Lifting mechanism and image instrument

Abstract

The application provides a lifting mechanism and an image instrument. The lifting mechanism comprises a moving component and a first screw nut pair. The moving component comprises a base plate and a first connecting seat, and the first connecting seat is provided with a first accommodating groove. The first screw nut pair comprises a first screw rod and a first nut, and the first nut is provided with a first connecting part which extends into the first accommodating groove. The first connecting part has a first side and a second side which are oppositely arranged along a first direction. The first side is connected with the first connecting seat through a first rigid connecting piece. The second side is connected with the first connecting seat through a first elastic connecting piece. The opposite sides of the first connecting seat are respectively provided with positioning pieces, and the opposite sides of the first nut in a second direction are respectively abutted with the positioning pieces. The lifting mechanism has low processing and assembling requirements, and has small thickness, thereby improving the moving precision of the horizontal moving mechanism on the optical system.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of measuring devices, in particular to a lifting mechanism and an image instrument. BACKGROUND

[0002] The image instrument is a device for non-contact measurement of the size of a workpiece by using optical imaging technology, combining precision movement and computer software processing. The image instrument drives the optical system up and down through a lifting mechanism, and moves the optical system horizontally relative to the object table through a horizontal moving mechanism.

[0003] At present, the lifting mechanism of the image instrument usually adopts a lead screw drive. The lifting mechanism includes a lead screw, a nut, a moving part, and an anti-rotation slide rail. The optical system is installed on the moving part. The nut is sleeved on the lead screw and is hard connected with the moving part. The nut is sleeved on the anti-rotation slide rail and is slidingly connected with the anti-rotation slide rail. However, the machining and assembly requirements of the lifting mechanism are high, and the thickness of the lifting mechanism is large, which affects the moving precision of the horizontal moving mechanism on the optical system. SUMMARY

[0004] The embodiment of the present application provides a lifting mechanism and an image instrument. The machining and assembly requirements of the lifting mechanism are low, and the thickness of the lifting mechanism is small, thereby improving the moving precision of the horizontal moving mechanism on the optical system.

[0005] In one aspect, the embodiment of the present application provides a lifting mechanism, which includes a moving part and a first lead screw nut pair.

[0006] The moving part includes a base plate and a first connecting seat installed on the base plate. The first connecting seat is provided with a first accommodating groove.

[0007] The first lead screw nut pair is configured to drive the moving part to lift. The first lead screw nut pair includes a first lead screw and a first nut sleeved on the first lead screw. The first nut is provided with a first connecting part, and the first connecting part extends into the first accommodating groove.

[0008] The first connecting part has a first side and a second side oppositely arranged along a first direction. The first side is connected with the first connecting seat through a first rigid connecting piece. The first rigid connecting piece is in point contact with the side wall of the first accommodating groove and / or the first side.

[0009] The second side is connected with the first connecting seat through a first elastic connecting piece. The first elastic connecting piece is in point contact with the second side. The number of the first elastic connecting pieces is multiple. The multiple first elastic connecting pieces are respectively located on opposite sides of the first lead screw.

[0010] The opposite sides of the first connecting seat are respectively provided with positioning pieces. The opposite sides of the first nut in a second direction are respectively abutted with the positioning pieces.

[0011] The first direction is parallel to the lifting direction of the moving component, and the second direction is perpendicular to the first direction.

[0012] In one of the embodiments, the first connecting seat is provided with a notch on each of the opposite sides in the first direction, and the first screw rod passes through the notch.

[0013] In one of the embodiments, the first rigid connecting piece is provided in a plurality of pieces, and each of the plurality of first rigid connecting pieces is located on the opposite side of the first screw rod.

[0014] In one of the embodiments, the first nut is provided with a positioning part on the side close to the moving component.

[0015] The first connecting seat is provided with a receiving cavity, the positioning part extends into the receiving cavity and has a gap with the wall surface of the receiving cavity.

[0016] The opposite sides of the positioning part in the second direction are respectively in contact with the positioning piece, and the positioning piece is in point contact with the positioning part.

[0017] In one of the embodiments, the side of the positioning part away from the first screw rod is connected with the first connecting seat through an elastic piece, and the elastic piece is configured to push the positioning part.

[0018] In one of the embodiments, the positioning part has a first groove, the first nut body or the first nut seat of the first nut has a second groove, and a positioning ball is arranged between the first nut body or the first nut seat and the positioning part, and the positioning ball extends into the first groove and the second groove, respectively.

