Energy-saving precise constant-temperature refrigerating device for chip manufacturing

Abstract

The invention relates to the field of refrigerating devices, in particular to an energy-saving precise constant-temperature refrigerating device for chip manufacturing, a pre-cooling water tank is arranged on one side of a magnetic suspension centrifugal water chilling unit, a condenser drain pipe of the magnetic suspension centrifugal water chilling unit is communicated into the pre-cooling water tank through a water inlet channel, and two communication ports are formed in the water inlet channel; an upper water tank and a lower water tank are formed in the pre-cooling water tank, and cooling water flows between the upper water tank and the lower water tank in a one-way mode through a lower overflow opening. According to the system, chilled water can be conveyed to the client side after heat exchange through the magnetic suspension centrifugal water chilling unit so as to achieve constant-temperature refrigeration, cooling water can be pre-cooled through the pre-cooling water tank so as to reduce the temperature of the cooling water when the cooling water enters the cooling water tower, and therefore the processing load of the cooling water tower on the cooling water can be effectively reduced; therefore, the overall power consumption of the device is reduced, and the energy-saving effect is achieved.

Description

Technical Field

[0001] This invention relates to the field of refrigeration equipment technology, and in particular to an energy-saving, precision constant temperature refrigeration device for chip manufacturing. Background Technology

[0002] In chip manufacturing, precise temperature control is crucial for yield and process stability. Magnetic levitation centrifugal chillers utilize magnetic levitation variable frequency compressor technology, enabling continuous intelligent adjustment within a 10% to 100% load range, with an outlet water temperature control accuracy of ±0.1℃. This high-precision temperature control ensures temperature stability during chip manufacturing, thereby improving chip production quality and reliability.

[0003] When a magnetic levitation centrifugal chiller is in operation, it requires cooling water circulation to exchange heat with the high-temperature, high-pressure refrigerant vapor discharged from the compressor within the condenser. After heat exchange in the condenser, the cooling water temperature rises, and it is then transported to a cooling tower for cooling. After cooling, it re-enters the condenser for heat exchange, thus achieving cooling water circulation.

[0004] Traditionally, cooling water is directly transported to the chiller tower after heat exchange in the condenser. This operation results in excessive power consumption in the chiller tower, increasing the overall energy consumption of the magnetic levitation centrifugal chiller unit. Therefore, there is an urgent need for an energy-efficient magnetic levitation centrifugal chiller unit. Summary of the Invention

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing an energy-saving, precise constant-temperature cooling device for chip manufacturing.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: An energy-saving precision constant temperature refrigeration device for chip manufacturing includes a magnetic levitation centrifugal chiller unit. A pre-cooling water tank is provided on one side of the magnetic levitation centrifugal chiller unit. The condenser drain pipe of the magnetic levitation centrifugal chiller unit is connected to the pre-cooling water tank through a water inlet channel, and two connecting ports are provided in the water inlet channel. The precooling water tank is equipped with an upper water tank and a lower water tank, and cooling water flows unidirectionally between the upper water tank and the lower water tank through the lower overflow port. The fixed base is set inside the precooling water tank and above the upper water tank. A main shaft is rotatably installed inside the fixed base. Multiple water-holding seats are adapted to the corresponding communication ports on the main shaft. An inclined water-holding trough for holding water is opened on one side of the water-holding seat, and a water-holding bucket for driving the main shaft to rotate is opened on the other side of the water-holding seat. The hollow shaft is rotatably sleeved at both ends of the main shaft. Multiple scoops are provided on the hollow shaft. Fan blades are provided on one side of each scoop on the hollow shaft. Water from the inclined water tank flows to the scoops through a fixed guide seat.

[0007] In addition, in the preferred structure, one end of the water inlet channel is fixedly sleeved on the condenser drain pipe of the magnetic levitation centrifugal chiller unit, and the other end of the water inlet channel extends into the precooling water tank and is located on the top of the fixed base. A cover plate is installed on the top of the water inlet channel, and two non-interconnected guide ramps are provided inside the water inlet channel, and a connecting port is opened at the bottom of each guide ramp.

