An additive manufactured spliced millstone and a method of manufacturing the same

Abstract

The application provides a kind of additive manufacturing spliced grinding disc and its manufacturing method.It relates to the field of semiconductor grinding, polishing tool.In the present application, a kind of spliced grinding disc is prepared based on additive manufacturing technology, which is designed by modifying the printing platform.The modified printing platform includes a printing substrate, a support plate, a positioning plate, a screw and a flat disc.The grinding disc structure includes a grinding disc bottom plate, a support plate and a grinding sheet.The combination of the support plate and the grinding sheet with different structures is fixed on the grinding disc bottom plate to complete splicing.In the additive manufacturing process, the manufacturing parameters are adjusted to make the printed grinding sheet and support plate structure firmly fit, so as to achieve the purpose of no subsequent cutting step after the grinding sheet is printed and formed.It ensures the precision and strength of the prepared spliced grinding disc, improves the manufacturing efficiency and quality reliability.The grinding disc can break through the limitations of traditional preparation methods and manufacture complex structures required by working conditions to improve the machining performance of the spliced grinding disc.

Description

Technical Field

[0001] This invention relates to the field of semiconductor grinding and polishing tools, and in particular to a novel structure grinding disc based on additive manufacturing to achieve integrated forming. This grinding disc is suitable for high-precision grinding and polishing of semiconductor wafers such as sapphire, silicon carbide, and silicon, as well as hard and brittle materials such as optical crystals and cemented carbide. Background Technology

[0002] As key components such as semiconductor wafers and optical elements evolve towards larger sizes and nanoscale surface integrity, traditional free abrasive processing technology reveals the following technical defects: 1. The uncontrollable random motion trajectory of abrasive particles leads to poor material removal stability, making it difficult to further improve surface accuracy; 2. Open abrasive supply systems suffer from low abrasive utilization (<30%) and environmental problems such as excessive concentration of suspended particulate matter in the processing environment; 3. The fluid dynamics of the processing interface become unstable, specifically manifested as: excessive velocity gradient in the grinding zone easily causes secondary indentation damage of abrasive chips, excessively high peak heat flux density at the contact interface leads to local phase change burns, and the hydrodynamic pressure effect generated when the water film thickness in the workpiece-grinding gap reaches the micrometer level leads to a decrease in effective grinding contact rate.

[0003] Traditional methods for preparing bonded abrasives mainly include powder metallurgy sintering, resin / ceramic binder curing, electroplating, brazing, and sol-gel methods. Their common drawbacks include: 1. High randomness in the spatial distribution of abrasive grains, making gradient or customized arrangement impossible; 2. Insufficient interfacial bonding strength between the binder and abrasive grains (electroplating results in low mechanical interlocking strength, and brazing easily leads to diamond carbonization at high temperatures); 3. Currently, mainstream grinding disc splicing primarily uses artificial epoxy resin adhesive, resulting in low splicing accuracy (millimeter-level error), low connection strength (only 10-35 MPa), and the phenomenon of adhesive penetrating into the grinding disc, causing blockage; 4. Uncontrollable pore structure, leading to high chip retention and uneven heat dissipation; 5. Severe process pollution, with high concentrations of heavy metal ions in the electroplating solution and large emissions of sintering exhaust gas; 6. Difficulty in meeting the nanometer-level surface accuracy requirements of large-size wafers. To address the aforementioned issues, current technological advancements focus on additive manufacturing, laser structuring, and biomimetic design. Through innovative processes such as three-dimensional ordered abrasive grain (abrasive group) arrangement, gradient porous structures, and active temperature control of internal and external macro-micro channels, these advancements overcome the technical bottlenecks of traditional methods in integrated structure-function design.

[0004] Additive manufacturing is a manufacturing method that involves depositing powder materials layer by layer and solidifying them using binders, melting and resolidification, and localized melting and bonding. This technology is suitable for manufacturing complex structures from materials such as metals and ceramics. Laser additive manufacturing is the most widely used additive manufacturing technology. It uses a laser beam to melt and resolidify powder particles, depositing them layer by layer to form a solid object. Additive manufacturing technology has the advantages of high manufacturing speed and high flexibility. By overcoming the structural limitations of traditional subtractive manufacturing technology through layer-by-layer deposition forming, it effectively solves the problem of the monolithic geometric configuration of traditional integral grinding discs caused by casting / machining. It successfully realizes the manufacturing of grinding discs with complex three-dimensional structures (including pore distribution, embedded cooling channels, and modular splicing units), significantly improving structural complexity compared to traditional machining processes while ensuring the assembly accuracy between functional units.

