A substrate tension adjusting device based on roll-to-roll CVD coating

Abstract

The present application relates to the technical field of CVD coating, and particularly relates to a substrate tension adjusting device based on a roll-to-roll CVD coating, which comprises a box body, a first screw rod, a pipeline and a movable block, a reaction chamber is installed in the box body, a plurality of guide rollers are installed in the box body, adjusting rollers are installed between the guide rollers, the first screw rod is rotatably installed in the box body, a mounting seat is slidably installed in the box body, the mounting seat is threadedly connected with the first screw rod, sleeve sleeves are fixedly and symmetrically connected in the mounting seat, pistons are slidably installed on the inner walls of the sleeve sleeves, fixed blocks are fixedly installed at the ends, away from each other, of the two pistons, and a buffer system composed of the sleeve sleeves, the pistons and nitrogen is provided, which can provide flexible buffering when the adjusting rollers move up and down, effectively relieving the impact of instantaneous tension change on the film substrate. When the adjusting rollers descend or ascend, the sleeve sleeves in the corresponding direction can automatically inject nitrogen, smooth adjustment is realized by using the compressibility of the gas, and the risk of substrate breakage due to stretching is significantly reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of CVD coating, in particular to a substrate tension adjusting device based on roll-to-roll CVD coating. BACKGROUND

[0002] In the process of roll-to-roll CVD coating, the tension stability of the substrate (especially thin film substrate) directly affects the coating quality. The traditional tension adjusting device often has the following problems: first, there is a lack of effective buffer mechanism in the adjusting process. When the adjusting part moves quickly, the substrate is easily stretched too much or damaged due to instantaneous tension mutation, especially for thin film substrate with thin thickness and poor toughness, the risk of damage is higher. Second, the linkage between tension adjustment and gas buffer is insufficient, it is difficult to automatically switch the input path of buffer gas according to the adjustment direction (up or down), which requires manual intervention or complex external control system, not only increasing the operation complexity, but also affecting the adjustment accuracy due to response lag. Third, the transmission structure of some devices lacks one-way limiting function, which is easy to appear reverse shaking in the adjusting process, leading to tension fluctuation and affecting the uniformity of coating. In addition, the buffer effect is suddenly changed due to unstable gas pressure during gas path switching, which further increases the possibility of substrate damage. These problems make it difficult for the traditional device to meet the demand of high-precision and high-stability adjustment of substrate tension in roll-to-roll CVD coating, restricting the improvement of coating product quality and production efficiency.

[0003] Therefore, we propose a substrate tension adjusting device based on roll-to-roll CVD coating. SUMMARY

[0004] The purpose of the present application is to provide a substrate tension adjusting device based on roll-to-roll CVD coating to solve the problems raised in the background.

[0005] To achieve the above purpose, the present application provides the following technical scheme: a substrate tension adjusting device based on roll-to-roll CVD coating, comprising a box body, a first screw, a pipe and a movable block, a reaction chamber is installed inside the box body, a plurality of guide rollers are installed inside the box body, an adjusting roller is installed between the plurality of guide rollers, a first screw is rotatably installed inside the box body, a mounting seat is slidably installed inside the box body, the mounting seat is threadedly connected with the first screw, a sleeve is fixedly connected inside the mounting seat in a symmetrical manner, a piston is slidably installed on the inner wall of the sleeve, a fixed block is fixedly installed at the end of each piston away from the other, the adjusting roller is fixedly connected with one side of the fixed block, a pipe is communicated at the end of each sleeve extending out of the mounting seat, an installation frame is communicated at one end of each pipe, the installation frame is fixedly installed on one side of the mounting seat, a movable block is slidably installed inside the installation frame, a Z-shaped gas channel is installed inside the movable block, and a gas inlet pipe is connected to one end of the Z-shaped gas channel.

[0006] Preferably, the top and bottom ends of the movable block are provided with sliding grooves, the sliding grooves are respectively provided with air leakage slots at the outlet of the Z-shaped air passage, and one side of the movable block is provided with a second screw rod.

