Method for deducing control index of water pressure test for semiconductor cleaning water pipeline lengthened test section

Abstract

The application relates to a method for deducing the control index of a water pressure test of a semiconductor cleaning water pipeline lengthened test section, and specifically comprises the following steps: S1, construction of a water balance conceptual model; S2, analysis of the physical connotation of a qualified water pressure test of a 1km test pipeline section; S3, deduction of the test duration of the allowable pressure drop of the water pressure test of the lengthened test section; and S4, determination of the control index of the water pressure test of the lengthened test section. For the water pressure test of a large long-distance semiconductor water pipeline, auxiliary facilities such as blind plates and plugs need to be added along the pipeline at intervals of not more than 1km, and the water pressure test needs to be completed after each pipeline section is laid, thereby causing discontinuous construction period and affecting the construction progress; meanwhile, the engineering cost of the water pressure test of a 1km pipeline section is as high as 200,000 yuan in general cases; and the water pressure test of the lengthened test section can greatly save the manpower and material resources and save the engineering cost.

Description

Technical Field

[0001] This invention relates to the field of semiconductor cleaning system technology, and in particular to a method for deriving control parameters for water pressure testing of extended test sections of semiconductor cleaning water pipelines. Background Technology

[0002] Semiconductor cleaning water needs to meet extremely high purity requirements. Therefore, in clustered semiconductor production areas, laying semiconductor cleaning water pipelines can meet the semiconductor cleaning water needs of multiple plants.

[0003] According to the "Code for Construction and Acceptance of Water Supply and Drainage Pipeline Engineering" (GB50268-2008) and the "Technical Code for Prestressed Steel Cylinder Concrete Pipelines" (SL702-2015), unless otherwise specified in the code or design, the length of the pipe section for the hydrostatic test of pressure pipelines should not exceed 1.0 km. For large, long-distance water transmission pipelines, hydrostatic testing is conducted on sections not exceeding 1 km. This requires the installation of auxiliary hydrostatic testing facilities such as blind flanges and plugs along the pipeline for intervals not exceeding 1 km. Furthermore, each section of pipeline must undergo a hydrostatic test before subsequent construction can proceed, resulting in discontinuous construction periods, impacting construction progress, and increasing construction costs. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a method for deriving the control index of water pressure test for extended test section of semiconductor cleaning water pipeline, which enables water pressure test of extended test section, thereby improving work efficiency and saving engineering costs.

[0005] To solve the above-mentioned technical problems, the technical solution of the present invention is: a method for deriving control indicators of water pressure test for extended test sections of semiconductor cleaning water pipelines, the innovation of which lies in: specifically including the following steps:

[0006] S1: Construction of the water balance conceptual model: The relationship between pipeline pressure, equivalent leakage orifice diameter and leakage volume is calculated using the hydraulic orifice non-constant outflow formula; then, considering the water compressibility, the relationship between leakage volume and pressure drop is calculated.

[0007] S2: Physical Analysis of the Qualified Hydrostatic Test for a 1km Test Pipeline: Based on water balance, using the hydrostatic test pressure as the initial pressure and the start time of the hydrostatic test as the starting moment, calculate the leakage rate and corresponding end pressure values ​​for consecutive time periods until the test pressure drop is reached. Then, deduce the critical equivalent leakage orifice diameter corresponding to the allowable pressure drop and allowable leakage rate for the 1km test pipeline. and allowable pressure drop test duration ;

[0008] S3: Determination of allowable pressure drop test duration for extended test section hydrostatic testing: Adhere to the same physical requirements as the 1km hydrostatic test qualification, i.e., the extended hydrostatic test section also adopts the critical equivalent leakage orifice diameter of the 1km test pipe section. Repeat the same method for the 1km test pipeline, calculate the leakage rate and corresponding end pressure values ​​of the extended test section over continuous periods until the allowable pressure drop is reached, and then deduce the allowable pressure drop test duration for the extended test section. ;

[0009] S4: Determination of control indicators for extended test section hydrostatic test: The critical equivalent leakage diameter of the 1km test pipe section is used as the core control for qualification; the allowable pressure drop and allowable leakage volume of the 1km test pipe section are used as control indicators. The observation time needs to be extended by 15 minutes per 1km, i.e., extending the allowable pressure drop test time by 20 minutes as the hydrostatic test observation time. Therefore, the observation time for the extended test section is... min, where To extend the time.