[0005] However, current additive manufacturing technology faces significant technical obstacles in the separation of the molded part from the substrate. Taking selective laser melting (SLM) as an example, the rapid solidification of the molten pool caused by the high-energy laser beam during the molding process creates a metallurgical interface between the molded part and the substrate, requiring separation via wire cutting. After separation, the cut surface of the workpiece has poor flatness, and the thickness of different molded parts varies greatly, requiring additional morphology trimming. This significantly extends the manufacturing cycle of the spliced ​​grinding disc and reduces the mass production efficiency of the grinding wheel.

[0006] In view of the above, this application is hereby submitted. Summary of the Invention

[0007] This invention provides an additive manufacturing splicing grinding disc and its manufacturing method, aiming to at least improve one of the above-mentioned technical problems.

[0008] To address the aforementioned technical problems, this invention provides an additively manufactured spliced ​​grinding disc, comprising a grinding disc base plate and multiple support plates spliced ​​and fixed to the grinding disc base plate, each support plate being provided with a grinding disc; the grinding discs are printed onto the support plates using additive manufacturing technology, and a printing transition layer is provided between the support plates and the grinding discs; the transition layer has a thickness of 50-100μm; a bonding strength of 400-600MPa; the shapes and patterns of the grinding discs are the same or different or partially the same; the splicing error between the patterns is ≤0.05mm.

[0009] Furthermore, the pallet, transition layer, and grinding disc are made of materials capable of high-temperature interdiffusion, such as Cu-Ni-Fe-Sn-Ti alloy and 304-SS. High-temperature interdiffusion of metals refers to the process by which two or more metals, under high-temperature conditions, form a diffusion layer or new phase with a compositional gradient at the interface through interatomic diffusion.

[0010] "High temperature" conditions refer to temperatures that allow the diffusion coefficient D to exceed 10⁻. 14 m² / s; Activation energy threshold satisfying the Arrhenius equation: D = D₀exp(-Q / RT); Typical metal diffusion activation energy reference:

[0011] Another aspect of the present invention provides a printing assembly for preparing a grinding disc, comprising a printing substrate at the bottom, a positioning plate on the printing substrate, a support plate in the middle of the positioning plate, and a grinding disc printed on the support plate by additive manufacturing technology, wherein the positioning plate is fixed to the printing substrate, the positioning plate has a hollowed-out portion in the middle, and the support plate and the hollowed-out portion are adapted to each other to fix and position the support plate.

[0012] Furthermore, there is a printing transition layer between the tray and the grinding disc.

[0013] In another aspect, the present invention provides a method for manufacturing an additively manufactured spliced ​​grinding disc, comprising the following steps:

[0014] Step S00: Prepare the printing components required for additive manufacturing: including a printing substrate at the bottom, a positioning plate on the printing substrate, and a support plate in the middle of the positioning plate, wherein the positioning plate is fixed on the printing substrate, the positioning plate has a hollowed-out portion in the middle, and the support plate and the hollowed-out portion are adapted in shape.

[0015] Step S10: Fix the positioning plate onto the printing substrate, then place the tray into the positioning plate, and then calibrate the surface flatness of the customized printing platform; make the flatness of the tray surface ≤0.02mm, and the parallelism between the positioning plate and the tray surface ≤0.05mm;

[0016] Step S20: Customize the coordinate system of the printing platform and the coordinate system of the printing equipment to compensate for the deviation; the deviation is calibrated by pre-marking with a laser beam, taking pictures with a camera and then programming to obtain the deviation amount, and then compensating for the deviation amount in the slicing software to achieve accurate positioning of the grinding plate and the tray; so that the deviation after coordinate system calibration deviation compensation is ≤0.05mm;

[0017] Step S30: Transition treatment between the printing surface of the tray and the grinding disc; surface roughness ≥2μm, transition coating metal thickness ≥5μm; then additive manufacturing is performed on the tray according to the designed pattern;

[0018] Step S40: Fix the printed pattern tray onto the base plate of the grinding disc. After multiple trays are assembled on the grinding disc, process the surface of the grinding disc.

[0019] Further, step S00 includes steps S001, S002, and S003, wherein:

[0020] Step S001: Draw a 3D model of the grinding disc structure and save it in a format that matches the additive manufacturing equipment;

[0021] Step S002: Process and prepare a printing platform and components that match the shape of the grinding disc: tray, positioning plate, printing substrate and grinding disc base plate; trim the positioning grooves on the printing substrate and customize the tray according to the shape and purpose of the grinding disc;

[0022] Step S003: Check whether the shape and dimensions of each component meet the standards.

