Leakage rate test software based on hiden quadrupole mass spectrometer

Abstract

The invention discloses leakage rate test software based on a hiden quadrupole mass spectrometer in the field of leakage detection, which comprises a test management module, an equipment operation parameter monitoring module, a historical data management module, an alarm module, an operation log module and a system configuration module, and is characterized in that the test management module comprises a leakage rate detection mode and a calibration mode; and the equipment operation parameter monitoring module monitors operation parameters of the quadrupole mass spectrometer, the molecular pump and the vacuum gauge. According to the invention, real-time acquisition and storage of leak rate signals are realized, and the detection efficiency is improved; meanwhile, a data calibration function is achieved, the average value of detection data in a period of time is taken as a final detection result, and the accuracy and reliability of detection signals are improved; the software can monitor the running state of equipment, can be used for quadrupole mass spectrometers of all models of Hidden products, can directly obtain leak rate data, does not need to convert partial pressure signals or concentration signals into leak rate signals, and can improve the working quality and efficiency.

Description

Technical Field

[0001] This invention relates to the field of leak detection, specifically a leak rate testing software based on a Hiden quadrupole mass spectrometer. Background Technology

[0002] Quadrupole mass spectrometers have a wide range of applications, such as residual gas composition analysis, gas composition analysis in special environments, and vacuum computational research. The raw signals from quadrupole mass spectrometers are mostly gas partial pressure or concentration signals. When using a quadrupole mass spectrometer for leak detection, the standardized leak detection signal in China is the leak rate. In this case, it is necessary to convert the partial pressure or concentration signal into a leak rate signal; however, this function is not available in the manufacturer's original software.

[0003] Therefore, those skilled in the art have provided a leak rate testing software based on a Hiden quadrupole mass spectrometer to solve the problems mentioned in the background art. Summary of the Invention

[0004] The purpose of this invention is to provide a leak rate testing software based on a Hiden quadrupole mass spectrometer to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A leak rate testing software based on a Hiden quadrupole mass spectrometer includes a test management module, a device operation parameter monitoring module, a historical data management module, an alarm module, an operation log module, and a system configuration module. The test management module includes a leak rate detection mode and a calibration mode.

[0007] The equipment operation parameter monitoring module monitors the operating parameters of the quadrupole mass spectrometer, molecular pump, and vacuum gauge;

[0008] The historical data management module can correctly display the concentration data curve during the test process, the alarm history messages and operation log history messages of the mass spectrometry chamber pressure data curve by setting the start and end times of the data to be queried;

[0009] The alarm module acquires the alarm information from the hardware in real time and provides alerts to the alarm information, making it easier for users to detect alarm situations in a timely manner. The alarm acquisition command is: rerr;

[0010] The operation log module records all actions and alarm information during the software's operation;

[0011] The system configuration module sets some basic parameters during software use, and can also calibrate data through calibration mode.

[0012] As a further aspect of the present invention: the leak rate detection mode includes a leak rate detection module, which tracks and collects one or more ions with a fixed mass number, measures their partial pressure at different time points, converts it into a leak rate, and then plots and displays it in real time.

[0013] As a further aspect of the present invention: the leak detection module in the leak detection mode includes the following steps for leak detection:

[0014] 1) Setting parameters: including quality number settings, name settings, and detector settings.

[0015] 2) Testing process and data processing:

[0016] The data obtained by the quadrupole mass spectrometer during testing is partial pressure, in mbar. This partial pressure needs to be converted to leak rate using the following formula:

[0017]

[0018] Qs is the standard leak rate, which is set in the system parameters. The leak rate can be calibrated through calibration mode or modified manually. The unit is Pa·m3 / s.

[0019] P L The partial pressure measured in actual tests is expressed in mbar.

