Drainage controller for radio frequency power supply

Abstract

The invention provides a drainage controller for a radio frequency power supply. The drainage controller can solve the problem that cooling water in the radio frequency power supply leaks when the radio frequency power supply moves. The drainage controller (10) for the radio frequency power supply (100) comprises water pipes (14, 15) which are respectively connected with a cooling water inlet and a cooling water outlet of the radio frequency power supply and are used for leading out residual cooling water in the radio frequency power supply, and a water valve interface (13) which is connected with the water pipes (14, 15) and is used for connecting the water pipes (14, 15) and the water valve interface (13). The power supply module can be electrically connected with a water valve arranged at a cooling water inlet of the radio frequency power supply and is used for supplying power to the water valve; and the water valve switch (11) is used for controlling the water valve to be opened and closed through the water valve connector connected with the water valve, and under the condition that the water valve is opened by the water valve switch, residual cooling water in the radio frequency power supply flows out of the radio frequency power supply through the water pipe.

Description

Technical Field

[0001] This invention relates to a drainage controller for radio frequency power supplies, and more particularly to a drainage controller for radio frequency power supplies in dry etching equipment. Background Technology

[0002] Etching equipment is used in the manufacture of semiconductor devices to remove unwanted substances from the manufacturing process using physical or chemical methods. There are two main types of etching: wet etching and dry etching. Wet etching uses an etching solution to chemically react with the material immersed in the etching solution to generate soluble byproducts, thereby removing the unwanted substances. Dry etching typically uses plasma in a gas or chemical substances to remove substances from the material surface. Common dry etching equipment includes reactive ion etching (RIE), inductively coupled plasma etching (ICP), magnetic neutral line plasma etching (NLD), and ion beam etching (IBE). Plasma etching machines are the most widely used. To obtain the plasma used for etching, a radio frequency (RF) power supply is required to generate the plasma in a plasma etching machine.

[0003] Radio frequency (RF) power supplies are not only used in plasma etching machines, but also in various production and daily life applications such as LED and solar cell manufacturing, RF induction heating, and medical aesthetics. In a plasma etching machine, to generate the plasma used for etching, the RF power supply mainly includes a DC power supply module, an oscillation circuit module, a power amplifier module, an RF power detection module, and an RF interlock control module. Furthermore, water cooling is typically used to cool the RF power supply.

[0004] When the RF power supply is damaged in the equipment using it, it needs to be removed from the equipment. When removing the RF power supply, the cooling water pipe connector needs to be disconnected. After disconnection, cooling water will remain inside the RF power supply, which may cause leakage and affect the equipment and the working environment. Summary of the Invention

[0005] The technical problem to be solved by the present invention

[0006] In the existing technology, when removing the RF power supply from the equipment, in order to prevent the residual cooling water in the RF power supply from leaking out, the operator usually has to be careful and protect the water pipe joints of the RF power supply from being bumped or damaged. This operation is very troublesome and the cooling water is still easy to leak out, affecting the equipment and the working environment.

[0007] Therefore, the technical problem to be solved by the present invention is to prevent the residual cooling water in the RF power supply from leaking out when the RF power supply is removed from the equipment using the RF power supply (e.g., the machine end of a dry etching equipment).

[0008] Technical solutions to solve technical problems

[0009] To address the aforementioned technical problems, the present invention provides a drainage controller for a radio frequency (RF) power supply, comprising: a water pipe connected to a cooling water inlet and a cooling water outlet of the RF power supply for draining residual cooling water from the RF power supply; a water valve interface electrically connected to a water valve located at the cooling water inlet of the RF power supply and used to supply power to the water valve; and a water valve switch controlling the opening and closing of the water valve via the water valve interface connected to the water valve, wherein when the water valve switch opens the water valve, the residual cooling water in the RF power supply flows out through the water pipe to the outside of the RF power supply.

[0010] By adopting the above technical solution, the residual cooling water in the radio frequency power supply can be prevented from leaking out accidentally and flowing into a special container or drainage facility.

[0011] In another aspect of the present invention, a drain controller for a radio frequency power supply also includes a voltage and current detector for measuring the voltage and current of the water valve and a display for displaying the voltage and current of the water valve.

[0012] By detecting and displaying the voltage and current of the water valve, operators can determine whether the water valve is working properly or is blocked.

