A multifunctional integrated multi-stage doctor blade coating device

Abstract

The application discloses a multifunctional integrated multistage doctor blade coating device, which comprises a multistage doctor blade head, a heating vibration source, a vertical connecting rod, a horizontal connecting rod, a liquid supplementing device and a driving block. When the substrate is subjected to doctor blade coating, the multistage doctor blade head can make the doctor coating gap gradually decrease, so that the meniscus height of the front end of the doctor blade gradually decreases, a smaller and more stable liquid surface height difference is formed between the liquid film of the rear end of the doctor blade, the liquid film thickness fluctuation caused by the liquid surface height difference change of the front and rear ends of the doctor blade in the doctor coating process is reduced, and a more uniform ideal thickness photoresist film is obtained. The heating vibration source can realize real-time control of the temperature control of the substrate doctor blade head and the vibration mode state of the doctor blade. By heating the doctor blade head, a high-temperature environment can be formed at the bottom region of the doctor blade, the viscosity of a high-viscosity solution is reduced, and the solution is uniformly spread under the doctor blade. By controlling the vibration mode of the vibrator inside the heating vibration source, the bottom of the doctor blade can realize complex motion trajectories such as sinusoidal waveforms.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of precision coating, and in particular to a multifunctional integrated multi-stage doctor blade coating device. BACKGROUND

[0002] As a classic coating technology, doctor blading has the advantages of simple equipment structure, high solution utilization rate, controllable coating process, and can be used for large size or large aspect ratio substrates, and is widely used for uniform coating of liquid or slurry (such as photoresist film layer, ink, adhesive, electrode slurry, functional coating, etc.) on the surface of substrates (such as quartz substrate, paper, film, metal foil, battery electrode, optical film, etc.).

[0003] The basic principle of doctor blading is to use a knife edge flat doctor blade to scrape over the surface of the moving substrate with a set gap (distance between the doctor blade and the substrate) and angle, to scrape off the excess coating solution, and leave a uniform coating layer of a predetermined thickness. Compared with wet coating methods such as spin coating, this method has simpler instrument structure, better process controllability and better substrate size and shape adaptability, and can reduce the solution scraped off the substrate by controlling the initial liquid amount, greatly improving the utilization rate of the solution.

[0004] However, with the increasing demand for coating quality in modern industry, especially in the fields of high-performance battery electrode coating, optical functional film preparation, and high-precision electronic material coating, the inherent limitations of traditional doctor blading are increasingly prominent. In the traditional doctor blading process, the core parameters that affect the coating quality usually need to be set before coating, and there is a lack of rapid response capability to transient changes such as periodic microstructure changes of the substrate and film fluctuations during coating, resulting in high scrap rate, large material waste, and limited production efficiency. At the same time, the traditional doctor blade itself does not have heating or cooling function, and cannot actively maintain or regulate the temperature stability of the solution in the coating area, especially in applications that require a specific temperature window (such as high temperature to reduce the viscosity of high viscosity solution, or low temperature to prevent solvent from evaporating too quickly). During the doctor blading process, the traditional doctor blade is greatly limited in terms of solution consumption and replenishment, and it is difficult to achieve precise and real-time replenishment or regulation of the solution in the three-phase contact line area of the doctor blade-substrate-solution, and it is difficult to form a stable meniscus, resulting in poor film coating effect. The direct liquid feeding method of slot coating will cause fluctuations and bubble entrainment in the three-phase line area of the coating center, and will also cause the problem of solution flow leveling not timely due to slot blockage.

[0005] Therefore, how to design a multifunctional doctor blade coating device that can adapt to the needs of various coating scenarios, control the morphology of the film, regulate the temperature, adjust the liquid film leveling performance, and solve the problem of solution consumption and replenishment, has become a key problem that needs to be solved in the film coating industry. This not only requires the device to improve the uniformity and interface stability of the doctor blade coating in the structural design, but also needs to integrate multiple control functions into the doctor blade body and realize real-time monitoring and dynamic intervention of the doctor coating process, in order to significantly improve the coating quality, stability and efficiency, and meet the increasingly stringent requirements of high-end manufacturing fields. SUMMARY

[0006] To solve the above problems existing in the prior art, the present application designs a multifunctional integrated multi-stage doctor blade coating device that can perform real-time, active and multi-parameter coordinated regulation in the core action area of doctor coating (near the contact area between the doctor blade and the substrate).

