End effectors, robotic arms, and conveying equipment for adjusting the adsorption range

Abstract

This invention provides an end effector, a robotic arm, and a conveying device for adjusting the adsorption range. The end effector for adjusting the adsorption range includes an extension and an adsorption component. The extension has a first channel and a second channel inside along the extension direction. The adsorption component includes an adsorption body, several adsorption sub-bodies, and several adsorption components. Several sets of pipes are provided around the adsorption body. One set of pipes includes a first pipe and a second pipe. A set of through holes is provided on the adsorption sub-bodies. One set of through holes includes a first through hole and a second through hole. The first pipe is slidably sealed to the first through hole, and the second pipe is slidably sealed to the second through hole. The second through hole has no other connection. By controlling the air pressure in the second pipe, the adsorption sub-bodies can move relative to the adsorption body, so that the position near the edge of the wafer can be adsorbed by the adsorption components on the adsorption sub-bodies, so that the edge of the wafer can be supported, thereby preventing the wafer from falling off.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and more particularly to an end effector, a robotic arm, and a conveying device for adjusting the adsorption range. Background Technology

[0002] In semiconductor manufacturing, the use of robotic arms to move wafers between different process cavities and between wafer boats is a crucial step. However, the wafers inside the process cavities operate at high temperatures, and at these high temperatures, the wafers have low rigidity and are very prone to deformation.

[0003] When using a vacuum suction robot to handle wafers, the suction cups cannot be made very large due to the obstruction of the wafer ejector pins. This means that the suction cups can only adhere to the middle of the lower surface of the wafer. The middle of the high-temperature wafer is adhered to by the suction cups, while the edges of the high-temperature wafer have no support. Under the action of gravity, the edges of the high-temperature wafer will deform downwards, causing the high-temperature wafer to exhibit an upward arching phenomenon in the middle, especially for thinned wafers, where this linearity is particularly obvious.

[0004] When the edge of a high-temperature wafer deforms downwards, it is very easy for it to come into contact with the arm of a robotic arm. This can lead to uneven force on the high-temperature wafer, which can cause the robotic arm's suction cup to fail to pick up the high-temperature wafer. Furthermore, contact between the edge of the high-temperature wafer and the robotic arm can damage the wafer.

[0005] Therefore, it is necessary to provide a novel end effector, manipulator, and conveying device for adjusting the adsorption range to solve the aforementioned problems existing in the prior art. Summary of the Invention

[0006] The purpose of this invention is to provide an end effector, a robotic arm, and a conveying device that can adjust the adsorption range, making it easier to handle wafers and reducing the probability of wafer adsorption failure.

[0007] To achieve the above objective, the end effector for adjusting the adsorption range according to the present invention includes:

[0008] The extension member has a first channel and a second channel formed inside along the extension direction; and,

[0009] An adsorption element includes an adsorption body, several adsorption sub-bodies, and several adsorption components. The adsorption body is fixedly disposed on the upper side of one end of the extension. The adsorption body has a third channel communicating with the first channel and a fourth channel communicating with the second channel. Several sets of pipes are arranged around the adsorption body. Each set of pipes includes a first pipe and a second pipe. The first pipe communicates with the third channel, and the second pipe communicates with the fourth channel. Each adsorption sub-bodies has a set of through holes, including a first through hole and a second through hole. Each set of through holes corresponds to a set of pipes. The first pipe and the first through hole are slidably and sealingly connected, and the second pipe and the second through hole are slidably and sealingly connected. Several first connection ports are opened on the upper side of the adsorption body. The first connection ports communicate with the third channel. Several second connection ports are opened on the upper side of the adsorption sub-bodies. The second connection ports communicate with the first through holes. Each adsorption component includes a connected first opening and a second opening. The adsorption component is fixedly disposed on the upper side of the adsorption body or the upper side of the adsorption sub-bodies. The first opening communicates with the first connection port or the second connection port.