[0007] Preferably, the two ends of the second screw rod are rotatably provided with gears, and the inside of the box body is fixedly connected with two racks, and the two gears are respectively meshed with the corresponding racks.

[0008] Preferably, the inside of the gear is designed as hollow, the inside wall of the gear is fixedly provided with a ratchet wheel, the two ends of the second screw rod are fixedly connected with a pad, the inside of the pad is rotatably connected with a pawl, the pad and the pawl are fixedly connected with a first spring, and the pawl is engaged with the ratchet wheel.

[0009] Preferably, one end of the second screw rod is threadedly connected with a threaded sliding block, a groove is equidistantly formed in the inside of the threaded sliding block, a second spring is fixedly connected to the inside wall of the groove, a sliding plate is slidably installed on the inside wall of the groove, one side of the sliding plate is fixedly connected with one end of the second spring, and the side of the sliding plate away from the second spring is fixedly connected with a jacking post.

[0010] Preferably, the side of the movable block close to the second screw rod is fixedly connected with a connecting sleeve, a clamping groove is equidistantly formed in the inside of the connecting sleeve, and the jacking post is clamped with the corresponding clamping groove.

[0011] Preferably, one end of each of the plurality of jacking posts is designed as a spherical shape, and nitrogen is always injected into the inside of the gas conveying pipe.

[0012] Preferably, the two groups of pawls on the two pads are opposite to each other.

[0013] Preferably, a motor is fixedly installed in the inside of the box body, and the output end of the motor is fixedly connected with one end of the first screw rod.

[0014] Compared with the prior art, the application has the following beneficial effects:

[0015] Precise buffering protection, avoiding substrate damage. The buffering system composed of the sleeve, the piston and the nitrogen can provide flexible buffering when the adjusting roller moves up and down, effectively relieving the impact of instantaneous tension change on the film substrate. When the adjusting roller descends or ascends, the corresponding sleeve can automatically inject nitrogen, and the compressibility of the gas is used to realize stable adjustment, significantly reducing the risk of substrate breakage.

[0016] Linkage adjustment automation, improving operation convenience. When the first screw rod drives the mounting seat to move, the meshing transmission of the gear and the rack can synchronously drive the second screw rod to rotate, and then the movable block moves through the cooperation of the threaded sliding block, the jacking post and the connecting sleeve, realizing the automatic switching of the Z-shaped air passage and different pipelines, without manual intervention, the path switching of the buffering gas can be completed, and the automation degree and the adjustment efficiency of the device are improved.

[0017] One-way limit stability, guarantee the adjustment accuracy. The internal gear of the ratchet and the pawl on the pad block, and the two sets of pawl opposite, can form a one-way rotation limit to the second screw, avoid its in the adjustment process due to the reverse shaking caused by the displacement deviation of the movable block, ensure the accuracy of the airway switching and tension adjustment, conducive to maintaining the stability of the substrate tension in the coating process.

[0018] The air pressure balance is smooth, and the system stability is enhanced. The air leakage gap on the movable block can balance the air pressure when the airway is switched, reduce the pressure fluctuation caused by the airway on-off, ensure the continuity and stability of nitrogen gas delivery, further improve the consistency of the buffering effect; at the same time, the spherical design of the top column reduces the friction with the clamping groove, makes the movement and positioning of the movable block more smooth, reduces the mechanical wear, prolongs the service life of the device. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a schematic diagram of the whole local section structure of the application;

[0020] Figure 2 It is a schematic diagram of the first screw structure of the application;

[0021] Figure 3 It is a schematic diagram of the structure inside the mounting frame of the application;

[0022] Figure 4 It is a schematic diagram of the whole structure of the movable block of the application;

[0023] Figure 5 It is a schematic diagram of the side view section structure of the movable block of the application;

[0024] Figure 6 It is a schematic diagram of the local section structure of the threaded slider of the application;

[0025] Figure 7 It is a schematic diagram of the clamping groove structure equidistantly opened in the inner wall of the movable block of the application

[0026] Figure 8 It is a schematic diagram of the local enlarged structure of the gear side view section of the application.