[0008] In addition, in the preferred structure, a fixed water tank is provided inside the fixed base, and multiple upper overflow ports are provided on the fixed base outside the fixed water tank. Multiple turbulence protrusions are fixedly arranged in an array on the outer walls of both the upper and lower overflow ports.

[0009] In addition, in the preferred structure, a main shaft is rotatably mounted through the middle of the fixed base. Both ends of the main shaft are connected to the inner wall of the precooling water tank through bearings. Two sets of support rods are fixedly mounted on the main shaft. Each set of support rods is arranged in a circular array around the center of the main shaft. A water-holding seat is fixedly mounted at the end of each support rod, and each set of water-holding seats is adapted to be located at the bottom of the connecting port.

[0010] In addition, in the preferred structure, the water hoppers of the water-holding base all face the communication port, and an upper fixing plate is fixedly installed on the water-holding base at the outlet of the inclined water-holding trough. Multiple guide columns are fixedly and vertically installed on one side of the upper fixing plate, and the other end of each guide column is connected to the lower fixing plate.

[0011] In addition, in a preferred structure, a movable plate is movably disposed between the upper fixed plate and the lower fixed plate via a guide post. A sub-plate is fixedly disposed on the side of the movable plate facing the upper fixed plate, and the contact surfaces between the upper fixed plate and the movable plate are both made of magnetic material that is compatible and attracts each other.

[0012] In addition, in the preferred structure, a reset groove is provided on the side of the sub-plate facing the lower fixed plate, and multiple inclined grooves are provided on the reset groove.

[0013] In addition, in the preferred structure, fixed guide seats are fixedly installed on both sides of the fixed seat by support frames, the water holding seats pass through the top of the fixed guide seats, a fixed horizontal plate is fixedly installed on the top of the fixed guide seats, an elastic plate is fixedly installed on the top of the fixed horizontal plate, and the secondary plate contacts the elastic plate when it moves.

[0014] In addition, in a preferred configuration, the fixed guide seat is provided with a guide groove, and a water outlet is provided at the lowest point of the guide groove on the fixed guide seat, and the water outlet is located at the top of the scoop.

[0015] In addition, in a preferred configuration, a dustproof net is installed on the top of the precooling water tank, and a delivery pump assembly is installed on the precooling water tank inside the lower water tank.

[0016] The beneficial effects of this invention are as follows: the magnetic levitation centrifugal chiller unit can deliver chilled water to the client after heat exchange to achieve constant temperature cooling. The pre-cooling water tank can pre-cool the cooling water flowing out of the magnetic levitation centrifugal chiller unit to reduce the temperature of the cooling water when it enters the cooling tower. This can effectively reduce the cooling tower's processing load on the cooling water, thereby reducing the power consumption of the cooling tower and thus reducing the overall power consumption of the device, achieving energy saving. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of an energy-saving precision constant temperature refrigeration device for chip manufacturing proposed in this invention; Figure 2 This is a schematic diagram of the internal structure of the precooling water tank proposed in this invention; Figure 3 for Figure 2 A schematic diagram of the structure after the main shaft is hidden; Figure 4 This is a schematic diagram of the internal structure of the water inlet channel proposed in this invention; Figure 5 for Figure 4 A schematic diagram of the structure after the cover plate is hidden; Figure 6 This is a schematic diagram of the structure of the fixed base, main shaft, and support rod proposed in this invention; Figure 7 for Figure 6 A schematic diagram of the structure after the fixing base is hidden; Figure 8 This is a schematic diagram of the main shaft and hollow shaft proposed in this invention; Figure 9 This is a schematic diagram of the support rod and water-holding base proposed in this invention; Figure 10 for Figure 9 A structural diagram showing the disassembly of the water-holding base and the movable plate; Figure 11 for Figure 9 A schematic diagram of the water-holding base from below; Figure 12 This is a schematic diagram of the structure of the fixing base proposed in this invention; Figure 13 This is a schematic diagram of the fixed flow guide seat proposed in this invention; Figure 14 This is a schematic diagram of the structure at the lower overflow port proposed in this invention; Figure 15 for Figure 10 A bottom view of the movable panel structure.

