A fluid control device applied to a semiconductor process

Abstract

The embodiment of the present specification provides a fluid control device applied to a semiconductor process, which comprises a valve body, a valve rod and an actuator, one end of the valve rod extends into the valve body for installing a valve plate, the other end of the valve rod penetrates through the valve body and is connected with the actuator to drive the valve plate to rotate through the valve rod, the valve rod comprises a main body part and a driving part, the first end of the main body part extends into the valve body, and the second end extends to the outside of the valve body, the second end of the main body part is connected with the first end of the driving part through a connecting piece to make the main body part and the driving part rotate synchronously, and the second end of the driving part is connected with the actuator. The valve rod is divided into the main body part extending into the valve body and the driving part arranged outside the valve body, the main body part and the driving part can be machined respectively, the machining difficulty is reduced, meanwhile, the driving part can be made of low-cost material, and the cost is reduced.

Description

Technical Field

[0001] This specification relates to the field of semiconductor process technology, and specifically to a fluid control device applied to semiconductor process manufacturing. Background Technology

[0002] In semiconductor manufacturing processes, valves are often used to control fluid flow. The valve stem is an essential component of the valve body. However, in some special cases, the valve stem needs to extend a considerable distance beyond the valve body. This extended stem length can lead to the following problems:

[0003] Increased cost: The valve stem is the component that comes into direct contact with the fluid medium inside the valve, and it requires high corrosion resistance, so its material price is high. However, the extension length outside the valve body does not actually require corrosion resistance.

[0004] Increased processing difficulty: Valve stems already require high processing precision, and their increased length significantly increases the processing difficulty. Due to the high precision requirements and long length of the valve stem, its quality is not easily guaranteed, and the scrap rate will increase. Summary of the Invention

[0005] In view of this, the embodiments of this specification provide a fluid control device for semiconductor process manufacturing, which divides the valve stem into a main body that extends into the valve body and a drive part that is disposed outside the valve body. The main body and the drive part can be machined separately, reducing the machining difficulty. At the same time, the drive part can be made of a low-cost material, reducing the cost.

[0006] This specification provides the following technical solution through its embodiments: a fluid control device applied in semiconductor process technology, comprising a valve body, a valve stem, and an actuator. One end of the valve stem extends into the valve body for mounting a valve plate, and the other end of the valve stem passes through the valve body and connects to the actuator, so as to drive the valve plate to rotate via the valve stem.

[0007] The valve stem includes a main body and a drive part. The first end of the main body extends into the valve body and the second end extends outside the valve body. The second end of the main body is connected to the first end of the drive part through a connector so that the main body and the drive part rotate synchronously. The second end of the drive part is connected to the actuator.

[0008] Preferably, the connector includes a first connecting portion extending toward the main body and a second connecting portion extending toward the drive portion, wherein the orthographic projections of the first connecting portion and the second connecting portion are perpendicular to each other.

[0009] Preferably, the second connecting part comprises a wedge-shaped block, the driving part is provided with a slot on the side end surface close to the second connecting part, the wedge-shaped block is at least partially embedded in the slot, and the embedded part is in close contact with the inner wall of the slot.

[0010] Preferably, the depth of the slot is greater than the height of the wedge-shaped block, so that an axial gap is provided between the wedge-shaped block and the slot to maintain a close-fitting connection.

[0011] Preferably, the first connecting part comprises a protrusion, the main body part is provided with a groove on the side end surface close to the first connecting part, and the protrusion is at least partially embedded in the groove.

[0012] Preferably, the middle region of the first connecting part is recessed inward to form a receiving groove, and an elastic member is arranged in the receiving groove, the elastic member always pushes the connecting part to have a tendency to move towards the driving part, so as to ensure that the wedge-shaped block is always embedded in the slot.

[0013] Preferably, the device further comprises a main bearing arranged at the end of the driving part close to the actuator, and a secondary bearing arranged at the connection between the driving part and the main body part, the secondary bearing comprises a first bearing and a second bearing, the second bearing is arranged at the end of the driving part close to the main body part, and the first bearing is arranged at the end of the main body part close to the driving part.

