Rapid heat treatment equipment temperature filtering method, equipment, system and storage medium
By collecting and filtering abnormal temperature data in real time in rapid heat treatment equipment, the problem of false alarms caused by temperature fluctuations is solved, improving equipment stability and production efficiency, and reducing costs.
Patent Information
- Application Number
- CN202510991496.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-18
- Publication Date
- 2025-10-31
AI Technical Summary
In existing rapid heat treatment equipment, the instantaneous acquisition of temperature data is easily affected by fluctuations, leading to false alarms, affecting equipment stability and increasing labor costs. Furthermore, hardware upgrades are costly and difficult to dynamically adjust.
Temperature data is collected in real time via serial communication, and abnormal temperature data that is mistakenly triggered is filtered out at the software level. An alarm is triggered only when abnormal data is read multiple times in a row. Anomalies are determined by comparing the absolute value of the set value with the actual value and the compensation value.
It reduced the frequency of equipment alarms, improved equipment stability and production efficiency, saved on hardware upgrades and labor costs, and achieved flexibility and reliability in temperature monitoring.
Smart Images
Figure CN120873630A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor front-end technology, specifically to temperature filtering methods, equipment, systems, and storage media for rapid thermal processing equipment. Background Technology
[0002] Semiconductor front-end processes primarily focus on wafer fabrication and testing, which are technically challenging and require high-precision, high-cleanliness equipment and environments. Rapid Thermal Processing (RTP) is a critical process used to activate dopants, repair damage after ion implantation, and alter the physical properties of thin films. Precise temperature control is crucial in RTP processes. Since the current temperature is acquired instantaneously, errors in the measured values can easily trigger stringent alarm mechanisms, affecting equipment stability and increasing labor costs.
[0003] In existing technologies, temperature data is acquired instantaneously, making it susceptible to temperature fluctuations and leading to false alarms. Furthermore, improving the accuracy of temperature monitoring typically requires expensive hardware upgrades, such as high-precision sensors and advanced heating systems, indicating a high dependence on hardware. Additionally, temperature monitoring systems are usually static; once parameters are set, they are difficult to dynamically adjust based on actual conditions, resulting in poor accuracy. False alarms from temperature monitoring systems also frequently interrupt production processes, leading to low production efficiency. Frequent false alarms also increase labor costs, requiring frequent intervention from maintenance personnel.
[0004] Therefore, a new solution for temperature filtration in rapid heat treatment equipment is needed. Summary of the Invention
[0005] In view of this, embodiments of this specification provide a method, apparatus, system, and storage medium for temperature filtration in rapid heat treatment equipment.
[0006] The embodiments in this specification provide the following technical solutions:
[0007] This specification provides an embodiment of a temperature filtering method for a rapid thermal processing device, applied to semiconductor manufacturing equipment, including:
[0008] Temperature data is collected in real time during equipment operation; wherein, the temperature data is collected via serial communication, the master unit queries the slave unit for temperature information, and the slave unit responds and returns the temperature data;
[0009] The collected temperature data is filtered to automatically remove falsely triggered abnormal temperature data. Only when multiple abnormal temperature data are read consecutively is the temperature considered abnormal and an alarm mechanism is triggered. The determination of abnormal temperature data is based on comparing the absolute value of the set value and the actual value with the compensation value. If the value is greater than the compensation value, it is determined to be abnormal temperature data.
[0010] This specification also provides an embodiment of a rapid heat treatment equipment temperature filtering device, applied to semiconductor manufacturing equipment, including:
[0011] The data acquisition module is used to collect temperature data in real time during equipment operation; wherein, the temperature data is collected via serial communication, the master unit queries the slave unit for temperature information, and the slave unit responds and returns the temperature data;
[0012] The monitoring module is used to filter the collected temperature data and automatically filter out falsely triggered abnormal temperature data. Only when abnormal temperature data is read multiple times in a row is it judged as an abnormal temperature and an alarm mechanism is triggered. The judgment of abnormal temperature data is based on comparing the absolute value of the set value and the actual value with the compensation value. If it is greater than the compensation value, it is judged as abnormal temperature data.
