Sample loading device, system and method

Abstract

The application discloses a sample loading device, a system and a sample loading method, relates to the technical field of sample loading in XPS testing, and through the arrangement of a lifting mechanism and a plurality of clamping mechanisms, a lifting groove is formed on the top of the lifting part, a first flexible lifting pad is sealingly connected with the side wall of the lifting groove to form a first lifting space in the lifting groove, then the sample to be measured is placed on the top of the first flexible lifting pad, and when the first flexible lifting pad is in a first accommodation state, all the clamping mechanisms can extend towards the center of the sample loading space and make the second flexible lifting pad switch to a second bulging state, so as to clamp the sample to be measured together with the first flexible lifting pad which switches to the first bulging state, and the top surface of the sample to be measured is exposed to the second flexible lifting pad, the sample to be measured can be clamped, and the universality of the sample loading device is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of sample loading in XPS testing, and in particular to a sample loading device, system and method. BACKGROUND

[0002] X-ray photoelectron spectroscopy (XPS) technology, as an important surface analysis technology, has been widely used in the fields of material science, chemistry, physics and other fields since its development in the 1960s. With the continuous progress of science and technology, XPS technology plays an increasingly important role in the research of surface modified materials, catalyst characterization, thin film analysis, corrosion research and other aspects. Modern XPS equipment has significantly improved in detection accuracy, analysis depth, spatial resolution and other aspects through continuous technological innovation, and has become an indispensable important tool in the field of surface analysis.

[0003] At present, the sample preparation and loading technology in the XPS testing process is relatively mature. When performing XPS analysis, the sample usually needs to be placed on a special sample stage, and the sample position is adjusted by moving the five-axis sample stage to ensure that the surface to be tested can be accurately aligned with the X-ray source and the detector of the electron spectrometer. The existing sample loading process generally includes sample pretreatment, sample cutting, sample fixing and position adjustment steps. Among them, the sample fixing link usually adopts mechanical clamping, adhesive fixing or embedded fixing, etc. to firmly fix the processed sample on the sample stage, so as to ensure the stability of the sample position during the test and fully expose the detection surface.

[0004] However, in the existing technology, when testing the sample to be tested, due to the different shapes of the sample to be tested, when clamping and fixing different shaped samples, a sample loading device corresponding to the shape of the sample to be tested is usually used to load and fix the sample to be tested. Although this method can realize the loading and fixing function of the sample to be tested, in the actual operation process, since the corresponding shape of the loading device needs to be replaced for different shapes of the sample to be tested, the loading device can only meet the clamping and loading function of a single shape of the sample to be tested, which affects the universality of the loading device. SUMMARY

[0005] The main purpose of the present application is to provide a sample loading device, system and method, which aims to solve the technical problem that the existing technology in the actual operation process needs to replace the corresponding shape of the loading device for different shapes of the sample to be tested, which makes the loading device only meet the clamping and loading function of a single shape of the sample to be tested, affecting the universality of the loading device.

[0006] To achieve the above purpose, in a first aspect, the present application provides a sample loading device, comprising:

[0007] a lifting mechanism, the lifting mechanism comprising a lifting member and a first flexible lifting pad, a top of the lifting member is formed with a lifting slot, the first flexible lifting pad is sealingly connected with a slot opening of the lifting slot to enclose a first lifting space, the first flexible lifting pad is switchable between a first storage state of being accommodated in the lifting slot and a first bulging state of protruding out of the lifting slot; and,

[0008] a plurality of clamping mechanisms, all the clamping mechanisms are installed above the lifting member, all the clamping mechanisms are circumferentially spaced and distributed on an outer periphery of the first lifting space, and each of the clamping mechanisms comprises a clamping member and a second flexible lifting pad, a side of the clamping member facing the sample loading space is formed with a fitting surface, the second flexible lifting pad is sealingly connected with the clamping member to form a second lifting space with the fitting surface, all the second flexible lifting pads cooperate with the first flexible lifting pad to form a sample loading space for placing a sample to be tested, the second flexible lifting pad is switchable between a second storage state of being retracted and fitted on the fitting surface and a second bulging state of protruding out of the fitting surface and forming the second lifting space;

[0009] when the first flexible lifting pad is in the first storage state and the sample to be tested is placed on the first flexible lifting pad, all the clamping mechanisms can protrude towards the center of the sample loading space to make the second flexible lifting pad switch to the second bulging state, and cooperate with the first flexible lifting pad switched to the first bulging state to clamp the sample to be tested, and a top surface of the sample to be tested is exposed outside the second flexible lifting pad.

[0010] In an embodiment, the lifting member comprises:

[0011] a first telescopic member, the first telescopic member is vertically telescopic;

[0012] a lifting member, the lifting member is installed on a top of the first telescopic member, a top of the lifting member forms the lifting slot, a slot bottom of the lifting slot is formed with a first air hole vertically penetrating through the lifting member; and,

[0013] a first air supply assembly, the first air supply assembly is installed on a bottom of the lifting member, the first air supply assembly is in communication with the first air hole through a pipeline, the first air supply assembly can supply gas into the first lifting space through the first air hole to make the first flexible lifting pad switch to the first bulging state, and the first air supply assembly can also suck out the gas in the first lifting space through the first air hole to make the first flexible lifting pad switch from the first bulging state to the first storage state.

