Friction nanometer generator and preparation method thereof
By optimizing the structure and selecting materials for the triboelectric nanogenerator, and using perfluoropolyether compound solutions and flexible polymer materials, a highly efficient and stable energy conversion was achieved. This solved the problems of low output and insufficient stability of existing triboelectric nanogenerators, reduced manufacturing costs, and made it suitable for distributed energy harvesting and wearable devices.
Patent Information
- Application Number
- CN202511076227.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-01
- Publication Date
- 2025-10-31
AI Technical Summary
Existing triboelectric nanogenerators have low output voltage and current, limited material selection, complex manufacturing processes, high costs, and insufficient stability, especially in harsh environments.
The design employs a symmetrical multilayer structure, including an organic nanostructure layer, an oxide layer, and a substrate layer. The organic nanostructure layer is prepared by molecular self-assembly using a solution of perfluoropolyether compounds, and flexible polymer materials such as PET, PE, or PI are selected as the substrate layer. The oxide layer is prepared by combining magnetron sputtering technology to form a highly efficient triboelectric and electrostatic induction effect.
It significantly improves the energy conversion efficiency and stability of triboelectric nanogenerators, reduces manufacturing costs, and is suitable for distributed energy harvesting and wearable electronic devices.
Smart Images

Figure CN120880229A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of generator technology, and in particular to a triboelectric nanogenerator and its preparation method. Background Technology
[0002] With the increasing global demand for renewable energy, the development of efficient and reliable energy harvesting technologies has become a research hotspot. Triboelectric nanogenerators, as an emerging energy harvesting device, convert mechanical energy into electrical energy through the triboelectric effect and electrostatic induction effect generated by mechanical motion. Compared with traditional energy harvesting methods, triboelectric nanogenerators have advantages such as simple structure, low cost, and ease of miniaturization, making them suitable for distributed energy harvesting, self-powered sensor networks, wearable electronic devices, and other fields.
[0003] However, existing triboelectric nanogenerators still face several challenges in practical applications. First, traditional triboelectric nanogenerators have low output voltage and current, making it difficult to meet the direct power supply requirements of most electronic devices. Second, the limited selection of materials and complex manufacturing processes lead to high costs. Third, existing designs often lack sufficient stability and durability, especially performing poorly during long-term operation in harsh environments. To overcome these problems, researchers are constantly exploring new material combinations and structural designs to improve the output performance and stability of triboelectric nanogenerators.
[0004] This invention aims to provide an improved triboelectric nanogenerator and its preparation method. By optimizing the structure of the power generation film, its energy conversion efficiency and reliability are significantly improved, and the manufacturing cost is reduced, thereby promoting the practical application and development of triboelectric nanogenerator technology. Summary of the Invention
[0005] The technical problem to be solved by the present invention is to provide a triboelectric nanogenerator and its preparation method, in view of the above-mentioned defects of the prior art.
[0006] To achieve the above objectives, the present invention provides a triboelectric nanogenerator, comprising a first electrode plate, a power generation film, and a second electrode plate arranged sequentially from top to bottom;
[0007] The power-generating thin film comprises, from top to bottom, a first organic nanostructure layer, a first oxide layer, a substrate layer, a second oxide layer, and a second organic nanostructure layer.
[0008] There are gaps between the power generation film and the first electrode plate, and between the power generation film and the second electrode plate; there are differences in triboelectric sequence between the first organic nanostructure layer and the first electrode plate, and between the second organic nanostructure layer and the second electrode plate;
[0009] The first electrode plate and the second electrode plate are the voltage and current output electrodes of the triboelectric nanogenerator;
[0010] The two ends of the power-generating film are fixed by insulating clamps, which are vertically connected between the first electrode plate and the second electrode plate.
[0011] In a triboelectric nanogenerator of the present invention, the material used for the substrate layer is selected from PET, PE or PI, and the thickness of the substrate layer is 50 μm to 500 μm.
[0012] In a triboelectric nanogenerator of the present invention, the materials of the first oxide layer and the second oxide layer are selected from at least one of titanium dioxide, manganese oxide, molybdenum oxide, silicon oxide or zinc oxide, and the thickness is 10 nm to 100 nm.
[0013] In a triboelectric nanogenerator of the present invention, the materials of the first organic nanostructure layer and the second organic nanostructure layer are perfluoropolyether compound solutions with a thickness of 3 nm to 20 nm.