[0019] In one of the embodiments, the substrate is provided with a light source moving mechanism, and the light source moving mechanism comprises a second screw nut pair and a second connecting seat, and the second connecting seat is provided with a light source.

[0020] The second screw nut pair is configured to drive the second connecting seat to lift, and the second screw nut pair comprises a second screw rod and a second nut sleeved on the second screw rod, and the second nut is provided with a second receiving groove.

[0021] The second connecting seat is provided with a second connecting part, and the second connecting part extends into the second receiving groove.

[0022] The side of the second connecting part in the first direction is connected with the second nut through a second rigid connecting piece, and the second rigid connecting piece is in point contact with the side wall of the second receiving groove and / or the second connecting part.

[0023] The second connecting part is connected with the second nut through a second elastic connecting piece, and the second elastic connecting piece is in point contact with the second connecting part.

[0024] In one of the embodiments, the second connecting seat is provided with a guide hole.

[0025] The light source moving mechanism further comprises a mounting column, the mounting column passes through the guide hole and is in sliding connection with the second connecting seat, the length of the mounting column is greater than the length of the guide hole, the light source is mounted at the bottom end of the mounting column, and the top end of the mounting column is provided with a blocking piece.

[0026] In one of the embodiments, the light source moving mechanism further comprises a detection sensor configured to acquire the position of the blocking piece.

[0027] When the blocking piece rises to a preset height relative to the second connecting seat, the detection sensor generates a detection signal.

[0028] In another aspect, the embodiment of the present application provides an image instrument comprising the lifting mechanism.

[0029] The lifting mechanism and the image instrument provided by the embodiment of the present application, when the first screw rod drives the first nut to lift, the first nut can reliably drive the moving part to lift because the first connecting part of the first nut is connected with the first connecting seat of the moving part through the first rigid connecting piece and the first elastic connecting piece. The number of the first elastic connecting pieces is multiple, and the multiple first elastic connecting pieces are respectively located at the opposite sides of the first screw rod. The flexible connection between the first connecting seat and the first nut can be realized through the first elastic connecting piece and the first rigid connecting piece, and the position of the first connecting seat can be finely adjusted relative to the first nut. The effective positioning of the first connecting seat can also be realized through the first rigid connecting piece, so as to inhibit the excessive shaking of the first nut relative to the moving part, and the force of the first elastic connecting piece can ensure that the first nut is in close contact with at least one first rigid connecting piece in the axial direction, so as to ensure the transmission performance of the lifting mechanism. If the lifting direction of the first screw rod relative to the moving part is deflected, no matter the first screw rod is deflected to one side or the other side of the second direction, the elastic deformation of the first elastic connecting pieces at the two sides of the first screw rod can provide a certain adjustment space for the first nut, so that the first nut adapts to the deformation of the first screw rod, eliminates the influence of the deformation of the first screw rod, and reduces the processing and assembly requirements of the lifting mechanism. In addition, the moving part can limit the rotation of the first nut through the positioning piece, the positioning piece can replace the anti-rotation slide rail in the prior art, the thickness of the lifting mechanism can be reduced, and the moving precision of the horizontal moving mechanism on the optical system is improved. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments or the exemplary embodiments of the present application, the drawings needed to be used in the following embodiment or exemplary embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creating laborious work.

[0031] Figure 1 FIG. 1 is a structural schematic diagram of an image instrument in the related art;

[0032] Figure 2 FIG. 2 is a structural schematic diagram of a moving component provided by an embodiment of the present application;

[0033] Figure 3 FIG. 3 is a schematic diagram of a first screw-nut pair and a first connecting seat connected provided by an embodiment of the present application;

[0034] Figure 4 FIG. 4 is an exploded view of the first connecting seat; Figure 3 Figure 1 ;

[0035] Figure 5 FIG. 5 is an exploded view of the first connecting seat; Figure 3 Figure 2 ;

[0036] Figure 6 FIG. 6 is a sectional view at a position of the first connecting seat; Figure 3

[0037] Figure 7 FIG. 7 is a structural schematic diagram of a light source moving mechanism provided by an embodiment of the present application;

[0038] Figure 8 FIG. 8 is a front view of the light source moving mechanism provided by an embodiment of the present application.

