OLED metal mask visual defect detection device and method capable of preventing missing detection

Abstract

The present application relates to visual defect detection related technical field, specifically is the OLED metal mask visual defect detection device and method of preventing missing, including test cabinet and the camera installed in the test cabinet, still including: the horizontal table is established in the test cabinet, the telescopic structure is established in the test cabinet, and the telescopic structure includes the motor installed in the test cabinet, the vertical shaft connected with the motor output shaft and the sleeve shaft slidingly fitted with the vertical shaft, the sleeve shaft is fixedly connected with the first connecting block, and the first connecting block is rotatably connected with the second connecting block through the shaft pin, the inclination of the mask plate is realized by setting the shaft pin, and during the detection process, after the positioning column is separated from the horizontal table, the axial position of the shaft pin is changed, so that the axial direction of the shaft pin is perpendicular twice, therefore, the camera does not need to adjust the shooting reference, on the one hand, the detection process is effectively simplified, and the detection efficiency is improved, on the other hand, the detection effect of the mask plate under the two kinds of inclination forms is effectively avoided due to the adjustment difference of the camera.

Description

Technical Field

[0001] This invention relates to the field of visual defect detection technology, specifically to a device and method for detecting visual defects in OLED metal masks to prevent missed detections. Background Technology

[0002] OLED (Organic Light Emitting Diode) is an advanced display technology widely used in electronic devices such as smartphones, televisions, and tablets. In the OLED manufacturing process, the photomask is an indispensable key component. The photomask is mainly used in the OLED manufacturing process to precisely deposit organic materials onto a substrate through a fine patterning process, thereby realizing complex circuits and display patterns. Photomasks are usually plate-shaped, and their shape can be designed according to actual production needs and equipment specifications. Common photomask shapes include rectangular (rectangular), which are typically used in the manufacture of large-area OLED panels. However, photomasks may develop defects during use, such as scratches, holes, deformation, and stains. These defects have various causes and may be related to factors such as the quality of the photomask material, processing technology, usage environment, and wear and tear from repeated use. Once these defects exist in the photomask, they can lead to uneven deposition of organic materials or incorrect patterns during OLED manufacturing, thus affecting the display effect of the OLED and even causing quality problems such as bright spots, dark spots, and incomplete display, seriously affecting the product yield and lifespan.

[0003] Therefore, defect detection of photomasks is crucial. Currently, the common detection method involves using a camera to acquire images of the photomask and then using image analysis techniques to identify and locate defects. However, in actual image acquisition, if a vertical shooting method is used, the photomask surface may generate strong reflected light. This reflected light interferes with image quality, making local details blurry or even lost, thus hiding tiny defects on the photomask. Once these defects are missed, it leads to undetected defects, which in turn affects the overall quality of OLED products.

[0004] To address this, some devices control the mask to tilt in two vertical directions during the inspection process. Specifically, the mask rotates sequentially around two perpendicular axes, allowing for two tilt configurations. One axis drives the mask to complete a first and second tilt in the vertical direction. Before the second tilt, the other axis drives the mask to tilt 90° horizontally. However, after the 90° horizontal tilt, the mask's length and width change position. The camera's reference point changes compared to before the mask rotates 90°. Therefore, before the second tilt, the camera's orientation often needs to be adjusted according to the changed reference point. This complicates the inspection process and, due to differences in camera adjustment, can lead to inconsistent inspection results in the two tilt configurations, affecting the accuracy and reliability of the inspection results. Summary of the Invention

[0005] The purpose of this invention is to provide a visual defect detection device and method for OLED metal mask plates that prevents missed detections, so as to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] The OLED metal mask visual defect detection device, designed to prevent missed detections, includes a test cabinet and a camera installed inside the test cabinet, and also includes:

[0008] The test cabinet has a horizontal platform with a groove for placing the mask to be tested. The bottom of the platform also has four positioning holes evenly distributed along the circumference.

