Intermittent rhyolite vacuum coating device and method thereof

Abstract

The application provides an intermittent parylene vacuum coating device and a method thereof. The intermittent parylene vacuum coating device focuses on improving a deposition system. In the inside of a deposition cavity, a hexagonal flow divider is arranged opposite an air inlet. In actual application, parylene active monomers from a cracking heating system enter the inside of the deposition cavity from the air inlet and impact on the hexagonal flow divider to realize uniform diffusion in all directions, which helps to improve the film thickness uniformity of the parylene vacuum coating.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of parylene vacuum coating, in particular to an intermittent parylene vacuum coating device and method thereof. BACKGROUND

[0002] Parylene is a new type of conformal coating material developed and applied by Union Carbide Co. in the United States in the mid-1960s. It is a polymer of p-xylene. According to the difference in molecular structure, it can be divided into N type, C type, D type and F type. At present, the parylene vacuum coating in industry often includes three steps: heating and sublimating solid parylene dimer into gas in a vacuum environment; cracking the gas into active monomers; and spontaneously polymerizing the active monomers on the surface of the substrate to form a high molecular thin film (without additional catalyst or plasma excitation).

[0003] Parylene nanometer film is a transparent and dense polymer with the advantages of blocking water and oxygen, acid and alkali resistance, insulation, self-lubrication, biocompatibility, etc. Due to its excellent physical and electrical properties, it is widely used in products that require high reliability and high protection, such as waterproof military circuit boards and medical implant pacemakers.

[0004] However, the existing intermittent parylene vacuum coating device still has the problem of uneven film layer, which needs to be further improved. SUMMARY

[0005] In view of the problems existing in the prior art, the present application provides an intermittent parylene vacuum coating device and method thereof. The intermittent parylene vacuum coating device focuses on improving the deposition system. In the deposition cavity, a hexagonal flow divider is arranged opposite the gas inlet. In actual application, the parylene active monomers from the cracking and heating system enter the inside of the deposition cavity from the gas inlet and impact on the hexagonal flow divider to realize uniform diffusion in all directions, which helps to improve the film thickness uniformity of parylene vacuum coating.

[0006] To achieve this purpose, the present application adopts the following technical solutions:

[0007] One of the purposes of the present application is to provide an intermittent parylene vacuum coating device, which comprises a gasification heating system, a cracking heating system and a deposition system connected in series; the intermittent parylene vacuum coating device further comprises a vacuum system, a tail gas treatment system and a control system; the vacuum system is connected with the deposition system and used for providing a vacuum environment; the tail gas treatment system is used for collecting and treating the tail gas discharged by the vacuum system; the control system is used for monitoring and controlling the gasification heating system, the cracking heating system, the deposition system, the vacuum system and the tail gas treatment system respectively; wherein the deposition system comprises a deposition cavity, at least one gas inlet is formed in the side of the deposition cavity; and a hexagonal flow divider is arranged at a position opposite to the gas inlet in the deposition cavity.

[0008] As a preferred technical scheme of the present application, two gas inlets are formed in the side of the deposition cavity, and the two gas inlets are located at the same projection position and correspond to the upper part and the lower part of the deposition cavity respectively.

[0009] As a preferred technical scheme of the present application, a conical groove is arranged in the side of the deposition cavity, and the conical groove is located at the intermediate position of the two gas inlets and used for reducing the turbulent flow of the gas.

[0010] As a preferred technical scheme of the present application, the hexagonal flow divider is axisymmetric along the vertical direction, the length of the short side of the hexagonal flow divider is 1.5-2.5 times the diameter of the gas inlet, and the length of the long side of the hexagonal flow divider is 3-5 times the diameter of the gas inlet.

[0011] As a preferred technical scheme of the present application, the distance between the hexagonal flow divider and the side wall of the deposition cavity is 30-50 mm.

[0012] As a preferred technical scheme of the present application, an air inlet flow distribution box is arranged outside the deposition cavity and corresponding to the position of the gas inlet; the air inlet flow distribution box and the side wall of the deposition cavity form an air inlet buffer cavity, the air inlet flow distribution box is provided with a flow distribution box air inlet and connected with the air inlet pipeline from the cracking heating system.

[0013] As a preferred technical scheme of the present application, the gasification heating system comprises an automatic in-out device; under the control of the control system, the automatic in-out device is used for controlling whether the gasification furnace performs gasification heating.