[0020] P S The partial pressure obtained by measurement under standard leak rate can be calibrated through calibration mode or manually modified, in mbar;

[0021] P0 is the background partial pressure, which can be manually modified in the system parameters;

[0022] 3) Data shows:

[0023] During task execution, the data scanned for each mass number is plotted:

[0024] Coordinate axis definition: Linear and logarithmic coordinates are used, with the X-axis representing time and the Y-axis representing the leakage rate after conversion of the corresponding collected partial pressure, in Pa·m3 / s;

[0025] Plotting: The leak rate of each gas collected is plotted as a curve, and the color of the real-time data curve can be set and changed.

[0026] As a further aspect of the present invention: the calibration mode is used to calibrate system parameters, including the standard leak rate, the partial pressure corresponding to the standard leak rate, and the background partial pressure, specifically including the following steps:

[0027] 1) Setting parameters: including quality number settings, name settings, and detector settings;

[0028] 2) Calibration process:

[0029] After clicking the Start Calibration button, the system will start collecting and plotting the partial pressure corresponding to the currently set mass number. After 1 minute of collection, a dialog box will pop up. Select "Open Leak" and then the average value of the last 5 sets of data collected will be saved as the baseline.

[0030] Click the "Yes" button to open the leak and start the partial pressure test corresponding to the leak until you click the stop calibration button. Take the average of the last five sets of data as the partial pressure data corresponding to the leak rate.

[0031] If the "Yes" button for "Open the leak" is not clicked, the background data will continue to be scanned until the "Yes" button for "Open the leak" is clicked. The average of the last five sets of data will be taken as the partial pressure data corresponding to the leakage rate.

[0032] As a further aspect of the present invention, the specific implementation of the historical data management module includes the following aspects:

[0033] (1) View historical gas concentration data curves. In the historical data query interface, enter the start and end times of the data to be queried and click the historical data query button to view the data curve for the specified time period;

[0034] (2) Viewing historical pressure data curves in the mass spectrometer chamber. In the historical pressure data query interface for the mass spectrometer chamber, enter the start and end times of the query data and click the historical data query button to view the data curve for the specified time period;

[0035] (3) View alarm history data. On the alarm history data query interface, enter the start and end times of the query data and click the historical data query button to view the data for the specified time period.

[0036] As a further aspect of the present invention: the operation log of the operation log module occupies about 1 / 6 of the main interface and is located at the bottom of the interface; the size can be adjusted. The operation log is displayed in the form of time-work content, and the work content includes all manual actions and concentration alarm information set during the software operation.

[0037] Compared with the prior art, the beneficial effects of the present invention are:

[0038] This invention enables real-time acquisition and storage of leak rate signals, improving detection efficiency. It also features data calibration, taking the average value of detection data over a period of time as the final detection result, thus improving the accuracy and reliability of the detection signal. Furthermore, it can monitor the operating status of the equipment. The software is compatible with all models of quadrupole mass spectrometers from Hiden products, allowing direct acquisition of leak rate data without the need to convert partial pressure or concentration signals into leak rate signals, thereby improving work efficiency. Attached Figure Description

[0039] Figure 1 This is an interface diagram of the leak rate detection mode in this invention;

[0040] Figure 2 This is an interface diagram of the standard mode in this invention;

[0041] Figure 3 This is a diagram of the configuration interface of the system configuration module in this invention. Detailed Implementation

[0042] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0043] Please see Figures 1 to 3 In this embodiment of the invention, a leak rate testing software based on a Hiden quadrupole mass spectrometer includes a test management module, a device operation parameter monitoring module, a historical data management module, an alarm module, an operation log module, and a system configuration module. The test management module includes a leak rate detection mode and a calibration mode.

