Slice fishing machine and use method thereof

By designing a wafer retrieval machine to achieve automatic material separation and loading of silicon wafers, the problems of low efficiency and high fragmentation rate of manual wafer retrieval are solved, the cost is reduced and the operating environment is improved.

CN120809635APending Publication Date: 2025-10-17LIANZHI (DALIAN) INTELLIGENT TECH CO LTD
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Patent Information

Application Number
CN202510908756.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-07-02
Publication Date
2025-10-17

AI Technical Summary

Technical Problem

In the prior art, the manual wafer removal process after silicon wafer debonding is inefficient, has a high fragmentation rate, is costly, and has a harsh operating environment, resulting in significant physical exertion by personnel.

Method used

A wafer picking machine is designed, which includes a material receiving and conveying mechanism, a material dividing and conveying mechanism, a material tray turning mechanism and a silicon wafer side clamp centering mechanism, etc., to realize automatic material dividing and tray loading of silicon wafers, replacing manual operation.

Benefits of technology

The efficiency of silicon wafer retrieval is improved, the fragmentation rate and cost are reduced, and the operating environment is improved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention belongs to the technical field of photovoltaics, and discloses a slice fishing machine and a use method thereof. The wafer fishing machine comprises a material receiving and conveying mechanism, a material distributing and conveying mechanism and a material support turnover mechanism which are arranged in sequence and is arranged at the bottom in the box body; the wafer fishing machine further comprises a silicon wafer side clamp centering mechanism and a wafer separating side clamp centering mechanism which are arranged at the upper part of the box body in sequence; the material receiving conveying mechanism and the material distributing conveying mechanism are arranged in a crossed mode, the silicon wafer side clamp centering mechanism and the wafer separating side clamp centering mechanism are arranged in a crossed mode, and a side clamp conveying driving wheel at the front end of the wafer separating side clamp centering mechanism and a driven wheel A at the tail end of the silicon wafer side clamp centering mechanism are arranged in an up-down crossed mode and coincide in center. The silicon wafer side clamp centering mechanism is also provided with a wafer separating mechanism, and the wafer separating mechanism is arranged at one side adjacent to the wafer separating side clamp centering mechanism. According to the technical process of loading the silicon wafers into the silicon wafer material support through the wafer fishing machine, manual wafer fishing is replaced, and the defects that manual wafer fishing is low in efficiency, high in wafer breaking rate and high in cost at present are overcome.
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Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of photovoltaic, and relates to a wafer fishing machine and a use method thereof. BACKGROUND

[0002] At present, after the silicon wafer is degreased, the degreasing material vehicle is manually pushed out of the degreasing machine, and the crystal holder is manually or automatically taken away. The silicon wafer and the degreasing material frame are soaked in the water in the degreasing material vehicle. The silicon wafer needs to be manually fished in the water and placed into the material holder. The material holder is manually placed on the wafer inserting machine to insert the wafer. About 5000 silicon wafers are in one plate, each material holder can hold 600-800 silicon wafers at a time, and several material holders are needed to hold the silicon wafers in one plate. The working process needs 1-2 persons to complete. The operator needs to wear gloves to fish the silicon wafers in the water. It needs to be repeated several times to fish the silicon wafers of one material holder. Since the silicon wafer is just degreased, there are a lot of silicon powder in the silicon wafer and the water. The working environment is very poor. The silicon wafer is about 0.1 mm thick and belongs to hard and brittle material. The silicon wafer is easy to crack and produce unqualified silicon wafers in the fishing process, which increases the broken piece rate. The fishing link is a manual repeated operation, which is low in efficiency, high in labor quantity and cost of enterprises. SUMMARY

[0003] The present application aims to overcome the shortcomings in the background art, and provides a wafer fishing machine. The wafer fishing machine automatically separates one plate of silicon wafers into the number of silicon wafers in one material holder by mechanical automation. The process of loading the silicon wafers into the silicon wafer material holder by the wafer fishing machine of the present application replaces manual fishing, and solves the problems of low efficiency, high broken piece rate and high cost of manual fishing.

[0004] The technical scheme adopted by the present application to solve the technical problems is as follows: a wafer fishing machine is arranged in the box body of a water tank. The wafer fishing machine comprises a material receiving and conveying mechanism, a material separating and conveying mechanism and a material holder overturning mechanism arranged in sequence. The material receiving and conveying mechanism, the material separating and conveying mechanism and the material holder overturning mechanism are arranged at the bottom of the box body. The wafer fishing machine further comprises a silicon wafer side clamping and centering mechanism and a wafer separating side clamping and centering mechanism arranged in sequence at the upper part of the box body. The material receiving and conveying mechanism and the material separating and conveying mechanism are arranged in a cross manner. A conveying driven wheel B at the tail end of the material receiving and conveying mechanism and a driven wheel D at the front end of the material separating and conveying mechanism are arranged in a cross manner and are coaxial. The silicon wafer side clamping and centering mechanism and the wafer separating side clamping and centering mechanism are arranged in a cross manner. A side clamping conveying driving wheel at the front end of the wafer separating side clamping and centering mechanism and a driven wheel A at the tail end of the silicon wafer side clamping and centering mechanism are arranged in an up-down cross manner and are coaxial. The conveying driven wheel B, the driven wheel D, the side clamping conveying driving wheel and the driven wheel A are coaxial at the center and fall on the same vertical line. A wafer separating mechanism is further arranged on the silicon wafer side clamping and centering mechanism.

[0005] The tray turnover mechanism is provided with a tray. The tray is used for placing the workpieces after slicing and overturning the tray by 90°, waiting for the mechanical hand to grab or the manual worker to place the workpieces to the next process of the plug-in machine station.

[0006] The silicon wafer side clamping centering mechanism is used for clamping and centering the workpieces, keeping the silicon wafer stable when the existing mechanical hand extracts the degreasing frame and separating from the silicon wafer, and keeping the workpiece stable during the forward conveying process.

[0007] The receiving and conveying mechanism is used for conveying the workpieces to the slicing and conveying mechanism after receiving the workpieces.

[0008] The slicing mechanism is used for stably separating the silicon wafer to be fished out from the remaining silicon wafer.

[0009] The slicing side clamping centering mechanism is used for keeping the separated workpiece stable during the forward conveying process until the workpiece is conveyed into the tray.

[0010] The tray turnover mechanism is used for overturning the tray and the silicon wafer conveyed into the tray by 90°, waiting for automatic or manual removal.

[0011] The slicing and conveying mechanism is used for conveying the separated silicon wafer into the tray.

[0012] The workpieces are a plurality of silicon wafers.

[0013] The degreasing frame is an existing disclosed degreasing frame or a commercially available degreasing frame. The degreasing frame in the disclosed patent CN222705494U can also be implemented.

[0014] The silicon wafer side clamping centering mechanism comprises a side clamping centering transmission group A and a side clamping centering transmission group B arranged opposite to each other, the bottom of the side clamping centering transmission group A and the side clamping centering transmission group B is connected through a synchronous belt B, and the side clamping centering transmission group A and the side clamping centering transmission group B are fixed on the top surface of the box body.

[0015] The side clamping centering transmission group A comprises a fixed bottom plate A, a centering assembly for centering the workpieces and a side clamping assembly A for clamping the workpieces are arranged on the fixed bottom plate A, the centering assembly is connected with the side clamping assembly A through a support frame to realize left and right movement of the side clamping assembly A; the side clamping assembly A is provided with two, each side clamping assembly A comprises a clamping conveying motor, the output end of the clamping conveying motor is connected with a driving driving wheel through a transmission rod A, the driving driving wheel is connected with a driven wheel A through a synchronous belt B, a horizontal plate is arranged between the driving driving wheel and the driven wheel A, the top of the support frame is connected with the synchronous belt transmission block of the centering assembly, the clamping conveying motor is connected with the upper part of the support frame through a motor connecting plate, and the top of the support frame is connected with the horizontal plate through a support A.

[0016] The side clamping centering transmission group B comprises a fixed bottom plate B, a centering assembly for workpiece centering and a side clamping assembly B for workpiece side clamping are arranged on the fixed bottom plate B, the centering assembly is connected with the side clamping assembly B through a support frame to drive the side clamping assembly B to move left and right, and the side clamping assembly B is provided with two, each side clamping assembly B comprises a support C, the top of the support frame is connected with a synchronous belt transmission block of the centering assembly, and the top of the support frame is connected with the horizontal plate through the support A.

[0017] The centering assembly arranged on the side clamping centering transmission group A is the same in structure as the centering assembly arranged on the side clamping centering transmission group B, and the centering assembly arranged on the side clamping centering transmission group A is described below.

[0018] The centering assembly arranged on the side clamping centering transmission group A comprises a side clamping driving motor A, the side clamping driving motor A is arranged at one end of the fixed bottom plate A, a side clamping driven wheel is arranged at the other end of the fixed bottom plate A, the output end of the side clamping driving motor A is connected with a side clamping driving wheel, the side clamping driving wheel is connected with the side clamping driven wheel through a synchronous belt A, and the synchronous belt A is connected with the support frame through synchronous belt transmission blocks.

[0019] The support frame is slidably connected with the fixed bottom plate A through a guide assembly, the guide assembly comprises linear guides C and sliding blocks, the linear guides C are arranged on the fixed bottom plate A, and the sliding blocks are arranged on the bottom surface of the support frame.

[0020] Preferably, two linear guides C are arranged.

[0021] Limiting seats A are arranged at the center of the fixed bottom plate A and adjacent to both ends of the linear guides C, and buffer blocks are arranged on the limiting seats A for limiting and buffering protection.

