An electrolytic copper foil warpage measuring device

Abstract

This invention belongs to the field of electronic industry technology, specifically disclosing an electrolytic copper foil warpage measuring device, including a reaction tank with an arc-shaped bottom, storing copper sulfate electrolyte inside, an anode electrode plate fixedly mounted at the bottom, and cathode rollers rotatably connected to the side walls on both sides, the cathode rollers being coaxially arranged with the anode electrode plate and located directly above it; a motor is fixed to one side of the outer wall of the reaction tank, the output end of the motor being fixed to the roller shaft of the cathode roller; a processing component, located on one side of the reaction tank, including a support, with an adjusting roller rotatably connected to the side of the support near the reaction tank, the roller shaft of the adjusting roller being connected to the side of the cathode roller away from the motor via a belt drive mechanism; and a detection component, fixed on the support and near the adjusting roller, including an arc-shaped detection cover, with a light emitter fixed at the midpoint of the inner wall of the detection cover. This device solves the problem of warpage that cannot be detected and resolved in a timely manner during the traditional electrolytic copper foil production process.

Description

Technical Field

[0001] This invention belongs to the field of electronic industry technology, and specifically relates to a device for measuring the warpage of electrolytic copper foil. Background Technology

[0002] In the electronics industry, electrolytic copper foil is a key basic material widely used in printed circuit boards (PCBs), lithium-ion batteries, and other fields. As electronic devices develop towards miniaturization and high performance, the quality requirements for electrolytic copper foil are becoming increasingly stringent, with the warpage of the copper foil being one of the key indicators affecting its quality.

[0003] In traditional electrolytic copper foil production processes, after the copper foil is formed, it is usually wound up first, and then the entire roll of copper foil is surface treated. This process has many drawbacks: Firstly, if there is warping in the copper foil during the winding process, it will accumulate as winding continues, leading to severe deformation of the entire roll of copper foil. This not only affects the flatness of the copper foil, but also causes a series of problems in subsequent processing and use, such as unclear circuit printing in printed circuit board manufacturing and uneven coating of lithium-ion battery electrodes, thereby reducing the yield and performance stability of the product. Secondly, in the subsequent surface treatment process, because the copper foil has already been wound up, it is difficult to detect and adjust the warping in real time and accurately. It is impossible to detect and solve the warping problem in time, allowing unqualified products to flow into the next process, increasing production costs and wasting resources.

[0004] Furthermore, existing methods for detecting copper foil warpage are mostly simple and have limited accuracy, making it difficult to meet the demands of high-precision production. Some testing equipment can only detect warpage when it is obvious, failing to detect minute changes in warpage in a timely manner. This makes it impossible to provide accurate and timely information for adjusting process parameters during production, resulting in an inability to effectively control the warpage of copper foil at its source and making it difficult to guarantee the stability and consistency of copper foil quality.

[0005] To address the aforementioned issues, a device for measuring the warpage of electrolytic copper foil is proposed to solve the problem of warpage that cannot be detected and resolved in a timely manner during the traditional electrolytic copper foil production process. Summary of the Invention

[0006] The purpose of this invention is to provide an electrolytic copper foil warpage measurement device to solve the problems mentioned in the background art.

[0007] To solve the above-mentioned technical problems, the present invention provides the following technical solution: an electrolytic copper foil warpage measuring device, comprising a reaction cell,

[0008] The reaction tank has an arc-shaped bottom and stores copper sulfate electrolyte inside. An anode electrode plate is fixedly installed at the bottom, and cathode rollers are rotatably connected to the two side walls. The cathode rollers are arranged coaxially with the anode electrode plate and are located directly above it.

[0009] A motor is fixed to one side of the outer wall of the reaction tank, and the output end of the motor is fixed to the roller shaft of the cathode roller.

[0010] The processing component, located on one side of the reaction tank, includes a support frame. An adjusting roller is rotatably connected to the side of the support frame closest to the reaction tank. The roller shaft of the adjusting roller is connected to the side of the cathode roller furthest from the motor frame via a belt drive mechanism.