[0018] In the diagram: 1. Magnetic levitation centrifugal chiller unit; 2. Pre-cooling water tank; 21. Upper water tank; 22. Lower overflow port; 221. Turbulence protrusion; 23. Lower water tank; 24. Transfer pump assembly; 25. Dustproof net; 3. Water inlet channel; 31. Cover plate; 32. Guide ramp; 33. Connecting port; 4. Fixed seat; 41. Fixed water tank; 42. Upper overflow port; 43. Fixed guide seat; 431. Water outlet; 44. Fixed horizontal plate; 441. Elastic plate; 5. Main shaft; 51. Hollow shaft; 511. Fan blade; 512. Scoop; 6. Support rod; 61. Water holding seat; 62. Inclined water tank; 63. Upper fixed plate; 631. Guide column; 632. Lower fixed plate; 64. Movable plate; 641. Sub-plate; 642. Reset groove; 643. Inclined groove; 65. Water hopper. Detailed Implementation

[0019] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0020] See Figure 1 The magnetic levitation centrifugal chiller unit 1 integrates a high-speed permanent magnet synchronous motor, magnetic levitation bearings, and displacement sensors and controllers. It utilizes an electromagnetic field to levitate the compressor rotor, achieving frictionless operation. Simultaneously, a frequency converter adjusts the motor speed to precisely match load demands. Furthermore, the evaporator absorbs heat to vaporize the refrigerant, while the condenser releases heat to cool the high-temperature, high-pressure gaseous refrigerant into a liquid state. Together, they complete the refrigeration cycle, achieving a highly efficient and energy-saving centrifugal compression refrigeration process. During operation, chilled water is delivered to the user end after heat exchange in the evaporator, and works with other equipment to achieve cooling during chip manufacturing. It also incorporates a fast-response unit, integrated high-precision sensors, control algorithms, and a client-side temperature controller to achieve precise constant-temperature cooling. It is worth noting that these are all existing technologies, and therefore will not be elaborated upon further.

[0021] A condenser is installed at the top of the magnetic levitation centrifugal chiller unit 1. Cooling water is input from the cooling tower at the inlet of the condenser, and the outlet of the condenser is connected to the inlet channel 3. The cooling water then enters the pre-cooling water tank 2 through the inlet channel 3 for pre-cooling. The pre-cooled cooling water is then transported to the cooling tower for final cooling via the transfer pump assembly 24. Finally, the cooled water, after being cooled by the cooling tower, is transported back to the condenser by gravity to achieve cooling water circulation. It is worth noting that cooling water circulation is existing technology and is not part of the technical problem of pre-cooling the cooling water to reduce power consumption that needs to be solved in this technical solution, so it will not be described in detail.

[0022] It is worth noting that the chilled water and cooling water are two independent circulation systems. The chilled water is used to deliver water to the client to achieve precise temperature control, while the cooling water is used for heat exchange in the condenser. This is existing technology, so it will not be elaborated further.

[0023] See Figure 2-3 The precooling water tank 2 is equipped with an upper water tank 21 and a lower water tank 23. An overflow outlet 22 is provided between the upper water tank 21 and the lower water tank 23. When the upper water tank 21 is full, the water in the upper water tank 21 can flow into the lower water tank 23 through the overflow outlet 22.

[0024] See Figure 2 , 4 -5. One end of the water inlet channel 3 is fixedly fitted onto the condenser drain pipe of the magnetic levitation centrifugal chiller unit 1, and the other end of the water inlet channel 3 extends into the precooling water tank 2 and is located on top of the fixed base 4. A cover plate 31 is installed on the top of the water inlet channel 3. Two non-communicating guide ramps 32 are provided inside the water inlet channel 3, and each guide ramp 32 has a connecting port 33 at its bottom. Through the water inlet channel 3, the cooling water discharged from the condenser drain pipe can be guided into the precooling water tank 2, and the cooling water can be directed to flow into the water holding base 61 through the connecting port 33.

[0025] See Figure 2 , 6 -8. A main shaft 5 is rotatably mounted through the middle of the fixed base 4. Both ends of the main shaft 5 are connected to the inner wall of the precooling water tank 2 through bearings. A bearing is also provided at the connection between the main shaft 5 and the fixed base 4. The bearings can improve the stability of the main shaft 5 during rotation and reduce the rotational resistance of the main shaft 5.