[0022] The upper synchronous belt A is connected with the support frame through the synchronous belt transmission block A, the lower synchronous belt A is connected with another support frame through the synchronous belt transmission block B, a rack A is arranged on the outer side of the synchronous belt A, a rack B is arranged on the inner side of the synchronous belt transmission block A and the synchronous belt transmission block B at the connection position with the synchronous belt A, and the rack A and the rack B are connected in meshing.

[0023] Metal backing plates A and nylon limiting plates A are further arranged on the two side surfaces of the horizontal plate for preventing the synchronous belt B from moving and supporting the synchronous belt B, and the nylon limiting plates A are arranged on the outer side.

[0024] The side clamping driving motor A is fixed on the fixed bottom plate A through a side clamping driving wheel support, and the side clamping driven wheel is arranged on the fixed bottom plate A through a side clamping driven wheel support.

[0025] The side clamping centering transmission group A is arranged at one end of the top surface of the box body and is arranged on the top surface of the box body through a fixed bottom plate A. The side clamping centering transmission group B is arranged at one end adjacent to the side clamping centering mechanism and is arranged on the top surface of the box body through a fixed bottom plate B.

[0026] The synchronous belt B is preferably a sponge belt.

[0027] The top ends of the two side clamping assemblies A are located on the same horizontal plane. The bottom ends of the two side clamping assemblies A are located on the same horizontal plane.

[0028] The clamping conveying motor is sequentially connected with the transmission rod A through the speed reducer A and the shaft coupling.

[0029] The driven wheel A is connected with the cross plate through the driven wheel A fixing plate, and the cross plate is provided with a through hole. The driving driving wheel is connected with the cross plate through the adjusting block A. The adjusting block A is provided with an adjusting block adjacent to the adjusting block. The adjusting block is fixed on the cross plate. The adjusting block is provided with a bolt. The position of the adjusting bolt is adjusted to adjust the adjusting block A to adjust the tension of the synchronous belt B.

[0030] The receiving conveying mechanism comprises a conveying belt A, a conveying belt B and a conveying motor A. The conveying belt B is provided with two ends arranged at the ends of the conveying belt A. The ends of the conveying belt A are arranged between the two conveying belts B to form a cross arrangement. The output end of the conveying motor A is connected with a synchronous driving wheel. The synchronous driving wheel is connected with two synchronous driven wheels through a synchronous belt C. The two synchronous driven wheels are connected with the conveying wheels of the conveying belt A and the conveying driving wheels of the conveying belt B through transmission shafts to realize the conveying of workpieces.

[0031] Of the two synchronous driven wheels, one is connected with the conveying driving wheel of the conveying belt B through a transmission shaft A, and the other is connected with the conveying wheel of the conveying belt A through a transmission shaft B.

[0032] The transmission shaft A is connected with the conveying driving wheel of the conveying belt B on the adjacent side. The conveying wheel is connected with the conveying driving wheel of the other conveying belt B through a transmission shaft C.

[0033] The conveying wheel of the conveying belt A is connected with the conveying driven wheel A through the conveying belt A. A fixed frame plate is arranged between the conveying wheel and the conveying driven wheel A. The conveying wheel and the conveying driven wheel A are connected with the fixed frame plate through the conveying wheel fixing plate and the driven wheel fixing plate, respectively. The fixed frame plate is provided with a through hole. The transmission shaft C penetrates the through hole and is connected with the conveying driving wheels of the conveying belt B and the other conveying belt B at both ends.

[0034] The conveying driving wheel of each conveying belt B is connected with the conveying driven wheel B through the conveying belt B, and a fixed frame plate is arranged between the conveying driving wheel and the conveying driven wheel B. The conveying driving wheel and the conveying driven wheel B are connected through the conveying wheel fixing plate, the driven wheel fixing plate and the fixed frame plate, and the fixed frame plate is provided with a tensioning block B for tensioning the conveying belt B. The tensioning block B is provided with a bolt, and the tensioning of the conveying belt B is adjusted by adjusting the position of the bolt.

[0035] Preferably, the synchronous belt C connected with the synchronous driving wheel and the synchronous driven wheel is further provided with a tensioning wheel A, the tensioning wheel A is fixed on the box through a tensioning bracket, and the tensioning wheel A is further provided with a tensioning block A for adjusting tension. The tensioning block A is arranged on the tensioning bracket, and the position of the tensioning block A on the tensioning bracket is adjusted by a bolt, so as to adjust the position of the tensioning wheel A and further adjust the tension of the synchronous belt C.

[0036] The conveying motor A is fixed on the side top surface of the top of the box, and the conveying motor A is fixed through the conveying motor A fixing frame.

[0037] The conveying motor A and the synchronous driving wheel are further provided with a speed reducer B.

[0038] The length of the conveying belt B is less than the length of the conveying belt A. The width of the conveying belt B is less than the width of the conveying belt A.

[0039] The conveying belt A is connected with the fixed frame through the fixed frame plate and the fixed connecting block, and is arranged on the bottom surface in the box through the fixed frame and the fixed base. The conveying belt B is connected with the fixed frame through the fixed frame plate and the fixed connecting block, and is arranged on the bottom surface in the box through the fixed frame and the fixed base. The distance between the two conveying belts B is less than the width of the workpiece.

[0040] The conveying belt A and the conveying belt B are both PU smooth synchronous belts.

[0041] The slice driving assembly of the slice mechanism is arranged on the fixed base plate B of the side clamp pair transmission group B. The water spraying assembly B of the slice mechanism is arranged on the bottom surface of the bottom of the box.

[0042] The slice mechanism comprises a slice driving assembly and a water spraying assembly B, the slice driving assembly is arranged above the water spraying assembly B, the slice driving assembly is arranged on the fixed base plate B, the slice driving assembly comprises a cylinder, the cylinder rod front end of the cylinder is connected with the cylinder connecting plate through the cylinder connecting piece, the bottom surface of the cylinder connecting plate is connected with a guide shaft at each end, the guide shaft bottom extends out of the fixed base plate B, the inner side of the bottom of the two guide shafts is provided with a vertical rod, and the slice piece is arranged between the two vertical rods; the water spraying block A is arranged on the bottom surface of the fixed base plate B.

[0043] The air cylinder is fixed on the fixed base plate B through a fixed connecting plate. The fixed base plate B is provided with a mounting seat, and the mounting seat is provided with a cylinder limiting pin arranged below the cylinder connecting plate.

[0044] The water spraying block A is provided with a plurality of nozzles arranged at equal intervals, and the nozzles are commercially available products. The water spraying block A is connected to a water inlet pipeline through a quick connector, and a water pump is arranged on the water inlet pipeline.

[0045] The piece is a part for realizing the piece action, and the form of the part for realizing the piece action is not specially limited, and the piece can realize its working function. The piece is preferably but not limited to a piece line or a piece plate. The piece line is preferably a fishing line. The piece plate is preferably a plastic plate or a soft plate or a metal plate, and the piece preferably comprises two pieces.

[0046] A linear bearing is arranged at the connection between the guide shaft and the fixed base plate B.

[0047] The water spraying assembly B comprises two water spraying groups arranged opposite to each other. The water spraying group comprises a water spraying support, the bottom of the water spraying support is arranged on the box body, the upper part of the water spraying support is provided with a water spraying block B, the water spraying block B is arranged obliquely, the top surface of the water spraying block B is provided with a long strip water spraying nozzle, the water spraying nozzle is arranged inwardly, the water spraying block B is connected to a water inlet pipeline through a quick connector, and a water pump is arranged on the water inlet pipeline.

[0048] An adjusting groove is formed in the upper part of the water spraying support, the water spraying block B is arranged on the water spraying support through a bolt and the adjusting groove, and the position of the water spraying block B is adjusted through the adjusting groove and the bolt.

[0049] The distance between the two water spraying groups is greater than the inner distance of the two synchronous belts B. The height of the two water spraying groups is lower than the height of the synchronous belts B.

[0050] The piece side clamping centering mechanism comprises a fixed base plate C, a centering driving assembly for workpiece centering and a side clamping conveying assembly for workpiece side clamping are arranged on the fixed base plate C. The centering driving assembly is connected with the side clamping conveying assembly through a support frame to drive the side clamping conveying assembly to move left and right. The side clamping conveying assembly comprises two side clamping conveying assemblies, each side clamping conveying assembly comprises a conveying motor B, the output end of the conveying motor B is connected with a side clamping conveying driving wheel through a transmission rod B, the side clamping conveying driving wheel is connected with a side clamping conveying driven wheel through a side clamping conveying belt, a fixed frame plate is arranged between the side clamping conveying driving wheel and the side clamping conveying driven wheel, the top of the support frame is connected with a synchronous belt transmission block of the centering driving assembly, the conveying motor B is connected with the upper part of the support frame through a motor connecting plate, and the bottom of the support frame is connected with the fixed frame plate through a vertical rod.

[0051] The side clamping conveying driven wheel is connected with the fixed frame plate through the side clamping conveying driven wheel fixing plate, and a through hole is arranged on the fixed frame plate; the side clamping conveying driving wheel is connected with the fixed frame plate through the adjusting block B, and a bolt adjusting block is arranged at the adjacent position of the adjusting block B, the bolt adjusting block is fixed on the fixed frame plate, an adjusting bolt is arranged on the bolt adjusting block, and the position of the adjusting bolt is adjusted to adjust the adjusting block B, so that the tension of the side clamping conveying belt is adjusted.

[0052] The top ends of the two side clamping conveying assemblies are located on the same horizontal plane.