[0011] The detection assembly, fixed on the bracket and close to the adjusting roller one, includes an arc-shaped detection cover. A light emitter is fixed at the midpoint of the inner wall of the detection cover. Slide rails are symmetrically fixed on both sides of the light emitter along the inner wall of the detection cover. A support seat is slidably connected on each slide rail. The detection roller two is rotatably connected on the support seat.

[0012] The detection roller 2 includes a roller shaft and a detection cylinder. An exhaust hole 1 is arrayed on the outer wall of the detection cylinder. A detection groove is provided on the side away from the exhaust hole 1. A fixing plate is fixed on the inner wall of the detection groove and forms a seal with the detection cylinder.

[0013] An air pump is fixed inside the detection cylinder. The input end of the air pump is connected to some of the air holes, and the output end blows air into the detection cylinder.

[0014] One end of the fixed plate is fixed with a second motor, and the output end of the second motor is fixed with a third detection roller. The third detection roller is rotatably connected to the fixed plate on the side away from the second motor.

[0015] A sealing plate is provided on the outside of motor 2, which is fixedly connected to the fixing plate. The sealing plate completely covers and seals motor 2.

[0016] The light output end and the light receiving end are respectively fixed on the outer walls of the fixing plates on both sides of the outer wall of the detection roller.

[0017] The present invention further illustrates that a sealing plate and a ventilation plate are respectively fixed between the inner walls on both sides of the detection cylinder. The ventilation plate is an L-shaped plate with an air hole at one end and fixed to the fixing plate, and the other end extends along the detection groove to the sealing plate and is fixed to form a seal.

[0018] Air hole one and air hole two are connected through the internal cavity of the detection cylinder, forming a compressed gas flow channel.

[0019] The present invention further explains that the bottom of the support of the processing component is fixed with several washing pools and processing pools, and the processing pools are arranged in the following order according to the process: pickling pool, roughening pool, curing pool, ashing pool and passivation pool.

[0020] Each washing tank and treatment tank is rotatably connected to a rotating roller, and an adjusting roller is installed between the washing tank and the treatment tank.

[0021] The present invention further describes that each washing pool is provided with a detection roller, which is located above the rotating roller and rotatably connected to the support. A laser displacement sensor is provided inside the detection roller.

[0022] The present invention further describes a drying device, which is located on the side of the processing component away from the reaction tank, including a drying port, a hot air circulation system is provided in the drying port, and the drying temperature is adjustable in the range of 80~120℃.

[0023] The present invention further explains that both of the support seats are provided with linear drives, and the two linear drives are set at the same frequency, so that the two support seats are on the two slide rails.

[0024] The present invention further illustrates that the outer diameter ratio of the cathode roller to the regulating roller is 2:1;

[0025] The ratio of the outer diameter of the cathode roller pulley to that of the adjusting roller is 1:2, achieving linear velocity matching.

[0026] In another aspect of the present invention, when it is necessary to detect the warpage of the copper foil surface, the sealing plate is made to adhere to the surface of the copper foil by sliding the support base, and a rectangularly distributed light beam is emitted through the light output end. The emitted light beam is received by the light receiving end on the fixed plate on the other side. If the copper foil surface warps, the warped part will obstruct the passage of the light beam and thus not be received by the light receiving end. A light spot is formed on the part of the light receiving end where the light is irradiated. There is a clear light-dark separation between the concentrated part of the light spot and the part that does not receive the light. The distance from the highest point of the separation line to the surface of the copper foil is the highest height of the copper foil warpage.

[0027] The present invention further explains that if the highest warping height of the copper foil is too high, the support seat is slid on the slide rail, and the detection roller three is activated. The detection roller three emits light that shines on the copper foil and is reflected back to the detection roller three. When the copper foil surface is warped, the light shining on it is reflected to the inner surface of the detection cover. The higher the warping degree of the copper foil surface, the more dispersed the light spot on the inner surface of the detection cover is, thereby obtaining the position of the area with higher warping degree of the copper foil surface. The factors causing the warping are determined by the warping area.