[0014] In an embodiment, the first air supply assembly comprises:

[0015] a first gas tank mounted at the bottom of the lifting member, a pipe opening of the first gas tank being arranged towards the first gas hole, and the first gas tank storing gas therein; and

[0016] a first gas pump mounted at the first gas tank, and the first gas pump being in sealed communication with the first gas hole through a pipeline;

[0017] the first gas pump being capable of pumping the gas stored in the first gas tank out and into the first lifting space through the first gas hole, so as to switch the first flexible lifting pad to the first inflated state, and the first gas pump also being capable of sucking the gas in the first lifting space back to the first gas tank, so as to switch the first flexible lifting pad from the first inflated state to the first storage state and store the first flexible lifting pad into the lifting groove.

[0018] In an embodiment, the thickness of the sample to be tested is A, and the height of the lifting groove is B, 0

[0019] In an embodiment, the clamping member comprises:

[0020] a second telescopic member capable of telescoping in a first direction, and a telescopic end of the second telescopic member extending towards the center of the sample loading space;

[0021] a clamping seat mounted at the telescopic end of the second telescopic member, the clamping seat being formed with a second gas hole penetratingly arranged in the first direction, and the clamping seat being in sealed connection with the second flexible lifting pad; and

[0022] a second gas supply assembly mounted at a side of the clamping seat away from the sample loading space, the second gas supply assembly being in communication with the second gas hole through a pipeline, the second gas supply assembly being capable of supplying gas into the second lifting space through the second gas hole to switch the second flexible lifting pad to the second inflated state, and the second gas supply assembly also being capable of sucking out the gas in the second lifting space through the second gas hole to switch the second flexible lifting pad from the second inflated state to the second storage state.

[0023] In an embodiment, the second gas supply assembly comprises:

[0024] a second gas tank mounted at a side of the clamping seat away from the sample loading space, a pipe opening of the second gas tank being arranged towards the second gas hole, and the second gas tank storing gas therein; and

[0025] The second air pump is installed in the second air tank and is sealed to the second air hole through a pipeline.

[0026] The second air pump can pump out the gas stored in the second air tank and pump it into the second lifting space through the second air hole, so that the second flexible lifting pad switches to the second bulging state. The second air pump can also draw the gas in the second lifting space back into the second air tank, so that the second flexible lifting pad switches from the second bulging state to the second receiving state and fits against the corresponding bonding surface.

[0027] In one embodiment, the top surface of the clamping seat is lower than the top surface of the sample to be tested.

[0028] Based on the same technical concept, in a second aspect, the present invention also proposes a sample loading system, comprising:

[0029] A base, the top of which is formed with a plurality of spaced and arrayed mounting slots; and,

[0030] Multiple sample loading devices as described in the first aspect, wherein the number of sample loading devices is consistent with the number of mounting slots and is arranged in a one-to-one correspondence, the lifting mechanism is installed at the bottom of the mounting slot, and all the clamping mechanisms in the same sample loading device are installed on the side wall of the mounting slot.

[0031] In one embodiment, the system further includes a plurality of third telescopic members, which are spaced apart and arranged in an array at the bottom of the base, and each of the third telescopic members is fitted with a ball-head hinge at its top. At least one of the third telescopic members can be raised and lowered relative to the remaining third telescopic members to adjust the tilt angle of the base.

[0032] Based on the same technical concept, in a third aspect, the present invention also proposes a sample loading method, which uses the sample loading system described in the first aspect;

[0033] The sample loading method includes the following steps:

[0034] The sample is cut to prepare the sample to be tested;

[0035] With the first flexible support pad accommodated in the support groove, the sample to be tested is placed on the first flexible support pad;

[0036] According to the shape of the sample to be tested, control the movement of all clamping mechanisms of the same sample loading device and switch the corresponding second flexible support pad to the second bulging state and switch the corresponding first flexible support pad to the first bulging state to clamp and load the sample to be tested.

[0037] The technical solution of this invention involves setting up a lifting mechanism consisting of a lifting component and a first flexible lifting pad, and multiple clamping mechanisms consisting of a clamping component and a second flexible lifting pad. A lifting groove is formed on the top of the lifting component, and the first flexible lifting pad is sealed to the side wall of the lifting groove to enclose and form a first lifting space. Then, the sample to be tested is placed on the top of the first flexible lifting pad. When the first flexible lifting pad is in a first receiving state and the sample to be tested is placed on the first flexible lifting pad, all clamping mechanisms can extend towards the center of the sample carrying space, and the second flexible lifting pad switches to a second bulging state, and is coordinated with the first flexible lifting pad in the first bulging state. The sample is clamped tightly, with its top surface exposed by the second flexible support pad. This allows the support mechanism and clamping mechanism to form a suitable clamping shape according to the shape of the sample and clamp it securely. Simultaneously, the deformation of the first and second flexible support pads under the action of gas allows the sample carrier to form a clamping space that adapts to the shape of the sample and stably clamp it when clamping samples of different shapes. This enables the present invention to clamp the sample without adjusting the sample carrier according to the shape of the sample, thus improving the versatility of the sample carrier. Attached Figure Description

[0038] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0039] Figure 1 A schematic diagram of the sample loading device provided by the present invention from one perspective;

[0040] Figure 2 for Figure 1 Another structural schematic diagram of the sample loading device illustrated in the example;

[0041] Figure 3 for Figure 1 A schematic diagram of the internal structure of the sample loading device shown in the example;

[0042] Figure 4 for Figure 1 A schematic diagram of the clamping mechanism in the example;

[0043] Figure 5 This is a schematic diagram of the sample loading system as an example of the present invention;

[0044] Figure 6 This is a flowchart illustrating a sample loading method as an example of the present invention.