[0010] The beneficial effect of the end effector for adjusting the adsorption range is that: the first pipe is slidably and sealed to the first through hole, the second pipe is slidably and sealed to the second through hole, and the second through hole has no other connection. By controlling the air pressure in the second pipe, the adsorption sub-body can move relative to the adsorption body, so that the position near the edge of the wafer can be adsorbed by the adsorption component on the adsorption sub-body, so that the edge of the wafer can be supported, thereby preventing the wafer from falling off.

[0011] Optionally, the end effector for adjusting the adsorption range further includes a plurality of seals, the number of which is the same as that of the adsorption assembly. The seals are disposed at the second opening. The material of the adsorption assembly is a shape memory alloy that expands when heated and contracts when cooled. When the ambient temperature rises, the adsorption assembly expands, moving the second opening away from the extension. When the ambient temperature decreases, the adsorption assembly contracts, moving the second opening closer to the extension. The material of the seals is a flexible material with a melting point greater than or equal to 150°C.

[0012] Optionally, the end effector for adjusting the adsorption range further includes a plurality of auxiliary shrinking components, the number of which is the same as the number of adsorption components. The auxiliary shrinking components are disposed on the upper side of the adsorption body and the upper side of the adsorption sub-body, and are connected to the corresponding adsorption components, for assisting the adsorption components to shrink when the environment cools down.

[0013] Optionally, the auxiliary shrinking member includes at least one spring, one end of which is connected to the other side of the adsorption body, and the other end of which is connected to a position near the second opening of the adsorption assembly. When the ambient temperature is room temperature, the spring is in its natural state.

[0014] The present invention also provides a robotic arm, comprising:

[0015] The connector includes a rotating assembly having a first air guide hole and a second air guide hole; and,

[0016] The end effector for adjusting the adsorption range is fixedly connected to the rotating assembly. The first channel is connected to the first air guide hole, and the second channel is connected to the second air guide hole.

[0017] Optionally, the connector further includes a cylindrical hollow shell with an arc-shaped opening along the central axis. The cylindrical hollow shell contains two annular plates. The upper and lower edges of the arc-shaped opening are respectively fixedly connected to one of the annular plates. An upper annular channel is provided on the lower surface of the annular plate fixedly connected to the upper edge of the arc-shaped opening, and a lower annular channel is provided on the upper surface of the annular plate fixedly connected to the lower edge of the arc-shaped opening.

[0018] Optionally, the rotating assembly is in the shape of a cylindrical tube, with its upper end face slidably and sealingly connected to the upper annular channel, and its lower end face slidably and sealingly connected to the lower annular channel.

[0019] Optionally, the connector further includes an air guide, which is disposed inside the cylindrical hollow shell and communicates with the first air guide hole and the second air guide hole.

[0020] Optionally, the air guide includes an inner tube, an outer tube, a first connecting tube, a second connecting tube, an inner bottom tube, and an outer bottom tube. The outer tube is sleeved outside the inner tube, forming an annular space between the outer tube and the inner tube. One end of the inner tube and one end of the outer tube are both sealed. One end of the first connecting tube communicates with the inner tube, and the other end of the first connecting tube communicates with the first air guide hole. One end of the second connecting tube communicates with the outer tube, and the other end of the second connecting tube communicates with the second air guide hole. The upper end face of the inner bottom tube is slidably and sealingly connected to the outer wall of the other end of the inner tube, and the lower end face of the inner bottom tube is sealed. The inner bottom tube communicates with the inner tube. The upper end face of the outer bottom tube is slidably and sealingly connected to the other end of the outer tube, and the lower end face of the outer bottom tube is sealedly connected to the outer wall of the inner tube.

[0021] Optionally, the air guide further includes a bearing and several fixing rods. The inner ring of the bearing is fitted around one end of the outer tube, and the inner ring of the bearing is fixedly connected to the outer wall of the outer tube. The outer ring of the bearing is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rods. The inner bottom tube or the outer bottom tube is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rods.