[0014] As a preferred technical scheme of the present application, at least one gas outlet is formed in the side of the deposition cavity, and the vacuum system and the deposition system are connected through the gas outlet; the gas outlet is arranged opposite to the gas inlet.

[0015] As a preferred technical scheme of the present application, three gas outlets are arranged on the side of the deposition cavity, and the pipelines of the three gas outlets after converging are connected with the vacuum system; the three gas outlets are in the same projection position and correspond to the upper part, the middle part and the lower part of the deposition cavity respectively.

[0016] The second object of the present application is to provide an intermittent parylene vacuum coating method, which uses the intermittent parylene vacuum coating device of the first object, and the intermittent parylene vacuum coating method comprises the following steps:

[0017] The sample to be coated is placed in the deposition cavity of the deposition system, and the parylene solid raw material is placed in the gasification heating system; under the vacuum environment provided by the vacuum system, the parylene solid raw material is gasified and heated by the gasification heating system to generate raw material gas, the raw material gas enters the cracking heating system and is cracked into active monomers, the active monomers enter the deposition system and spontaneously polymerize on the surface of the sample to be coated, and the parylene vacuum coating is completed; wherein the tail gas treatment system is used to collect and treat the tail gas discharged by the vacuum system; the control system is used to monitor and control the gasification heating system, the cracking heating system, the deposition system, the vacuum system and the tail gas treatment system respectively; wherein the active monomers enter the deposition cavity from at least one gas inlet and impact on the hexagonal flow divider to realize uniform diffusion in all directions.

[0018] Compared with the prior art, the present application has at least the following beneficial effects:

[0019] The intermittent parylene vacuum coating device of the present application focuses on improving the deposition system, and a hexagonal flow divider is arranged opposite to the gas inlet in the deposition cavity. In actual application, the parylene active monomers from the cracking heating system enter the deposition cavity from the gas inlet and impact on the hexagonal flow divider to realize uniform diffusion in all directions, which helps to improve the film thickness uniformity of the parylene vacuum coating. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 is a schematic diagram of an intermittent parylene vacuum coating device in one specific embodiment of the present application.

[0021] Figure 2 is a setting structure diagram of the gas inlet flow distribution box from the perspective of the deposition cavity outside in one specific embodiment of the present application.

[0022] Figure 3 is an exploded view of the gas inlet flow distribution box and the hexagonal flow divider from the perspective of the inside of the deposition cavity in one specific embodiment of the present application.

[0023] Figure 4 is Figure 2 and Figure 3Structure diagram of the middle hexagonal flow distribution plate.

[0024] Figure 5 is a schematic diagram of a combined flow distribution plate arranged opposite two gas inlets in one embodiment of the present application.

[0025] Figure 6 is a cross-sectional schematic diagram of a tapered groove in one embodiment of the present application.

[0026] Figure 7 is a structure schematic diagram of an automatic in-out device and a gasification furnace in one embodiment of the present application.

[0027] In the figure: 1-gasification heating system; 2-pyrolysis heating system; 3-deposition system; 4-vacuum system; 5-tail gas treatment system; 6-control system; 100-hexagonal flow distribution plate; 200-gas inlet flow distribution box; 300-automatic in-out device; 400-gasification furnace. DETAILED DESCRIPTION

[0028] The technical solutions of the present application will be further described below in combination with the drawings and through specific embodiments.

[0029] In order to better illustrate the present application and facilitate understanding of the technical solutions of the present application, the typical but non-limiting embodiments of the present application are as follows:

[0030] One embodiment of the present application is to provide an intermittent Parylene vacuum coating device, please refer to Figure 1 , the intermittent Parylene vacuum coating device includes gasification heating system 1, pyrolysis heating system 2, deposition system 3 in turn; the intermittent Parylene vacuum coating device also includes vacuum system 4, tail gas treatment system 5, control system 6; the vacuum system 4 and the deposition system 3 are communicated, for providing vacuum environment; the tail gas treatment system 5 is used for collecting and processing the tail gas discharged by the vacuum system 4; the control system 6 is used for monitoring and controlling the gasification heating system 1, the pyrolysis heating system 2, the deposition system 3, the vacuum system 4, the tail gas treatment system 5 respectively; wherein, the deposition system 3 includes deposition cavity, at least one gas inlet is opened in the side of the deposition cavity; in the inside of the deposition cavity, a hexagonal flow distribution plate is arranged opposite the position of the gas inlet.