[0007] To achieve the above-mentioned purpose, the technical scheme of the present application is as follows: a multifunctional integrated multi-stage doctor blade coating device, comprising a multi-stage doctor blade head, a heating vibration source, a vertical connecting rod, a horizontal connecting rod, a liquid supplementing device and a driving block;

[0008] The left and right ends of the multi-stage doctor blade head are fixedly connected with the lower ends of the vertical connecting rods on the left and right sides, respectively, and the left and right ends of the driving block are connected with the upper ends of the vertical connecting rods on the left and right sides, respectively; the driving block is connected with the driving device through a transmission mechanism to drive the multi-stage doctor blade head to move forward and backward; the heating vibration source is installed on the upper side of the multi-stage doctor blade head through a heat transfer gasket; the liquid supplementing device is fixedly connected with the vertical connecting rods on the left and right sides through the respective horizontal connecting rods on the left and right sides, and is located in front of the multi-stage doctor blade head.

[0009] Further, the heating vibration source is connected with the control system through a data line to realize the vibration state control of the internal vibrator and the temperature control of the embedded micro heating element; the liquid supplementing device is connected with the hydraulic pump through a hose, and the hydraulic pump is connected with the control system to realize the control of the liquid supplementing speed and pressure; the driving block is connected with the servo motor through a lead screw, and the servo motor is connected with the control system to realize the control of the doctor coating speed of the multi-stage doctor blade head; the substrate is placed on the lifting platform, and the lifting platform is connected with the control system to realize the adjustment control of the doctor coating gap between the multi-stage doctor blade head and the substrate.

[0010] The servo motor, the hydraulic pump and the lifting platform are fixed on the rack, and the lifting platform adjusts the gap between the multi-stage doctor blade head and the substrate in the initial stage of doctor coating. The driving block moves linearly along the horizontal direction relative to the lifting platform, and drives the whole device to perform doctor coating operation on the substrate.

[0011] Further, the left and right sides of the heating vibration source are connected with the left and right vertical connecting rods through flexible pads and compression screws respectively, and the upper sides of the heating vibration source are connected with the inner sides of the horizontal suspension rods of the left and right vertical connecting rods through flexible pads and compression screws respectively.

[0012] Further, the left and right ends of the driving block are installed in the rectangular holes at the upper ends of the left and right vertical connecting rods through damping springs, damping adjustment sheets and damping adjustment rods respectively; the damping springs are multiple and arranged around the driving block, the front side, rear side and lower side of the driving block are connected with the front side, rear side and lower side of the rectangular hole through damping adjustment sheets and damping springs respectively, and the upper side of the driving block is connected with the upper side of the rectangular hole through a damping adjustment sheet, a damping spring, a flexible pad and a damping adjustment rod in sequence, and the damping adjustment rod passes through the upper wall of the rectangular hole through a threaded connection mode.

[0013] Further, the two ends of the driving block are slidingly connected with the rack and move along the front and back directions of the rack.

[0014] Further, the lower end of the multi-stage doctor blade head has multiple doctor blade heads, the multiple doctor blade heads are arranged side by side along the front and back directions, and the lower edges of the multiple doctor blade heads are lowered from front to back in sequence to form a doctor blade gap which is gradually reduced.

[0015] Further, the multi-stage doctor blade head has at least three doctor blade heads, and the shapes of the doctor blade heads include trapezoidal, rectangular, triangular, semicircular and crescent shapes, which are selected according to different process requirements.

[0016] Further, the two sides of the upper part of the multi-stage doctor blade head are provided with inverted trapezoidal protrusions, the lower part of the vertical connecting rod is provided with inverted trapezoidal grooves, and the inverted trapezoidal protrusions are inserted into the inverted trapezoidal grooves.

[0017] Further, the upper part of the multi-stage doctor blade head is provided with a rectangular groove for installing the heating vibration source.

[0018] After the heating vibration source is powered on, the internal vibrator is driven to vibrate vertically, and the embedded micro heating element is heated, and the multi-stage doctor blade head is heated through the heat transfer pad.