[0027] In the figure: 1, box; 2, reaction chamber; 3, guide roller; 4, adjusting roller; 5, first screw; 6, mounting seat; 7, sleeve; 8, piston; 9, fixed block; 10, pipeline; 11, mounting frame; 12, movable block; 13, Z-shaped airway; 14, gas conveying pipe; 15, connecting sleeve; 21, sliding groove; 22, air leakage gap; 23, second screw; 31, gear; 32, rack; 41, ratchet; 42, pad block; 43, pawl; 44, first spring; 51, threaded slider; 52, second spring; 53, sliding plate; 54, top column. DETAILED DESCRIPTION

[0028] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments of the present application, all the other embodiments obtained by a person of ordinary skill in the art without creative effort belong to the scope of protection of the present application.

[0029] Please refer to Figures 1-8 As shown in FIG. 1, a substrate tension adjusting device based on a roll-to-roll CVD coating film includes a box body 1, a first screw rod 5, a pipeline 10 and a movable block 12. A reaction chamber 2 is installed inside the box body 1. A plurality of guide rollers 3 are installed inside the box body 1. An adjusting roller 4 is installed between the plurality of guide rollers 3. The first screw rod 5 is rotatably installed inside the box body 1. A mounting seat 6 is slidably installed inside the box body 1. The mounting seat 6 is threadedly connected with the first screw rod 5. A sleeve 7 is fixedly and symmetrically connected inside the mounting seat 6. A piston 8 is slidably installed on the inner wall of the sleeve 7. The rod portions of the two pistons 8 are fixedly connected with a fixed block 9. The adjusting roller 4 is fixedly connected with one side of the fixed block 9. One ends of the two sleeves 7 extend out of the mounting seat 6 and are communicated with the pipeline 10. One ends of the two pipelines 10 are communicated with a mounting frame 11. The mounting frame 11 is fixedly installed on one side of the mounting seat 6. The movable block 12 is slidably installed inside the mounting frame 11. A Z-shaped air duct 13 is installed inside the movable block 12. One end of the Z-shaped air duct 13 is communicated with a gas conveying pipe 14. A connecting sleeve 15 is fixedly connected with the side of the movable block 12 close to a second screw rod 23. A plurality of clamping grooves are equidistantly formed inside the connecting sleeve 15. A plurality of jacks 54 are clamped with the plurality of corresponding clamping grooves. A motor is fixedly installed inside the box body 1. The output end of the motor is fixedly connected with one end of the first screw rod 5.

[0030] Please refer to Figure 4 , Figure 5 and Figure 7 As shown in FIG. 2, a sliding groove 21 is formed on the top and bottom ends of the movable block 12 respectively. A gas leakage slot 22 is formed at the outlet of the Z-shaped air duct 13. A second screw rod 23 is arranged on one side of the movable block 12.

[0031] Please refer to Figure 2 , Figure 4 Figure 5 and Figure 6 As shown in FIG. 3, gear wheels 31 are rotatably installed on the two ends of the second screw rod 23 respectively. Two toothed racks 32 are fixedly connected inside the box body 1. The two gear wheels 31 are meshingly connected with the corresponding toothed racks 32 respectively. The two groups of pawls 43 on the two pads 42 are oppositely directed.

[0032] Please refer to Figure 8As shown, the gear 31 is hollow inside, the gear 31 inner wall is fixedly installed with a ratchet wheel 41, both ends of the second screw rod 23 are fixedly connected with a pad 42, the pad 42 is rotatably connected with a pawl 43, the pad 42 and the pawl 43 are fixedly connected with a first spring 44, and the pawl 43 is engaged with the ratchet wheel 41.

[0033] Please refer to Figure 6 As shown, one end of the second screw rod 23 is threadedly connected with a threaded sliding block 51, equidistant recesses are formed in the interior of the threaded sliding block 51, the recess inner wall is fixedly connected with a second spring 52, the recess inner wall is slidably installed with a sliding plate 53, one side of the sliding plate 53 is fixedly connected with one end of the second spring 52, the side of the sliding plate 53 away from the second spring 52 is fixedly connected with a jacking post 54, one end of each of the plurality of jacking posts 54 is designed in a spherical shape, and nitrogen gas is always injected into the gas conveying pipe 14.

