Magnetron sputtering coating machine for enhancing sealing of vacuum chamber

Abstract

The invention discloses a magnetron sputtering coating machine capable of enhancing vacuum cabin sealing, and belongs to the technical field of coating machines, the magnetron sputtering coating machine comprises a vacuum box, a sleeve block is fixedly mounted at one end in the vacuum box, a moving rod is slidably mounted in the sleeve block, a sliding groove is formed in one side of the lower end of the moving rod, and a detection assembly is slidably mounted in the sliding groove; the detection assembly is used for detecting the roughness of the surface of the target material and comprises a sliding block slidably installed in the sliding groove, a first extrusion spring is fixedly installed at one end of the sliding block, a moving piece is further slidably installed in the sliding groove, an air bag is arranged at the end, away from the first extrusion spring, of the moving piece, and a vent groove is formed in one side of the moving rod. According to the vacuum coating device, the adjusting assembly is matched with the detection assembly to automatically adjust the amount of inert gas entering the vacuum box according to the roughness of the surface of the target material, so that the thickness of a film can be in a standard range when different target materials are coated.

Description

Technical Field

[0001] This invention relates to the field of coating machine technology, and more specifically, to a magnetron sputtering coating machine with enhanced vacuum chamber sealing. Background Technology

[0002] Magnetron sputtering coating machines are widely used for thin film deposition. They mainly use the principle of magnetron sputtering to deposit materials onto the surface of a substrate. During the coating process, a high-voltage electric field is used to ionize the gas (usually argon) to form plasma. The ions bombard the target surface, sputtering the target atoms and causing them to deposit on the substrate surface to form a thin film.

[0003] During the coating process, the required coating thickness varies depending on the surface roughness of the target material. The rougher the target material, the thicker the film needs to be coated on its surface to fill the unevenness and defects of the target material surface and ensure the integrity of the film. Traditional magnetron sputtering coating machines lack accuracy during coating. When coating targets with different surface roughness, it is difficult to control the amount of inert gas input to ensure that the film thickness is within the standard range. Summary of the Invention

[0004] In view of the problems existing in the prior art, the purpose of this invention is to provide a magnetron sputtering coating machine that enhances the sealing of the vacuum chamber.

[0005] To solve the above problems, the present invention adopts the following technical solution.

[0006] A magnetron sputtering coating machine for enhancing vacuum chamber sealing includes a vacuum chamber. A sleeve block is fixedly installed at one end inside the vacuum chamber. A moving rod is slidably installed inside the sleeve block. A groove is opened on one side of the lower end of the moving rod. A detection component is slidably installed inside the groove. The detection component is used to detect the surface roughness of the target material. The detection component includes a slider slidably installed inside the groove. A connecting rod is provided on the lower side of the slider. A friction plate is fixedly installed at the lower end of the connecting rod. A first compression spring is fixedly installed at one end of the slider, and a movable piece is slidably installed inside the groove. The other end of the first compression spring is fixedly connected to the movable piece, and an airbag is provided at the end of the movable piece away from the first compression spring. A ventilation groove is provided on one side of the moving rod. An adjustment component is installed inside the ventilation groove. The adjustment component is used to adjust the ventilation volume in the ventilation groove. The adjustment component includes a fixed plate and a rotating plate. A piston chamber is provided at the position corresponding to the ventilation groove and the rotating plate. An air outlet pipe is connected to the end of the airbag away from the moving plate. The air outlet pipe is connected to the inside of the piston chamber.

[0007] Furthermore, the piston chamber has a fan-shaped structure, and a piston block is fixedly installed on the outer wall of the rotating disk, with the piston block sliding inside the piston chamber.

[0008] Furthermore, a vacuum pump is installed outside the vacuum chamber, and the suction port of the vacuum pump is connected to the inside of the vacuum chamber. A first compression spring is fixedly installed at one end of the moving rod inside the sleeve block, and the other end of the first compression spring is fixedly connected to the inside of the sleeve block. An air suction hole is opened through the lower end of the sleeve block, and a piston groove is opened at the lower end of one side of the sleeve block. A piston rod is slidably installed inside the piston groove, and a pull rope is fixedly installed at the upper end of the piston rod. The pull rope passes through the sleeve block, extends into its interior, and is fixedly connected to the moving rod.

