Ion flow detection device and method

Abstract

The embodiment of the invention discloses an ion flow detection device and method. The ion flow detection device comprises a metal receiver used for receiving ion flow emitted by an ion generator; the receiving end of the micro galvanometer is electrically connected with the metal receiver; and the display screen is electrically connected with the output end of the micro galvanometer and is used for displaying the ion current information received by the metal receiver in real time. According to the embodiment of the invention, the metal receiver is connected with the micro galvanometer, so that the magnitude of the weak current generated by the ion flow generated by the ion generator can be accurately measured, and the value of the ion flow is calculated according to the pre-established corresponding relation between the current and the ion flow. And finally, the information of the ion current sent by the ion generator and received by the metal receiver can be displayed on a display screen of the micro galvanometer in real time, so that the reading is convenient, obvious errors caused by offline operation can be reduced, and the precision of a detection result is remarkably improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of ion detection, and in particular to an ion flow detection device and method. BACKGROUND

[0002] In many industrial production processes and scientific experiments, such as semiconductor manufacturing, chemical synthesis, environmental monitoring, etc., it is often necessary to understand the charge generation capability of an ion generator in order to accurately control the production process, ensure product quality or obtain accurate experimental data. Traditional detection methods often require offline operation to evaluate the charge generation capability of the ion generator, which not only consumes time and effort, but also may cause significant errors in sample collection and processing due to offline operation, resulting in inaccurate detection results, inability to reflect the working state of the ion generator in real time, and difficulty in meeting the needs of modern industry and scientific research for rapid and accurate detection. SUMMARY

[0003] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application provides an ion flow detection device to solve the problem of significant errors in sample collection and data processing caused by offline operation when evaluating the charge generation capability of an ion generator.

[0004] In a first aspect, the present application provides an ion flow detection device, comprising: a metal receiver for receiving ion flow emitted by an ion generator; a microammeter, the receiving end of which is electrically connected to the metal receiver and is used to process ion flow information received by the metal receiver; a display screen, which is electrically connected to the output end of the microammeter and is used to display ion flow information received by the metal receiver in real time.

[0005] Based on the ion flow detection device, after the ion flow emitted by the ion generator reaches the metal receiver, electric charges will accumulate on the metal receiver. The movement of the electric charges forms an electric current, the size of which is related to the ion flow. By connecting the metal receiver and the microammeter, the size of the weak electric current generated by the ion flow emitted by the ion generator can be accurately measured under the processing of the microammeter. Then, according to the pre-established correspondence between the electric current and the ion flow, the value of the ion flow can be calculated. Finally, the information of the ion flow emitted by the ion generator received by the metal receiver can be displayed on the display screen of the microammeter in real time, which not only facilitates reading, but also reduces the significant errors caused by offline operation, significantly improves the accuracy of the detection results, and has a simple overall structure, easy operation, low cost and high practicality.

[0006] Optionally, the metal receiver comprises a flat-plate structure of a conductive plate, which is arranged opposite to the emitting end of the ion generator.

[0007] Further, based on the arrangement of the conductive plate, a stable and reliable ion flow receiving plane can be formed, thereby significantly improving the detection accuracy and reliability of the entire ion flow detection device.

[0008] Optionally, the detection device further comprises a support structure, the metal receiver and the microammeter are both mounted on the support structure, and the bottom of the support structure has a support plane.

[0009] Further, based on the support structure, a reliable and stable base can be provided for the metal receiver and the microammeter, and the support plane at the bottom of the support structure can further improve the stability and reliability of the support structure. The support plane can be formed by at least three support points arranged not in a straight line, or can be formed by at least one flat structure, as long as it can provide a stable base structure for the detection device.

[0010] Optionally, the top of the support structure has a support plate, which is arranged in close contact with the bottom of the metal receiver.

[0011] Further, based on the arrangement of the support plate, the metal receiver can be further stably supported, thereby improving the detection accuracy and stability of the detection device.

[0012] In a second aspect, the application provides a detection method using the ion flow detection device as described above, comprising the following steps: S1, calibrating the microammeter; S2, performing pre-operation inspection on the detection device; S3, placing the ion flow detection device at a designated work station; S4, starting the ion generator; S5, recording the measurement data of the microammeter; S6, determining whether the ion generator is operating normally, if yes, continue to use, if not, perform maintenance on the ion generator.