[0023] Furthermore, in step S20, a deviation compensation is made between the coordinate system of the printing platform and the coordinate system of the printing device. The deviation is obtained by measuring the deviation between the theoretical scanning position and the actual scanning position on the sample block in the pre-experiment using the micro-measurement system. The deviation compensation includes adjusting the position compensation of the printing substrate, adjusting the position compensation of the heat source, and adjusting the coordinate position of the printing plate in the compensation slicing software.

[0024] Furthermore, the transition treatment between the printing surface of the pallet and the grinding disc in step S30 includes roughening the printing surface of the pallet, applying a plating layer to the printing surface of the pallet, and applying a material transition treatment to the printing grinding disc. One or more of the above three methods can be used according to actual needs.

[0025] Furthermore, the method includes roughening the printing surface of the pallet, which includes one or more of the following: machining, heat treatment, chemical processing, electron beam treatment, laser treatment, and plasma treatment.

[0026] Furthermore, the material transition treatment for the printing plate involves bonding a layer of transition material (such as a material with the same group of elements) that has affinity with both the plate material and the printing raw material to the printing surface of the plate, and then replacing it with the required printing raw material for printing again.

[0027] Furthermore, in step S40, the grinding disc splicing and grinding disc surface treatment include adhesive bonding, welding, and threaded connection.

[0028] This invention provides an additively manufactured spliced ​​grinding disc and its manufacturing method, offering a spliced ​​grinding disc using additive manufacturing technology that allows for the design of complex grinding disc structures and internal / external flow channel structures. Currently, spliced ​​grinding discs prepared by traditional processing methods have relatively simple structures, making it difficult to manufacture complex grinding disc structures and internal / external flow channel structures required for certain special working conditions.

[0029] As a further optimization, the abrasive types for the grinding discs include, but are not limited to, silicon carbide, alumina, tungsten carbide, diamond, CBN, etc. Additive manufacturing technologies include, but are not limited to, direct metal laser sintering (DMLS), selective laser sintering (SLS), selective laser melting (SLM), and electron beam melting (EBM).

[0030] As a further optimization, in step S20, it is necessary to calibrate and compensate for the deviation between the origin of the printing platform and the positioning point of the heat source. This is because there may be a certain deviation between the origin of different substrates and the origin of the heat source of different machine tools. The deviation is obtained by measuring the deviation between the theoretical scanning position and the actual scanning position on the sample in the heat source scanning pre-experiment using a microscopic measurement system. The specific measurement process involves automatically identifying the contours and geometric centers of the theoretical and actual scanning positions after acquiring image information at a set height, and then calculating the deviation distance based on the number of pixels corresponding to the geometric center deviation. The deviation compensation includes adjusting the substrate position, adjusting the heat source position, and adjusting the coordinate position of the printed wafer in the compensation slicing software.

[0031] As a further optimization, the transition treatment between the printing surface of the tray and the grinding disc includes roughening the printing surface of the tray, pre-setting the coating on the tray, and transition treatment of the grinding disc material. One or more of the above three methods are used in combination to make the interface between the tray and the grinding disc more firmly bonded, improve the strength and integrity of the finished grinding disc and reduce stress concentration and other problems.

[0032] As a further optimization, the printing surface of the pallet is roughened using methods including mechanical processing (sandblasting, brushing, polishing, etc.), heat treatment (annealing, quenching, tempering, etc.), chemical processing (pickling, acid etching, alkaline etching, electrolysis, etc.), and other methods (electron beam treatment, laser treatment, plasma treatment).

[0033] As a further optimization, the pallet is provided with a coating treatment, the method of which includes coating the pallet with a transition material layer (such as a material with the same group of elements) that has affinity with both the pallet material and the grinding disc raw material, and then finishing it.

[0034] As a further optimization, the grinding disc material transition treatment involves printing on the surface layer of the printing plate using transitional powder that has affinity with both the printing plate material and the grinding disc raw material (such as materials with the same group of elements), and then printing again on this basis using the powder required for the grinding disc.