[0034] It should be noted that: the substrate to be plated is installed on the guide roller 3, and is sequentially subjected to the guide roller 3 and the adjusting roller 4 according to a predetermined path, and finally enters the reaction chamber 2. When the reaction chamber 2 is started to perform the CVD plating operation, if it is necessary to adjust the tension of the substrate, the motor is started. The motor operation drives the first screw rod 5 to rotate, and since the mounting seat 6 is threadedly connected with the first screw rod 5, the mounting seat 6 starts to slide up and down in the box body 1. When the mounting seat 6 slides downward, the fixed block 9 and the adjusting roller 4 are lowered together, at this time the substrate is elongated and the tension is increased; on the contrary, when the mounting seat 6 slides upward, the adjusting roller 4 rises, and the substrate tension decreases.

[0035] During the movement of the adjusting roller 4, the piston 8 slides synchronously in the sleeve 7. When the adjusting roller 4 descends, nitrogen gas needs to be injected into the upper sleeve 7 to provide a buffer; when the adjusting roller 4 rises, nitrogen gas needs to be injected into the lower sleeve 7. This nitrogen gas injection control process is realized through a series of linkage structures. The movement of the mounting seat 6 drives the mounting frame 11 to move synchronously, the movement of the mounting frame 11 causes the gear 31 to mesh with the rack 32 and rotate, thereby driving the second screw rod 23 to rotate. When the second screw rod 23 rotates, the threaded sliding block 51 moves under the action of the threads, the jacking post 54 moves with the threaded sliding block 51 and cooperates with the clamping groove in the connecting sleeve 15, and the movable block 12 is pushed to slide in the mounting frame 11. The sliding of the movable block 12 changes the communication state of the Z-shaped air duct 13 and the pipeline 10, thereby realizing the nitrogen gas input of the corresponding sleeve 7.

[0036] For example, when the adjusting roller 4 is lowered, the mounting frame 11 is driven by the mounting base 6 to move downward, the gear 31 rolls clockwise on the rack 32 in the assumed direction, driving the second screw 23 to rotate clockwise. The threaded slide 51 moves right on the second screw 23 in the assumed direction, the jacks 54 push the movable block 12 to slide right, so that the Z-shaped air passage 13 is in communication with the pipeline 10 corresponding to the upper sleeve 7, and nitrogen gas enters the upper sleeve 7 through the gas conveying pipe 14 and the Z-shaped air passage 13, providing buffer for the lowering of the adjusting roller 4.

[0037] During the movement of the movable block 12, the air leakage gap 22 plays a role in balancing the air pressure, ensuring stable nitrogen gas delivery. When the movable block 12 moves to the appropriate position, the jacks 54 are pressed by the connecting sleeve 15, and the slide plate 53 compresses the second spring 52. At this time, although the threaded slide 51 continues to rotate with the second screw 23, the movable block 12 no longer moves, maintaining the stability of the nitrogen gas input state. At the same time, the ratchet 41 inside the gear 31 cooperates with the pawl 43 to limit the reverse rotation of the second screw 23, ensuring the stability and accuracy of the entire adjustment process. In order to avoid the pollution of the nitrogen gas to the vacuum chamber atmosphere, an exhaust pump is installed on the mounting frame 11 through a hose to exhaust the gas inside the mounting frame 11, thereby avoiding the pollution of the nitrogen gas.

[0038] Working principle:

[0039] First of all, the transmission path of the substrate is the basis for the entire device to work. The substrate will pass through a number of guide rollers 3 and adjusting rollers 4 inside the box body 1 in turn, and finally enter the reaction chamber 2 for CVD coating operation. When the reaction chamber 2 is coating the substrate, the substrate in the reaction chamber 2 needs to be kept in a stationary state to ensure the coating quality, while the other part of the substrate still needs to continue to move, which requires the tension of the substrate to be adjusted to meet this special working requirement.

