Silicon carbide cutting liquid supply device and cutting method

Abstract

The invention belongs to the technical field of semiconductor material processing, and discloses a silicon carbide cutting liquid supply device and a cutting method.The silicon carbide cutting liquid supply device comprises a collecting pool, the top of the collecting pool is movably provided with a stable adjusting assembly, the stable adjusting assembly comprises two sets of welding plates, and triangular frames are welded to the middles of the two ends of the two sets of welding plates; a welding frame is mounted in the middle of the welding plate; through cooperation of the stable adjusting assembly, the clamping assembly and other structures, the spraying structure on the side face can be arranged on the side face of the clamping assembly in a suspended mode, and the spraying structure can be kept in a fixed state after making contact with the top of the collecting pool in the downward pressing process; meanwhile, in the swinging process, the spraying structure can transversely move to a certain degree to adjust the position, interference is avoided in the swinging process, normal use of the device is guaranteed, meanwhile, in the material swinging process, a cut gap further faces a spraying outlet area, and the cooling effect of the spraying wheel is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor material processing, and in particular relates to a silicon carbide cutting liquid supply device and a cutting method. Background Art

[0002] In the process of processing silicon carbide into wafers, a silicon carbide cutting device is required for cutting. The high-speed rotating cutting wire contacts the silicon carbide and slowly cuts off the silicon carbide. A large amount of heat is generated during the cutting process. In order to avoid excessive temperature and reduced service life of the cutting wire, continuous liquid supply is usually required. Cooling the cutting wire by flowing liquid on the surface of the cutting wire can effectively improve the cutting efficiency.

[0003] For example, the invention with publication number CN119388603A discloses a silicon carbide crystal cutting liquid supply device and a silicon carbide crystal cutting process, which relate to the field of silicon carbide processing technology, wherein the silicon carbide crystal cutting liquid supply device includes a liquid supply system, a control module and a first liquid supply pipeline for spraying mortar to the cutting wire mesh, and also includes a second liquid supply pipeline for spraying mortar to the silicon carbide crystal; the nozzle B of the second liquid supply pipeline is located obliquely above both sides of the cutting crystal; wherein the radius of the silicon carbide crystal is R, the lateral distance from the nozzle B of the second liquid supply pipeline to the cutting center is R+20mm~R+200mm, and the vertical distance from the nozzle B of the second liquid supply pipeline to the cutting center is R+20mm~R+150mm; the first liquid supply pipeline and the second liquid supply pipeline are independently controlled by the control module, which solves the problems of insufficient temperature control ability and insufficient abrasive supply in the existing silicon carbide crystal cutting process, resulting in poor cutting surface quality and low production efficiency.

[0004] In the existing technology, the problem of insufficient temperature control ability during the cutting process can be effectively solved by adding liquid supply nozzles on the outside of the silicon carbide to increase the cooling of the silicon carbide. However, the nozzle structure fixed on both sides of the silicon carbide is fixed in position, and will be in a swinging state during the silicon carbide cutting process. The swing of the fixed side nozzle will contact the cutting line, causing interference in the movement.

[0005] Therefore, a silicon carbide cutting liquid supply device and a cutting method are proposed to solve the problems raised in the background art. Summary of the Invention

[0006] In order to solve the problems raised in the above background technology, the present invention provides a silicon carbide cutting liquid supply device and a cutting method.

[0007] To achieve the above-mentioned object, the present invention provides the following technical solutions: a silicon carbide cutting liquid supply device, comprising a collection tank, wherein a stabilizing adjustment component is movably provided on the top of the collection tank;

[0008] The stable adjustment assembly includes two groups of welding plates, triangular frames are welded and installed in the middle of the two ends of the two groups of welding plates, and a welding frame is installed in the middle of the welding plates. An adjusting slider is slidingly provided on the inner side of the welding frame, and the bottom of the adjusting slider is elastically connected to the bottom of the inner side of the welding frame through a supporting spring. A fixed sleeve is welded and installed on one side of the adjusting slider, and a rotating sleeve is rotatably provided on the inner side of the fixed sleeve. A splicing edge block is spliced ​​and inserted into the inner side of the rotating sleeve, and a connecting rod is welded and installed on the side of the splicing edge block away from the rotating sleeve, and a telescopic sleeve is movably provided on the outer side of the connecting rod away from one end of the splicing edge block.

