Jacking and air floating conveyor for liquid crystal glass substrate

Abstract

The invention relates to a liquid crystal glass substrate jacking air flotation conveyor and relates to the technical field of glass substrate conveying, the liquid crystal glass substrate jacking air flotation conveyor comprises a sampling inspection station and a conveying station which are arranged up and down, the sampling inspection station comprises a bottom plate, a first cavity, a second cavity and an ejector pin, the first cavity and the second cavity are arranged on a rack, and the first cavity and the second cavity are independent of each other; an adsorption hole communicated with the first cavity is formed in the ejector pin, and an air injection hole communicated with the second cavity is formed in the ejector pin; the dynamic control assembly is used for controlling air pressure values in the first cavity and the second cavity; and the protective cover is used for preventing airflow of the transmission station from entering the sampling inspection station. Air floating type transmission is carried out through the transmission station, the sampling inspection station is used for sampling inspection, the protection cover physically prevents airflow of the transmission station from entering the sampling inspection station, and the dynamic control assembly achieves air injection to balance gravity and then negative pressure locking after the glass substrate is placed. And finally, the stability of the glass substrate on the sampling inspection station is improved, and the detection accuracy of the glass substrate is improved.

Description

Technical Field

[0001] This application relates to the technical field of glass substrate conveying, and in particular to a liquid crystal glass substrate lifting air flotation conveyor. Background Technology

[0002] The LCD glass substrate lifting air flotation conveyor is an automated device specifically designed for LCD panel manufacturing. It uses air flotation technology to transport glass substrates non-contactly and also has the function of conveying the substrates to an inspection station for online sampling inspection. This equipment integrates the transport and inspection processes and is a key piece of equipment ensuring efficient and non-destructive processing of large-size, ultra-thin glass substrates.

[0003] To improve space utilization, integrated conveyors have emerged, which generally adopt a double-layer workstation design. The lower layer is the transmission workstation, which uses air-cushioned air jets to transport the substrate; the upper layer is the sampling inspection workstation, which uses a top PIN structure to support the glass substrate, thereby reducing the risk of scratches on the glass substrate when the inspection station comes into contact with it.

[0004] Since the glass substrate is supported only by the top PIN structure, although the probability of scratching the glass substrate during contact is reduced, the locking between the glass substrate and the PIN structure is poor. At the same time, since the transfer station is used to transport the glass substrate, the gas ejected from the transfer station can easily overflow into the sampling station due to the different positions of the glass substrate. This affects the stability of the glass substrate at the sampling station and ultimately reduces the accuracy of the glass substrate inspection. Summary of the Invention

[0005] To improve the stability of glass substrates at the sampling inspection station and to enhance the inspection accuracy of glass substrates, this application provides a liquid crystal glass substrate lifting air flotation conveyor.

[0006] This application provides a liquid crystal glass substrate lifting air flotation conveyor, which adopts the following technical solution: A liquid crystal glass substrate lifting air-floating conveyor includes a double-layer station structure mounted on a frame. The double-layer station structure includes a transfer station and a sampling inspection station. The transfer station is located directly below the sampling inspection station and is used for air-floating transfer of the glass substrate. The sampling inspection station is used for inspecting the glass substrate and includes: The base plate is mounted on the frame and located directly above the transmission station. The base plate has two sets of independent first and second cavities inside. The ejector pins, and multiple sets of the ejector pin array are arranged on the base plate and used to support the glass substrate. The top surface of the ejector pins is provided with adsorption holes to facilitate adsorption of the glass substrate onto the ejector pins. Multiple sets of air jet holes are arranged in a circular array on the side wall of the ejector pins near the top surface. The air jet holes are inclined to the lower surface of the glass substrate. The adsorption holes are connected to the interior of the first cavity, and the air jet holes are connected to the interior of the second cavity. A dynamic control component is mounted on the frame and used to control the air pressure values ​​in the first and second chambers, thereby controlling the adsorption force of the adsorption hole and the air jet volume of the air jet hole. After the glass substrate is placed, the dynamic control component realizes first air jet to balance gravity and then negative pressure locking. A protective cover is mounted on the frame and is used to prevent airflow from the transport station from entering the sampling station.

[0007] By adopting the above technical solution, the dual-layer workstation structure achieves spatial integration. The transmission workstation is used for air-floating transmission of glass substrates, and the sampling workstation is used for placing glass substrates for sampling. The protective cover physically blocks the airflow from the transmission workstation from entering the sampling workstation. The dynamic control component first sprays high-pressure gas from the second chamber through the jet hole, thereby balancing part of the gravity of the glass substrate and reducing the force of the glass substrate on the ejector pin. Then, it locks the glass substrate with negative pressure through the adsorption hole, which ultimately improves the stability of the glass substrate at the sampling workstation and improves the detection accuracy of the glass substrate.

[0008] Furthermore, the first cavity is located below the second cavity, and the first cavity and the second cavity are sealed and isolated by a partition. The ejector pin includes: The outer cylinder is set on the bottom plate and has a circular structure. The outer cylinder is hollow and communicates with the interior of the second cavity. Multiple sets of jet holes are arranged in a circumferential array on the outer wall of the outer cylinder at the end away from the bottom plate. The jet direction of the jet holes is inclined at an angle between 30° and 60° to the axis of the outer cylinder. The inner rod passes through the second cavity and is set on the partition plate. The inner rod is hollow inside and communicates with the inside of the first cavity. The top of the inner rod is provided with an abutment. The abutment has a rounded top structure and the bottom of the abutment is tightly fitted with the top of the outer cylinder. The adsorption hole is opened in the middle of the abutment and communicates with the first cavity through the inner rod.