[0010] Furthermore, the S1 water balance conceptual model is constructed as follows:

[0011] S1.1: Calculate the relationship between pipe pressure, equivalent leakage orifice diameter, and seepage rate using the hydraulic orifice unsteady outflow formula; the orifice outflow formula is as follows:

[0012] (1)

[0013] In the formula, —The flow coefficient of the orifice outflow is taken as 0.6~0.62; —Aperture area, m 2 ; —The water head relative to the orifice, m; g—represents the acceleration due to gravity;

[0014] S1.2: Furthermore, considering the compressibility of water, the correlation between seepage and pressure drop is calculated; considering water compressibility, pressure... Compressibility of water The relationship between them is as follows:

[0015] (2)

[0016] In the formula, —Compression ratio; —Pressure, MPa; The precise formula for calculating the compressed water volume in a pipeline is as follows:

[0017] (3)

[0018] In the formula, —Compressed water volume, m 3 ; —Pipe volume, m 3 The calculation of the actual water inflow into the pipeline should also take into account the pressure deformation of the pipeline and its deformation rate. The appropriate value can be selected based on the pipe material, ranging from 0.1% to 3%. The formula for calculating the actual total compressed water volume of the pipe is as follows:

[0019] (4)

[0020] in, For pipeline deformation rate, To compress the water volume;

[0021] S1.3: Calculation method for pipeline leakage and pressure drop: Start time of the time period At the water's head Under the action, the orifice flows out freely. End of time period The water head decreased to The duration is The outflow from the orifice reduces the amount of water inside the pipe. ;

[0022] (5)

[0023] (6)

[0024] in, for time High initial flow, for time High flow rate;

[0025] Time period length Internal average flow rate:

[0026] (7)

[0027] Based on water balance, the amount of leakage flowing out of the pipe:

[0028] (8)

[0029] Time period begins At the moment, at the water's head Under the influence of the action, the compressibility of the water in the pipeline, the compressed water volume, and the total water volume are respectively:

[0030] (9)

[0031] (10)

[0032] (11)

[0033] End of period At the water's edge Under the influence of the action, the compressibility of the water in the pipeline, the compressed water volume, and the total water volume are respectively:

[0034] (12)

[0035] (13)

[0036] (14)

[0037] The difference in the amount of compressed water inside the pipe is the leakage rate, therefore:

[0038] (15)

[0039] A trial-and-error algorithm is used to estimate the duration of the time period. Pressure head at the end of the time period The specific process is as follows:

[0040] (i) The start time of the first time period is the moment when water injection stops. =0, calculate the corresponding , ;

[0041] (ii) Assuming pressure head End time of corresponding period Calculate the corresponding , ;

[0042] calculate and ,if ,but If the trial calculation is correct, otherwise, re-assume. ;in The standard for allowable seepage volume;

[0043] The length of this period is The amount of water seepage is Pressure reduced to Where H2 and H1 are the heights of the water column, converted to the unit 1 mH2O ≈ 9806.65 Pa; the end time of this period is used. As the start point of the next time period, repeat steps (i) to (iii) until the pressure drop reaches 0.03 MPa.

[0044] Furthermore, the physical meaning of the qualified water pressure test for the S2: 1km test pipe section is analyzed as follows:

[0045] S2.1 Critical equivalent leakage pore size Determine: Preliminary estimate of equivalent leakage orifice diameter The initial pressure is the pressure from the water pressure test. The water pressure test started timing when the water supply was stopped. Time period, start time of the time period Trial calculation of continuous time period ( =1,2,…… n , n To achieve the allowable leakage rate and the corresponding pressure value at the end of the time period (corresponding to the allowable pressure drop), the allowable pressure drop and allowable leakage rate are calculated until the allowable pressure drop is reached. If the allowable pressure drop and allowable leakage rate meet the values ​​specified in "GB50268-2008 Code for Construction and Acceptance of Water Supply and Drainage Pipeline Engineering", then the equivalent leakage diameter at this point is the critical equivalent leakage diameter. ;

[0046] S2.2 Permissible pressure drop test duration Determine: at the critical equivalent leakage pore size Under these conditions, complete the test for the allowable pressure drop calculated over a continuous period of time. = + +……+ .