[0031] The intermittent Parylene vacuum coating device of the present application focuses on improving the deposition system, and a hexagonal flow distribution plate is arranged opposite the position of the gas inlet in the inside of the deposition cavity. In actual application process, the Parylene active monomer from the pyrolysis heating system enters the inside of the deposition cavity from the gas inlet, and impacts on the hexagonal flow distribution plate to realize uniform diffusion in each direction, which helps to improve the film thickness uniformity of Parylene vacuum coating.

[0032] It should be noted that the intermittent pazerelin vacuum coating device of the present application can also be provided with an activation subsystem as needed, which can enhance the compatibility of the thermal protection material with the vacuum coating material, especially the firmness of the coating layer on the material surface. The activation subsystem includes a coupling agent evaporation device and / or a plasma cleaning device, and the cavity size of the activation subsystem should meet the processing requirements of the largest size workpiece. The coupling agent solves the interface compatibility problem through chemical bonding, which is suitable for inert / slippery substrate. Plasma enhances surface activity through physical / chemical activation, which is suitable for high cleanliness or complex structure requirements. In actual process, single or combined scheme should be selected according to the substrate material and coating performance requirements (such as friction resistance, water resistance).

[0033] As a specific embodiment, two gas inlets are arranged on the side of the deposition cavity, and the two gas inlets are located at the same projection position and correspond to the upper and lower parts of the deposition cavity, respectively.

[0034] As a specific embodiment, a conical groove is arranged on the side of the deposition cavity, and the conical groove is located at the middle position between the two gas inlets for reducing the turbulence of the gas.

[0035] It should be noted that if two gas inlets are arranged on the side of the deposition cavity, instead of arranging two separate hexagonal flow distributors, a combined flow distributor is arranged inside the deposition cavity opposite to the two gas inlets, and the combined flow distributor has the shape of two hexagons combined in an upper and lower manner, that is, the hexagonal flow distributor corresponding to one gas inlet is fixedly connected to the side wall of the deposition cavity at the upper and lower ends, and the combined flow distributor corresponding to the two gas inlets is also fixedly connected to the side wall of the deposition cavity at the upper and lower ends. Further, when the gas flow from the two gas inlets meets and generates turbulence at the middle position between the two gas inlets, the conical groove arranged there can effectively reduce the turbulence of the gas.

[0036] As a specific embodiment, the hexagonal flow distributor is axisymmetric in the vertical direction, the side length at the upper and lower ends is a short side, and the side length of the four sides on the side is equal and a long side. The length of the short side of the hexagonal flow distributor is 1.5-2.5 times the diameter of the gas inlet, for example, 1.5 times, 1.6 times, 1.7 times, 1.8 times, 1.9 times, 2 times, 2.1 times, 2.2 times, 2.3 times, 2.4 times or 2.5 times, etc. The length of the long side of the hexagonal flow distributor is 3-5 times the diameter of the gas inlet, for example, 3 times, 3.1 times, 3.3 times, 3.5 times, 3.7 times, 3.8 times, 4 times, 4.2 times, 4.4 times, 4.6 times, 4.8 times or 5 times, etc.

[0037] As a specific embodiment, the distance between the hexagonal baffle plate and the side wall of the deposition cavity is 30-50 mm, for example, 30 mm, 31 mm, 33 mm, 35 mm, 36 mm, 38 mm, 40 mm, 42 mm, 44 mm, 46 mm, 48 mm or 50 mm, etc.

[0038] As a specific embodiment, an air inlet shunt box is arranged outside the deposition cavity for the position of the air inlet; the air inlet shunt box forms an air inlet buffer cavity with the side wall of the deposition cavity, and the air inlet shunt box is provided with a shunt box air inlet and is connected with the air inlet pipeline from the pyrolysis heating system.

[0039] It should be noted that, by arranging the air inlet shunt box, the active monomers of parylene from the pyrolysis heating system can first enter the corresponding air inlet buffer cavity of the air inlet shunt box for buffering, then enter the inside of the deposition cavity through the air inlet opening on the side of the deposition cavity, and finally impact on the hexagonal baffle plate to realize uniform diffusion in all directions, which helps to improve the film thickness uniformity of parylene vacuum coating.

[0040] As a specific embodiment, the gasification heating system comprises an automatic in-out device; under the control of the control system, the automatic in-out device is used to control whether the gasification furnace is subjected to gasification heating.