[0039] Reference signs:

[0040] 100, moving component; 110, base plate; 120, first connecting seat; 121, first accommodating groove; 122, notch; 123, accommodating cavity;

[0041] 200, first screw;

[0042] 300, first nut; 310, first nut body; 320, first nut seat; 321, first connecting part; 322, positioning part;

[0043] 410, first rigid connecting part; 420, first elastic connecting part; 430, positioning part;

[0044] 510, second screw; 520, second nut; 521, second nut body; 522, second nut seat; 523, second accommodating groove;

[0045] 600, second connecting seat; 610, second connecting part;

[0046] 710, blocking part; 720, mounting column; 730, blocking part; 740, detection sensor;

[0047] 810, second rigid connecting part; 820, second elastic connecting part;​​​

[0048] 900 second guide rail assembly

[0049] 10 lens; 20 motion system; 30 stage. DETAILED DESCRIPTION

[0050] In order to make the above objectives, features and advantages of the present application more clear and easily understood, the specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. It will be apparent, however, to one skilled in the art that the present application can be practiced without using some or all of these specific details. In other instances, well known process steps have not been described in detail in order to avoid obscuring the present application. The description of the specific embodiments of the present application is intended for purposes of illustration, and not for purposes of limitation.

[0051] In the description of the present application, it is to be understood that the orientation or positional relationship indicated by these terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like is based on the orientation or positional relationship shown in the drawings, and is merely intended for convenience of description of the present application and simplification of description, and is not intended to indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0052] In addition, if these terms "first", "second" appear, these terms are only used for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, if the term "plurality" appears, the meaning of "plurality" is at least two, for example, two, three, etc., unless otherwise specifically limited.

[0053] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or there can be an intervening element. If an element is referred to as being "connected" to another element, it can be directly connected to the other element or there can be an intervening element. If present, the terms "vertical", "horizontal", "upper", "lower", "left", "right", and similar expressions used herein are used for illustrative purposes only and are not intended to be the only implementation.

[0054] As Figure 1As shown, the video camera includes a lens 10 for shooting workpieces, a light source system, a motion system 20, and a stage 30. The light source system can include coaxial light, bottom light, surface light, etc., for illuminating the workpieces and highlighting the edges or image features of the workpieces. The motion system 20 includes an X-axis drive structure, a Y-axis drive structure, and a Z-axis drive structure for controlling the relative movement of the lens 10 and the stage 30 in the mutually perpendicular XYZ three directions, respectively. The Z-axis drive structure is a lifting mechanism that can drive the optical system to move up and down relative to the stage 30. The stage 30 is a light-transmissive stage 30, which is generally a glass platform.

[0055] In a bridge-type video camera (with a movable bridge or a fixed bridge), the lifting mechanism is mounted on the column or beam of the bridge. The optical system is mounted on the lifting mechanism. The optical system generally includes a lens, a light source, an autofocus system, and other detachable measurement components, etc. The lifting mechanism drives the optical system to move up and down along the precision guide rail by a motor to achieve micron-level movement, for quickly focusing the lens on the surface of workpieces at different heights to capture clear images, and also to support autofocus, laser height measurement, or confocal scanning, etc., to ensure accurate positioning and height data acquisition of the measurement system in three-dimensional space. The horizontal moving mechanism can be mounted on the beam of the bridge, which can drive the lifting mechanism and the optical system integrated on the lifting mechanism to move horizontally along the X-axis direction to realize lateral scanning measurement.

[0056] Currently, the lifting mechanism of the video camera generally uses a lead screw drive. The lifting mechanism includes a lead screw, a nut, a moving component, and an anti-rotation slide rail. The optical system is mounted on the moving component, the nut is sleeved on the lead screw and is hard connected with the moving component, and the nut is also sleeved on the anti-rotation slide rail and is slidingly connected with the anti-rotation slide rail, so as to limit the nut from rotating with the lead screw through the anti-rotation slide rail. However, the anti-rotation slide rail occupies a part of space, resulting in a large thickness of the lifting mechanism, which affects the moving precision of the optical system by the horizontal moving mechanism. In addition, the hard connection between the nut and the lead screw needs to ensure that the axis of the lead screw and the movement axis of the moving component (such as the first guide rail slidingly connected with the moving component as described later) have a very high parallelism. The machining and assembly requirements of the lifting mechanism are high, which not only affects the assembly efficiency of the lifting mechanism, but also easily leads to low moving precision of the lifting mechanism after assembly. The hard connection also leads to poor stability of the moving precision of the lifting mechanism and generates a large noise. For example, the lead screw is prone to wear and deformation after long-term use, and the straightness error generated by the lead screw is directly transmitted to the moving component through the hard connection structure, resulting in a decrease in the moving precision of the lifting mechanism and an increase in the resistance to generate a large noise, which is difficult to meet the measurement requirements of the video camera.