[0019] The heat transfer pad is located between the heating vibration source and the multi-stage doctor blade head.

[0020] Further, the left and right sides of the liquid supplementing device are fixedly connected with the left and right horizontal connecting rods through connecting screws, and the horizontal connecting rods are connected with the vertical connecting rods through connecting screws.

[0021] The upper end of the liquid supplementing device has two liquid injection inlets, and the lower end has a liquid injection nozzle, and the tip of the liquid injection nozzle is flush with the position 1 mm above the bottom of the multi-stage doctor blade head.

[0022] Further, the driving block has a cuboid protrusion at both ends, and the protrusion has a circular groove around the same, which is used for mounting a damping spring;

[0023] The lower side of the damping adjusting piece has a circular groove, which is in contact with the upper end of the damping spring on the upper side of the driving block, so as to apply a compression force to the damping spring;

[0024] The upper end of the damping adjusting rod has an ear-shaped structure, which is convenient for rotating operation, and the lower end has a threaded structure, which is mounted in a threaded hole at the upper end of the vertical connecting rod, so as to apply a compression force to the damping adjusting piece.

[0025] Compared with the prior art, the present application has the following advantages:

[0026] 1. When the substrate is coated by the doctor blade, the multi-stage doctor blade head can make the doctor blade gap decrease gradually, so that the meniscus height of the front end of the doctor blade decreases gradually, a smaller and more stable liquid level difference is formed between the liquid film of the front end and the rear end of the doctor blade, the liquid film thickness fluctuation caused by the change of the liquid level difference between the front end and the rear end of the doctor blade during the doctor blade coating process is reduced, and a more uniform and ideal thickness of the photoresist film is obtained.

[0027] 2. The heating vibration source arranged above the multi-stage doctor blade head can realize temperature control of the substrate doctor blade head and real-time control of the doctor blade vibration mode. By heating the doctor blade head, a high-temperature environment can be formed at the bottom of the doctor blade, the viscosity of the high-viscosity solution is reduced, and the solution is uniformly spread under the doctor blade.

[0028] 3. By controlling the vibration mode of the vibrator inside the heating vibration source, the doctor blade can be driven to vibrate vertically, and combined with the forward movement of the doctor blade under the driving of the motor, the bottom of the doctor blade can realize complex motion trajectories such as sinusoidal waveforms, so that when the substrate with periodic microstructure is coated, the liquid film above the microstructure is removed by matching the microstructure change of the blade tip trajectory.

[0029] 4. For the coating of a flat substrate, the periodic influence or corrugated liquid film defect caused by the environment can be controlled by the program control vibration mode, the periodic fluctuation of the liquid film is controlled in real time during the processing process, the liquid film fluctuation is resisted, and the corrugated defect of the liquid film is repaired. At the same time, through the damping adjustment structure on both sides of the driving block, the amplitude of the doctor blade can be further manually adjusted, and the influence of the doctor blade vibration on the driving block and the motor above can be reduced.

[0030] 5. This invention utilizes the curved nozzle structure at the bottom of the replenishing device to achieve precise liquid delivery to the meniscus of the doctor blade during the coating process. By controlling the liquid flow rate at the upper end of the replenishing device to adapt to different coating speeds, a stable solution pressure at the coating front end is obtained, avoiding solution consumption and pressure reduction that leads to film thinning during coating. Compared to slot coating, replenishing the meniscus of the doctor blade front end avoids fluctuations and air bubble entrapment in the coating center three-phase line region caused by direct liquid delivery. Furthermore, the problem of delayed solution leveling caused by slot blockage in slot coating can be buffered by precise liquid distribution at the meniscus of the doctor blade front end, allowing sufficient time for the solution to self-level through diffusion before coating, resulting in a more uniform liquid distribution effect. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the overall structure of the present invention (assembly drawing);

[0032] Figure 2 This is an exploded view showing the structure of all the parts in this invention.

[0033] Figure 3 This is a schematic diagram showing the variation of the scraping gap at the bottom of the three-stage scraper head;

[0034] Figure 4 A schematic diagram illustrating the process of altering the bottom motion trajectory of a single-stage scraper head to scrape a microstructured substrate using a heating vibration source.

[0035] Figure 5 This diagram illustrates the precise replenishment of fluid to the meniscus at the tip of the scraper using a fluid replenishment device.