[0014] Preferably, the end portions of the main body part and the driving part are respectively extended to form limiting platforms, the installation space of the first bearing and the second bearing is formed between the two limiting platforms, and the first bearing and the second bearing are respectively in abutment with the corresponding limiting platforms, so as to keep the axial center of the section of the main body part extending into the valve body in alignment with the valve plate.

[0015] Preferably, an annular pad is arranged between the first bearing and the second bearing, the annular pad is arranged corresponding to the outer rings of the first bearing and the second bearing, so that the first bearing and the second bearing are kept in abutment with the corresponding limiting platforms.

[0016] Preferably, the device further comprises a heat dissipation part, the heat dissipation part is arranged on the driving part and located between the valve body and the actuator.

[0017] Preferably, the length of the main body part extending to the outside of the valve body is not more than 10% of the length of the main body part itself.

[0018] Preferably, the main body part and the driving part are respectively a main body rod and a driving rod made of different metal materials.

[0019] And / or, the connecting piece is made of hard material with good thermal conductivity.

[0020] Compared with the prior art, the at least one technical solution adopted by the embodiment of the present specification can achieve the beneficial effects at least including:

[0021] The valve rod is divided into a main body part extending into the valve body and a driving part arranged outside the valve body, the main body part and the driving part can be machined respectively, the machining difficulty is reduced, the driving part can be made of low-cost material, the cost is reduced, the main body part and the driving part are connected through the connecting piece, the synchronous rotation of the main body part and the driving part is ensured, the actuator can control the overall rotation of the valve rod, and the fluid is accurately controlled. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0023] Fig. 1 is a structural schematic diagram of the fluid control device provided by the present application;

[0024] Fig. 2 is a structural schematic diagram of the connection between the main body part and the driving part of the fluid control device provided by the present application;

[0025] Fig. 3 is a structural schematic diagram of the connecting piece of the fluid control device provided by the present application.

[0026] In the figure, 1 is a valve body, 2 is a valve rod, 21 is a main body part, 22 is a driving part, 3 is an actuator, 4 is a valve plate, 5 is a connecting piece, 51 is a first connecting part, 52 is a second connecting part, 6 is a heat dissipation part, 7 is a main bearing, 8 is a secondary bearing, 81 is a first bearing, 82 is a second bearing, 9 is an annular pad, 10 is an embedded groove, 11 is a groove, 12 is a containing groove, 13 is an elastic piece, and 14 is a limiting table. DETAILED DESCRIPTION

[0027] The embodiments of the present application will be described in detail below with reference to the drawings.

[0028] Following, the embodiments of the present application are described through specific examples, and other advantages and effects of the present application can be easily understood by those skilled in the art from the disclosure. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific embodiments, and various modifications or changes can be made to the details in the specification without departing from the spirit of the present application. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0029] It should be noted that various aspects of the embodiments described below are within the scope of the appended claims. It should be apparent that the aspects described herein can be embodied in a wide variety of forms and that any specific structure and / or function described herein is merely illustrative. Based on the teachings herein one skilled in the art should appreciate that an aspect described herein can be implemented independently of any other aspects and that an aspect can be implemented both as any number of software and / or hardware structures and as any number of combinations of software and / or hardware structures. For example, an apparatus can be implemented as any number and combination of the aspects described herein. Additionally, the features described herein can be implemented as part of one or more separate devices or components, or as part of an integrated device or component. Further, the aspects described herein can be implemented as part of a cloud-based service.

[0030] It should also be noted that the drawings included in the following embodiments are only to schematically illustrate the basic concept of the present application, and only the components related to the present application are shown in the drawings, not the number, shape and size of the components when actually implemented. The actual implementation of each component can be a random change in shape, number and proportion, and the layout of the components can also be more complex.

[0031] In addition, in the following description, specific details are provided to facilitate a thorough understanding of examples. Those skilled in the art will understand, however, that the described aspects can be practiced without these specific details.