[0057] To solve the above problems, the embodiment of the present application provides a lifting mechanism and an image instrument. The lifting mechanism corresponds to the Z-axis driving structure in the image instrument. Of course, considering the problem of reducing the installation difficulty and cost, it can also be applied to the X-axis driving mechanism or the Y-axis driving mechanism. When the first screw rod drives the first nut to lift, the first nut can reliably drive the moving part to lift because the first connecting part of the first nut is connected with the first connecting seat of the moving part through the first rigid connecting piece and the first elastic connecting piece. The number of the first elastic connecting pieces is multiple. The multiple first elastic connecting pieces are respectively located on the opposite sides of the first screw rod. The flexible connection between the first connecting seat and the first nut can be realized through the first elastic connecting piece and the first rigid connecting piece. The position of the first connecting seat can be finely adjusted relative to the first nut, which is used for adapting to the deformation of the first screw rod. The existence of the first rigid connecting piece can also realize the effective positioning of the first connecting seat, and inhibit the excessive shaking of the first nut relative to the moving part. In addition, the force of the first elastic connecting piece can ensure that the first nut is in close contact with at least one first rigid connecting piece in the axial direction, and ensure the transmission performance of the first nut to the moving part. If the lifting direction of the first screw rod relative to the moving part is deflected, whether the first screw rod is deflected to one side or the other side of the second direction, the elastic deformation of the first elastic connecting pieces on both sides of the first screw rod can provide a certain adjustment space for the first nut, so that the first nut adapts to the deformation of the first screw rod, eliminates the influence of the deformation of the first screw rod, and reduces the processing and assembly requirements of the lifting mechanism. The influence of the deformation of the first screw rod on the transmission to the moving part is inhibited, the moving precision of the lifting mechanism is ensured, and the noise can be controlled. In addition, the moving part can limit the rotation of the first nut through the positioning piece. In this case, the positioning piece can replace the anti-rotation slide rail to limit the rotation of the first nut, which can reduce the thickness of the lifting mechanism, so that the lens of the optical system can be closer to the horizontal transverse mechanism, which is beneficial to improve the moving precision of the horizontal transverse mechanism to the optical system.

[0058] The specific structure of the lifting mechanism and the image instrument provided by the embodiment of the present application will be described below with reference to the drawings.

[0059] Referring to Figures 2-6 The embodiment of the present application provides a lifting mechanism, which comprises a moving part 100 and a first screw rod nut pair. The moving part 100 comprises a base plate 110 and a first connecting seat 120 mounted on the base plate 110. The first connecting seat 120 is provided with a first accommodating groove 121.

[0060] The first connecting seat 120 is approximately a block structure. Optionally, the first connecting seat 120 can be installed on one side of the base plate 110 by a threaded fixing manner. Alternatively, the first connecting seat 120 and the base plate 110 can also be fixed by an integral molding manner, which is not limited herein. Illustratively, the base plate 110 can be provided with the first connecting seat 120 on the side close to the first screw nut pair. The optical system can be installed on the side of the base plate 110 away from the first connecting seat 120 or the first screw nut pair.

[0061] In a possible implementation, the lifting mechanism can further include a first guide rail for guiding the movement of the moving part 100. Specifically, the first guide rail can be arranged on both sides of the base plate 110. The base plate 110 can be slidably connected to the two first guide rails by arranging sliding blocks at opposite positions on both sides. In this case, the first guide rail can be used to position the moving part 100 and also guide the movement of the moving part 100, so as to improve the linearity and accuracy of the movement of the moving part 100.

[0062] The first screw nut pair is configured to drive the moving part 100 to move up and down (or move). The first screw nut pair includes a first screw 200 and a first nut 300 sleeved on the first screw 200. The first nut 300 is provided with a first connecting portion 321. The first connecting portion 321 extends into the first accommodating groove 121.