[0009] By adopting the above technical solution, the ejector pin adopts a split air path design, which connects the outer cylinder with the second cavity and sprays air through the air jet hole, forming an air curtain under the glass substrate, thereby balancing part of the gravity of the glass substrate. The inner rod connects with the first cavity and adsorbs and locks the glass substrate through the adsorption hole, which ultimately improves the locking effect of the abutment on the glass substrate, while reducing the probability of deformation of the ultra-thin glass substrate caused by the interaction force between the gravity of the glass substrate and the abutment.

[0010] Furthermore, the dynamic control component includes: A negative pressure machine, which is mounted on a frame and communicates with the inside of the first chamber, is used to provide negative pressure to the first chamber; A high-pressure gas supply component is mounted on the frame and connected to the inside of the second chamber via a high-pressure pipe. The high-pressure gas supply component is used to introduce high-pressure gas into the second chamber. A control valve, which is installed on the high-pressure pipe and used to control the opening degree of the high-pressure pipe; A connecting valve, which is mounted on the frame and used to control the connection between the first chamber and the second chamber; The controller is mounted on the frame and electrically connected to the negative pressure machine, the control valve, and the connecting valve, respectively. The controller is used to control the opening degree of the negative pressure machine, the control valve, and the connecting valve.

[0011] By adopting the above technical solution, the controller achieves timing adjustment by controlling the opening degree of the negative pressure machine, control valve and connecting valve. In the early stage, only the control valve is opened and gas is ejected through the jet hole. Then the negative pressure machine is turned on to lock the glass substrate under negative pressure. At the same time, after the detection is completed, the negative pressure machine is turned off and the connecting valve is opened, so that gas is ejected from the negative pressure hole, thereby realizing the rapid unlocking of the glass substrate.

[0012] Furthermore, the rack is provided with auxiliary components for assisting the controller, the auxiliary components including: A detector is mounted on a base plate and used to detect the distance between the glass substrate and the base plate; the detector is electrically connected to a controller. A timer is installed on the frame and used for timing. The timer is electrically connected to the controller. When the distance between the glass substrate and the base plate is greater than a set distance value, the control valve is opened 100%. When the distance between the glass substrate and the base plate is less than or equal to the distance value, the controller turns on the negative pressure machine and opens the control valve 50%, and the timer starts timing. After the timer reaches the set time, the air pressure value of the first chamber is stabilized and the control valve is opened 80%.

[0013] By adopting the above technical solution, the detector provides real-time feedback on the distance between the glass substrate and the base plate. When the distance is greater than the set value, the control valve is opened 100% to allow the jet nozzle to spray air. When the distance is less than or equal to the set value, the negative pressure machine is activated and the control valve is opened 50% to lock the glass substrate. Finally, after the timer reaches the target, the control valve is opened 80% to ensure stable locking of the glass substrate.

[0014] Furthermore, the top of the abutment is provided with an abutment plane, and the adsorption hole is opened in the middle of the abutment plane. A pushing component for separating the glass substrate from the ejector pin is provided inside the adsorption hole. The pushing component includes: A connecting rod, which is disposed on the abutment and has a tubular structure; A sliding sleeve, which is slidably mounted on the connecting rod; The support plate is connected to the sliding sleeve by multiple sets of support rods. Multiple sets of mutually interleaved adsorption grooves are opened on the top of the support plate. When the sliding sleeve is pressed against the connecting rod, the upper surface of the support plate is flush with the abutting plane. When the connecting valve is opened, the high-pressure gas in the second chamber enters the first chamber and blows the support plate to slide away from the bottom plate.

[0015] By adopting the above technical solution, the sliding sleeve is normally pressed against the connecting rod, so that the support plate is flush with the contact surface, which makes it easy to support and fix the part of the glass substrate located in the middle of the adsorption hole. The adsorption groove increases the effective adsorption area, ensuring the adsorption effect while reducing the probability of local deformation. When the connecting valve is opened, the high-pressure gas enters the first chamber and pushes the support plate to push the glass substrate, which makes it easy to separate the glass substrate from the contact surface.

[0016] Furthermore, the rack is equipped with an illumination system for illuminating the substrate to be tested, the illumination system using a shadowless light source, and the rack is equipped with an air purification system for blowing and cleaning the upper surface of the glass substrate.

[0017] By adopting the above technical solution, the shadowless light source eliminates the detection shadow, and the air purification system performs directional blowing on the surface of the glass substrate after the glass substrate is adsorbed and stabilized, thereby improving the cleanliness of the glass substrate surface.

[0018] Furthermore, the transmission station includes: Air floats, multiple sets of air floats are spaced apart on the frame, and multiple sets of air float holes are spaced apart on the air floats. The air float holes are used to eject gas and form an air cushion between the air floats and the glass substrate. Two sets of magnetic drive wheel sets are symmetrically arranged on both sides of the frame and roll against the opposite side walls of the glass substrate. A drive assembly is mounted on a frame and is used to drive two sets of magnetic drive wheels to rotate synchronously and drive the glass substrate to move.