[0041] It should be noted that the automatic in-out device mainly comprises a sliding rail that can drive the gasification furnace to move out and move in. Because there should be no residual coating gas molecules when the vacuum chamber is opened after the completion of parylene vacuum coating, in order to ensure no gas molecules, on the one hand, the automatic in-out device is used to realize the mobility of the gasification furnace, and the heating part is moved out to ensure that there is no heat to volatilize the material, on the other hand, the program of the control system is set to delay the vacuum pumping time (for example, 10 minutes) after the completion of vacuum coating, so as to pump out and filter the excess molecules.

[0042] The automatic in-out device of the gasification heating system in the present application adopts a movable design structure, on the one hand, while pumping, the gasification section heating part can be moved out from the quartz glass tube, and the heating function is started to the first heating temperature, so as to preheat the heater, so that when the deposition process starts after the vacuum degree reaches the coating vacuum, there is no need to wait for heating, time is saved, on the other hand, continuous production can be realized, after the completion of coating of the product in the previous furnace, the gasification section heater can be moved out, after the workpiece loading of the next furnace is completed, the gasification section heater still maintains the temperature required for raw material gasification, so that the deposition process can be directly completed, realizing continuous production without interval.

[0043] As a specific embodiment, at least one gas outlet is arranged on the side of the deposition cavity, and the vacuum system is connected to the deposition system through the gas outlet.

[0044] As a specific embodiment, three gas outlets are arranged on the side of the deposition cavity, and the pipelines of the three gas outlets are connected to the vacuum system after being merged.

[0045] Another specific embodiment of the present application provides an intermittent parylene vacuum coating method, which uses the intermittent parylene vacuum coating device described above, and the intermittent parylene vacuum coating method comprises the following steps:

[0046] The sample to be coated is placed in the deposition cavity of the deposition system, and the parylene solid raw material is placed in the gasification heating system; under the vacuum environment provided by the vacuum system, the parylene solid raw material is gasified and heated by the gasification heating system to generate raw material gas, the raw material gas enters the cracking heating system and is cracked into active monomers, the active monomers enter the deposition system and spontaneously polymerize on the surface of the sample to be coated, and the parylene vacuum coating is completed; wherein the tail gas treatment system is used to collect and treat the tail gas discharged by the vacuum system; the control system is used to monitor and control the gasification heating system, the cracking heating system, the deposition system, the vacuum system and the tail gas treatment system respectively; wherein the active monomers enter the deposition cavity from at least one gas inlet and impact on the hexagonal flow divider to realize uniform diffusion in all directions.

[0047] It should be noted that the intermittent parylene vacuum coating device described in the present application is used to form a parylene polymer coating on the surface of the sample to be coated. The thickness of the prepared parylene protective film layer is thin enough to not only realize the controllable thickness of the film layer of 0.1-100 μm, but also not affect the light weight and wave transmission performance of the product, and to generate a protective film layer with uniform thickness and complete conformal coating on the surface of the sample to be coated with complex shape. In addition, the intermittent parylene vacuum coating is carried out by using the intermittent parylene vacuum coating device described in the present application. The coating process ensures clean and environmental protection, does not produce other pollution to the product; can be carried out at room temperature or lower temperature, and does not contain solvent, does not cause secondary damage to the product; the film layer is dense and well combined with the substrate, and the film layer production process has good repeatability.

[0048] The intermittent pazerelin vacuum coating device is used for intermittent pazerelin vacuum coating, film thickness uniformity can be adjusted according to the size, shape and the like of the coating product, and the adjusting method is to adjust the position of the shunt structure, the size of the opening and the like of the hexagonal shunt plate at the gas inlet. Two gas inlets are arranged on the side of the deposition cavity, if the hexagonal shunt plate (combined shunt plate), the automatic in-out device of the gasification furnace and the conical groove are arranged at the same time, the film thickness uniformity meets the requirement of ±3%; if only the automatic in-out device of the gasification furnace is omitted, the film thickness uniformity of individual samples may increase to about 5%; if only the conical groove is omitted, the film thickness uniformity decreases and meets the requirement of ±5%; if only the hexagonal shunt plate (combined shunt plate) is omitted, the film thickness uniformity decreases obviously and can only meet the requirement of ±10%.