[0013] In another aspect of the present invention, a drainage controller for a radio frequency power supply, when the water valve switch has opened the water valve, the cooling water remaining in the radio frequency power supply flows out through the water pipe to a water collection container outside the radio frequency power supply. The water collection container is placed below the radio frequency power supply so that the cooling water flows out into the water collection container by gravity.

[0014] The water collection container allows for convenient reception of cooling water from the radio frequency power supply.

[0015] In another aspect of the invention, a drainage controller for a radio frequency power supply, the water pipe is a transparent flexible tube.

[0016] The transparent tube makes it easy to confirm whether the cooling water has been completely discharged from the RF power supply, and the flexible tube makes it easy to store.

[0017] In another aspect of the present invention, a drainage controller for radio frequency power supply also includes a power conversion unit that converts an external AC voltage into a DC voltage to power the drainage controller and the water valve.

[0018] Therefore, it is possible to supply power to the water threshold of the radio frequency power supply in accordance with its specifications.

[0019] In another aspect of the invention, a drainage controller for a radio frequency power supply is used in a dry etching apparatus.

[0020] The radio frequency power supply of the drainage controller of the present invention can be used in dry etching equipment.

[0021] Beneficial effects

[0022] The drainage controller for the RF power supply of this invention solves the problem of cooling water leakage during the movement of the RF power supply after it is removed from the equipment, preventing residual cooling water in the RF power supply from leaking out. Other beneficial effects will be described in the specific embodiments. Attached Figure Description

[0023] Figure 1 This is a schematic diagram showing the state where an RF power supply is installed at the machine end of a dry etching equipment.

[0024] Figure 2 This is a schematic diagram showing an example of the drainage controller of the present invention.

[0025] Figure 3 This is a schematic diagram showing the functional modules of the internal circuit board of the drainage controller.

[0026] Figure 4 This is a flowchart illustrating the working process of the drainage controller 10.

[0027] Figure 5 This is a picture of the actual drain controller 10. Detailed Implementation

[0028] The specific embodiments of the present invention will now be described with reference to the accompanying drawings.

[0029] In the following embodiments, when referring to numbers or other numerical values ​​(including number, value, quantity, range, etc.) of elements, they are not limited to that specific number, except where specifically stated or where they are clearly limited to a specific number in principle. They may be above or below that specific number.

[0030] For ease of explanation, the following description uses terms such as "up", "down", "left", "right", "horizontal", and "vertical" to indicate orientation. However, these terms only define the relative positional relationships between components in a specific orientation, such as that shown in the attached figure. If the specific orientation changes, the terms indicating orientation will naturally change accordingly.

[0031] Furthermore, in the following embodiments, the structural elements are not necessarily required except where specifically stated or where they are obviously understood to be necessary in principle, and may also include elements not explicitly mentioned in the specification, which need not be explicitly stated.

[0032] Implementation Method

[0033] The following example illustrates the drainage controller for the radio frequency power supply of the present invention using the application of radio frequency power supply in a dry etching apparatus.

[0034] Figure 1 This is a schematic diagram showing the state where an RF power supply is installed at the machine end of a dry etching apparatus. For example... Figure 1 As shown, one end of the RF power supply 100 is connected to the dry etching equipment 200, and the other end is grounded.

[0035] The RF power supply 100 can generate RF current, for example, by inputting an AC voltage of 220V, with a frequency of, for example, 13.56MHz.

[0036] The dry etching apparatus 200 has an etching chamber. Gases such as CF4 and NF3, used to generate plasma, are introduced into the etching chamber and ionized by the radio frequency power supply 100 to generate plasma. This plasma interacts with the material to be etched within the etching chamber through a physicochemical reaction, thereby etching the material. The dry etching apparatus 200 described here is a conventional dry etching apparatus, so its internal structure is not shown in the diagram.

[0037] The above description of the dry etching equipment 200 is for the purpose of simply illustrating the operation of the dry etching equipment. In reality, there are many types of dry etching equipment with complex structures.

[0038] Figure 1 The RF power supply 100 shown is directly connected to the dry etching equipment 200, but the RF power supply 100 can also be connected to the dry etching equipment 200 via components such as a matching box to reduce signal reflection and improve signal transmission efficiency.

[0039] Water cooling is commonly used to cool the RF power supply 100. In a water-cooled RF power supply 100, cooling water pipes are installed inside the RF power supply 100 to cool its various components, and the RF power supply 100 has an inlet and an outlet on its outer surface. Low-temperature cooling water enters the RF power supply 100 from the inlet through the cooling water pipes and flows out from the outlet, carrying away heat from the various components of the RF power supply 100.