[0013] This specification also provides a rapid heat treatment equipment temperature filtration system, including: a memory, a processor, and a computer program, wherein the computer program is stored in the memory, and the processor runs the computer program to execute the rapid heat treatment equipment temperature filtration method described above.
[0014] This specification also provides a readable storage medium storing a computer program, which, when executed by a processor, is used to implement the rapid heat treatment equipment temperature filtering method described in the above technical solution.
[0015] Compared with the prior art, the beneficial effects that at least one technical solution adopted in the embodiments of this specification can achieve include at least:
[0016] This application presents a novel temperature filtering solution for rapid heat treatment equipment through software optimization. Without modifying the hardware, it adds temperature filtering functionality by combining software control logic with actual situational judgments, reducing alarm frequency and improving equipment stability. The entire judgment process is simple and low-complexity, and the software conditions can be modified through configuration, allowing parameters to be changed at any time based on actual conditions, resulting in high convenience and practicality. Furthermore, it is based on a mature equipment data acquisition algorithm, possessing strong reliability and a short testing and verification cycle. No hardware modifications are required, saving the economic costs of hardware adjustments. Attached Figure Description
[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0018] Figure 1 This is a flowchart of a temperature filtration method for a rapid heat treatment device provided in this application;
[0019] Figure 2 This is a schematic diagram of a temperature filtration method for a rapid heat treatment device provided in this application;
[0020] Figure 3 This is a schematic diagram of the temperature filter structure of a rapid heat treatment device provided in this application;
[0021] Figure 4 This is a schematic diagram illustrating a normal operating effect provided in an embodiment of this application;
[0022] Figure 5 This is a schematic diagram of an abnormal operation effect provided in an embodiment of this application. Detailed Implementation
[0023] The embodiments of this application will now be described in detail with reference to the accompanying drawings.
[0024] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0025] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.
[0026] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.
[0027] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.
[0028] In semiconductor manufacturing, Rapid Thermal Processing (RTP) is a critical process used to activate dopants, repair damage after ion implantation, and alter the physical properties of thin films. Precise temperature control is paramount in RTP processes. Current technology requires equipment to monitor temperature data at 1-second intervals. Due to the short acquisition cycle, temperature fluctuations occur during the process, and the host computer reads instantaneous data. There is a chance of occasionally acquiring significantly fluctuating temperatures, which is not the desired data (the required data is temperature variation within a specified range). This leads to frequent equipment alarms, which disrupt the current process flow, reduce equipment efficiency, and increase the cost of manual troubleshooting.
[0029] In light of this, semiconductor front-end processes primarily focus on wafer fabrication and testing, which are technically challenging and require high-precision and high-cleanliness equipment and environments. Therefore, the inventors designed a novel temperature filtering scheme for rapid thermal processing equipment to address the shortcomings of existing technologies. On one hand, the scheme designs the communication mechanism, transmission format, and error correction methods between the master and slave devices during temperature data acquisition to ensure accurate and reliable temperature data acquisition. On the other hand, it monitors and filters temperature data, dynamically optimizing real-time monitoring through software and filtering out falsely triggered abnormal data by comparing set values with actual values, thereby improving the stability and reliability of the equipment. These two parts together constitute the core function of the rapid thermal processing equipment temperature filtering system, ensuring stable and efficient monitoring and processing of temperature data during equipment operation.
[0030] The technical solutions provided by the various embodiments of this application are described below with reference to the accompanying drawings.
[0031] like Figure 1 and Figure 2 As shown in the embodiments of this application, a rapid thermal processing equipment temperature filtering method is provided, which is particularly applicable to the front-end process of semiconductor manufacturing and focuses on the optimization of semiconductor equipment software functions and system improvement.
[0032] Rapid heat treatment equipment requires ensuring that temperatures remain within a specific range during the process. Therefore, monitoring and filtering of erroneously collected abnormal temperature data is crucial. If an anomaly occurs during operation, the equipment will alarm, necessitating the termination of the current process flow and allowing maintenance personnel to intervene and repair the alarm. Erroneously collected abnormal temperature data can hinder normal problem-solving methods. Adding temperature monitoring functionality optimizes the alarm mechanism and improves equipment stability. Currently, due to hardware limitations, refining the software control logic is essential to better integrate hardware stability with software, thus better meeting the practical needs of rapid heat treatment equipment.