[0028] The present invention further explains that when the warped area is at the edge, it indicates that it is caused by the cathode roller rotating too fast; when the warped area is in the center, it indicates that it is caused by the concentration of copper sulfate solution being too high or too low.

[0029] Compared with the prior art, the beneficial effects achieved by the present invention are as follows: The electrolytic copper foil warpage measuring device of this application detects the warpage of the copper foil after its formation and before it enters the surface treatment process. By setting up a detection step at a key process node, warpage problems can be detected in the early stages of copper foil production, preventing unqualified products from entering subsequent processes. This effectively prevents quality problems such as unclear printed circuit board lines and uneven coating of lithium-ion battery electrodes caused by warpage, greatly improving the product yield and performance stability, and ensuring the quality of the final product.

[0030] The equipment is equipped with advanced detection components, employing laser displacement sensors and light emission and reception technology to accurately detect the warpage of copper foil surfaces. It can not only detect the highest height of copper foil warpage but also pinpoint the location of areas with high warpage by analyzing the dispersion of the light spot, thereby identifying the factors causing the warpage, such as excessively high cathode roller speed or abnormal copper sulfate solution concentration. This precise detection provides detailed and accurate data for adjusting process parameters during production, enabling operators to make targeted adjustments to equipment parameters or processing procedures, effectively controlling copper foil warpage at its source. Attached Figure Description

[0031] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings:

[0032] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present invention;

[0033] Figure 2 This is a schematic diagram of the internal structure of an embodiment of the present invention;

[0034] Figure 3 This is a schematic diagram of the overall structure of the bottom detection component according to an embodiment of the present invention;

[0035] Figure 4 This is a schematic diagram of the radial internal structure of the detection cylinder according to an embodiment of the present invention;

[0036] Figure 5 This is a schematic diagram of the axial internal structure of the detection cylinder according to an embodiment of the present invention.

[0037] In the diagram: 1. Reaction tank; 101. Anode electrode plate; 102. Cathode roller; 103. Motor 1; 2. Processing assembly; 201. Support; 202. Adjusting roller 1; 203. Belt drive mechanism; 204. Processing tank; 205. Washing tank; 206. Rotating roller; 207. Adjusting roller 2; 208. Detection roller 1; 3. Drying device; 301. Drying port; 4. Detection assembly; 401. Detection cover; 402. Light emitter; 403. 405. Slide rail; 404. Support base; 405. Detection roller two; 4051. Roller shaft; 4052. Detection cylinder; 4053. Air hole one; 4054. Detection groove; 4055. Fixing plate; 40551. Light output end; 40552. Light receiving end; 4056. Motor two; 4057. Sealing plate one; 4058. Detection roller three; 4059. Sealing plate two; 4060. Ventilation plate; 4061. Air hole two; 4062. Air pump. Detailed Implementation

[0038] The following detailed, non-limiting description of the technical solution of the present invention, in conjunction with preferred embodiments and accompanying drawings, is provided. Obviously, the described embodiments are merely some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0039] Please see Figure 1-5 The present invention provides a technical solution: an electrolytic copper foil warpage measuring device. This application produces copper foil by electrolyzing a copper sulfate solution in a reaction tank. The warpage of the copper foil is detected before it enters the surface treatment process after generation. If the detection is qualified, the surface of the copper foil is treated, then dried using a drying device, and finally the processed copper foil is wound up. The device includes a reaction tank 1, which has an arc-shaped bottom design for storing copper sulfate electrolyte.

[0040] like Figure 1 and Figure 2 As shown, an anode electrode plate 101 is fixedly installed at the bottom of the reaction tank 1, serving as the anode for the electrolytic reaction. Cathode rollers 102 are rotatably connected to the side walls of the reaction tank 1. The cathode rollers 102 are coaxially arranged with the anode electrode plate 101 and are located directly above it, ensuring that the radial distance between the anode electrode plate 101 and the cathode roller 102 is equal. Through the electrolytic reaction in the reaction tank 1, copper foil is deposited on the surface of the cathode roller 102.