[0040] If the RF power supply 100 is damaged while installed in the dry etching equipment 200, it needs to be removed. At this time, the cooling water pipe connector needs to be disconnected, leaving residual cooling water inside the RF power supply 100. When removing or moving the RF power supply 100, this residual cooling water can easily leak out, affecting the equipment (dry etching equipment 200) and the cleanroom environment. Currently, existing technology requires careful operation by personnel to prevent cooling water leakage, which is not only cumbersome but also prone to failure.

[0041] To address the aforementioned problems in existing radio frequency (RF) power supplies, this invention provides a drainage controller for an RF power supply, comprising: a water pipe connected to a cooling water inlet and a cooling water outlet of the RF power supply for draining residual cooling water from the RF power supply; a water valve interface electrically connected to a water valve located at the cooling water inlet of the RF power supply; and a water valve switch controlling the opening and closing of the water valve via the water valve interface connected to the water valve, wherein when the water valve switch opens the water valve, residual cooling water in the RF power supply flows out through the water pipe to the outside of the RF power supply.

[0042] By using the drainage controller of the RF power supply as described above, the problem of cooling water leakage during the movement of the RF power supply can be solved when it is removed from the device using the RF power supply, so that the residual cooling water in the RF power supply does not leak out.

[0043] Figure 2 This is a schematic diagram showing the appearance of an example of the drainage controller of the present invention. Figure 2 As shown, the drainage controller 10 includes a water valve switch 11, a display 12, a water valve interface 13, and an inlet water pipe 14 and an outlet water pipe 15, which are respectively connected to the inlet and outlet of the radio frequency power supply 100. The inlet water pipe 14 is connected to the water valve at the inlet of the radio frequency power supply 100. Although the inlet water pipe 14 and outlet water pipe 15 are connected to the drainage controller 10, they are actually accessories to the drainage controller 10 and are not directly connected to it during use.

[0044] The water valve switch 11 is used to switch the water valve of the radio frequency power supply 100. When cooling water is to be discharged from the radio frequency power supply 100, the inlet water pipe 14 and the outlet water pipe 15 are first connected to the radio frequency power supply 100. At this time, the water valve switch 11 opens the water valve, allowing the cooling water in the radio frequency power supply 100 to flow out.

[0045] The display 12 is used to display at least the voltage and current of the water valve of the radio frequency power supply 100. Using the displayed voltage and current values, it is possible to determine whether the water valve is functioning properly or is blocked. The voltage and current of the drain controller 10 are detected by a voltage and current detector described later.

[0046] The water valve interface 13 is used to electrically connect the water valve of the radio frequency power supply 100. When the drain controller 10 is powered on, the water valve interface 13 is connected to the water valve of the radio frequency power supply 100 by a cable, and the water valve switch 11 is turned on to open the water valve.

[0047] One end of the inlet water pipe 14 and the outlet water pipe 15 are connected to a water collection container for collecting unwanted cooling water, and the other end is connected to the inlet and outlet of the RF power supply 100, respectively, for the water collection container to collect the cooling water flowing out of the RF power supply 100. When collecting cooling water from the RF power supply 100, the water collection container is placed at a lower position than the RF power supply 100, and the cooling water can be collected by gravity alone, thus eliminating the need to apply pressure to the cooling water pipes inside the RF power supply 100. Preferably, the inlet water pipe 14 and the outlet water pipe 15 are made of transparent flexible tubing, which makes it easy to confirm whether the cooling water has been completely discharged from the RF power supply 100, and the pipes themselves are easy to store.

[0048] The capacity of the water collection container for collecting unwanted cooling water can be determined based on the maximum amount of cooling water that can be accumulated in the radio frequency power supply 100 corresponding to the drain controller 10. Alternatively, the container can also be a sewer or the like used directly for discharging wastewater.

[0049] The water collection container can be built into the drain controller 10. While this increases the overall size of the drain controller 10, it makes it easier to store and reduces the risk of losing components. Alternatively, the water collection container can be separate from the drain controller 10, separating the energized controller section from the non-energized container section. This facilitates the handling of the cooling water collected in the collection tank and enhances safety. To achieve the advantages of both integrated and separate methods, a disposable water collection container can also be used, such as a biodegradable / dissolvable sealed bag that connects the inlet water pipe 14 and the outlet water pipe 15. After collecting the cooling water from the RF power supply 100 in the biodegradable / dissolvable sealed bag, it can be discarded without further treatment of the cooling water. Its small size also makes it easy to store when not in use.