[0022] Optionally, the air guide further includes a driven member, which is disposed around the outer tube. The manipulator further includes a drive unit, which includes a drive member. The drive member is connected to the driven member through a transmission member. The drive member is used to provide driving force and drive the driven member to rotate through the transmission member.

[0023] Optionally, the robotic arm further includes a vacuum generating unit, which includes a first vacuum generating element and a second vacuum generating element. The first vacuum generating element is connected to the inner bottom tube through a first connecting pipe, and the second vacuum generating element is connected to the outer bottom tube through a second connecting pipe.

[0024] The present invention also provides a transmission device, comprising:

[0025] The robotic arm; and,

[0026] The control unit is electrically connected to the robotic arm and is used to control the movement of the robotic arm. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the end effector for adjusting the adsorption range in some embodiments of the present invention;

[0028] Figure 2 As shown in some embodiments of the present invention Figure 1 A schematic diagram of the cross-sectional structure of the end effector for adjusting the adsorption range, after being cut along plane a (enclosed by the dashed line).

[0029] Figure 3 This is a schematic diagram of the structure of the robotic arm in some embodiments of the present invention;

[0030] Figure 4 This is a schematic diagram of the structure of the rotating component in some embodiments of the present invention;

[0031] Figure 5 This is a schematic diagram of the structure of the annular plate in some embodiments of the present invention;

[0032] Figure 6 This is a schematic diagram of the air guide component in some embodiments of the present invention.

[0033] Explanation of reference numerals in the attached figures:

[0034] 10. End effector for adjusting the adsorption range; 11. Extension; 111. First channel; 112. Second channel; 113. Third channel; 114. Fourth channel; 12. Adsorption element; 121. Adsorption body; 1211. First pipe; 1212. Second pipe; 1213. First connection port; 1214. Second connection port; 122. Adsorption sub-body; 1221. First through hole; 1222. Second through hole; 123. Adsorption assembly; 231. First opening; 1232. Second opening; 13. Seal; 20. Connector; 21. Rotating assembly; 22. First air vent; 221. Second air vent; 23. Cylindrical hollow shell; 24. Arc-shaped opening; 25. Annular plate; 251. Upper ring channel; 201. Inner tube; 202. Outer tube; 203. First connecting tube; 204. Second connecting tube; 205. Inner bottom tube; 206. Outer bottom tube; 207. Bearing; 208. Fixing rod. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0036] To address the problems existing in the prior art, embodiments of the present invention provide an end effector for adjusting the adsorption range. (Refer to...) Figure 1 and Figure 2The end effector 10 for adjusting the adsorption range includes an extension 11 and an adsorption component 12. The extension 11 has a first channel 111 and a second channel 112 formed inside along its extension direction. The adsorption component 12 includes an adsorption body 121, several adsorption sub-body 122, and several adsorption assemblies 123. The adsorption body 121 is fixedly disposed on the upper side of one end of the extension 11. The adsorption body 121 has a third channel 113 connecting the first channel 111 and a fourth channel 114 connecting the second channel 112. Several sets of pipes are arranged around the adsorption body 121. Each set of pipes includes a first pipe 1211 and a second pipe 1212. The first pipe 1211 communicates with the third channel 113, and the second pipe 1212 communicates with the fourth channel 114. Each adsorption sub-body 122 has a set of through holes, including a first through hole 1221 and a second through hole 1222. A set of through holes corresponds to a set of pipes. The first pipe 1211 is slidably and sealingly connected to the first through hole 1221, and the second pipe 1212 is slidably and sealingly connected to the second through hole 1222. The upper side of the adsorption body 121 is provided with a plurality of first connection ports 1213, which are connected to the third channel 113. The upper side of the adsorption sub-body 122 is provided with a plurality of second connection ports 1214, which are connected to the first through hole 1221. The adsorption assembly 123 includes a first opening 1231 and a second opening 1232 that are connected. The adsorption assembly 123 is fixedly disposed on the upper side of the adsorption body 121 or the upper side of the adsorption sub-body 122. The first opening 1231 is connected to the first connection port 1213 or the second connection port 1214.