[0045] Explanation of icon numbers:

[0046] 100. Lifting mechanism; 110. Lifting component; 120. First flexible lifting pad; 130. Lifting groove; 140. First lifting space; 200. Clamping mechanism; 210. Sample carrying space; 220. Clamping component; 230. Second flexible lifting pad; 111. First telescopic component; 112. Lifting component; 113. First air hole; 114. First air supply component; 115. First air tank; 116. First air pump; 221. Second telescopic component; 222. Clamping seat; 223. Second air hole; 224. Second air supply component; 225. Second air tank; 226. Second air pump; 10. Base; 20. Sample carrying device; 30. Third telescopic component; 40. Mounting groove; 50. Ball joint; 240. Second lifting space.

[0047] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0048] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0049] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0050] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0051] The applicant's research found that in existing technologies, X-ray photoelectron spectroscopy testing requires frequent changes of sample carriers of different shapes to adapt to sample diversity, resulting in low operational efficiency and limited equipment versatility. Traditional mechanical clamping methods rely on rigid structures to fix samples, making it difficult to stably clamp irregularly shaped samples, and displacement deviations during testing can easily affect detection accuracy.

[0052] To address these issues, researchers discovered the adaptability of flexible materials to contact deformation and attempted to combine variable-shape flexible structures with rigid supports. By analyzing the force distribution during sample clamping, they found that localized flexible contact can effectively disperse clamping stress. Based on this, they proposed using gas pressure to control the shape change of the flexible pad, constructing a dynamically adjustable clamping interface, thereby forming an adaptive sample-carrying structure suitable for samples of different shapes.

[0053] This invention proposes a sample loading device, system, and method.

[0054] Please see Figures 1 to 4 For ease of understanding, this sample loading device 20 includes:

[0055] The lifting mechanism 100 includes a lifting component 110 and a first flexible lifting pad 120. A lifting groove 130 is formed on the top of the lifting component 110. The first flexible lifting pad 120 is sealed to the opening of the lifting groove 130 to enclose and form a first lifting space 140. The first flexible lifting pad 120 is switchable between a first received state (containing within the lifting groove 130) and a first bulging state (extending out of the lifting groove 130).

[0056] Multiple clamping mechanisms 200 are installed above the lifting component 110. All clamping mechanisms 200 are distributed circumferentially around the outer periphery of the first lifting space 140. Each clamping mechanism 200 includes a clamping component 220 and a second flexible lifting pad 230. The clamping component 220 forms a contact surface on the side facing the sample carrying space 210. The second flexible lifting pad 230 is sealed to the clamping component 220 to form a second lifting space 240 between itself and the contact surface. All second flexible lifting pads 230 cooperate with the first flexible lifting pad 120 to form a sample carrying space 210 for placing the sample to be tested. The second flexible lifting pad 230 can be switched between a second receiving state where it is retracted and contacted with the contact surface and a second bulging state where it extends away from the contact surface and forms the second lifting space 240.

[0057] When the first flexible support pad 120 is in the first receiving state and the sample to be tested is placed on the first flexible support pad 120, all clamping mechanisms 200 can extend toward the center of the sample carrying space 210 to switch the second flexible support pad 230 to the second bulging state, and cooperate with the first flexible support pad 120 switched to the first bulging state to clamp the sample to be tested, and the top surface of the sample to be tested is exposed on the second flexible support pad 230.

[0058] Specifically, the sidewall sealing connection of the lifting groove 130 refers to the airtight connection between the edge of the flexible material and the rigid groove body through heat fusion or adhesive bonding, ensuring the directional expansion of the flexible pad during inflation. The first lifting space 140 refers to the sealed cavity formed by the rigid groove wall and the flexible pad, and the shape of the flexible pad is controlled by air pressure changes. The circumferentially spaced clamping mechanism 200 refers to the arrangement along a circular or regular polygonal trajectory at equal angles to ensure uniform distribution of clamping force. The second lifting space 240 refers to the sealed cavity formed by the surface of the clamping component 220 and the flexible pad, and the flexible pad expands towards the sample carrying space 210 after inflation. The first flexible support pad 120 and the second flexible support pad 230 in the example are both made of materials with high sealing performance. Using such materials will ensure the sealing performance of the first support space and the second support space 240 during specific implementation of the present invention, thereby improving the service life of the present invention during specific use. In this embodiment, it can be further clarified that the first flexible support pad 120 and the second flexible support pad 230 in the example are preferably made of high sealing performance materials such as polyurethane film material and polyethylene film material.

[0059] Initially, the flexible support pad retracts within the support groove 130, forming a flat sample surface. After the sample is placed, the first support space 140 inflates, causing the flexible pad to expand upwards and wrap around the bottom of the sample, while the clamping mechanism 200 moves towards the center. Simultaneously, the second support space 240 inflates, causing the flexible pad to expand outwards, forming a three-dimensional wrapping clamp together with the expanded first flexible pad. The deformation characteristics of the flexible material allow it to automatically adapt to the sample contour, and the expanded flexible pads achieve mechanical balance, maintaining the top surface of the sample while achieving multi-directional fixation.

[0060] This application utilizes a pneumatically controlled, double-layered flexible structure to achieve adaptive clamping of samples of any shape without requiring replacement of clamping components. Existing adhesive fixing methods can contaminate the sample surface; the flexible clamping method in this embodiment avoids physical contact with the testing area, ensuring the accuracy of test data. This allows for universal clamping of samples of different shapes, eliminating the time wasted on frequent carrier changes. The flexible clamping interface effectively reduces local pressure, preventing breakage of brittle samples. The pneumatic clamping mechanism can quickly reset after testing, improving batch testing efficiency. Dynamically adjusted clamping force distribution ensures stable positioning of the sample even during tilted testing, meeting testing requirements under complex conditions.