[0040] When the tension needs to be adjusted, the motor is started, and its output end drives the first screw 5 to rotate. Since the mounting base 6 is threadedly connected with the first screw 5, and the mounting base 6 is slidingly installed inside the box body 1, the rotation of the first screw 5 will be converted into the up-down movement of the mounting base 6, which in turn drives the adjusting roller 4 mounted on the mounting base 6 to move up and down synchronously. When the adjusting roller 4 is lowered, the substrate will be elongated, thereby realizing the adjustment of the tension; conversely, when the adjusting roller 4 is raised, the tension of the substrate will be correspondingly reduced.

[0041] Considering that the substrate is mostly thin film and fragile, to avoid the substrate from being damaged by the direct and rapid movement of the adjusting roller 4, the device is designed with a buffer structure. The buffer system is composed of the sleeve 7 fixedly connected inside the mounting seat 6, the piston 8 slidingly installed on the inner wall of the sleeve 7, and the nitrogen gas between the sleeve 7 and the piston 8. When the adjusting roller 4 is lowered, the fixed block 9 fixedly connected with the adjusting roller 4 will drive the piston 8 to move in the sleeve 7, at this time, the nitrogen gas needs to be injected into the sleeve 7 on the upper side, and the existence of the nitrogen gas can effectively buffer the impact force of the adjusting roller 4 when it is lowered; on the contrary, when the adjusting roller 4 is raised, the nitrogen gas needs to be injected into the sleeve 7 on the lower side, which also plays a buffering protection role.

[0042] The injection control of the nitrogen gas is realized through a series of linkage structures. One end of the sleeve 7 extending out of the mounting seat 6 is communicated with the pipeline 10, the pipeline 10 is communicated with the mounting frame 11, the movable block 12 slidingly installed in the mounting frame 11 is provided with a Z-shaped gas channel 13 inside, one end of the Z-shaped gas channel 13 is communicated with the gas conveying pipe 14, and the gas conveying pipe 14 is used for conveying nitrogen gas. When the first screw 5 drives the mounting seat 6 to move, the mounting seat 6 will drive the mounting frame 11 to move synchronously, since the box body 1 is fixedly connected with the rack 32 inside, the gear 31 mounted on both ends of the second screw 23 is engaged with the rack 32, and the movement of the mounting frame 11 will drive the gear 31 to rotate, thereby driving the second screw 23 to rotate.

[0043] The rotation of the second screw 23 will drive the movable block 12 to slide in the mounting frame 11 through the cooperation of the threaded sliding block 51, the top column 54 and the clamping groove in the connecting sleeve 15 on one side of the movable block 12. The movement of the movable block 12 will change the communication state of the Z-shaped gas channel 13 and the pipeline 10, thereby realizing the nitrogen gas input control of different sleeves 7. The top and bottom ends of the movable block 12 are provided with sliding grooves 21, and the sliding grooves 21 are provided with air leakage slots 22 at the outlets of the Z-shaped gas channel 13. This structure helps to balance the air pressure in the process of switching the gas channel and ensures the stability of the nitrogen gas conveying. Specifically, when the movable block 12 moves to one end, the pipeline 10 communicated with the Z-shaped gas channel 13 is inflated, and the other pipeline 10 is in contact with the air leakage slot 22, so as to discharge the nitrogen gas in the pipeline 10 and the sleeve 7, thereby enabling the piston 8 at this position to be free of force and to slide freely.

[0044] In addition, the ratchet wheel 41 inside the gear 31, the pawls 43 on the two end pads 42 of the second screw 23 and the first spring 44 between them cooperate with each other, and the two sets of pawls 43 on the two pads 42 face opposite directions. This design can realize the one-way rotation restriction of the second screw 23, ensure the moving direction of the movable block 12 accurate, and avoid the deviation of the nitrogen input control due to reverse rotation. When the movable block 12 moves to the appropriate position, the top column 54 will be extruded, prompting the sliding plate 53 to compress the second spring 52. At this time, the threaded sliding block 51 rotates with the second screw 23, but the movable block 12 no longer moves, ensuring the stability of the nitrogen input state. At the same time, one end of the top column 54 is designed in a spherical shape, which can reduce the friction between the top column 54 and the clamping groove, making the movement and positioning of the movable block 12 more smooth.

