 are executed by the processor 810, the terminal 800 is able to perform some or all of the steps in the above method embodiments.

[0183] The processor 810 serves as the control center of the storage terminal, connecting various parts of the electronic terminal via various interfaces and lines. It executes software programs and / or modules stored in the memory 820, and calls data stored in the memory to perform various functions of the electronic terminal and / or process data. The processor can be composed of integrated circuits (ICs), such as a single packaged IC or multiple packaged ICs with the same or different functions connected together. For example, the processor 810 may consist only of a central processing unit (CPU). In this embodiment of the invention, the CPU may have a single processing core or include multiple processing cores.

[0184] The communication unit 830 is used to establish a communication channel, enabling the storage terminal to communicate with other terminals. It receives user data sent by other terminals or sends user data to other terminals.

[0185] The present invention also provides a computer storage medium, wherein the computer storage medium may store a program, which, when executed, may include some or all of the steps provided in the embodiments of the present invention. The storage medium may be a magnetic disk, an optical disk, read-only memory (ROM), or random access memory (RAM), etc.

[0186] Therefore, this invention provides a lower-cost and more convenient method for flow measurement using ultrasonic sensors, utilizing existing equipment without adding new devices. This makes low-cost flow measurement using ultrasonic sensors possible, saving manpower and material costs. The technical effects achieved by this embodiment can be found in the description above, and will not be repeated here.

[0187] Those skilled in the art will clearly understand that the techniques in the embodiments of the present invention can be implemented using software plus necessary general-purpose hardware platforms. Based on this understanding, the technical solutions in the embodiments of the present invention, or the parts that contribute to the prior art, can be embodied in the form of a software product. This computer software product is stored in a storage medium such as a USB flash drive, mobile hard drive, read-only memory (ROM), random access memory (RAM), magnetic disk, or optical disk, or other media capable of storing program code. It includes several instructions to cause a computer terminal (which may be a personal computer, server, or a second terminal, network terminal, etc.) to execute all or part of the steps of the methods in the various embodiments of the present invention.

[0188] The same or similar parts between the various embodiments in this specification can be referred to mutually. In particular, the terminal embodiments are basically similar to the method embodiments, so the description is relatively simple, and the relevant parts can be referred to the description in the method embodiments.

[0189] In the embodiments provided by this invention, it should be understood that the disclosed systems and methods can be implemented in other ways. For example, the system embodiments described above are merely illustrative. For instance, the division of modules is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple modules or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces; the indirect coupling or communication connection between systems or modules may be electrical, mechanical, or other forms.

[0190] The modules described as separate components may or may not be physically separate. The components shown as modules may or may not be physical modules; that is, they may be located in one place or distributed across multiple network modules. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs.

[0191] In addition, the functional modules in the various embodiments of the present invention can be integrated into one processing module, or each module can exist physically separately, or two or more modules can be integrated into one module.

[0192] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to interchangeably. Each embodiment focuses on describing the differences from other embodiments. In particular, the system embodiments are basically similar to the method embodiments, so the description is relatively simple; relevant parts can be referred to the descriptions in the method embodiments.