[0033] By filtering temperature data from rapid heat treatment equipment and optimizing abnormal temperature data, the results are further integrated with reality, thereby reducing the probability of equipment alarms and improving equipment stability.
[0034] The novel temperature filtering method for rapid heat treatment equipment designed in this application includes: S101, real-time acquisition of temperature data during equipment operation; wherein the temperature data acquisition adopts serial communication, the host queries the slave device for temperature information, and the slave device responds and returns the temperature data; S102, filtering the acquired temperature data, automatically filtering out falsely triggered abnormal temperature data; only when abnormal temperature data is read multiple times consecutively is it determined to be an abnormal temperature and an alarm mechanism is triggered; wherein the judgment of abnormal temperature data is based on comparing the absolute value of the set value and the actual value with the compensation value, and if it is greater than the compensation value, it is determined to be abnormal temperature data.
[0035] Specifically, the serial port communication method for temperature data acquisition is single-master / multiple-slave. Only the master device can send a query for temperature information (start communication). Slave devices see this query for temperature information, accept and process it, and then return a response.
[0036] The system filters and monitors temperature data. After the device is powered on and the software is started, the software background continuously reads temperature data in real time to check whether the current temperature control status of the device is normal. It automatically filters out falsely triggered abnormal temperature data, and only reads abnormal temperature data multiple times consecutively (configurable within the software) before determining it as an abnormal temperature. Abnormal temperature data is judged using the absolute value of the set value and the actual value, plus a compensation value. If the value is greater than the compensation value, it is considered abnormal temperature data and is only recorded; otherwise, it is not counted.
[0037] This application, in monitoring temperature changes, requires no hardware modifications. Only the software control logic is modified to make judgments based on actual conditions, adding a temperature filtering function to reduce alarm frequency, improve equipment stability, and save on manpower review costs. For example, judging based on software control logic and actual conditions is easy to implement, and the entire judgment process is simple and low in complexity. Furthermore, the judgment software conditions can be modified through configuration, allowing parameters to be changed at any time according to actual conditions, resulting in high convenience and practicality. Moreover, the temperature monitoring and filtering functions are based on mature equipment data acquisition algorithms, possessing strong reliability and a short testing and verification cycle. Finally, no hardware modifications are required, saving on the economic costs of hardware adjustments.
[0038] In some embodiments, the serial communication method includes a single-master / multi-slave communication mode. The master device can send a query for temperature information to a specified slave device, or broadcast the query for temperature information to all slave devices. In the single-master / multi-slave communication mode, the master device (master) is responsible for sending the query for temperature information and initiating the communication process. The slave device (slave) receives the query information from the master, processes it, and returns a response. The master can send a query for temperature information to a specified slave device, and the slave device processes it and returns a response. The master can also broadcast the query for temperature information to all slave devices.
[0039] In some embodiments, when broadcasting a query for temperature information, the slave device only performs the specified function and does not return a response message; the slave device only returns a response message when it receives a query for itself. In this case, the slave device only performs the specified function and does not return a response message. A response message is only returned when the slave device receives a query for itself.
[0040] In some embodiments, the transmission format for querying temperature information includes the slave address (or broadcast), a function code defining the request content, and an error check field; the transmission format for the response information includes an acknowledgment field for the request content, response data, and an error temperature check field. The transmission formats for querying temperature information and response information are as follows: Figure 3 As shown.
[0041] In some embodiments, the error verification field uses the CRC (Cyclical Redundancy Check) method for error verification.
[0042] For example, there is a standard serial communication mode for signal transmission. However, within a single communication mechanism, devices must be in the same mode. One byte (8 bits) of data is transmitted directly in this way. The error check algorithm can also differ depending on the transmission mode. Furthermore, in serial mode, the CRC (Cyclical Redundancy Check) method is used.