[0035] By adopting the above technical solution, the present invention can achieve the following technical effects:

[0036] 1. Existing laser printing equipment, due to the limited volume of the printing cavity, generally cannot print large-area grinding tools such as grinding discs. Furthermore, even some large and expensive laser printers can print such tools, but the large overall printing area leads to significant deformation. Therefore, grinding tools like grinding discs are typically printed with small patterns on other substrates first, then cut out individually and glued together to form a complete ring shape. This invention cleverly designs a fan-shaped support plate, using multiple fan-shaped support plates to form a ring on the grinding disc. This allows for direct printing on the support plate without cutting, and the printing area of ​​the support plate is relatively small compared to the entire grinding disc, resulting in higher printing precision and eliminating the need for large printing equipment. The support plate and grinding disc can be fixed together with screws, which offer high fixing strength and ensure the overall strength of both.

[0037] 2. This invention provides an additive manufacturing splicing grinding disc, wherein a printed transition layer is provided between the support plate and the grinding discs; the transition layer thickness is 50-100μm; the bonding strength is 400-600Mpa; the shapes and patterns of the grinding discs are the same or different or partially the same; the splicing error between patterns is ≤0.05mm. In contrast, existing grinding discs involve cutting the printed body and then re-gluing it to the base plate, resulting in a bonding strength only a fraction of that of this invention, and splicing errors that can be more than ten times greater. The grinding disc of this invention is assembled from the drawn grinding discs, allowing for the design of splicing grinding discs with complex structures. Furthermore, it eliminates the need for secondary cutting and removal when printing grinding discs using additive manufacturing technology, improving the integrity, strength, and geometric accuracy of the grinding discs.

[0038] 3. This invention abandons the conventional method of first printing a pattern on a substrate, then cutting out the printed pattern and pasting it onto the grinding disc. Instead, it utilizes a tray, a fixing plate, and a printing substrate for positioning, and prints directly on the tray. The tray is then assembled and fixed onto the grinding disc. This invention can design grinding discs with complex structures and internal / external flow channels to meet different working conditions, thereby improving the performance of the spliced ​​grinding disc. Depending on the printing platform and printing equipment, appropriate methods are used to compensate for the deviation between the printing platform coordinate system and the printing equipment coordinate system, thereby improving the connection accuracy between the grinding disc and the tray and ensuring processing precision. Different methods are selected for the transition treatment of the printed surface of the tray and the grinding disc according to different working conditions, thereby improving the splicing adhesion strength and ensuring the processing qualification rate. When splicing the grinding disc, grinding discs with different geometric structures and abrasive types can be combined and spliced ​​according to the grinding conditions or the material characteristics of the workpiece, achieving the goal of improving the grinding processing quality.

[0039] 4. Different patterns can be printed between different pallets of the present invention, which can greatly improve the personalization and performance of the spliced ​​grinding disc. The one-piece molding method of the present invention can also greatly improve the processing efficiency and quality stability of the additive manufacturing of spliced ​​grinding discs. Attached Figure Description

[0040] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

[0041] Figure 1 This is a flowchart of the additive manufacturing method for spliced ​​grinding discs according to the present invention;

[0042] Figure 2 This is a schematic diagram of the complete single-structure grinding disc of the present invention.

[0043] Figure 3 This is a schematic diagram of the printing component of the present invention.

[0044] Figure 4 This is a schematic diagram of the structure of the printing substrate of the present invention.

[0045] Figure 5 This is a schematic diagram of the positioning plate of the present invention.

[0046] Figure 6 This is a schematic diagram of the structure of the tray of the present invention.

[0047] Figure 7 This is a schematic diagram of the grinding disc of the present invention;

[0048] Figure 8 This is a schematic diagram of the connection transition layer of the present invention;

[0049] Figure 9 This is a schematic diagram of the grinding disc base plate of the present invention;

[0050] Figures 2 to 9 middle:

[0051] 10-Printed substrate; 11-First positioning groove;

[0052] 20 - Positioning plate; 21 - Second positioning groove; 22 - Hollowed-out part;

[0053] 30 - Support plate; 31 - First screw fixing hole; 32 - Connecting transition layer;

[0054] 40 - Grinding disc; 41 - Printed small piece; 42 - Gap;

[0055] 50 - Grinding disc base plate; 51 - Second screw fixing hole;

[0056] Figure 10This is a schematic diagram showing the metallurgical bonding interface formed by the mutual penetration of the pallet material and the printing material in the additive manufacturing splicing grinding disc and its manufacturing method of the present invention.

[0057] Figure 11 This is a schematic diagram illustrating the calibration deviation compensation between the coordinate system of the printing platform and the coordinate system of the printing equipment in the additive manufacturing splicing grinding disc and its manufacturing method of the present invention.

[0058] Figure 12 This is a comparison of the splicing precision of a grinding disc (top) prepared based on an additive manufacturing splicing grinding disc and its manufacturing method according to the present invention, and a traditional hand-spliced ​​grinding disc (bottom).