[0019] By adopting the above technical solution, the air float forms an air cushion, which suspends the glass substrate. The drive component drives the magnetic transmission wheel set to rotate, and then drives the glass substrate to move by rolling contact with the side of the glass substrate.

[0020] Furthermore, the top two sides of the air flotation bar are provided with inclined surfaces, and multiple sets of air flotation holes are spaced apart on the top of the air flotation bar. Multiple sets of auxiliary holes perpendicular to the inclined surfaces are spaced apart on the inclined surfaces. An auxiliary cavity for supplying air to the auxiliary holes is provided inside the air flotation bar. An air flotation cavity for supplying air to the multiple sets of air flotation holes is provided inside the air flotation bar. The air flotation cavity and the auxiliary cavity are not connected to each other. The diameter of the auxiliary hole is smaller than the diameter of the air flotation hole, and the air pressure value in the air flotation cavity is smaller than the air pressure value in the auxiliary cavity.

[0021] By adopting the above technical solution, the gas in the air flotation chamber is ejected through the air flotation hole to provide the main suspension force, and the gas in the auxiliary chamber is ejected through the auxiliary hole. Since the air pressure in the air flotation chamber is greater than the air pressure in the auxiliary chamber and the auxiliary hole is smaller than the air flotation hole, the airflow ejected from the auxiliary hole forms a boundary air wall to suppress the escape of the air cushion.

[0022] Furthermore, the frame is equipped with a dual-platform module for adjusting the distance between the two sets of magnetic drive wheel sets, the dual-platform module comprising: A base, which is mounted on the frame and located below the air flotation bar; The sliding seats are arranged on both ends of the base in a direction that moves closer to or further away from each other, and the magnetic drive wheel set is arranged on the end of the sliding seat away from the base; A double-ended threaded rod is rotatably mounted on a base and threadedly connected to two sets of sliding seats respectively. The double-ended threaded rod rotates and simultaneously drives the two sets of sliding seats to slide on the base. A drive motor is mounted on the base and is used to drive the double-ended threaded rod to rotate.

[0023] By adopting the above technical solution, the drive motor drives the double-headed threaded rod to rotate, thereby controlling the distance between the two sets of sliding seats, and finally quickly adjusting the distance value between the two sets of magnetic drive wheel sets, which facilitates the rapid switching between different glass substrate models.

[0024] Furthermore, the frame is equipped with a barrier component for preventing airflow from the transmission station from entering the sampling inspection station. The barrier component includes: Mounting base, which is mounted on the frame and located between the transfer station and the sampling station; A flow guide plate is slidably mounted on a mounting base along the direction of approaching or moving away from the transmission station. The flow guide plate has a flow guiding surface on the side near the transmission station and is used to guide the airflow in the direction of the transmission station to the side. The width of the flow guide plate is greater than the width of the transmission station, and the interior of the flow guide plate is hollow. A buffer element is disposed between the mounting base and the guide plate and is used to buffer the sliding of the guide plate. The buffer element consists of multiple sets of compression springs and dampers.

[0025] By adopting the above technical solution, the guide plate directs the airflow escaping from the transmission station to one side. At the same time, due to the change in the position of the glass substrate, the impact force of the airflow on the guide plate changes continuously. The buffer absorbs the airflow force, thereby reducing the impact of the escaping airflow on the sampling station.

[0026] In summary, this application includes at least one of the following beneficial technical effects: The glass substrate is transported by air flotation at the transfer station, while a receiving robot places the sampled glass substrates at the inspection station. As the glass substrate approaches the base plate, air is first sprayed through the air jet to balance part of the gravity. Then, negative pressure is used to lock the glass substrate onto the ejector pin, thus fixing the glass substrate in place at the inspection station. At the same time, a protective cover prevents airflow from the transfer station from entering the inspection station, thereby ensuring that the glass substrate is stably placed at the inspection station. This improves the stability of the glass substrate at the inspection station and enhances the accuracy of glass substrate inspection. Attached Figure Description

[0027] Figure 1 This is a structural schematic diagram of the air flotation conveyor of this application; Figure 2 This is a structural schematic diagram of the air flotation conveyor of this application, which mainly shows the base plate and ejector pin structure of the sampling station; Figure 3 yes Figure 2 A cross-sectional schematic diagram of AA in the middle; Figure 4 yes Figure 3 Enlarged diagram of section B in the middle; Figure 5 yes Figure 4 Enlarged diagram of section C; Figure 6 This is a structural schematic diagram of the air flotation conveyor of this application, which mainly shows the structure of the transmission station; Figure 7 yes Figure 6 A cross-sectional schematic diagram of DD.