[0026] See Figure 2 , 7 -12, 15, A fixed water tank 41 is provided inside the fixed base 4, and multiple overflow ports 42 are provided on the fixed base 4 outside the fixed water tank 41. Two sets of support rods 6 are fixedly installed on the main shaft 5. Each set of support rods 6 is arranged in a circular array around the center of the main shaft 5. A water holding seat 61 is fixedly installed at the end of each support rod 6, and each set of water holding seats 61 is adapted to be located below the connecting port 33.

[0027] The side of the water-holding base 61 facing the connecting port 33 is equipped with water-holding hoppers 65, which allows the water flowing out of the connecting port 33 to continuously impact the water-holding hoppers 65, thereby driving the main shaft 5 to rotate.

[0028] Since an inclined water-collecting trough 62 is provided on the other side of the water-collecting base 61, water can be continuously collected from the fixed water tank 41 through the inclined water-collecting trough 62 during the rotation of the main shaft 5. Furthermore, a movable plate 64 is provided at the outlet of the inclined water-collecting trough 62. With the setting of the movable plate 64, when the water-collecting base 61 moves above the fixed guide seat 43, the movable plate 64 can be automatically opened by the elastic plate 441, so that the water in the inclined water-collecting trough 62 can automatically flow into the fixed guide seat 43.

[0029] Because the contact surfaces between the movable plate 64 and the upper fixed plate 63 are both made of magnetically compatible materials with weak magnetic attraction, the movable plate 64 can normally attract the upper fixed plate 63 to prevent water from flowing out of the inclined water tank 62. When the elastic plate 441 jams the movable plate 64, it can move the movable plate 64 through the guide post 631, thereby opening the outlet of the inclined water tank 62. Furthermore, the inclination of the inclined water tank 62 is compatible with the fixed guide seat 43, allowing most of the water in the inclined water tank 62 to flow into the inclined water tank 62.

[0030] Both the upper fixed plate 63 and the lower fixed plate 632 are fixedly mounted on the water-holding base 61, and a guide post 631 is fixedly mounted between the upper fixed plate 63 and the lower fixed plate 632. The guide post 631 ensures the stability of the movable plate 64 during movement.

[0031] Each fixed guide seat 43 is fixedly provided with a fixed horizontal plate 44, each elastic plate 441 is fixedly provided on the top of the fixed horizontal plate 44, and each movable plate 64 is fixedly provided with a sub-plate 641 adapted to the elastic plate 441.

[0032] See Figure 7-8 12-13, the fixed guide seat 43 is fixedly installed on both sides of the fixed seat 4 by the support frame. The fixed guide seat 43 can collect the water flowing out of the inclined water tank 62, and the guide channel can guide the collected water to the outlet 431. Since the outlet 431 is located above the spoon 512, the water flowing out of the outlet 431 can drive the spoon 512 to achieve auxiliary drive of the hollow shaft 51.

[0033] See Figure 14 Hollow shafts 51 are fitted at both ends of the main shaft 5, and limit rings are fitted at both ends of the hollow shafts 51. This allows the hollow shafts 51 to rotate through friction during the rotation of the main shaft 5, and the auxiliary drive provided by the water flow impacting the spoon 512 further improves the rotation effect of the hollow shafts 51.

[0034] See Figure 2-3Both the lower overflow port 22 and the upper overflow port 42 have arrayed turbulence protrusions 221 arranged on their overflow plates. These turbulence protrusions 221 turbulently circulate the overflowing water, allowing it to splash out during the overflow process. This increases the contact area between the water and air, further enhancing heat exchange between the water and air.

[0035] The top of the precooling water tank 2 is equipped with a dustproof net 25. The dustproof net 25 is a combination of multi-layer composite filter and electrostatic filter in the prior art. It can greatly prevent dust from entering the precooling water tank 2. The dustproof net 25 can be replaced by bolts, or multiple nets can be added according to the actual environment.

[0036] In this embodiment, when the magnetic levitation centrifugal chiller unit 1 is running, the chilled water is delivered to the user end after heat exchange in the evaporator, and works with other equipment to achieve precise constant temperature cooling during the chip manufacturing process. This is prior art, so it will not be described in detail.