[0009] Furthermore, an air inlet pipe is installed at the upper end of the moving rod for inputting inert gas. A sealing cover is installed on the upper side of the vacuum box, and a sealing gasket is fixedly installed on the upper outer side of the vacuum box. The sealing gasket is tightly fitted to the lower end of the sealing cover. Vents are provided on both the fixed plate and the rotating plate, and the vents are of the same size.

[0010] Furthermore, a moving groove is provided at the lower end of the slider, the connecting rod is slidably installed inside the moving groove, and a second compression spring is fixedly installed at the upper end of the connecting rod, with the upper end of the second compression spring fixedly connected to the inner wall of the moving groove.

[0011] Furthermore, the end of the air outlet pipe away from the airbag is connected to the inside of the piston chamber, and the end of the moving plate away from the first compression spring is fixedly installed with a second compression spring. The end of the second compression spring away from the moving plate is fixedly connected to the inner wall of the slide groove. The moving plate compresses the airbag, and the second compression spring compresses the moving plate.

[0012] Furthermore, a switch is fixedly installed at the end of the friction plate away from the sleeve block. The switch is used to control the operation of the vacuum pump. A base is fixedly installed inside the vacuum chamber. The switch makes contact with the base after the slider moves.

[0013] Furthermore, multiple locking blocks are slidably mounted on the movable rod, with one end of each locking block located inside a sliding groove. A slot is provided on the slider, and the locking block engages with the slot. One side of the locking block has an inclined structure. A guide rod is fixedly mounted on the end of the locking block away from the slot. A driving rod is provided on the outside of the movable rod, and multiple guide rods are slidably connected to the driving rod. A pull rod is fixedly mounted on the driving rod, and a tension spring is fixedly mounted on the end of the driving rod near the movable rod. The other end of the tension spring is fixedly connected to the outer wall of the movable rod.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: (1) The present invention can automatically adjust the amount of inert gas entering the vacuum chamber according to the roughness of the target surface by setting the adjustment component in conjunction with the detection component, so that the thickness of the film can be within the standard range when different targets are coated.

[0015] (2) The present invention can control the vacuum pump to work in time when the pressure inside the vacuum chamber rises by setting the detection component and the switch, so that the pressure in the vacuum chamber is reduced. This ensures that the target material is always in a stable vacuum environment during the coating process, thus ensuring the stability of the coating process, effectively improving the coating quality, and avoiding coating failure caused by pressure rise. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the internal structure of the vacuum chamber of the present invention; Figure 3 This is a schematic diagram of the sealing gasket structure of the present invention; Figure 4 This is a schematic diagram of the moving rod and sleeve block structure of the present invention; Figure 5 This is a schematic diagram of the piston groove portion of the present invention; Figure 6 This is a schematic diagram of the friction plate structure of the present invention; Figure 7 This is a schematic diagram of the rotating disk and fixed disk structure of the present invention; Figure 8 This is a schematic diagram of the card block and the driving rod of the present invention.

[0017] Explanation of the labels in the diagram: 1. Vacuum chamber; 101. Vacuum pump; 102. Sealing cover; 103. Sealing gasket; 104. Base; 2. Sleeve block; 201. Moving rod; 202. Slide groove; 203. First compression spring; 204. Moving plate; 205. Airbag; 206. Vent groove; 207. Piston chamber; 208. Air outlet pipe; 209. First compression spring; 210. Air intake hole; 211. Piston groove; 212. Piston rod; 213. Pull rope; 214. Air inlet pipe; 215. Second compression spring; 216. Locking block; 217. Guide rod; 218. Driving rod; 219. Pull rod; 220. Tension spring; 3. Detection components; 301. Slider; 302. Connecting rod; 303. Friction plate; 304. Moving groove; 305. Second compression spring; 306. Switch; 307. Slot; 4. Adjustment components; 401. Fixed plate; 402. Rotating plate; 403. Vent; 404. Piston block. Detailed Implementation