[0061] In this embodiment, a lifting mechanism 100 consisting of a lifting component 110 and a first flexible lifting pad 120, and multiple clamping mechanisms 200 consisting of a clamping component 220 and a second flexible lifting pad 230 are provided. A lifting groove 130 is formed on the top of the lifting component 110. The first flexible lifting pad 120 is sealed to the side wall of the lifting groove 130 to form a first lifting space 140. Then, the sample to be tested is placed on the top of the first flexible lifting pad 120. When the first flexible lifting pad 120 is in a first receiving state and the sample to be tested is placed on the first flexible lifting pad 120, all clamping mechanisms 200 can extend towards the center of the sample carrying space 210 and the second flexible lifting pad 230 is switched to a second bulging state, and switched to the first bulging state. The first flexible support pad 120, in its bulging state, clamps the sample to be tested, and the top surface of the sample is exposed to the second flexible support pad 230. This allows the present invention to form a suitable clamping shape between the support mechanism 100 and the clamping mechanism 200 according to the shape of the sample to be tested, and to clamp the sample. At the same time, the deformation of the first flexible support pad 120 and the second flexible support pad 230 under the action of gas allows the sample carrier device 20 to form a clamping space adapted to the shape of the sample to be tested and to stably clamp the sample when clamping samples of different shapes. This allows the present invention to clamp the sample without adjusting the sample carrier device 20 according to the shape of the sample, thus improving the versatility of the sample carrier device 20.

[0062] In one embodiment, the lifting component 110 includes:

[0063] The first telescopic member 111 is capable of vertical extension and retraction;

[0064] A lifting member 112 is mounted on the top of the first telescopic member 111. A lifting groove 130 is formed on the top of the lifting member 112, and a first air hole 113 is formed at the bottom of the groove 130, penetrating vertically through the lifting member 112.

[0065] The first air supply component 114 is installed at the bottom of the lifting member 112. The first air supply component 114 is connected to the first air hole 113 through a pipe. The first air supply component 114 can supply gas into the first lifting space 140 through the first air hole 113 to switch the first flexible lifting pad 120 to the first bulging state. The first air supply component 114 can also suck out the gas in the first lifting space 140 through the first air hole 113 to switch the first flexible lifting pad 120 from the first bulging state to the first containment state.

[0066] Specifically, the first telescopic component 111 refers to a mechanical device capable of vertical length adjustment, which can be implemented using a hydraulic cylinder, electric push rod, or pneumatic actuator, and is used to adjust the height of the support component 112 according to the thickness of the sample to be tested. The support component 112 refers to a rigid support structure that supports the flexible support pad, which can be made of aluminum alloy or engineering plastic, and its top support groove 130 is used to accommodate the flexible support pad in its receiving state. The first air hole 113 refers to a gas channel penetrating the bottom of the support component 112, which can be a circular through hole with a diameter ranging from 0.5 to 2 mm, used to establish a gas exchange path between the first air supply component 114 and the support groove 130. The first air supply component 114 refers to a device for controlling gas flow, which can be an integrated module including an air pump and an air tank, and achieves the switching of the flexible support pad's shape through alternating positive pressure air supply and negative pressure suction.

[0067] When the sample to be tested needs to be fixed, the first telescopic component 111 first adjusts the lifting component 112 to a predetermined height, so that the opening plane of the lifting groove 130 is horizontally aligned with the clamping mechanism 200. Then, the first air supply component 114 starts the air pump, pumping the gas in the gas tank into the first air hole 113 through the pipeline, causing the first flexible lifting pad 120 to expand under air pressure and form a bulging state. At this time, the flexible lifting pad expands outward, working in conjunction with the second flexible lifting pad 230 of the clamping mechanism 200 to form a multi-point flexible clamping of the sample. After the test is completed, the air pump reverses to draw in gas, and the flexible lifting pad contracts and returns to its original position in the lifting groove 130 under negative pressure.

[0068] In this embodiment, the vertical height is adjusted via the first telescopic member 111. Combined with a pneumatically controlled flexible support pad, this solves the problem of poor adaptability to sample thickness in traditional rigid support devices and avoids surface damage to the sample caused by mechanical clamping. The single-form support structure in the prior art is replaced by a dynamically adjustable airbag-type flexible clamping mechanism, significantly improving the device's compatibility with samples of different shapes.

[0069] In one embodiment, the first gas supply assembly 114 includes:

[0070] A first gas cylinder 115 is mounted on the bottom of the lifting member 112, with its nozzle facing the first air hole 113, and the first gas cylinder 115 stores gas; and,

[0071] The first air pump 116 is installed on the first air tank 115, and the first air pump 116 is sealed and connected to the first air hole 113 through a pipeline.

[0072] The first air pump 116 can pump out the gas stored in the first air tank 115 and pump it into the first lifting space 140 through the first air hole 113, so that the first flexible lifting pad 120 switches to the first bulging state. The first air pump 116 can also draw the gas in the first lifting space 140 back into the first air tank 115, so that the first flexible lifting pad 120 switches from the first bulging state to the first receiving state and is received into the lifting groove 130.

[0073] Specifically, the first gas tank 115 refers to a sealed container for storing gas, which can be made of metal or polymer materials and is pressure-resistant. Its port is aligned with the first gas hole 113 to shorten the gas transmission path and reduce pressure loss. The first air pump 116 refers to a power device for driving gas flow, which can be a piston or diaphragm pump. Bidirectional gas flow is achieved through forward and reverse rotation control. The first gas hole 113 is a through hole penetrating the top of the lifting member 112, which can be formed using laser drilling or mechanical drilling processes, serving as a channel for gas to enter and exit the first lifting space 140.