[0032] In the application of fluid control devices, especially in the application of butterfly valves, when high-temperature medium needs to be passed through or the medium passing through needs to be heated, in order to prevent the electrical control system from being affected in performance and service life due to excessive temperature rise, a set of heat sinks is usually arranged between the butterfly valve body and the electrical controller to ensure that the electrical control system is within the appropriate working temperature range.

[0033] In view of the need for heat dissipation effect, the heat sink needs to have a certain height.

[0034] In the existing butterfly valve design of this type, the valve stem structure is usually designed as a whole, that is, the valve stem directly passes through the radiator from the inside of the valve body and extends to connect with the electric control system.

[0035] However, this design causes the overall length of the valve stem to increase significantly, which in turn leads to a series of technical problems:

[0036] High material cost: As a component directly in contact with the medium inside the valve, the valve stem must have high corrosion resistance to withstand harsh working environments. Therefore, the valve stem material is usually selected from high-priced corrosion-resistant metals. However, the extended part outside the valve body does not actually require such high corrosion resistance as it is not directly in contact with the medium, resulting in a certain degree of waste of material cost.

[0037] High processing difficulty: The machining precision of the valve stem is crucial to the overall performance of the butterfly valve. With the increase in the length of the valve stem, the control of geometric precision such as coaxiality and perpendicularity during the machining process becomes more difficult, significantly increasing the processing difficulty. This not only requires higher processing equipment and process level, but also increases the uncertainty and risk in the processing process.

[0038] Quality assurance is difficult: Due to the long length of the valve stem and the high machining precision requirement, it is difficult to completely guarantee that each valve stem meets the design requirements during the machining process. The increase in length makes the valve stem more susceptible to deformation during machining and transportation due to external forces, which in turn affects the fitting precision of the valve plate, electric control system and other components. This directly leads to an increase in the rejection rate during processing, increasing production costs and cycle time.

[0039] To address the above problems, it is necessary to improve the valve stem structure of the existing butterfly valve to reduce material cost, processing difficulty and quality risk, thereby improving the overall performance and reliability of the butterfly valve.

[0040] The technical solutions provided by the embodiments of the present application are described below in conjunction with the accompanying drawings.

[0041] As shown in Figs. 1-3 A fluid control device applied to semiconductor process, comprising a valve body 1, a valve stem 2 and an actuator 3, one end of the valve stem 2 extends into the valve body 1 for mounting a valve plate 4, the other end of the valve stem 2 passes through the valve body 1 and is connected with the actuator 3, so as to drive the valve plate 4 to rotate through the valve stem 2,

[0042] The valve stem 2 comprises a main body part 21 and a driving part 22, the first end of the main body part 21 extends into the valve body 1, and the second end extends out of the valve body 1, the second end of the main body part 21 is connected with the first end of the driving part 22 through the connecting piece 5, so that the main body part 21 and the driving part 22 rotate synchronously, and the second end of the driving part 22 is connected with the actuator 3.

[0043] The valve stem 2 is divided into a main body part 21 and a driving part 22, the first end of the main body part 21 extends into the valve body 1, and the second end extends out of the valve body 1, the second end of the main body part 21 is connected with the first end of the driving part 22 through the connecting piece 5, so that the main body part 21 and the driving part 22 rotate synchronously, and the second end of the driving part 22 is connected with the actuator 3.

[0044] Due to the segmented design of the valve stem 2, the main body part 21 (the part extending into the valve body 1) can be made of high corrosion-resistant material, while the driving part 22 (the part extending out of the valve body 1) can be made of lower-cost material with lower corrosion resistance requirement, thus effectively saving the overall material cost. The segmented design greatly reduces the processing difficulty of the valve stem 2. The main body part 21 and the driving part 22 can be processed separately, and due to the shortened length, the processing precision is easier to guarantee, and the processing amount is also reduced accordingly, thus reducing the processing cost. The segmented design and the special connecting piece 5 make the overall quality of the valve stem 2 more stable and reliable. The processing difficulty of the slender shaft component changes in a non-linear proportion to the length, and after segmentation, the length is reduced, the quality cost is significantly reduced, and the processing scrap rate is also reduced. The segmented valve stem 2 structure is more flexible, and the material, length, etc. of the main body part 21 and the driving part 22 can be adjusted according to actual needs to adapt to the needs of different semiconductor process.