[0009] The telescopic structure is located inside the test cabinet. The telescopic structure includes a motor installed inside the test cabinet, a vertical shaft connected to the output shaft of the motor, and a sleeve shaft that slides and engages with the vertical shaft. The sleeve shaft is fixedly connected to a first connecting block. The first connecting block is rotatably connected to a second connecting block through a shaft pin. The second connecting block is fixed with multiple positioning pins that are adapted to positioning holes.

[0010] The power mechanism located inside the test cabinet can drive the second connecting block to rotate when the positioning post is in the positioning hole, so that the cross platform and the mask plate are tilted.

[0011] Two sets of clamping mechanisms are installed inside the test cabinet. One set of clamping mechanisms is connected to the sleeve shaft through a transmission mechanism. After the clamping mechanism clamps the horizontal platform, the transmission mechanism can drive the sleeve shaft to slide relative to the vertical shaft so that the positioning pin can be pulled out of the positioning hole.

[0012] As a further aspect of the present invention: an eccentric transmission structure is provided between the vertical shaft and the sleeve shaft, the eccentric transmission structure including two strip-shaped protrusions formed on the outer wall of the vertical shaft and two strip-shaped grooves provided on the inner wall of the sleeve shaft;

[0013] The strip-shaped protrusion is adapted to the strip-shaped groove, and both are arranged along the axial direction of the vertical axis and the sleeve shaft.

[0014] As a further embodiment of the present invention: the power mechanism includes a pneumatic component disposed in the test cabinet and a driven component disposed on the first connecting block and connected to the second connecting block, wherein the driven component cooperates with the pneumatic component.

[0015] As a further embodiment of the present invention: the driven component includes a driven frame movably disposed on the first connecting block and capable of moving along the axial direction of the sleeve shaft. The driven frame is connected to the second connecting block through a push-pull structure. The push-pull structure includes a push-pull rod fixed to the second connecting block and a movable block hinged to the end of the push-pull rod away from the driven frame.

[0016] The driven frame has a follower rod fixed to its side, which cooperates with the pneumatic assembly. The second connecting block has a cross arm fixed to its side facing the driven frame, and the movable block is slidably mounted on the cross arm.

[0017] As a further embodiment of the present invention: two sets of elastic support members are provided between the driven frame and the first connecting block. The elastic support members include a protruding block fixed to the side of the first connecting block, a guide shaft fixed to the protruding block, and a first spring and a second spring sleeved on the outer periphery of the guide shaft.

[0018] The driven frame is slidably connected to the guide shaft. The two ends of the first spring are respectively connected to the protruding block and the driven frame. One end of the second spring is connected to the driven frame, and the other end is connected to the frustum of the guide shaft away from the protruding block.

[0019] As a further embodiment of the present invention: the pneumatic assembly includes a single-head cylinder fixed inside the test cabinet and a drive component fixedly installed at the movable end of the single-head cylinder. The drive component is arranged in an arc-shaped frame, and the follower rod passes through the drive component.

[0020] As a further embodiment of the present invention: the clamping mechanism includes a double-headed cylinder fixed inside the test cabinet and two sets of clamping structures respectively disposed at the two movable ends of the double-headed cylinder. The clamping structure includes a follower plate fixed to the movable end of the double-headed cylinder, two crossbars slidably disposed on the follower plate, and a clamping member fixedly connected to the two crossbars.

[0021] The clamping member is U-shaped and adapted to the horizontal platform. A third spring is sleeved on the outer periphery of the horizontal bar, and the two ends of the third spring are respectively connected to the clamping member and the follower plate.

[0022] As a further embodiment of the present invention: the transmission mechanism includes a guide plate fixed inside the test cabinet, the guide plate is provided with a guide groove, a slider is slidably fitted in the guide groove, a connecting plate is fixed on the side of the slider facing the sleeve shaft, the connecting plate is rotatably connected to the sleeve shaft, and a sliding fit structure is also provided between the slider and the movable end of the double-headed cylinder.

