A visual inspection semiconductor substrate production conveying device

Abstract

The application relates to the technical field of semiconductor substrate conveying devices, in particular to a visual detection semiconductor substrate production conveying device which comprises a main body mechanism, the main body mechanism comprises a rack, the outer surface of the rack is transmissionally connected with a conveying chain plate, two protective plates are fixedly installed on the inner wall of the rack, and a chain plate cleaning mechanism is arranged above the rack; the chain plate cleaning mechanism comprises a chain plate cleaning unit, the chain plate cleaning mechanism further comprises a cleaning wastewater recovery unit, the chain plate cleaning unit can be used to clean the inner circle and the outer circle of the conveying chain plate, the single-head nozzle and the double-head nozzle can be telescoped, the distance between the double-head nozzle and the conveying chain plate can be adjusted, the single-head nozzle can be rotated by using a double-shaft independent motor, on the basis, the single-head nozzle and the double-head nozzle can move in the left and right directions, the single-head nozzle and the double-head nozzle can comprehensively clean the inner and outer circles of the conveying chain plate, and the cleaning is further assisted by spraying liquid and a cleaning roller.

Description

Technical Field

[0001] This invention relates to the field of semiconductor substrate transport device technology, and more specifically, to a transport device for semiconductor substrate production using visual inspection. Background Technology

[0002] Semiconductor substrates are the foundation of semiconductor device manufacturing. They are the base materials that support the fabrication of semiconductor devices, provide physical support and electrical connections, and play a crucial role in semiconductor performance. During the production process, semiconductor substrates undergo heat treatment, followed by ultrasonic cleaning. After heat treatment, visual inspection is usually used between the substrate and the ultrasonic cleaner. Visual inspection can qualitatively and even quantitatively assess the distribution and type of contaminants, providing a basis for setting the parameters of the ultrasonic cleaner, ensuring targeted cleaning, and improving the cleanliness of the substrate after cleaning. The conveying device between the semiconductor substrate after heat treatment and the ultrasonic cleaner needs to balance high-temperature cooling and cleanliness maintenance, and a high-temperature chain conveyor is often used.

[0003] Semiconductor substrate manufacturing requires a certain level of environmental cleanliness. During the conveying process, the cleanliness of the chain conveyor itself directly affects the quality of the semiconductor substrate after heat treatment. The gaps and grooves on the surface of the chain conveyor are prone to accumulating impurities and dust. However, existing chain conveyors are not convenient for automatic cleaning of the chain plates. As a result, the cleanliness of the chain conveyor depends on the manual cleaning time, which is labor-intensive and inconvenient. This affects the effectiveness of ultrasonic cleaning and the yield rate of the substrate.

[0004] Based on this, the present invention discloses a conveying device for semiconductor substrate production using visual inspection. Summary of the Invention

[0005] To address the problem mentioned in the background art that existing chain conveyors are inconvenient for automatic cleaning of the chain plates, resulting in the need for manual cleaning time to determine the cleanliness of the chain conveyor, the present invention provides a conveying device for semiconductor substrate production for visual inspection, which includes a main body structure, the main body structure including a frame, a conveyor chain plate being drivenly connected to the outer surface of the frame, two protective plates being fixedly installed on the inner wall of the frame, and a chain plate cleaning mechanism being provided above the frame;

[0006] Since the conveyor chain plate has an outer ring and an inner ring and has a certain length, in order to move and clean on the conveyor chain plate, this technical solution uses a cleaning wastewater recovery unit for moving and cleaning.

[0007] The chain plate cleaning mechanism includes a chain plate cleaning unit and a cleaning wastewater recovery unit. The chain plate cleaning unit includes a support frame, the back of which is fixedly connected to the front of the frame. A drive motor is fixedly installed on the left side of the support frame, and a lead screw is fixedly installed at the output end of the drive motor. The outer surface of the lead screw is rotatably connected to the inner wall of the support frame. A matching nut is threaded onto the outer surface of the lead screw, and a movable block is fixedly installed on the outer surface of the matching nut. The outer surface of the movable block contacts the inner wall of the support frame, and mounting shells are fixedly installed on the upper and lower surfaces of the movable block.