[0013] Based on the detection method, the microammeter can be used to display the data of the ion flow emitted by the ion generator in real time, so that the ion flow data with low delay and low error can be observed simply and intuitively.

[0014] Optionally, the step S3 specifically comprises arranging the metal receiver of the ion flow detection device opposite to the emitting end of the ion generator, and adjusting the distance between the ion flow detection device and the ion generator to be within a designated range by moving the ion flow detection device or the ion generator.

[0015] Further, based on the above step S3, the angle and distance between the metal receiver and the ion generator are adjusted, so that the detection device can more efficiently receive the ion flow emitted by the ion generator, and the detection result is more accurate and reliable.

[0016] Optionally, between the step S5 and the step S6, there is also a step S51 of repeatedly performing the step S4 and the step S5 multiple times, and recording the measurement data of the microammeter multiple times.

[0017] Further, through the step S51, multiple sets of measurement data are integrated, which can be analyzed by taking the average, further improving the accuracy, or can be further analyzed by selecting one or more sets of reliable data.

[0018] Optionally, the step S6 of judging whether the ion generator is running normally comprises: judging whether the ion generator is running normally by calculating and analyzing the specific value of the ion flow.

[0019] Optionally, the step S6 of judging whether the ion generator is running normally comprises: judging whether the ion generator is running normally by drawing a curve of the ion flow changing with time.

[0020] Optionally, the metal receiver in the ion flow detection device is a flat plate structure, and the step S3 specifically comprises: arranging the center of the flat plate of the metal receiver to face the emission end of the ion generator, so that the emission end of the ion generator is vertically emitted towards the metal receiver of the flat plate structure, and the distance between the metal receiver and the ion generator is adjusted to be within a set range by moving the ion flow detection device or the ion generator.

[0021] Further, the metal receiver can include a conductive plate in a flat plate structure, and the conductive plate is arranged to face the emission end of the ion generator. It should be understood that the conductive plate facing the emission end of the ion generator means that the emission direction of the ion flow in the ion generator is perpendicular to the plane of the conductive plate. The conductive plate can be a metal material with good conductivity, as long as it can accumulate electric charge after receiving the ion flow and make the electric charge move to form an electric current. Based on the above step S3, the angle and distance between the metal receiver and the ion generator are adjusted, so that the detection device can more efficiently receive the ion flow emitted by the ion generator, and the accuracy and reliability of the detection result are further improved.

[0022] The above one or more embodiments of the present application have at least one or more of the following beneficial effects: The ion flow emitted from the ion generator reaches the metal receiver, and charges are accumulated on the metal receiver. A current is formed due to the movement of the charges, and the size of the current is related to the ion flow. Then, by connecting the metal receiver and the microammeter, the size of the weak current generated by the ion flow emitted from the ion generator can be accurately measured. Then, according to the pre-established correspondence between the current and the ion flow, the value of the ion flow can be calculated. Finally, the information of the ion flow emitted from the ion generator received by the metal receiver can be displayed on the display screen of the microammeter in real time. Not only is the reading convenient, but also the obvious error caused by offline operation is reduced, and the accuracy of the detection result is significantly improved. The detection device has simple overall structure, is easy to operate, has low cost, and has high practicability.

[0023] Additional aspects and advantages of the present application will be made apparent by the following description and the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0024] The disclosure of the present application will become more apparent from the following description with reference to the attached drawings. As those skilled in the art will readily appreciate, the drawings served only to explain the present application and are not intended to limit the scope of protection of the present application. In addition, similar numbers in the drawings are used to represent similar components, wherein: Figure 1 A structural schematic diagram of the ion flow detection device described in the embodiments of the present application; Figure 2 A flowchart of the ion flow detection method described in the embodiments of the present application; Figure 3 A connection relationship diagram of the microammeter and the metal receiver described in the embodiments of the present application.

[0025] BRIEF DESCRIPTION OF DRAWINGS 11, metal receiver; 111, conductive plate; 12, microammeter; 13, support structure; 131, support plate; 2, ion generator. DETAILED DESCRIPTION

[0026] Some embodiments of the present application will be described below with reference to the accompanying drawings. Those skilled in the art will readily appreciate that these embodiments are only used to explain the technical principles of the present application, and are not intended to limit the scope of protection of the present application.