[0009] Preferably, limiting guide rods are welded and installed on both sides and the middle of the welding frame, the support spring is located on the outside of the limiting guide rod in the middle, and two sets of guide wheels are rotatably provided on the side of the welding frame away from the fixed sleeve.

[0010] Preferably, an adjusting and pressurizing component is movably provided on the inner side of the triangular frame, and the adjusting and pressurizing component includes a movable sealing plate, and the movable sealing plate is slidably provided inside the triangular frame, and the upper end of the movable sealing plate is movably connected to the top of the inner side of the triangular frame through several groups of tension springs, and several groups of connecting guide rods are installed on the top of the movable sealing plate, and the connecting guide rods movably pass through the inner side of the upper end of the triangular frame, and a movable rod is welded to the end of the connecting guide rod away from the movable sealing plate, and limiting rings are installed on the side of both ends of the welding frame away from the triangular frame.

[0011] Preferably, a first steel wire rope is installed on one side of the two ends of the movable rod close to the welding frame, the first steel wire rope is movably arranged on the inner side of the limiting ring, a small winch is arranged on the outer side of the end of the first steel wire rope, and a large winch is fixedly installed on the side of the small winch close to the welding plate.

[0012] Preferably, a rotating shaft is fixedly installed in the middle of the large capstan and the small capstan, and the rotating shaft is rotatably arranged on the side of the welding plate away from the triangular frame. A second steel wire rope is wound around the outside of the large capstan, and the second steel wire rope is located on the top of the guide wheel. A rotating ring is fixedly installed on the end of the second steel wire rope away from the large capstan, and a limiting shaft is rotatably arranged in the middle of the rotating ring, and the limiting shaft is fixedly installed on the side of the adjusting slider away from the fixed sleeve.

[0013] Preferably, four groups of supporting columns are installed at the bottom of the collection pool, and a gear transmission assembly is installed on one side of the upper end of the collection pool, a driving motor is installed at the input end of the gear transmission assembly, and a rotating roller is fixedly provided at the output end of the gear transmission assembly, and several groups of cutting lines are evenly provided on the surface of the rotating roller.

[0014] Preferably, a filter liquid storage tank is installed on the side of the collection tank away from the gear transmission assembly, and several groups of guide pipes are provided to connect the filter liquid storage tank and the collection tank. A delivery pump assembly is installed on the top of the filter liquid storage tank, and the side of the delivery pump assembly away from the collection tank is connected to a cooler through a pipeline, and main guide pipes are installed on the front and back of the cooler.

[0015] Preferably, a diverter is installed on the top of the main conduit, and two groups of transmission hoses are installed on the top of the diverter, wherein a lower liquid supply head is installed at the end of one group of transmission hoses, and the two ends of the lower liquid supply head are fixedly connected to the collection tank through a fixed plate, and an upper liquid supply head is installed at the end of the other group of transmission hoses, and the upper liquid supply head is fixedly connected to the triangular frame.

[0016] Preferably, a swing connection assembly is provided above the collection tank, and a clamping assembly is provided at the bottom of the swing connection assembly, the telescopic sleeve is fixedly mounted on the inner side of both ends of the clamping assembly, and the bottom of the clamping assembly clamps the processing material.

[0017] A silicon carbide cutting method:

[0018] S1. Paste the silicon carbide wafer onto the blue film and load it onto the cutting frame to ensure support;

[0019] S2, winding a metal wire with diamond abrasive grains on its surface onto a precision spool, applying high tension and calibrating the wire path;

[0020] S3, through the high-speed cutting wire, the line speed is about 10-15m / s, with the help of coolant, the wafer is cut by contact slurry grinding, and the feed speed is controlled, usually less than 1mm / min, to balance efficiency and reduce edge chipping;