[0028] Reference numerals: 1. Frame; 2. Transfer station; 21. Air float bar; 211. Air float hole; 212. Air float cavity; 213. Inclined surface; 214. Auxiliary hole; 215. Auxiliary cavity; 22. Magnetic drive wheel set; 221. Drive shaft; 222. Magnetic ring; 23. Drive assembly; 231. Rotary motor; 232. Main shaft; 233. Sub-shaft; 234. Bevel gear transmission component; 3. Double receiving platform module; 31. Base; 32. Sliding seat; 33. Double-ended threaded rod; 34. Drive motor; 4. Sampling station; 41. Base plate; 411. First cavity; 412. 413. Second chamber; 42. Partition plate; 43. Protective cover; 44. Lighting system; 45. Air purification system; 56. Ejector pin; 57. Outer cylinder; 58. Air jet hole; 59. Inner rod; 50. Abutment joint; 51. Adsorption hole; 60. Dynamic control component; 61. Negative pressure unit; 62. High-pressure air supply component; 63. Control valve; 64. Connecting valve; 7. Auxiliary component; 71. Detector; 82. Pushing component; 83. Connecting rod; 84. Sliding sleeve; 85. Support plate; 86. Adsorption tank; 97. Barrier component; 98. Mounting base; 99. Guide plate; 90. Buffer component. Detailed Implementation

[0029] The following is combined with Figures 1-7 This application is described in further detail.

[0030] This application discloses a liquid crystal glass substrate lifting air flotation conveyor.

[0031] Reference Figure 1 A liquid crystal glass substrate lifting air-floating conveyor includes a double-layer station structure set on a frame 1. The double-layer station structure includes a transfer station 2 and a sampling station 4. The transfer station 2 is located directly below the sampling station 4 and is used for air-floating transfer of the glass substrate. The sampling station 4 is used for inspecting the glass substrate.

[0032] Reference Figure 1 , Figure 2 and Figure 3 The frame 1 is fixedly installed on the working area. A receiving robot for transporting glass substrates is fixedly installed at the front end of the frame 1. The sampling station 4 includes a base plate 41, a pin 5, a dynamic control component 6, and a protective cover 42. The base plate 41 is fixedly installed on the frame 1 and is located directly above the transfer station 2. The base plate 41 has two independent first cavities 411 and second cavities 412 inside. The first cavities 411 and second cavities 412 are arranged in layers. The first cavity 411 is located directly below the second cavity 412. The first cavity 411 and the second cavity 412 are sealed and isolated by a partition 413.

[0033] Reference Figure 3 and Figure 4Multiple sets of ejector pins 5 are arranged in an array at intervals on the base plate 41. The ejector pins 5 are used to support and fix the bottom of the glass substrate. An adsorption hole 531 is opened on the top surface of the ejector pin 5 to facilitate the adsorption of the glass substrate onto the ejector pin 5. Multiple sets of air jet holes 511 are arranged in a circular array on the side wall of the ejector pin 5 near the top surface. The air jet holes 511 are inclined to the lower surface of the glass substrate. The adsorption hole 531 is connected to the inside of the first cavity 411, and the air jet hole 511 is connected to the inside of the second cavity 412. The dynamic control component 6 is arranged on the frame 1.

[0034] Reference Figure 4 Multiple sets of ejector pins 5 have the same structure. Each ejector pin 5 includes an outer cylinder 51 and an inner rod 52. The outer cylinder 51 is mounted on the base plate 41 and has a circular annular structure. The outer cylinder 51 is hollow and communicates with the interior of the second cavity 412. Multiple sets of air jet holes 511 are arranged in a circumferential array on the outer wall of the outer cylinder 51 at the end away from the base plate 41. The air jet direction of the air jet holes 511 is inclined at an angle between 30° and 60° to the axis of the outer cylinder 51. The outer cylinder 51 and the base plate 41 are connected by a threaded seal. During installation, the outer cylinder 51 is threaded onto the base plate 41 and inserted into the second cavity 412 to achieve communication between the outer cylinder 51 and the interior of the second cavity 412. The inner rod 52 passes through the second cavity 412. The two cavities 412 are set on the partition plate 413. The outer diameter of the inner rod 52 is smaller than the inner diameter of the outer cylinder 51, so that the inner rod 52 passes through the outer cylinder 51 and is connected to the partition plate 413. The inner rod 52 is hollow inside and communicates with the inside of the first cavity 411. The top of the inner rod 52 is fixedly installed with an abutment 53. The abutment 53 has a rounded top structure. The bottom diameter of the abutment 53 is larger than the diameter of the outer cylinder 51 and is coaxial with the inner rod 52. The bottom of the abutment 53 is tightly fitted with the top of the outer cylinder 51. The top of the abutment 53 is provided with an abutment plane that abuts against the glass substrate. The adsorption hole 531 is opened in the middle of the abutment plane and communicates with the first cavity 411 through the inner rod 52.

[0035] Reference Figure 2 and Figure 4 The dynamic control component 6 is used to control the air pressure in the first chamber 411 and the second chamber 412, thereby controlling the adsorption force of the adsorption hole 531 and the air jet volume of the air jet hole 511. After the glass substrate is placed, the dynamic control component 6 realizes first air jet to balance gravity and then negative pressure locking.