[0041] A motor 103 is fixed to one side of the outer wall of the reaction tank 1. The output end of the motor 103 is fixed to the roller shaft of the cathode roller 102 and is used to drive the cathode roller 102 to rotate.

[0042] A processing component 2 is provided on one side of the reaction tank 1. The processing component 2 is used to perform surface treatment on copper foil. The processing component 2 includes a support 201. An adjusting roller 202 is rotatably connected to the side of the support 201 near the reaction tank 1. The roller shaft of the adjusting roller 202 is connected to the side of the cathode roller 102 away from the motor 103 via a belt drive mechanism 203.

[0043] Furthermore, the outer diameter ratio of the cathode roller 102 to the adjusting roller 202 is 2:1; the outer diameter ratio of the pulley of the cathode roller 102 to the pulley of the adjusting roller 202 is 1:2, so as to achieve linear speed matching between the cathode roller 102 and the adjusting roller, and ensure that the copper foil is transferred from the cathode roller 102 to the adjusting roller at a constant speed, avoiding tension fluctuations or warping deformation due to speed differences.

[0044] The bottom of the support 201 is fixed with several washing tanks 205, and a treatment tank 204 is arranged between two washing tanks 205. The treatment tank 204 is fixed to the bottom of the support 201. The several treatment tanks 204 are arranged in the following process sequence: pickling tank, roughening tank, curing tank, ashing tank (including yellowing and blackening steps), and passivation tank. The washing tanks 205 are used to remove residual chemical reagents from the previous step.

[0045] Each of the washing tanks 205 and the treatment tank 204 is rotatably connected to a rotating roller 206, which is used to guide the copper foil to pass smoothly through the tank. An adjusting roller 207 is provided between the washing tank 205 and the treatment tank 204 to dynamically adjust the tension of the copper foil and ensure the uniformity of the surface treatment.

[0046] Furthermore, a detection roller 208 is provided on each washing pool 205. The detection roller 208 is located above the rotating roller 206 and is rotatably connected to the bracket 201. A laser displacement sensor is provided inside the detection roller 208. The built-in laser displacement sensor emits light and receives reflected signals. If the surface of the copper foil is uneven, causing light to be blocked or abnormally reflected, it is determined to be warped, triggering an alarm or adjusting the process parameters.

[0047] A drying device 3 is provided on the side of the processing component 2 away from the reaction tank 1. The drying device 3 includes a drying port 301. The copper foil is guided into the drying port 301 by the adjusting roller 207. A hot air circulation system is provided in the drying port 301. The drying temperature is adjustable from 80 to 120°C. The temperature is fed back and controlled in real time by a temperature sensor to avoid the copper foil from overheating and deforming.

[0048] The copper foil is dried by the drying device 3, and then wound up after drying.

[0049] After the copper foil's tension is adjusted by regulating roller 202, it enters the washing tank 205. The washing tank 205 performs preliminary cleaning of the copper foil's surface to remove residual impurities and any adhering electrolyte or other substances. Subsequently, the copper foil passes through regulating roller 207 for further tension adjustment, ensuring a stable state before entering the treatment tank 204. In the pickling tank, the oxide layer and other impurities on the copper foil's surface are dissolved and removed by acid, resulting in a cleaner surface and preparing it for subsequent roughening treatment.

[0050] After being pickled, the copper foil then enters a roughening bath. In the roughening bath, specific chemical agents and processes are used to create a tiny rough structure on the surface of the copper foil. This helps to improve the adhesion of the copper foil to other materials and enhance its performance in subsequent applications.

[0051] After the roughening process is completed, the copper foil enters the curing bath. The treatment in the curing bath makes the roughened surface structure more stable, preventing deformation or damage in subsequent processes.

[0052] The copper foil exiting the curing bath enters the ashing bath, which includes yellowing and blackening processes. Yellowing treatment forms a passivation film with specific properties on the copper foil surface, improving the copper foil's oxidation and corrosion resistance; the blackening process further optimizes the surface properties of the copper foil, making it more suitable for specific applications.