[0018] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0019] Please see Figures 1 to 8 A magnetron sputtering coating machine for enhancing vacuum chamber sealing includes a vacuum chamber 1. A sleeve block 2 is fixedly installed at one end inside the vacuum chamber 1. A moving rod 201 is slidably installed inside the sleeve block 2. A groove 202 is opened on one side of the lower end of the moving rod 201. A detection component 3 is slidably installed inside the groove 202. The detection component 3 is used to detect the roughness of the target material surface. The detection component 3 includes a slider 301 slidably installed inside the groove 202. A connecting rod 302 is provided on the lower side of the slider 301. A friction plate 303 is fixedly installed at the lower end of the connecting rod 302. A first compression spring 203 is fixedly installed at one end of the slider 301, and a movable piece 204 is also slidably installed inside the slide groove 202. The other end of the first compression spring 203 is fixedly connected to the movable piece 204. An air bag 205 is provided at the end of the movable piece 204 away from the first compression spring 203, and a second compression spring 215 is fixedly installed at the end of the movable piece 204 away from the first compression spring 203. A ventilation slot 206 is provided on one side of the moving rod 201. An adjustment component 4 is installed inside the ventilation slot 206. The adjustment component 4 is used to adjust the ventilation volume in the ventilation slot 206. The adjustment component 4 includes a fixed plate 401 and a rotating plate 402. A piston chamber 207 is provided at the position corresponding to the rotating plate 402 in the ventilation slot 206. An air outlet pipe 208 is connected to the end of the airbag 205 away from the moving piece 204. The air outlet pipe 208 is connected to the inside of the piston chamber 207. The piston chamber 207 has a fan-shaped structure. A piston block 404 is fixedly installed on the outer wall of the rotating plate 402. The piston block 404 slides inside the piston chamber 207. A vacuum pump 101 is installed outside the vacuum chamber 1. The suction port of the vacuum pump 101 is connected to the inside of the vacuum chamber 1. A first compression spring 209 is fixedly installed at one end of the moving rod 201 inside the sleeve 2. The other end of the first compression spring 209 is fixedly connected to the inside of the sleeve 2. An air suction hole 210 is opened through the lower end of the sleeve 2. A piston groove 211 is opened at the lower end of one side of the sleeve 2. The inside of the piston groove 211 is connected to the outside of the vacuum chamber 1. A piston rod 212 is slidably installed inside the piston groove 211. A pull rope 213 is fixedly installed at the upper end of the piston rod 212. The pull rope 213 is sealed to the sleeve 2 by a sealant, which can be a rubber gasket or a sliding sealing ring. The pull rope 213 extends through the sleeve 2 into its interior and is fixed to the moving rod 201. The upper end of the moving rod 201 is equipped with an air inlet pipe 214, which is used to input inert gas. The air inlet pipe 214 can be connected to an external gas supply device. The gas supply device delivers inert gas into the air inlet pipe 214 and then delivers inert gas into the ventilation slot 206 through the air inlet pipe 214. A sealing cover 102 is installed on the upper side of the vacuum box 1. A sealing gasket 103 is fixedly installed on the upper outer side of the vacuum box 1. The sealing gasket 103 is tightly fitted to the lower end of the sealing cover 102. When the pressure in the vacuum box 1 decreases, the sealing gasket 103 will deform under the action of the pressure difference, thereby squeezing the lower end of the sealing cover 102. Both the fixed plate 401 and the rotating plate 402 are provided with ventilation ports 403, and the ventilation ports 403 are the same size. The lower end of the slider 301 has a moving groove 304. The connecting rod 302 is slidably installed inside the moving groove 304. The upper end of the connecting rod 302 is fixedly installed with a second compression spring 305. The upper end of the second compression spring 305 is fixedly connected to the inner wall of the moving groove 304.

[0020] By adopting the above technical solution, during use, the target material is placed in the vacuum chamber 1, and the position of the base 104 is adjusted so that the upper end of the target material squeezes the lower end of the friction plate 303. Then, the vacuum pump 101 is used to evacuate the inside of the vacuum chamber 1, so that the vacuum chamber 1 is kept in a vacuum state. During the evacuation process, the air in the sleeve 2 will be sucked out of the vacuum chamber 1 through the suction hole 210. At this time, under the action of the suction hole 210, the pressure inside and outside the sleeve 2 is the same. When the pressure inside the vacuum chamber 1 decreases, the piston rod 212 will descend under the action of the pressure difference, and the piston rod 212 can pull the pull rope 213. The pull rope 213 pulls the moving rod 201, so that the moving rod 201 moves into the sleeve 2. When the moving rod 201 moves, it can drive the slider 3 through the second compression spring 215 and the first compression spring 203. When the slider 301 moves, the friction plate 303 can make friction contact with the target surface under the action of the second compression spring 305. At this time, under the action of friction, the friction plate 303 can drive the slider 301 to move relative to the slide groove 202 through the connecting rod 302, so that the moving plate 204 is squeezed under the action of the first compression spring 203, causing the air bag 205 to contract. After the air bag 205 contracts, the air inside it can enter the piston chamber 207 through the air outlet pipe 208, thereby pushing the piston block 404 to move. After the piston block 404 moves, it can drive the rotating disk 402 to rotate. At this time, the air vent 403 on the rotating disk 402 can gradually align with the air vent 403 on the fixed disk 401. At this time, the external inert gas can be transported into the vacuum box 1 through the air inlet pipe 214. After the friction plate 303 moves a certain distance, it will detach from the target material. At this time, under the action of the second compression spring 305 and the pressure difference, the connecting rod 302 will drive the friction plate 303 to descend, so that the friction plate 303 is located on the side of the target material.