[0008] Based on this, after moving on the conveyor chain plate, in order to thoroughly clean the inner and outer rings of the conveyor chain plate;

[0009] As a further improvement to this technical solution, a small water pump is fixedly installed on the front of the moving block. The input pipe of the small water pump is fixedly connected to a water inlet hose, and the output pipe of the small water pump is fixedly connected to a U-shaped pipe. The U-shaped pipe is fixedly installed on the inner wall of the mounting housing. Several identical recovery pipes are fixedly connected inside the U-shaped pipe. A telescopic pipe is slidably connected inside each recovery pipe. A double-headed nozzle is fixedly connected inside each telescopic pipe. An electric push rod is fixedly installed on the right side of each mounting housing. A connecting plate is fixedly installed at the telescopic end of each electric push rod. The inner wall of each connecting plate is fixedly connected to the outer surface of the telescopic pipe. A bent pipe is fixedly connected inside the U-shaped pipe. An L-shaped pipe is fixedly connected inside the bent pipe. A rotating pipe is rotatably connected to the inner wall of the L-shaped pipe. Several identical single-headed nozzles are fixedly connected inside the rotating pipe. A dual-axis independent motor is fixedly installed at the rear end of the rotating pipe.

[0010] Because there are gaps and grooves on the surface of the conveyor chain plate, in order to perform a deep and thorough cleaning of the gaps and grooves of the conveyor chain plate;

[0011] As a further improvement to this technical solution, two cleaning rollers are arranged below the rotating tube, and a conveyor chain is located between the cleaning rollers. A connecting shaft is fixedly installed at one end of each cleaning roller. A single-groove pulley is fixedly installed on the outer surface of one of the connecting shafts and the output end of the dual-axis independent motor. A double-groove pulley is fixedly installed on the outer surface of the other connecting shaft. A synchronous belt is driven to the outer surface of each single-groove pulley. The inner ring of each synchronous belt is driven to the outer surface of the double-groove pulley. A shaft seat slide plate is rotatably connected to the outer surfaces of the two connecting shafts. A movable opening is provided on the back of the frame. The outer surface of the shaft seat slide plate is slidably connected to the inside of the movable opening.

[0012] Since the rotating tube needs supporting components, in order to support the stable rotation of the rotating tube and the stability of the L-shaped tube;

[0013] As a further improvement to this technical solution, a fixing plate is snapped onto the outer surface of the L-shaped tube, and the outer surface of the rotating tube is rotatably connected to the inner wall of the fixing plate.

[0014] Based on this, the rotating tube needs to rotate inside the L-shaped tube in order to reduce the possibility of leakage when the rotating tube and the L-shaped tube are fitted together;

[0015] As a further improvement to this technical solution, a sealing ring is fixedly installed on the outer surface of the rotating tube, and the outer surface of the sealing ring is rotatably connected to the inner wall of the L-shaped tube.

[0016] Since the conveyor chain plate is relatively damp after being washed with water, it is easy to attract dust and other substances. Therefore, it is necessary to keep the surface of the conveyor chain plate dry.

[0017] As a further improvement to this technical solution, a sealing cover is fixedly installed on the upper surface of the frame, and several identical drying fans are fixedly installed on the inner top wall of the sealing cover.

[0018] In another solution, since cleaning liquid needs to be provided to the chain plate cleaning unit, the waste liquid after cleaning also needs to be recycled and reused. In order to provide cleaning liquid and recycle waste liquid;

[0019] As a further improvement to this technical solution, the cleaning wastewater recovery unit includes a liquid container, the bottom of which is fixedly connected to the inner wall of the frame, a drain pipe is fixedly connected to the inside of the liquid container, the inside of the drain pipe is fixedly connected to the inside of the inlet hose, an inclined guide plate is fixedly installed on the inner wall of the liquid container, a movable container is slidably connected to the inside of the liquid container, the inside of the movable container is connected to the inside of the drain pipe, an inlet filter screen is fixedly installed on the inner wall of the movable container, a filter membrane is fixedly installed on the inner wall of the movable container, and two closed side covers are rotatably connected to the inner wall of the liquid container.