[0053] The centering driving assembly comprises a split side clamping driving motor, the split side clamping driving motor is arranged at one end of the fixed bottom plate C, a split side clamping driven wheel is arranged at the other end of the fixed bottom plate C, the output end of the split side clamping driving motor is connected with a split side clamping driving wheel, the split side clamping driving wheel is connected with the split side clamping driven wheel through a synchronous belt E, and the synchronous belt E is connected with the side clamping conveying assembly through a synchronous belt transmission block and a support frame.

[0054] The support frame is slidably connected with the fixed bottom plate C through a guide assembly, the guide assembly comprises a linear guide rail B and a sliding block, the linear guide rail B is arranged on the fixed bottom plate C, and the sliding block is arranged on the bottom surface of the support frame.

[0055] Preferably, two linear guide rails B are arranged.

[0056] A limiting seat C is arranged at the center of the fixed bottom plate C and at the adjacent positions of the two ends of the linear guide rail B, and a buffer block is arranged on the limiting seat C for limiting and buffering protection.

[0057] The upper synchronous belt E is connected with the support frame B after penetrating through the synchronous belt transmission block D, the lower synchronous belt E is connected with the support frame A after penetrating through the synchronous belt transmission block E, a rack A is arranged on the outer side of the synchronous belt E, a rack B is arranged on the inner side of the synchronous belt transmission block D and the synchronous belt transmission block E at the connection position with the synchronous belt E, and the rack A and the rack B are connected in meshing.

[0058] Preferably, the side clamping conveying belt is a sponge belt.

[0059] A metal base plate C and a nylon limiting plate C are further arranged on the side surface of the fixed frame plate, which are used for preventing the side clamping conveying belt from moving and supporting the side clamping conveying belt; the nylon limiting plate C is arranged on the outer side.

[0060] The split side clamping driving motor is fixed on the fixed bottom plate C through a split side clamping driving motor fixing seat. The split side clamping driven wheel is arranged on the fixed bottom plate C through a split side clamping driven wheel support.

[0061] The split side clamping centering mechanism is fixed on the top surface of the top of the box body through the fixed bottom plate C.

[0062] The distributing conveying mechanism comprises a synchronous belt G, a driving synchronous belt, and a distributing conveying motor; the output end of the distributing conveying motor is connected with a distributing conveying driving wheel, the distributing conveying driving wheel is connected with a driven wheel C through the synchronous belt G, the driven wheel C is connected with a belt driving wheel through a transmission shaft E, and the belt driving wheel is connected with two driven wheels D through driving synchronous belts to realize the movement of the driving synchronous belt.

[0063] The transmission shaft E is fixed on the inner bottom surface of the box through a support B. Two bearings are arranged on the transmission shaft E, and the two bearings are connected with the support B respectively.

[0064] A mounting plate is arranged between the two driven wheels D, one driven wheel D is connected with the mounting plate through a driven wheel D fixing plate, a through hole is arranged on the mounting plate, and the other driven wheel D is connected with the mounting plate through a driven wheel D adjusting plate. A tension block D is arranged adjacent to the driven wheel D adjusting plate, the tension block D is fixed on the mounting plate, and a bolt is arranged on the tension block D. The tension of the driving synchronous belt is adjusted by adjusting the position of the bolt.

[0065] A tension pulley B is further arranged on the driving synchronous belt, the tension pulley B is arranged below the mounting plate, and the tension pulley B is movably connected with the mounting plate through a bolt and a tension pulley fixing plate.

[0066] The driving synchronous belt is connected with a fixing frame through the mounting plate and a fixing connecting block, and is arranged on the bottom surface in the box through the fixing frame and a fixing base.

[0067] A speed reducer D is further arranged between the distributing conveying motor and the distributing conveying driving wheel, and the distributing conveying motor is fixed on the side top surface of the top of the box through a motor mounting plate. A tension block C for tensioning the synchronous belt G is arranged on the side surface of the motor mounting plate, the tension block C is fixed on the side top surface of the top of the box, two bolts are horizontally arranged on the tension block C, and the tension of the synchronous belt G is adjusted by moving the two bolts forward and backward.

[0068] The driving synchronous belt is a PU smooth synchronous belt.

[0069] Metal backing plates B and nylon limiting plates B are further arranged on the top and bottom surfaces of the mounting plate to prevent the driving synchronous belt from moving and support the driving synchronous belt; the nylon limiting plates B are arranged on the outer side.

[0070] The material tray overturning mechanism comprises an overturning motor, a synchronous belt F, and an overturning support, the output end of the overturning motor is connected with a driving wheel A, the driving wheel A is connected with a driven wheel B through the synchronous belt F, and the driven wheel B is connected with the overturning support through a transmission shaft D.

[0071] The transmission shaft D is fixed on the inner bottom surface of the box through an overturning support. Two bearings are arranged on the transmission shaft D, and the two bearings are connected with the overturning support respectively.

[0072] A speed reducer C is further arranged between the turnover motor and the driving wheel A, and the turnover motor is fixed on the side top surface of the top of the box body through a motor mounting support.

[0073] The turnover support comprises four turnover vertical plates, two of which are connected through a vertical plate connecting block, and the four vertical plates form two turnover V-shaped plates which are arranged in parallel and have a spacing therebetween, and the included angle of each turnover V-shaped plate is preferably ninety degrees.

[0074] A support plate is further arranged on each of the two vertical plates in the same direction, and the support plate is perpendicular to the vertical plate and outwardly arranged.

[0075] The material support comprises a bottom plate, a backing plate and two side plates, a square through hole is formed in the middle of the bottom plate and the backing plate, the two side plates are arranged on the two sides of the square through hole and face each other, the backing plate is arranged on the bottom plate, a plurality of side plate sockets are arranged on the bottom plate, one end of the side plate penetrates through the backing plate and is inserted into the bottom plate, the other end of the side plate is connected to the connecting plate at the bottom, one end of the supporting rod is connected to the through hole on the connecting plate, and the other end is connected to the supporting rod adjusting hole on the backing plate.

[0076] The spacing between the two side plates is a workpiece placement position.

[0077] A plurality of supporting rod adjusting holes are formed in the backing plate.

[0078] The backing plate is sequentially provided with a pressing block adjusting groove A, a side plate slot and a pressing block adjusting groove B; and pressing blocks are arranged in the pressing block adjusting groove A and the pressing block adjusting groove B.

[0079] When the side plate is inserted into the side plate slot due to the working condition, one end of the two side plates penetrates through the side plate slot on the backing plate and is connected to the side plate socket on the bottom plate, and the pressing blocks are fixedly installed in the pressing block adjusting groove A and the pressing block adjusting groove B through bolts to fill the pressing block adjusting groove A and the pressing block adjusting groove B.

[0080] When the side plate is inserted into the pressing block adjusting groove due to the working condition, the size of the pressing block can be adjusted to adjust the position of the side plate due to different sizes. The side plate penetrates through the pressing block adjusting groove and is connected to the side plate socket on the bottom plate, the pressing block is filled in the spare interval of the pressing block adjusting groove A and the pressing block adjusting groove B to ensure that the two side plates are arranged in parallel on the backing plate. The supporting rod is adjusted in position through the connecting plate and the supporting rod adjusting hole. At this time, the pressing blocks are fixedly installed in the side plate slot through bolts to fill the side plate slot or no pressing block is placed.

[0081] The bottom plate and the backing plate are fixedly connected through bolts.

[0082] The use method of the sheet salvaging machine of the present application is as follows:

[0083] S1. Artificial or automatic placement of the degumming frame or workpiece after degumming on the receiving conveying mechanism;

[0084] S2. The existing degumming frame is separated from the workpiece silicon wafer placed on the receiving conveying mechanism;

[0085] S3. The silicon wafer side clamping centering mechanism clamps and centers the workpiece;

[0086] S4. The receiving conveying mechanism, the belt of the conveying belt A of the silicon wafer side clamping centering mechanism, and the belt of the synchronous belt B are simultaneously conveyed to forwardly convey the workpiece silicon wafer, and the separated workpiece silicon wafer is conveyed to the separating conveying mechanism and the wafer separating side clamping centering mechanism, and the separating conveying mechanism assists the wafer separating side clamping centering mechanism to clamp the workpiece silicon wafer;

[0087] S5. The wafer separating mechanism starts to separate the workpiece silicon wafer, the bottom water spraying assembly B in the wafer separating mechanism and the upper water spraying block are opened, the water pump sets the pressure of the water to spray the silicon wafer, the silicon wafer is separated under the pressure of the water at the water spraying position, and the air cylinder drives the wafer separating line or wafer separating plate to separate the separated silicon wafers to avoid the bonding of the front and rear silicon wafers to separate the separated silicon wafers from the remaining silicon wafers; the water spraying and the air cylinder are synchronized to realize the stable separation of the workpiece silicon wafer;

[0088] S6. The receiving conveying mechanism and the silicon wafer side clamping centering mechanism stop conveying, the separating conveying mechanism and the wafer separating side clamping centering mechanism convey, the remaining silicon wafers are stationary, and the separated silicon wafers are conveyed into the material holder;

[0089] S7. The material holder is turned over by 90°, the material holder waits to be taken away, and the empty material holder is replaced.