[0014] In a triboelectric nanogenerator of the present invention, both the first electrode plate and the second electrode plate are flat conductive electrodes made of copper or aluminum.
[0015] This invention also provides a method for preparing a triboelectric nanogenerator, used to prepare the triboelectric nanogenerator as described above, the method comprising the following steps:
[0016] Step S1: Prepare the first electrode plate and the second electrode plate, and connect the wires to the first electrode plate and the second electrode plate;
[0017] Step S2: An oxide layer is prepared on the upper and lower surfaces of the substrate by magnetron sputtering;
[0018] Step S3: An organic nanostructure layer is prepared on the surface of the oxide layer by vacuum evaporation, solution spraying or inkjet printing to obtain a power generation thin film.
[0019] Step S4: Assemble the first electrode plate, the power generation film, and the second electrode plate together in a top-to-bottom order.
[0020] In a method for preparing a triboelectric nanogenerator according to the present invention, in step S3, the material used to prepare the organic nanostructure layer is a solution of a perfluoropolyether compound.
[0021] This invention brings significant technical advantages and practical application value through the following specific designs and technical means:
[0022] 1. High energy conversion efficiency: Employing a symmetrical multilayer structure design, including an organic nanostructure layer, an oxide layer, and a substrate layer, the overall energy conversion efficiency of the device is significantly improved. Driven by wind or water flow, the power-generating thin film can periodically contact and separate from the electrode plate, generating efficient triboelectric and electrostatic induction effects, achieving high open-circuit voltage and short-circuit current output.
[0023] 2. Excellent interfacial bonding strength: By introducing a metal oxide layer as a transition layer, the bonding strength between the organic nanostructure layer and the substrate layer is enhanced. Perfluoropolyether materials can form chemical bonds with the metal oxide surface through molecular self-assembly, generating oriented nanowire structures. This not only improves surface roughness and triboelectric charge density but also effectively extends the charge accumulation path, thereby significantly improving the output performance of the triboelectric generator.
[0024] 3. Low-cost large-scale manufacturing: Compared with the high cost of preparing metal oxide nanowires by dry etching or wet etching in traditional processes, this invention uses perfluoropolyether solutions to prepare organic nanostructure layers through molecular self-assembly, realizing controllable, low-cost, and large-scale preparation of high-performance nanostructure layers, reducing the overall manufacturing cost and improving practicality.
[0025] 4. Excellent mechanical properties and stability: Using flexible polymer materials such as PET, PE, or PI as the substrate layer provides excellent flexibility, lightweight characteristics, and moderate surface energy, making it easy to deform and vibrate under mechanical excitation from wind or water. This facilitates effective contact and separation between the electrode and the power generation film. Furthermore, these materials are less expensive than traditional materials such as PTFE, further reducing overall manufacturing costs and enhancing practicality and potential for large-scale application.
[0026] In summary, this invention optimizes the structure and fabrication method of triboelectric nanogenerators, thereby reducing manufacturing costs and significantly improving the energy conversion efficiency and stability of the devices, providing strong support for the practical application of triboelectric nanogenerator technology. Attached Figure Description
[0027] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this invention, illustrate exemplary embodiments of the invention and are used to explain the invention, but do not constitute an undue limitation of the invention. In the drawings:
[0028] Figure 1 A schematic diagram of a triboelectric nanogenerator structure provided in an embodiment of the present invention.
[0029] Figure 2 This is a schematic diagram of the power generation cycle of a triboelectric nanogenerator provided in an embodiment of the present invention.
[0030] Figure 3 This is a schematic diagram of the steps involved in the preparation of a triboelectric nanogenerator according to an embodiment of the present invention.
[0031] In the attached diagram:
[0032] 10. First electrode plate;
[0033] 20. Power-generating thin film; 21. First organic nanostructure layer; 22. First oxide layer; 23. Substrate layer; 24. Second oxide layer; 25. Second organic nanostructure layer;
[0034] 30. Second electrode plate;
[0035] 40. Insulating clamps. Detailed Implementation
[0036] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0037] The embodiments of the present invention will now be described in further detail with reference to the accompanying drawings. It should be understood that the embodiments described herein are for illustrative and explanatory purposes only and are not intended to limit the scope of the invention.
[0038] This invention provides a triboelectric nanogenerator and its fabrication method, which is particularly suitable for efficiently converting environmental mechanical energy such as wind or water energy into electrical energy. This triboelectric nanogenerator achieves high output performance and stability through optimized structural design of the power generation thin film, and has broad application prospects, especially in distributed energy harvesting, self-powered sensor networks, and wearable electronic devices.