[0021] S4: After cutting, rinse to remove silicon slag, irradiate with UV to reduce the viscosity of the blue film, and finally separate the independent chips.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] The present invention facilitates the side spray structure to be suspended on the side of the clamping assembly by arranging the coordination of structures such as the stabilizing adjustment component and the clamping component. During the downward pressing process, the spray structure can remain fixed after contacting the top of the collection tank. At the same time, during the swinging process, the spray structure can move laterally to a certain extent to adjust its position, avoiding interference during the swinging process and ensuring that the device can be used normally. The triangular frame can be connected by the welding plate, and the welding frame can provide a limit for the inner structure. The support spring pushes the adjustment slider upward. During the downward pressing process of the clamping assembly and the processed material, the welding frame will first contact the collection tank. Under the obstruction, the triangular frame for spraying can be prevented from contacting the cutting line. At the same time, when the clamping assembly continues to move downward, it will drive the adjustment slider to move downward along the limit guide rod. The spray structure is movably connected to the main body to avoid active interference. During the swinging process, the spray device will be driven to move laterally and fine-tune, avoiding contact between the spray structure and the processed material. The active interference of the spray structure is effectively solved. At the same time, during the swinging process of the material, the cut gap will be further toward the spray outlet area, thereby improving the cooling effect of the spray wheel.

[0024] The present invention cooperates with structures such as an adjusting pressurizing component and a stabilizing adjusting component, which is beneficial to increasing the pressure by driving the adjusting structure to reduce the discharge port area of ​​the triangular frame during the downward pressing process, and further injecting liquid into the silicon carbide gap by means of pressurization to enhance the cooling effect. The downward pressing adjusting slider can facilitate the rotating ring to drive the second steel wire rope to move downward. During the movement, the large winch will be pulled to rotate, and the small winch will be used to drive the first steel wire rope to pull the movable rod for adjustment. The movable rod cooperates with the connecting guide rod to push the movable sealing plate to slide along the inner side of the triangular frame, thereby reducing the area of ​​the triangular frame opening. By controlling the flow rate and reducing the spray port at the same time, the spray impact force can be effectively enhanced, thereby injecting liquid into the gap of the processing material to achieve the cooling effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2 It is a schematic structural diagram of the stabilization adjustment component of the present invention;

[0027] Figure 3 This is a schematic diagram of the cross-sectional structure of the triangular frame of the present invention;

[0028] Figure 4 This is a schematic cross-sectional structure diagram of the regulating and pressurizing assembly of the present invention;

[0029] Figure 5 For the present invention Figure 4 The enlarged cross-sectional structure diagram at point C in the middle;

[0030] Figure 6For the present invention Figure 4 The enlarged structural diagram at D in the middle;

[0031] Figure 7 For the present invention Figure 1 The enlarged structural diagram at B in the middle;

[0032] Figure 8 For the present invention Figure 1 Enlarged structural diagram at point A in the middle.

[0033] In the figure: 100, collection tank; 101, support column; 102, gear transmission assembly; 103, drive motor; 104, rotating roller; 105, cutting line;

[0034] 200, filter reservoir; 201, flow guide pipe; 202, delivery pump assembly; 203, cooler; 204, main pipe; 205, flow divider; 206, delivery hose; 207, lower liquid supply head; 208, upper liquid supply head; 209, fixing plate;

[0035] 001, adjusting and pressurizing assembly; 300, triangular frame; 301, tension spring; 302, movable sealing plate; 303, connecting guide rod; 304, movable rod; 305, limiting ring;

[0036] 400, rotating ring; 401, first steel wire rope; 402, small capstan; 403, large capstan; 404, rotating shaft; 405, second steel wire rope; 406, limit shaft;

[0037] 002, stabilizing and adjusting assembly; 500, fixing sleeve; 501, welding plate; 502, welding frame; 503, limiting guide rod; 504, supporting spring; 505, adjusting slider; 506, guide wheel; 507, rotating sleeve; 508, connecting rod; 509, splicing edge block; 510, telescopic sleeve;

[0038] 600, processing material; 601, clamping assembly; 602, swing connection assembly. DETAILED DESCRIPTION

[0039] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0040] like Figures 1 to 8 As shown, the present invention provides a silicon carbide cutting liquid supply device, comprising a collection tank 100, the top of which is movably provided with a stabilizing adjustment component 002;