[0059] Figure 13 This is a schematic diagram of the complete grinding disc, which is an additively manufactured spliced ​​grinding disc of the present invention and its manufacturing method, consisting of a combination of different geometric structures and abrasive grinding discs. Top image: Model diagram; Bottom image: Actual product image. Detailed Implementation

[0060] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention. Example

[0061] See Figure 12 This invention discloses an additively manufactured, modular grinding disc, comprising a grinding disc base plate 50 and multiple support plates 30 fixedly mounted on the base plate 50, each support plate 30 having a grinding disc on it. The grinding disc base plate 50 is annular in shape, and the support plates 30 are fan-shaped corresponding to the annular shape. That is, multiple support plates can be assembled into the annular shape, and the grinding discs can be identical or different. In this embodiment, there are eight support plates, and the grinding discs 40 have different patterns, representing eight different shaped units.

[0062] See Figure 3 The printing assembly for preparing the grinding disc design of the present invention includes a printing substrate 10 at the bottom, a positioning plate 20 on the printing substrate 10, a support plate 30 in the middle of the positioning plate 20, and a grinding disc 40 on the support plate 30.

[0063] See Figure 4 The printing substrate 10 is cuboid in shape with a thickness of approximately 20 mm. Multiple first positioning grooves 11 are provided along its edge. In this embodiment, the first positioning grooves 11 are screw positioning holes. In this embodiment, there are eight first positioning grooves 11. In other embodiments, the printing substrate can also be circular, triangular, or other shapes as needed.

[0064] See Figure 5 The positioning plate 20 is cuboid in shape, approximately 5mm thick, with a hollow center. The hollowed-out portion 22 is fan-shaped. Multiple second positioning grooves 21 are provided on the positioning plate 20; in this embodiment, the second positioning grooves 21 are screw positioning holes. The number and position of the second positioning grooves 21 correspond to those of the first positioning grooves 11.

[0065] See Figure 6 The support plate 30 is a fan-shaped thin plate, approximately 6mm thick, with four first screw holes 31 for fixing the support plate 30 to the grinding disc base plate 50. In this embodiment, three screw holes are located near the outer arc of the fan ring, and one screw hole is located near the inner arc of the fan ring. The support plate 30 can be embedded into the hollowed-out portion 22 of the positioning plate 20.

[0066] See Figure 7 The abrasive disc 40 is printed on the tray 30. The abrasive disc includes multiple printed small blocks 41, with gaps 42 between the printed small blocks 41. The printed small blocks 41 can have the same or different shapes. In this embodiment, a honeycomb-shaped abrasive disc 40 is composed of multiple hexagonal prism printed small blocks 41 of varying sizes. And as... Figure 9 As shown, the printed blocks on the other trays are also different in shape, including cylinders, triangular prisms, etc.

[0067] See Figure 9 The grinding disc base plate 50 is annular in shape and has multiple second screw fixing holes 51. The positions of the first screw fixing holes 31 and the second screw fixing holes 51 on the support plate 30 correspond to the positions of the second screw fixing holes 51, and the support plate 30 can be fixed to the grinding disc base plate using screws. See also Figure 9 Eight printed trays 30 are spliced ​​on the grinding disc base plate 50 to form a grinding component.

[0068] See Figure 1 The embodiments of the present invention provide Figure 2 The method for manufacturing an additively manufactured spliced ​​grinding disc, as shown, includes the following steps:

[0069] Step S00: Customize the printing components required for additive manufacturing: including tray 30, printing substrate 10, positioning plate 20 and grinding disc base plate 50. In this embodiment, all components are made of 304 steel. The form and position accuracy requirements are that the flatness of the upper and lower surfaces is less than 0.02mm and the parallelism is less than 0.05mm, so as to achieve accurate assembly.

[0070] Specifically, step S00 includes steps S001, S002, and S003, wherein:

[0071] Step S001: Draw a 3D model of the structure of the grinding disc 50 and save it in a format that matches the additive manufacturing equipment;

[0072] Step S002: Process and prepare a printing platform and components that match the structure and shape of the grinding disc 50: tray 30, positioning plate 20, printing substrate 10 and grinding disc base plate 50.

[0073] The tray, positioning plate, base plate, and grinding disc base plate are prepared and trimmed to match the shape of the grinding disc structure through milling, grinding, and other processing methods, along with a flat disc (if necessary) for adjusting the height consistency of the printing surface. Therefore, the cross-sectional shape of the tray (including but not limited to circles, squares, triangles, rings, etc.) is determined by the required grinding disc structure. The positioning plate is used to embed and fix the tray above the printing base plate in the set position, ensuring accurate printing position.