[0050] Figure 3 This is a schematic diagram showing the functional modules of the internal circuit board of the drainage controller 10. For example... Figure 3 As shown, the functional modules of the internal circuit board include a power conversion unit 21, a voltage and current detector 22, and a display circuit 23.

[0051] The power conversion unit 21 converts externally input AC voltage, for example DC voltage, to power the drainage controller 10.

[0052] The voltage and current detector 22 is used to detect the voltage and current of the water valve. Since the voltage supplied to the water valve is the voltage converted by the power conversion unit 21 via the water valve interface 13 and its connected cables, when the water valve is operating normally, the voltage detected by the voltage and current detector 22 is the DC voltage converted by the power conversion unit 21, and the detected current is the current of the water valve operating normally under this DC voltage. The voltage and current values ​​detected by the voltage and current detector 22 are displayed on the display 12.

[0053] The display circuit 23 is used to enable the display 12 to display the voltage and current detected by the voltage and current detector 22. The display 12 can determine whether the water valve of the drain controller 10 is working properly or blocked simply by displaying the voltage and current. However, the display 12 can also display other information besides voltage and current, such as "Power on" when the drain controller 10 is powered on. Such information is also displayed on the display 12 by the display circuit 23.

[0054] The following reference Figure 4 Explain the working process of the drainage controller 10.

[0055] First, in step S1, the power supply to the drain controller 10 is turned on. At this time, the power conversion unit 21 converts the external AC voltage into DC voltage. In step S1, the water valve interface 13 of the drain controller 10 has not yet been connected to the water valve of the radio frequency power supply 100, so the voltage and current detector 22 used to measure the operating voltage and current of the water valve detects zero voltage and current, and the display 12 displays, for example, 0.00.

[0056] Next, in step S2, the water collection container is connected to the inlet and outlet of the radio frequency power supply 100 via the inlet water pipe 14 and the outlet water pipe 15, and the water collection container is placed at a position lower than the radio frequency power supply 100.

[0057] Next, in step S3, after connecting the water valve interface 13 of the drain controller 10 to the water valve of the radio frequency power supply 100 with a cable, the water valve switch 11 is turned on. If the water valve is working normally, the voltage detected by the voltage and current detector 22 is the DC voltage converted by the power conversion unit 21, and the detected current is the current when the water valve is working normally under this DC voltage. The display 12 displays the detected voltage and current, and the operator can determine whether the water valve is working normally or blocked by the voltage and current values ​​displayed on the display 12.

[0058] In step S4, cooling water is discharged until it is confirmed that the cooling water has been completely discharged from the radio frequency power supply 100 through the inlet water pipe 14 and the outlet water pipe 15.

[0059] Finally, in step S5, the connection between the water valve interface 13 of the drain controller 10 and the water valve of the radio frequency power supply 100 is removed, as well as the connection between the water collection container and the inlet and outlet of the radio frequency power supply 100, thus ending the water discharge operation.

[0060] The order of steps S2 and S3 can be reversed. If step S3 is performed first, after connecting the water valve interface 13 of the drainage controller 10 to the water valve of the radio frequency power supply 100 with a cable, the water valve switch 11 is not opened temporarily. Instead, step S2 is performed to connect the water collection container to the radio frequency power supply 100 with a water pipe before opening the water valve switch 11.

[0061] Using the drainage controller 10 of the present invention, when the radio frequency power supply 100 is removed from the machine end, the residual cooling water in the radio frequency power supply 100 can be easily released, thus preventing cooling water leakage.

[0062] The drainage controller 10 of the present invention is small in size and can be easily carried to each machine for drainage operation. It is highly integrated, easy to operate, highly compatible, does not require cumbersome supporting equipment, and has an extremely low failure rate.

[0063] The above description of the drainage controller 10 for the RF power supply 100 is based on the application of the RF power supply 100 in a dry etching apparatus 200. However, as long as the RF power supply 100 itself is a water-cooled RF power supply, its application is not limited to dry etching apparatus. For example, the RF power supply 100 of the present invention can also be used in various production and daily life applications such as LED and solar cell production, RF induction heating, and medical aesthetics.