[0036] In the diagram: 1-Multi-stage scraper head; 2-Heat transfer pad; 3-Heating vibration source; 3a-Embedded micro heating element; 3b-Internal oscillator; 3c-External wire; 4-Vertical connecting rod; 5-Horizontal connecting rod; 6-Liquid replenishment device; 6a-Liquid injection elbow; 6b-Liquid injection inlet; 7-Clamping screw; 8-Flexible pad; 9-Connecting screw; 10-Drive block; 11-Damping spring; 12-Damping adjustment plate; 13-Damping adjustment rod; 14-Coating solution; 15-Substrate; 16-Lead screw; 17-Servo motor; 18-Lifting platform; 19-Hydraulic pump. Detailed Implementation

[0037] The present invention will now be further described with reference to the accompanying drawings.

[0038] like Figures 1-5 As shown, a multi-functional integrated multi-stage doctor blade coating device includes a multi-stage doctor blade head 1, a heat transfer pad 2, a heating vibration source 3, a vertical connecting rod 4, a horizontal connecting rod 5, a liquid replenishment device 6, a clamping screw 7, a flexible pad 8, a connecting screw 9, a drive block 10, a damping spring 11, a damping adjustment plate 12, and a damping adjustment rod 13.

[0039] The heat transfer pad 2 is located above the multi-stage doctor blade head 1, the heating vibration source 3 is located above the heat transfer pad 2; the vertical connecting rod 4 is located above the multi-stage doctor blade head 1 and on both sides of the heating vibration source 3, the horizontal connecting rod 5 is located on both sides of the vertical connecting rod 4; the compression screw 7 is located on both sides and above the heating vibration source 3, the liquid supplementing device 5 is located between the front side of the multi-stage doctor blade head 1 and the horizontal connecting rod 4; the driving block 10 is between the heating vibration source 3 and the vertical connecting rod; the damping spring 11 is distributed around the sliding block in the circular groove on both sides of the driving block 10, the damping adjusting piece 12 is above the damping spring 11 on both sides of the driving block 10; the damping adjusting rod 13 passes through the rectangular hole structure on the vertical connecting rod 4 and presses above the damping adjusting piece 11.

[0040] Further, the multi-stage doctor blade head 1 below has three conventional doctor blade head shapes which are parallel along the doctoring direction and gradually increase in size along the vertical direction, which gradually reduces the doctoring gap during doctoring;

[0041] The multi-stage doctor blade head 1 includes but is not limited to three doctor blade head shapes, and various types of doctor heads from single stage to multiple stages can be prepared, and the doctor head shapes include but are not limited to trapezoidal, rectangular, triangular, semicircular, crescent-shaped, etc., which can be replaced according to different process requirements;

[0042] Further, inverted trapezoidal protrusions are provided on both sides of the multi-stage doctor blade head 1 above, which are used for mounting the vertical connecting rod 4, and the two are connected by splicing and inserting;

[0043] The vertical connecting rod 4 is divided into left and right two parts, and the bottom is provided with an inverted trapezoidal groove for connecting with the multi-stage doctor blade head 1.

[0044] Further, a rectangular groove is provided in the middle of the two trapezoidal protrusions above the multi-stage doctor blade head 1, which is used for placing the heating vibration source 3;

[0045] The heating vibration source 3 is powered through the upper external wire 3c, drives the internal vibrator 3b to vibrate vertically, and makes the embedded micro heating element 3a heat up, and the multi-stage doctor blade head 1 is heated through the heat transfer pad 2;

[0046] The heat transfer pad 2 is located between the heating vibration source 3 and the multi-stage doctor blade head 1.

[0047] Further, the vertical connecting rod 4 has a cuboid-shaped boss in the middle section, and the boss and the side surface of the vertical connecting rod 4 are threaded holes for mounting the compression screw 7 and the connecting screw 9;

[0048] The compression screw 7 passes through the vertical connecting rod 4 and applies compression force to the top and both sides of the heating vibration source 3 through the threaded holes;

[0049] The transverse connecting rod 5 is provided with threaded holes, and is installed on both sides of the vertical connecting rod 4 and the liquid supplementing device 6 through connecting screws 9, so that the liquid supplementing device 6 can be disassembled according to the coating requirements;

[0050] The liquid supplementing device 6 is provided with threaded holes on the side, and is installed between the two transverse connecting rods 5 through connecting screws 9.