[0020] In order to ensure that the side cover and the sealing cover can be closed, the conveyor chain plate can be cleaned in a sealed space;

[0021] As a further improvement to this technical solution, a magnetic plate is fixedly installed on the upper surface of each of the closed side covers, and two adsorption iron plates are fixedly installed on the bottom surface of the sealing cover.

[0022] Based on this, it is necessary to seal parts such as the sealing cap and liquid container to prevent dust from entering the sealed space;

[0023] As a further improvement to this technical solution, two telescopic baffles are fixedly installed on the inner wall of the sealing cover, the inner wall of the moving port, and the inner wall of the liquid container. The outer surface of each mounting shell and the outer surface of the bend are fixedly connected to the inner wall of the telescopic baffle.

[0024] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0025] 1. In this kind of visual inspection semiconductor substrate production conveying device, the inner and outer rings of the conveyor chain can be cleaned by using a chain cleaning unit. Through single-head and double-head nozzles, the double-head nozzle can extend and retract to adjust the distance from the conveyor chain, while the single-head nozzle can rotate using a dual-axis independent motor. On this basis, both the single-head and double-head nozzles can move in the left and right directions to thoroughly clean the inner and outer rings of the conveyor chain. Furthermore, the sprayed liquid, in conjunction with the cleaning roller, can achieve deep cleaning of the gaps and grooves of the conveyor chain, saving cleaning time and manpower.

[0026] 2. In this kind of semiconductor substrate production conveying device for visual inspection, a cleaning wastewater recovery unit can be used to provide liquid and recover wastewater for the chain plate cleaning unit. The wastewater is collected centrally by a moving container at the bottom of the conveyor chain plate, and impurities in the wastewater are filtered by a filter membrane and an inlet filter screen, which can provide clean water for the chain plate cleaning unit and ensure the cleaning effect of the chain plate cleaning unit on the conveyor chain plate. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0028] Figure 2 This is a schematic diagram showing the disassembled frame of the present invention;

[0029] Figure 3 This is a schematic diagram of the mounting housing of the present invention;

[0030] Figure 4 This is a schematic diagram of the structure of the spiral tube of the present invention;

[0031] Figure 5 This is a schematic diagram of the movable port structure of the present invention;

[0032] Figure 6 This is a schematic diagram of the structure of the cleaning roller of the present invention;

[0033] Figure 7 This is a schematic diagram of the connecting plate of the present invention;

[0034] Figure 8 This is a schematic diagram of the rotating tube of the present invention;

[0035] Figure 9 This is a cross-sectional view of the bearing slide plate of the present invention;

[0036] Figure 10 This is a cross-sectional view of the liquid container and inclined guide plate of the present invention;

[0037] Figure 11 This is a schematic diagram of the sealing cap flipping up according to the present invention.

[0038] The meanings of the labels in the diagram are as follows:

[0039] 1. Main structure; 11. Frame; 12. Conveyor chain; 13. Protective plate; 2. Chain cleaning mechanism;

[0040] 21. Chain plate cleaning unit; 2101. Support frame; 2102. Lead screw; 2103. Drive motor; 2104. Moving block; 2105. Water inlet hose; 2106. Mounting housing; 2107. U-shaped pipe; 2108. Bend; 2109. Matching nut; 2110. Small water pump; 2111. Moving port; 2112. Shaft seat slide plate; 2113. Dual-shaft independent motor; 2114. Connecting shaft; 2115. 2116. Cleaning roller; 2117. Rotating tube; 2118. L-shaped tube; 2119. Fixing plate; 2110. Electric push rod; 2121. Connecting plate; 2122. Telescopic tube; 2123. Recycling tube; 2124. Double-headed nozzle; 2125. Single-headed nozzle; 2126. Sealing ring; 2127. Synchronous belt; 2128. Double-groove pulley; 2129. Single-groove pulley; 2120. Sealing cover; 2130. Drying fan;