[0036] Reference Figure 2 and Figure 3The dynamic control component 6 includes a negative pressure compressor 61, a high-pressure air supply component 62, a control valve 63, a connecting valve 64, and a controller. The negative pressure compressor 61 is fixedly mounted on the frame 1 and is connected to the inside of the first chamber 411. After starting, the negative pressure compressor 61 provides negative pressure to the first chamber 411. The high-pressure air supply component 62 is mounted on the frame 1 and is connected to the inside of the second chamber 412 through a high-pressure pipe. The high-pressure air supply component 62 is used to introduce high-pressure gas into the second chamber 412. The control valve 63 is fixedly mounted on the high-pressure pipe. The controller is used to control the opening degree of the high-pressure pipe; the connecting valve 64 is fixedly installed on the frame 1, and the connecting valve 64 is used to control the connection between the first chamber 411 and the second chamber 412; the controller is fixedly installed on the frame 1, and the controller is electrically connected to the negative pressure machine 61, the control valve 63 and the connecting valve 64 respectively, and the controller is used to control the opening degree of the negative pressure machine 61, the control valve 63 and the connecting valve 64; the negative pressure machine 61 in this embodiment is used to provide a stable negative pressure environment inside the first chamber 411, and pressure gauges are installed in both the first chamber 411 and the second chamber 412.

[0037] Reference Figure 1 The protective cover 42 is fixedly installed on the frame 1. The protective cover 42 and the base plate 41 cooperate with each other to prevent the airflow ejected from the transmission station 2 from entering the sampling station 4, thereby reducing the impact of the airflow ejected from the sampling station 4 on the sampling station 4.

[0038] Reference Figure 2 and Figure 4The frame 1 is equipped with an auxiliary component 7 for assisting the controller. The auxiliary component 7 includes a detector 71 and a timer. The detector 71 is fixedly mounted on the upper surface of the base plate 41 and is used to detect the distance between the glass substrate and the base plate 41. The detector 71 is electrically connected to the controller. The timer is fixedly mounted on the frame 1 and is used for timing. The timer is also electrically connected to the controller. Specifically, when the receiving robot places the glass substrate to be inspected at the sampling station 4, if the detector 71 detects that the distance between the glass substrate and the base plate 41 is greater than the set distance value, the controller only fully opens the control valve 63 to allow the air jet holes 511 on the outer cylinder 51 to spray air, thereby balancing part of the weight of the glass substrate and reducing the impact force between the glass substrate and the ejector pin 5. When the distance between the glass substrate and the base plate 41 is less than or equal to the set distance value, the controller activates the negative pressure machine 61 and fully opens the control valve 63. Simultaneously, the timer starts counting down. When the timer reaches the set time, the air pressure value in the first chamber 411 stabilizes, and the control valve 63 is opened to 80% capacity. This achieves the following: during the placement of the glass substrate, air is first sprayed to balance gravity and then negative pressure is applied for locking. After locking, air is sprayed through the air outlet 511 to balance gravity, reducing the probability of the glass substrate collapsing at the position not in contact with the ejector pin 5, and ultimately reducing the probability of glass substrate deformation. In this embodiment, the base plate 41 is equipped with multiple sets of detectors 71. The negative pressure machine 61 is only turned on when all sets of detectors 71 detect a distance less than or equal to the set value.

[0039] Reference Figure 3 and Figure 5 The adsorption hole 531 is provided with a pushing component 8 for pushing the glass substrate to separate from the ejector pin 5. The pushing component 8 includes a connecting rod 81, a sliding sleeve 82, and a support plate 83. The connecting rod 81 is fixedly installed on the abutment 53 and has a tubular structure. The sliding sleeve 82 is slidably installed on the connecting rod 81. The support plate 83 is fixedly connected to the sliding sleeve 82 by multiple sets of support rods. Multiple sets of adsorption grooves 831 are formed on the top of the support plate 83. When the sliding sleeve 82 is pressed against the connecting rod 81, the upper surface of the support plate 83 is flush with the abutment plane, so that when the glass substrate is adsorbed on the abutment 53, the adsorption grooves 831 are opened. 31 is used to increase the adsorption area, and the support plate 83 is used to support and fix the glass substrate in the middle of the adsorption hole 531, thereby reducing the probability of the glass substrate deforming due to adsorption. At the same time, when it is necessary to remove the glass substrate, the negative pressure machine 61 is turned off first, and then the connecting valve 64 is opened, so that the high pressure gas in the second chamber 412 enters the first chamber 411. The high pressure gas in the first chamber 411 blows the support plate 83 to slide away from the bottom plate 41, and the tubular connecting rod 81 also facilitates the sliding sleeve 82 to slide. In this embodiment, the connecting rod 81 is provided with a limiting block for limiting the maximum upward sliding distance of the sliding sleeve 82.

[0040] Reference Figure 1The frame 1 is equipped with an illumination system 43 for illuminating the substrate to be tested. The illumination system 43 uses a shadowless light source. The frame 1 is also equipped with an air purification system 44 for blowing and cleaning the upper surface of the glass substrate. After the glass substrate is fixed on the sampling station 4, the upper surface of the glass substrate is first cleaned by blowing, thereby reducing the impurity content on the glass substrate and improving the accuracy of the test.