[0074] When the sample needs to be clamped, the first air pump 116 operates in the forward direction, pumping the pre-stored gas in the first air tank 115 into the first lifting space 140 through the pipeline. The gas pressure pushes the first flexible lifting pad 120 outward to form a bulging state. When the sample needs to be released, the first air pump 116 operates in the reverse direction, drawing the gas in the first lifting space 140 back into the first air tank 115. The flexible lifting pad contracts and returns to its contained state under negative pressure. The integrated design of the air tank and air pump allows the gas to circulate in a closed loop, avoiding interference from the external environment.

[0075] In this embodiment, by setting up a first air tank 115 and a first air pump 116, reversible gas recycling is achieved, which not only reduces the frequency of gas replenishment but also controls the expansion and contraction of the flexible support pad. Furthermore, the air tank is directly installed at the bottom of the support component 112, shortening the gas transmission distance and improving the action response speed.

[0076] In one embodiment, the thickness of the sample to be tested is A, the height of the support groove 130 is B, 0 < A ≤ 10 mm, and B ≤ A / 2.

[0077] Specifically, the thickness A of the sample to be tested refers to the maximum dimension of the sample in the vertical direction, which can be measured using a contact thickness gauge or an optical thickness gauge. This parameter is used to limit the space occupied by the sample in the sample carrier. The height B of the support groove 130 refers to the vertical distance from the bottom of the support groove 130 to the edge of the groove opening. This can be achieved by machining a groove structure of a specific depth. This parameter is used to control the deformation space of the flexible support pad.

[0078] When the thickness of the sample to be tested is within the range of 0 to 10 mm, the height of the support groove 130 is set to not exceed half the sample thickness. Under this condition, the first flexible support pad 120 can be completely contained within the support groove 130 in its uninflated state, providing a flat support surface for placing the sample. After the sample is placed, the first flexible support pad 120 is inflated to a first bulging state by inflating the first support space 140. At this time, the height limit of the support groove 130 can ensure that the deformation of the flexible material in the vertical direction matches the sample thickness, thereby avoiding the top surface of the sample being covered due to excessive expansion. At the same time, the second flexible support pad 230 of the clamping mechanism 200, in a second bulging state formed after inflation, works in conjunction with the first flexible support pad 120 to clamp and fix the sample in the horizontal direction, while the top surface remains exposed to meet the testing requirements.

[0079] In this embodiment, by limiting the ratio between the height of the support groove 130 and the sample thickness, a single sample carrier can be compatible with a variety of samples with a thickness of less than 10 mm, without the need to frequently change the sample carrier structure for different thicknesses.

[0080] In one embodiment, the clamping member 220 includes:

[0081] The second telescopic member 221 is capable of telescopic extension and retraction along the first direction and the telescopic end of the second telescopic member 221 extends toward the center of the sample carrying space 210.

[0082] A clamping seat 222 is installed on the telescopic end of the second telescopic member 221. A second air hole 223 is formed on the clamping seat 222, extending through the member in a first direction. The clamping seat 222 is sealed to the second flexible support pad 230.

[0083] The second air supply component 224 is installed on the side of the clamping seat 222 away from the sample carrying space 210. The second air supply component 224 is connected to the second air hole 223 through a pipe. The second air supply component 224 can supply gas into the second lifting space 240 through the second air hole 223 to switch the second flexible lifting pad 230 to the second bulging state. The second air supply component 224 can also suck out the gas in the second lifting space 240 through the second air hole 223 to switch the second flexible lifting pad 230 from the second bulging state to the second receiving state.

[0084] Specifically, the second telescopic component 221 refers to a driving device capable of horizontal displacement adjustment, which can be implemented using a pneumatic cylinder or an electric push rod. Its function is to control the position of the clamping seat 222 relative to the sample-carrying space 210. The clamping seat 222 refers to the mounting base supporting the second flexible support pad 230, which can be made of metal or engineering plastic, and its internal air channels enable gas transmission. The second air supply component 224 refers to a power source that controls the deformation of the flexible material through gas pressure. It can be a combination of a micro air pump and an air tank, and its function is to change the physical shape of the flexible support pad through inflation and deflation operations.

[0085] After the sample to be tested is placed in the support groove 130, the second telescopic member 221 drives the clamping seat 222 to move horizontally to the predetermined clamping position. At this time, the second air supply component 224 injects gas into the second air hole 223, causing the second flexible support pad 230 to detach from the contact surface and form a bulging state. The covering surface formed by this bulging state can adapt to the sample edges of different shapes. When it is necessary to release the sample, the second air supply component 224 extracts gas in the opposite direction, and the flexible support pad returns to the contact state. At this time, the second telescopic member 221 can drive the clamping seat 222 back to the initial position. This structure achieves adaptive adjustment of clamping force and contact area through the synergistic effect of mechanical displacement and pneumatic deformation.

[0086] In this embodiment, the retractable clamping seat 222, in conjunction with the pneumatic flexible pad, allows multiple clamping mechanisms 200 on the same sample carrier to work together to clamp the sample, adapting to the clamping needs of various irregularly shaped samples and avoiding the need for frequent clamp changes. Compared to purely mechanical clamping, pneumatic control provides a more uniform contact pressure distribution, reducing the risk of sample surface damage.

[0087] In one embodiment, the second gas supply assembly 224 includes:

[0088] The second gas cylinder 225 is installed on the side of the clamping seat 222 opposite to the sample carrying space 210. The opening of the second gas cylinder 225 faces the second gas port 223, and the second gas cylinder 225 stores gas.