[0047] Furthermore, regarding S3: the calculation of the allowable pressure drop test duration for the extended test section hydrostatic test:

[0048] S3.1 The extended test section water pressure test follows the physical characteristics of a 1km test pipe section and also adopts the critical equivalent leakage orifice diameter that passes the 1km water pressure test. ;

[0049] S.2 At the critical equivalent leakage pore size Under these conditions, complete the test for the allowable pressure drop calculated over a continuous period of time. = + +……+ .

[0050] Furthermore, in S4: the control parameters for the extended test section water pressure test are determined;

[0051] The S4.1 extended test section uses a 1km test pipe section for allowable pressure drop and allowable leakage, which complies with the standard of "GB50268-2008 Code for Construction and Acceptance of Water Supply and Drainage Pipeline Engineering".

[0052] S4.2 Determine the observation time for the hydrostatic test For safety reasons, the observation period for the allowable pressure drop is extended by 20 minutes, thus lengthening the observation time of the test section. min, where To extend the time.

[0053] The advantages of this invention are:

[0054] 1) In this invention, a water balance conceptual model is constructed based on the non-constant outflow formula of the orifice in hydraulics and considering water compression. Based on the water balance, the initial pressure of the water pressure test is taken as the initial pressure, and the water pressure test is stopped as the starting time. The leakage volume and the corresponding pressure value at the end of the period are calculated continuously until the test pressure drop is reached. The critical equivalent leakage orifice diameter and the test duration of the allowable pressure drop and allowable seepage volume corresponding to the 1km test pipeline are derived. The same physical connotation as the 1km water pressure test is followed, that is, the extended water pressure test section also adopts the critical equivalent leakage orifice diameter of the 1km test pipe section. The same method as the 1km test pipe water pressure test is repeated to calculate the leakage volume and the corresponding pressure value at the end of the period continuously until the test pressure drop is reached. The test duration of the allowable pressure drop of the extended test section water pressure test is derived. The control indicators of the extended test section water pressure test can adopt the allowable seepage volume and allowable pressure drop of the 1km test pipe section, but the observation time should be extended by a certain period based on the allowable pressure drop test duration of the extended test section water pressure test.

[0055] 2) For the hydrostatic test of large-scale, long-distance semiconductor water pipelines, it is necessary to install auxiliary facilities such as blind flanges and plugs along the pipeline for no more than 1 km. After each section of pipeline is laid, a hydrostatic test must be completed before subsequent construction can proceed, which causes discontinuity in the construction period and affects the construction progress. At the same time, under normal circumstances, the cost of hydrostatic testing for 1 km of pipeline section is as high as 200,000 yuan. Using extended test sections for hydrostatic testing can greatly save manpower and material expenses and reduce project costs. Attached Figure Description

[0056] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0057] Figure 1 This is a schematic diagram of a non-constant outflow from an orifice according to the present invention. Detailed Implementation

[0058] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0059] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0060] like Figure 1 The method for deriving control parameters for water pressure testing of an extended test section of a semiconductor cleaning water pipeline, as shown, specifically includes the following steps:

[0061] S1: Construction of the water balance conceptual model: The relationship between pipeline pressure, equivalent leakage orifice diameter and leakage volume is calculated using the hydraulic orifice non-constant outflow formula; then, considering the water compressibility, the relationship between leakage volume and pressure drop is calculated.

[0062] S2: Physical Analysis of the Qualified Hydrostatic Test for a 1km Test Pipeline: Based on water balance, using the hydrostatic test pressure as the initial pressure and the start time of the hydrostatic test as the starting moment, calculate the leakage rate and corresponding end pressure values ​​for consecutive time periods until the test pressure drop is reached. Then, deduce the critical equivalent leakage orifice diameter corresponding to the allowable pressure drop and allowable leakage rate for the 1km test pipeline. and allowable pressure drop test duration ;

[0063] S3: Determination of allowable pressure drop test duration for extended test section hydrostatic testing: Adhere to the same physical requirements as the 1km hydrostatic test qualification, i.e., the extended hydrostatic test section also adopts the critical equivalent leakage orifice diameter of the 1km test pipe section. Repeat the same method for the 1km test pipeline, calculate the leakage rate and corresponding end pressure values ​​of the extended test section over continuous periods until the allowable pressure drop is reached, and then deduce the allowable pressure drop test duration for the extended test section. ;

[0064] S4: Determination of control indicators for extended test section hydrostatic test: The critical equivalent leakage diameter of the 1km test pipe section is used as the core control for qualification; the allowable pressure drop and allowable leakage volume of the 1km test pipe section are used as control indicators. The observation time needs to be extended by 15 minutes per 1km, i.e., extending the allowable pressure drop test time by 20 minutes as the hydrostatic test observation time. Therefore, the observation time for the extended test section is... min, where To extend the time.