[0023] As a further embodiment of the present invention: the sliding fit structure includes a driven plate fixed to the side of the slider away from the connecting plate, a connecting arm fixed to the movable end of the double-headed cylinder, and a drive column fixed to the side of the connecting arm facing the driven plate;

[0024] The driven plate is provided with a groove adapted to the drive column, the drive column extends into the groove and is slidably connected to the driven plate, and the groove includes a straight groove and an inclined groove connected together.

[0025] A method for detecting visual defects in OLED metal masks, using the aforementioned visual defect detection device, includes the following steps:

[0026] Step 1: Place the mask to be inspected in the groove and use a camera to acquire an image of the mask's surface.

[0027] Step two: The power mechanism operates, driving the second connecting block to tilt the cross platform around the pivot pin via the positioning column;

[0028] Step 3: The horizontal platform is restored to a horizontal state, the clamping mechanism clamps and limits the horizontal platform, the transmission mechanism drives the positioning pin to be pulled out of the positioning hole, and the motor drives the axial orientation of the shaft pin to be adjusted by 90°.

[0029] Step four, repeat step two;

[0030] Step 5: Organize and analyze the images captured by the camera to determine the surface defects of the mask.

[0031] Compared with the prior art, the beneficial effects of the present invention are:

[0032] By setting up a horizontal platform inside the test cabinet to form a support platform for the mask to be tested, during testing, the power mechanism can drive the horizontal platform to tilt around the pivot pin, thereby avoiding the strong reflected light that interferes with image quality caused by single vertical shooting, which could lead to missed detection.

[0033] Secondly, the second connecting block and the horizontal platform are connected through the positioning pin and the positioning hole. During the detection process, the clamping mechanism can first clamp and limit the horizontal platform, and then the transmission mechanism drives the positioning pin to be pulled out of the positioning hole, which facilitates the change of direction between the first connecting block and the second connecting block, and makes the axial rotation of the shaft pin 90°. Therefore, the switching of the mask plate tilt form is realized, ensuring the comprehensiveness of image acquisition.

[0034] Furthermore, by setting a pivot pin to tilt the mask, and during the detection process, after the positioning post separates from the cross stage, the axial position of the pivot pin is changed so that the axis of the pivot pin is perpendicular twice. Thus, the camera does not need to be adjusted for the shooting reference. On the one hand, this effectively simplifies the detection process and improves detection efficiency. On the other hand, it effectively avoids the inconsistent detection effect of the mask under the two tilting forms due to differences in camera adjustment, which would affect the accuracy and reliability of the detection results. Attached Figure Description

[0035] Figure 1 A schematic diagram of one embodiment of an OLED metal mask visual defect detection device to prevent missed detection.

[0036] Figure 2 A schematic diagram of another aspect of an embodiment of a visual defect detection device for OLED metal mask to prevent missed detections.

[0037] Figure 3 A schematic diagram of the internal structure of the test cabinet in one embodiment of an OLED metal mask visual defect detection device to prevent missed detection.

[0038] Figure 4 A schematic diagram of the structure inside the test cabinet from another angle in one embodiment of the OLED metal mask visual defect detection device to prevent missed detection.

[0039] Figure 5 for Figure 4 Enlarged view of the structure at point A in the middle.

[0040] Figure 6 A schematic diagram of the connection state between the clamping mechanism and the transmission mechanism in one embodiment of an OLED metal mask visual defect detection device to prevent missed detection.

[0041] Figure 7 for Figure 6 A structural diagram from another angle.

[0042] Figure 8 An exploded view of the telescopic structure in one embodiment of an OLED metal mask visual defect detection device to prevent missed detection.

[0043] Figure 9An exploded view of the transmission mechanism in one embodiment of an OLED metal mask visual defect detection device designed to prevent missed detections.

[0044] Figure 10 A schematic diagram of the clamping mechanism in one embodiment of an OLED metal mask visual defect detection device to prevent missed detection.