[0037] The first pipe is slidably and sealed to the first through hole, and the second pipe is slidably and sealed to the second through hole. The second through hole has no other connection. By controlling the air pressure in the second pipe, the adsorption sub-body can move relative to the adsorption body, so that the position near the edge of the wafer can be adsorbed by the adsorption component on the adsorption sub-body, so that the edge of the wafer can be supported, thereby preventing the wafer from falling off.

[0038] In some embodiments, the second through hole is only connected to the second pipe. A first retaining ring is provided in both the first through hole and the second through hole, and a second retaining ring is provided on both the first pipe and the second pipe. The first retaining ring and the second retaining ring block each other to prevent the first pipe from completely sliding out of the first through hole and to prevent the second pipe from completely sliding out of the second through hole.

[0039] Reference Figure 1The extension 11 is long and narrow, and can be cylindrical or prismatic. The adsorption component 123 is cylindrical.

[0040] Reference Figure 2 The end effector 10 for adjusting the adsorption range also includes a plurality of sealing elements 13, the number of which is the same as that of the adsorption assembly 123, and the sealing elements 13 are disposed on the second opening 1232.

[0041] In some embodiments, the adsorption component is made of a shape memory alloy that expands when heated and contracts when cooled. When the ambient temperature rises, the adsorption component expands, moving the second opening away from the extension; when the ambient temperature decreases, the adsorption component contracts, moving the second opening closer to the extension. The sealing element is made of a flexible material with a melting point greater than or equal to 150°C. The melting point of the sealing element material is 200°C, 300°C, 600°C, etc.

[0042] In some embodiments, the material of the adsorption component includes any one of nickel-titanium alloy, copper-based shape memory alloy, iron-based shape memory alloy, etc., and the material of the sealing component includes any one of polytetrafluoroethylene (PTEF), high-performance polyimide (VESPEL), etc.

[0043] In some embodiments, the seal is funnel-shaped, with a circular groove (not shown in the figure) at the small end of the seal, and the central axis of symmetry of the circular groove coincides with the central axis of symmetry of the seal. The edge of the second opening is embedded in the circular groove, the small end of the seal is connected to the second opening, and the large end of the seal faces upward.

[0044] In some embodiments, the end effector for adjusting the adsorption range further includes a plurality of auxiliary shrinking members, the number of which is the same as the number of adsorption components. The auxiliary shrinking members are disposed on the upper side of the adsorption body and the upper side of the adsorption sub-body, and are connected to the corresponding adsorption components, for assisting the adsorption components to shrink when the environment cools down.

[0045] After the adsorption component adsorbs the wafer, it is affected by the pressure of the wafer. When the adsorption component shrinks, it may shift. Through the influence of the auxiliary shrinking component, the adsorption component can deform in a preset direction to avoid shifting during shrinkage and ensure the safety of the wafer during the handling process.

[0046] In some embodiments, the auxiliary shrinking member includes at least one spring, one end of which is connected to the other side of the adsorption body, and the other end of which is connected to a position near the second opening of the adsorption assembly. When the ambient temperature is room temperature, the spring is in its natural state.

[0047] In some embodiments, the auxiliary shrinking member includes two springs, a first spring and a second spring. One end of the first spring is fixedly connected to a first point on the extension member, and the other end of the first spring is fixedly connected to a second point on the adsorption assembly. One end of the second spring is fixedly connected to a third point on the extension member, and the other end of the second spring is fixedly connected to a fourth point on the adsorption assembly. The first and third points are symmetrical about the axis of the adsorption assembly, and the second and fourth points are also symmetrical about the axis of the adsorption assembly.