[0027] Traditional detection methods often need offline operation to evaluate the charge generation capacity of the ion generator. Not only is it time-consuming and laborious, but also there may be obvious errors in the sample collection and processing process due to offline operation, resulting in inaccurate detection results, and the working state of the ion generator cannot be reflected in real time, which makes it difficult to meet the demand for rapid and accurate detection in modern industry and scientific research.

[0028] Based on this, the application provides an ion flow detection device and method, wherein the ion flow emitted from the ion generator reaches the metal receiver and accumulates electric charges on the metal receiver, and a current is formed due to the movement of the electric charges, the size of the current is related to the ion flow, then by connecting the metal receiver and the microammeter, the size of a weak current generated by the ion flow emitted from the ion generator can be accurately measured, and then according to a pre-established corresponding relationship between the current and the ion flow, the value of the ion flow is calculated, finally the information of the ion flow emitted from the ion generator and received by the metal receiver can be displayed on the display screen of the microammeter in real time, which not only facilitates reading, but also reduces the obvious error caused by offline operation, significantly improves the accuracy of the detection result, and the detection device has simple overall structure, easy operation, low cost and high practicability.

[0029] The application will be specifically described below through specific examples.

[0030] Referring to Figures 1 to 3 The embodiment provides an ion flow detection device, which comprises a metal receiver 11 for receiving the ion flow emitted from an ion generator 2, a microammeter 12, a receiving end of the microammeter 12 being electrically connected with the metal receiver 11 and being used for processing the ion flow information received by the metal receiver 11, and a display screen being electrically connected with an output end of the microammeter 12 and being used for displaying the ion flow information received by the metal receiver 11 in real time.

[0031] The ion flow detection device provided by the embodiment, wherein the ion flow emitted from the ion generator 2 reaches the metal receiver 11 and accumulates electric charges on the metal receiver 11, and a current is formed due to the movement of the electric charges, the size of the current is related to the ion flow, then by connecting the metal receiver 11 and the microammeter 12, the size of a weak current generated by the ion flow emitted from the ion generator 2 can be accurately measured under the processing of the microammeter 12, and then according to a pre-established corresponding relationship between the current and the ion flow, the value of the ion flow is calculated, finally the information of the ion flow emitted from the ion generator 2 and received by the metal receiver 11 can be displayed on the display screen of the microammeter 12 in real time, which not only facilitates reading, but also reduces the obvious error caused by offline operation, significantly improves the accuracy of the detection result, and the detection device has simple overall structure, easy operation, low cost and high practicability.

[0032] Continuing to refer to Figure 1As shown, the metal receiver 11 comprises a flat plate structure of the conductive plate 111, which is arranged opposite to the emission end of the ion generator 2. It should be understood that the arrangement of the conductive plate 111 opposite to the emission end of the ion generator 2 means that the emission direction of the ion flow in the ion generator 2 is perpendicular to the plane of the conductive plate 111. The conductive plate 111 can be a metal material with good conductivity, which can accumulate charges after receiving the ion flow and make the charges move to form a current.

[0033] Further, based on the arrangement of the conductive plate 111, a stable and reliable ion flow receiving plane can be formed, thereby significantly improving the detection accuracy and reliability of the entire ion flow detection device.

[0034] With reference to the drawings Figure 1 As shown, the detection device further comprises a bracket structure 13, and the metal receiver 11 and the microammeter 12 are mounted on the bracket structure 13. The bracket structure 13 has a support plane at the bottom. The bracket structure 13 can be a plurality of plate structures arranged in a ring shape, thereby supporting the microammeter 12 and other electronic components inside and providing a stable and reliable closed environment, reducing the stability of the internal structure of the detection device. The bracket structure 13 can also be a bracket formed by a rod structure and / or a plate structure, as long as it can provide a stable and reliable mounting bracket for the metal receiver 11 and the microammeter 12.

[0035] Further, based on the bracket structure 13, a reliable and stable base can be provided for the metal receiver 11 and the microammeter 12. The support plane at the bottom of the bracket structure 13 can further improve the stability and reliability of the bracket structure 13. The support plane can be formed by at least three support points arranged around a straight line, or can be formed by at least one plane structure, as long as it can provide a stable base structure for the detection device.