[0053] After being ashed, the copper foil enters a passivation bath. The chemicals in the passivation bath form a dense protective film on the surface of the copper foil, further enhancing its oxidation and corrosion resistance and extending its service life.

[0054] After each treatment in the treatment tank 204, the copper foil passes through the washing tank 205 again. Guided by the rotating rollers 206 in the washing tank 205, the residual treatment agent on the surface of the copper foil is cleaned to prevent the agent residue from adversely affecting subsequent processing or the performance of the copper foil. At the same time, the detection roller 208 located on the washing tank 205 detects the warpage of the copper foil in real time. Once warpage is detected, the system will trigger an alarm in time. The operator can adjust the process parameters as needed, such as adjusting the concentration and temperature of the agent in the treatment tank 204, or checking the tension adjustment of each regulating roller, to ensure that the quality of the copper foil meets the requirements.

[0055] After a series of surface treatments and tests, the copper foil leaves the processing unit 2 with stable tension and good flatness, and enters the subsequent drying device 3 for drying treatment to remove moisture from the surface of the copper foil, preparing it for the final winding process.

[0056] The support 201 is also fixed with a detection component 4. The detection component 4 is close to the first adjustment roller 202. The detection component 4 includes a detection cover 401. The detection cover 401 is arc-shaped. The end face of the detection cover 401 is parallel to the cross-section formed by the first adjustment roller 202 and the second adjustment roller 207, so that the copper foil is parallel to the detection component 4 during transportation.

[0057] like Figure 3 - Figure 5 As shown, a light emitter 402 is fixed at the midpoint of the inner wall of the detection cover 401. Two slide rails 403 are symmetrically fixed on both sides of the light emitter 402 along the inner wall of the detection cover 401. A support base 404 is slidably connected to each slide rail 403. A second detection roller 405 is rotatably connected to the support base 404. The position of the second detection roller 405 is adjusted by the slide rails 403 so that the copper foil and the detection component 4 are kept in parallel contact, and the tension of the copper foil is dynamically adjusted at the same time. The detection roller 405 includes a roller shaft 4051 and a detection cylinder 4052. The roller shaft 4051 is rotatably connected to the support base 404. The detection cylinder 4052 is located outside the roller shaft 4051 and is fixed. An exhaust hole 4053 is arrayed on the outer wall of the detection cylinder 4052. A detection groove 4054 is formed on the outer wall of the detection cylinder 4052 away from the exhaust hole 4053. Fixing plates 4055 are fixed on the inner periphery of the detection groove 4054 and form a seal with the detection cylinder 4052.

[0058] An air pump 4062 is fixed inside the detection cylinder 4052. The input end of the air pump 4062 is connected to part of the air hole 4053, and the output end of the air pump 4062 is located in the detection cylinder 4052 and blows air into it.

[0059] The fixing plates 4055 all extend toward the outer wall of the detection cylinder 4052. A second motor 4056 is fixed to one end of each fixing plate 4055. The second motor 4056 is arranged parallel to the roller shaft 4051. A third detection roller 4058 is fixed to the output end of the second motor 4056. The third detection roller 4058 is rotatably connected to the fixing plate 4055 on the side away from the second motor 4056. A sealing plate 4056 is provided on the outside of the second motor 4056 and is fixedly connected to the fixing plate 4055. 57. The sealing plate 4057 seals the motor 4056, and the motor 4056 is completely sealed by the sealing plate 4057 to prevent electrolyte or cleaning water from entering. The light output end 40551 and the light receiving end 40552 are respectively fixed on the outer walls of the fixing plates 4055 on both sides of the outer wall of the detection roller 4058. The light output end 40551 and the light receiving end 40552 are located on the copper foil running path to ensure that the light shines perpendicularly on the copper foil surface and receives the reflected signal.