[0090] The present application has the following advantages compared with the prior art:

[0091] The wafer separating machine provided by the present application is applied to a silicon wafer degumming and cleaning workshop in the photovoltaic field, replaces manual wafer separation, and automatically places the silicon wafers into the material holder according to a certain number, wherein the silicon wafer specifications are compatible with whole wafers and half wafers, the whole wafer size (length x width) is 182-230 x 182-230, and the half wafer size (length x width) is 182-230 x 105, thereby solving the defects of time-consuming, labor-consuming and high wafer breakage rate of the current manual wafer separation, reducing the wafer breakage rate and saving the cost. BRIEF DESCRIPTION OF DRAWINGS

[0092] The present application will be further described below in combination with the drawings and embodiments:

[0093] Figure 1 It is a perspective view of a wafer separating machine.

[0094] Figure 2 It is a front view of a wafer separating machine.

[0095] Figure 3 It is a top view of a wafer separating machine.

[0096] Figure 4 is Figure 3 an A-A sectional view of the application.

[0097] Figure 5 is a front view of the wafer fetching machine after the box is removed.

[0098] Figure 6 is a side view of the wafer fetching machine after the box is removed.

[0099] Figure 7 is a perspective view of the wafer fetching machine after the box is removed.

[0100] Figure 8 is a schematic view of the wafer side clamping centering mechanism and wafer separating mechanism installed on the box.

[0101] Figure 9 is a top view of the wafer side clamping centering mechanism and wafer separating mechanism.

[0102] Figure 10 is a front view of the wafer side clamping centering mechanism and wafer separating mechanism.

[0103] Figure 11 is a perspective view A of the wafer side clamping centering mechanism and wafer separating mechanism.

[0104] Figure 12 is a side view of the wafer side clamping centering mechanism and wafer separating mechanism.

[0105] Figure 13 is a perspective view of the wafer separating mechanism.

[0106] Figure 14 is a rear view of the wafer separating mechanism.

[0107] Figure 15 is a schematic view of the water spraying assembly at the bottom of the wafer separating mechanism.

[0108] Figure 16 is a perspective view of the wafer side clamping centering mechanism and wafer separating mechanism.

[0109] Figure 17 is a schematic view of the material receiving and conveying mechanism installed on the box.

[0110] Figure 18 is a top view of the material receiving and conveying mechanism.

[0111] Figure 19 is a front view of the material receiving and conveying mechanism.

[0112] Figure 20 is a perspective view A of the material receiving and conveying mechanism.

[0113] Figure 21 is the perspective view of the material receiving and conveying mechanism of the present application.

[0114] Figure 22 is the perspective view of the slice side clamp centering mechanism of the present application.

[0115] Figure 23 is the top view of the slice side clamp centering mechanism of the present application.

[0116] Figure 24 is the side view of the slice side clamp centering mechanism of the present application.

[0117] Figure 25 is the schematic view of the material receiving and conveying mechanism of the present application installed on the box body.

[0118] Figure 26 is the perspective view A of the material receiving and conveying mechanism of the present application.

[0119] Figure 27 is the perspective view B of the material receiving and conveying mechanism of the present application.

[0120] Figure 28 is the schematic view of the material receiving and conveying mechanism of the present application installed on the box body.

[0121] Figure 29 is the perspective view of the material receiving and conveying mechanism of the present application.

[0122] Figure 30 is the schematic view of the material receiving and conveying mechanism of the present application installed on the box body.

[0123] Figure 31 is the schematic view of the material receiving and conveying mechanism of the present application installed on the box body.

[0124] Figure 32 is the side view of the material receiving and conveying mechanism of the present application.

[0125] Figure 33 is the perspective view of the material receiving and conveying mechanism of the present application.

[0126] Figure 34 is the front view of the material receiving and conveying mechanism of the present application.

[0127] 1. box, 2. silicon wafer side clamp centering mechanism, 3. receiving and conveying mechanism, 4. wafer separating mechanism, 5. wafer separating side clamp centering mechanism, 6. wafer support overturning mechanism, 7. workpiece, 8. wafer separating and conveying mechanism, 9. degreasing frame, 10. wafer support, 201. fixed base plate A, 202. side clamp drive motor A, 203. synchronous belt A, 204. synchronous belt transmission block A, 205. synchronous belt B, 206. cross plate, 207. limiting seat A, 208. clamping and conveying motor, 209. support A, 210. transmission rod A, 211. drive driving wheel, 212. coupling, 213. metal backing plate A, 214. nylon limiting plate A, 215. side clamp driven wheel, 216. side clamp driving wheel, 217. synchronous belt transmission block B, 218. speed reducer A, 219. side clamp driven wheel support, 220. side clamp driving wheel support, 221. adjusting block A, 222. adjusting block, 301. conveying belt A, 302. conveying motor A, 303. conveying belt B, 304. transmission shaft A, 305. transmission shaft B, 306. fixed frame, 307. speed reducer B, 308. tensioning block A, 309. tensioning wheel A, 310. synchronous belt C, 311. transmission shaft C, 312. conveying driven wheel A, 313. conveying driving wheel, 314. tensioning block B, 315. driven wheel fixing plate, 316. conveying driven wheel B, 401. wafer separating drive assembly, 402. water spraying assembly B, 403. fixed base plate B, 404. side clamp drive motor B, 405. synchronous belt D, 406. synchronous belt transmission block C, 407. limiting seat B, 408. driven wheel A, 409. limiting buffer block A, 410. linear guide rail A, 501. fixed base plate C, 502. wafer separating side clamp drive motor, 503. synchronous belt E, 504. wafer separating side clamp driving wheel, 505. wafer separating side clamp driven wheel, 506. synchronous belt transmission block D, 507. support frame A, 508. support frame B, 509. conveying motor B, 510. transmission rod B, 511. side clamp conveying driving wheel, 512. side clamp conveying belt, 513. adjusting block B, 514. adjusting bolt, 515. side clamp conveying driven wheel, 516. limiting seat C, 517. vertical rod, 601. overturning motor, 602. overturning support, 603. synchronous belt F, 604. driving wheel A, 605. driven wheel B, 606. overturning support, 607. transmission shaft D, 608. support plate, 609. speed reducer C, 610. motor mounting support, 801. wafer separating and conveying motor, 802. synchronous belt G, 803. transmission shaft E, 804. drive synchronous belt, 805. speed reducer D, 806. motor mounting plate, 807. wafer separating and conveying driving wheel, 808. tensioning block C, 809. driven wheel C, 810. support B, 811. tensioning wheel B, 812. driven wheel D, 813. driven wheel D fixing plate, 814. mounting plate, 815. metal backing plate B, 816. nylon limiting plate B, 817. tensioning block D, 818. belt drive wheel, 40101.Cylinder, 40102. Guide shaft, 40103. Vertical rod, 40104. Splitting piece, 40105. Cylinder connecting plate, 40106. Fixed connecting plate, 40107. Spray block A, 40108. Mounting seat, 40109. Linear bearing, 40110. Cylinder stop pin, 40201. Spray support, 40202. Spray block B, 40203. Adjustment slot, 40204. Spray nozzle, 101. Base plate, 102. Backing plate, 103. Side plate, 104. Support rod, 105. Connecting plate, 106. Pressure block adjustment slot, 107. Pressure block, 108. Support rod adjustment hole. DETAILED DESCRIPTION

[0128] The present invention will be further described below with reference to the accompanying drawings, but the present invention is not limited to the following embodiments.

[0129] Example 1

[0130] A scooping machine, such as Figures 1-34 As shown, the wafer scooping machine is arranged in the box body 1 of the water tank, and the wafer scooping machine includes a material receiving and conveying mechanism 3, a material dividing and conveying mechanism 8, and a material tray turning mechanism 6 which are arranged in sequence; the material receiving and conveying mechanism 3, the material dividing and conveying mechanism 8, and the material tray turning mechanism 6 are arranged at the bottom of the box body 1, and the wafer scooping machine also includes a silicon wafer side clamping and centering mechanism 2 and a silicon wafer dividing and centering mechanism 5 which are arranged in sequence at the upper part of the box body 1; the material receiving and conveying mechanism 3 and the material dividing and conveying mechanism 8 are arranged crosswise, and the conveying driven wheel B316 at the end of the material receiving and conveying mechanism 3 and the driven wheel D812 at the front end of the material dividing and conveying mechanism 8 are arranged crosswise, and the conveying driven wheel B316 at the end of the material receiving and conveying mechanism 3 and the driven wheel D812 at the front end of the material dividing and conveying mechanism 8 are arranged crosswise, and the conveying driven wheel B316 at the end of the material dividing and conveying mechanism 8 ...3 and the driven wheel D812 at the front end of the material dividing and conveying mechanism 8 are arranged crosswise, and the conveying driven wheel B316 at the end of the material dividing and conveying mechanism The silicon wafer side clamp centering mechanism 2 and the slicing side clamp centering mechanism 5 are cross-arranged, and the side clamp conveying active wheel 511 at the front end of the cross-arranged slicing side clamp centering mechanism 5 and the driven wheel A408 at the end of the silicon wafer side clamp centering mechanism 2 are cross-arranged up and down and the centers coincide, and the conveying driven wheel B316, the driven wheel D812, the side clamp conveying active wheel 511, and the driven wheel A408 fall on the same vertical line in the center. A slicing mechanism 4 is also arranged on the silicon wafer side clamp centering mechanism 2, and the slicing mechanism 4 is arranged on the side adjacent to the slicing side clamp centering mechanism 5.

[0131] A material tray 10 is provided on the material tray turning mechanism 6 .

[0132] The workpiece 7 is a plurality of silicon wafers.

[0133] The degumming rack 9 is an existing public degumming rack 9 or a commercially available degumming rack 9. The degumming rack 9 in the patent CN222705494U can also be implemented.