[0065] The S1 water balance conceptual model is constructed as follows:

[0066] S1.1: Calculate the relationship between pipe pressure, equivalent leakage orifice diameter, and seepage rate using the hydraulic orifice unsteady outflow formula; the principle of unsteady outflow is shown in Figure 1, and the orifice outflow formula is as follows:

[0067] (1)

[0068] In the formula, —The flow coefficient of the orifice outflow is taken as 0.6~0.62; —Aperture area, m 2 ; —The water head relative to the orifice, m; g—represents the acceleration due to gravity;

[0069] S1.2: Furthermore, considering the compressibility of water, the correlation between seepage and pressure drop is calculated; considering water compressibility, pressure... Compressibility of water The relationship between them is as follows:

[0070] (2)

[0071] In the formula, —Compression ratio; —Pressure, MPa; The precise formula for calculating the compressed water volume in a pipeline is as follows:

[0072] (3)

[0073] In the formula, —Compressed water volume, m 3 ; —Pipe volume, m 3 The calculation of the actual water inflow into the pipeline should also take into account the pressure deformation of the pipeline and its deformation rate. The appropriate value can be selected based on the pipe material, ranging from 0.1% to 3%. The formula for calculating the actual total compressed water volume of the pipe is as follows:

[0074] (4)

[0075] in, For pipeline deformation rate, To compress the water volume;

[0076] S1.3: Calculation method for pipeline leakage and pressure drop: Start time of the time period At the water's head Under the action, the orifice flows out freely. End of time period The water head decreased to The duration is = The outflow from the orifice reduces the amount of water inside the pipe. ;

[0077] (5)

[0078] (6)

[0079] in, for time High initial flow, for time High flow rate;

[0080] Time period length Internal average flow rate:

[0081] (7)

[0082] Based on water balance, the amount of leakage flowing out of the pipe:

[0083] (8)

[0084] Time period begins At the moment, at the water's head Under the influence of the action, the compressibility of the water in the pipeline, the compressed water volume, and the total water volume are respectively:

[0085] (9)

[0086] (10)

[0087] (11)

[0088] End of period At the water's edge Under the influence of the action, the compressibility of the water in the pipeline, the compressed water volume, and the total water volume are respectively:

[0089] (12)

[0090] (13)

[0091] (14)

[0092] The difference in the amount of compressed water inside the pipe is the leakage rate, therefore:

[0093] (15)

[0094] A trial-and-error algorithm is used to estimate the duration of the time period. Pressure head at the end of the time period The specific process is as follows:

[0095] (i) The start time of the first time period is the moment when water injection stops. =0, calculate the corresponding , ;

[0096] (ii) Assuming pressure head End time of corresponding period Calculate the corresponding , ;

[0097] calculate and ,if ,but If the trial calculation is correct, otherwise, re-assume. ;in The standard for allowable seepage volume;

[0098] The length of this period is The amount of water seepage is Pressure reduced to Where H2 and H1 are the heights of the water column, converted to the unit 1 mH2O ≈ 9806.65 Pa; the end time of this period is used. As the start point of the next time period, repeat steps (i) to (iii) until the pressure drop reaches 0.03 MPa.

[0099] Analysis of the physical implications of the qualified hydrostatic test for the 1km test pipe section in section S2:

[0100] S2.1 Critical equivalent leakage pore size Determine: Preliminary estimate of equivalent leakage orifice diameter The initial pressure is the pressure from the water pressure test. The water pressure test started timing when the water supply was stopped. Time period, start time of the time period Trial calculation of continuous time period ( =1,2,…… n , n To achieve the allowable leakage rate and the corresponding pressure value at the end of the time period (corresponding to the allowable pressure drop), the allowable pressure drop and allowable leakage rate are calculated until the allowable pressure drop is reached. If the allowable pressure drop and allowable leakage rate meet the values ​​specified in "GB50268-2008 Code for Construction and Acceptance of Water Supply and Drainage Pipeline Engineering", then the equivalent leakage diameter at this point is the critical equivalent leakage diameter. .

[0101] S2.2 Permissible pressure drop test duration Determine: at the critical equivalent leakage pore size Under these conditions, complete the test for the allowable pressure drop calculated over a continuous period of time. = + +……+ .