[0064] Example

[0065] As a specific embodiment of the present invention, the etching machine adopts the Vigus series etching machine from Tokyo Electric Power Company, Japan, which includes two types of machines: GTVlk and GTVrk. The water valve of the RF power supply 100 used in the Vigus series etching machine is powered by DC 24V.

[0066] The actual drain controller 10 is as follows Figure 5 As shown, it has a transparent outer casing. The water valve interface 13 is located in the upper left corner of the casing, and the water valve switch 11 is located below the water valve interface 13. The display 12 is located in the center of the casing from left to right and slightly above it. Inside the casing, below the display 12, is a voltage and current detector 22. Other components such as the power conversion unit 21 are also present. Figure 5 Not indicated in the text.

[0067] in addition, Figure 5 The drain controller 10 shown is a small, electrically charged component; the water collection container is separate from the drain controller 10. The water collection container is also not shown. Figure 5 .

[0068] When draining the cooling water in the RF power supply 100 using the drain controller 10, first turn on the power of the drain controller 10. The power conversion unit 21 converts the external AC 220V voltage to DC 24V voltage. At this time, the display 12 shows 0.00(V) / 0.00(A).

[0069] Next, connect the water collection container to the RF power supply 100 using a water pipe, and place the water collection container at a position lower than the RF power supply 100. After connecting the water valve interface 13 of the drain controller 10 to the water valve of the RF power supply 100 using a cable, open the water valve switch 11. At this time, the water valve is working normally, and the voltage and current detector 22 detects a voltage of 23.8V and a current of 0.36A, which is displayed on the display 12 as 23.8(V) / 0.36(A). This voltage and current are within the error range of the theoretical normal value of 24.0(V) / 0.40(A), indicating that the water valve is working normally and is not blocked.

[0070] Since the water valve switch 11 is open, the cooling water in the RF power supply 100 flows into the water collection container by gravity. The cooling water is then confirmed to have been completely released through the transparent inlet pipe 14 and outlet pipe 15.

[0071] Finally, disconnect the water valve interface 13 from the water valve and the water collection container from the radio frequency power supply 100 to end the water draining process. The collected cooling water in the water collection container can be drained separately through a water pipe.

[0072] In addition to the advantages described above, such as being able to easily release residual cooling water in the RF power supply 100 and having a small size, the drainage controller 10 of this embodiment can be applied to the GTVlk and GTVrk machines of the Vigus series etching machines that are currently widely used, and also has the advantage of strong compatibility.

[0073] It should be understood that although the invention has been described with reference to specific embodiments, those skilled in the art, upon reading the specification, can modify one or more features without departing from the spirit and scope of the invention. Therefore, this specification is not intended to limit the invention. Rather, the scope of the invention is defined only by the claimed claims and their equivalents.

Claims

1. A drainage controller for an RF power supply, characterized in that, include: Water pipes, which are respectively connected to the cooling water inlet and cooling water outlet of the radio frequency power supply, are used to drain the residual cooling water in the radio frequency power supply. The water valve interface is capable of being electrically connected to a water valve located at the cooling water inlet of the radio frequency power supply and used to supply power to the water valve. and A water valve switch, which controls the opening and closing of the water valve via a water valve interface connected to the water valve. When the water valve switch opens the water valve, the cooling water remaining in the radio frequency power supply flows out to the outside of the radio frequency power supply through the water pipe.

2. The drainage controller for radio frequency power supply as described in claim 1, characterized in that: It also includes a voltage and current detector for measuring the voltage and current of the water valve and a display for showing the voltage and current of the water valve.

3. The drainage controller for radio frequency power supply as described in claim 1 or 2, characterized in that: When the water valve switch has opened the water valve, the cooling water remaining in the radio frequency power supply flows out through the water pipe to a water collection container outside the radio frequency power supply. The water collection container is placed below the radio frequency power supply so that the cooling water flows out into the water collection container by gravity.

4. The drainage controller for an RF power supply as described in any one of claims 1-3, characterized in that: The water pipe is a transparent flexible tube.

5. The drainage controller for an RF power supply as described in any one of claims 1-4, characterized in that: It also has a power conversion unit that converts AC voltage from an external source into DC voltage to power the drain controller and the water valve.

6. The drainage controller for an RF power supply as described in any one of claims 1-5, characterized in that: The radio frequency power supply is used in dry etching equipment.

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