[0089] The second air pump 226 is installed in the second air tank 225 and is sealed and connected to the second air port 223 through a pipeline.

[0090] The second air pump 226 can pump out the gas stored in the second air tank 225 and pump it into the second lifting space 240 through the second air hole 223, so that the second flexible lifting pad 230 switches to the second bulging state. The second air pump 226 can also draw the gas in the second lifting space 240 back into the second air tank 225, so that the second flexible lifting pad 230 switches from the second bulging state to the second receiving state and fits against the corresponding bonding surface.

[0091] Specifically, the second gas tank 225 refers to a sealed container for storing compressed gas, which can be made of welded aluminum alloy. Its inlet is coaxially aligned with the second air port 223 to ensure the straightness of the gas delivery path. The second air pump 226 is a power device for achieving directional gas flow, which can be a miniature diaphragm pump. Its bidirectional operating mode can control the gas pressure changes in the second lifting space 240. The second air port 223 is a gas channel penetrating the clamping seat 222, which can be a circular hole with a diameter of 0.5–1.5 mm. Its size design must balance gas flow rate and structural strength.

[0092] When the sample needs to be clamped, the second air pump 226 activates its forward operating mode, continuously pumping compressed gas stored in the second air tank 225 into the second lifting space 240 through the second air port 223. As the gas pressure increases, the second flexible lifting pad 230 gradually expands and detaches from the contact surface, forming an outward bulge. When the sample needs to be released, the second air pump 226 switches to its reverse operating mode, drawing the gas from the second lifting space 240 back into the second air tank 225, causing the second flexible lifting pad 230 to contract and return to the contact surface under negative pressure. This process achieves the flexible pad shape switching through the bidirectional operating mode of a single second air pump 226, eliminating the need for an additional mechanical drive mechanism.

[0093] In this embodiment, the flexible pad is shaped by an air pump, allowing the same clamping mechanism 200 to adapt to sample surfaces with different curvatures and shapes. In existing technologies, gas flow systems typically use multi-stage valves to control gas flow, while this solution directly achieves gas circulation through a bidirectional second air pump 226, simplifying the pipeline layout and reducing control complexity.

[0094] In one embodiment, the top surface of the clamping seat 222 is lower than the top surface of the sample to be tested.

[0095] Specifically, when the clamping mechanism 200 moves toward the center of the sample space 210, the second telescopic member 221 pushes the clamping seat 222 closer to the sample to be tested. At this time, the second flexible support pad 230 is in a second bulging state and contacts the side wall of the sample. Since the top surface of the clamping seat 222 is lower than the top surface of the sample, the top area of ​​the sample is completely exposed above the clamping seat 222 after clamping, avoiding physical interference of the clamping seat 222 structure with the optical path or detection angle of the detection equipment. For example, in X-ray photoelectron spectroscopy, the top surface of the sample needs to be directly exposed between the X-ray source and the electron collector. The recessed design of the clamping seat 222 ensures that the sample surface is unobstructed, ensuring that the acquisition of the detection signal is not affected.

[0096] In this embodiment, by lowering the top surface of the fixed clamping seat 222, the same clamping mechanism 200 can be adapted to samples of different thicknesses, eliminating the need to replace parts due to differences in sample height and simplifying the operation process.

[0097] Based on the same technical concept, in a second aspect, the present invention also proposes a sample loading system, comprising:

[0098] The base 10 has a plurality of spaced and arrayed mounting slots 40 formed on its top; and,

[0099] Multiple sample loading devices 20 as in the first aspect are provided, with the number of sample loading devices 20 matching the number of mounting slots 40 and arranged in a one-to-one correspondence. The lifting mechanism 100 is installed at the bottom of the mounting slot 40, and all clamping mechanisms 200 in the same sample loading device 20 are installed on the side wall of the mounting slot 40.

[0100] Specifically, the base 10 is the basic structure supporting multiple sample carriers 20, and can be made of metal or composite materials. Its top mounting slots 40 are distributed in an array, such as a rectangular or circular array, to fix the positions of the lifting mechanism 100 and the clamping mechanism 200. The lifting mechanism 100 is installed at the bottom of the mounting slot 40 and fixed by mechanical connection or snap-fit ​​to ensure the stability of the lifting action. The clamping mechanism 200 is installed on the side wall of the mounting slot 40 and moves radially, for example, through a sliding guide rail or hinge structure, to cooperate with the lifting mechanism 100 to form a sample carrying space 210.

[0101] The mounting slots 40 on the top of the base 10 are distributed in an array at intervals, for example, the spacing between each mounting slot 40 can be 10-50 mm, and the number of rows and columns of the array can be adjusted according to actual needs. Each mounting slot 40 is equipped with an independent sample loading device 20, and a lifting mechanism 100 is embedded in the bottom of the mounting slot 40, achieving lifting via pneumatic or electric drive. Clamping mechanisms 200 are distributed on the side walls of the mounting slots 40, for example, 3-6 clamping mechanisms 200 are provided on each side wall of each mounting slot 40, evenly arranged circumferentially. When the sample to be tested is placed in the lifting slot 130, the clamping mechanism 200 moves radially towards the center of the sample loading space 210, and the second flexible lifting pad 230 switches to a bulging state, clamping the sample together with the first flexible lifting pad 120. The third telescopic member 30 at the bottom of the base 10 can be independently adjusted in height, for example, driven by a hydraulic cylinder or stepper motor. By adjusting the telescopic amount at different positions, the tilt angle of the base 10 is changed to ensure that the sample surface is aligned with the testing equipment.