[0041] 22. Wastewater recovery unit; 2201. Liquid container; 2202. Drain pipe; 2203. Magnetic plate; 2204. Sealed side cover; 2205. Movable container; 2206. Inlet filter screen; 2207. Filter membrane; 2208. Inclined guide plate; 2209. Adsorption iron plate; 2210. Telescopic baffle. Detailed Implementation

[0042] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0043] Existing chain conveyors are not convenient for automatic cleaning of the chain plates, so the cleanliness of the chain conveyor depends on the time required for manual cleaning, which is a waste of manpower and not convenient to clean.

[0044] Therefore, the present invention provides a conveying device for semiconductor substrate production using visual inspection, see [link to related document]. Figure 1 As shown, it includes a main body 1, which includes a frame 11. A conveyor chain plate 12 is connected to the outer surface of the frame 11. Two protective plates 13 are fixedly installed on the inner wall of the frame 11. A chain plate cleaning mechanism 2 is provided above the frame 11.

[0045] For details on the chain plate cleaning unit 21, please refer to... Figures 1-5 As shown, in order to thoroughly clean the conveyor chain plate 12, it is necessary to be able to move and clean it when the conveyor chain plate 12 is stationary. To meet the length requirements of the conveyor chain plate 12, it must first have the function of movement. The chain plate cleaning mechanism 2 includes a chain plate cleaning unit 21 and a cleaning wastewater recovery unit 22. The chain plate cleaning unit 21 includes a support frame 2101. The back of the support frame 2101 is fixedly connected to the front of the frame 11. A drive motor 2103 is fixedly installed on the left side of the support frame 2101. A lead screw 2102 is fixedly installed at the output end of the drive motor 2103. The outer surface of the lead screw 2102 is rotatably connected to the inner wall of the support frame 2101. A matching nut 2109 is threadedly connected to the outer surface of the lead screw 2102. A moving block 2104 is fixedly installed on the outer surface of the matching nut 2109. The outer surface of the moving block 2104 is in contact with the inner wall of the support frame 2101. An installation shell 2106 is fixedly installed on the upper and lower surfaces of the moving block 2104.

[0046] During operation, the drive motor 2103 is started, which drives the lead screw 2102 to rotate. The lead screw 2102 transmits power to the matching nut 2109, driving the matching nut 2109 to move linearly, which in turn drives the moving block 2104 to move. The moving block 2104 moves left and right, thereby changing the cleaning position on the surface of the conveyor chain plate 12.

[0047] Further, see Figures 6-9As shown, based on the ability to change the cleaning position, a comprehensive cleaning of the inner and outer rings of the conveyor chain plate 12 is required to ensure the cleanliness of the conveyor chain plate 12. A small water pump 2110 is fixedly installed on the front of the moving block 2104. The input pipe of the small water pump 2110 is fixedly connected to the inlet hose 2105, and the output pipe of the small water pump 2110 is fixedly connected to the loop pipe 2107. The loop pipe 2107 is fixedly installed on the inner wall of the mounting housing 2106. Several identical recovery pipes 2122 are fixedly connected inside the loop pipe 2107. Each recovery pipe 2122 is slidably connected to the telescopic pipe 2121 inside, and each telescopic pipe 2121 is fixedly connected to... The dual-head nozzle 2123 has an electric push rod 2119 fixedly installed on the right side of each mounting housing 2106. A connecting plate 2120 is fixedly installed on the telescopic end of each electric push rod 2119. The inner wall of each connecting plate 2120 is fixedly connected to the outer surface of the telescopic tube 2121. The inside of the U-shaped tube 2107 is fixedly connected to the bend tube 2108. The inside of the bend tube 2108 is fixedly connected to the L-shaped tube 2117. The inner wall of the L-shaped tube 2117 is rotatably connected to the rotating tube 2116. Several identical single-head nozzles 2124 are fixedly connected inside the rotating tube 2116. A dual-axis independent motor 2113 is fixedly installed at the rear end of the rotating tube 2116.