[0041] Reference Figure 6 and Figure 7 The transmission station 2 includes air-bearing strips 21, magnetic drive wheel sets 22, and drive components 23. Multiple sets of air-bearing strips 21 are installed at intervals on the frame 1. Multiple sets of air-bearing holes 211 are spaced apart on each air-bearing strip 21. These holes are used to eject gas and form an air cushion between the air-bearing strip 21 and the glass substrate. Inclined surfaces 213 are provided on both sides of the top of each air-bearing strip 21. Multiple sets of air-bearing holes 211 are spaced apart on the top of the air-bearing strip 21. Multiple sets of holes perpendicular to the surface of the inclined surfaces 213 are spaced apart on the inclined surfaces 213. The inclined surface 213 has an auxiliary hole 214. The air flotation strip 21 has an auxiliary cavity 215 for supplying air to the auxiliary hole 214. The air flotation strip 21 has an air flotation cavity 212 for supplying air to multiple sets of air flotation holes 211. The air flotation cavity 212 and the auxiliary cavity 215 are not connected to each other. The diameter of the auxiliary hole 214 is smaller than the diameter of the air flotation hole 211. The air pressure value in the air flotation cavity 212 is smaller than the air pressure value in the auxiliary cavity 215. As a result, the airflow ejected from the auxiliary hole 214 forms a boundary air wall, which suppresses the dissipation of the air cushion.

[0042] Reference Figure 6 and Figure 7 The frame 1 is equipped with a dual-platform module 3 for adjusting the distance between two sets of magnetic drive wheel sets 22. The dual-platform module 3 includes a base 31, a sliding seat 32, a double-threaded rod 33, and a drive motor 34. The base 31 is fixedly installed on the frame 1 and is located below multiple sets of air floats 21. Two sets of sliding seats 32 are provided, and the two sets of sliding seats 32 are slidably installed on both ends of the base 31 in a direction that moves closer or further away from each other. The magnetic drive wheel sets 22 are located on the sliding seats 32 away from the base. On one end of the base 31, a double-ended threaded rod 33 is rotatably mounted on the base 31, and both ends of the double-ended threaded rod 33 are threadedly connected to two sets of sliding seats 32 respectively. When the double-ended threaded rod 33 rotates in the forward direction, it drives the two sets of sliding seats 32 to move away from each other. When the double-ended threaded rod 33 rotates in the reverse direction, it drives the two sets of sliding seats 32 to move closer to each other. A drive motor 34 is fixedly mounted on the base 31. The drive motor 34 is used to drive the double-ended threaded rod 33 to rotate, thereby adjusting the distance between the two sets of sliding seats 32.

[0043] Reference Figure 6 and Figure 7Two sets of magnetic drive wheel sets 22 are provided, which are symmetrically arranged on both sides of the frame 1 and roll against the opposite side walls of the glass substrate. Each set of magnetic drive wheel sets 22 consists of multiple sets of spaced drive wheels, a drive shaft 221, and magnetic rings 222. Permanent magnets are embedded in the drive wheels in an alternating circumferential pattern, and the side walls of the drive wheels roll against the side walls of the glass substrate. The drive shaft 221 is rotatably mounted on the frame 1. Multiple sets of magnetic rings 222 are provided, which are spaced on the drive shaft 221. The magnetic rings 222 cooperate with the drive wheels so that when the magnetic rings 222 rotate, they drive the drive wheels to rotate through the alternating circumferential permanent magnets.

[0044] Reference Figure 6 and Figure 7 The drive assembly 23 is mounted on the frame 1. The drive assembly 23 is used to drive two sets of magnetic transmission wheel sets 22 to rotate synchronously, thereby driving the glass substrate to move. The drive assembly 23 is a drive device that drives two sets of drive shafts 221 to rotate synchronously. For example, two identical motors can drive two sets of drive shafts 221 to rotate synchronously, or a single motor can drive two sets of drive shafts 221 to rotate synchronously through a transmission device. In this embodiment, the drive assembly 23 includes a rotary motor 231, a main shaft 232, a secondary shaft 233, and a bevel gear transmission component 234. The rotary motor 231 is fixedly mounted on the frame 1, and the main shaft 232 is rotatably mounted on the frame 1 and connected to the rotary motor through a transmission gear. The connection is 231. Two sets of secondary shafts 233 are provided. The two sets of secondary shafts 233 are slidably mounted on the main shaft 232 along the axis of the main shaft 232. The two sets of secondary shafts 233 rotate synchronously with the main shaft 232. Two sets of bevel gear transmission components 234 are provided and are respectively mounted on the ends of the two sets of secondary shafts 233 away from the main shaft 232. The bevel gear transmission component 234 is composed of two sets of meshing bevel gears. The two sets of bevel gears are respectively fixedly mounted on the secondary shaft 233 and the drive shaft 221. When the rotary motor 231 drives the main shaft 232 to rotate through the transmission gear, it then drives the two sets of secondary shafts 233 to rotate, and finally drives the two sets of drive shafts 221 to rotate synchronously through the bevel gear transmission component 234.

[0045] Reference Figure 1 and Figure 3The frame 1 is equipped with a blocking component 9 for preventing airflow from the transmission station 2 from entering the sampling station 4. The blocking component 9 includes a mounting base 91, a guide plate 92, and a buffer 93. The mounting base 91 is fixedly mounted on the frame 1 and is located between the transmission station 2 and the sampling station 4. The guide plate 92 is slidably mounted on the mounting base 91 along the direction of the transmission station 2. The guide plate 92 has a guide surface on the side near the transmission station 2, which is used to guide the airflow blown out of the direction of the transmission station 2 to the side, thereby reducing the probability of the airflow blown out of the transmission station 2 entering the sampling station 4. At the same time, the width of the guide plate 92 is greater than the width of the transmission station 2, and the guide plate 92 is hollow inside, so that the guide plate 92 guides the airflow away from the sampling station 4. In this embodiment, the side of the guide plate 92 near the mounting base 91 is flush with the surface of the mounting base 91, and the thicknesses of the two ends of the guide plate 92 are different, and finally the side away from the mounting base 91 forms a guide surface.