[0048] In other embodiments, the auxiliary shrinking member includes a hollow cylindrical structure, one end of which is connected to the extension member, and the adsorption member is partially disposed within the hollow cylindrical structure.

[0049] The present invention also provides a robotic arm, with reference to Figure 2 , Figure 3 and Figure 4 The robotic arm includes a connector 20 and an end effector 10 for adjusting the adsorption range. The connector 20 includes a rotating assembly 21, which has a first air guide hole 22 and a second air guide hole 221. The end effector 10 for adjusting the adsorption range is fixedly connected to the rotating assembly 21, with the first channel 111 communicating with the first air guide hole 22 and the second channel 112 communicating with the second air guide hole 221.

[0050] Reference Figure 3 and Figure 5 The connector 20 further includes a cylindrical hollow shell 23. The cylindrical hollow shell 23 has an arc-shaped opening 24 along the direction of the central axis. The cylindrical hollow shell 23 has two annular plates 25 inside. The upper edge and lower edge of the arc-shaped opening 24 are respectively fixedly connected to one of the annular plates 25. An upper annular channel 251 is provided on the lower surface of the annular plate 25 fixedly connected to the upper edge of the arc-shaped opening 24, and a lower annular channel is provided on the upper surface of the annular plate 25 fixedly connected to the lower edge of the arc-shaped opening 24.

[0051] Reference Figure 3 , Figure 4 and Figure 5 The rotating component 21 is in the shape of a cylindrical tube. The upper end face of the rotating component 21 is slidably and sealingly connected to the upper annular channel 251, and the lower end face of the rotating component 21 is slidably and sealingly connected to the lower annular channel.

[0052] The rotating component is in the shape of a cylindrical tube, which makes it easier for the rotating component to rotate within the cylindrical hollow shell, reducing the difficulty of structural design and reducing the number of related accessories.

[0053] In some embodiments, the connector further includes an air guide, which is disposed within the cylindrical hollow housing and communicates with the first air guide hole and the second air guide hole.

[0054] Reference Figure 4 and Figure 6 The air guide includes an inner tube 201, an outer tube 202, a first connecting tube 203, a second connecting tube 204, an inner bottom tube 205, and an outer bottom tube 206. The outer tube 202 is sleeved outside the inner tube 201, forming an annular space between the outer tube 202 and the inner tube 201. One end of the inner tube 201 and one end of the outer tube 202 are both sealed. One end of the first connecting tube 203 communicates with the inner tube 201, and the other end of the first connecting tube 203 communicates with the first air guide hole 22. The second connecting tube 205... One end of the connecting pipe 204 is connected to the outer pipe 202, and the other end of the second connecting pipe 204 is connected to the second air guide hole 221. The upper end face of the inner bottom pipe 205 is slidably and sealingly connected to the outer wall of the other end of the inner pipe 201. The lower end face of the inner bottom pipe 205 is sealed. The inner bottom pipe 205 is connected to the inner pipe 201. The upper end face of the outer bottom pipe 206 is slidably and sealingly connected to the other end of the outer pipe 202. The lower end face of the outer bottom pipe 206 is sealedly connected to the outer wall of the inner pipe 201.

[0055] Reference Figure 3 and Figure 6 The air guide component also includes a bearing 207 and several fixing rods 208. The inner ring of the bearing 207 is fitted around one end of the outer tube 202, and the inner ring of the bearing 207 is fixedly connected to the outer wall of the outer tube 202. The outer ring of the bearing 207 is fixedly connected to the inner wall of the cylindrical hollow shell 23 through the fixing rods 208. The inner bottom tube 205 or the outer bottom tube 206 is fixedly connected to the inner wall of the cylindrical hollow shell 23 through the fixing rods 208.