[0021] The end of the air outlet pipe 208 away from the airbag 205 is connected to the inside of the piston chamber 207. The end of the second compression spring 215 away from the moving plate 204 is fixedly connected to the inner wall of the slide groove 202. The moving plate 204 compresses the airbag 205, and the second compression spring 215 compresses the moving plate 204. A switch 306 is fixedly installed at the end of the friction plate 303 away from the sleeve block 2. The switch 306 is used to control the operation of the vacuum pump 101. A base 104 is fixedly installed inside the vacuum box 1. The switch 306 is pressed into contact with the base 104 after the slider 301 moves.

[0022] By adopting the above technical solution, as the inert gas is gradually introduced into the vacuum chamber 1, the pressure inside the vacuum chamber 1 will gradually increase. At this time, under the action of the first compression spring 209, the moving rod 201 will move to the initial position. When the moving rod 201 moves, the slider 301 on its lower side will also move synchronously. When the slider 301 moves, it can drive the friction plate 303 to move through the connecting rod 302 on its lower side. When the friction plate 303 moves to a certain position, the switch 306 can contact the side of the target material. At this time, the switch 306 controls the vacuum pump 101 to work again. The vacuum pump 101 working again can reduce the air pressure inside the vacuum chamber 1.

[0023] Multiple locking blocks 216 are slidably mounted on the moving rod 201. One end of the locking block 216 is located inside the slide groove 202. The slider 301 has a locking groove 307. The locking block 216 engages with the locking groove 307. One side of the locking block 216 is inclined. A guide rod 217 is fixedly mounted on the end of the locking block 216 away from the locking groove 307. A driving rod 218 is provided on the outside of the moving rod 201. Multiple guide rods 217 are slidably connected to the driving rod 218. A pull rod 219 is fixedly mounted on the driving rod 218. A tension spring 220 is fixedly mounted on the end of the driving rod 218 near the moving rod 201. The other end of the tension spring 220 is fixedly connected to the outer wall of the moving rod 201. Pulling the pull rod 219 can drive the driving rod 218 to move, thereby simultaneously driving multiple locking blocks 216 to move and disengage them from the locking groove 307.

[0024] By adopting the above technical solution, when the friction plate 303 and the target material rub against each other, the connecting rod 302 moves, and the connecting rod 302 moves the slider 301. At this time, the outer wall of the slider 301 can squeeze the inclined part on the locking block 216, thereby causing the locking block 216 to move. After the locking block 216 moves, as the slider 301 continues to move, the position of the slot 307 will gradually align with the position of the locking block 216. At this time, under the action of the tension spring 220, the driving rod 218 can be driven to move. When the driving rod 218 moves, it can squeeze the locking block 216, thereby causing the locking block 216 to move. After the locking block 216 moves, it can be inserted into the slot 307, so that the slider 301 is fixed.

[0025] Usage: After placing the target material on the base 104, cover and fix it with the sealing cover 102. Then, use the vacuum pump 101 to extract the air from the vacuum chamber 1, so that a vacuum environment is formed inside the vacuum chamber 1. During this process, the movement of the moving rod 201 can move the friction plate 303, thereby moving the slider 301 under the action of friction. After the slider 301 moves, it can be fixed inside the slide groove 202 by cooperating with the locking block 216. During the movement of the slider 301, the first compression spring 203 and the moving plate 204 can compress the air bag 205, so that the air in the air bag 205 enters the piston chamber 207, thereby cooperating with the piston block 404 to drive the rotating disk 402 to rotate, thereby adjusting the air volume in the ventilation groove 206. The amount of inert gas introduced can be automatically adjusted according to the different surface roughness of the target material, thereby controlling the thickness of the film on the target material.

[0026] The above are merely preferred embodiments of the present invention; however, the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and its improved concept, should be covered within the scope of protection of the present invention.