[0041] The stabilization adjustment component 002 includes two groups of welding plates 501, and a triangular frame 300 is welded and installed in the middle of the two ends of the two groups of welding plates 501. A welding frame 502 is installed in the middle of the welding plate 501, and an adjustment slider 505 is slidingly provided on the inner side of the welding frame 502, and the bottom of the adjustment slider 505 is elastically connected to the bottom of the inner side of the welding frame 502 through a support spring 504. A fixed sleeve 500 is welded and installed on one side of the adjustment slider 505, and a rotating sleeve 507 is rotatably provided on the inner side of the fixed sleeve 500. A splicing edge block 509 is spliced ​​and inserted into the inner side of the rotating sleeve 507, and a connecting rod 508 is welded and installed on the side of the splicing edge block 509 away from the rotating sleeve 507, and a telescopic sleeve 510 is movably provided on the outer side of the connecting rod 508 away from the splicing edge block 509.

[0042] Limiting guide rods 503 are welded and installed on both sides and the middle of the welding frame 502, and the support spring 504 is located outside the middle limiting guide rod 503. Two sets of guide wheels 506 are rotatably set on the side of the welding frame 502 away from the fixing sleeve 500.

[0043] The above solution is adopted: the collection pool 100 is used to provide an installation position and limit for the internal structure, and can collect the processing liquid. The welding frame 502 and the triangular frame 300 can be connected by the welding plate 501. The triangular frame 300 can provide space to ensure that the liquid can be sprayed normally through the opening on the side facing the processing material 600. The welding frame 502 can provide a limit for the inner structure, and the support spring 504 can push the adjustment slider 505 to slide along the limit guide rod 503, and the limit guide rod 503 can The adjustment slider 505 is restricted to effectively increase the sliding stability. The fixed sleeve 500 can provide restrictions for the rotating sleeve 507, so that the rotating sleeve 507 can be rotated and adjusted on the inside. The connecting rod 508 can insert the splicing edge block 509 into the inside of the rotating sleeve 507. After insertion, the splicing effect can be achieved. The telescopic sleeve 510 is a telescopic structure. After cooperating with the internal spring, the connecting rod 508 can slide and adjust along the inside of the telescopic sleeve 510, and the guide wheel 506 can provide support for the second steel wire rope 405.

[0044] like Figure 3 、 Figure 4 and Figure 6As shown, an adjusting and pressurizing component 001 is movably provided on the inner side of the triangular frame 300, and the adjusting and pressurizing component 001 includes a movable sealing plate 302, and the movable sealing plate 302 is slidingly provided inside the triangular frame 300, and the upper end of the movable sealing plate 302 is movably connected to the top of the inner side of the triangular frame 300 through several groups of tension springs 301, and several groups of connecting guide rods 303 are installed on the top of the movable sealing plate 302, and the connecting guide rods 303 are movably passed through the inner side of the upper end of the triangular frame 300, and a movable rod 304 is welded to the end of the connecting guide rod 303 away from the movable sealing plate 302, and a limiting ring 305 is installed on the side of the two ends of the welding frame 502 away from the triangular frame 300.

[0045] A first steel wire rope 401 is installed on one side of the two ends of the movable rod 304 close to the welding frame 502. The first steel wire rope 401 is movably arranged on the inner side of the limiting ring 305. A small winch 402 is arranged on the outer side of the end of the first steel wire rope 401. A large winch 403 is fixedly installed on the side of the small winch 402 close to the welding plate 501.

[0046] A rotating shaft 404 is fixedly installed in the middle of the large capstan 403 and the small capstan 402, and the rotating shaft 404 is rotatably set on the side of the welding plate 501 away from the triangular frame 300. A second steel wire rope 405 is wound around the outer side of the large capstan 403, and the second steel wire rope 405 is located on the top of the guide wheel 506. A rotating ring 400 is fixedly installed on the end of the second steel wire rope 405 away from the large capstan 403, and a limiting shaft 406 is rotatably set in the middle of the rotating ring 400, and the limiting shaft 406 is fixedly installed on the side of the adjusting slider 505 away from the fixed sleeve 500.

