Preparation method of water cooling assembly for chemical vapor deposition

Abstract

The invention provides a preparation method of a water-cooling component for chemical vapor deposition, which comprises the following steps: (1) assembling a cover plate on a cooling back plate to form a plurality of water-cooling runners between the cover plate and the cooling back plate to obtain a to-be-welded component; (2) the assembly to be welded is rotated through a stirring head, spot welding treatment is conducted on the joint of the cover plate and the cooling back plate, and preliminary fixing is completed; and (3) the welding direction of a welding needle of the stirring head is adjusted, the welding needle stretches into the joint of the cover plate and the cooling back plate to conduct friction stir welding, and the cover plate and the cooling back plate are fused to obtain the water cooling assembly. The welding qualified rate is high, the stability of the size and the structure of the water-cooling assembly is guaranteed, and the problems that the water-cooling assembly is low in welding strength, water leaks, a water channel is prone to collapse and welding deformation is large are solved.

Description

Technical Field

[0001] The invention belongs to the technical field of water-cooling component processing, and relates to a method for preparing a water-cooling component for chemical vapor deposition. Background Art

[0002] Chemical vapor deposition technology is commonly used for the synthesis and preparation of semiconductor epitaxial wafers. Specifically, chemical vapor deposition equipment is used to grow thin film deposition materials with specific composition, structure, electrical and / or optical parameters on a heated growth substrate by transmitting gaseous compounds as reactive gases.

[0003] Water-cooling components are key components of chemical vapor deposition equipment. They have a tight water channel structure inside them for circulating water to cool the epitaxial wafers in the process chamber. Traditional water-cooling components are made by welding a cover plate to a base plate with a groove structure. The water channel spacing of water-cooling components is small, the welding depth is deep, and the welding material needs to reach a plasticizing temperature of 550 to 650°C, making the welding process very unstable and easily leading to water channel collapse. Due to the low welding strength of water-cooling components and the easy collapse of welds, users often experience water leaks during use, which can easily damage other components and cause abnormal use.

[0004] At present, electron beam welding is generally used in the preparation of water-cooled components. However, it has high working power and energy consumption. If the welding depth is to be increased, the power needs to be continuously increased, which not only increases the production cost, but also requires repeated welding at local pores during the preparation process, often causing weld collapse and excessive product deformation, and the welding bonding rate is not very stable.

[0005] Therefore, it is necessary to provide a welding method that can ensure the structural stability of the water cooling assembly. Summary of the Invention

[0006] In view of the shortcomings of the existing technology, the purpose of the present invention is to provide a method for preparing a water-cooling component for chemical vapor deposition, which solves the problems of low welding strength, water leakage, easy collapse of water channels, and large welding deformation of the water-cooling component, improves the qualification rate of the water-cooling component, and ensures the efficient operation of chemical vapor deposition.

[0007] To achieve this object, the present invention adopts the following technical solutions:

[0008] The present invention provides a method for preparing a water-cooling component for chemical vapor deposition, the method comprising:

[0009] (1) Assembling the cover plate on the cooling back plate to form a plurality of water cooling channels between the cover plate and the cooling back plate to obtain an assembly to be welded;

[0010] (2) Use the stirring head to rotate the components to be welded, and perform spot welding on the joints between the cover plate and the cooling back plate to complete the initial fixation;

[0011] (3) Adjust the welding direction of the welding needle of the stirring head, insert the welding needle into the junction of the cover plate and the cooling back plate to perform stir friction welding, so that the cover plate and the cooling back plate are fused to obtain a water-cooled component.

[0012] As a preferred technical solution of the present invention, the top diameter of the soldering pin is 4.9 to 5 mm, for example, it can be 4.9 mm, 4.92 mm, 4.93 mm, 4.94 mm, 4.95 mm, 4.96 mm, 4.98 mm or 5 mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0013] Preferably, the root diameter of the soldering pin is 11.4-11.5 mm, for example, it can be 11.4 mm, 11.42 mm, 11.43 mm, 11.44 mm, 11.45 mm, 11.46 mm, 11.48 mm or 11.5 mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0014] Preferably, the height of the soldering pin is 12 to 12.1 mm, for example, 12 mm, 12.02 mm, 12.04 mm, 12.05 mm, 12.06 mm, 12.08 mm or 12.1 mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0015] Preferably, the outer surface of the welding needle is distributed with right-hand threads.