[0046] Reference Figure 3 The buffer 93 is disposed between the mounting base 91 and the guide plate 92. The buffer 93 is used to buffer the sliding of the guide plate 92, thereby achieving the shock absorption effect. The buffer 93 consists of multiple sets of compression springs and dampers. The compression springs are sleeved on the dampers, and the two ends of the compression springs are respectively pressed against the mounting base 91 and the guide plate 92.

[0047] The working principle of this application embodiment is as follows: The glass substrate is transported by air flotation at the transfer station 2. At the same time, the receiving robot places the sampled glass substrate on the inspection station 4. As the glass substrate approaches the base plate 41, air is first sprayed through the air jet hole 511 to balance part of the gravity. Then, negative pressure is used to lock the glass substrate on the ejector pin 5, thereby fixing the glass substrate on the inspection station 4. Meanwhile, the protective cover 42 prevents the airflow from the transfer station 2 from entering the inspection station 4, thus making the glass substrate stable on the inspection station 4, improving the stability of the glass substrate on the inspection station 4 and improving the inspection accuracy of the glass substrate.

[0048] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A liquid crystal glass substrate lifting air flotation conveyor, characterized in that: The system includes a double-layer workstation structure mounted on a rack (1). The double-layer workstation structure includes a transfer workstation (2) and a sampling inspection workstation (4). The transfer workstation (2) is located directly below the sampling inspection workstation (4) and is used for air-floating transfer of the glass substrate. The sampling inspection workstation (4) is used for inspecting the glass substrate. The sampling inspection workstation (4) includes: The base plate (41) is set on the frame (1) and located directly above the transmission station (2). The base plate (41) has two independent first cavities (411) and second cavities (412) inside. A set of ejector pins (5) are arranged on a base plate (41) and used to support the glass substrate. An adsorption hole (531) is opened on the top surface of the ejector pin (5) to facilitate adsorption of the glass substrate onto the ejector pin (5). A set of air jet holes (511) are arranged in a circular array on the side wall of the ejector pin (5) near the top surface. The air jet holes (511) are inclined to the lower surface of the glass substrate. The adsorption hole (531) is connected to the inside of the first cavity (411). The air jet hole (511) is connected to the inside of the second cavity (412). Dynamic control component (6) is set on the frame (1) and used to control the air pressure values ​​in the first chamber (411) and the second chamber (412), thereby controlling the adsorption force of the adsorption hole (531) and the air jet volume of the air jet hole (511). After the glass substrate is placed, the dynamic control component (6) realizes first air jet to balance gravity and then negative pressure locking. A protective cover (42) is provided on the frame (1) and is used to prevent airflow from the transfer station (2) from entering the sampling station (4).

2. The liquid crystal glass substrate lifting air flotation conveyor according to claim 1, characterized in that: The first cavity (411) is located below the second cavity (412), and the first cavity (411) and the second cavity (412) are sealed and isolated by a partition (413). The ejector pin (5) includes: The outer cylinder (51) is set on the bottom plate (41) and has a circular structure. The outer cylinder (51) is hollow inside and communicates with the inside of the second cavity (412). Multiple sets of jet holes (511) are arranged in a circumferential array on the outer wall of the outer cylinder (51) away from the bottom plate (41). The jet direction of the jet hole (511) is inclined at an angle between 30° and 60° to the axis of the outer cylinder (51). The inner rod (52) passes through the second cavity (412) and is set on the partition plate (413). The inner rod (52) is hollow inside and communicates with the inside of the first cavity (411). The top of the inner rod (52) is provided with an abutment (53). The abutment (53) has a rounded top structure and the bottom of the abutment (53) is tightly fitted with the top of the outer cylinder (51). The adsorption hole (531) is opened in the middle of the abutment (53) and communicates with the first cavity (411) through the inner rod (52).

3. The liquid crystal glass substrate lifting air flotation conveyor according to claim 2, characterized in that: The dynamic control component (6) includes: A negative pressure machine (61) is mounted on a frame (1) and communicates with the inside of the first chamber (411). The negative pressure machine (61) is used to provide negative pressure to the first chamber (411). High-pressure gas supply component (62) is installed on the frame (1) and connected to the inside of the second chamber (412) through a high-pressure pipe. The high-pressure gas supply component (62) is used to supply high-pressure gas into the second chamber (412). A control valve (63) is provided on the high-pressure pipe and is used to control the opening degree of the high-pressure pipe; A connecting valve (64) is mounted on the frame (1) and is used to control the connection between the first chamber (411) and the second chamber (412); The controller is mounted on the frame (1) and electrically connected to the negative pressure machine (61), the control valve (63) and the connecting valve (64) respectively. The controller is used to control the opening degree of the negative pressure machine (61), the control valve (63) and the connecting valve (64).