[0051] Further, the liquid supplementing device 6 is provided with two liquid injection inlets 6b on the upper end, and a liquid injection nozzle 6a on the lower end, and the tip of the liquid injection nozzle 6a is flush with the position 1 mm above the bottom of the multi-stage doctor blade head 1.

[0052] Further, the vertical connecting rod 4 is provided with a rectangular hole structure on the upper end, and a circular groove on the hole wall for positioning the damping spring 11, and a threaded hole on the top for installing the damping adjusting rod 13.

[0053] The driving block 10 is provided with a threaded hole in the center, and is connected with a servo motor 17 through a lead screw 16, and serves as a driving component of the whole device.

[0054] Further, the driving block 10 is provided with a cuboid protrusion on both sides, and the protrusion is provided with a circular groove around the protrusion for positioning the damping spring 11.

[0055] The damping spring 11 is installed on the inner side of the rectangular hole of the vertical connecting rod 4 and the outer side of the protrusion on both sides of the driving block 10 through the circular groove, and is distributed in a surrounding manner.

[0056] The damping adjusting piece 12 is provided with a circular groove below, and is installed above the damping spring 11 above, so as to apply a pressing force to the damping spring 11 in the vertical direction.

[0057] The damping adjusting rod 13 is provided with an ear-shaped structure on the upper end for facilitating rotation operation, and is provided with a threaded structure on the lower end for being installed in the threaded hole above the vertical connecting rod 4, so as to apply a pressing force to the damping adjusting piece 12.

[0058] The flexible gasket 8 is located between the bottom of the pressing screw and the heating seismic source 3, and between the bottom of the damping adjusting rod 13 and the damping adjusting piece 12, so as to prevent the heating seismic source 3 and the damping adjusting piece 12 from being pressed and broken, and to provide greater friction.

[0059] The operation mode of the present application is as follows:

[0060] First, according to the characteristics of the coating solution 14 and the process requirements, the size and the number of stages of the multi-stage doctor blade head 1 are selected, the heat transfer pad 2 is placed in the rectangular groove above the multi-stage doctor blade head 1, and the heating source 3 is placed above the heat transfer pad 2. Two vertical connecting rods 4 are installed on the inverted trapezoidal protrusions on the left and right of the multi-stage doctor blade head 1, and the rectangular holes at the upper ends of the vertical connecting rods 4 are sleeved on the two ends of the driving block 10. The compression screws 7 are passed through the threaded holes in the rectangular bosses at the lower ends and the middle sections of the vertical connecting rods 4, so as to position the heating source 3 by compressing it on the heat transfer pad 2. The flexible pad 8 is placed between the compression screws 7 and the heating source 3 to prevent the compression force from being too large to damage the shell of the heating source 3. The horizontal connecting rod 5 is placed on the two sides of the vertical connecting rod 4, aligned with the corresponding threaded holes, positioned by the connecting screws 9, and the liquid supplementing device 6 is placed at the front end of the multi-stage doctor blade head 1, so that the tip of the liquid injection nozzle 6a is flush with the position 1 mm above the bottom of the multi-stage doctor blade head 1. The liquid supplementing device 6 is fixed between the horizontal connecting rods 5 by the connecting screws 9. The damping adjustment sheet 12 is placed in the upper gap of the rectangular hole at the upper end of the driving block 10 and the vertical connecting rod 4, the damping spring 11 is placed between the damping adjustment sheet 12, the driving block 10 and the corresponding circular recess at the upper end of the vertical connecting rod 4, and the damping spring 11 generates an initial compression force. The damping adjustment rod 13 passes through the threaded hole at the upper end of the vertical connecting rod 4, applies a compression force to the damping adjustment sheet 12, and the flexible pad 8 is placed between the damping adjustment rod 13 and the damping adjustment sheet 12 to prevent the compression force from being too large to damage the damping adjustment sheet 12.