[0044] The historical data management module can correctly display the concentration data curve during the test process, the alarm history messages and operation log history messages of the mass spectrometry chamber pressure data curve by setting the start and end times of the data to be queried;

[0045] The alarm module acquires the alarm information from the hardware in real time and provides alerts to the alarm information, making it easier for users to detect alarm situations in a timely manner. The alarm acquisition command is: rerr;

[0046] The operation log module records all actions and alarm information during the software's operation;

[0047] The leak rate detection mode includes a leak rate detection module. This module tracks and collects data on one or more ions with a fixed mass number, measures their partial pressure at different time points, converts it into a leak rate, and then plots and displays it in real time.

[0048] The leak detection module in the leak detection mode includes the following steps:

[0049] 1) Setting parameters: including quality number settings, name settings, and detector settings;

[0050] Quality number setting: Can be set manually, up to 5 integers;

[0051] Name settings: Can be manually entered, corresponding to the mass number, string;

[0052] Detector settings: Multiplier or Faraday cylinder can be set;

[0053] The details are shown in the table below:

[0054] Serial number Name Mass number 1. <![CDATA[Hydrogen (H2)]]> 2 2. Helium (He) 4 3. <![CDATA[Water (H2O)]]> 18 4. <![CDATA[Nitrogen (N2)]]> 28 5. <![CDATA[Oxygen (O2)]]> 32 6. Neon (Ne) 20 7. Argon (Ar) 40 8. <![CDATA[Carbon dioxide (CO2)]]> 44 9. Krypton (Ke) 84 10. Xenon (Xr) 132

[0055] 2) Testing process and data processing:

[0056] The data obtained by the quadrupole mass spectrometer during testing is partial pressure, in mbar. This partial pressure needs to be converted to leak rate using the following formula:

[0057]

[0058] Qs is the standard leak rate, which is set in the system parameters. The leak rate can be calibrated through calibration mode or modified manually. The unit is Pa·m3 / s.

[0059] P L The partial pressure measured in actual tests is expressed in mbar.

[0060] P S The partial pressure obtained by measurement under standard leak rate can be calibrated through calibration mode or manually modified, in mbar;

[0061] P0 is the background partial pressure, which can be manually modified in the system parameters;

[0062] 3) Data shows:

[0063] During task execution, the data scanned for each mass number is plotted:

[0064] Coordinate axis definition: Linear and logarithmic coordinates are used, with the X-axis representing time and the Y-axis representing the leakage rate after conversion of the corresponding collected partial pressure, in Pa·m3 / s;

[0065] Plotting: The leak rate of each gas collected is plotted as a curve, and the color of the real-time data curve can be set and changed.

[0066] The calibration mode is used to calibrate system parameters, including the standard leak rate, the partial pressure corresponding to the standard leak rate, and the background partial pressure. Specifically, it includes the following steps:

[0067] 1) Setting parameters: including quality number settings, name settings, and detector settings;

[0068] Quality quantity setting: can be manually selected, quantity is 1, integer;

[0069] Name settings: Can be manually selected, string;

[0070] Detector settings: Multiplier or Faraday cylinder can be selected;

[0071] 2) Calibration process:

[0072] After clicking the Start Calibration button, the system will start collecting and plotting the partial pressure corresponding to the currently set mass number. After 1 minute of collection, a dialog box will pop up. Select "Open Leak" and then the average value of the last 5 sets of data collected will be saved as the baseline.

[0073] Click the "Yes" button to open the leak and start the partial pressure test corresponding to the leak until you click the stop calibration button. Take the average of the last five sets of data as the partial pressure data corresponding to the leak rate.

[0074] If the "Yes" button for "Open the leak" is not clicked, the background data will continue to be scanned until the "Yes" button for "Open the leak" is clicked. The average of the last five sets of data will be taken as the partial pressure data corresponding to the leakage rate.

[0075] The specific implementation of the historical data management module includes the following aspects:

[0076] (1) View historical gas concentration data curves. In the historical data query interface, enter the start and end times of the data to be queried and click the historical data query button to view the data curve for the specified time period;

[0077] (2) Viewing historical pressure data curves in the mass spectrometer chamber. In the historical pressure data query interface for the mass spectrometer chamber, enter the start and end times of the query data and click the historical data query button to view the data curve for the specified time period;

[0078] (3) View alarm history data. On the alarm history data query interface, enter the start and end times of the query data and click the historical data query button to view the data for the specified time period.