[0074] Step S003: Check whether the shape and dimensions of each component meet the standards. Precision requirements for machined parts: flatness ≤ 0.02mm, parallelism ≤ 0.05mm.

[0075] Step S10: Surface flatness calibration of the custom substrate.

[0076] Step S10 includes steps S101, S102, and S103, wherein:

[0077] Step S101: Fix the positioning plate 20 onto the printing substrate 10;

[0078] Step S102: Embed the tray 30 into the positioning plate 20.

[0079] Step S103: Check whether the height consistency of the tray meets the standard. After the tray 30, the printing substrate 10 and the positioning plate 20 are assembled, the height difference at each position on the surface of a single tray 30 does not exceed 0.02mm.

[0080] The method for adjusting the tray is to gently tap the thicker areas with a rubber mallet, repeatedly measuring and tapping until the thickness at each location meets the requirements. The tray and positioning plate are designed with a clearance fit, so theoretically there shouldn't be a problem with the tray not fitting the positioning plate. However, due to machining errors, the positioning plate and tray may not fit precisely enough, further resulting in insufficient adhesion between the tray and the printing substrate. This can be fine-tuned by adjusting the fixing screws of the positioning plate and using a rubber mallet.

[0081] Step S20: Calibration and compensation of the coordinate system deviation between the printing platform and the printing equipment: In this embodiment, after laser pre-scanning, a camera image is taken and imported into a pre-programmed program to automatically calculate the deviation. The coordinate position of the grinding disc model in the compensation slicing software is adjusted so that the laser accurately hits the required printing position. This ensures that the grinding disc and the tray can be accurately aligned, and the deviation between the theoretical scanning position and the actual scanning position does not exceed 0.05mm.

[0082] Furthermore, in step S20, the process requires calibration and compensation for the deviation between the positioning origin of the customized substrate and the positioning point of the heat source. This is because the origin of different substrates may deviate from the origin of the heat source of different machine tools. Calibration of the deviation is achieved through methods such as machine vision positioning and reprogramming for heat source pre-marking, and pixel-level positioning calibration using pre-marked images of the heat source. Compensation for the deviation includes adjusting the substrate position and also adjusting the heat source position. In this embodiment, the calibration deviation is obtained by pre-marking with a laser beam, taking photos with a camera, and reprogramming the process. The deviation is then compensated in the slicing software to ensure accurate positioning of the grinding wafer and the tray, thereby improving the printing pass rate.

[0083] Step S30: Processing of the printing layer and grinding disc on the tray;

[0084] As a further optimization, step S30 includes steps S301, S302, and S303. Wherein:

[0085] Step S301: Roughen the surface of the pallet;

[0086] The transition treatment between the printing substrate surface and the printed workpiece includes at least two of the following three methods: surface roughening of the printing substrate, pre-coating of the tray, and material transition treatment of the printed workpiece. The purpose of this approach is to ensure a stronger bond between the tray and the grinding disc, improving the strength and integrity of the finished workpiece and reducing stress concentration. In this example, roughening treatment is used.

[0087] In this embodiment, sandblasting is used to roughen the surface. After sandblasting, the roughness of the printing surface of the tray is not less than 2μm, which increases the contact area between the printing layer and the printing material, enabling the grinding disc and the tray to achieve greater bonding strength. Surface roughening of the printing substrate includes mechanical processing such as sandblasting, brushing, and polishing; heat treatment such as annealing, quenching, and tempering; chemical processing such as pickling, acid etching, alkaline etching, and electrolytic polishing; and other methods such as electron beam treatment, laser treatment, and plasma treatment. This example uses sandblasting and laser grooving from mechanical processing.

[0088] The thickness of the connecting transition layer 32 is ≥5μm. The metal of the connecting transition layer 32 can be the same as the metal powder composition or the tray material, or a material that can achieve high-temperature interpenetration. For example, Cu-Ni-Fe-Sn-Ti alloy (transition layer) and 304-SS (tray).

[0089] The material transition treatment for the printed workpiece refers to repeatedly scanning 2-3 times with a higher laser power than that used for printing the abrasive layer unit after the first layer of powder is laid in the initial stage of printing. In this embodiment, the laser power for printing the abrasive layer unit is 120 watts, and the laser power for the first layer scan is 140 watts. This increases the thickness of the material interpenetration between the workpiece and the substrate (that is, the thickness of the transition layer is 50-100 μm, reaching 80 μm in this embodiment), thereby increasing the bonding strength (bonding strength is 400-600 MPa, reaching 500 MPa in this embodiment).