[0193] The above description is merely an embodiment of this application and is not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. A liquid delivery system for a semiconductor wet process, characterized in that, The utility model relates to a kind of air bubble content measurement system, comprising: A steady flow wind bag pump; An air compressor pneumatically connected to the wind bag pump for powering the wind bag pump; A bubble filter device connected to the wind bag pump by a pipeline; A flow meter fixed on the pipeline upstream of the bubble filter device; A controller signal connected to the flow meter and air compressor; The flow meter comprises: At least one pair of ultrasonic transducers, the ultrasonic transducers comprising an outer clamping component, the outer clamping component being rotatably connected to the ultrasonic transducers; A transducer control device comprising a timing component and a signal transmission component; A control terminal signal connected to the transducer control device; A screen display device signal connected or electrically connected to the processor; The control terminal comprises: A memory for storing data obtained by the flow metering system of the ultrasonic sensor and a processing program; A processor for executing the flow meter data processing program; A communication unit for receiving the obtained data or transmitting the processed data, establishing a communication channel; The data processing method of the flow meter data processing program is as follows: Collecting the time and wave speed of the ultrasonic transducers emitting and receiving ultrasonic waves; Calculating the time difference value according to the time, determining the standard threshold value, and screening the effective data and offset data according to the standard threshold value; Calculating the bubble content according to the wave speed reduction ratio, and compensating the offset data according to the bubble content, updating the compensated time difference value and effective data to new effective data, and establishing an effective data group; According to the effective data group, calculating the fluid flow rate, and establishing a flow rate data group; Correcting the flow rate data group for fluid state and angle, and taking the average to obtain the flow rate data; The effective data group is at least 5 groups; The effective data group further comprises a flow meter digital twin model established according to the flow rate data, ultrasonic wave speed and time difference value obtained by each measurement, for constructing a functional relationship between the flow rate data and the wave speed of the ultrasonic wave, thereby predicting and judging the reliability of subsequent flow meter data processing; The fluid state correction is as follows: First, the fluid state is judged: the Reynolds coefficient Re of the fluid ; where p is the density of the fluid, μ is the dynamic viscosity of the fluid, D is the pipe diameter, v n the fluid flow rate obtained for any set of data; turbulent flow when Re > 2000 and laminar flow when Re < 2000; According to the fluid state, the flow rate is corrected as follows: Laminar flow state, v n 1 = 4 / 3v n ; In the turbulent regime, v n 1 = v n ; The v n 1 Fluid flow rate corrected for arbitrary set of data fluid conditions; The angle correction is as follows: For the angle θ between the connecting line of the ultrasonic transducers and the pipe, v n 2 = v n 1 cos θ, the v n 2 is the fluid flow rate after the angle correction; The determination of the standard threshold value comprises: Finding the minimum value from the calculated time difference values, and taking the minimum value as Δt, which is the time difference value when the bubble content is 0; When any of the time difference values Δt n = Δt, it is valid data; When any of the time difference values Δt n ≠ Δt, if Δt≦Δt n 1.2Δt, is offset data; if Δt n ≧1.2Δt, is invalid data; n=1, 2, 3, … At least five time difference values are used as an array to find the minimum value, and the new time difference value is compared with Δt in real time, and the compared minimum value is iterated as a new Δt; The wave speed reduction ratio is calculated according to the difference between the emitted wave speed and the received wave speed and the ratio of the emitted wave speed, i.e. The bubble content is calculated according to the wave speed reduction ratio as follows: X = aq 2 + bq + c, 0 < X < 0.2; Where q is the wave speed reduction ratio, X is the bubble content, and the values of parameters a, b and c are a range due to the discreteness of data and the statistical properties of parameter estimation. When calculating the bubble content, the maximum likelihood estimation method is used to solve the parameters of each data point and calculate the bubble content. The compensation of the offset data according to the bubble content is specifically: ； where ∑dt n is the compensated time difference of any offset data; c0is the speed of sound of the ultrasound wave in the bubble; c is the speed of sound of the ultrasound wave in the measured fluid; L is the horizontal distance between the ultrasound transducers; X n is the bubble content corresponding to any time difference; r is the radius of the pipe in which the flow is measured; compensated offset data Δt n ' = Δt n +∑dt n ; set Δt n ' as new Δt n ; The calculation formula of the fluid flow rate is: , v n L0is the straight-line distance between the ultrasonic transducers; The flow rate Q = πr 2 v, v is the corrected flow rate of the first measurement.

2. The semiconductor wet process liquid delivery system of claim 1, wherein, The filter stop valve is provided between the bubble filtering device and the pipeline, and the filter stop valve is signal connected with the controller.

3. The semiconductor wet process liquid delivery system of claim 2, wherein, The filter stop valve is a normally closed valve, which is opened after receiving the electric signal of the controller.

4. The semiconductor wet process liquid delivery system of claim 3, wherein, The system further comprises a liquid storage device, which is connected with the air bag pump through a pipeline, and a conveying stop valve is provided between the liquid storage device and the air bag pump, and the conveying stop valve is set to be normally open.