[0016] As a preferred technical solution of the present invention, a cylindrical shoulder is provided at the root of the welding needle, and a spiral groove is provided on the end face of the shoulder.

[0017] Preferably, the diameter of the shoulder is 23.9-24 mm, for example, it can be 23.9 mm, 23.92 mm, 23.94 mm, 23.95 mm, 23.96 mm, 23.98 mm or 24 mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0018] Preferably, the width of the spiral groove is 1.5 to 2.7 mm, for example, it can be 1.5 mm, 1.6 mm, 1.8 mm, 2 mm, 2.2 mm, 2.3 mm, 2.5 mm or 2.7 mm, but is not limited to the listed values, and other unlisted values ​​within this numerical range are also applicable.

[0019] Preferably, the depth of the spiral groove is 0.3 to 0.8 mm, for example, it can be 0.3 mm, 0.35 mm, 0.4 mm, 0.45 mm, 0.5 mm, 0.6 mm, 0.7 mm or 0.8 mm, but it is not limited to the listed values, and other unlisted values ​​within this numerical range are also applicable.

[0020] The vortex line groove formed on the shaft shoulder of the stirring head in the present invention can firmly wrap the plasticized material during the welding process to prevent the plasticized material from flowing out and affecting the welding effect.

[0021] As a preferred technical solution of the present invention, the stirring head is made of hard alloy steel.

[0022] Preferably, the Mohs hardness of the stirring head is 9 to 10, for example, it can be 9, 9.1, 9.2, 9.4, 9.5, 9.6, 9.8 or 10, but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0023] The stirring head of the present invention has the advantages of high hardness, wear resistance, high temperature resistance, corrosion resistance, and excellent strength and toughness. By strictly controlling the structural dimensions of the stirring head, the present invention adapts it to the welding of high-density, deep-penetration water-cooled components, ensuring its weld depth, greatly improving the welding pass rate, and preventing the water-cooling channel from collapsing and blocking the cooling water flow.

[0024] As a preferred technical solution of the present invention, in the spot welding process, the rotation speed of the stirring head is 1000-1200 r / min, for example, it can be 1000 r / min, 1050 r / min, 1100 r / min, 1150 r / min or 1200 r / min, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0025] As a preferred technical solution of the present invention, the welding needle is inserted into the junction of the cover plate and the cooling back plate and then stagnated and preheated.

[0026] Preferably, the stagnation preheating time is 5 to 8 seconds, for example, 5 seconds, 6 seconds, 7 seconds or 8 seconds, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0027] Preferably, after the stagnation preheating, the temperature of the surface of the component to be welded is 190-215°C, for example, it can be 190°C, 193°C, 195°C, 198°C, 200°C, 205°C, 210°C or 215°C, but is not limited to the listed values, and other unlisted values ​​within this numerical range are also applicable.

[0028] In the present invention, the welding needle of the stirring head stops rotating after entering the junction of the cover plate and the cooling back plate, and then continues rotating to perform stir friction welding after being preheated to a certain temperature, thereby improving the welding strength and ensuring the welding qualification rate.

[0029] As a preferred technical solution of the present invention, the rotation speed of the stir friction welding is 600-800 r / min, for example, it can be 600 r / min, 620 r / min, 650 r / min, 680 r / min, 700 r / min, 720 r / min, 750 r / min, 780 r / min or 800 r / min, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0030] Preferably, the feed rate of the friction stir welding is 250-300 mm / r, for example, it can be 250 mm / r, 255 mm / r, 260 mm / r, 265 mm / r, 270 mm / r, 275 mm / r, 280 mm / r, 285 mm / r, 290 mm / r, 295 mm / r or 300 mm / r, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0031] Preferably, the welding depth of the friction stir welding is 12 to 12.5 mm, for example, 12 mm, 12.1 mm, 12.2 mm, 12.3 mm, 12.4 mm or 12.5 mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0032] As a preferred technical solution of the present invention, in the friction stir welding, the welding direction is from the cover plate toward the cooling back plate.

[0033] Preferably, the inclination angle of the soldering pin is 5° to 10°, for example, 5°, 6°, 7°, 8°, 9° or 10°, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0034] It should be noted that the inclination angle of the welding needle in the present invention refers to the angle between the axis of the stirring head and the horizontal plane.