[0045] As shown in Figs. 2-3 In some embodiments, the connecting piece 5 comprises a first connecting part 51 extending towards the main body part 21 and a second connecting part 52 extending towards the driving part 22, and the orthographic projections of the first connecting part 51 and the second connecting part 52 are perpendicular to each other. The connecting piece 5 is composed of the first connecting part 51 and the second connecting part 52, which are vertically crossed in space (orthographic projections are perpendicular to each other). This vertical cross design forms a structure similar to a "cross joint", and the vertical cross structure allows the first connecting part 51 and the second connecting part 52 to swing relative to each other within a small range, and when the driving part 22 axis is offset, the second connecting part 52 and / or the first connecting part 51 can be adjusted in position with a gap, automatically compensating for the deviation, which can ensure the transmission of rotary power and allow for small deviations.

[0046] It should be noted that the vertical cross structure simplifies the assembly process, does not need to be accurately centered, can reduce assembly errors, and the vertical layout disperses the bending stress in the rotation process and reduces the risk of breakage.

[0047] As shown in Figs. 2-3 In some embodiments, the second connecting part 52 includes a wedge-shaped block, and the driving part 22 is provided with an embedding groove 10 on one side end face close to the second connecting part 52, the wedge-shaped block is at least partially embedded in the embedding groove 10, and the embedded part is in close contact with the inner wall of the embedding groove 10. The second connecting part 52 is at least partially in the shape of a wedge-shaped block, and the cross section is in the shape of a trapezoid or an inclined surface structure, having a one-way guiding property. The driving part 22 is provided with an embedding groove 10 matching the wedge-shaped block on the end face, and the inner wall shape of the embedding groove 10 is completely in close contact with the inclined surface of the wedge-shaped block, forming a mechanical interlocking.

[0048] When the driving part 22 receives the rotating torque of the actuator 3, the inner wall of the embedding groove 10 exerts a normal force on the inclined surface of the wedge-shaped block, which is decomposed into an axial component (driving the valve stem 2 to rotate) and a radial component (pressing the connection), and the angle of the inclined surface of the wedge-shaped block is optimized to ensure that the radial component tightly presses the two components while transmitting the torque, preventing loosening. During rotation, the inclined surface contact surface of the wedge-shaped block and the embedding groove 10 continuously transmits power, realizing the synchronous rotation of the main body part 21 and the driving part 22.

[0049] The inclined surface contact between the wedge-shaped block and the embedding groove 10 increases the stress area and reduces stress concentration, making torque transmission more stable. The mechanical interlocking structure avoids the loosening or slipping phenomenon that may occur in the traditional connection mode (such as a flat key), and the power transmission reliability is significantly improved. The matching tolerance between the wedge-shaped block and the embedding groove 10 is lower than the coaxiality requirement of the whole valve stem 2, reducing the processing difficulty and cost. If the driving part 22 or the main body part 21 is damaged, only the wedge-shaped block connection needs to be disassembled to replace the components individually, without the need to replace the whole valve stem 2, reducing the maintenance cost.

[0050] As shown in Figs. 1-2 In some embodiments, the depth of the embedding groove 10 is greater than the height of the wedge-shaped block, so that an axial gap is provided between the wedge-shaped block and the embedding groove 10 to maintain a tight fitting connection. The axial depth of the embedding groove 10 (in the direction of the rotation axis of the valve stem 2) is greater than the axial height of the wedge-shaped block, forming a clear depth difference. After assembly, an axial gap is reserved between the end of the wedge-shaped block and the inner top wall of the embedding groove 10. The axial gap can avoid the assembly difficulty caused by the interference fit between the wedge-shaped block and the embedding groove 10, and at the same time, the inclined surface of the wedge-shaped block is in close contact with the side wall of the embedding groove 10, and the self-locking effect of the inclined surface ensures that the wedge-shaped block will not loosen due to vibration or reverse load during torque transmission.