[0047] The above-mentioned solution is adopted: the movable sealing plate 302 can slide stably on the inner side of the triangular frame 300, and the size of the opening of the triangular frame 300 is adjusted during the sliding process, which is conducive to the tension spring 301 to pull the movable sealing plate 302 to reset, and is conducive to connecting the guide rod 303 and the movable rod 304 to ensure that the position of the movable sealing plate 302 can be normally changed by pulling, and the limiting ring 305 can limit the first steel wire rope 401, and the rotating shaft 404 is used to fix the large capstan 403 and the small capstan 402 to be fixedly connected, and can provide the ability of the two sets of capstans to rotate. The second steel wire rope 405 can pull the large capstan 403 to rotate and adjust during the process of pressing the adjusting slider 505 downward, and the limiting shaft 406 can provide the rotating ring 400 with the ability of rotation adjustment to ensure stable rotation for adjustment.

[0048] like Figure 1 、 Figure 7 and Figure 8As shown, four groups of supporting columns 101 are installed at the bottom of the collection pool 100, and a gear transmission assembly 102 is installed on one side of the upper end of the collection pool 100, a driving motor 103 is installed at the input end of the gear transmission assembly 102, and a rotating roller 104 is fixedly provided at the output end of the gear transmission assembly 102, and several groups of cutting lines 105 are evenly arranged on the surface of the rotating roller 104.

[0049] A filter liquid storage tank 200 is installed on the side of the collection tank 100 away from the gear transmission assembly 102, and the filter liquid storage tank 200 and the collection tank 100 are connected by several groups of guide pipes 201. A delivery pump assembly 202 is installed on the top of the filter liquid storage tank 200, and the delivery pump assembly 202 is connected to a cooler 203 through a pipeline on the side away from the collection tank 100, and main guide pipes 204 are installed on the front and back of the cooler 203.

[0050] A diverter 205 is installed on the top of the main conduit 204, and two groups of transmission hoses 206 are installed on the top of the diverter 205, wherein a lower liquid supply head 207 is installed at the end of one group of transmission hoses 206, and both ends of the lower liquid supply head 207 are fixedly connected to the collection tank 100 through a fixed plate 209, and an upper liquid supply head 208 is installed at the end of the other group of transmission hoses 206, and the upper liquid supply head 208 is fixedly connected to the triangular frame 300.

[0051] A swing connection assembly 602 is provided above the collection tank 100 , and a clamping assembly 601 is provided at the bottom of the swing connection assembly 602 . The telescopic sleeve 510 is fixedly installed on the inner side of both ends of the clamping assembly 601 , and the bottom of the clamping assembly 601 clamps the processing material 600 .

[0052] The above solution is adopted: the support column 101 can provide support for the collection tank 100, which is conducive to the driving motor 103 to drive the gear transmission component 102 to rotate, and the gears inside the gear transmission component 102 can drive the two sets of rotating rollers 104 to rotate synchronously, thereby driving the cutting line 105 to rotate quickly to cut the processing material 600, which is conducive to the filtration liquid storage tank 200 to collect and filter the liquid through the guide pipe 201, and then facilitate the delivery pump component 202 to guide the internal liquid into the cooler 203 for cooling, and then distribute it. The liquid is injected into the interior of the main ducts 204 on both sides, and after passing through the diverter 205, it will be diverted again and injected into the two sets of transmission hoses 206. The liquid can be sprayed out through the lower liquid supply head 207 to cool the cutting line 105. The swing connection component 602 requires an external swing drive structure for adjustment. The clamping structure of the clamping component 601 is controlled by an external PLC controller to control the inward buckle of the manipulator at the bottom of the clamping component to clamp the processing material, ensuring that the processing material 600 can be normally pushed to contact the cutting line 105 for cutting.

[0053] The working principle and use process of the present invention are as follows: the liquid in the filter liquid storage tank 200 is extracted by the delivery pump assembly 202, and then cooled by the cooler 203. The cooler 203 then diverts the liquid into the inner side of the main pipe 204, and then injects the liquid into the lower liquid supply head 207 and the upper liquid supply head 208 respectively through the diverter 205. The structure inside the liquid supply head is used to evenly expand the flow area of ​​the liquid. Under the guidance of the lower liquid supply head 207, the liquid flows to the cutting line 105 for cooling.