[0049] Taking that one gas inlet is arranged on the side of the deposition cavity as an example, Figure 2 a structure diagram of the gas inlet shunt box is shown from the perspective of the outside of the deposition cavity, Figure 3 an explosion view of the gas inlet shunt box and the hexagonal shunt plate is shown from the perspective of the inside of the deposition cavity, and Figure 4 a structure diagram of the combined shunt plate is shown from the perspective of the inside of the deposition cavity. Figure 2 and Figure 3 a structure diagram of the hexagonal shunt plate in the middle can be seen: one positioning hole is arranged at the upper and lower ends of the short side of the hexagonal shunt plate 100, and the gas inlet shunt box 200 is rectangular, and the two short sides of the gas inlet shunt box 200 correspond to the short sides at the upper and lower ends of the hexagonal shunt plate 100.

[0050] As a comparison, two gas inlets are arranged on the side of the deposition cavity, Figure 5 a combined shunt plate is arranged opposite to the two gas inlets, and it can be seen that the combined shunt plate is in the shape of two hexagons combined in an upper and lower manner, and the two hexagons are combined in a manner that the short sides coincide; that is, the hexagonal shunt plate corresponding to one gas inlet is fixedly connected to the side wall of the deposition cavity at the upper and lower ends, and the combined shunt plate corresponding to the two gas inlets is also fixedly connected to the side wall of the deposition cavity at the upper and lower ends. Further, a conical groove is arranged on the side of the deposition cavity, and the conical groove is located at the middle position of the two gas inlets and is used for reducing gas turbulence, Figure 6 a cross-sectional view of the conical groove is shown, the arrow represents the flow direction of the pazerelin active monomer from the cracking heating system, and the conical groove can reduce gas turbulence.

[0051] As a specific embodiment, an automatic in-out device is arranged in the gasification heating system, such as Figure 7As shown, the automatic access device 300 mainly includes a slide rail that can drive the gasification furnace 400 to move out and move in, and under the control of a control system, the automatic access device 300 is used for controlling whether the gasification furnace 400 carries out gasification heating.

[0052] The sample to be plated is placed on a product rack inside the deposition cavity. To meet the product's requirement for plating uniformity, a rotatable product rack is provided to drive the sample to be plated on the product rack to rotate in the deposition cavity. The corresponding tooling and motion subsystem mainly includes a clamping tooling, a vacuum sealing device, an external motor driving mechanism, etc. The motion mechanism adopts a magnetic fluid sealing structure to avoid affecting the function of the motion mechanism by the high polymer.

[0053] The tail gas treatment system meets the local standard "Integrated Emission Standard of Air Pollutants" (DB11 / 501-2017) and is equipped with a multi-stage activated carbon adsorption tail gas treatment system and a 15m high exhaust pipeline. The noise meets the relevant requirements of the 1st standard in "Industrial Enterprise Boundary Environmental Noise Emission Standard" (GB12348-2008). For example, with the help of a centrifugal fan, the collected tail gas is sequentially purified by a high-temperature-resistant coarse filter, an activated carbon filter, a medium-efficiency filter and a high-efficiency filter, and finally discharged into the air above 15 meters.

[0054] The internal temperature of the deposition cavity is controlled at 0-30℃, water circulation can be added for heat preservation, the water circulator has heating and refrigeration functions to maintain stable and constant, and water cooling circulation is added on the surface of the cavity. The water circulation pipeline is arranged in the main body part and the cavity door part of the cavity, which can realize a cold and hot circulation all-in-one machine and maintain constant temperature.

[0055] The intermittent parylene vacuum coating device has the functions of sound and light alarm, automatic and manual emergency stop, equipment operation log and alarm record, water and power failure protection, evaporation furnace and cracking furnace over-temperature alarm, vacuum environment pressure damage alarm, door interlocking switch function, overvoltage, undervoltage, overcurrent protection and short circuit protection function. If a fault alarm occurs during the deposition process, the color bar frame at the corresponding position will change color and alarm, the sound and light device will emit a warning sound and flash, and the emergency stop button and three-color indicator light of the device.

[0056] The above embodiments are used to illustrate the detailed structural features of the present application, but the present application is not limited to the above detailed structural features, i.e. it does not mean that the present application must rely on the above detailed structural features to be implemented. Those skilled in the art should understand that any improvement of the present application, equivalent replacement of the components selected by the present application, addition of auxiliary components, selection of specific modes, etc. all fall within the protection scope and disclosure scope of the present application.