[0051] It should be noted that by forming an axial gap between the wedge block and the groove 10, the axial gap can absorb a certain amount of thermal expansion, ensuring that the connection structure can still work normally under extreme temperatures.

[0052] like Figs. 2-3 As shown, in some embodiments, the first connecting portion 51 includes a protrusion, and the main body portion 21 has a groove 11 on one end face near the first connecting portion 51 that mates with the protrusion. The protrusion is at least partially embedded in the groove 11. The first connecting portion 51 includes a protrusion, while the main body portion 21 has a groove 11 that mates with the protrusion. During assembly, the protrusion is at least partially embedded in the groove 11, forming a precision fit connection. This connection method ensures that the drive unit 22 can effectively transmit power to the main body portion 21, while allowing for certain assembly and processing deviations.

[0053] It should be noted that the outer wall of the protrusion is in contact with the inner wall of the groove 11, or has only a very small gap, so as to ensure that the protrusion will not move relative to the main body 21, and further ensure the synchronous rotation of the drive part 22 and the main body 21.

[0054] like Figs. 1-2 As shown, in some embodiments, the central region of the first connecting portion 51 is recessed into a receiving groove 12, and an elastic element 13 is disposed within the receiving groove 12. The elastic element 13 constantly pushes the connecting member 5, causing it to tend to move towards the driving portion 22, thereby ensuring that the wedge block is always embedded in the groove 10. The elastic element 13 (such as a spring) disposed within the receiving groove 12 of the first connecting portion 51 generates a continuous pushing force when the driving portion 22 and the main body portion 21 are connected through the connecting member 5, causing the connecting member 5 to always tend to move towards the driving portion 22, thereby ensuring that the wedge block and the groove 11 fit tightly together.

[0055] It should be noted that by setting the elastic element 13, if there is a deviation in processing or assembly (such as axial misalignment), the elastic element 13 absorbs the deviation through deformation, pushes the wedge block to keep in contact with the groove 10, and avoids asynchronous rotation due to gaps.

[0056] like Figs. 1-2As shown, in some embodiments, the device further includes a main bearing 7 disposed at the end of the drive unit 22 near the actuator 3 and a secondary bearing 8 disposed at the connection between the drive unit 22 and the main body 21. The secondary bearing 8 includes a first bearing 81 and a second bearing 82. The second bearing 82 is disposed at the end of the drive unit 22 near the main body 21, and the first bearing 81 is disposed at the end of the main body 21 near the drive unit 22. The main bearing 7, disposed at the end of the drive unit 22 near the actuator 3, bears the main radial and axial loads of the drive unit 22, ensuring its rotational stability. The secondary bearing 8, composed of the first bearing 81 and the second bearing 82, is located at both ends of the connection between the drive unit 22 and the main body 21, forming a "double-pivot support" structure. The first bearing 81 is installed at the end of the main body 21 near the drive unit 22, limiting the radial runout of the main body 21; the second bearing 82, disposed at the end of the drive unit 22 near the main body 21, further shares the axial force, reducing the stress on the connecting member 5.

[0057] It should be noted that the combined support of the main bearing 7 and the auxiliary bearing 8 significantly reduces the radial clearance and axial movement of the drive unit 22 and the main body 21 during rotation, ensuring the synchronization of the rotation of the drive unit 22 and the main body 21.

[0058] like Figs. 1-2 As shown, in some embodiments, the outer periphery of the ends where the main body 21 and the drive part 22 connect respectively extends to form limiting platforms 14. A mounting space for the first bearing 81 and the second bearing 82 is formed between the two limiting platforms 14. The first bearing 81 and the second bearing 82 respectively abut against the corresponding limiting platform 14 to keep the axial center aligned between the section of the main body 21 extending into the valve body 1 and the valve plate 4, preventing positional deviation of the valve plate 4 along the axial direction of the main body 21 (i.e., the valve stem), thereby facilitating precise control of the flow rate of the medium flowing within the valve body 1. The outer periphery of the connecting ends of the main body 21 and the drive part 22 respectively extends to form annular limiting platforms 14. The two limiting platforms 14 are arranged opposite each other to form a dedicated mounting space for the first bearing 81 and the second bearing 82. The bearing mounting space formed by the double limiting platforms 14 can prevent the first bearing 81 and the second bearing 82 from axially shifting or falling off, while also dispersing stress concentration at the connection between the main body 21 and the drive part 22. The limiting stage 14 can precisely control the axial position of the first bearing 81 and the second bearing 82 through physical stops, so that the coaxiality error between the main body 21 and the valve plate 4 is controlled within the design range, ensuring the accuracy of the rotation of the valve plate 4.