[0035] As a preferred technical solution of the present invention, during the friction stir welding process, the heating temperature of the cover plate is lower than the heating temperature of the cooling back plate, and the temperature of the surface of the component to be welded is 150-200°C, for example, it can be 150°C, 155°C, 160°C, 165°C, 170°C, 175°C, 180°C, 185°C, 190°C, 195°C or 200°C, but is not limited to the listed values, and other unlisted values ​​within this numerical range are also applicable.

[0036] As a preferred technical solution of the present invention, the spacing between two adjacent water-cooling channels in the water-cooling assembly is 6 to 7 mm, for example, it can be 6 mm, 6.1 mm, 6.2 mm, 6.3 mm, 6.4 mm, 6.5 mm, 6.6 mm, 6.7 mm, 6.8 mm, 6.9 mm or 7 mm, but is not limited to the listed values, and other unlisted values ​​within this numerical range are also applicable.

[0037] Preferably, the depth of the water-cooling channel is 17 to 20 mm, for example, it can be 17 mm, 17.5 mm, 18 mm, 18.5 mm, 19 mm, 19.5 mm or 20 mm, but is not limited to the listed values. Other unlisted values ​​within this numerical range are also applicable.

[0038] Preferably, after the friction stir welding is completed, the deformation of the water-cooling channel is ≤0.5 mm.

[0039] Compared with the prior art, the present invention has the following beneficial effects:

[0040] The present invention provides a method for preparing a water-cooling component for chemical vapor deposition, which solves the problems of low welding strength, water leakage, easy collapse of water channels, and large welding deformation of water-cooling components. The welding depth of the water-cooling component is guaranteed, so that the welding qualification rate is as high as 100%, and the efficient cooling operation of chemical vapor deposition is guaranteed. The method is particularly suitable for the preparation of water-cooling components with dense and deep water channels, and the stability of the component size and structure is guaranteed. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 This is a schematic structural diagram of the water cooling assembly provided in Example 1 of the present invention.

[0042] Figure 2 This is a schematic structural diagram of the stirring head provided in Example 1 of the present invention.

[0043] Figure 3 This is a top view of the stirring head provided in Example 1 of the present invention.

[0044] Among them, 10 is a cooling back plate; 20 is a cover plate; 30 is a water-cooling channel; 100 is a stirring head; 101 is a welding needle; 102 is a shaft shoulder; and 103 is a vortex line groove. DETAILED DESCRIPTION

[0045] It should be understood that, in the description of the present invention, the terms "center," "longitudinal," "lateral," "up," "down," "front," "back," "left," "right," "vertical," "horizontal," "top," "bottom," "inside," "outside," and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended only to facilitate the description of the present invention and simplify the description. They do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as limiting the present invention. In the description of the present invention, unless otherwise specified, "multiple" and "several" mean two or more.

[0046] It should be noted that, in the description of the present invention, unless otherwise expressly specified or limited, the terms "disposed," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0047] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific implementation methods.

[0048] The water-cooling assembly described in the present invention is formed by welding a cover plate embedded in a cooling back plate, and is used in cooling reaction chambers during chemical vapor deposition processes, such as reaction chamber walls, heaters, or support substrates. The surface of the cooling back plate is provided with a stepped groove of the desired shape, and the cover plate is embedded in the upper groove of the stepped groove, while the lower groove of the stepped groove is used to form a water-cooling channel. The water-cooling channels of the water-cooling assembly are relatively close together, and the finished product has a protrusion on the end face of the water-cooling channel, which is a non-standard flat water channel, resulting in a greatly increased weld depth requirement.

[0049] In one embodiment, the present invention provides a method for preparing a water-cooling component for chemical vapor deposition, the method comprising:

[0050] Step 1: Assemble the cover plate on the cooling back plate to form a plurality of water cooling channels between the cover plate and the cooling back plate to obtain an assembly to be welded.

[0051] During the assembly process, the cover plate is snapped into the upper groove of the step groove on the cooling back plate, so that the cover plate and the lower groove enclose the water cooling channel that allows the flow of cooling water. The spacing between two adjacent water cooling channels is 6 to 7 mm, and the depth of the water cooling channel is 17 to 20 mm.