[0054] An external drive device controls the swing connection assembly 602, the clamping assembly 601, and the workpiece 600 to move downward and rotate. The swinging connection assembly 602, the clamping assembly 601, and the workpiece 600 cooperate to swing and contact the cutting line 105. The drive motor 103 synchronously drives the two sets of rotating rollers 104 to rotate through the gear transmission assembly 102. The rotation drives the cutting line 105 to cut the swinging workpiece 600. Simultaneously, the upper liquid supply head 208 introduces cooling liquid into the triangular frame 300, and the liquid flows out through the opening of the triangular frame 300 toward the workpiece 600 to cool the workpiece 600.

[0055] During the downward movement, the clamping assembly 601 and the stabilizing adjustment assembly 002 will move downward synchronously. During the downward movement, they will always maintain a horizontal state under the action of gravity. When the welding plate 501 approaches the area of ​​the triangular frame 300 and contacts the top of the collection tank 100, the stabilizing adjustment assembly 002 will stop moving downward. The clamping assembly 601 will continue to move downward, driving the adjusting slider 505 to move steadily downward along the limiting guide rod 503 through the connecting rod 508.

[0056] During the downward movement, the rotating ring 400 will pull the second steel wire rope 405, which will drive the large capstan 403 to rotate during the pulling process. During the rotation, the rotating shaft 404 will synchronously control the rotation of the small capstan 402. The rotation process will slowly pull the first steel wire rope 401 to slide along the inner side of the limit ring 305. While sliding, the end will pull the movable rod 304. During the movement, the movable rod 304 will be used to push the movable sealing plate 302 to move along the adjustment cavity inside the triangular frame 300. Gradually adjusting the end of the movable sealing plate 302 will reduce the size of the drainage port of the triangular frame 300. While ensuring that the liquid supply volume remains unchanged, reducing the drainage port will increase the pressure of the liquid. When the processed material 600 moves down to a certain extent, the cutting will have a certain depth. The pressurized liquid can rush into the gap to cool the interior during the rotation of the processed material 600.

[0057] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0058] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A silicon carbide cutting liquid supply device, comprising a collection tank (100), characterized in that: The top of the collection tank (100) is movably provided with a stabilizing and regulating component (002); The stabilizing and adjusting component (002) comprises two groups of welding plates (501), triangular frames (300) are welded and installed in the middle of both ends of the two groups of welding plates (501), a welding frame (502) is installed in the middle of the welding plates (501), an adjusting slider (505) is slidably provided on the inner side of the welding frame (502), and the bottom of the adjusting slider (505) is elastically connected to the bottom of the inner side of the welding frame (502) through a supporting spring (504). A fixed sleeve (500) is welded and installed on one side of the slider (505), and a rotating sleeve (507) is rotatably provided on the inner side of the fixed sleeve (500), a splicing edge block (509) is spliced ​​and inserted on the inner side of the rotating sleeve (507), a connecting rod (508) is welded and installed on the side of the splicing edge block (509) away from the rotating sleeve (507), and a telescopic sleeve (510) is movably provided on the outer side of one end of the connecting rod (508) away from the splicing edge block (509).

2. A silicon carbide cutting liquid supply device according to claim 1, characterized in that: Limiting guide rods (503) are welded and installed on both sides and the middle of the welding frame (502), and the supporting spring (504) is located outside the limiting guide rod (503) in the middle. Two sets of guide wheels (506) are rotatably provided on the side of the welding frame (502) away from the fixing sleeve (500).

3. The silicon carbide cutting liquid supply device according to claim 2, characterized in that: The inner side of the triangular frame (300) is movably provided with an adjusting and pressurizing component (001), and the adjusting and pressurizing component (001) includes a movable sealing plate (302), and the movable sealing plate (302) is slidably provided inside the triangular frame (300), and the upper end of the movable sealing plate (302) is movably connected to the top of the inner side of the triangular frame (300) through a plurality of groups of tension springs (301), and the top of the movable sealing plate (302) is provided with a plurality of groups of connecting guide rods (303), and the connecting guide rods (303) are movably passed through the inner side of the upper end of the triangular frame (300), and a movable rod (304) is welded to one end of the connecting guide rod (303) away from the movable sealing plate (302), and a limiting ring (305) is installed on one side of both ends of the welding frame (502) away from the triangular frame (300).