[0036] With reference to the drawings Figure 3As shown, in some embodiments, the micro-current meter 12 includes an ion flow meter, a high-voltage generator, a standard capacitor, and a control module, wherein the standard capacitor can be a capacitor with a specification of 20pF±2pF, one end of the standard capacitor is electrically connected to the ion flow meter, and the other end is grounded, the receiving end of the ion flow meter is electrically connected to the metal receiver 11, when the metal receiver 11 receives ions, the ions flow through the ion flow meter and then flow to the standard capacitor, the ion flow meter measures the amount of ions generated by the ion generator once and reaching the electrode plate of the standard capacitor at this time, the high-voltage generator is electrically connected to both ends of the standard capacitor, and the control module is electrically connected to the high-voltage generator and the ion flow meter; wherein the ion flow meter, the high-voltage generator, the standard capacitor and the control module can be installed on the support structure 13 after reasonable layout; further, the output end of the high-voltage generator is electrically connected to the electrode plate electrically connected to the metal receiver 11 in the standard capacitor, so that the control module can obtain the amount of ions flowing through the ion flow meter, and give an instruction to the high-voltage generator to supplement the voltage of the electrode plate in time; it should be understood that the control module is electrically connected to the display screen, and the ion flow information can be directly output as data displayed by the display screen after calculation and analysis by the control module.

[0037] Optionally, the top of the support structure 13 has a support plate 131, which is arranged in close contact with the bottom of the metal receiver 11. It should be noted that the support plate 131 can have the same shape as the metal receiver 11, and the projection areas of the two in the vertical direction are close, so that the support area of the support plate 131 to the metal receiver 11 can be significantly improved. Both can be square or rectangular plate structures, and the support plate 131 can be fixed with the metal receiver 11 by bolts or adhesion or other ways. The support plate 131 and the support structure 13 can be fixed by bolts or adhesion or other ways.

[0038] Further, based on the arrangement of the above support plate 131, the metal receiver 11 can be further stably supported, and the detection accuracy and stability of the detection device can be improved.

[0039] In further embodiments, a through hole can be formed in the support plate 131, through which the connecting line connecting the metal receiver 11 and the micro-current meter 12 passes and is fixed.

[0040] Continuing to refer to Figure 1 and Figure 2 As shown, in the second aspect, the application provides a detection method using the ion flow detection device as above, comprising the following steps: S1, calibrating the micro-current meter 12; S2, pre-work inspection of the detection device; S3, placing the ion flow detection device to a set position; S4, turning on the ion generator 2; S5, recording the measurement data of the microammeter 12; S6, judging whether the ion generator 2 is running normally, if yes, continuing to use, if not, repairing the ion generator 2.

[0041] Based on the above detection method, the microammeter 12 can be used to display the data of the ion flow emitted by the ion generator 2 in real time, so that the ion flow data with low delay and low error can be observed simply and intuitively.

[0042] In some embodiments, step S3 specifically refers to placing the metal receiver 11 of the ion flow detection device opposite the emission end of the ion generator 2. It should be understood that placing the metal receiver 11 opposite the emission end of the ion generator 2 means that the emission direction of the ion flow in the ion generator 2 is perpendicular to the plane of the conductive plate 111 in the metal receiver 11. The conductive plate 111 can be a metal material with good conductivity. As long as it can accumulate electric charge after receiving the ion flow and make the electric charge move to form an electric current, the distance between the ion flow detection device and the ion generator 2 can be adjusted to a set range by moving the ion flow detection device or the ion generator 2.

[0043] Further, based on step S3, the angle and distance between the metal receiver 11 and the ion generator 2 are adjusted, so that the detection device can more efficiently receive the ion flow emitted by the ion generator 2, and the detection result is more accurate and reliable.

[0044] In some embodiments, between step S5 and step S6, there is also step S51: repeating steps S4 and S5 multiple times to record the measurement data of the microammeter 12 multiple times.

[0045] Further, by step S51, multiple sets of measurement data can be analyzed by taking the average, which further improves the accuracy. One or more reliable data can also be selected for further analysis.

[0046] Optionally, step S6 of judging whether the ion generator 2 is running normally includes: judging whether the ion generator 2 is running normally by calculating and analyzing the specific value of the ion flow.

[0047] Optionally, step S6 of judging whether the ion generator 2 is running normally specifically includes: judging whether the ion generator 2 is running normally by drawing a curve of the ion flow changing with time.