[0052] Step 2: Use the stirring head to rotate the components to be welded, and perform spot welding on the joints between the cover plate and the cooling back plate to complete the initial fixation.

[0053] During the spot welding process, the rotation speed of the stirring head is 1000-1200 r / min.

[0054] The stirring head used in the present invention is made of carbide steel with a Mohs hardness of 9-10 and good wear resistance. It can maintain a high hardness even under process conditions of 1000°C. The carbide steel material can be made of high-speed steel, nickel-based alloy, WC-Co alloy, polycrystalline cubic boron nitride, etc., which are well known to those skilled in the art.

[0055] The welding pin on the stirring head is a conical structure with a top diameter of 4.9 to 5 mm, a root diameter of 11.4 to 11.5 mm, and a height of 12 to 12.1 mm. The outer surface of the welding pin is distributed with right-handed threads, and the stirring head is reversed during the welding process. The root of the welding pin is provided with a cylindrical shoulder, and the shoulder and the welding pin are in a circular arc transition. The end face of the shoulder is provided with a vortex line groove, which can be made into a forward or reverse rotation, and firmly wraps the plasticized material during the welding process to prevent the plasticized material from flowing out. Specifically, the diameter of the shoulder is 23.9 to 24 mm. The width of the vortex line groove is 1.5 to 2.7 mm, preferably 2 mm. The depth of the vortex line groove is 0.3 to 0.8 mm, preferably 0.5 mm.

[0056] Step 3: Adjust the welding direction of the welding needle of the stirring head, insert the welding needle into the junction of the cover plate and the cooling back plate to perform stir friction welding, so that the cover plate and the cooling back plate are fused to obtain a water-cooled component.

[0057] In some embodiments, the soldering needle is inserted into the junction of the cover plate and the cooling back plate and then subjected to stagnant preheating. Specifically, the stagnant preheating time is 5 to 8 seconds. After the stagnant preheating, the surface temperature of the component to be soldered is 190 to 215°C, preferably 200°C.

[0058] In the friction stir welding, the welding direction is from the cover plate toward the cooling back plate. Furthermore, the inclination angle of the welding needle is 5° to 10°.

[0059] The rotation speed of the friction stir welding is 600-800 r / min, the feed rate is 250-300 mm / r, and the welding depth is 12-12.5 mm.

[0060] During the friction stir welding process, the cover plate is heated to a lower temperature than the cooling back plate, and the surface temperature of the component to be welded is maintained at 150-200°C until the entire component structure is welded. After the friction stir welding is completed, the deformation of the water-cooling channel is ≤0.5 mm.

[0061] In order to further improve the production quality of the water-cooling assembly, the present invention cleans, polishes and deburrs the water-cooling assembly in sequence after the stir friction welding is completed, and the commonly used processing techniques in this field can be adopted to ensure that the flatness and roughness of the water-cooling assembly meet the process requirements.

[0062] Example 1

[0063] This embodiment provides a method for preparing a water-cooling component for chemical vapor deposition, which specifically includes the following steps:

[0064] (1) Figure 1 As shown, the cover plate 20 is assembled on the cooling back plate 10 to form a plurality of water cooling channels 30 between the cover plate 20 and the cooling back plate 10 to obtain a component to be welded, wherein the distance between two adjacent water cooling channels 30 is 6 mm, and the depth of the water cooling channels 30 is 18 mm;

[0065] (2) Use the stirring head 100 to reverse the assembly to be welded at a speed of 1200 r / min, and perform spot welding on the joints between the cover plate 20 and the cooling back plate 10 to complete the preliminary fixation. The stirring head 100 used is made of carbide steel, and the Mohs hardness of the stirring head 100 is 9. Figure 2 and Figure 3 As shown, the outer surface of the welding pin 101 on the stirring head 100 is distributed with a right-hand thread, with a top diameter of 5mm, a root diameter of 11.5mm, and a height of 12.1mm. The root of the welding pin 101 is provided with a cylindrical shoulder 102 with a diameter of 24mm. The end surface of the shoulder 102 is provided with a spiral groove 103 with a width of 2mm and a depth of 0.5mm to enclose the plasticized material during the welding process.