[0048] During operation, the small water pump 2110 is activated to extract the cleaning liquid and input it into the loop pipe 2107. The liquid in the loop pipe 2107 is first supplied to the recovery pipe 2122, and then input into the telescopic pipe 2121, where it is sprayed out by the double-headed nozzles 2123. The double-headed nozzles 2123 are located on the outer ring of the conveyor chain plate 12, cleaning it from above and below the conveyor chain plate 12. When the cleaning distance between the double-headed nozzles 2123 and the conveyor chain plate 12 is large, the electric push rod 2119 can be activated. The electric push rod 2119 drives the telescopic pipe 2121 through the connecting plate 2120. 121 is recycled into the recycling pipe 2122 or the telescopic pipe 2121 extends out of the recycling pipe 2122. The cleaning distance is adjusted. As the liquid flows in the U-shaped pipe 2107, the liquid enters the L-shaped pipe 2117 through the bend pipe 2108, and then enters the rotating pipe 2116 through the L-shaped pipe 2117. Finally, it is sprayed out by the single-head nozzle 2124. The liquid sprayed by the single-head nozzle 2124 cleans the inner ring of the conveyor chain plate 12. In order to facilitate cleaning of the bending part of the conveyor chain plate 12 or the upper and lower sides of the inner ring, the dual-shaft independent motor 2113 can be started to drive the rotating pipe 2116 to rotate, and drive the single-head nozzle 2124 to clean the conveyor chain plate 12 in a rotating manner.

[0049] Further, see Figure 6 , Figure 9 and Figure 11As shown, during the cleaning process of the conveyor chain plate 12, in order to clean the gaps or grooves of the conveyor chain plate 12, two cleaning rollers 2115 are arranged below the rotating tube 2116, and the conveyor chain plate 12 is located between the cleaning rollers 2115. A connecting shaft 2114 is fixedly installed at one end of each cleaning roller 2115. A single groove pulley 2128 is fixedly installed on the outer surface of one connecting shaft 2114 and the output end of the dual-shaft independent motor 2113. A double groove pulley 2127 is fixedly installed on the outer surface of the other connecting shaft 2114. A synchronous belt 2126 is drivenly connected to the outer surface of each single groove pulley 2128. The inner ring of each synchronous belt 2126 is drivenly connected to the outer surface of the double groove pulley 2127. The outer surfaces of the two connecting shafts 2114 are rotatably connected to the shaft seat slide plate 2112. A moving port 2111 is opened on the back of the frame 11. The outer surface of the shaft seat slide plate 2112 is slidably connected to the inside of the moving port 2111.

[0050] During operation, the other shaft of the dual-shaft independent motor 2113 is started, and synchronous transmission is carried out through the single-groove pulley 2128, the double-groove pulley 2127 and the synchronous belt 2126, which drives the connecting shaft 2114 to rotate. The connecting shaft 2114 drives the cleaning roller 2115 to rotate, and the cleaning roller 2115, together with the cleaning liquid, cleans the gaps and grooves of the conveyor chain plate 12.

[0051] The outer surface of the L-shaped tube 2117 is fitted with a fixing plate 2118, and the outer surface of the rotating tube 2116 is rotatably connected to the inner wall of the fixing plate 2118. The fixing plate 2118 ensures the stability of the L-shaped tube 2117 and supports the stable rotation of the rotating tube 2116, providing support for the L-shaped tube 2117 and the rotating tube 2116.