[0039] like Figure 1 As shown, a preferred embodiment of the present invention provides a triboelectric nanogenerator, comprising a first electrode plate 10, a power generation film 20, and a second electrode plate 30 arranged sequentially from top to bottom. The power generation film 20 comprises a first organic nanostructure layer 21, a first oxide layer 22, a substrate layer 23, a second oxide layer 24, and a second organic nanostructure layer 25 stacked sequentially from top to bottom, forming a symmetrical multilayer structure. This symmetrical structure not only improves the overall stability of the device but also facilitates efficient energy conversion under bidirectional mechanical force.
[0040] The power-generating film 20 has minute gaps between itself and the first electrode plate 10, and between itself and the second electrode plate 30, allowing the power-generating film 20 to warp when driven by wind or water flow, thus periodically contacting and separating from the corresponding electrode plates. The first electrode plate 10 and the second electrode plate 30 are the voltage and current output electrodes of the triboelectric nanogenerator; the two ends of the power-generating film 20 are fixed by insulating clamps 40, which are vertically connected between the first electrode plate 10 and the second electrode plate 30. There are significant differences in triboelectric electrode sequence between the first organic nanostructure layer 21 and the first electrode plate 10, and between the second organic nanostructure layer 25 and the second electrode plate 30. During the periodic contact and separation process, a significant triboelectric effect can be generated, and periodic charge transfer can be achieved through electrostatic induction, thereby generating AC voltage and current signals. Figure 2 The diagram shown is a complete power generation cycle.
[0041] In this embodiment of the invention, the substrate layer 23 is selected from flexible polymer materials such as PET (polyethylene terephthalate), PE (polyethylene), or PI (polyimide), with a thickness of 50 μm to 500 μm. These materials possess good flexibility, lightweight properties, and moderate surface energy, making them easy to deform and vibrate under mechanical excitation by wind or water, which is beneficial for achieving effective contact and separation between the electrode plate and the power generation film. Furthermore, compared to the traditionally used PTFE (polytetrafluoroethylene) material, the above-mentioned substrate is less expensive, which helps to reduce overall manufacturing costs and improve practicality and the potential for large-scale application.
[0042] Further, the materials of the first oxide layer 22 and the second oxide layer 24 are selected from at least one of titanium dioxide (TiO2), manganese oxide (MnO), molybdenum oxide (MoO3), silicon oxide (SiO2), or zinc oxide (ZnO), and the thickness of the first oxide layer 22 and the second oxide layer 24 is controlled between 10 nm and 100 nm. The main function of the oxide layer is to serve as a transition layer between the organic nanostructure layer and the substrate layer, thereby enhancing the interfacial bonding strength, improving surface uniformity, and regulating surface electrical properties. In a preferred embodiment of the present invention, a SiO2 layer is deposited on the surface of a PET substrate as an oxide layer using a magnetron sputtering process. In this process, SiO2 and PET are mainly bonded by physical adsorption. Although it is difficult for strong chemical bonds to form between them, the high particle energy during magnetron sputtering can promote close contact between SiO2 and the PET surface to a certain extent, thereby achieving a relatively stable interfacial bonding. In addition, to further improve the interfacial bonding force, the PET substrate can be pretreated with plasma to increase its surface activity and wettability, thereby improving the adhesion performance of subsequent deposited layers.
[0043] In this embodiment of the invention, the first organic nanostructure layer 21 and the second organic nanostructure layer 25 are made of perfluoropolyether compound solutions with a thickness of 3 nm to 20 nm. The organic nanostructure layers are formed by depositing the perfluoropolyether compound solution onto the surface of the oxide layer through vacuum evaporation, solution spraying, or inkjet printing. Perfluoropolyether compounds are linear polymers; if directly coated onto a polymer substrate, they typically adhere only through physical adsorption, resulting in weak adhesion and easy detachment. However, in this invention, by introducing a metal oxide layer as an intermediate layer, the bonding ability between the organic nanostructure layer and the substrate is significantly enhanced. Specifically, one end of the perfluoropolyether molecule can interact with the metal oxide surface through a molecular self-assembly process, forming a chemical bond. For example, oxygen or fluorine atoms in the perfluoropolyether molecule can interact with metal ions (such as Ti) on the metal oxide surface. 4+ Zn 2+ By forming coordination or covalent bonds, oriented nanowire structures are grown on the surface of metal oxides. This nanowire structure not only improves surface roughness and increases the triboelectric charge density per unit area, but also effectively extends the charge accumulation path, thus significantly improving the output performance of the triboelectric generator. Furthermore, perfluoropolyether compounds are highly electronegative fluorine-containing materials, which also contribute to improving triboelectric generation efficiency. This structural design avoids the high cost associated with traditional dry or wet etching processes for preparing metal oxide nanowires, while simultaneously achieving the goal of controllable, low-cost, and large-scale preparation of high-performance organic nanostructure layers.