[0057] The preferred embodiments of the present application are described in detail above, but the present application is not limited to the specific details of the above-described embodiments, and various simple modifications can be made to the technical solutions of the present application within the technical concept of the present application, and these simple modifications all belong to the protection scope of the present application.

[0058] In addition, it should be noted that each specific technical feature described in the above specific embodiments can be combined in any appropriate manner without contradiction, and in order to avoid unnecessary repetition, the present application will not further describe various possible combinations.

[0059] In addition, various different embodiments of the present application can also be combined in any manner, as long as it does not deviate from the idea of the present application, and it should also be considered as disclosed by the present application.

Claims

1. An intermittent Pyrelin vacuum coating apparatus, characterized in that, The intermittent pyrene vacuum coating apparatus includes a gasification heating system, a pyrolysis heating system, and a deposition system connected in series. The apparatus also includes a vacuum system, a tail gas treatment system, and a control system. The vacuum system is connected to the deposition system and provides a vacuum environment. The tail gas treatment system collects and treats the tail gas discharged from the vacuum system. The control system monitors and controls the gasification heating system, the pyrolysis heating system, the deposition system, the vacuum system, and the tail gas treatment system. The deposition system includes a deposition chamber with two air inlets on its side. The two air inlets are located at the same projection position and correspond to the upper and lower parts of the deposition chamber, respectively. A conical groove is provided on the side of the deposition chamber, located in the middle of the two air inlets, to reduce air turbulence. Inside the deposition chamber, opposite the two air inlets, a combined flow divider is provided. The combined flow divider is in the shape of two hexagons joined together by overlapping their short sides.

2. The intermittent Pyrelin vacuum coating apparatus according to claim 1, characterized in that, The combined manifold is axially symmetrical along the vertical direction. The length of the short side of the combined manifold is 1.5-2.5 times the diameter of the air inlet, and the length of the long side of the combined manifold is 3-5 times the diameter of the air inlet.

3. The intermittent Pyrelin vacuum coating apparatus according to claim 1, characterized in that, The distance between the combined flow divider and the sidewall of the deposition chamber is 30-50 mm.

4. The intermittent Pyrelin vacuum coating apparatus according to claim 1, characterized in that, Outside the deposition chamber, an air inlet diversion box is provided at the location of the air inlet; the air inlet diversion box and the side wall of the deposition chamber form an air inlet buffer chamber, and the air inlet diversion box has an air inlet and is connected to the air inlet pipeline from the pyrolysis heating system.

5. The intermittent Pyrelin vacuum coating apparatus according to claim 1, characterized in that, The gasification heating system includes an automatic inlet / outlet device; under the control of the control system, the automatic inlet / outlet device is used to control whether the gasifier performs gasification heating.

6. The intermittent Pyrelin vacuum coating apparatus according to claim 1, characterized in that, At least one air outlet is provided on the side of the deposition chamber, and the vacuum system is connected to the deposition system through the air outlet; the air outlet is arranged opposite to the air inlet.

7. The intermittent Pyrelin vacuum coating apparatus according to claim 6, characterized in that, Three air outlets are provided on the side of the deposition chamber, and the pipeline after the three air outlets merge is connected to the vacuum system; the three air outlets are located at the same projection position and correspond to the upper, middle and lower parts of the deposition chamber, respectively.

8. An intermittent phenelzine vacuum coating method, characterized in that, The intermittent pyrene vacuum coating apparatus according to any one of claims 1-7, wherein the intermittent pyrene vacuum coating method comprises: The sample to be coated is placed in the deposition chamber of the deposition system, and the solid raw material of phenelzine is placed in the gasification heating system. Under the vacuum environment provided by the vacuum system, the solid raw material of phenelzine is gasified and heated by the gasification heating system to generate raw material gas. The raw material gas enters the pyrolysis heating system and is pyrolyzed into active monomers. The active monomers enter the deposition system and spontaneously polymerize on the surface of the sample to be coated, thus completing the vacuum coating of phenelzine. The exhaust gas treatment system is used to collect and treat the exhaust gas discharged from the vacuum system; the control system is used to monitor and control the gasification heating system, the pyrolysis heating system, the deposition system, the vacuum system, and the exhaust gas treatment system respectively. The active monomer enters the deposition chamber through at least one air inlet and impacts the combined splitter plate to achieve uniform diffusion in all directions.

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