[0066] (3) Adjust the welding direction of the welding needle 101 of the stirring head 100 to ensure that its inclination angle is 6°, and from the cover plate 20 to the cooling back plate 10, insert the welding needle 101 into the junction of the cover plate 20 and the cooling back plate 10 and perform a 6-second stagnation preheating. When the temperature of the surface of the welded component reaches 200°C, continue to screw the welding needle 101 into the junction of the cover plate 20 and the cooling back plate 10 to stir friction welding, ensuring that the speed is 700r / min, the feed rate is 300mm / r, and the welding depth is 12mm, so that the cover plate 20 and the cooling back plate 10 are fused to obtain a water-cooled component. During the stir friction welding process, the heating temperature of the cover plate 20 is lower than the heating temperature of the cooling back plate, ensuring that the temperature of the surface of the welded component is 150-200°C, until the welding of the entire water-cooled component is completed.

[0067] In this embodiment, after the friction stir welding is completed, the deformation of the water-cooling channel 30 is ≤0.5 mm, and the welding qualification rate is 100%.

[0068] Example 2

[0069] This embodiment provides a method for preparing a water-cooling component for chemical vapor deposition, which specifically includes the following steps:

[0070] (1) Assembling the cover plate 20 on the cooling back plate 10 to form a plurality of water cooling channels 30 between the cover plate 20 and the cooling back plate 10 to obtain a component to be welded, wherein the spacing between two adjacent water cooling channels 30 is 6.5 mm, and the depth of the water cooling channels 30 is 20 mm;

[0071] (2) Use the stirring head 100 to reverse the assembly to be welded at a speed of 1100 r / min, and perform spot welding on the joints between the cover plate 20 and the cooling back plate 10 to complete the preliminary fixation. The stirring head 100 used is made of carbide steel, and the Mohs hardness of the stirring head 100 is 9. The outer surface of the welding needle 101 on the stirring head 100 is distributed with right-handed threads, the top diameter of which is 4.9 mm, the root diameter is 11.4 mm, and the height is 12 mm. The root of the welding needle 101 is provided with a cylindrical shoulder 102 with a diameter of 23.9 mm. The end face of the shoulder 102 is provided with a vortex line groove 103 with a width of 2 mm and a depth of 0.5 mm to enclose the plasticized material during the welding process;

[0072] (3) Adjust the welding direction of the welding needle 101 of the stirring head 100 to ensure that its inclination angle is 5°, and from the cover plate 20 to the cooling back plate 10, insert the welding needle 101 into the junction of the cover plate 20 and the cooling back plate 10 and perform 8 seconds of stagnant preheating. When the temperature of the surface of the welded component reaches 200°C, continue to screw the welding needle 101 into the junction of the cover plate 20 and the cooling back plate 10 to stir friction welding, ensuring that the speed is 600r / min, the feed rate is 250mm / r, and the welding depth is 12.5mm, so that the cover plate 20 and the cooling back plate 10 are fused to obtain a water-cooled component. During the stir friction welding process, the heating temperature of the cover plate 20 is lower than the heating temperature of the cooling back plate, ensuring that the temperature of the surface of the welded component is 150-200°C, until the welding of the entire water-cooled component is completed.

[0073] In this embodiment, after the friction stir welding is completed, the deformation of the water-cooling channel 30 is ≤0.5 mm, and the welding qualification rate is 99.9%.

[0074] Example 3

[0075] This embodiment provides a method for preparing a water-cooling component for chemical vapor deposition, which specifically includes the following steps:

[0076] (1) Assembling the cover plate 20 on the cooling back plate 10 to form a plurality of water cooling channels 30 between the cover plate 20 and the cooling back plate 10 to obtain a component to be welded, wherein the spacing between two adjacent water cooling channels 30 is 7 mm, and the depth of the water cooling channels 30 is 19 mm;

[0077] (2) Use the stirring head 100 to reverse the assembly to be welded at a speed of 1000r / min, and perform spot welding on the joints between the cover plate 20 and the cooling back plate 10 to complete the preliminary fixation. The stirring head 100 used is made of carbide steel, and the Mohs hardness of the stirring head 100 is 10. The outer surface of the welding needle 101 on the stirring head 100 is distributed with right-handed threads, the top diameter of which is 4.95mm, the root diameter is 11.45mm, and the height is 12mm. The root of the welding needle 101 is provided with a cylindrical shoulder 102 with a diameter of 24mm. The end face of the shoulder 102 is provided with a vortex line groove 103 with a width of 2mm and a depth of 0.5mm to enclose the plasticized material during the welding process;