4. The silicon carbide cutting liquid supply device according to claim 3, characterized in that: A first steel wire rope (401) is installed on one side of both ends of the movable rod (304) close to the welding frame (502), and the first steel wire rope (401) is movably arranged on the inner side of the limiting ring (305). A small capstan (402) is arranged on the outer side of the end of the first steel wire rope (401), and a large capstan (403) is fixedly installed on the side of the small capstan (402) close to the welding plate (501).

5. The silicon carbide cutting liquid supply device according to claim 4, characterized in that: A rotating shaft (404) is fixedly installed in the middle of the large capstan (403) and the small capstan (402), and the rotating shaft (404) is rotatably arranged on a side of the welding plate (501) away from the triangular frame (300). A second steel wire rope (405) is wound around the outer side of the large capstan (403), and the second steel wire rope (405) is located on the top of the guide wheel (506). A rotating ring (400) is fixedly installed on one end of the second steel wire rope (405) away from the large capstan (403), and a limiting shaft (406) is rotatably arranged in the middle of the rotating ring (400), and the limiting shaft (406) is fixedly installed on a side of the adjusting slider (505) away from the fixed sleeve (500).

6. The silicon carbide cutting liquid supply device according to claim 5, characterized in that: Four groups of supporting columns (101) are installed at the bottom of the collection pool (100), and a gear transmission assembly (102) is installed on one side of the upper end of the collection pool (100). A driving motor (103) is installed at the input end of the gear transmission assembly (102), and a rotating roller (104) is fixedly provided at the output end of the gear transmission assembly (102). A plurality of groups of cutting lines (105) are evenly provided on the surface of the rotating roller (104).

7. The silicon carbide cutting fluid supply device according to claim 1, characterized in that: A filtering liquid storage tank (200) is installed on a side of the collecting tank (100) away from the gear transmission assembly (102), and a plurality of groups of flow guide pipes (201) are provided in communication between the filtering liquid storage tank (200) and the collecting tank (100). A delivery pump assembly (202) is installed on the top of the filtering liquid storage tank (200), and a cooler (203) is connected to the side of the delivery pump assembly (202) away from the collecting tank (100) through a pipeline, and main guide pipes (204) are installed on the front and back of the cooler (203).

8. The silicon carbide cutting liquid supply device according to claim 7, characterized in that: A diverter (205) is installed on the top of the main pipe (204), and two groups of transmission hoses (206) are installed on the top of the diverter (205), wherein a lower liquid supply head (207) is installed at the end of one group of the transmission hoses (206), and both ends of the lower liquid supply head (207) are fixedly connected to the collection tank (100) through a fixing plate (209), and an upper liquid supply head (208) is installed at the end of the other group of the transmission hoses (206), and the upper liquid supply head (208) is fixedly connected to the triangular frame (300).

9. The silicon carbide cutting fluid supply device according to claim 1, characterized in that: A swing connection assembly (602) is provided above the collection tank (100), and a clamping assembly (601) is provided at the bottom of the swing connection assembly (602). The telescopic sleeve (510) is fixedly mounted on the inner sides of both ends of the clamping assembly (601), and the bottom of the clamping assembly (601) clamps the processing material (600).

10. A silicon carbide cutting method according to any one of claims 1 to 9, characterized in that: S1. Paste the silicon carbide wafer onto the blue film and load it onto the cutting frame to ensure support; S2, winding a metal wire with diamond abrasive grains on its surface onto a precision spool, applying high tension and calibrating the wire path; S3, through the high-speed cutting wire, the line speed is about 10-15m / s, with the help of coolant, the wafer is cut by contact slurry grinding, and the feed speed is controlled, usually less than 1mm / min, to balance efficiency and reduce edge chipping; S4: After cutting, rinse to remove silicon slag, irradiate with UV to reduce the viscosity of the blue film, and finally separate the independent chips.

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