[0037] The condenser of the magnetic levitation centrifugal chiller unit 1 receives cooling water from the cooling tower. The outlet of the condenser is connected to the inlet channel 3, and the cooling water then enters the pre-cooling water tank 2 for pre-cooling through the inlet channel 3. The pre-cooled cooling water is then transported to the cooling tower for final cooling via the transfer pump assembly 24. Finally, the cooled water, after being cooled by the cooling tower, is transported back to the condenser by gravity to achieve cooling water circulation. It is worth noting that cooling water circulation is existing technology and will not be described in detail.

[0038] Furthermore, the cooling water flowing out of the condenser outlet can be discharged into the pre-cooling water tank 2 through the inlet channel 3, thereby exchanging heat with the cooling water in the pre-cooling water tank 2 to initially reduce the temperature of the cooling water. This reduces the temperature of the cooling water when it enters the cooling tower, thereby reducing the load on the cooling tower and reducing its power consumption, thus achieving energy saving.

[0039] When the cooling water flows out from the outlet of the condenser, it can directly enter the inlet channel 3, and then split into two streams in the inlet channel 3 and flow out from the connecting ports 33 on both sides through the guide ramps 32 respectively.

[0040] The cooling water flowing out of the connecting port 33 flows into the fixed water tank 41, and on the cooling water outflow path, it will encounter the water hopper 65 on the water holding seat 61. In this way, the cooling water can drive the water holding seat 61 to move, thereby driving the main shaft 5 to rotate. In this way, the cooling water can drive the main shaft 5.

[0041] During the rotation of the main shaft 5, the cooling water in the fixed water tank 41 can be scooped up by the inclined water tank 62 on the water tank 61, and in conjunction with the rotation of the water tank 61, the water in the fixed water tank 41 can be poured into the fixed guide seat 43. It is worth noting that the volume of the inclined water tank 62 is smaller than the volume of the water hopper 65 to ensure the rotation of the main shaft 5.

[0042] Because a movable plate 64 is guided by a guide post 631 at the outlet of the inclined water tank 62 on the water-holding base 61, and a secondary plate 641 is fixedly installed on each movable plate 64, the movable plate 64 can be magnetically attracted to the upper fixed plate 63 when the inclined water tank 62 scoops up the cooling water from the fixed water tank 41, thus preventing the cooling water in the inclined water tank 62 from flowing out.

[0043] As the water-holding base 61 continues to rotate, the secondary plate 641 on the movable plate 64 will contact the elastic plate 441 on the fixed horizontal plate 44, and the elastic plate 441 can lock the secondary plate 641 in place. In this way, the secondary plate 641 can drive the movable plate 64 to move through the guide column 631, thereby moving the movable plate 64 to the lower fixed plate 632, which will automatically open the outlet of the inclined water-holding tank 62. At this time, the cooling water can flow out from the inclined water-holding tank 62 and enter the fixed guide seat 43.

[0044] Because the elastic plate 441 has a certain elastic force, it can automatically bend after the movable plate 64 moves to the lower fixed plate 632, so as to avoid affecting the movement of the water-holding base 61. Furthermore, when the water-holding base 61 re-enters the fixed water tank 41, the movable plate 64 can move back to the upper fixed plate 63 by its own gravity and be attracted to the upper fixed plate 63 again by magnetic attraction.

[0045] During the process of the movable plate 64 resetting to the upper fixed plate 63, the water flowing out through the connecting port 33 can flush the reset groove 642 on the auxiliary plate 641 to assist the reset of the movable plate 64 and prevent the movable plate 64 from getting stuck in the middle of the guide post 631. Furthermore, the reset groove 642 is also provided with multiple inclined grooves 643, which can guide the cooling water in the reset groove 642 to the guide post 631. This can flush away small particles on the guide post 631, preventing impurities on the guide post 631 from affecting the normal movement of the movable plate 64.

[0046] Furthermore, the cooling water entering the fixed guide seat 43 can flow out from its outlet 431, and the flowing cooling water flows into the upper water tank 21 after passing through the scoop 512. In this way, the flowing cooling water can drive the scoop 512, thereby driving the hollow shaft 51 to rotate.