[0048] Optionally, the metal receiver 11 in the ion flow detection device is in a flat plate structure, and the step S3 is specifically setting the center position of the flat plate of the metal receiver 11 to face the emission end of the ion generator 2, so that the emission end of the ion generator 2 vertically emits towards the metal receiver 11 in the flat plate structure, and the ion flow detection device or the ion generator 2 is moved to adjust the distance between the metal receiver 11 and the ion generator 2 to be within a set range.

[0049] Further, the metal receiver 11 can include a conductive plate 111 in a flat plate structure, and the conductive plate 111 is arranged to face the emission end of the ion generator 2. It should be understood that the conductive plate 111 arranged to face the emission end of the ion generator 2 means that the emission direction of the ion flow in the ion generator 2 is perpendicular to the plane of the conductive plate 111. The conductive plate 111 can be a metal material with good conductivity, as long as it can accumulate electric charge after receiving the ion flow and make the electric charge move to form an electric current. Based on the above step S3, the angle and distance between the metal receiver 11 and the ion generator 2 are adjusted, so that the detection device can more efficiently receive the ion flow emitted by the ion generator 2, and further improve the accuracy and reliability of the detection result.

[0050] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily mean the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0051] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, for example, two, three, etc., unless otherwise specifically limited.

[0052] Although the embodiments of the present application have been shown and described above, it should be understood that the above embodiments are exemplary and cannot be understood as limiting the present application, and those skilled in the art can make changes, modifications, replacements and variations to the above embodiments within the scope of the present application.

Claims

1. An ion flux detection device, characterized by, The device comprises: a metal receiver (11) for receiving ion flow emitted by an ion generator (2); a micro-current meter (12) having a receiving end electrically connected to the metal receiver (11) and used for processing ion flow information received by the metal receiver (11); a display screen electrically connected to an output end of the micro-current meter (12) and used for displaying ion flow information received by the metal receiver (11) in real time.

2. The ion flux detection apparatus according to claim 1, wherein The metal receiver (11) comprises a flat-plate conductive plate (111) arranged opposite to an emitting end of the ion generator (2).

3. The ion flux detection apparatus of claim 1, wherein The detection device further comprises a bracket structure (13), and the metal receiver (11) and the micro-current meter (12) are both mounted on the bracket structure (13), and the bracket structure (13) has a supporting plane at the bottom.

4. The ion flux detection apparatus of claim 3, wherein The bracket structure (13) has a supporting plate (131) at the top, and the supporting plate (131) is arranged in close contact with the bottom of the metal receiver (11).

5. A detection method using the ion flow detection device according to any one of claims 1 to 4, characterized by, The method comprises the following steps: S1, calibrating the micro-current meter (12); S2, performing pre-operation inspection on the detection device; S3, placing the ion flow detection device at a designated work station; S4, starting the ion generator (2); S5, recording measurement data of the micro-current meter (12); S6, judging whether the ion generator (2) is in normal operation, if yes, continuing to use, if not, performing maintenance on the ion generator (2).

6. The detection method according to claim 5, characterized in that, The step S3 specifically comprises arranging the metal receiver (11) of the ion flow detection device opposite to the emitting end of the ion generator (2), and adjusting the distance between the ion flow detection device and the ion generator (2) to a designated range by moving the ion flow detection device or the ion generator (2).

7. The detection method according to claim 5, characterized in that, The step S5 and the step S6 further comprise a step S51 of repeatedly performing the step S4 and the step S5 for multiple times to record measurement data of the micro-current meter (12) for multiple times.

8. The method of claim 5, wherein, The step S6 of judging whether the ion generator (2) is in normal operation comprises judging whether the ion generator (2) is in normal operation by calculating and analyzing specific values of ion flow.

9. The method of claim 5, wherein, The step S6 of judging whether the ion generator (2) is in normal operation specifically comprises judging whether the ion generator (2) is in normal operation by drawing a curve of ion flow changing with time.

10. The assay method according to any one of claims 5 to 9, characterized in that, The metal receiver (11) in the ion flow detection device is in a flat-plate structure, and the step S3 specifically comprises arranging the center of the flat plate of the metal receiver (11) opposite to the emitting end of the ion generator (2) to make the emitting end of the ion generator (2) vertically emit toward the metal receiver (11) in the flat-plate structure, and adjusting the distance between the metal receiver (11) and the ion generator (2) to a designated range by moving the ion flow detection device or the ion generator (2).

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