[0045] In the diagram: 1. Test cabinet; 2. Horizontal platform; 201. Groove; 202. Positioning hole; 3. Motor; 4. Vertical shaft; 401. Strip protrusion; 5. Sleeve shaft; 501. Strip groove; 6. First connecting block; 601. Protruding block; 7. Shaft pin; 8. Second connecting block; 801. Positioning post; 9. Guide shaft; 901. Frustum; 10. Camera; 11. First spring; 12. Second spring; 13. Driven frame; 1301, Follower rod; 14, Cross arm; 15, Movable block; 16, Push-pull rod; 17, Double-headed cylinder; 18, Follower plate; 19, Clamping component; 20, Cross bar; 21, Third spring; 22, Guide plate; 23, Slider; 24, Driven plate; 2401, Straight groove; 2402, Inclined groove; 25, Connecting plate; 26, Connecting arm; 2601, Drive column; 27, Single-headed cylinder; 28, Drive component. Detailed Implementation

[0046] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0047] Furthermore, elements in this invention are referred to as being "fixed to" or "set on" another element, which may be directly on the other element or may also include an intervening element. When an element is considered to be "connected" to another element, it may be directly connected to the other element or may also include an intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementations.

[0048] Please see Figures 1-10 In this embodiment of the invention, the OLED metal mask visual defect detection device for preventing missed detection includes a test cabinet 1 and a camera 10 installed in the test cabinet 1, and further includes:

[0049] A horizontal platform 2 is provided inside the test cabinet 1. The horizontal platform 2 has a groove 201 for placing the mask plate to be tested. The bottom of the horizontal platform 2 also has four positioning holes 202 that are equidistantly distributed along the circumference.

[0050] The telescopic structure is installed inside the test cabinet 1. The telescopic structure includes a motor 3 installed inside the test cabinet 1, a vertical shaft 4 connected to the output shaft of the motor 3, and a sleeve shaft 5 that is slidably fitted with the vertical shaft 4. The sleeve shaft 5 is fixedly connected to a first connecting block 6. The first connecting block 6 is rotatably connected to a second connecting block 8 through a shaft pin 7. The second connecting block 8 is fixed with a plurality of positioning pins 801 that are adapted to the positioning hole 202.

[0051] The power mechanism located in the test cabinet 1 can drive the second connecting block 8 to rotate when the positioning post 801 is in the positioning hole 202, so that the cross platform 2 is tilted relative to the mask plate.

[0052] Two sets of clamping mechanisms are installed in the test cabinet 1. One set of clamping mechanisms is connected to the sleeve shaft 5 through a transmission mechanism. After the clamping mechanism clamps the horizontal platform 2, the transmission mechanism can drive the sleeve shaft 5 to slide relative to the vertical shaft 4 so that the positioning pin 801 is pulled out from the positioning hole 202.

[0053] It should be noted that during the detection process, the camera 10 is used to acquire surface images of the mask, and then transmits the acquired images to a computer. Image analysis technology is used to determine whether there are any defects on the mask that would affect its normal use.

[0054] Preferably, the groove 201 is adapted to the specifications of the mask. During operation, the mask to be tested is placed in the groove 201 to accommodate... Figure 7 Taking the state shown as an example, at this time, the horizontal platform 2 is in a horizontal state, and the camera 10 can take a vertical picture of the mask. Then, the power mechanism works, which will drive the second connecting block 8 to rotate relative to the first connecting block 6 through the shaft pin 7. Correspondingly, the second connecting block 8 can drive the horizontal platform 2 to move together through the positioning column 801. The mask located in the groove 201 can tilt, so that the camera 10 can obtain the image of the mask in the tilted state. This avoids the strong reflected light that may be generated on the surface of the mask, which may interfere with the image quality, making the details of the local area of ​​the image blurry or even lost, thus causing the small defects on the mask to be hidden and causing the problem of missed detection.

[0055] Furthermore, after the above-mentioned testing process is completed, the horizontal platform 2 returns to a horizontal state. Then, the clamping mechanism works to clamp the horizontal platform 2. After the horizontal platform 2 is clamped and limited, the transmission mechanism is triggered. The transmission mechanism drives the sleeve shaft 5 to slide relative to the vertical shaft 4, that is, the sleeve shaft 5 slides downward on the vertical shaft 4. Then, the positioning pin 801 is pulled out from the positioning hole 202.