[0045] It should be noted that, in the present document, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0046] While embodiments of the present application have been shown and described, it is to be understood that various modifications, substitutions, combinations, and variations can be made by those skilled in the art without departing from the spirit and scope of the present application, which is defined by the appended claims and their equivalents.

Claims

1. A substrate tension adjustment device based on a roll-to-roll CVD coating, characterized by, Include: Box (1), the reaction chamber (2) is installed inside the box (1), a plurality of guide rollers (3) are installed inside the box (1), and an adjusting roller (4) is installed between a plurality of the guide rollers (3); The first screw rod (5) is rotatably installed inside the box (1), the mounting seat (6) is slidably installed inside the box (1), the mounting seat (6) is threadedly connected with the first screw rod (5), the sleeve (7) is fixedly connected inside the mounting seat (6), the piston (8) is slidably installed on the inner wall of the sleeve (7), the fixed block (9) is fixedly installed on the end of the two pistons (8) away from each other, and the adjusting roller (4) is fixedly connected with one side of the fixed block (9); The pipeline (10) is communicated between the two sleeves (7) and the mounting seat (6), and the two pipelines (10) are communicated with the mounting frame (11) on one end. The movable block (12) is slidably installed inside the mounting frame (11), the Z-shaped air duct (13) is installed inside the movable block (12), and the Z-shaped air duct (13) is communicated with the gas inlet pipe (14) on one end.

2. The substrate tension adjustment device based on roll-to-roll CVD coating according to claim 1, characterized in that: The top and bottom ends of the movable block (12) are respectively provided with a sliding groove (21), the sliding groove (21) is provided with a gas leakage gap (22) at the outlet of the Z-shaped air duct (13), and the movable block (12) is provided with a second screw rod (23) on one side.

3. The substrate tension adjustment device based on roll-to-roll CVD coating according to claim 2, characterized in that: The two ends of the second screw rod (23) are rotatably provided with a gear (31), and the box (1) is fixedly connected with two racks (32).

4. The substrate tension adjustment device based on roll-to-roll CVD coating according to claim 3, characterized in that: The gear (31) is designed as a hollow structure, the ratchet wheel (41) is fixedly installed on the inner wall of the gear (31), the two ends of the second screw rod (23) are fixedly connected with the pad (42), the ratchet pawl (43) is rotatably connected inside the pad (42), the first spring (44) is fixedly connected between the pad (42) and the ratchet pawl (43), and the ratchet pawl (43) is engaged with the ratchet wheel (41).

5. The substrate tension adjustment device based on roll-to-roll CVD coating according to claim 3, characterized in that: The second screw rod (23) is threadedly connected with a threaded sliding block (51) on one end, a recess is equidistantly formed in the inner portion of the threaded sliding block (51), the second spring (52) is fixedly connected to the inner wall of the recess, the sliding plate (53) is slidably installed on the inner wall of the recess, one side of the sliding plate (53) is fixedly connected with one end of the second spring (52), and the top column (54) is fixedly connected to the side of the sliding plate (53) away from the second spring (52).

6. The substrate tension adjustment device based on roll-to-roll CVD coating according to claim 1, wherein: The connecting sleeve (15) is fixedly connected to the side of the movable block (12) close to the second screw rod (23), a clamping groove is equidistantly formed in the inner portion of the connecting sleeve (15), and the top column (54) is clamped with the corresponding clamping groove.

7. The substrate tension adjustment device based on roll-to-roll CVD coating according to claim 5, characterized in that: The two ends of the top column (54) are designed as spherical structures, and the gas inlet pipe (14) is always filled with nitrogen.

8. The substrate tension adjustment device based on roll-to-roll CVD coating according to claim 4, characterized in that: The two groups of ratchet pawls (43) on the two pads (42) are opposite to each other.

9. The substrate tension adjustment device based on roll-to-roll CVD coating according to claim 1, wherein: The motor is fixedly installed inside the box (1), and the output end of the motor is fixedly connected with one end of the first screw rod (5).

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