[0102] In this embodiment, multiple independent sample carriers 20 are integrated through an array of mounting slots 40, allowing for the simultaneous processing of samples of different shapes without the need to change fixtures. The tilt adjustment function of the base 10 further solves the problem of difficulty in aligning the sample surface with the detection equipment, whereas in the prior art, the sample stage typically only supports planar movement and cannot achieve angle adjustment.

[0103] In one embodiment, a plurality of third telescopic members 30 are also included. The plurality of third telescopic members 30 are spaced apart and arrayed at the bottom of the base 10, and a ball-head hinge 50 is installed on the top of each third telescopic member 30. At least one third telescopic member 30 can be raised and lowered relative to the remaining third telescopic members 30 to adjust the tilt angle of the base 10.

[0104] Specifically, the third telescopic member 30 refers to a drive device capable of length adjustment in the vertical direction, which can be implemented using a hydraulic cylinder, pneumatic cylinder, or electric push rod. Its lifting action is driven by an external control signal to change the local height of the base 10. The ball joint 50 refers to a joint component with a ball-and-socket connection structure at the top, which can be implemented using a universal joint structure with a ball socket. It can maintain contact with the base 10 during the lifting and lowering of the third telescopic member 30 and allow the base 10 to undergo angular displacement.

[0105] When the tilt angle of the base 10 needs to be adjusted, at least one third telescopic member 30 changes the support height of the corresponding mounting point by independently raising and lowering, while the remaining third telescopic members 30 remain fixed or move synchronously in the opposite direction. The ball-head hinge 50 compensates for displacement deviations through spherical contact during the tilting process of the base 10, avoiding jamming caused by rigid connections. For example, when the testing equipment needs to make the surface of the sample form a specific angle with the X-ray incident direction, by controlling the raising and lowering of the third telescopic members 30 at different positions, the base 10 can tilt around any axis, thereby adjusting the spatial orientation of the sample within the sample-carrying space 210.

[0106] In some specific embodiments, the array distribution of the third telescopic members 30 can be configured as four groups, each located in one of the four corner regions at the bottom of the base 10. Each group of third telescopic members 30 can achieve height difference adjustment through independent control. The diameter of the ball head of the ball joint 50 can be slightly smaller than the diameter of the mounting hole in the base 10 to provide a small gap to accommodate positional changes during tilting.

[0107] In this embodiment, the active lifting and lowering of the third telescopic member 30, in conjunction with the ball-head hinge member 50, enables the base 10 to possess multi-angle adjustment capabilities. In existing technologies, sample posture adjustment relies on external motion mechanisms, while this solution integrates the adjustment function within the sample carrying system, reducing dependence on the five-axis stage's range of motion. This allows the tilt angle of the base 10 to be adjusted directly without moving the sample stage, enabling the sample surface to quickly align with the optical path or detection direction of the testing equipment. This avoids the accumulation of positioning errors caused by frequent sample stage movements, and the fine-tuning of the base 10's angle compensates for surface tilt deviations generated during sample cutting or fixing, improving the stability and repeatability of the test data.

[0108] Based on the same technical concept, in a third aspect, the present invention also proposes a sample loading method, which uses the sample loading system described in the first aspect;

[0109] The sample loading method includes the following steps:

[0110] S100. The sample is cut to prepare the sample to be tested;

[0111] S200: With the first flexible support pad contained in the support groove, the sample to be tested is placed on the first flexible support pad.

[0112] S300. According to the shape of the sample to be tested, control all the clamping mechanisms of the same sample carrying device to move and switch the corresponding second flexible support pad to the second bulging state and switch the corresponding first flexible support pad to the first bulging state to clamp and carry the sample to be tested.

[0113] Specifically, during the sample loading process, the sample is first processed into a regular shape using a cutting device, and then placed in a support groove in a receiving state. At this time, the first flexible support pad adheres to the groove wall, and the second flexible support pad adheres to the surface of the clamping component. Based on the sample contour characteristics, the telescopic component of the clamping mechanism is controlled to move towards the center of the sample loading space, while gas is injected into the first and second support spaces, causing the flexible material to expand and form a clamping surface. The expanded first flexible support pad lifts the sample upward from the groove, while the second flexible support pad applies pressure from the side; the two work together to achieve three-dimensional fixation. Throughout this process, the top surface of the sample is always exposed above the clamping mechanism, ensuring that the testing instrument can directly contact the surface to be tested. After the test is completed, the flexible material is restored to a flat state by evacuation, the clamping mechanism is reset, and the sample can be removed.

[0114] In this embodiment, the combination of a deformable flexible material and a multi-directional adjustment mechanism enables a single device to adaptively clamp samples of different shapes. Existing mechanical clamping devices require matching the sample size, while in this solution, the expansion of the flexible support pad can be controlled by air pressure, automatically filling the gap between the sample and the clamp.

[0115] This invention solves the technical problem of insufficient versatility in sample loading devices, enabling compatible sample loading for various shapes. The deformation characteristics of the flexible support pad, combined with the adjustable clamping mechanism, allow the device to adapt to the fixing requirements of cubic, cylindrical, and irregularly shaped samples. The inflatable clamping method ensures stability while avoiding surface damage caused by mechanical clamping. The fully exposed top surface of the sample ensures an unobstructed testing area, improving the testing accuracy of surface analysis techniques such as XPS. The entire sample loading process requires no fixture replacement, simplifying the operation and significantly improving testing efficiency.