[0056] Subsequently, the motor 3 operates, driving the vertical shaft 4, sleeve shaft 5, first connecting block 6, and second connecting block 8 to rotate 90°, causing the axial direction of the shaft pin 7 to change by 90°. Therefore, when the subsequent power mechanism operates, due to the change in position of the shaft pin 7, the tilt form of the horizontal platform 2 changes, and the mask plate tilts in two vertical directions respectively, improving the comprehensiveness of the image acquired by the camera 10.

[0057] This application sets up a horizontal platform 2 inside the test cabinet 1 to form a support platform for the mask to be tested. During the test, the power mechanism can drive the horizontal platform 2 to tilt around the pivot pin 7, thereby avoiding strong reflected light that interferes with image quality caused by single vertical shooting, which could lead to missed detection.

[0058] Secondly, the second connecting block 8 and the horizontal platform 2 are connected through the positioning post 801 and the positioning hole 202. During the detection process, the clamping mechanism can first clamp and limit the horizontal platform 2, and then the transmission mechanism drives the positioning post 801 to be pulled out of the positioning hole 202, which facilitates the change of direction between the first connecting block 6 and the second connecting block 8, and makes the axial rotation of the shaft pin 7 90°. Therefore, the switching of the mask tilt form is realized, ensuring the comprehensiveness of image acquisition.

[0059] Furthermore, this application achieves the tilting of the mask plate by setting the pivot pin 7. During the detection process, after the positioning post 801 separates from the cross platform 2, the axial position of the pivot pin 7 is changed so that the axis of the pivot pin 7 is perpendicular twice. Therefore, the camera 10 does not need to be adjusted for the shooting reference. On the one hand, this effectively simplifies the detection process and improves the detection efficiency. On the other hand, it effectively avoids the inconsistent detection effect of the mask plate under the two tilting forms due to the adjustment difference of the camera 10, which affects the accuracy and reliability of the detection results.

[0060] Please refer to it again. Figure 8 An eccentric transmission structure is provided between the vertical shaft 4 and the sleeve shaft 5. The eccentric transmission structure includes two strip-shaped protrusions 401 formed on the outer wall of the vertical shaft 4 and two strip-shaped grooves 501 provided on the inner wall of the sleeve shaft 5. The strip-shaped protrusions 401 and the strip-shaped grooves 501 are adapted to each other and are arranged along the axial direction of the vertical shaft 4 and the sleeve shaft 5.

[0061] Specifically, the strip-shaped protrusion 401 and the strip-shaped groove 501 serve two purposes. First, when the motor 3 drives the vertical shaft 4 to rotate, the vertical shaft 4 can drive the sleeve shaft 5 to rotate through the strip-shaped protrusion 401 and the strip-shaped groove 501, which facilitates the axial change of the shaft pin 7. Second, the strip-shaped protrusion 401 and the strip-shaped groove 501 also serve as guides to prevent the vertical shaft 4 and the sleeve shaft 5 from rotating relative to each other, thereby preventing the horizontal platform 2 and the mask plate from rotating and shifting.

[0062] Please refer to it again. Figure 5 , Figure 7 as well as Figure 8 The power mechanism includes a pneumatic component housed within the test cabinet 1 and a driven component mounted on the first connecting block 6 and connected to the second connecting block 8. The driven component cooperates with the pneumatic component. The driven component includes a driven frame 13 movably mounted on the first connecting block 6 and capable of axial movement along the sleeve shaft 5. The driven frame 13 is connected to the second connecting block 8 via a push-pull structure. The push-pull structure includes a push-pull rod 16 fixed to the second connecting block 8 and a movable block 15 hinged to one end of the push-pull rod 16 away from the driven frame 13. A follower rod 1301 cooperating with the pneumatic component is fixed to the side of the driven frame 13. A cross arm 14 is fixed to the side of the second connecting block 8 facing the driven frame 13, and the movable block 15 is slidably mounted on the cross arm 14.