[0059] like Figs. 1-2As shown, in some embodiments, an annular spacer 9 is sandwiched between the first bearing 81 and the second bearing 82. The annular spacer 9 is disposed corresponding to the outer ring of the first bearing 81 and the second bearing 82, so that the first bearing 81 and the second bearing 82 maintain abutment with the corresponding limiting platform 14. By providing the annular spacer 9 between the first bearing 81 and the second bearing 82, a certain space is provided between the first bearing 81 and the second bearing 82, thereby facilitating the installation of the connecting piece 5. The axial distance between the first bearing 81 and the second bearing 82 can be precisely adjusted by the thickness of the annular spacer 9, ensuring that the outer ring of the bearing maintains rigid contact with the end face of the limiting platform 14. At the same time, the annular spacer 9 ensures complete fit between the outer ring of the bearing and the limiting platform 14, further ensuring the coaxiality of the main body 21 and the valve plate 4.

[0060] like Fig. 1 As shown, in some embodiments, the device further includes a heat dissipation section 6, which is disposed on the drive section 22 and located between the valve body 1 and the actuator 3. When the temperature of the medium inside the valve body 1 is high (or when operating in a high-temperature environment), the heat inside the valve body 1 will dissipate. To avoid the temperature at the actuator 3 being too high, a heat dissipation section 6 can be added between the valve body 1 and the actuator 3. The heat dissipation section 6 can dissipate heat from the drive section 22, preventing excessive heat transfer to the actuator 3 and ensuring that the actuator 3 can operate at a suitable temperature.

[0061] like Fig. 1 As shown, in some embodiments, the length of the main body 21 extending outside the valve body 1 does not exceed 10% of its own length. The main body 21 only extends outside the valve body 1 by no more than 10% of its own length, and the remaining driving task is completed by the independent driving unit 22. By shortening the exposed section of the main body 21, the waste of precious metal materials can be reduced. Under the premise of ensuring the driving function of the valve plate 4, the comprehensive optimization of material cost, processing accuracy and system reliability is achieved.

[0062] It should be noted that, in specific implementations, the exact length by which the main body 21 extends outside the valve body 1 can be designed according to the actual situation.

[0063] In some embodiments, the main body 21 and the drive part 22 are made of different metal materials, respectively. The main body 21 is directly connected to the valve plate 4 and comes into contact with the medium (such as corrosive fluids or high-temperature steam) inside the valve body 1. It needs to have high corrosion resistance, wear resistance, and fatigue resistance, and the material needs to be a precious metal. The drive part 22 is located outside the valve body 1 and is connected to the electrical control system. It mainly bears torque transmission and axial force and does not come into contact with the medium. The material can be an ordinary metal, which can reduce material costs.

[0064] In some embodiments, the connecting member 5 is made of a hard material with good thermal conductivity. The connecting member 5 is made of a material with good thermal conductivity, which facilitates the heat transfer from the main body 21 to the driving part 22, so that the heat can be quickly dissipated through the heat dissipation part 6. Meanwhile, the connecting member 5 is made of a hard material (such as a metal material or an alloy material), which will not deform when the driving part 22 drives the main body 21 to rotate, thereby ensuring the synchronous rotation of the driving part 22 and the main body 21.

[0065] By using the above device, at least the following effects are achieved:

[0066] Material cost is saved: the length of the valve stem 2 is shortened by nearly 50%, and the outer diameter can also be reduced. As the valve stem 2 is made of a precious metal, the weight of the material is reduced by more than 50%.

