Power supply device for semiconductor device

Abstract

The invention discloses a power supply device for semiconductor equipment, the semiconductor equipment is divided into a first-level load, a second-level load and a third-level load according to power supply quality requirements, and the first-level load adopts a 2N static UPS and a diesel generator system to provide an uninterruptible power supply; the secondary load adopts 2N commercial power series high-power voltage sag power supply equipment to provide an uninterruptible power supply, the tertiary load adopts 2N commercial power to supply power, and the high-power voltage sag power supply equipment unit adopts a single-to-many mode and provides a backup unit. According to the power supply device for the semiconductor equipment, the semiconductor equipment is graded according to the power supply quality requirement and is supplied with power respectively, so that the power supply quality and the voltage grade requirement can be greatly improved, the power supply requirement of semiconductor equipment production is met, and the power supply device has good economical efficiency and is easy to popularize and apply.

Description

Technical Field

[0001] This invention relates to a power supply device, and more particularly to a power supply device for semiconductor devices. Background Technology

[0002] The electrical systems of semiconductor equipment manufacturers include power supply and distribution systems, electrical control and protection systems, lighting and maintenance socket systems, lightning protection and grounding systems, automatic fire alarm systems, and integrated cabling systems. The special feature of these systems is the power supply equipment. Due to the special nature of the equipment, power outages in semiconductor plants can cause huge losses.

[0003] In addition, precision equipment such as lithography machines, plasma implanters, cleaning machines, grinding machines, various pumps for special gases and chemicals, and their corresponding control panels have high requirements for power quality and voltage levels. Therefore, their power supply reliability requirements are higher than those of general factories. How to meet the complexity and high requirements of their power supply system while taking into account economy has always been a research hotspot in this field. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a power supply device for semiconductor equipment that can greatly improve power quality and voltage level requirements, meet the power supply requirements for semiconductor equipment production, and has good economic efficiency and is easy to promote and apply.

[0005] The technical solution adopted by the present invention to solve the above-mentioned technical problems is to provide a power supply device for semiconductor equipment. The semiconductor equipment is divided into primary load, secondary load and tertiary load according to power quality requirements. The primary load is provided with uninterruptible power by a 2N static UPS plus diesel generator system. The secondary load is provided with uninterruptible power by a 2N mains series high-power voltage sag power supply unit. The tertiary load is powered by 2N mains power. The high-power voltage sag power supply unit adopts a one-to-many mode and provides a backup unit.

[0006] Furthermore, the proportion of the primary load is 15%.

[0007] Furthermore, the primary load includes a lithography machine and IT control equipment.

[0008] Furthermore, the cabinets of the high-power voltage sag power supply equipment units and backup units adopt a left-in, right-out wiring method; the cabinets include thyristor control cabinets, power cabinets and energy storage cabinets, and the cabinets adopt a single busbar segmented design, with two busbar segments forming a group, and the interconnection switch between each group is automatically switched. When any power supply fails or is under maintenance, the busbar interconnection circuit breaker is put into operation, and the other power supply supplies power to this busbar segment.

[0009] Furthermore, the third-level load consists of lighting equipment and auxiliary production equipment, and the third-level load is provided with emergency power by a self-provided diesel generator.

[0010] Compared with the prior art, the present invention has the following beneficial effects: The power supply device for semiconductor equipment provided by the present invention classifies and supplies power to semiconductor equipment according to power quality requirements, thereby greatly improving power quality and voltage level requirements, meeting the power supply requirements for semiconductor equipment production, and has good economic efficiency and is easy to promote and apply. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the power supply device architecture for semiconductor devices according to the present invention; Figure 2 This is a schematic diagram of the cabinet layout for the power supply device of the present invention for semiconductor equipment; Figure 3 This is a schematic diagram of the primary copper busbar routing in the cabinet of the power supply device for semiconductor equipment according to the present invention; Figure 4 This is a schematic diagram of the cabinet type for the power supply device of the present invention for semiconductor equipment; Figure 5 This is a schematic diagram of the main busbar connection between cabinets for the power supply device of semiconductor equipment according to the present invention. Detailed Implementation

[0012] The present invention will now be further described with reference to the accompanying drawings and embodiments.

[0013] Power supply types include N-type, E-type, D-type, and U-type. N-type power is AC mains power; E-type power provides emergency power for standby diesel generators; D-type power provides uninterruptible power for high-power voltage sag power supply equipment; and U-type power provides uninterruptible power for static UPS equipment. Although U-type power provides higher power quality and continuous power supply to the load, configuring a large number of static UPSs will occupy too much space and impose higher requirements on fire safety design.