[0061] After the entire device is assembled, the position of the driving block 10 is adjusted according to the coating requirements, so that the bottom of the multi-stage doctor blade head 1 at the lower end of the entire device and the substrate 15 maintain a suitable gap and horizontal relative position. The temperature of the embedded micro heating element 3a is raised by controlling the external wire 3c, the multi-stage doctor blade head 1 is heated, the vertical vibration of the multi-stage doctor blade head 1 is driven by controlling the internal vibrator 3b to vibrate vertically. The amplitude of the doctor blade is adjusted by rotating the damping adjustment rod 13 (downward rotation increases damping and reduces amplitude; upward rotation reduces damping and increases amplitude).

[0062] After the position of the entire device is adjusted, the vibration signal of the internal vibrator 3b is set by the control program, such as vibration period, amplitude, phase and the like to meet the process requirements. At the same time, the coating solution 14 is transmitted to the liquid injection nozzle 6a through the liquid supplementing device 6 by the liquid injection inlet 6b at the upper end of the liquid supplementing device 6, and an initial meniscus is formed at the front end of the multi-stage doctor blade head 1. The driving block 10 is driven forward by the servo motor 17, thereby driving the multi-stage doctor blade head 1 to move forward in the doctor blade direction, and the doctor blade process is started. During the doctor blade process, the doctor blade state and film forming effect can be detected in real time by sensors or high-speed cameras, and the vibration state of the internal vibrator 3b is changed in real time by the program feedback to achieve better coating effect.

[0063] Finally, after the blade has finished coating, the blade is separated from the substrate 15, the hydraulic pump 19 and the servo motor 17 are turned off, the vibration program is ended, the film is dried, and the final film quality is detected.

[0064] The above description is only for the technical solution and technical concept of the present application, and various corresponding changes and modifications can be made by those skilled in the art, all of which shall fall within the protection scope of the present application.

Claims

1. A multifunctional integrated multi-stage doctor blade coating device, characterized by: It comprises a multi-stage doctor blade head (1), a heating vibration source (3), vertical connecting rods (4), horizontal connecting rods (5), a liquid supplementing device (6) and a driving block (10). The left and right ends of the multi-stage doctor blade head (1) are fixedly connected with the lower ends of the vertical connecting rods (4) on the left and right sides, and the left and right ends of the driving block (10) are connected with the upper ends of the vertical connecting rods (4) on the left and right sides; the driving block (10) is connected with the driving device through a transmission mechanism to drive the multi-stage doctor blade head (1) to move back and forth; the heating vibration source (3) is installed on the upper side of the multi-stage doctor blade head (1) through a heat transmission gasket (2); the left and right sides of the liquid supplementing device (6) are fixedly connected with the vertical connecting rods (4) on the left and right sides through respective horizontal connecting rods (5), and the liquid supplementing device (6) is located in front of the multi-stage doctor blade head (1). The lower end of the multi-stage doctor blade head (1) has a plurality of doctor blade heads, the plurality of doctor blade heads are arranged side by side in the front-rear direction, the lower edges of the plurality of doctor blade heads are lowered in sequence from front to back, and a doctor blade gap that is gradually reduced is formed during doctor coating. By controlling the vibration mode of the internal vibrator of the heating vibration source (3), the multi-stage doctor blade head (1) is driven to vibrate vertically, and the bottom of the multi-stage doctor blade head (1) is controlled to realize a complex motion track in combination with the forward movement of the multi-stage doctor blade head (1) under the drive of the servo motor (17), so that the liquid film above the microstructure is removed by matching the knife tip track with the change of the microstructure when the substrate with a periodic microstructure is coated.

2. The multi-functional integrated multi-stage doctor blade coating device according to claim 1, wherein: The heating vibration source (3) is connected with the control system through a data line to realize vibration state control of the internal vibrator (3b) and temperature control of the embedded micro heating element (3a); the liquid supplementing device (6) is connected with the hydraulic pump (19) through a hose, and the hydraulic pump (19) is connected with the control system to realize liquid supplementing speed and pressure control; the driving block (10) is connected with the servo motor (17) through a lead screw (16), and the servo motor (17) is connected with the control system to realize multi-stage doctor blade head (1) coating speed control; the substrate (15) is placed on the lifting platform (18), and the lifting platform (18) is connected with the control system to realize adjustment control of the coating gap between the multi-stage doctor blade head (1) and the substrate (15). The servo motor (17), the hydraulic pump (19) and the lifting platform (18) are all fixed on the rack, the lifting platform (18) adjusts the gap between the multi-stage doctor blade head (1) and the substrate (15) in the initial stage of coating; the driving block (10) moves linearly along the horizontal direction relative to the lifting platform (18) to drive the whole device to perform coating operation on the substrate (15).