[0056] In some embodiments, a sealing ring is provided between the upper end face of the inner bottom tube and the outer wall of the other end of the inner tube to enhance the seal between the upper end face of the inner bottom tube and the outer wall of the other end of the inner tube; a sealing ring is provided between the upper end face of the outer bottom tube and the other end of the outer tube to enhance the seal between the upper end face of the outer bottom tube and the other end of the outer tube.

[0057] In some embodiments, the air guide further includes a driven member, which is disposed around the outer tube. The manipulator further includes a drive unit, which includes a drive member connected to the driven member via a transmission member. The drive member is used to provide driving force to drive the driven member to rotate via the transmission member.

[0058] In some embodiments, the robotic arm further includes a vacuum generating unit, which includes a first vacuum generating element and a second vacuum generating element. The first vacuum generating element is connected to the inner bottom tube through a first connecting pipe, and the second vacuum generating element is connected to the outer bottom tube through a second connecting pipe.

[0059] In some embodiments, the robotic arm further includes a lifting mechanism, with the connecting member fixedly connected to the lifting mechanism. The lifting mechanism is used to move the connecting member in the vertical direction. The lifting mechanism can be a cylinder or a motor-driven slide rail mechanism, etc., and can be implemented using several existing technologies, which will not be described in detail here.

[0060] The present invention also provides a conveying device, including the aforementioned robotic arm and a control unit. The control unit is electrically connected to the robotic arm and is used to control the movement of the robotic arm. Specifically, the control unit controls the lifting mechanism and controls whether the first vacuum generator and the second vacuum generator evacuate a vacuum. The control unit is a motion controller, or it can be a programmable logic controller (PLC).

[0061] The present invention also provides a semiconductor system including the aforementioned transfer device. Of course, the semiconductor system also includes other semiconductor devices, such as etching equipment, deposition equipment, cleaning equipment, crystal boats, etc., which will not be described in detail here.

[0062] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. An end effector for adjusting the adsorption range, characterized in that, include: The extension component has a first channel and a second channel inside along the extension direction; as well as, An adsorption element includes an adsorption body, several adsorption sub-bodies, and several adsorption components. The adsorption body is fixedly disposed on the upper side of one end of the extension. The adsorption body has a third channel communicating with the first channel and a fourth channel communicating with the second channel. Several sets of pipes are arranged around the adsorption body. Each set of pipes includes a first pipe and a second pipe. The first pipe communicates with the third channel, and the second pipe communicates with the fourth channel. Each adsorption sub-bodies has a set of through holes, including a first through hole and a second through hole. Each set of through holes corresponds to a set of pipes. The first pipe and the first through hole are slidably and sealingly connected, and the second pipe and the second through hole are slidably and sealingly connected. Several first connection ports are opened on the upper side of the adsorption body. The first connection ports communicate with the third channel. Several second connection ports are opened on the upper side of the adsorption sub-bodies. The second connection ports communicate with the first through holes. Each adsorption component includes a connected first opening and a second opening. The adsorption component is fixedly disposed on the upper side of the adsorption body or the upper side of the adsorption sub-bodies. The first opening communicates with the first connection port or the second connection port.

2. The end effector for adjusting the adsorption range according to claim 1, characterized in that, The end effector for adjusting the adsorption range also includes several seals, the number of which is the same as the number of adsorption components. The seals are disposed at the second opening. The material of the adsorption component is a shape memory alloy that expands when heated and contracts when cooled. When the ambient temperature rises, the adsorption component expands, moving the second opening away from the extension. When the ambient temperature decreases, the adsorption component contracts, moving the second opening closer to the extension. The material of the seal is a flexible material with a melting point greater than or equal to 150°C.

3. The end effector for adjusting the adsorption range according to claim 2, characterized in that, The end effector for adjusting the adsorption range also includes several auxiliary shrinking components. The number of auxiliary shrinking components is the same as the number of adsorption components. The auxiliary shrinking components are disposed on the upper side of the adsorption body and the upper side of the adsorption sub-body, and are connected to the corresponding adsorption components. They are used to assist the adsorption components in shrinking when the environment cools down.