[0134] The silicon wafer side clamp centering mechanism 2 comprises side clamp centering transmission group A and side clamp centering transmission group B arranged oppositely, the bottom of the side clamp centering transmission group A and the side clamp centering transmission group B is connected by synchronous belt B205, and the side clamp centering transmission group A and the side clamp centering transmission group B are fixed on the top surface of the box body 1.

[0135] The side clamp centering transmission group A comprises fixed bottom plate A201, and the fixed bottom plate A201 is provided with centering assembly for workpiece 7 centering and side clamp assembly A for workpiece 7 side clamp, the centering assembly is connected with the side clamp assembly A through a support frame to realize left and right movement of the side clamp assembly A; the side clamp assembly A is provided with two, each side clamp assembly A comprises clamping conveying motor 208, the output end of the clamping conveying motor 208 is connected with driving driving wheel 211 through transmission rod A210, the driving driving wheel 211 is connected with driven wheel A408 through synchronous belt B205, and the driving driving wheel 211 and the driven wheel A408 are provided with horizontal plate 206; the top of the support frame is connected with synchronous belt transmission block of the centering assembly, the clamping conveying motor 208 is connected with the upper part of the support frame through motor connecting plate, and the top of the support frame is connected with the horizontal plate 206 through support A209.

[0136] The side clamp centering transmission group B comprises fixed bottom plate B403, and the fixed bottom plate B403 is provided with centering assembly for workpiece 7 centering and side clamp assembly B for workpiece 7 side clamp, the centering assembly is connected with the side clamp assembly B through a support frame to realize left and right movement of the side clamp assembly B; the side clamp assembly B is provided with two, each side clamp assembly B comprises support C, the top of the support frame is connected with synchronous belt transmission block of the centering assembly, and the top of the support frame is connected with the horizontal plate 206 through support A209.

[0137] The centering assembly arranged on the side clamp centering transmission group A and the centering assembly arranged on the side clamp centering transmission group B are the same in structure, and the centering assembly arranged on the side clamp centering transmission group A is described below.

[0138] The centering assembly arranged on the side clamp centering transmission group A comprises side clamp driving motor A202, the side clamp driving motor A202 is arranged at one end of the fixed bottom plate A201, the other end of the fixed bottom plate A201 is provided with side clamp driven wheel 215, the output end of the side clamp driving motor A202 is connected with side clamp driving wheel 216, the side clamp driving wheel 216 is connected with the side clamp driven wheel 215 through synchronous belt A203, and the synchronous belt A203 is connected with the support frame through synchronous belt transmission block.

[0139] The support frame is slidably connected with the fixed bottom plate A201 through a guide assembly, the guide assembly comprises linear guide C and sliding block, the linear guide C is arranged on the fixed bottom plate A201, the sliding block is arranged on the bottom surface of the support frame, and the linear guide C is slidably connected with the sliding block.

[0140] Preferably, two linear guides C are arranged.

[0141] The center of the fixed bottom plate A201 and the two ends of the linear guide rail C are provided with limiting seats A207, and the limiting seats A207 are provided with buffer blocks for limiting and buffering protection.

[0142] The upper synchronous belt A203 is connected with the support frame through the synchronous belt transmission block A204, and the lower synchronous belt A203 is connected with another support frame through the synchronous belt transmission block B217. The outer side of the synchronous belt A203 is provided with a rack A, the inner side of the synchronous belt transmission block A204 and the synchronous belt transmission block B217 is provided with a rack B, and the rack A and the rack B are connected in meshing.

[0143] The two sides of the horizontal plate 206 are also provided with metal base plates A213 and nylon limiting plates A214 for preventing the displacement of the synchronous belt B205 and supporting the synchronous belt B205. The nylon limiting plates A214 are arranged on the outer side.

[0144] The side clamp driving motor A202 is fixed on the fixed bottom plate A201 through the side clamp driving wheel support 220. The side clamp driven wheel 215 is arranged on the fixed bottom plate A201 through the side clamp driven wheel support 219.

[0145] The side clamp centering transmission group A and the side clamp centering transmission group B are arranged on the top surface of the box body 1. The side clamp centering transmission group A is arranged at one end of the top surface of the box body 1 and is arranged on the top surface of the box body 1 through the fixed bottom plate A201. The side clamp centering transmission group B is arranged at one end adjacent to the split side clamp centering mechanism 5 and is arranged on the top surface of the box body 1 through the fixed bottom plate B403.

[0146] The synchronous belt B205 is preferably a sponge belt.

[0147] The top ends of the two side clamp assemblies A are located on the same horizontal plane. The bottom ends of the two side clamp assemblies A are located on the same horizontal plane.

[0148] The clamping conveying motor 208 is connected with the transmission rod A210 in sequence through the reducer A218 and the shaft coupling 212.

[0149] The driven wheel A408 is connected with the horizontal plate 206 through the driven wheel A fixing plate, and the horizontal plate 206 is provided with a through hole. The driving driving wheel 211 is connected with the horizontal plate 206 through the adjusting block A221, and the adjusting block A221 is provided with an adjusting block 222 adjacent thereto. The adjusting block 222 is fixed on the horizontal plate 206, and the adjusting block 222 is provided with a bolt. The tension of the synchronous belt B205 is adjusted by adjusting the position of the adjusting bolt.

[0150] The material receiving and conveying mechanism 3 comprises a conveying belt A301, two conveying belts B303, and a conveying motor A302; the two conveying belts B303 are arranged at the two ends of the conveying belt A301, and the conveying belt A301 is arranged between the two conveying belts B303 to form a cross arrangement; the output end of the conveying motor A302 is connected with a synchronous driving wheel, the synchronous driving wheel is connected with two synchronous driven wheels through a synchronous belt C310, and the two synchronous driven wheels are connected with the conveying wheels of the conveying belt A301 and the conveying driving wheels 313 of the conveying belt B303 through transmission shafts to realize conveying of the workpiece 7.

[0151] Of the two synchronous driven wheels, one is connected with the conveying driving wheel 313 of the conveying belt B303 through a transmission shaft A304, and the other is connected with the conveying wheel of the conveying belt A301 through a transmission shaft B305.

[0152] The transmission shaft A304 is connected with the conveying driving wheel 313 of the conveying belt B303 on the adjacent side, and the conveying wheel is connected with the conveying driving wheel 313 of the other conveying belt B303 through a transmission shaft C311.

[0153] The conveying wheel of the conveying belt A301 is connected with the conveying driven wheel A312 through the conveying belt A301, and a fixed frame plate is arranged between the conveying wheel and the conveying driven wheel A312; the conveying wheel and the conveying driven wheel A312 are connected with the fixed frame plate through the conveying wheel fixed plate and the driven wheel fixed plate 315, respectively; the fixed frame plate is provided with a through hole, and the transmission shaft C311 penetrates through the through hole and is connected with the conveying driving wheel 313 of the conveying belt B303 and the conveying driving wheel 313 of the other conveying belt B303 at both ends.

[0154] The conveying driving wheel 313 of each conveying belt B303 is connected with the conveying driven wheel B316 through the conveying belt B303, and a fixed frame plate is arranged between the conveying driving wheel 313 and the conveying driven wheel B316; the conveying driving wheel 313 and the conveying driven wheel B316 are connected with the fixed frame plate through the conveying wheel fixed plate and the driven wheel fixed plate 315, respectively; and the fixed frame plate is provided with a tensioning block B314 for tensioning the conveying belt B303. The tensioning block B314 is provided with a bolt, and the tension of the conveying belt B303 is adjusted by adjusting the position of the bolt.

[0155] Preferably, the synchronous belt C310 connected with the synchronous driving wheel and the synchronous driven wheel is further provided with a tensioning wheel A309, and the tensioning wheel A309 is fixed on the box body 1 through a tensioning bracket; and the tensioning wheel A309 is further provided with a tensioning block A308 for adjusting the tension. The tensioning block A308 is arranged on the tensioning bracket, and the position of the tensioning block A308 on the tensioning bracket is adjusted through a bolt to adjust the position of the tensioning wheel A309 and further adjust the tension of the synchronous belt C310.

[0156] The conveying motor A 302 is fixed on the side top surface of the top of the box 1, and is fixed by the conveying motor A fixing frame.

[0157] The conveying motor A 302 is further provided with a speed reducer B 307 between the synchronous driving wheel.

[0158] The length of the conveying belt B 303 is less than that of the conveying belt A 301. The width of the conveying belt B 303 is less than that of the conveying belt A 301.

[0159] The conveying belt A 301 is connected with the fixing frame 306 through the fixed frame plate and the fixed connecting block, and is arranged on the bottom surface in the box 1 through the fixing frame 306 and the fixed base. The conveying belt B 303 is connected with the fixing frame 306 through the fixed frame plate and the fixed connecting block, and is arranged on the bottom surface in the box 1 through the fixing frame 306 and the fixed base. The interval of the two conveying belts B 303 is less than the width of the workpiece 7.

[0160] The conveying belt A 301 and the conveying belt B 303 are both PU smooth synchronous belts.

[0161] The slicing driving assembly 401 of the slicing mechanism 4 is arranged on the fixed bottom plate B 403 of the side clamping middle transmission group B. The water spraying assembly B 402 of the slicing mechanism 4 is arranged on the bottom surface of the bottom of the box 1.