[0052] Among them, a sealing ring 2125 is fixedly installed on the outer surface of the rotating tube 2116. The outer surface of the sealing ring 2125 is rotatably connected to the inner wall of the L-shaped tube 2117. Through the sealing ring 2125, both the rotating tube 2116 and the L-shaped tube 2117 are used to transport liquid. In order to avoid leakage at the connection, the sealing ring 2125 plays the role of sealing the connection and can support the rotating tube 2116 to rotate.

[0053] The upper surface of the frame 11 is fixedly equipped with a sealing cover 2129, and several identical drying fans 2130 are fixedly installed on the inner top wall of the sealing cover 2129. Through the sealing cover 2129 and the drying fans 2130, the sealing cover 2129 seals the conveyor chain plate 12, reducing the possibility of dust entering the conveyor chain plate 12. After the conveyor chain plate 12 is cleaned by liquid, the drying fans 2130 dry the conveyor chain plate 12, which can prevent dust from adhering to the conveyor chain plate 12 to a certain extent.

[0054] For details regarding the cleaning wastewater recovery unit 22, please refer to [link / reference]. Figures 10-11 As shown, in order to provide cleaning liquid to the chain plate cleaning unit 21 and to prevent wastewater splashing or debris from being discharged randomly after cleaning the conveyor chain plate 12, the cleaning wastewater recovery unit 22 includes a liquid container 2201. The bottom surface of the liquid container 2201 is fixedly connected to the inner wall of the frame 11. A drain pipe 2202 is fixedly connected inside the liquid container 2201. The inside of the drain pipe 2202 is fixedly connected to the inside of the water inlet hose 2105. An inclined guide plate 2208 is fixedly installed on the inner wall of the liquid container 2201. A movable container 2205 is slidably connected inside the liquid container 2201. The inside of the movable container 2205 is connected to the inside of the drain pipe 2202. A water inlet filter screen 2206 is fixedly installed on the inner wall of the movable container 2205. A filter membrane 2207 is fixedly installed on the inner wall of the movable container 2205. Two closed side covers 2204 are rotatably connected to the inner wall of the liquid container 2201.

[0055] During operation, the wastewater after cleaning flows downward through the conveyor chain 12 and is first discharged onto the inclined guide plate 2208. The inclined guide plate 2208 guides the wastewater into the moving container 2205. As the wastewater accumulates, it is first filtered through the filter membrane 2207. The filter membrane 2207 can be made of membrane material with high corrosion resistance, high precision filtration and anti-fouling ability. After being filtered by the filter membrane 2207, the wastewater is further filtered through the inlet filter screen 2206 to remove impurities. The cleaner water is then fed to the other side of the inlet filter screen 2206 and supplied to the chain cleaning unit 21 through the drain pipe 2202. When it is necessary to replace or clean the filter membrane 2207 and the inlet filter screen 2206, the moving container 2205 can be directly pulled out from the liquid container 2201. During the cleaning process of the conveyor chain 12, the closed side cover 2204 can be rotated. The closed side cover 2204 and the sealing cover 2129 form a sealed space to further prevent dust from entering.

[0056] Each closed side cover 2204 has a magnet plate 2203 fixedly installed on its upper surface, and two adsorption iron plates 2209 are fixedly installed on the bottom surface of the sealing cover 2129. Through the cooperation of the magnet plate 2203 and the adsorption iron plates 2209, the closed side cover 2204 can be fixed on the sealing cover 2129.

[0057] Two telescopic baffles 2210 are fixedly installed on the inner wall of the sealing cover 2129, the inner wall of the moving port 2111, and the inner wall of the liquid container 2201. The outer surface of each mounting shell 2106 and the outer surface of the bend 2108 are fixedly connected to the inner wall of the telescopic baffle 2210. Due to the existence of transmission space, there are exposed parts of the sealing cover 2129 and the moving port 2111 through the telescopic baffle 2210. The telescopic baffle 2210 can seal them and can extend and retract with the moving device to ensure the normal movement of the moving device in the sealing cover 2129 and the moving port 2111.