[0116] The above description is merely an exemplary embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the present invention's specification and drawings under the technical concept of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. A sample loading device, characterized in that, include: A lifting mechanism, comprising a lifting component and a first flexible lifting pad, wherein a lifting groove is formed on the top of the lifting component, and the first flexible lifting pad is sealed to the opening of the lifting groove to enclose and form a first lifting space, the first flexible lifting pad being switchable between a first received state, being received in the lifting groove, and a first bulging state, extending out of the lifting groove; and, Multiple clamping mechanisms are provided, all of which are mounted above the lifting component. All of the clamping mechanisms are circumferentially spaced around the outer periphery of the first lifting space. Each clamping mechanism includes a clamping component and a second flexible lifting pad. The second flexible lifting pad cooperates with the first flexible lifting pad to form a sample carrying space for placing the sample to be tested. The clamping component forms a contact surface on the side facing the sample carrying space. The second flexible lifting pad is sealed to the clamping component to form a second lifting space between itself and the contact surface. The second flexible lifting pad can be switched between a second receiving state where it is retracted and contacted with the contact surface and a second bulging state where it extends away from the contact surface and forms the second lifting space. When the first flexible support pad is in the first receiving state and the sample to be tested is placed on the first flexible support pad, all the clamping mechanisms can extend toward the center of the sample carrying space to switch the second flexible support pad to the second bulging state, and cooperate with the first flexible support pad that has switched to the first bulging state to clamp the sample to be tested, and the top surface of the sample to be tested is exposed on the second flexible support pad. The lifting component includes: The first telescopic component is capable of vertical extension and retraction; A lifting member, the lifting member being mounted on top of the first telescopic member, the top of the lifting member forming the lifting groove, and the bottom of the lifting groove forming a first air hole penetrating vertically through the lifting member; and, The first air supply component is installed at the bottom of the support member. The first air supply component is connected to the first air hole through a pipeline. The first air supply component can supply gas into the first support space through the first air hole to switch the first flexible support pad to the first bulging state. The first air supply component can also suck out the gas in the first support space through the first air hole to switch the first flexible support pad from the first bulging state to the first containment state. The first gas supply component includes: A first gas cylinder is installed at the bottom of the lifting member, with its opening facing the first air hole, and the first gas cylinder contains gas; and, The first air pump is installed in the first air tank and is connected to the first air hole in a sealed manner through a pipeline. The first air pump can pump out the gas stored in the first air tank and pump it into the first lifting space through the first air hole, so that the first flexible lifting pad switches to the first bulging state. The first air pump can also draw the gas in the first lifting space back into the first air tank, so that the first flexible lifting pad switches from the first bulging state to the first receiving state and is received into the lifting groove.

2. The sample loading device as described in claim 1, characterized in that, The thickness of the sample to be tested is A, and the height of the support groove is B, where 0 < A ≤ 10 mm and B ≤ A / 2.

3. The sample loading device as described in claim 2, characterized in that, The clamping component includes: The second telescopic member is telescopic along a first direction and the telescopic end of the second telescopic member extends toward the center of the sample carrying space. A clamping seat, mounted on the telescopic end of the second telescopic member, having a second air hole extending through it in a first direction, and sealed to the second flexible support pad; and... The second air supply component is installed on the side of the clamping seat away from the sample carrying space. The second air supply component is connected to the second air hole through a pipeline. The second air supply component can supply gas into the second lifting space through the second air hole to switch the second flexible lifting pad to the second bulging state. The second air supply component can also suck out gas in the second lifting space through the second air hole to switch the second flexible lifting pad from the second bulging state to the second receiving state.

4. The sample loading device as described in claim 3, characterized in that, The second gas supply assembly includes: A second gas cylinder is installed on the side of the clamping seat away from the sample-carrying space, with its nozzle facing the second gas hole, and the second gas cylinder containing gas; and, The second air pump is installed in the second air tank and is sealed to the second air hole through a pipeline. The second air pump can pump out the gas stored in the second air tank and pump it into the second lifting space through the second air hole, so that the second flexible lifting pad switches to the second bulging state. The second air pump can also draw the gas in the second lifting space back into the second air tank, so that the second flexible lifting pad switches from the second bulging state to the second receiving state and fits against the corresponding bonding surface.

5. The sample loading device as described in claim 4, characterized in that, The top surface of the clamping seat is lower than the top surface of the sample to be tested.

6. A sample loading system, characterized in that, include: A base, the top of which is formed with a plurality of spaced and arrayed mounting slots; as well as, A plurality of sample loading devices as described in any one of claims 1 to 5, wherein the number of sample loading devices is consistent with the number of mounting slots and is arranged in a one-to-one correspondence, the lifting mechanism is installed at the bottom of the mounting slot, and all the clamping mechanisms in the same sample loading device are installed on the side wall of the mounting slot.

7. The sample loading system as described in claim 6, characterized in that, It also includes a plurality of third telescopic members, which are spaced apart and arranged in an array at the bottom of the base, and each of the third telescopic members is fitted with a ball-head hinge at its top. At least one of the third telescopic members can be raised and lowered relative to the remaining third telescopic members to adjust the tilt angle of the base.

8. A sample loading method, characterized in that, Apply the sample loading system as described in claim 7; The sample loading method includes the following steps: The sample is cut to prepare the sample to be tested; With the first flexible support pad accommodated in the support groove, the sample to be tested is placed on the first flexible support pad; According to the shape of the sample to be tested, control the movement of all clamping mechanisms of the same sample loading device and switch the corresponding second flexible support pad to the second bulging state and switch the corresponding first flexible support pad to the first bulging state to clamp and load the sample to be tested.

Images