[0162] The slicing mechanism 4 comprises the slicing driving assembly 401 and the water spraying assembly B 402, the slicing driving assembly 401 is arranged above the water spraying assembly B 402, the slicing driving assembly 401 is arranged on the fixed bottom plate B 403, the slicing driving assembly 401 comprises a cylinder 40101, the cylinder rod front end of the cylinder 40101 is connected with the cylinder connecting plate 40105 through the cylinder connecting piece, the bottom surface of the cylinder connecting plate 40105 is connected with one guide shaft 40102 at each end, the bottom of the guide shaft 40102 extends out of the fixed bottom plate B 403, the bottom inside of the two guide shafts 40102 is provided with two vertical rods 40103, and the slicing piece 40104 is arranged between the two vertical rods 40103; the water spraying block A 40107 is arranged on the bottom surface of the fixed bottom plate B 403.

[0163] The cylinder 40101 is fixed on the fixed bottom plate B 403 through the fixed connecting plate 40106. The mounting seat 40108 is arranged on the fixed bottom plate B 403, the cylinder limiting nail 40110 is arranged on the mounting seat 40108, and the cylinder limiting nail 40110 is arranged below the cylinder connecting plate 40105.

[0164] A plurality of nozzles are arranged on the water spraying block A 40107, the plurality of nozzles are equidistantly arranged, and the nozzles are commercially available products. The water spraying block A 40107 is connected with the water inlet pipeline through the quick connector, and the water pump is arranged on the water inlet pipeline.

[0165] The segment 40104 is preferably a fishing line. Two segments 40104 are preferably provided.

[0166] A linear bearing 40109 is provided at the connection between the guide shaft 40102 and the fixed bottom plate B 403.

[0167] The water spraying assembly B 402 includes two facing water spraying groups, each of which includes a water spraying support 40201 provided on the box 1, an upper part of the water spraying support 40201 provided with a water spraying block B 40202, the water spraying block B 40202 being obliquely provided, a top surface of the water spraying block B 40202 provided with a long strip water spraying nozzle 40204, the water spraying nozzle 40204 being inwardly provided, the water spraying block B 40202 being connected to a water inlet pipeline through a quick connector, and a water pump being provided on the water inlet pipeline.

[0168] An adjusting groove 40203 is formed in an upper part of the water spraying support 40201, the water spraying block B 40202 is arranged on the water spraying support 40201 through the adjusting groove 40203 and a bolt, and the position of the water spraying block B 40202 is adjusted through the adjusting groove 40203 and the bolt.

[0169] The distance between the two water spraying groups is greater than the inner distance of the two synchronous belts B 205. The height of the two water spraying groups is lower than the height of the synchronous belts B 205.

[0170] The segment side clamping centering mechanism 5 includes a fixed bottom plate C 501, a centering driving assembly for workpiece 7 centering and a side clamping conveying assembly for workpiece 7 side clamping are provided on the fixed bottom plate C 501, the centering driving assembly is connected with the side clamping conveying assembly through a support frame to realize left and right movement of the side clamping conveying assembly; the side clamping conveying assembly is provided with two, each side clamping conveying assembly includes a conveying motor B 509, an output end of the conveying motor B 509 is connected with a side clamping conveying driving wheel 511 through a transmission rod B 510, the side clamping conveying driving wheel 511 is connected with a side clamping conveying driven wheel 515 through a side clamping conveying belt 512, a fixed frame plate is provided between the side clamping conveying driving wheel 511 and the side clamping conveying driven wheel 515, a synchronous belt transmission block of the centering driving assembly is connected with a top part of the support frame, the conveying motor B 509 is connected with an upper part of the support frame through a motor connecting plate, and a bottom part of the support frame is connected with the fixed frame plate through a vertical rod 517.

[0171] The side clamping conveying driven wheel 515 is connected with the fixed frame plate through a side clamping conveying driven wheel fixing plate, and a through hole is provided on the fixed frame plate, the side clamping conveying driving wheel 511 is connected with the fixed frame plate through an adjusting block B 513, a bolt adjusting block is provided adjacent to the adjusting block B 513, the bolt adjusting block is fixed on the fixed frame plate, an adjusting bolt 514 is provided on the bolt adjusting block, and the tension of the side clamping conveying belt 512 is adjusted by adjusting the position of the adjusting bolt 514 to adjust the adjusting block B 513.

[0172] The top ends of the two side clamp conveying assemblies are located on the same horizontal plane.

[0173] The centering driving assembly comprises a split side clamp driving motor 502 arranged at one end of a fixed bottom plate C501, a split side clamp driven wheel 505 arranged at the other end of the fixed bottom plate C501, a split side clamp driving motor 502 output end connected with a split side clamp driving wheel 504, and the split side clamp driving wheel 504 connected with the split side clamp driven wheel 505 through a synchronous belt E503.

[0174] The support frame is slidably connected with the fixed bottom plate C501 through a guiding assembly, wherein the guiding assembly comprises a linear guide rail B and a sliding block, the linear guide rail B is arranged on the fixed bottom plate C501, and the sliding block is arranged on the bottom surface of the support frame.

[0175] Preferably, two linear guide rails B are arranged.

[0176] A limiting seat C516 is arranged at the center of the fixed bottom plate C501 and adjacent to both ends of the linear guide rail B, and a buffer block is arranged on the limiting seat C516 for limiting and buffering protection.

[0177] The upper synchronous belt E503 is connected with the support frame B508 through a synchronous belt transmission block D506, and the lower synchronous belt E503 is connected with the support frame A507 through a synchronous belt transmission block E, a rack A is arranged outside the synchronous belt E503, a rack B is arranged inside the synchronous belt transmission block D506 and the synchronous belt transmission block E, and the rack A and the rack B are meshingly connected.

[0178] Preferably, the side clamp conveying belt 512 is a sponge belt.

[0179] A metal base plate C and a nylon limiting plate C are further arranged on the side surface of the fixed frame plate for preventing the side clamp conveying belt 512 from moving and supporting the side clamp conveying belt 512, and the nylon limiting plate C is arranged on the outer side.

[0180] The split side clamp driving motor 502 is fixed on the fixed bottom plate C501 through a split side clamp driving motor fixing seat, and the split side clamp driven wheel 505 is arranged on the fixed bottom plate C501 through a split side clamp driven wheel support.

[0181] The split side clamp centering mechanism 5 is fixed on the top surface of the top of the box body 1 through the fixed bottom plate C501.

[0182] The material distribution conveying mechanism 8 comprises a synchronous belt G802, a driving synchronous belt 804, a material distribution conveying motor 801; the output end of the material distribution conveying motor 801 is connected with a material distribution conveying driving wheel 807, the material distribution conveying driving wheel 807 is connected with a driven wheel C809 through the synchronous belt G802, the driven wheel C809 is connected with a belt driving wheel 818 through a transmission shaft E803, the belt driving wheel 818 is connected with two driven wheels D812 through the driving synchronous belt 804 to realize the movement of the driving synchronous belt 804.

[0183] The transmission shaft E803 is fixed on the inner bottom surface of the box body 1 through a support B810. Two bearings are arranged on the transmission shaft E803, and the two bearings are connected with the support B810 respectively.

[0184] A mounting plate 814 is arranged between the two driven wheels D812, one driven wheel D812 is connected with the mounting plate 814 through a driven wheel D fixing plate 813, and a through hole is arranged on the mounting plate 814, and the other driven wheel D812 is connected with the mounting plate 814 through a driven wheel D adjusting plate, a tension block D817 is arranged adjacent to the driven wheel D adjusting plate, the tension block D817 is fixed on the mounting plate 814, and a bolt is arranged on the tension block D817, and the tension of the driving synchronous belt 804 is adjusted by adjusting the position of the bolt.

[0185] A tension pulley B811 is further arranged on the driving synchronous belt 804, the tension pulley B811 is arranged below the mounting plate 814, and the tension pulley B811 is movably connected with the mounting plate 814 through a bolt and a tension pulley fixing plate.

[0186] The driving synchronous belt 804 is connected with the fixing frame through the mounting plate 814 and a fixing connecting block, and is arranged on the bottom surface in the box body 1 through the fixing frame and a fixing base.

[0187] A speed reducer D805 is further arranged between the material distribution conveying motor 801 and the material distribution conveying driving wheel 807, and the material distribution conveying motor 801 is fixed on the top side surface of the box body 1 through a motor mounting plate 806. A tension block C808 for tensioning the synchronous belt G802 is arranged on the side surface of the motor mounting plate 806, the tension block C808 is fixed on the top side surface of the box body 1, two bolts are horizontally arranged on the tension block C808, and the tension of the synchronous belt G802 is adjusted by moving the two bolts forward and backward.

[0188] The driving synchronous belt 804 is a PU smooth synchronous belt.

[0189] Metal base plates B815 and nylon limiting plates B816 are further arranged on the upper and lower top surfaces of the mounting plate 814, which are used for preventing the displacement of the driving synchronous belt 804 and supporting the driving synchronous belt 804; the nylon limiting plates B816 are arranged on the outer side.

[0190] The material tray turning mechanism 6 includes a turning motor 601, a synchronous belt F603, and a turning bracket 602. The output end of the turning motor 601 is connected to the driving wheel A604, the driving wheel A604 is connected to the driven wheel B605 through the synchronous belt F603, and the driven wheel B605 is connected to the turning bracket 602 through the transmission shaft D607.

[0191] The transmission shaft D607 is fixed to the inner bottom surface of the box body 1 through the flip support 606. Two bearings are set on the transmission shaft D607, and the two bearings are connected to the flip support 606 respectively.

[0192] A speed reducer C609 is further provided between the flip motor 601 and the driving wheel A604 , and the flip motor 601 is fixed to the top surface of the side edge of the top of the box body 1 through a motor mounting bracket 610 .