Claims

1. A magnetron sputtering coating machine for enhancing vacuum chamber sealing, comprising a vacuum chamber, characterized in that: A sleeve block is fixedly installed at one end inside the vacuum chamber. A moving rod is slidably installed inside the sleeve block. A groove is opened on one side of the lower end of the moving rod. A detection component is slidably installed inside the groove. The detection component is used to detect the surface roughness of the target material. The detection component includes a slider slidably installed inside the groove. A connecting rod is provided on the lower side of the slider. A friction plate is fixedly installed at the lower end of the connecting rod. A first compression spring is fixedly installed at one end of the slider, and a movable piece is slidably installed inside the groove. The other end of the first compression spring is fixedly connected to the movable piece, and an airbag is provided at the end of the movable piece away from the first compression spring. A ventilation groove is provided on one side of the moving rod. An adjustment component is installed inside the ventilation groove. The adjustment component is used to adjust the ventilation volume in the ventilation groove. The adjustment component includes a fixed plate and a rotating plate. A piston chamber is provided at the position corresponding to the ventilation groove and the rotating plate. An air outlet pipe is connected to the end of the airbag away from the moving plate. The air outlet pipe is connected to the inside of the piston chamber.

2. The magnetron sputtering coating machine for enhancing vacuum chamber sealing according to claim 1, characterized in that: The piston chamber has a fan-shaped structure, and a piston block is fixedly installed on the outer wall of the rotating disk. The piston block slides inside the piston chamber.

3. A magnetron sputtering coating machine for enhancing vacuum chamber sealing according to claim 2, characterized in that: A vacuum pump is installed outside the vacuum chamber, and the suction port of the vacuum pump is connected to the inside of the vacuum chamber. A first compression spring is fixedly installed at one end of the moving rod inside the sleeve block, and the other end of the first compression spring is fixedly connected to the inside of the sleeve block. An air suction hole is opened through the lower end of the sleeve block, and a piston groove is opened at the lower end of one side of the sleeve block. A piston rod is slidably installed inside the piston groove, and a pull rope is fixedly installed at the upper end of the piston rod. The pull rope passes through the sleeve block, extends into its interior, and is fixedly connected to the moving rod.

4. A magnetron sputtering coating machine for enhancing vacuum chamber sealing according to claim 3, characterized in that: An air inlet pipe is installed at the upper end of the moving rod for inputting inert gas. A sealing cover is installed on the upper side of the vacuum box. A sealing gasket is fixedly installed on the upper outer side of the vacuum box, and the sealing gasket is tightly fitted to the lower end of the sealing cover. Vents are provided on both the fixed plate and the rotating plate, and the vents are of the same size.

5. A magnetron sputtering coating machine for enhancing vacuum chamber sealing according to claim 4, characterized in that: The lower end of the slider has a moving groove, the connecting rod is slidably installed inside the moving groove, and a second compression spring is fixedly installed on the upper end of the connecting rod. The upper end of the second compression spring is fixedly connected to the inner wall of the moving groove.

6. A magnetron sputtering coating machine for enhancing vacuum chamber sealing according to claim 5, characterized in that: The end of the air outlet pipe away from the airbag is connected to the inside of the piston chamber. The end of the moving plate away from the first compression spring is fixedly installed with a second compression spring. The end of the second compression spring away from the moving plate is fixedly connected to the inner wall of the slide groove. The moving plate compresses the airbag, and the second compression spring compresses the moving plate.

7. A magnetron sputtering coating machine for enhancing vacuum chamber sealing according to claim 6, characterized in that: A switch is fixedly installed at the end of the friction plate away from the sleeve block. The switch is used to control the operation of the vacuum pump. A base is fixedly installed inside the vacuum box. The switch makes contact with the base after the slider moves.

8. A magnetron sputtering coating machine for enhancing vacuum chamber sealing according to claim 7, characterized in that: Multiple locking blocks are slidably mounted on the movable rod. One end of each locking block is located inside a sliding groove. A slot is provided on the slider. The locking blocks engage with the slots, and one side of the locking blocks is inclined. A guide rod is fixedly mounted on the end of the locking block away from the slot. A driving rod is provided on the outside of the movable rod. Multiple guide rods are slidably connected to the driving rod. A pull rod is fixedly mounted on the driving rod. A tension spring is fixedly mounted on the end of the driving rod near the movable rod. The other end of the tension spring is fixedly connected to the outer wall of the movable rod.

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