5. The data processing method of claim 1, wherein The method comprises the following steps: S1, collecting the time and wave speed of the ultrasonic transducer emitting and receiving ultrasonic waves; The ultrasonic transducers are arranged in pairs, one of which is arranged upstream of the pipeline as an upstream ultrasonic transducer, and the other is arranged downstream of the pipeline as a downstream ultrasonic transducer, the upstream ultrasonic transducer is used to emit ultrasonic wave signals to the downstream ultrasonic transducer, and the downstream ultrasonic transducer receives the signals, the downstream ultrasonic transducer emits ultrasonic wave signals to the upstream ultrasonic transducer, and the upstream ultrasonic transducer receives the signals; The upstream ultrasonic transducer emits ultrasonic wave signals to the downstream ultrasonic transducer, and the built-in clock records time 1, after the downstream ultrasonic transducer receives the ultrasonic wave signals, the built-in clock records time 2, and the difference between time 1 and time 2 is recorded as the forward flow time difference; the principle of reverse flow time difference is the same as above, and will not be repeated here; S2, calculating the time difference according to the time, determining the standard threshold, and screening effective data and offset data according to the standard threshold; The time difference is calculated; According to the time difference calculated by several groups, the minimum value is found, and the minimum value is taken as Δt, that is, the time difference when the bubble content is 0; When any time difference Δt n = Δt, it is valid data; When any time difference Δt n When ≠Δt, if Δt≦Δt n ≤1.2Δt, is the offset data; if Δt n ≥1.2Δt, is invalid data; n=1, 2, 3, ...; At least five groups of time difference values are used as arrays to find the minimum value, and the new time difference value is compared with Δt in real time, and the compared minimum value is iterated as a new Δt; According to the wave speed, the wave speed reduction ratio is calculated as: the difference between the emitted wave speed and the received wave speed and the emitted wave speed, that is, the wave speed reduction ratio; According to the wave speed reduction ratio, the bubble content is calculated, that is, according to the flowmeter calibration data fitting formula, the bubble content is calculated according to the wave speed reduction ratio: X = aq 2 + bq + c, 0 < X < 0.2; Wherein, q is the wave speed reduction ratio, and X is the bubble content; The compensation of the offset data according to the bubble content is specifically: ； where ∑dt n is the compensated time difference of any offset data; c0is the speed of sound of the ultrasound wave in the bubble; c is the speed of sound of the ultrasound wave in the measured fluid; L is the horizontal distance between the ultrasound transducers; X n is the bubble content corresponding to any time difference; r is the radius of the pipe in which the flow is measured; compensated offset data Δt n ’ = Δt n + ∑dt n ; set Δt n ’ as new Δt n ; The calculation formula of the fluid flow rate is: , v n L0is the straight-line distance between the ultrasonic transducers; The flow rate Q = πr 2 v, v is the corrected flow rate of the first measurement; S4, calculating the fluid flow rate according to the effective data group, and establishing a flow rate data group; S5, correcting the flow rate data group according to the fluid state and the included angle, and taking the average to obtain the flow rate data; First, the fluid state is judged: the Reynolds coefficient Re of the fluid ; where p is the density of the fluid, μ is the dynamic viscosity of the fluid, D is the pipe diameter, v n the fluid flow rate obtained for any set of data; turbulent flow when Re > 2000 and laminar flow when Re < 2000; Then, the flow rate is corrected according to the fluid state: Laminar flow state, v n 1 = 4 / 3 v n ; In the turbulent regime, v n 1 = v n ; v n 1 correcting the fluid flow rate for any set of data fluid conditions; The included angle correction is: For the angle θv between the wire connecting the ultrasonic transducers and the pipe, v n 2 = v cos θv n 1 n 2 is the fluid flow rate after the angle correction.​ 6. The steady flow airbag pump of a semiconductor wet process liquid delivery system according to claim 1, wherein It comprises: The pump head comprises a liquid inlet channel and a liquid outlet channel; The cylinder comprises pump shells and sealing plates arranged on both sides of the pump head, the pump shells are cylindrical, one end of the pump shell is connected with the pump head, the other end is threadedly connected with the sealing plate, the sealing plate is provided with first through holes, the first through holes on the sealing plates on both sides of the pump head correspond to each other, and the first through holes are used to fix the cylinder through the first connecting rods; the pump shell, the sealing plate and the pump head form a gas phase working chamber; The wind bag is arranged in a gas-phase working chamber, a first end of the wind bag is connected with a pump head, a second end of the wind bag is closed, and an inner part of the wind bag is hollow to form a liquid-phase working chamber; a wall thickness of the wind bag gradually increases from the first end to the second end, and a ratio of a maximum thickness to a minimum thickness of the wind bag is 1.4-1.8; At least three openings are arranged on the pump head, a second connecting rod is fixed in each of the openings, a first flange is arranged on an outer periphery of the first end of the wind bag, a second through hole corresponding to the openings is arranged on the first flange, the second connecting rod passes through the second through hole to fixedly connect the wind bag and the pump head, a second flange is arranged on the second end of the wind bag, a third through hole is arranged on the second flange, the second connecting rod also passes through the third through hole, the third through hole can slide along the second connecting rod, a spring is arranged on the second end of the wind bag, the spring is fixedly connected with the wind bag and extends to a sealing plate, the other end of the spring is a free end or is connected with the sealing plate, an inner side of the sealing plate is provided with a sleeve, the sleeve cooperates with the spring, and a length of the sleeve is not more than a compression length of the spring.

7. The steady flow airbag pump of a semiconductor wet process liquid delivery system according to claim 6, wherein, A first groove is arranged on a side of the sealing plate close to the pump shell, an inner wall of the first groove is provided with a thread, an end of the pump shell close to the sealing plate is provided with a thread matched with the inner wall of the first groove, and a gasket is arranged in the first groove to seal a connecting part of the pump shell and the sealing plate.

8. The steady flow airbag pump of a semiconductor wet process liquid delivery system according to claim 6, wherein, A second groove is arranged on an inner periphery of the sleeve of the sealing plate.

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