[0193] The tilt bracket 602 comprises four tilting vertical plates, each connected by a vertical plate connecting block. The four vertical plates form two tilting V-shaped plates, which are arranged parallel to each other with a gap between them. The angle between each tilting V-shaped plate is preferably 90 degrees. The tilt bracket 602 is connected to the transmission shaft D607 via the vertical plate connecting block.

[0194] A support plate 608 is further provided on the two vertical plates in the same direction. The support plate 608 and the vertical plates are perpendicular to each other, and the support plate 608 is provided outward.

[0195] The material support 10 includes a bottom plate 101, a pad 102, and two side plates 103. A square through hole is provided in the middle of the bottom plate 101 and the pad 102. The two side plates 103 are respectively located on both sides of the square through hole and are arranged facing each other. The pad 102 is provided on the bottom plate 101. Several side plate 103 sockets are provided on the bottom plate 101. One end of the side plate 103 passes through the pad 102 and is plugged into the bottom plate 101. The bottom of the other end of the side plate 103 is connected to the connecting plate 105. One end of the support rod 104 is connected to the through hole on the connecting plate 105, and the other end is connected to the support rod adjustment hole 108 on the pad 102. The distance between the two side plates 103 is the placement position of the workpiece 7.

[0196] The backing plate 102 is provided with a pressure block adjustment groove 106 . When corresponding to different workpieces 7 , the position of the side plate 103 is changed to cope with the work of workpieces 7 of different sizes.

[0197] A plurality of support rod adjustment holes 108 are provided on the backing plate 102 .

[0198] The backing plate 102 is provided with a pressing block adjustment groove A, a side plate slot, and a pressing block adjustment groove B in sequence; and pressing blocks 107 are provided on both the pressing block adjustment groove A and the pressing block adjustment groove B.

[0199] When the side plate 103 is inserted into the side plate slot position according to the working condition, the two side plates 103 are connected to the side plate socket on the bottom plate 101 after penetrating the side plate slot on the base plate 102, and the pressure block 107 is installed in the pressure block adjusting slot A and the pressure block adjusting slot B by bolts to fill the pressure block adjusting slot A and the pressure block adjusting slot B.

[0200] When the side plate 103 is inserted into the pressure block adjusting slot 106 position according to the working condition, the size of the side plate 103 can be adjusted by adjusting the size of the pressure block 107 due to different sizes. After the side plate 103 penetrates the pressure block adjusting slot 106, it is connected to the side plate socket on the bottom plate 101, and the pressure block is filled in the empty interval of the pressure block adjusting slot A and the pressure block adjusting slot B to ensure that the two side plates 103 are arranged in parallel on the base plate 102. The support rod 104 is adjusted in position by the connecting plate 105 and the support rod adjusting hole 108. At this time, the pressure block 107 is installed in the side plate slot by bolts to fill the side plate slot or no pressure block 107 is placed.

[0201] The bottom plate 101 and the base plate 102 are connected and fixed by bolts.

[0202] The wafer salvaging machine is arranged in the tank body 1, the wafer salvaging process is carried out in water, the receiving and conveying mechanism 3 and the distributing and conveying mechanism 8 are arranged at the bottom of the tank, the receiving and conveying mechanism 3 and the distributing and conveying mechanism 8 are arranged in cross, the centers of the crossed pulleys coincide, the wafer side clamping centering mechanism 2 and the wafer distributing side clamping centering mechanism 5 are arranged at the upper part of the tank and are arranged in cross, the centers of the crossed pulleys coincide, and the centers of the crossed pulleys coincide with the centers of the crossed pulleys of the receiving and conveying mechanism 3 and the distributing and conveying mechanism 8. The empty tray 10 is placed on the tray overturning mechanism 6 manually or automatically, is overturned by 90 degrees to the wafer receiving position, and waits for wafer receiving. The degumming frame (prior art) loaded with wafers after degumming is taken out from the water tank vehicle (prior art) by a cantilever crane or an automatic truss manipulator (both are prior art, and the structure is irrelevant to the present application, and only the function is needed), and is placed on the conveying belt A301 of the receiving and conveying mechanism 3. The wafer pressing device presses the wafers from top to bottom, the bottom rod of the degumming frame is automatically opened, and the degumming frame is lifted up (the part is not in the technical scheme of the present application). The synchronous belt B of the wafer side clamping centering mechanism 2 clamps the wafers and conveys them forward. The wafers are conveyed to the wafer distributing position of the wafer distributing mechanism 4, the bottom water spraying assembly B and the upper water spraying block A are opened, the wafers are sprayed by water pumped at a set pressure, the wafers are separated under the pressure of water at the water spraying position, at this time, the upper air cylinder 40101 drives the wafer distributing piece 40104 to separate the separated wafers, so that the front and rear wafers are prevented from being bonded. The receiving and conveying mechanism 3 and the wafer side clamping centering mechanism 2 stop rotating, the distributing and conveying mechanism 8 and the wafer distributing side clamping centering mechanism 5 convey and transport the separated wafers to the tray 10, the tray overturning mechanism 6 is overturned by 90 degrees, and waits for manual or automatic taking out of the wafers to the next process to feed the existing wafer inserting machine. The whole wafer salvaging machine is installed in the tank, the tank can be fixed or can move with the roller at the bottom, and one set or several sets of wafer salvaging machines can be arranged in the tank to simultaneously carry out wafer salvaging and distributing.

[0203] The silicon wafer side clamp centering mechanism 2 works as follows: the side clamp centering transmission group A and the side clamp centering transmission group B start working at the same time, the side clamp driving motors on the two centering assemblies start working, the side clamp driving motors drive the side clamp driving wheels 216, and then drive the side clamp driven wheels 215 to move through the synchronous belt A 203, and then drive the synchronous belt transmission blocks to move, and then drive the support frames to slide on the fixed bottom plate through the linear guide and the slide block of the guide assembly, and then drive the horizontal plates 206 at the bottom of the support frames to move, so that the two parallel synchronous belts B 205 start moving towards each other or moving away from each other, and the workpieces are clamped and stably conveyed on the conveying belt A 301. At the same time, the side clamp assembly A and the side clamp assembly B also start working, the clamping conveying motor 208 drives the transmission rod A 210 to rotate, and then drives the driving driving wheel 211 to rotate, and then drives the synchronous belt B 205 to move through the cooperation of the driven wheel A 408, so as to realize power transmission, and then realize stable clamping and conveying of the silicon wafer by the silicon wafer side clamp centering mechanism 2 without other fixing equipment. The nylon limiting plate A 214 and the metal pad plate A 213 can realize stable work of the synchronous belt B 205 in water, and the workpiece is not scratched, the working time is stable, the maintenance rate is low, and the loss is small.

[0204] The workpiece conveying mechanism 3 works as follows: a plurality of silicon wafers are placed on the conveying belt A 301 of the workpiece conveying mechanism 3 through the previous process, the conveying motor A 302 works, and then the power is transmitted through the synchronous belt C 310, the synchronous driven wheel, the transmission shaft B 305, the conveying wheel of the conveying belt A 301, and the conveying driven wheel A, so as to drive the conveying belt A 301 to move and realize power transmission. At the same time, the conveying motor A 302 works, and then the power is transmitted through the synchronous belt C 310, the synchronous driven wheel, the transmission shaft A 304, the conveying driving wheel 313 of the conveying belt B 303, and the conveying driven wheel B 316, so as to drive the conveying belt B 303 to move and realize power transmission. In this way, stable synchronous conveying is realized, and then the conveying belt A 301 stably conveys the workpieces to the two conveying belts B 303.

[0205] The workpiece conveying mechanism 3 works as follows: a plurality of silicon wafers are placed on the conveying belt A 301 of the workpiece conveying mechanism 3 through the previous process, the conveying motor A 302 works, and then the power is transmitted through the synchronous belt C 310, the synchronous driven wheel, the transmission shaft B 305, the conveying wheel of the conveying belt A 301, and the conveying driven wheel A, so as to drive the conveying belt A 301 to move and realize power transmission. At the same time, the conveying motor A 302 works, and then the power is transmitted through the synchronous belt C 310, the synchronous driven wheel, the transmission shaft A 304, the conveying driving wheel 313 of the conveying belt B 303, and the conveying driven wheel B 316, so as to drive the conveying belt B 303 to move and realize power transmission. In this way, stable synchronous conveying is realized, and then the conveying belt A 301 stably conveys the workpieces to the two conveying belts B 303.

[0206] The specific working of the slice side clamping centering mechanism 5 is as follows: the slice side clamping drive motor 502 on the centering drive assembly starts to work, the slice side clamping drive motor 502 drives the slice side clamping driving wheel 504 to transmit power, and then transmits power to the slice side clamping driven wheel 505 through the synchronous belt E503, so as to drive the synchronous belt E503 to move, the synchronous belt E503 is engaged and connected through the synchronous belt transmission block, so as to drive the two support frames to move, and then drive the two fixed frame plates to move through the vertical rods 517 at the bottom of the support frames, so as to drive the two parallel side clamping conveying belts 512 to move towards each other or away from each other. The workpiece is clamped to move stably on the conveying belt. The support frame slides through the guide assembly arranged at the bottom. At the same time, the side clamping conveying assembly also works synchronously. The conveying motor B509 drives the transmission rod B510 to rotate, and then drives the side clamping conveying driving wheel 511 to rotate, so as to drive the side clamping conveying belt 512 to move under the cooperation of the side clamping conveying driven wheel 515, so as to realize power transmission, and then realize stable clamping and conveying of the sliced silicon wafers by the slice side clamping centering mechanism 5 without other fixing equipment. The metal base plate C and the nylon limiting plate C3 can realize stable work of the side clamping conveying belt 512 in water, and the workpiece is not scratched. The working time is stable, the maintenance rate is low, and the loss is small.