[0043] In some embodiments, after reading an abnormal temperature data point, the counting begins and the count is decremented from a set number. If the count is less than or equal to half of the set number, a warning message is issued. If the current batch of decrementing reaches a negative value, it indicates that the temperature data is abnormal and an error message needs to be reported. If the recording of abnormal temperature data returns to normal during the decrementing process, the counting restarts from the next counting stage.
[0044] When an abnormal temperature data point is detected, the recording begins, counting down from a set number. If the count reaches less than or equal to half of the set number, a warning message is issued. If the current batch's count reaches a negative value, it indicates abnormal temperature data, and an error message is required. In other words, a positive value indicates normal operation, and a negative value indicates an abnormality.
[0045] The detailed description is as follows: For example, if the set number of abnormal temperature data entries (temp_count) is 5, and an abnormal temperature data record appears 3 times, a warning should be issued. Only if it appears more than 5 times is the temperature data considered abnormal. If an abnormal temperature data record appears for the 3rd time, the counting process needs to restart from 5 in the next counting phase. That is, after recording 5 consecutive abnormal temperature data entries, if there is one normal one, the counting process restarts from 5 and decreases sequentially.
[0046] Implementation description of the counting method function: temp_abs takes the absolute value, temp_setbsr sets the value, temp_bsrvalve reads the actual value, temp_setoff compensates the value, and set_temp_count is the first time the value is set.
[0047]
[0048] After a long period of operation on the software and equipment, the following screenshots show the results without any issues. Figure 4 As shown.
[0049] After the software is started, it will continuously monitor and read temperature data in a loop and compare it with the actual configuration. The temperature change is under real-time monitoring. Log information of normal current temperature data will also be recorded, as will the time of the internal loop of the software and whether the number of times it decreases will also be recorded.
[0050] The screenshot shows the result after the software malfunctions. Figure 5 As shown, the software adds a rapid heat treatment temperature filtering function. Each time abnormal temperature data occurs, it is recorded. In the next loop, the temperature data is read again and compared with the actual configuration. If it is again determined to be abnormal, the count will be continuously decreased from the current count. This process repeats until abnormal temperature data is consistently recorded, at which point the count will continue to decrease until it becomes negative. At this point, the software will first issue a warning message and then trigger an alarm. Once an abnormal temperature alarm occurs, it requires handling by engineers or other professional personnel.
[0051] Through comparative analysis of the experimental results, it was found that adding a temperature filtering function to the software had a very significant effect. The filtering of abnormal temperature data made the software run stably.
[0052] This application is based on research into alarms triggered by false temperature data acquisition in industrial production and on improving equipment stability. Through practical work and learning experience, and combined with actual conditions, falsely acquired data is filtered out, and only the necessary data is collected. This reduces false alarms caused by inadequate temperature filtering to almost 0%, greatly improving equipment stability. Based on this, it proves the functionality of temperature filtering in rapid heat treatment equipment and its applicability. In summary, the method used in this application improves the temperature filtering method and system for rapid heat treatment equipment, saving time spent manually reviewing alarms, reducing labor costs, improving equipment operational stability, and directly increasing equipment capacity, bringing direct and effective economic value. The content described in this paper is not only applicable to temperature data acquisition methods but also to other data acquisition errors caused by hardware problems.
[0053] In conjunction with the above embodiments, this application also provides a rapid heat treatment equipment temperature filtration device, applied to semiconductor manufacturing equipment, comprising:
[0054] The data acquisition module is used to collect temperature data in real time during equipment operation; wherein, the temperature data is collected via serial communication, the master unit queries the slave unit for temperature information, and the slave unit responds and returns the temperature data;
[0055] The monitoring module is used to filter the collected temperature data and automatically filter out falsely triggered abnormal temperature data. Only when abnormal temperature data is read multiple times in a row is it judged as an abnormal temperature and an alarm mechanism is triggered. The judgment of abnormal temperature data is based on comparing the absolute value of the set value and the actual value with the compensation value. If it is greater than the compensation value, it is judged as abnormal temperature data.