[0063] Specifically, when the pneumatic component moves, it drives the driven frame 13 to move axially along the sleeve shaft 5. Correspondingly, the driven frame 13 can drive the second connecting block 8 to deflect around the shaft pin 7 through the push-pull rod 16, the movable block 15 and the cross arm 14.

[0064] Two sets of elastic support members are provided between the driven frame 13 and the first connecting block 6. The elastic support members include a protruding block 601 fixed to the side of the first connecting block 6, a guide shaft 9 fixed to the protruding block 601, and a first spring 11 and a second spring 12 sleeved on the outer periphery of the guide shaft 9. The driven frame 13 is slidably connected to the guide shaft 9. The two ends of the first spring 11 are respectively connected to the protruding block 601 and the driven frame 13. One end of the second spring 12 is connected to the driven frame 13, and the other end is connected to the frustum 901 at the end of the guide shaft 9 away from the protruding block 601.

[0065] The pneumatic assembly includes a single-head cylinder 27 fixed inside the test cabinet 1 and a drive component 28 fixedly installed at the movable end of the single-head cylinder 27. The drive component 28 is arranged in an arc-shaped frame, and the follower rod 1301 passes through the drive component 28.

[0066] In detail, when it is necessary to drive the horizontal platform 2 to tilt relative to the mask plate, the single-head cylinder 27 works, and its movable end drives the drive component 28 to rise and fall. Correspondingly, since the drive component 28 is set in an arc-shaped frame, when the drive component 28 changes height, it can drive the driven frame 13 to change height through the follower rod 1301.

[0067] Specifically, during the upward movement of the driven frame 13, the first spring 11 is compressed, and the driven frame 13 drives the second connecting block 8 to deflect through the shaft pin 7 via the push-pull rod 16, the movable block 15 and the cross arm 14. Then, the second connecting block 8 drives the cross platform 2 and the mask plate to tilt to one side via the positioning pin 801 and the positioning hole 202. During the downward movement of the driven frame 13, the second spring 12 is compressed, and the cross platform 2 and the mask plate tilt to the other side.

[0068] Furthermore, since the transmission mechanism drives the sleeve shaft 5 to slide relative to the vertical shaft 4 before changing the axial orientation of the shaft pin 7, until the positioning pin 801 is pulled out of the positioning hole 202, the height of the follower rod 1301 changes. The driven frame 13 is frame-type, which can provide effective space for the movement of the follower rod 1301 in this process.

[0069] Please refer to it again. Figure 10 The clamping mechanism includes a double-headed cylinder 17 fixed inside the test cabinet 1 and two sets of clamping structures respectively disposed at the two movable ends of the double-headed cylinder 17. The clamping structure includes a follower plate 18 fixed to the movable end of the double-headed cylinder 17, two crossbars 20 slidably disposed on the follower plate 18, and a clamping member 19 fixedly connected to the two crossbars 20. The clamping member 19 is arranged in a U-shape and is adapted to the horizontal platform 2. A third spring 21 is sleeved on the outer periphery of the crossbar 20. The two ends of the third spring 21 are respectively connected to the clamping member 19 and the follower plate 18.

[0070] Please refer to it again. Figure 6 and Figure 9 The transmission mechanism includes a guide plate 22 fixed inside the test cabinet 1. The guide plate 22 has a guide groove, and a slider 23 is slidably fitted inside the guide groove. A connecting plate 25 is fixed to the side of the slider 23 facing the sleeve shaft 5. The connecting plate 25 is rotatably connected to the sleeve shaft 5. A sliding fit structure is also provided between the slider 23 and the movable end of the double-headed cylinder 17. The sliding fit structure includes a driven plate 24 fixed to the side of the slider 23 away from the connecting plate 25. A connecting arm 26 is fixed to the movable end of the double-headed cylinder 17, and a drive column 2601 is fixed to the side of the connecting arm 26 facing the driven plate 24. The driven plate 24 has a groove adapted to the drive column 2601. The drive column 2601 extends into the groove and is slidably connected to the driven plate 24. The groove includes a straight groove 2401 and an inclined groove 2402 connected together.