[0207] The specific working of the material support overturning mechanism 6 is as follows: after the workpiece on the material support 10 is in place (determined by the working beat), the overturning motor 601 starts to work, the overturning motor 601 drives the driving wheel A604, and then drives the synchronous belt F603, and then drives the driven wheel B605 to rotate, so as to drive the overturning support 602 and the material support 10 to overturn by 90 degrees through the driven wheel B605 and the transmission shaft D607. Before overturning, the support plate 608 assists in supporting. After the workpiece is manually taken away, it is reset after overturning by 90 degrees.

[0208] The specific working of the material conveying mechanism 8 is as follows: the material conveying motor 801 starts to work, and then drives the material conveying driving wheel 807 through the synchronous belt G802, and then drives the driven wheel C809; the driven wheel C809 drives the belt driving wheel 818 to move through the transmission shaft E803, the belt driving wheel 818 drives the two driven wheels D812 to realize power transmission through the synchronous belt 804, so as to drive the synchronous belt 804 to move and realize stable synchronous conveying. The workpiece is conveyed to the material support 10.

[0209] Although the present application has been fully described in the foregoing by way of general description and specific embodiments, some modifications or improvements can be made on the basis of the present application, which is obvious to those skilled in the art. Therefore, these modifications or improvements made on the basis of not deviating from the spirit of the present application are within the scope of the present application.

Claims

1. A slice scooping machine, characterized in that: The wafer picking machine is arranged in a water tank body (1), and comprises a material receiving and conveying mechanism (3), a material dividing and conveying mechanism (8), and a material tray turning mechanism (6) which are arranged in sequence; the material receiving and conveying mechanism (3), the material dividing and conveying mechanism (8), and the material tray turning mechanism (6) are arranged at the bottom of the tank body (1), and the wafer picking machine further comprises a silicon wafer side clamp centering mechanism (2) and a silicon wafer side clamp centering mechanism (5) which are arranged in sequence at the upper part of the tank body (1); the material receiving and conveying mechanism (3) and the material dividing and conveying mechanism (8) are arranged crosswise, and a driven conveying wheel B (316) at the end of the material receiving and conveying mechanism (3) and a driven wheel D (812) at the front end of the material dividing and conveying mechanism (8) are arranged crosswise. ) are cross-arranged and their centers coincide, the wafer side clamp centering mechanism (2) and the slicing side clamp centering mechanism (5) are cross-arranged, the side clamp conveying active wheel (511) at the front end of the cross-arranged slicing side clamp centering mechanism (5) and the driven wheel A (408) at the end of the wafer side clamp centering mechanism (2) are cross-arranged up and down and their centers coincide, and the conveying driven wheel B (316), the driven wheel D (812), the side clamp conveying active wheel (511), and the driven wheel A (408) fall on the same vertical line at the center, and a slicing mechanism (4) is also arranged on the wafer side clamp centering mechanism (2), and the slicing mechanism (4) is arranged on a side adjacent to the slicing side clamp centering mechanism (5).

2. A chip scooping machine as claimed in claim 1, characterized in that: A material support (10) is provided on the material support turning mechanism (6).

3. A slice scooping machine as claimed in claim 1, characterized in that: The silicon wafer side clamp centering mechanism (2) comprises a side clamp centering transmission group A and a side clamp centering transmission group B arranged in opposite directions. The bottoms of the side clamp centering transmission group A and the side clamp centering transmission group B are connected by a synchronous belt B (205). The side clamp centering transmission group A and the side clamp centering transmission group B are fixed on the top surface of the box (1).

4. A chip scooping machine as claimed in claim 1, characterized in that: The material receiving and conveying mechanism (3) comprises a conveying belt A (301), a conveying belt B (303), and a conveying motor A (302); two conveying belts B (303) are provided, and are arranged at both ends of the end of the conveying belt A (301); the end of the conveying belt A (301) is arranged between the two conveying belts B (303) to form a cross arrangement; the output end of the conveying motor A (302) is connected to a synchronous driving wheel, and the synchronous driving wheel is respectively connected to two synchronous driven wheels through a synchronous belt C (310); the two synchronous driven wheels are respectively connected to the conveying wheel of the conveying belt A (301) and the conveying driving wheel (313) of the conveying belt B (303) through a transmission shaft to realize conveying a workpiece (7).

5. A slice picking machine as claimed in claim 1, characterized in that the slices The mechanism (4) comprises a slice driving assembly (401) and a water spray assembly B (402). The slice driving assembly (401) is arranged above the water spray assembly B (402). The slice driving assembly (401) is arranged on a fixed base plate B (403). The slice driving assembly (401) comprises a cylinder (40101). The front end of the cylinder rod of the cylinder (40101) is connected to a cylinder connecting plate (40105) through a cylinder connecting member. Two ends of the bottom surface of the cylinder connecting plate (40105) are respectively connected to a guide shaft (40102). The bottom of the guide shaft (40102) extends out of the fixed base plate B (403). A vertical rod (40103) is arranged on the inner side of the bottom of the two guide shafts (40102). A slice member (40104) is arranged between the two vertical rods (40103); and a water spray block A (40107) is arranged on the bottom surface of the fixed base plate B (403).

6. A slice picking machine as claimed in claim 1, characterized in that the slices The side clamp centering mechanism (5) comprises a fixed base plate C (501), on which a centering drive assembly for centering a workpiece (7) and a side clamp conveying assembly for side clamping the workpiece (7) are arranged. The centering drive assembly is connected to the side clamp conveying assembly through a support frame to drive the side clamp conveying assembly to move left and right. Two side clamp conveying assemblies are provided, each side clamp conveying assembly comprises a conveying motor B (509), the output end of the conveying motor B (509) is connected to a side clamp conveying driving wheel (511) through a transmission rod B (510), the side clamp conveying driving wheel (511) is connected to a side clamp conveying driven wheel (515) through a side clamp conveying belt (512), a fixed frame plate is provided between the side clamp conveying driving wheel (511) and the side clamp conveying driven wheel (515), the top of the support frame is connected to the synchronous belt transmission block of the centering drive assembly, the conveying motor B (509) is connected to the upper part of the support frame through a motor connecting plate, and the bottom of the support frame is connected to the fixed frame plate through a vertical rod (517).

7. A slice scooping machine as claimed in claim 1, characterized in that: The material distribution conveying mechanism (8) comprises a synchronous belt G (802), a driving synchronous belt (804), and a material distribution conveying motor (801); the output end of the material distribution conveying motor (801) is connected to a material distribution conveying driving wheel (807); the material distribution conveying driving wheel (807) is connected to a driven wheel C (809) via a synchronous belt G (802); the driven wheel C (809) is connected to a belt driving wheel (818) via a transmission shaft E (803); the belt driving wheel (818) is connected to two driven wheels D (812) respectively via a driving synchronous belt (804) to realize the movement of the driving synchronous belt (804).

8. The chip scooping machine according to claim 1, wherein: The material tray turning mechanism (6) comprises a turning motor (601), a synchronous belt F (603), and a turning bracket (602). The output end of the turning motor (601) is connected to a driving wheel A (604). The driving wheel A (604) is connected to a driven wheel B (605) via a synchronous belt F (603). The driven wheel B (605) is connected to the turning bracket (602) via a transmission shaft D (607).

9. The slice scooping machine according to claim 1, wherein: The material support (10) comprises a bottom plate (101), a pad (102), and two side plates (103). A square through hole is provided in the middle of the bottom plate (101) and the pad (102). The two side plates (103) are respectively located on both sides of the square through hole and are arranged facing each other. The pad (102) is provided on the bottom plate (101). A plurality of side plate (103) sockets are provided on the bottom plate (101). One end of the side plate (103) passes through the pad (102) and is plugged into the bottom plate (101). The bottom of the other end of the side plate (103) is connected to the connecting plate (105). One end of the support rod (104) is connected to the through hole on the connecting plate (105), and the other end is connected to the support rod adjustment hole (108) on the pad (102). The distance between the two side plates (103) is the placement position of the workpiece (7).

10. The chip scooping machine according to claim 2, wherein: The side clamp centering transmission group A comprises a fixed base plate A (201), a centering component for centering the workpiece (7) and a side clamping component A for side clamping the workpiece (7) are arranged on the fixed base plate A (201), the centering component is connected to the side clamping component A through a support frame to drive the side clamping component A to move left and right; two side clamping components A are provided, each side clamping component A comprises a clamping and conveying motor (208), the output end of the clamping and conveying motor (208) is connected to a driving active wheel (211) through a transmission rod A (210), the driving active wheel (211) is connected to a driven wheel A (408) through a synchronous belt B (205), a transverse plate (206) is arranged between the driving active wheel (211) and the driven wheel A (408), the top of the support frame is connected to the synchronous belt transmission block of the centering component, the clamping and conveying motor (208) is connected to the upper part of the support frame through a motor connecting plate, and the top of the support frame is connected to the transverse plate (206) through a support A (209); The side clamp centering transmission group B comprises a fixed base plate B (403), on which a centering component for centering a workpiece (7) and a side clamping component B for side clamping the workpiece (7) are arranged. The centering component is connected to the side clamping component B via a support frame to drive the side clamping component B to move left and right. Two side clamping components B are provided, each of which comprises a support C, the top of the support frame is connected to the synchronous belt transmission block of the centering component, and the top of the support frame is connected to the transverse plate (206) via a support A (209).

Citation Information

Patent Citations

  • Silicon wafer degumming frame and degumming cleaning machine

    CN222705494U