[0014] For this purpose, please see Figure 1 The power supply device for semiconductor equipment provided by this invention divides the semiconductor equipment into primary loads, secondary loads, and tertiary loads according to power quality requirements. The primary loads are provided with uninterruptible power by a 2N static UPS plus diesel generator system. The secondary loads are provided with uninterruptible power by a 2N mains power series high-power voltage sag power supply unit. The tertiary loads are powered by 2N mains power. The high-power voltage sag power supply unit adopts a one-to-many configuration and provides backup units. The secondary loads account for 50% of the total power supply, which can meet the power supply needs of most semiconductor equipment and ensure that fluctuations in mains power 4-6 times per year, each lasting 30-300ms, will not affect the normal operation of the secondary loads.

[0015] The power supply device for semiconductor equipment provided by this invention classifies and supplies power to semiconductor equipment according to power quality requirements, thereby greatly improving power quality and voltage level requirements, meeting the power supply requirements of semiconductor equipment production, and offering excellent economic benefits and easy application. Preferably, the primary load accounts for 15%, and the primary load includes lithography machines and IT control equipment, etc.

[0016] As a preferred embodiment, the power supply device for semiconductor equipment provided by the present invention adopts a symmetrical layout of medium-voltage power supply unit and backup unit with left-in, right-in, and middle low-voltage feedout, making the layout of multiple cabinets more compact. Left 1 is a medium-voltage ring main unit, left 2 is a transformer cabinet, and left 3 is an enlarged view of the high-power voltage sag power supply unit. Figure 3 The rightmost unit is a medium-voltage ring main unit (1), the rightmost unit is a transformer cabinet (2), and the rightmost unit is a high-power voltage sag supply equipment (see enlarged view). Figure 3 The middle section is the feeder cabinet, such as... Figure 2 As shown; due to the symmetrical design layout, the primary copper busbar routing of the high-power voltage sag power supply equipment is as follows: Figure 3 As shown; the specific multiple cabinets include low-voltage incoming cabinets, control cabinets (thyristors), maintenance bypass cabinets, low-voltage outgoing cabinets, power cabinets (IGBTs), and energy storage cabinets, such as... Figure 4 As shown; the specific quantity is set according to actual needs; the main bus connection diagram between each rack is as follows. Figure 5 As shown, the design adopts the principle of single busbar segmentation, with two busbar segments forming a group. The interconnection switch between each group is automatically switched. When any power supply fails or is under maintenance, the busbar interconnection circuit breaker is put into operation, and power is supplied to this busbar segment from the other power supply.

[0017] The power supply device for semiconductor equipment provided by the present invention includes lighting equipment and auxiliary production equipment as the three-level loads, accounting for approximately 35%; the three-level loads can be provided with emergency power by a self-provided diesel generator, and power can be restored within 130ms.

[0018] Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications and improvements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be defined by the claims.

Claims

1. A power supply device for semiconductor equipment, characterized in that, The semiconductor equipment is divided into primary load, secondary load and tertiary load according to power quality requirements. The primary load is provided with uninterruptible power by a 2N static UPS plus diesel generator system. The secondary load is provided with uninterruptible power by a series high-power voltage sag power supply unit powered by mains power. The tertiary load is powered by 2N mains power. The high-power voltage sag power supply unit adopts a one-to-many method and provides backup units.

2. The power supply device for semiconductor devices as described in claim 1, characterized in that, The primary load accounts for 15%.

3. The power supply device for semiconductor devices as described in claim 1, characterized in that, The primary load includes a lithography machine and IT control equipment.

4. The power supply device for semiconductor devices as described in claim 1, characterized in that, The cabinets of the high-power voltage sag power supply units and backup units adopt a left-in, right-out wiring method. The cabinets include thyristor control cabinets, power cabinets and energy storage cabinets. The cabinets adopt a single busbar segmented design, with two busbar segments forming a group. The interconnection switch between each group is automatically switched. When any power supply fails or is under maintenance, the busbar interconnection circuit breaker is put into operation, and the other power supply supplies power to this busbar segment.

5. The power supply device for semiconductor devices as described in claim 1, characterized in that, The three-level loads are lighting equipment and auxiliary production equipment, and emergency power for the three-level loads is provided by self-provided diesel generators.

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