[0079] The operation log module occupies about 1 / 6 of the main interface and is located at the bottom of the interface. Its size is adjustable. The operation log is displayed in a time-work content format. The work content includes all manual actions performed during the software operation and the setting of concentration alarm information.

[0080] In this embodiment, the device operation parameter monitoring module monitors the operating parameters of the quadrupole mass spectrometer, molecular pump, and vacuum gauge; the control commands and functions are as follows:

[0081] (1) Quadrupole mass spectrometer

[0082] Ion source filament 1 status monitoring: lget F1-LED;

[0083] Ion source filament 2 status monitoring: lget F2-LED;

[0084] Heating current input status monitoring: lget filok;

[0085] Transmit current input status monitoring: lget emok;

[0086] Electron multiplier voltage monitoring: lget multiplier;

[0087] (2) Molecular pump

[0088] Monitoring molecular pump speed: lget turbo-speed;

[0089] Monitoring molecular pump power: lget turbo-power;

[0090] (3) Vacuum gauge

[0091] Monitor vacuum pressure: lget Vacuum.

[0092] In this embodiment, the system configuration module sets some basic parameters during software use, and can also calibrate data through a calibration mode. The requirements are as follows:

[0093] (1) The standard leakage rate of 10 gases can be set;

[0094] (2) The partial pressure corresponding to the standard leakage rate of 10 gases can be set;

[0095] (3) The background partial pressure of the 10 gases can be set;

[0096] (4) The ten gases are hydrogen (H2), helium (He), water (H2O), nitrogen (N2), oxygen (O2), neon (Ne), argon (Ar), carbon dioxide (CO2), krypton (Ke), and xenon (Xr).

[0097] This application enables real-time acquisition and storage of leak rate signals, improving detection efficiency. It also features data calibration, taking the average value of detection data over a period of time as the final detection result, thus improving the accuracy and reliability of the detection signal. Furthermore, it can monitor the operating status of the equipment. This software is compatible with all models of quadrupole mass spectrometers from Hiden products, allowing direct acquisition of leak rate data without the need to convert partial pressure or concentration signals into leak rate signals, thereby improving work efficiency.

[0098] In this embodiment, when the software starts, it collects the operating parameters of the molecular pump and the vacuum level of the vacuum gauge, and displays them in real time on the interface. The operator selects the test items according to the test method and starts the test. After the test starts, the data is saved in real time for subsequent data analysis. When the data exceeds the standard, alarm information and prompts should be given.

[0099] In this embodiment, the hardware interface requirements corresponding to the software are as follows: The control cabinet of the Hiden device has integrated hardware such as a quadrupole mass spectrometer, a mechanical pump, and a molecular pump. The mechanical pump and the molecular pump are started via the cabinet button. The molecular pump communicates with the cabinet via RS485. The cabinet communicates with the vacuum gauge via an RJ45 interface and with the quadrupole mass spectrometer via a serial port. Since the control cabinet of the Hiden device has integrated the hardware, the software can directly communicate with the HPR-30 device via the RJ45 network interface to control and acquire other hardware of the device.

[0100] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A leak rate testing software based on a Hiden quadrupole mass spectrometer, comprising a test management module, a device operating parameter monitoring module, a historical data management module, an alarm module, an operation log module, and a system configuration module, characterized in that: The test management module includes a leak rate detection mode and a calibration mode; The equipment operation parameter monitoring module monitors the operating parameters of the quadrupole mass spectrometer, molecular pump, and vacuum gauge; The historical data management module can correctly display the concentration data curve during the test process, the alarm history messages and operation log history messages of the mass spectrometry chamber pressure data curve by setting the start and end times of the data to be queried; The alarm module acquires the alarm information from the hardware in real time and provides alerts to the alarm information, making it easier for users to detect alarm situations in a timely manner. The alarm acquisition command is: rerr; The operation log module records all actions and alarm information during the software's operation; The system configuration module sets some basic parameters during software use, and can also calibrate data through calibration mode.