[0090] In this embodiment, the above three processing methods are used simultaneously to obtain products with higher strength; calibration and compensation of the printing laser beam and the origin position of the substrate; furthermore, the processing efficiency is greatly improved and the printing qualification rate is greatly increased after using an additive manufacturing splicing grinding disc and its manufacturing method.

[0091] Step S302: Using laser melting technology, a milled disc structure is printed on the surface of the assembled printing assembly (pallet, positioning plate, and printing substrate assembly). This invention can print individual small pieces of the milled disc onto the pallet. Due to the use of laser printing, high precision is achieved.

[0092] In existing technologies, as described in the background section, the mainstream method for splicing grinding discs primarily uses manual epoxy resin adhesive. This involves first printing small pillars of the grinding disc onto a substrate, then cutting each small piece from the substrate and attaching them one by one to the grinding disc using adhesive. Because this method relies on manual alignment, it suffers from low splicing accuracy (millimeter-level error), low connection strength (only 10-35 MPa), and the possibility of adhesive seeping into the grinding disc and causing blockage. The splicing process is as follows... Figure 11 As shown, the gaps are of varying sizes and have poor precision.

[0093] Additive printing manufacturing methods include direct metal laser sintering (DMLS), selective laser sintering (SLS), selective laser melting (SLM), and electron beam melting (EBM). This embodiment uses selective laser melting (SLM) technology.

[0094] The heat source includes high-energy beams such as laser beams, electron beams, plasma beams, and ion beams. In this example, a laser beam is used.

[0095] The first layer scanning power is increased to 140W, and the number of scans is increased to 3 to further increase the bonding strength between the printing material and the tray. After treatment, the thickness of the metallurgical bonding interface is not less than 80μm, and the bonding strength reaches 500Mpa, which is about 14-50 times the resin bonding strength (10-35Mpa).

[0096] After the first layer scan is completed, the working cylinder needs to be lowered manually. The lowering height is equal to the thickness of the single layer of powder. In this embodiment, the thickness of the single layer of powder is 30μm.

[0097] To improve forming quality, the single-layer printing area should be ≤2500mm². 2 At that time, the powder spreading coefficient was set to 150%, and the single-layer printing area was ≤3000mm². 2 At that time, the powder spreading factor was set to 200%, and the single-layer printing area was >3000mm². 2 When the powder coating factor is set to 300%, the single-layer printing area in this embodiment is 3245 mm². 2 The powder spreading coefficient is set to 300%.

[0098] Step S303: Install the printed grinding disc and tray onto the grinding disc base plate, and adjust the assembly to make their surface height consistent.

[0099] Step S40: Perform surface treatment on the workpiece and clean the substrate, and check whether the surface height of the assembly meets the standard. In this embodiment, sandblasting is used to remove impurities from printing splashes and to harden the surface.

[0100] In summary, this invention provides a grinding disc capable of designing complex internal and external flow channel structures and offers a method for integrated molding. It provides a special structural design for the printing substrate in powder bed additive manufacturing, and by adjusting laser parameters during manufacturing, the printed portion and the designed structure are tightly fitted, achieving integrated molding and eliminating subsequent cutting and bonding steps. This ensures the precision and strength of the prepared workpiece and improves manufacturing efficiency and quality reliability.

[0101] The present invention solves the problems in current additive manufacturing processes, where the powder material melts at high temperatures, causing the consumable powder on the contact surface to stick to the substrate and be difficult to remove; and where the material is removed, processed again, and then assembled onto the required pallet, resulting in insufficient adhesion strength between the pallet and the grinding disc, and inaccurate positioning.

[0102] See the final product for reference. Figure 12 .

[0103] Using the method of this invention, the splicing accuracy is: error ≤ 0.05mm;

[0104] Interface bonding: bonding strength 500 MPa (14-50 times that of traditional grinding discs), bonding interface thickness 80 μm;

[0105] Structural features: No cutting required, high flatness, and height error after splicing ≤0.05mm;

[0106] Application features: Modular design, allowing for the combination of grinding discs with different structures based on different materials, offering a high degree of freedom in assembly.