[0078] (3) Adjust the welding direction of the welding needle 101 of the stirring head 100 to ensure that its inclination angle is 10°, and from the cover plate 20 to the cooling back plate 10, insert the welding needle 101 into the junction of the cover plate 20 and the cooling back plate 10 and perform 5 seconds of stagnant preheating. When the temperature of the surface of the assembly to be welded reaches 200°C, continue to screw the welding needle 101 into the junction of the cover plate 20 and the cooling back plate 10 to stir friction welding, ensuring that the speed is 800r / min, the feed rate is 280mm / r, and the welding depth is 12.5mm, so that the cover plate 20 and the cooling back plate 10 are fused to obtain a water-cooled assembly. During the stir friction welding process, the heating temperature of the cover plate 20 is lower than the heating temperature of the cooling back plate, ensuring that the temperature of the surface of the assembly to be welded is 150-200°C, until the welding of the entire water-cooled assembly is completed.

[0079] In this embodiment, after the friction stir welding is completed, the deformation of the water-cooling channel 30 is ≤0.5 mm, and the welding qualification rate is 97%.

[0080] Example 4

[0081] This embodiment provides a method for preparing a water-cooled component for chemical vapor deposition. The difference from Example 1 is that the welding needle 101 used has a top diameter of 4 mm, a root diameter of 11 mm, and a height of 12 mm. The remaining preparation steps and process parameters are the same as those in Example 1.

[0082] After the friction stir welding in this embodiment, the deformation of the water-cooling channel 30 exceeds 0.5 mm. Compared with Example 1, a small amount of the water-cooling channel 30 collapses, and the welding qualification rate is 85%.

[0083] Example 5

[0084] This embodiment provides a method for preparing a water-cooled component for chemical vapor deposition. The difference from Example 1 is that during the spot welding process, the rotation speed of the stirring head 100 is 800 r / min, and the remaining preparation steps and process parameters are the same as those in Example 1.

[0085] In this embodiment, after the friction stir welding is completed, the deformation of the water-cooling channel 30 is ≤0.5 mm, and the welding qualification rate is 94%. Collapse is likely to occur in the early stage of friction stir welding.

[0086] Example 6

[0087] This embodiment provides a method for preparing a water-cooled component for chemical vapor deposition. The difference from Example 1 is that during friction stir welding, the rotation speed of the stirring head 100 is 500 r / min, and the remaining preparation steps and process parameters are the same as those in Example 1.

[0088] In this embodiment, after the friction stir welding is completed, the deformation of the water-cooling channel 30 is ≤0.5 mm, and the welding qualification rate is 93%.

[0089] Example 7

[0090] This embodiment provides a method for preparing a water-cooled component for chemical vapor deposition. The difference from Example 1 is that during friction stir welding, the rotation speed of the stirring head 100 is 900 r / min, and the remaining preparation steps and process parameters are the same as those in Example 1.

[0091] In this embodiment, after the friction stir welding is completed, the deformation of the water-cooling channel 30 is ≤0.5 mm, and the welding qualification rate is 94%.

[0092] Example 8

[0093] This embodiment provides a method for preparing a water-cooled component for chemical vapor deposition. The difference from Example 1 is that during friction stir welding, the feed rate of the stirring head 100 is 200 mm / r, and the remaining preparation steps and process parameters are the same as those in Example 1.

[0094] In this embodiment, after the friction stir welding is completed, the deformation of the water-cooling channel 30 is ≤0.5 mm, and the welding qualification rate is 92%.

[0095] Example 9

[0096] This embodiment provides a method for preparing a water-cooled component for chemical vapor deposition. The difference from Example 1 is that in the friction stir welding, the feed rate of the stirring head 100 is 350 mm / r, and the remaining preparation steps and process parameters are the same as those in Example 1.

[0097] In this embodiment, after the friction stir welding is completed, the deformation of the water-cooling channel 30 is ≤0.5 mm, and the welding qualification rate is 90%.