2. The leak rate testing software based on a Hiden quadrupole mass spectrometer according to claim 1, characterized in that: The leak rate detection mode includes a leak rate detection module. This module tracks and collects data on one or more ions with a fixed mass number, measures their partial pressure at different time points, converts it into a leak rate, and then plots and displays it in real time.

3. The leak rate testing software based on a Hiden quadrupole mass spectrometer according to claim 2, characterized in that: The leak detection module in the leak detection mode includes the following steps: 1) Setting parameters: including quality number settings, name settings, and detector settings. 2) Testing process and data processing: The data obtained by the quadrupole mass spectrometer during testing is partial pressure, in mbar. This partial pressure needs to be converted to leak rate using the following formula: Qs is the standard leak rate, which is set in the system parameters. The leak rate can be calibrated through calibration mode or modified manually. The unit is Pa·m3 / s. P L The partial pressure measured in actual tests is expressed in mbar. P S The partial pressure obtained by measurement under standard leak rate can be calibrated through calibration mode or manually modified, in mbar; P0 is the background partial pressure, which can be manually modified in the system parameters; 3) Data shows: During task execution, the data scanned for each mass number is plotted: Coordinate axis definition: Linear and logarithmic coordinates are used, with the X-axis representing time and the Y-axis representing the leakage rate after conversion of the corresponding collected partial pressure, in Pa·m3 / s; Plotting: The leak rate of each gas collected is plotted as a curve, and the color of the real-time data curve can be set and changed.

4. The leak rate testing software based on a Hiden quadrupole mass spectrometer according to claim 1, characterized in that: The calibration mode is used to calibrate system parameters, including the standard leak rate, the partial pressure corresponding to the standard leak rate, and the background partial pressure. Specifically, it includes the following steps: 1) Setting parameters: including quality number settings, name settings, and detector settings; 2) Calibration process: After clicking the Start Calibration button, the system will start collecting and plotting the partial pressure corresponding to the currently set mass number. After 1 minute of collection, a dialog box will pop up. Select "Open Leak" and then "Yes" to calculate the average value of the last 5 sets of data collected and save it as the baseline. Click the "Yes" button for "Open Leak" to start the partial pressure test corresponding to the leak, until click the "Stop Calibration" button. Take the average of the last five sets of data as the partial pressure data corresponding to the leak rate. If the "Yes" button for "Open the leak" is not clicked, the background data will continue to be scanned until the "Yes" button for "Open the leak" is clicked. The average of the last five sets of data will be taken as the partial pressure data corresponding to the leakage rate.

5. The leak rate testing software based on a Hiden quadrupole mass spectrometer according to claim 1, characterized in that: The specific implementation of the historical data management module includes the following aspects: (1) To view historical data curves of gas concentration, enter the start and end times of the data to be queried in the historical data query interface and click the historical data query button to view the data curves for the specified time period. (2) Viewing historical data curves of mass spectrometry chamber pressure: In the historical data query interface of mass spectrometry chamber pressure, enter the start and end times of the data to be queried and click the historical data query button to view the data curve for the specified time period. (3) View alarm history data. On the alarm history data query interface, enter the start and end times of the data to be queried and click the historical data query button to view the data for the specified time period.

6. The leak rate testing software based on a Hiden quadrupole mass spectrometer according to claim 1, characterized in that: The operation log module occupies about 1 / 6 of the main interface and is located at the bottom of the interface. The size can be adjusted. The operation log is displayed in the form of time-work content. The work content includes all manual actions and concentration alarm information set during the software operation.

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