[0107] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for manufacturing an additively manufactured spliced ​​grinding disc, characterized in that, Includes the following steps: Step S00: Prepare the printing components required for additive manufacturing: including a printing substrate (10) at the bottom, a positioning plate (20) on the printing substrate (10), and a support plate (30) in the middle of the positioning plate (20), wherein the positioning plate (20) is fixed on the printing substrate (10), the positioning plate has a hollowed-out portion in the middle, and the support plate and the hollowed-out portion are adapted in shape; Step S10: Fix the positioning plate onto the printing substrate, then place the tray into the positioning plate, and then calibrate the surface flatness of the customized printing platform; make the flatness of the tray surface ≤0.02mm, and the parallelism between the positioning plate surface and the tray surface ≤0.05mm; Step S20: Customize the coordinate system of the printing platform and the coordinate system of the printing equipment to compensate for the deviation; the deviation is calibrated by pre-marking with the laser beam, taking a picture of the pre-marked graphic, and then programming to obtain the deviation amount. The deviation amount is compensated in the slicing software to achieve accurate positioning of the grinding plate and the tray; the deviation after coordinate system calibration deviation compensation is ≤0.05mm. Step S30: Transition treatment between the printing surface of the tray and the grinding disc; surface roughness ≥2μm, transition coating metal thickness ≥5μm; then additive manufacturing is performed on the tray according to the designed pattern; Step S40: Fix the printed pattern tray onto the grinding disc base plate. After multiple trays are assembled on the grinding disc base plate, process the surface of the grinding disc. The additively manufactured spliced ​​grinding disc includes a grinding disc base plate (50) and multiple support plates (30) spliced ​​and fixed on the grinding disc base plate (50). Each support plate (30) is provided with a grinding disc (40). The grinding disc (40) is printed on the support plate (30) by additive manufacturing technology. A connecting transition layer (32) is also provided between the support plate (30) and the grinding disc (40). The thickness of the connecting transition layer (32) is 50-100μm; the bonding strength is 400-600Mpa; the shapes and patterns of each grinding disc are the same or different or partially the same; the splicing error between the patterns is ≤0.05mm.

2. The method for manufacturing an additively manufactured spliced ​​grinding disc according to claim 1, characterized in that, The abrasive type in the grinding disc includes at least one of silicon carbide, alumina, tungsten carbide, diamond, and CBN.

3. The method for manufacturing an additively manufactured spliced ​​grinding disc according to claim 1, characterized in that, The tray, transition layer, and grinding disc are made of materials that can diffuse and interpenetrate.

4. The method for manufacturing an additively manufactured spliced ​​grinding disc according to claim 1, characterized in that... Step S00 includes steps S001, S002, and S003, wherein: Step S001: Draw a three-dimensional model of the grinding disc (40) structure and save it in a format that matches the additive manufacturing equipment; Step S002: Process and prepare a printing platform and components that match the structure and shape of the grinding disc (40): tray (30), positioning plate (20), printing substrate (10) and grinding disc base plate (50); trim the positioning holes and grooves set on the printing substrate and customize the tray (30) according to the shape and purpose of the grinding disc (40). Step S003: Check whether the shape and dimensions of each component meet the standards.

5. The method for manufacturing an additively manufactured spliced ​​grinding disc according to claim 1, characterized in that... In step S20, the deviation compensation between the coordinate system of the printing platform and the coordinate system of the printing equipment is customized. The deviation is obtained by the deviation between the theoretical scanning position and the actual scanning position on the sample block in the pre-experiment measured by the micro-measurement system. The deviation compensation includes adjusting the position compensation of the printing substrate, adjusting the position compensation of the heat source, and adjusting the coordinate position of the printing plate in the compensation slicing software.

6. The method for manufacturing an additively manufactured spliced ​​grinding disc according to claim 1, characterized in that... In step S30, the transition treatment between the printing surface of the pallet and the grinding disc includes at least two of the following three types: roughening treatment of the printing surface of the pallet, coating treatment of the printing surface of the pallet, and material transition treatment of the printing grinding disc.

7. A method for manufacturing an additively manufactured spliced ​​grinding disc according to claim 6, characterized in that... The roughening treatment of the printing surface of the pallet includes at least one of the following: machining, heat treatment, chemical processing, electron beam treatment, laser treatment, and plasma treatment.

8. A method for manufacturing an additively manufactured spliced ​​grinding disc according to claim 6, characterized in that... The material transition treatment for printing grinding discs involves bonding a layer of transition material with affinity to both the tray material and the printing raw material to the printing surface of the tray, and then printing again on this basis using the required printing raw material.

9. A method for manufacturing an additively manufactured spliced ​​grinding disc according to claim 1, characterized in that... In step S40, the method of fixing the tray to the grinding disc base plate includes at least one of adhesive bonding, welding, and threaded connection.

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