[0063] Illustratively, the first screw 200 can extend in a vertical direction, where the vertical direction refers to the Z-axis driving direction in the image instrument, that is, the axial direction of the first screw 200 is the vertical direction. The first screw 200 is driven to rotate by a motor. When the first screw 200 rotates, the first nut 300 can be driven to move along the axial direction of the first screw 200. The first nut 300 includes a first nut body 310 and a first nut seat 320 fixedly connected to each other. The first nut body 310 is sleeved on the first screw 200. The first connecting portion 321 can be arranged on the first nut seat 320.

[0064] In a possible implementation, the first accommodating groove 121 can be a "U"-shaped groove opened on the first connecting seat 120. The opening of the "U"-shaped groove extends horizontally. When the first connecting seat 120 is connected with the first nut 300, the opening of the "U"-shaped groove can be arranged perpendicular to the axial direction of the first screw 200. Of course, in addition to the "U"-shaped groove, the first accommodating groove 121 can also form other recess structures, which are not limited herein.

[0065] It is worth mentioning that after the first connecting portion 321 extends into the first accommodating groove 121, the first connecting portion 321 has a gap between the two sides of the first connecting portion 321 and the side walls of the first accommodating groove 121, so that the first connecting portion 321 can move relative to the first accommodating groove 121 in the first accommodating groove 121.

[0066] The first connecting portion 321 has a first side and a second side opposite to each other in the first direction. The first side is connected to the first connecting seat 120 by the first rigid connecting member 410. The first rigid connecting member 410 is in point contact with the sidewall of the first accommodating groove 121 and / or the first side. The first direction is parallel to the moving direction of the moving component 100 (i.e. approximately along the vertical direction).

[0067] That is, the first rigid connecting member 410 is arranged in the gap between one side of the first connecting portion 321 and the first accommodating groove 121. The first rigid connecting member 410 can be a rigid ball or a rigid body structure with a spherical surface. The first rigid connecting member 410 is in point contact with the sidewall of the first accommodating groove 121 and / or the first connecting portion 321 through the spherical surface. Since the first rigid connecting member 410 is in point contact with the sidewall of the first accommodating groove 121 and / or the first side, the restriction of the first rigid connecting member 410 on the freedom of the first nut 300 can be reduced.

[0068] In one possible implementation, referring to Figure 6 One of the first connecting portion 321 and the first connecting seat 120 is provided with a positioning groove, one end of the first rigid connecting member 410 extends into the positioning groove, the other end of the first rigid connecting member 410 extends out of the positioning groove and is provided with a spherical surface, and the first rigid connecting member 410 is in abutment with the other one of the first connecting portion 321 and the first connecting seat 120 through the spherical surface.

[0069] In some embodiments, the second side of the first connecting portion 321 is connected to the first connecting seat 120 by the first elastic connecting member 420 in the first direction. The first elastic connecting member 420 is in point contact with the second side of the first connecting portion 321. The number of the first elastic connecting member 420 is multiple. The multiple first elastic connecting members 420 are respectively arranged on opposite sides of the first lead screw 200.

[0070] That is, the first elastic connecting piece 420 is arranged in the gap between the side of the first connecting part 321 away from the first rigid connecting piece 410 and the first accommodating groove 121. The first elastic connecting piece 420 can be a ball end spring, that is, one end of the first elastic connecting piece 420 is arranged as a ball head or an arc shape, such as a ball head elastic plunger or a spring positioning bead. The ball head of the ball end spring can abut against the first connecting part 321, and the other end is fixed with the first connecting seat 120. For example, a through hole can be formed in the side wall of the first connecting seat 120 for arranging the ball end spring, and a screw (which can also be integrated with the ball end spring) is used to cooperate with the through hole to position the ball end spring, so that the ball end spring is clamped between the screw and the nut seat. Alternatively, the first elastic connecting piece 420 is arranged in the first direction in the axial direction, that is, the first elastic connecting piece 420 is arranged to be elastically deformed in the first direction. Alternatively, the ball head of the first elastic connecting piece 420 is in contact with the first connecting part 321 after being fixed, and is in a compressed state.

[0071] It can be understood that the first elastic connecting piece 420 is used to push the first connecting part 321, so that the first connecting part 321 reliably abuts against the first rigid connecting piece 410. Since the first elastic connecting piece 420 is in point contact with the first connecting part 321, the restriction of the first elastic connecting piece 420 on the freedom of the first nut 300 can also be reduced.