4. The end effector for adjusting the adsorption range according to claim 3, characterized in that, The auxiliary shrinking component includes at least one spring, one end of which is connected to the other side of the adsorption body, and the other end of which is connected to a position near the second opening of the adsorption component. When the ambient temperature is room temperature, the spring is in its natural state.

5. A robotic arm, characterized in that, include: The connector includes a rotating assembly, on which a first air guide hole and a second air guide hole are provided; as well as, The end effector for adjusting the adsorption range as described in any one of claims 1 to 4, wherein the end effector for adjusting the adsorption range is fixedly connected to the rotating assembly, the first channel is connected to the first air guide hole, and the second channel is connected to the second air guide hole.

6. The robotic arm according to claim 5, characterized in that, The connector also includes a cylindrical hollow shell with an arc-shaped opening along the central axis. The cylindrical hollow shell contains two annular plates. The upper and lower edges of the arc-shaped opening are respectively fixedly connected to one of the annular plates. An upper annular channel is provided on the lower surface of the annular plate fixedly connected to the upper edge of the arc-shaped opening, and a lower annular channel is provided on the upper surface of the annular plate fixedly connected to the lower edge of the arc-shaped opening.

7. The robotic arm according to claim 6, characterized in that, The rotating assembly is in the shape of a cylindrical tube. The upper end face of the rotating assembly is slidably and sealed to the upper annular channel, and the lower end face of the rotating assembly is slidably and sealed to the lower annular channel.

8. The robotic arm according to claim 6 or 7, characterized in that, The connector also includes an air guide, which is disposed inside the cylindrical hollow shell and communicates with the first air guide hole and the second air guide hole.

9. The robotic arm according to claim 8, characterized in that, The air guiding component includes an inner tube, an outer tube, a first connecting tube, a second connecting tube, an inner bottom tube, and an outer bottom tube. The outer tube is sleeved outside the inner tube, forming an annular space between the outer tube and the inner tube. One end of the inner tube and one end of the outer tube are both sealed. One end of the first connecting tube is connected to the inner tube, and the other end of the first connecting tube is connected to the first air guiding hole. One end of the second connecting tube is connected to the outer tube, and the other end of the second connecting tube is connected to the second air guiding hole. The upper end face of the inner bottom tube is slidably and sealingly connected to the outer wall of the other end of the inner tube, and the lower end face of the inner bottom tube is sealed. The inner bottom tube is connected to the inner tube. The upper end face of the outer bottom tube is slidably and sealingly connected to the other end of the outer tube, and the lower end face of the outer bottom tube is sealedly connected to the outer wall of the inner tube.

10. The robotic arm according to claim 9, characterized in that, The air guide also includes a bearing and several fixing rods. The inner ring of the bearing is fitted around one end of the outer tube and is fixedly connected to the outer wall of the outer tube. The outer ring of the bearing is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rods. The inner bottom tube or the outer bottom tube is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rods.

11. The robotic arm according to claim 9, characterized in that, The air guide also includes a driven member, which is arranged around the outer tube. The manipulator also includes a drive unit, which includes a drive member. The drive member is connected to the driven member through a transmission member. The drive member is used to provide driving force and drive the driven member to rotate through the transmission member.

12. The robotic arm according to claim 9, characterized in that, The robotic arm also includes a vacuum generating unit, which includes a first vacuum generating element and a second vacuum generating element. The first vacuum generating element is connected to the inner bottom tube through a first connecting pipe, and the second vacuum generating element is connected to the outer bottom tube through a second connecting pipe.

13. A conveying device, characterized in that, include: The robotic arm as described in any one of claims 5 to 12; as well as, The control unit is electrically connected to the robotic arm and is used to control the movement of the robotic arm.

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