[0071] When it is necessary to change the axial orientation of the shaft pin 7, the double-headed cylinder 17 operates beforehand, driving the clamping member 19 to move toward the horizontal platform 2, and correspondingly, the connecting arm 26 moves together.

[0072] Between the contact between the clamping member 19 and the horizontal platform 2, the drive column 2601 moves within the straight groove 2401, and the slider 23, the connecting plate 25, and the sleeve shaft 5 do not change in height. After the clamping member 19 contacts the horizontal platform 2, the horizontal platform 2 is clamped and limited. As the moving end of the double-headed cylinder 17 continues to move, the follower plate 18 moves relative to the clamping member 19, and the third spring 21 is compressed. During this process, the drive column 2601 moves in the inclined groove 2402 and slides with the driven plate 24, causing the driven plate 24 to drive the slider 23 to slide downward on the guide plate 22. Then, the slider 23 drives the sleeve shaft 5 to slide downward relative to the vertical shaft 4 through the connecting plate 25 until the positioning column 801 is pulled out from the positioning hole 202, so that the subsequent motor 3 can drive the shaft pin 7 to change its axial orientation.

[0073] As another embodiment of the present invention, a method for detecting visual defects in OLED metal masks is also proposed, which uses the aforementioned visual defect detection device and includes the following steps:

[0074] Step 1: Place the mask to be inspected in the groove 201 and use the camera 10 to acquire the surface image of the mask;

[0075] Step two, the power mechanism works, driving the second connecting block 8 to tilt the cross platform 2 around the shaft pin 7 via the positioning column 801;

[0076] Step 3: The horizontal platform 2 returns to a horizontal state, the clamping mechanism clamps and limits the horizontal platform 2, the transmission mechanism drives the positioning pin 801 to be pulled out of the positioning hole 202, and the motor 3 drives the axial orientation of the shaft pin 7 to be adjusted by 90°.

[0077] Step four, repeat step two;

[0078] Step 5: Organize and analyze the images acquired by camera 10 to determine the surface defects of the mask.

[0079] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0080] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A device for detecting visual defects of OLED metal mask plates without missing detection, comprising a test cabinet and a camera installed in the test cabinet; characterized in that Further comprising: a horizontal table arranged in the test cabinet, the horizontal table being provided with a groove for placing a mask plate to be detected, and the bottom of the horizontal table being further provided with four positioning holes distributed equidistantly along the circumference; a telescopic structure arranged in the test cabinet, the telescopic structure comprising a motor installed in the test cabinet, a vertical shaft connected to the output shaft of the motor, and a sleeve shaft slidingly sleeved with the vertical shaft, the sleeve shaft being fixedly connected with a first connecting block, the first connecting block being rotatably connected with a second connecting block through a shaft pin, and a plurality of positioning columns adapted to the positioning holes being fixedly arranged on the second connecting block; a power mechanism arranged in the test cabinet, the power mechanism being capable of driving the second connecting block to rotate when the positioning columns are located in the positioning holes, so as to incline the horizontal table and the mask plate; two sets of clamping mechanisms arranged in the test cabinet, one set of the clamping mechanisms being connected with the sleeve shaft through a transmission mechanism, the transmission mechanism being capable of driving the sleeve shaft to slide relative to the vertical shaft after the clamping mechanism clamps the horizontal table, so as to separate the positioning columns from the positioning holes; the power mechanism comprising a pneumatic assembly arranged in the test cabinet and a driven assembly arranged on the first connecting block and connected with the second connecting block, the driven assembly cooperating with the pneumatic assembly; the driven assembly comprising a driven frame movably arranged on the first connecting block and capable of moving along the axial direction of the sleeve shaft, the driven frame being connected with the second connecting block through a push-pull structure, the push-pull structure comprising a push-pull rod fixed on the second connecting block and a movable block hinged to the end of the push-pull rod away from the driven frame; wherein, the side of the driven frame is fixed with a follower rod cooperating with the pneumatic assembly, one side of the second connecting block facing the driven frame is fixed with a cross arm, and the movable block is slidingly arranged on the cross arm; two sets of elastic supporting members are arranged between the driven frame and the first connecting block; the pneumatic assembly comprising a single-head cylinder fixed in the test cabinet and a driving member fixedly installed on the movable end of the single-head cylinder, the driving member being arranged in the shape of an arc-shaped frame, and the follower rod penetrating through the driving member.