[0060] When it is necessary to detect the warpage of the copper foil surface, the sealing plate 4057 is attached to the surface of the copper foil by sliding the support base 404. A rectangular beam of light is emitted through the light output end 40551. The emitted beam of light is received by the light receiving end 40552 on the fixed plate 4055 on the other side. If the copper foil surface warps, the warped part will obstruct the passage of the beam of light and will not be received by the light receiving end 40552. A light spot is formed on the part of the light receiving end 40552 where the light is irradiated. There is a clear light-dark separation between the concentrated part of the light spot and the part that does not receive light. The distance from the highest point of the separation line to the surface of the copper foil is the highest height of the copper foil warpage.

[0061] If the highest warping height of the copper foil is too high, the support base 404 is slid on the slide rail 403, and the detection roller 4058 is activated. The detection roller 4058 emits light that shines on the copper foil and is reflected back to the detection roller 4058. When the copper foil surface warps, the light shining on it is reflected to the inner surface of the detection cover 401. The higher the warping degree of the copper foil surface, the more dispersed the light spot on the inner surface of the detection cover 401, thereby obtaining the location of the area with higher warping degree of the copper foil surface. The factors causing the warping are determined by the warping area.

[0062] When the warping area is at the edge, it indicates that the rotation speed of the cathode roller 102 is too fast; when the warping area is in the center, it indicates that the concentration of the copper sulfate solution is too high or too low.

[0063] A second sealing plate 4059 and a ventilation plate 4060 are fixed between the inner walls of both sides of the detection cylinder 4052. The second sealing plate 4059 and the ventilation plate 4060 are fixed to the fixing plates 4055 on both sides. The ventilation plate 4060 is an L-shaped plate. One end of the ventilation plate 4060 has a second air hole 4061 and is fixed to the fixing plate 4055. The other end extends along the detection groove 4054 to the second sealing plate 4059 and is fixed to form a seal. The first air hole 4053 and the second air hole 4061 are connected through the internal cavity of the detection cylinder 4052 to form a compressed gas flow channel. The inlet of the channel is connected to an external air source. The air is blown onto the copper foil surface through the first air hole 4053 to remove residual electrolyte or impurities in the detection area. At the same time, the tension of the copper foil micro-area can be adjusted by local air pressure to assist in the detection of warpage.

[0064] Both support bases 404 are equipped with linear drives, and the two linear drives are set at the same frequency, so that the two support bases 404 move synchronously on the slide rail 403.

[0065] Working principle: The starting motor 103 drives the cathode roller 102 to rotate. Inside the reaction tank 1, the copper sulfate electrolyte undergoes an electrolytic reaction under the action of direct current. Copper ions gain electrons on the surface of the cathode roller 102 and are reduced and deposited, gradually forming a copper foil. As the cathode roller 102 continues to rotate, the copper foil continuously grows on the surface of the cathode roller 102 and moves away from the electrolyte area in the reaction tank 1 with its rotation.

[0066] After exiting the reaction tank 1, the copper foil first passes through the detection component 4 area near the reaction tank 1. While the copper foil passes through the washing tank 205, the laser displacement sensor emits light and receives the reflected signal. If the copper foil surface is uneven, causing light blockage or abnormal reflection, the laser displacement sensor detects a signal change and determines that the copper foil is warped. At this time, the system will promptly trigger an alarm. The operator can adjust process parameters based on the alarm information, such as adjusting the reagent concentration and temperature in the treatment tank 204, or checking the tension adjustment of each regulating roller, to address the warping problem promptly and ensure that the copper foil quality meets requirements. Simultaneously, more detailed warping detection and analysis can also be performed in the detection component 4 area. When further detection of the copper foil surface warping is required, the sliding support 404 causes the sealing plate 4057 to adhere to the surface of the copper foil, emitting a rectangularly distributed light beam through the light output end 40551. The light beam is received by the light receiving end 40552 on the fixed plate 4055 on the other side. If the copper foil surface warps, the warped portion will obstruct the passage of the wire bundle, forming a light spot on the light receiving end 40552. By analyzing the light spot, the maximum height of the copper foil warping can be determined. If the warping height is too high, the sliding support 404 is assisted and the detection roller 4058 is activated. The detection roller 4058 emits light that shines on the copper foil and is reflected back onto the detection roller 4058. Based on the dispersion of the light spot reflected onto the inner surface of the detection cover 401 when the copper foil surface warps, the location of the area with high warping can be determined. Furthermore, the cause of the warping can be identified by analyzing the warped area. If the warped area is at the edge, it indicates that the rotation speed of the cathode roller 102 is too fast; if the warped area is in the center, it indicates that the concentration of the copper sulfate solution is too high or too low, allowing for targeted adjustments to equipment parameters or processing techniques.