4. The liquid crystal glass substrate lifting air flotation conveyor according to claim 3, characterized in that: The frame (1) is provided with an auxiliary component (7) for assisting the controller, the auxiliary component (7) including: A detector (71) is mounted on a base plate (41) and used to detect the distance between the glass substrate and the base plate (41). The detector (71) is electrically connected to the controller. A timer is set on the frame (1) and used for timing. The timer is electrically connected to the controller. When the distance between the glass substrate and the base plate (41) is greater than the set distance value, the control valve (63) is opened 100%. When the distance between the glass substrate and the base plate (41) is less than or equal to the distance value, the controller turns on the negative pressure machine (61) and opens the control valve (63) 50%, and the timer starts timing. After the timer reaches the set time, the air pressure value of the first chamber (411) is stabilized and the control valve (63) is opened 80%.

5. The liquid crystal glass substrate lifting air flotation conveyor according to claim 3, characterized in that: The top of the abutment (53) is provided with an abutment plane, and the adsorption hole (531) is opened in the middle of the abutment plane. The adsorption hole (531) is provided with a pushing component (8) for pushing the glass substrate to separate from the ejector pin (5). The pushing component (8) includes: A connecting rod (81) is provided on the abutment (53), and the connecting rod (81) is a tubular structure; A sliding sleeve (82) is slidably disposed on a connecting rod (81); The support plate (83) is connected to the sliding sleeve (82) by multiple sets of support rods. The top of the support plate (83) has multiple sets of mutually interleaved adsorption grooves (831). When the sliding sleeve (82) is pressed against the connecting rod (81), the upper surface of the support plate (83) is flush with the abutting plane. When the connecting valve (64) is opened, the high-pressure gas in the second chamber (412) enters the first chamber (411) and blows the support plate (83) to slide away from the bottom plate (41).

6. The liquid crystal glass substrate lifting air flotation conveyor according to claim 3, characterized in that: The frame (1) is provided with an illumination system (43) for illuminating the substrate to be tested. The illumination system (43) adopts a shadowless light source. The frame (1) is provided with an air purification system (44) for blowing and cleaning the upper surface of the glass substrate.

7. The liquid crystal glass substrate lifting air flotation conveyor according to claim 1, characterized in that: The transmission station (2) includes: Air float strips (21), multiple sets of air float strips (21) are spaced apart on the frame (1), and multiple sets of air float holes (211) are spaced apart on the air float strips (21). The air float holes (211) are used to spray gas and form an air cushion between the air float strips (21) and the glass substrate. Two sets of magnetic drive wheel sets (22) are symmetrically arranged on both sides of the frame (1) and roll against the opposite side walls of the glass substrate. The drive assembly (23) is mounted on the frame (1) and is used to drive two sets of magnetic drive wheel sets (22) to rotate synchronously and drive the glass substrate to move.

8. The liquid crystal glass substrate lifting air flotation conveyor according to claim 7, characterized in that: The air flotation strip (21) has inclined surfaces (213) on both sides of its top. Multiple sets of air flotation holes (211) are spaced apart on the top of the air flotation strip (21). Multiple sets of auxiliary holes (214) perpendicular to the inclined surfaces (213) are spaced apart on the inclined surfaces (213). An auxiliary cavity (215) for supplying air to the auxiliary holes (214) is provided inside the air flotation strip (21). An air flotation cavity (212) for supplying air to the multiple sets of air flotation holes (211) is provided inside the air flotation strip (21). The air flotation cavity (212) and the auxiliary cavity (215) are not connected to each other. The diameter of the auxiliary hole (214) is smaller than the diameter of the air flotation hole (211). The air pressure value in the air flotation cavity (212) is smaller than the air pressure value in the auxiliary cavity (215).

9. The liquid crystal glass substrate lifting air flotation conveyor according to claim 7, characterized in that: The frame (1) is provided with a dual-stage module (3) for adjusting the distance between two sets of magnetic drive wheel sets (22), the dual-stage module (3) comprising: The base (31) is mounted on the frame (1) and located below the air flotation bar (21); Sliding seats (32), two sets of sliding seats (32) are slidably disposed on both ends of the base (31) in a direction that approaches or moves away from each other, and the magnetic drive wheel set (22) is disposed on the end of the sliding seat (32) away from the base (31); A double-ended threaded rod (33) is rotatably mounted on a base (31) and threadedly connected to two sets of sliding seats (32) respectively. The double-ended threaded rod (33) rotates and simultaneously drives the two sets of sliding seats (32) to slide on the base (31). A drive motor (34) is mounted on a base (31) and is used to drive the double-ended threaded rod (33) to rotate.

10. A liquid crystal glass substrate lifting air flotation conveyor according to claim 9, characterized in that: The frame (1) is provided with a barrier component (9) for preventing airflow from the transmission station (2) from entering the sampling station (4). The barrier component (9) includes: Mounting base (91), which is mounted on the frame (1) and located between the transfer station (2) and the sampling station (4); A guide plate (92) is slidably disposed on a mounting base (91) in a direction close to or away from the transmission station (2). The guide plate (92) has a guide surface on the side close to the transmission station (2) and is used to guide the airflow in the direction of the transmission station (2) to the side. The width of the guide plate (92) is greater than the width of the transmission station (2). The guide plate (92) is hollow inside. A buffer (93) is disposed between the mounting base (91) and the guide plate (92) and is used to buffer the sliding of the guide plate (92). The buffer (93) consists of multiple sets of compression springs and dampers.

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