2. The device for detecting visual defects of a leaky OLED metal mask according to claim 1, wherein, an eccentric transmission structure is arranged between the vertical shaft and the sleeve shaft, the eccentric transmission structure comprising two strip-shaped protrusions formed on the outer wall of the vertical shaft and two strip-shaped grooves arranged on the inner wall of the sleeve shaft; wherein, the strip-shaped protrusions and the strip-shaped grooves are adapted to each other and arranged along the axial direction of the vertical shaft and the sleeve shaft.

3. The device for detecting visual defects of a leaky OLED metal mask according to claim 1, wherein, the elastic supporting member comprising a protruding block fixed to the side of the first connecting block, a guide shaft fixed to the protruding block, a first spring and a second spring sleeved on the outer periphery of the guide shaft; wherein, the driven frame is slidingly connected with the guide shaft, the two ends of the first spring are connected with the protruding block and the driven frame respectively, one end of the second spring is connected with the driven frame, and the other end is connected with the circular table away from the protruding block.

4. The device for detecting visual defects of a leaky OLED metal mask according to claim 1, wherein, The clamping mechanism comprises a double-head air cylinder fixed in the test cabinet and two groups of clamping structures respectively arranged at two movable ends of the double-head air cylinder, the clamping structure comprises a follower plate fixed at the movable end of the double-head air cylinder, two cross bars slidingly arranged on the follower plate, and a clamping piece fixedly connected with the two cross bars; The clamping piece is arranged in a shape similar to "U" and is matched with the cross table, a third spring is sleeved on the outer periphery of the cross bar, and the two ends of the third spring are respectively connected with the clamping piece and the follower plate.

5. The leaky OLED metal mask visual defect inspection apparatus of claim 4, wherein, The transmission mechanism comprises a guide plate fixed in the test cabinet, the guide plate is provided with a guide groove, a sliding block is slidingly fitted in the guide groove, a connecting plate is fixed on one side of the sliding block facing the sleeve shaft, the connecting plate is rotationally connected with the sleeve shaft, and a sliding cooperation structure is further arranged between the sliding block and the movable end of the double-head air cylinder.

6. The leaky OLED metal mask visual defect inspection apparatus of claim 5, wherein, The sliding cooperation structure comprises a driven plate fixed on the side of the sliding block away from the connecting plate, the movable end of the double-head air cylinder is fixed with a connecting arm, and the connecting arm is fixed with a driving column on the side facing the driven plate; The driven plate is provided with a groove matched with the driving column, the driving column extends into the groove and is slidingly connected with the driven plate, and the groove comprises a straight groove and an inclined groove connected with each other.

7. The OLED metal mask visual defect detection method, using the anti-missed detection OLED metal mask visual defect detection device according to any one of claims 1-6, characterized in that, The method comprises the following steps: Step one, place the mask to be detected in the groove, and use the camera to acquire the surface image of the mask; Step two, the power mechanism works to drive the second connecting block to drive the cross table to tilt around the shaft pin through the positioning column; Step three, the cross table returns to the horizontal state, the clamping mechanism clamps and limits the cross table, the transmission mechanism drives the positioning column to separate from the positioning hole, and the motor drives the axial orientation of the shaft pin to be adjusted by 90°; Step four, repeat step two; Step five, sort and analyze the images collected by the camera to determine the surface defects of the mask.

Images