[0044] In a preferred embodiment, both the first electrode plate 10 and the second electrode plate 30 are flat conductive electrodes made of copper (Cu) or aluminum (Al), possessing good conductivity and processing performance. The two electrode plates are of identical size and maintain the same distance from the power generation film, ensuring symmetrical response characteristics of the device under bidirectional excitation. During actual operation, when wind or water flow acts on the power generation film, its flexible structure undergoes periodic bending deformation, resulting in alternating contact and separation with the upper and lower electrodes. During this process, due to the difference in triboelectric sequence between the organic nanostructure layer and the metal electrodes, a large number of opposite charges are generated, forming an alternating current through electrostatic induction between the electrodes. Repeated contact-separation motion continuously induces charge transfer, thereby achieving continuous energy output.
[0045] In summary, this invention provides a novel, high-performance, and low-cost triboelectric nanogenerator. By introducing an oxide layer as a transition layer and utilizing perfluoropolyether materials to form an organic nanostructure layer through molecular self-assembly, efficient and stable triboelectric power generation is achieved. This structural design not only simplifies the manufacturing process and reduces production costs but also provides strong support for large-scale promotion and engineering applications.
[0046] like Figure 3 As shown in the figure, this embodiment of the invention also provides a method for preparing a triboelectric nanogenerator, used to prepare the triboelectric nanogenerator as described above, the method comprising the following steps:
[0047] Step S1: Prepare a first electrode plate and a second electrode plate, and connect wires to the first and second electrode plates. Both the first and second electrode plates are flat conductive electrodes made of copper or aluminum, and have the same area.
[0048] Step S2 involves preparing oxide layers on the upper and lower surfaces of the substrate using magnetron sputtering. The oxide layer material is at least one of titanium dioxide, manganese oxide, molybdenum oxide, silicon oxide, and zinc oxide. The process for preparing the oxide layer is the same as existing technologies. For example, if a titanium dioxide oxide layer is to be prepared, a high-purity titanium target is selected, and the titanium dioxide layer is deposited on the surface of the substrate under the action of oxygen.
[0049] Step S3 involves preparing an organic nanostructure layer on the surface of the oxide layer using vacuum evaporation, solution spraying, or inkjet printing to obtain a power-generating thin film. The material used to prepare the organic nanostructure layer is a solution of a perfluoropolyether compound, where the linear polymer structure in the solution grows a thin nanowire structure on the metal oxide layer via molecular self-assembly. The thickness of the organic nanostructure layer depends on the concentration of the perfluoropolyether compound solution.
[0050] Step S4: Assemble the first electrode plate, the power generation film, and the second electrode plate together in a top-to-bottom order. In this embodiment of the invention, the power generation film is equidistant from the first and second electrode plates.
[0051] To verify the feasibility and performance advantages of this invention, the applicant completed a specific experimental prototype. In this prototype, the dimensions of the power generation film are 1m × 0.1m × 22mm, the dimensions of the electrode plate are 1m × 0.1m × 6mm, and the initial distance between the power generation film and the upper and lower electrodes is 10mm–300mm. Test results show that under wind speeds of 3m / s–6m / s, the open-circuit voltage can reach 1800V–3000V, and the short-circuit current ranges from 0.1mA–0.2mA, demonstrating excellent energy conversion efficiency and output stability.
[0052] This invention brings significant technical advantages and practical application value through the following specific designs and technical means:
[0053] 1. High energy conversion efficiency: Employing a symmetrical multilayer structure design, including an organic nanostructure layer, an oxide layer, and a substrate layer, the overall energy conversion efficiency of the device is significantly improved. Driven by wind or water flow, the power-generating thin film can periodically contact and separate from the electrode plate, generating efficient triboelectric and electrostatic induction effects, achieving high open-circuit voltage and short-circuit current output.