[0047] Since the hollow shaft 51 is sleeved at both ends of the main shaft 5, it can be driven to rotate by friction when the main shaft 5 rotates. This allows the hollow shaft 51 to be driven not only by the main shaft 5 but also by the scoop 512, ensuring stable rotation of the hollow shaft 51. The rotation of the hollow shaft 51 thus drives the rotation of the fan blades 511, thereby improving the airflow efficiency within the pre-cooling water tank 2.

[0048] Furthermore, excess cooling water in the fixed water tank 41 can flow into the upper water tank 21 through the upper overflow port 42, while excess cooling water in the upper water tank 21 can flow into the lower water tank 23 through the lower overflow port 22. This ensures that the water level in the fixed water tank 41 and the upper water tank 21 is always level with their corresponding overflow ports.

[0049] Furthermore, multiple baffles 221 are arrayed below both the upper overflow port 42 and the lower overflow port 22. These baffles 221 can obstruct the overflow of cooling water, causing the overflowing cooling water to splash up due to the obstruction of the baffles 221. This increases the residence time of the overflowing cooling water in the air, thereby improving the cooling effect.

[0050] In the pre-cooling water tank 2, the cooling water flowing out from the connecting port 33 can exchange heat with the air for the first time when the water-carrying base 61 is driven. When the main shaft 5 rotates, the cooling water can be collected again through the inclined water-carrying trough 62, and it can exchange heat with the air for the second time when it flows to the fixed guide seat 43. Then, it can exchange heat with the air for the third time when it flows into the upper water tank 21 through the driving scoop 512. The arrangement of the upper overflow port 42 and the lower overflow port 22 allows the cooling water to exchange heat with the air during overflow. Furthermore, the rotation of the fan blades 511 can improve the airflow efficiency in the pre-cooling water tank 2, thereby improving the heat exchange efficiency of the cooling water.

[0051] The cooling water after passing through the pre-cooling water tank 2 can be effectively cooled. The cooled water is then sent to the cooling tower through the transfer pump assembly 24, which can effectively reduce the processing load of the cooling tower and reduce its energy consumption.

[0052] Furthermore, both the main shaft 5 and the hollow shaft 51 inside the precooling water tank 2 are driven by the gravity of the cooling water, and neither requires an external power source, thus saving energy costs.

[0053] Because hot air rises automatically, the hot air generated in the precooling water tank 2 due to heat exchange will automatically flow out through the dustproof net 25, while the cold air from the outside can automatically enter the precooling water tank 2 through the dustproof net 25. Furthermore, this device is installed and operates in an indoor constant temperature environment.

[0054] In this invention, the magnetic levitation centrifugal chiller unit 1 can deliver chilled water to the client after heat exchange to achieve constant temperature cooling. The pre-cooling water tank 2 can pre-cool the cooling water to reduce the temperature of the cooling water when it enters the chiller tower. This can effectively reduce the cooling water processing load of the chiller tower, thereby reducing the power consumption of the chiller tower and thus reducing the overall power consumption of the device, achieving the effect of energy saving.

[0055] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. An energy-saving, precision constant-temperature refrigeration device for chip manufacturing, characterized in that, include: A magnetic levitation centrifugal chiller unit (1) is provided with a pre-cooling water tank (2) on one side. The condenser drain pipe of the magnetic levitation centrifugal chiller unit (1) is connected to the pre-cooling water tank (2) through the water inlet channel (3), and there are two connecting ports (33) in the water inlet channel (3). The precooling water tank (2) is provided with an upper water tank (21) and a lower water tank (23), and cooling water flows unidirectionally between the upper water tank (21) and the lower water tank (23) through the lower overflow port (22); A fixed seat (4) is set inside the precooling water tank (2) and above the upper water tank (21). A main shaft (5) is rotatably set inside the fixed seat (4). Multiple water-holding seats (61) are adapted to the main shaft (5) corresponding to the communication port (33). A slanted water-holding trough (62) for holding water is opened on one side of the water-holding seat (61), and a water-holding bucket (65) for driving the main shaft (5) to rotate is opened on the other side of the water-holding seat (61). Hollow shaft (51) is rotatably sleeved on both ends of main shaft (5). Multiple scoops (512) are provided on each hollow shaft (51). Fan blades (511) are provided on one side of each scoop (512) on the hollow shaft (51). Water collected in the inclined water tank (62) flows to the scoop (512) through the fixed guide seat (43).