[0102] S3: Determination of the allowable pressure drop test duration for the extended test section hydrostatic test:

[0103] S3.1 The extended test section water pressure test follows the physical characteristics of a 1km test pipe section and also adopts the critical equivalent leakage orifice diameter that passes the 1km water pressure test. ;

[0104] S.2 At the critical equivalent leakage pore size Under these conditions, complete the test for the allowable pressure drop calculated over a continuous period of time. = + +……+ .

[0105] S4: Determination of control parameters for the extended test section water pressure test;

[0106] The S4.1 extended test section uses a 1km test pipe section for allowable pressure drop and allowable leakage, which complies with the standard of "GB50268-2008 Code for Construction and Acceptance of Water Supply and Drainage Pipeline Engineering".

[0107] S4.2 Determine the observation time for the hydrostatic test For safety reasons, the observation period for the allowable pressure drop is extended by 20 minutes, thus lengthening the observation time of the test section. min, where To extend the time.

[0108] Table 1: Physical Analysis of Allowable Pressure Drop and Allowable Infiltration Volume per km (using relevant parameters)

[0109]

[0110] The calculation process for S1 and S2 is shown in Table 2. The critical equivalent leakage pore diameter for different pipe diameters is also shown in Table 2. Allowable pressure drop duration See columns ② and ③ in Table 2.

[0111] Table 2: Allowable pressure drop, allowable leakage, and allowable pressure drop duration for 1km pipes of different diameters

[0112]

[0113] Step 3: Extend the allowable pressure drop duration of the test section. See Table 3.

[0114] Table 3: Permissible pressure drop duration for extended test sections

[0115]

[0116] Step 4, allow pressure drop duration and the duration of hydrostatic test observation See Table 4.

[0117] Table 4: Allowable pressure drop duration and hydrostatic test observation duration for extended test sections

[0118]

[0119] Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the present invention. Various changes and modifications can be made to the present invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed.

Claims

1. A method for deriving control parameters for water pressure testing of an extended test section of a semiconductor cleaning water pipeline, characterized in that: Specifically, the following steps are included: S1: Construction of the water balance conceptual model: The relationship between pipeline pressure, equivalent leakage orifice diameter and leakage volume is calculated using the hydraulic orifice non-constant outflow formula; then, considering the water compressibility, the relationship between leakage volume and pressure drop is calculated. S1.1: Calculate the relationship between pipe pressure, equivalent leakage orifice diameter, and seepage rate using the hydraulic orifice unsteady outflow formula; the orifice outflow formula is as follows: （1） In the formula, —The flow coefficient of the orifice outflow is taken as 0.6~0.62; —Aperture area, m 2 ; —The water head relative to the orifice, m; g—represents the acceleration due to gravity; S1.2: Furthermore, considering the compressibility of water, the correlation between seepage and pressure drop is calculated; considering water compressibility, pressure... Compressibility of water The relationship between them is as follows: （2） In the formula, —Compression ratio; —Pressure, MPa; The precise formula for calculating the compressed water volume in a pipeline is as follows: （3） In the formula, —Compressed water volume, m 3 ; —Pipe volume, m 3 The calculation of the actual water inflow into the pipeline should also take into account the pressure deformation of the pipeline and its deformation rate. The appropriate value can be selected based on the pipe material, ranging from 0.1% to 3%. The formula for calculating the actual total compressed water volume of the pipe is as follows: （4） in, For pipeline deformation rate, To compress the water volume; S1.3: Calculation method for pipeline leakage and pressure drop: Start time of the time period At the water's head Under the action, the orifice flows out freely. End of time period The water head decreased to The duration is = The outflow from the orifice reduces the water volume inside the pipe. ; （5） （6） in, for time High initial flow, for time High flow rate; duration Internal average flow: （7） Based on water balance, the amount of leakage flowing out of the pipe: （8） Time period begins At the moment, at the water's head Under the influence of the action, the compressibility of the water in the pipeline, the compressed water volume, and the total water volume are respectively: （9） （10） （11） End of period At the moment, at the water's head Under the influence of the action, the compressibility of the water in the pipeline, the compressed water volume, and the total water volume are respectively: （12） （13） （14） The difference in the amount of compressed water inside the pipe is the leakage rate, therefore: （15） A trial-and-error algorithm is used to estimate the duration of the time period. Pressure head at the end of the time period The specific process is as follows: (i) The start time of the first time period is the moment when water injection stops. =0, calculate the corresponding , ; (ii) Assuming pressure head End time of corresponding period Calculate the corresponding , ; (iii) Calculation and ,if ,but If the trial calculation is correct, otherwise, re-assume. ;in The standard for allowable seepage volume; The length of this period is The amount of water seepage is Pressure reduced to Where H2 and H1 are the heights of the water column, converted to the unit 1mH2O ≈ 9806.65 Pa; the end time of this period is used. As the start time of the next time period, repeat steps (i) to (iii) until the pressure drop reaches 0.03 MPa; S2: Physical Analysis of the Qualified Hydrostatic Test for a 1km Test Pipeline: Based on water balance, using the hydrostatic test pressure as the initial pressure and the start time of the hydrostatic test as the starting moment, calculate the leakage rate and corresponding end pressure values ​​for consecutive time periods until the test pressure drop is reached. Then, deduce the critical equivalent leakage orifice diameter corresponding to the allowable pressure drop and allowable leakage rate for the 1km test pipeline. and allowable pressure drop test duration ; S3: Determination of allowable pressure drop test duration for extended test section hydrostatic testing: Adhere to the same physical requirements as the 1km hydrostatic test qualification, i.e., the extended hydrostatic test section also adopts the critical equivalent leakage orifice diameter of the 1km test pipe section. Repeat the same method for the 1km test pipeline, calculate the leakage rate and corresponding end pressure values ​​of the extended test section over continuous periods until the allowable pressure drop is reached, and then deduce the allowable pressure drop test duration for the extended test section. ; S4: Determination of control indicators for extended test section hydrostatic test: The critical equivalent leakage diameter of the 1km test pipe section is used as the core control for qualification; the allowable pressure drop and allowable leakage volume of the 1km test pipe section are used as control indicators. The observation time needs to be extended by 15 minutes per 1km, i.e., extending the allowable pressure drop test time by 20 minutes as the hydrostatic test observation time. Therefore, the observation time for the extended test section is... (min), where To extend the time.