[0054] 2. Excellent interfacial bonding strength: By introducing a metal oxide layer as a transition layer, the bonding strength between the organic nanostructure layer and the substrate layer is enhanced. Perfluoropolyether materials can form chemical bonds with the metal oxide surface through molecular self-assembly, generating oriented nanowire structures. This not only improves surface roughness and triboelectric charge density but also effectively extends the charge accumulation path, thereby significantly improving the output performance of the triboelectric generator.
[0055] 3. Low-cost large-scale manufacturing: Compared with the high cost of preparing metal oxide nanowires by dry etching or wet etching in traditional processes, this invention uses perfluoropolyether solutions to prepare organic nanostructure layers through molecular self-assembly, realizing controllable, low-cost, and large-scale preparation of high-performance nanostructure layers, reducing the overall manufacturing cost and improving practicality.
[0056] 4. Excellent mechanical properties and stability: Using flexible polymer materials such as PET, PE, or PI as the substrate layer provides excellent flexibility, lightweight characteristics, and moderate surface energy, making it easy to deform and vibrate under mechanical excitation from wind or water. This facilitates effective contact and separation between the electrode and the power generation film. Furthermore, these materials are less expensive than traditional materials such as PTFE, further reducing overall manufacturing costs and enhancing practicality and potential for large-scale application.
[0057] In summary, this invention optimizes the structure and fabrication method of triboelectric nanogenerators, thereby reducing manufacturing costs and significantly improving the energy conversion efficiency and stability of the devices, providing strong support for the practical application of triboelectric nanogenerator technology.
[0058] The above are merely specific embodiments of the present invention and should not be construed as limiting the scope of the present invention. Equivalent variations made by those skilled in the art based on this invention, as well as changes well-known to those skilled in the art, should still fall within the scope of the present invention.
Claims
1. A triboelectric nanogenerator, characterized in that, It includes a first electrode plate (10), a power generation film (20), and a second electrode plate (30) arranged sequentially from top to bottom; The power generation thin film (20) includes a first organic nanostructure layer (21), a first oxide layer (22), a substrate layer (23), a second oxide layer (24), and a second organic nanostructure layer (25) stacked sequentially from top to bottom; There are gaps between the power generation film (20) and the first electrode plate (10) and between the power generation film (20) and the second electrode plate (30); there are differences in triboelectric sequence between the first organic nanostructure layer (21) and the first electrode plate (10) and between the second organic nanostructure layer (25) and the second electrode plate (30); The first electrode plate (10) and the second electrode plate (30) are the voltage and current output electrodes of the triboelectric nanogenerator; The two ends of the power generation film (20) are fixed by insulating clamps (40), which are vertically connected between the first electrode plate (10) and the second electrode plate (30).
2. The triboelectric nanogenerator according to claim 1, characterized in that, The material used in the substrate layer (23) is selected from PET, PE or PI, and the thickness of the substrate layer (23) is 50um to 500um.
3. The triboelectric nanogenerator according to claim 1, characterized in that, The materials of the first oxide layer (22) and the second oxide layer (24) are selected from at least one of titanium dioxide, manganese oxide, molybdenum oxide, silicon oxide or zinc oxide, and the thickness is 10 nm to 100 nm.
4. A triboelectric nanogenerator according to claim 3, characterized in that, The materials of the first organic nanostructure layer (21) and the second organic nanostructure layer (25) are perfluoropolyether compound solutions with a thickness of 3 nm to 20 nm.
5. A triboelectric nanogenerator according to claim 1, characterized in that, Both the first electrode plate (10) and the second electrode plate (30) are flat conductive electrodes made of copper or aluminum.
6. A method for preparing a triboelectric nanogenerator, used to prepare the triboelectric nanogenerator as described in any one of claims 1-5, characterized in that, The method includes the following steps: Step S1: Prepare the first electrode plate and the second electrode plate, and connect the wires to the first electrode plate and the second electrode plate; Step S2: An oxide layer is prepared on the upper and lower surfaces of the substrate by magnetron sputtering; Step S3: An organic nanostructure layer is prepared on the surface of the oxide layer by vacuum evaporation, solution spraying or inkjet printing to obtain a power generation thin film. Step S4: Assemble the first electrode plate, the power generation film, and the second electrode plate together in a top-to-bottom order.
7. The method for preparing a triboelectric nanogenerator according to claim 6, characterized in that, In step S3, the material used to prepare the organic nanostructure layer is a solution of perfluoropolyether compound.