[0058] In summary, this solution, through the cooperation of the chain plate cleaning unit 21 and the cleaning wastewater recovery unit 22, can thoroughly clean the conveyor chain plate 12, making cleaning more convenient. This effectively solves the problem that existing chain plate conveyors are inconvenient to automatically clean the chain plates, resulting in the need to determine the cleanliness of the chain plate conveyor based on the time required for cleaning of dirt or dust.

[0059] Working principle: During the transport of the semiconductor substrate, after heat treatment and visual inspection, the semiconductor substrate enters the conveyor chain 12, which transports it to the ultrasonic cleaning section. Due to the working environment and the heat treatment of the semiconductor substrate, debris or dust accumulates on the conveyor chain 12. To maintain the cleanliness of the conveyor chain 12, a small water pump 2110 is activated. The small water pump 2110 draws out liquid and supplies it to the loop tube 2107, which further cleans the outer ring of the conveyor chain 12 using a dual-head nozzle 2123. The single-head nozzle... The nozzle 2124 cleans the inner ring of the conveyor chain plate 12. The single nozzle 2124 can rotate for cleaning during use. During the cleaning process of the single nozzle 2124 and the double nozzle 2123, the cleaning roller 2115 is rotated. The cleaning roller 2115 works with the liquid to clean the groove of the conveyor chain plate 12. The waste liquid generated during cleaning enters the mobile container 2205. It is filtered by the filter membrane 2207 in the mobile container 2205. The relatively clean water is stored in the mobile container 2205 and then used to clean the conveyor chain plate 12 again.

[0060] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0061] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A conveying device for semiconductor substrate production with visual inspection, comprising a main body (1), characterized in that: The main body (1) includes a frame (11), a conveyor chain plate (12) is connected to the outer surface of the frame (11), two protective plates (13) are fixedly installed on the inner wall of the frame (11), and a chain plate cleaning mechanism (2) is provided above the frame (11). The chain plate cleaning mechanism (2) includes a chain plate cleaning unit (21) and a cleaning wastewater recovery unit (22). The chain plate cleaning unit (21) includes a support frame (2101). The back of the support frame (2101) is fixedly connected to the front of the frame (11). A drive motor (2103) is fixedly installed on the left side of the support frame (2101). A lead screw (2102) is fixedly installed at the output end of the drive motor (2103). The outer surface of the lead screw (2102) is rotatably connected to the inner wall of the support frame (2101). A matching nut (2109) is threaded onto the outer surface of the lead screw (2102). A moving block (2104) is fixedly installed on the outer surface of the matching nut (2109). The outer surface of the moving block (2104) is in contact with the inner wall of the support frame (2101). An installation shell (2106) is fixedly installed on the upper and lower surfaces of the moving block (2104). A small water pump (2110) is fixedly installed on the front of the moving block (2104). The input pipe of the small water pump (2110) is fixedly connected to a water inlet hose (2105). The output pipe of the small water pump (2110) is fixedly connected to a loop pipe (2107). The loop pipe (2107) is fixedly installed on the inner wall of the mounting housing (2106). Several identical recycling pipes (2122) are fixedly connected inside the loop pipe (2107). A telescopic pipe (2121) is slidably connected inside each recycling pipe (2122). A double-headed nozzle (2123) is fixedly connected inside each telescopic pipe (2121). The double-headed nozzle (2123) is located on the outer ring of the conveyor chain plate (12), and the double-headed nozzle (2123) cleans the conveyor chain plate (12) from above and below. The loop-shaped area enclosed by the loop-shaped tube (2107) is fixedly connected to a bend tube (2108). One end of the bend tube (2108) is fixedly connected to an L-shaped tube (2117). One end of the inner wall of the L-shaped tube (2117) is rotatably connected to a rotating tube (2116). The rotating tube (2116) is fixedly connected to several identical single-head nozzles (2124). The single-head nozzles (2124) are located on the inner ring of the conveyor chain plate (12), and the single-head nozzles (2124) clean the upper and lower sides of the inner ring of the conveyor chain plate (12). A dual-axis independent motor (2113) is fixedly installed at the rear end of the rotating tube (2116). Two cleaning rollers (2115) are arranged below the rotating tube (2116), and the conveyor chain plate (12) is located between the cleaning rollers (2115). Each cleaning roller... One end of each roller (2115) is fixedly mounted with a connecting shaft (2114). A single groove pulley (2128) is fixedly mounted on the outer surface of one of the connecting shafts (2114) and the output end of the dual-axis independent motor (2113). A double groove pulley (2127) is fixedly mounted on the outer surface of the other connecting shaft (2114). A synchronous belt (2126) is driven to the outer surface of each single groove pulley (2128). The inner ring of each synchronous belt (2126) is driven to the outer surface of the double groove pulley (2127). The outer surfaces of the two connecting shafts (2114) are rotatably connected to a shaft seat slide plate (2112). A movable opening (2111) is opened on the back of the frame (11). The outer surface of the shaft seat slide plate (2112) is slidably connected to the inside of the movable opening (2111).