2. The method for deriving control parameters for water pressure testing of an extended test section of a semiconductor cleaning water pipeline according to claim 1, characterized in that: Analysis of the physical implications of the qualified hydrostatic test for the 1km test pipe section in section S2: S2.1 Critical equivalent leakage pore size Determine: Preliminary estimate of equivalent leakage orifice diameter The initial pressure is the pressure from the water pressure test. The water pressure test started timing when the water supply was stopped. Time period, start time of the time period Trial calculation of continuous time period ( =1,2,…… n , n To achieve the allowable leakage rate and the corresponding pressure value at the end of the time period (corresponding to the allowable pressure drop), the allowable pressure drop and allowable leakage rate are calculated until the allowable pressure drop is reached. If the allowable pressure drop and allowable leakage rate meet the values ​​specified in "GB50268-2008 Code for Construction and Acceptance of Water Supply and Drainage Pipeline Engineering", then the equivalent leakage diameter at this point is the critical equivalent leakage diameter. ; S2.2 Permissible pressure drop test duration Determine: at the critical equivalent leakage pore size Under these conditions, complete the test for the allowable pressure drop calculated over a continuous period of time. = + +……+ .

3. The method for deriving control parameters for water pressure testing of an extended test section of a semiconductor cleaning water pipeline according to claim 1, characterized in that: S3: Determination of the allowable pressure drop test duration for the extended test section hydrostatic test: S3.1 The extended test section water pressure test follows the physical characteristics of a 1km test pipe section and also adopts the critical equivalent leakage orifice diameter that passes the 1km water pressure test. ; S.2 At the critical equivalent leakage pore size Under these conditions, complete the test for the allowable pressure drop calculated over a continuous period of time. = + +……+ .

4. The method for deriving control parameters for water pressure testing of an extended test section of a semiconductor cleaning water pipeline according to claim 1, characterized in that: S4: Determination of control parameters for the extended test section water pressure test; The S4.1 extended test section uses a 1km test pipe section for allowable pressure drop and allowable leakage, which complies with the standard of "GB50268-2008 Code for Construction and Acceptance of Water Supply and Drainage Pipeline Engineering". S4.2 Determine the observation time for the hydrostatic test For safety reasons, the observation period for the allowable pressure drop is extended by 20 minutes, thus lengthening the observation time of the test section. min, where To extend the time.

Images