2. The energy-saving precision constant temperature refrigeration device for chip manufacturing according to claim 1, characterized in that, One end of the water inlet channel (3) is fixedly sleeved on the condenser drain pipe of the magnetic levitation centrifugal chiller unit (1), and the other end of the water inlet channel (3) extends into the precooling water tank (2) and is located on the top of the fixed base (4). A cover plate (31) is installed on the top of the water inlet channel (3). Two non-connected guide ramps (32) are set inside the water inlet channel (3), and a connecting port (33) is opened at the bottom of each guide ramp (32).

3. The energy-saving precision constant temperature refrigeration device for chip manufacturing according to claim 1, characterized in that, The fixed base (4) has a fixed water tank (41) inside. Multiple upper overflow ports (42) are provided on the fixed base (4) outside the fixed water tank (41). Multiple turbulence protrusions (221) are fixedly arranged on the outer walls of the upper overflow ports (42) and the lower overflow ports (22).

4. The energy-saving precision constant temperature refrigeration device for chip manufacturing according to claim 1, characterized in that, A main shaft (5) is rotatably mounted through the middle of the fixed base (4). Both ends of the main shaft (5) are connected to the inner wall of the pre-cooling water tank (2) through bearings. Two sets of support rods (6) are fixedly mounted on the main shaft (5). Each set of support rods (6) is arranged in a ring array around the center of the main shaft (5). A water-holding seat (61) is fixedly mounted at the end of each support rod (6), and each set of water-holding seats (61) is adapted to be located at the bottom of the connecting port (33).

5. The energy-saving precision constant temperature refrigeration device for chip manufacturing according to claim 1, characterized in that, The water hoppers (65) of the water-holding base (61) all face the connecting port (33). An upper fixing plate (63) is fixedly installed on the water-holding base (61) at the outlet of the inclined water-holding trough (62). Multiple guide columns (631) are fixedly and vertically installed on one side of the upper fixing plate (63), and the other end of the guide columns (631) is connected to the lower fixing plate (632).

6. The energy-saving precision constant temperature refrigeration device for chip manufacturing according to claim 5, characterized in that, A movable plate (64) is movably arranged between the upper fixed plate (63) and the lower fixed plate (632) through a guide post (631). A sub-plate (641) is fixedly arranged on the side of the movable plate (64) facing the upper fixed plate (63). The contact surfaces between the upper fixed plate (63) and the movable plate (64) are both made of magnetic material that is compatible and attracts each other.

7. The energy-saving precision constant temperature refrigeration device for chip manufacturing according to claim 6, characterized in that, The side of the sub-plate (641) facing the lower fixing plate (632) is provided with a reset groove (642), and the reset groove (642) is provided with multiple inclined grooves (643).

8. The energy-saving precision constant temperature refrigeration device for chip manufacturing according to claim 7, characterized in that, Both sides of the fixed seat (4) are fixed with a fixed guide seat (43) by a support frame. The water holding seat (61) passes through the top of the fixed guide seat (43). The top of the fixed guide seat (43) is fixed with a fixed horizontal plate (44). The top of the fixed horizontal plate (44) is fixed with an elastic plate (441). The sub-plate (641) contacts the elastic plate (441) when it moves.

9. The energy-saving precision constant temperature refrigeration device for chip manufacturing according to claim 8, characterized in that, The fixed guide seat (43) is provided with a guide groove, and the fixed guide seat (43) is provided with a water outlet (431) at the lowest point of the guide groove, and the water outlet (431) is located at the top of the spoon (512).

10. The energy-saving precision constant temperature refrigeration device for chip manufacturing according to claim 1, characterized in that, The top of the precooling water tank (2) is equipped with a dustproof net (25), and a delivery pump assembly (24) is installed in the lower water tank (23) on the precooling water tank (2).

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