2. The conveying device for semiconductor substrate production with visual inspection according to claim 1, characterized in that: An electric push rod (2119) is fixedly installed on the right side of each of the mounting housings (2106), and a connecting plate (2120) is fixedly installed on the telescopic end of each of the electric push rods (2119). The inner wall of each connecting plate (2120) is fixedly connected to the outer surface of the telescopic tube (2121).

3. The conveying device for semiconductor substrate production with visual inspection according to claim 1, characterized in that: The outer surface of the L-shaped tube (2117) is fitted with a fixing plate (2118), and the outer surface of the rotating tube (2116) is rotatably connected to the inner wall of the fixing plate (2118).

4. The conveying device for semiconductor substrate production with visual inspection according to claim 1, characterized in that: A sealing ring (2125) is fixedly installed on the outer surface of the rotating tube (2116), and the outer surface of the sealing ring (2125) is rotatably connected to the inner wall of the L-shaped tube (2117).

5. The conveying device for semiconductor substrate production with visual inspection according to claim 1, characterized in that: A sealing cover (2129) is fixedly installed on the upper surface of the frame (11), and several identical drying fans (2130) are fixedly installed on the inner top wall of the sealing cover (2129).

6. The conveying apparatus for semiconductor substrate production with visual inspection according to claim 5, characterized in that: The cleaning wastewater recovery unit (22) includes a liquid container (2201), the bottom surface of which is fixedly connected to the inner wall of the frame (11), a drain pipe (2202) is fixedly connected inside the liquid container (2201), the inside of which is fixedly connected to the inside of the inlet hose (2105), an inclined guide plate (2208) is fixedly installed on the inner wall of the liquid container (2201), a movable container (2205) is slidably connected inside the liquid container (2201), the inside of which is connected to the inside of the drain pipe (2202), an inlet filter screen (2206) is fixedly installed on the inner wall of the movable container (2205), a filter membrane (2207) is fixedly installed on the inner wall of the movable container (2205), and two closed side covers (2204) are rotatably connected to the inner wall of the liquid container (2201).

7. The conveying apparatus for semiconductor substrate production with visual inspection according to claim 6, characterized in that: A magnet plate (2203) is fixedly installed on the upper surface of each of the closed side covers (2204), and two adsorption iron plates (2209) are fixedly installed on the bottom surface of the sealing cover (2129).

8. The conveying apparatus for semiconductor substrate production with visual inspection according to claim 6, characterized in that: The inner wall of the sealing cover (2129), the inner wall of the moving port (2111), and the inner wall of the liquid container (2201) are all fixedly installed with two telescopic baffles (2210). The outer surface of each of the mounting shells (2106) and the outer surface of the bend (2108) are fixedly connected to the inner wall of the telescopic baffle (2210).

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