3. The multi-functional integrated multi-stage doctor blade coating device according to claim 1, wherein: The left and right sides of the heating vibration source (3) are connected with the vertical connecting rods (4) on the left and right sides through respective flexible gaskets (8) and compression screws (7), and the left and right sides of the upper side of the heating vibration source (3) are connected with the horizontal suspension rods inside the vertical connecting rods (4) on the left and right sides through respective flexible gaskets (8) and compression screws (7).

4. The multi-functional integrated multi-stage doctor blade coating device according to claim 1, wherein: The left and right ends of the driving block (10) are respectively installed in the rectangular holes of the upper ends of the vertical connecting rods (4) on the left and right sides through respective damping springs (11), damping adjustment pieces (12) and damping adjustment rods (13); the damping springs (11) are multiple, arranged around the driving block (10), the front side, rear side and lower side of the driving block (10) are respectively connected with the front side, rear side and lower side of the rectangular hole through respective damping adjustment pieces (12) and damping springs (11), and the upper side of the driving block (10) is connected with the upper side of the rectangular hole through a damping adjustment piece (12), a damping spring (11), a flexible gasket (8) and a damping adjustment rod (13) in sequence, and the damping adjustment rod (13) passes through the upper wall of the rectangular hole in a threaded connection mode.

5. The multi-functional integrated multi-stage doctor blade coating device according to claim 1, wherein: The two ends of the driving block (10) are slidably connected with the rack and move along the front-rear direction of the rack.

6. The multi-functional integrated multi-stage doctor blade coating device according to claim 1, wherein: The multi-stage scraper head (1) has at least three scraper heads, and the shapes of the scraper heads include trapezoid, rectangle, triangle, semicircle and crescent, which are selected according to different process requirements.

7. The multi-functional integrated multi-stage doctor blade coating device according to claim 1, wherein: Inverse trapezoidal protrusions are arranged on the two sides of the upper part of the multi-stage scraper head (1), inverse trapezoidal grooves are arranged on the lower part of the vertical connecting rod (4), and the inverse trapezoidal protrusions are inserted into the inverse trapezoidal grooves.

8. The multi-functional integrated multi-stage doctor blade coating device according to claim 1, wherein: A rectangular groove is arranged on the upper part of the multi-stage scraper head (1) and used for mounting the heating vibration source (3). After the heating vibration source (3) is powered on, the internal vibrator (3b) is driven to vibrate vertically, the embedded micro heating element (3a) is heated, and the multi-stage scraper head (1) is heated through the heat transfer gasket (2). The heat transfer gasket (2) is located between the heating vibration source (3) and the multi-stage scraper head (1).

9. The multi-functional integrated multi-stage doctor blade coating device according to claim 1, wherein: The left and right sides of the liquid supplementing device (6) are fixedly connected with the left and right horizontal connecting rods (5) through connecting screws (9), and the horizontal connecting rods (5) are connected with the vertical connecting rod (4) through the connecting screws (9). The upper end of the liquid supplementing device (6) has two liquid injection inlets (6b), and the lower end has a liquid injection nozzle (6a), the tip of the liquid injection nozzle (6a) is flush with the position 1 mm above the bottom of the multi-stage scraper head (1).

10. The multi-functional integrated multi-stage doctor blade coating device according to claim 4, wherein: The two ends of the driving block (10) have cuboid protrusions, and the protrusions have circular grooves around them, which are used for mounting the damping springs (11); The lower side of the damping adjustment piece (12) has a circular groove, which is in contact with the upper end of the damping spring (11) on the upper side of the driving block (10) and applies a compression force to the damping spring (11); The upper end of the damping adjustment rod (13) has an ear-shaped structure, which is convenient for rotating operation, and the lower end has a threaded structure, which is installed in the threaded hole of the upper end of the vertical connecting rod (4) and applies a compression force to the damping adjustment piece (12).

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