[0067] Vent 4053 and vent 4061 are connected through the internal cavity of the detection cylinder 4052, forming a compressed gas flow channel. By activating the air pump 4062, during the detection process, residual electrolyte or impurities in the detection area are removed by blowing through vent 4053 onto the copper foil surface, ensuring the accuracy of the detection results. Simultaneously, the tension in the micro-area of ​​the copper foil can be adjusted by local air pressure to assist in warpage detection, making the detection process more stable and reliable.

[0068] Finally, after a series of surface treatments and inspections, the copper foil leaves the processing assembly 2 with stable tension and good flatness, and is guided into the drying port 301 of the drying device 3 by the adjusting roller 207. The drying port 301 is equipped with a hot air circulation system, and the drying temperature is adjustable within a range of 80-120℃. A temperature sensor provides real-time feedback on the drying temperature and controls the hot air circulation system to ensure stable drying temperature, prevent overheating and deformation of the copper foil, and effectively remove moisture from the surface of the copper foil.

[0069] After being dried by the drying device 3, the copper foil has a dry surface and stable quality. Finally, it enters the winding process and is wound into a roll of finished product, which is convenient for storage and transportation, thus completing the entire production process of electrolytic copper foil.

[0070] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this invention, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0071] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features, and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A device for measuring the warpage of electrolytic copper foil, comprising a reaction cell (1), characterized in that: The reaction tank (1) has an arc-shaped bottom and stores copper sulfate electrolyte inside. An anode electrode plate (101) is fixedly installed at the bottom, and cathode rollers (102) are rotatably connected to the side walls on both sides. The cathode rollers (102) are coaxially arranged with the anode electrode plate (101) and located directly above it. A motor (103) is fixed on one side of the outer wall of the reaction tank (1), and the output end of the motor (103) is fixed to the roller shaft of the cathode roller (102). The processing component (2) is located on one side of the reaction tank (1) and includes a support (201). An adjusting roller (202) is rotatably connected to the side of the support (201) near the reaction tank (1). The roller shaft of the adjusting roller (202) is connected to the side of the cathode roller (102) away from the motor (103) via a belt drive mechanism (203). The detection assembly (4) is fixed on the bracket (201) and close to the adjusting roller (202). It includes an arc-shaped detection cover (401). A light emitter (402) is fixed at the midpoint of the inner wall of the detection cover (401). Slide rails (403) are symmetrically fixed on both sides of the light emitter (402) along the inner wall of the detection cover (401). A support seat (404) is slidably connected on each slide rail (403). The detection roller (405) is rotatably connected on the support seat (404). The second detection roller (405) includes a roller shaft (4051) and a detection cylinder (4052). An exhaust hole (4053) is arrayed on the outer wall of the detection cylinder (4052). A detection groove (4054) is provided on the side away from the exhaust hole (4053). A fixing plate (4055) is fixed on the inner wall of the detection groove (4054) and forms a seal with the detection cylinder (4052). An air pump (4062) is fixed inside the detection cylinder (4052). The input end of the air pump (4062) is connected to part of the air hole (4053), and the output end blows air into the detection cylinder (4052). One end of the fixed plate (4055) is fixed with a motor two (4056), and the output end of the motor two (4056) is fixed with a detection roller three (4058). The detection roller three (4058) is rotatably connected to the fixed plate (4055) on the side away from the motor two (4056). A sealing plate (4057) is provided on the outside of motor 2 (4056) and is fixedly connected to the fixing plate (4055). The sealing plate (4057) completely covers and seals motor 2 (4056). The light output end (40551) and the light receiving end (40552) are respectively fixed on the outer walls of the fixing plates (4055) on both sides of the outer wall of the detection roller three (4058). A sealing plate (4059) and a ventilation plate (4060) are respectively fixed between the inner walls on both sides of the detection cylinder (4052). The ventilation plate (4060) is an L-shaped plate with an air hole (4061) at one end and fixed to the fixing plate (4055). The other end extends along the detection groove (4054) to the sealing plate (4059) and is fixed to form a seal. The first vent (4053) and the second vent (4061) are connected through the internal cavity of the detection cylinder (4052) to form a compressed gas flow channel.