[0098] Example 10

[0099] This embodiment provides a method for preparing a water-cooled component for chemical vapor deposition. The difference from Example 1 is that during friction stir welding, the welding needle 101 is not subjected to stagnant preheating. The remaining preparation steps and process parameters are the same as those in Example 1.

[0100] In this embodiment, after the friction stir welding is completed, the deformation of the water-cooling channel 30 is ≤0.5 mm, and the welding qualification rate is 94%.

[0101] The present invention adopts a method of spot welding first and then stir friction welding, uses a stirring head 100 with a specific structural size, and controls the process parameters during the welding process, which greatly improves the welding success rate of the cover plate 20 and the cooling back plate 10, improves the welding strength, and effectively solves the problems of low welding strength, water leakage, easy collapse of water channels, and large welding deformation of the water-cooling component.

[0102] The applicant declares that the above is only a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention fall within the scope of protection and disclosure of the present invention.

Claims

1. A method for preparing a water-cooling component for chemical vapor deposition, characterized in that: The preparation method comprises: (1) Assembling the cover plate on the cooling back plate to form a plurality of water cooling channels between the cover plate and the cooling back plate to obtain an assembly to be welded; (2) Use the stirring head to rotate the components to be welded, and perform spot welding on the joints between the cover plate and the cooling back plate to complete the initial fixation; (3) Adjust the welding direction of the welding needle of the stirring head, insert the welding needle into the junction of the cover plate and the cooling back plate to perform stir friction welding, so that the cover plate and the cooling back plate are fused to obtain a water-cooled component.

2. The method for preparing a water-cooling component for chemical vapor deposition according to claim 1, characterized in that: The top diameter of the welding needle is 4.9-5 mm; Preferably, the root diameter of the welding pin is 11.4-11.5 mm; Preferably, the height of the welding pin is 12 to 12.1 mm; Preferably, the outer surface of the welding needle is distributed with right-hand threads.

3. The method for preparing a water-cooling component for chemical vapor deposition according to claim 2, characterized in that: The root of the welding pin is provided with a cylindrical shoulder, and the end surface of the shoulder is provided with a spiral groove; Preferably, the diameter of the shoulder is 23.9-24 mm; Preferably, the width of the spiral groove is 1.5 to 2.7 mm; Preferably, the depth of the spiral groove is 0.3-0.8 mm.

4. The method for preparing a water-cooling component for chemical vapor deposition according to any one of claims 1 to 3, characterized in that: The stirring head is made of carbide steel; Preferably, the Mohs hardness of the stirring head is 9-10.

5. The method for preparing a water-cooling component for chemical vapor deposition according to any one of claims 1 to 4, characterized in that: During the spot welding process, the rotation speed of the stirring head is 1000-1200 r / min.

6. The method for preparing a water-cooling component for chemical vapor deposition according to any one of claims 1 to 5, characterized in that: The welding needle is inserted into the junction of the cover plate and the cooling back plate and then stagnated and preheated; Preferably, the stagnation preheating time is 5 to 8 seconds; Preferably, after the stagnation preheating, the temperature of the surface of the component to be welded is 190-215°C.

7. The method for preparing a water-cooling component for chemical vapor deposition according to any one of claims 1 to 6, characterized in that: The rotation speed of the friction stir welding is 600-800 r / min; Preferably, the feed rate of the friction stir welding is 250-300 mm / r; Preferably, the welding depth of the friction stir welding is 12 to 12.5 mm.

8. The method for preparing a water-cooling component for chemical vapor deposition according to any one of claims 1 to 7, characterized in that: In the friction stir welding, the welding direction is from the cover plate toward the cooling back plate; Preferably, the inclination angle of the welding needle is 5° to 10°.

9. The method for preparing a water-cooling component for chemical vapor deposition according to claim 8, characterized in that: During the friction stir welding process, the heating temperature of the cover plate is lower than the heating temperature of the cooling back plate, and the temperature of the surface of the assembly to be welded is 150-200°C.

10. The method for preparing a water-cooling component for chemical vapor deposition according to claim 1, characterized in that: The distance between two adjacent water cooling channels in the water cooling assembly is 6 to 7 mm; Preferably, the depth of the water-cooling channel is 17 to 20 mm; Preferably, after the friction stir welding is completed, the deformation of the water-cooling channel is ≤0.5 mm.

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