[0056] In conjunction with the above embodiments, this application also provides a rapid heat treatment equipment temperature filtration system, including: a memory, a processor, and a computer program, wherein the computer program is stored in the memory, and the processor runs the computer program to execute the rapid heat treatment equipment temperature filtration method as described in any of the above technical solutions.
[0057] In conjunction with the above embodiments, this application also provides a readable storage medium storing a computer program, which, when executed by a processor, is used to implement the temperature filtering method for a rapid heat treatment device as described in any one of the technical solutions.
[0058] The same or similar parts between the various embodiments in this specification can be referred to interchangeably. Each embodiment focuses on describing the differences from other embodiments. In particular, the product embodiments described later are relatively simple in description since they correspond to the methods, and relevant parts can be referred to the descriptions in the system embodiments.
[0059] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.
Claims
1. A temperature filtration method for a rapid heat treatment device, characterized in that, Used in semiconductor manufacturing equipment, including: Temperature data is collected in real time during equipment operation. The temperature data is collected via serial communication, where the master device queries the slave device for temperature information, and the slave device responds and returns the temperature data. The collected temperature data is filtered to automatically remove falsely triggered abnormal temperature data. Only when multiple abnormal temperature data are read consecutively is the temperature considered abnormal and an alarm mechanism is triggered. The determination of abnormal temperature data is based on comparing the absolute value of the set value and the actual value with the compensation value. If the value is greater than the compensation value, it is determined to be abnormal temperature data.
2. The temperature filtration method for rapid heat treatment equipment according to claim 1, characterized in that: The serial communication method includes a single master / multiple slave communication mode, where the master sends a query for temperature information to a specified slave or broadcasts a query for temperature information to all slaves.
3. The temperature filtration method for rapid heat treatment equipment according to claim 2, characterized in that: When broadcasting a query for temperature information, the slave device only performs the specified function and does not return a response message; the slave device only returns a response message when querying itself.
4. The temperature filtration method for rapid heat treatment equipment according to claim 3, characterized in that: The transmission format for querying temperature information includes the slave address (or broadcast), the function code defining the request content, and the error check field; The transmission format of the response information includes the confirmation field of the request content, the response data, and the error temperature check field.
5. The temperature filtration method for rapid heat treatment equipment according to claim 4, characterized in that: The error temperature verification field uses the CRC (Cyclical Redundancy Check) method for error verification.
6. The temperature filtration method for rapid heat treatment equipment according to claim 1, characterized in that: Once an abnormal temperature data point is read, the number of occurrences is recorded, and the count is decremented from the set number. If the calculated number is less than or equal to half of the set number, a warning message will be issued; If the current batch decreases to a negative value, it indicates that the temperature data is abnormal and an error message needs to be reported. If the abnormal temperature data returns to normal during the decreasing process, the calculation restarts from the next counting phase.
7. A temperature filtration device for rapid heat treatment equipment, characterized in that, Used in semiconductor manufacturing equipment, including: The data acquisition module is used to collect temperature data in real time during equipment operation. The temperature data is acquired via serial communication, where the host machine queries the slave machine for temperature information, and the slave machine responds and returns the temperature data. The monitoring module is used to filter the collected temperature data and automatically filter out falsely triggered abnormal temperature data. Only when abnormal temperature data is read multiple times in a row is it judged as an abnormal temperature and an alarm mechanism is triggered. The judgment of abnormal temperature data is based on comparing the absolute value of the set value and the actual value with the compensation value. If it is greater than the compensation value, it is judged as abnormal temperature data.
8. The temperature filtration device for rapid heat treatment equipment according to claim 7, characterized in that: The serial communication method includes a single master / multiple slave communication mode, where the master sends a query for temperature information to a specified slave or broadcasts a query for temperature information to all slaves.
9. A temperature filtration system for a rapid heat treatment device, characterized in that, include: The device includes a memory, a processor, and a computer program, the computer program being stored in the memory, and the processor executing the computer program to perform the temperature filtration method for a rapid heat treatment apparatus as described in any one of claims 1-6.
10. A readable storage medium, characterized in that, The readable storage medium stores a computer program, which, when executed by a processor, is used to implement the temperature filtering method for a rapid heat treatment device as described in any one of claims 1-6.