[0067] Processing cost is saved: after the length of the valve stem 2 is shortened, the diameter is also reduced, making the processing easier and the processing amount reduced, and the precision is easier to guarantee.

[0068] Quality cost is reduced: as an elongated shaft component, the processing difficulty changes in a non-linear proportion with the length, and the quality cost is also the same. The elongated shaft component has a length reduced by nearly 50%, and the quality cost is reduced by more than 50%.

[0069] The cross joint is used to connect the driving part 22 and the main body 21 with a long span, which can automatically compensate for the processing deviation and assembly deviation, and effectively protect the related parts of the valve body 1.

[0070] The same or similar parts in each embodiment in the specification can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the method embodiments described later, since they correspond to the system, the description is relatively simple, and the relevant parts can be referred to the part of the system embodiment.

[0071] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or replacements within the technical range disclosed in the present application can be easily thought by those skilled in the art, which should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A fluid control device for semiconductor process, comprising a valve body, a valve stem and an actuator, one end of the valve stem extends into the valve body for installing a valve plate, the other end of the valve stem extends out of the valve body and connects with the actuator, the valve plate is rotated by the valve stem, characterized in that, the valve stem comprises a main body and a driving part, the first end of the main body extends into the valve body, and the second end extends out of the valve body, the second end of the main body is connected with the first end of the driving part through a connecting piece, so that the main body and the driving part rotate synchronously, the second end of the driving part is connected with the actuator; the connecting piece comprises a first connecting part extending towards the main body and a second connecting part extending towards the driving part, the orthographic projection of the first connecting part and the second connecting part is perpendicular to each other; the second connecting part comprises a wedge block, the driving part is provided with a groove on the side end face close to the second connecting part, the wedge block is at least partially embedded in the groove, and the embedded part is fitted with the inner wall of the groove; the first connecting part comprises a protrusion, the main body is provided with a groove on the side end face close to the first connecting part, the protrusion is at least partially embedded in the groove; the middle part of the first connecting part is recessed to form a receiving groove, and an elastic member is arranged in the receiving groove, the elastic member always pushes the connecting piece to move towards the driving part, so as to ensure that the wedge block is always embedded in the groove. The depth of the groove is greater than the height of the wedge block, so that an axial gap is formed between the wedge block and the groove to keep close connection. The device further comprises a main bearing arranged at the end of the driving part close to the actuator and a secondary bearing arranged at the connection between the driving part and the main body, the secondary bearing comprises a first bearing and a second bearing, the second bearing is arranged at the end of the driving part close to the main body, and the first bearing is arranged at the end of the main body close to the driving part. The outer periphery of the end of the main body and the driving part connected with each other extends to form a limiting platform, the installation space of the first bearing and the second bearing is formed between the two limiting platforms, and the first bearing and the second bearing respectively abut against the corresponding limiting platforms, so as to keep the axial center alignment between the section of the main body extending into the valve body and the valve plate. An annular pad is arranged between the first bearing and the second bearing, and the annular pad is arranged corresponding to the outer ring of the first bearing and the second bearing, so that the first bearing and the second bearing keep abutting against the corresponding limiting platforms. The device further comprises a heat dissipation part arranged on the driving part and located between the valve body and the actuator.

2. The fluid control device for use in a semiconductor process according to claim 1, wherein, The length of the main body extending out of the valve body is not more than 10% of the length of the main body itself.

3. The fluid control device for use in a semiconductor process according to claim 1, wherein ​ 4. The fluid control device for use in a semiconductor process according to claim 3, wherein ​ 5. The fluid control device for use in a semiconductor process according to claim 4, wherein ​ 6. The fluid control device for use in a semiconductor process according to any one of claims 1 to 5, wherein ​ 7. The fluid control device for use in a semiconductor process according to claim 6, wherein ​ And / or, the main body part and the driving part are respectively made of main body rods and driving rods of different metal materials; And / or, the connecting piece is made of a hard material with good heat conductivity.

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