2. The electrolytic copper foil warpage measuring device according to claim 1, characterized in that: The bottom of the support (201) of the processing component (2) is fixed with several washing tanks (205) and processing tanks (204). The processing tanks (204) are, in the following process order, pickling tank, roughening tank, curing tank, ashing tank and passivation tank. Each washing tank (205) and treatment tank (204) is rotatably connected with a rotating roller (206), and an adjusting roller (207) is provided between the washing tank (205) and the treatment tank (204).

3. The electrolytic copper foil warpage measuring device according to claim 2, characterized in that: Each washing pool (205) is equipped with a detection roller (208), which is located above the rotating roller (206) and is rotatably connected to the bracket (201). A laser displacement sensor is installed inside the detection roller (208).

4. The electrolytic copper foil warpage measuring device according to claim 3, characterized in that: The drying device (3) is located on the side of the processing component (2) away from the reaction tank (1), including a drying port (301). A hot air circulation system is provided in the drying port (301), and the drying temperature is adjustable in the range of 80~120℃.

5. The electrolytic copper foil warpage measuring device according to claim 4, characterized in that: Both of the support bases (404) are equipped with linear drives, and the two linear drives are set at the same frequency, so that the two support bases (404) move synchronously on the two slide rails (403).

6. The electrolytic copper foil warpage measuring device according to claim 5, characterized in that: The ratio of the outer diameter of the cathode roller (102) to that of the regulating roller (202) is 2:1; The ratio of the outer diameter of the pulley of the cathode roller (102) to that of the pulley of the regulating roller (202) is 1:2, so as to achieve linear velocity matching.

7. A method for detecting the warpage of electrolytic copper foil according to any one of claims 1-6, characterized in that: When it is necessary to detect the warpage of the copper foil surface, the sealing plate (4057) is attached to the surface of the copper foil by sliding support (404). A rectangular beam of light is emitted through the light output end (40551). The emitted beam of light is received by the light receiving end (40552) on the fixed plate (4055) on the other side. If the copper foil surface warps, the warped part will block the passage of the beam of light and thus will not be received by the light receiving end (40552). A light spot is formed on the part of the light receiving end (40552) where the light is irradiated. There is a clear light-dark separation between the part where the light spot is concentrated and the part where no light is received. The distance from the highest point of the separation line to the surface of the copper foil is the highest height of the copper foil warpage.

8. The detection method of the electrolytic copper foil warpage measuring device according to claim 7, characterized in that: If the highest warping height of the copper foil is too high, the support base (404) is slid on the slide rail (403), and the detection roller three (4058) is activated. The detection roller three (4058) emits light that shines on the copper foil and is reflected back to the detection roller three (4058). When the copper foil surface warps, the light shining on it is reflected to the inner surface of the detection cover (401). The higher the warping degree of the copper foil surface, the more dispersed the light spot on the inner surface of the detection cover (401) becomes, thereby obtaining the location of the area with higher warping degree of the copper foil surface. The factors causing the warping are determined by the warping area.

9. The detection method of the electrolytic copper foil warpage measuring device according to claim 8, characterized in that: When the warped area is at the edge, it indicates that the rotation speed of the cathode roller (102) is too fast; when the warped area is in the center, it indicates that the concentration of the copper sulfate solution is too high or too low.

Images