[0072] The first screw-nut pair can drive the optical system arranged on the moving component 100 to move. Under the action of the first rigid connecting piece 410 and the first elastic connecting piece 420, the flexible connection between the first connecting seat 120 and the first nut 300 can be achieved, and since both are spherical abutments, point contact between the two can be ensured. Whether in the axial direction or the radial direction of the first lead screw 200, the connection between the first connecting seat 120 and the first nut 300 is point contact, which can reduce the restriction on the freedom of the first nut 300. The presence of the first rigid connecting piece 410 can also achieve effective positioning of the first nut 300, inhibit excessive shaking of the first nut 300 relative to the moving component 100, and the force of the first elastic connecting piece 420 can ensure that the first nut 300 is in close contact with at least one first rigid connecting piece 410 in the axial direction, thereby ensuring the transmission performance of the first nut 300 to the moving component 100.

[0073] When the axis of the first lead screw 200 is slightly inclined (parallelism error) relative to the movement axis of the moving component 100 (that is, the axis of the first guide rail), the first nut 300 can rotate slightly around the contact point relative to the first connecting seat 120, and adapt to the trend of the first lead screw 200, without turning the inclination into forced deformation or jamming, effectively reducing the parallelism installation requirement of the axis of the first guide rail and the axis of the first lead screw 200, and reducing the machining requirement and assembly difficulty.

[0074] In this embodiment, the plurality of first elastic connecting members 420 are respectively located on opposite sides of the first lead screw 200. Specifically, the number of first elastic connecting members 420 can be at least two, and the first lead screw 200 itself axis or its projection in the Y-axis driving direction is taken as the boundary line to respectively set the left and right sides thereof. Here, left and right refer to the radial direction of the first lead screw 200 (here corresponding to the X-axis driving direction). In this case, if the first lead screw 200 deforms (such as a small deflection deformation of the first lead screw 200 due to long-term use or a thermal expansion and contraction deformation of the first lead screw 200 due to temperature influence), regardless of whether the first lead screw 200 deflects to the left or to the right, the elastic deformation of the first elastic connecting members 420 on both sides can provide a certain adjustment space for the first nut 300, so that the first nut 300 adapts to the deformation of the first lead screw 200, eliminates the influence of the deformation of the first lead screw 200, and does not directly transmit the internal stress generated by the deformation of the first lead screw 200 to the moving part 100 to cause deformation or jamming as in the case of hard connection between the moving part 100 and the first nut 300. The lifting mechanism provided in this embodiment can ensure the long-term motion precision stability and reliability of the moving part 100, and improve the movement precision of the optical system in the Z-axis direction. In addition, through the above setting, the axis of the first lead screw 200 and the movement axis of the moving part 100 do not need to have very high parallelism, which reduces the processing and assembly precision requirements between the first nut 300 and the first connecting seat 120.

[0075] The opposite sides of the first connecting seat 120 are respectively provided with positioning members 430. The opposite sides of the first nut 300 in the second direction are respectively abutted with the positioning members 430. The second direction is perpendicular to the first direction, such as the second direction corresponding to the X-axis driving direction.

[0076] As shown in Figures 3-6 Each positioning member 430 can be an approximate columnar structure. Illustratively, the left and right sides of the first connecting seat 120 can be respectively provided with positioning members 430 in the radial direction of the first lead screw 200 (which can correspond to the X-axis driving direction), for limiting the rotation of the first nut 300 with the first lead screw 200, and for replacing the anti-rotation sliding rail in the related art. Specifically, since the image instrument is provided with the first guide rail to limit the moving part 100, after the first connecting seat 120 of the moving part 100 abuts the two sides of the first nut 300 through the positioning members 430, the moving part 100 can limit the rotation of the first nut 300 with the first lead screw 200. In one possible implementation, the left and right sides of the first connecting seat 120 can form positioning holes for setting the positioning members 430. In other embodiments, the positioning members 430 can also be directly formed on the inner walls of the left and right sides of the first connecting seat 120 through an integral molding process.

[0077] Specifically, the first direction is Figure 4The second direction is the direction indicated by the Z-axis. Figure 4 The X-axis direction. In this embodiment, the positioning member 430 provided on the moving component 100 can replace the anti-rotation slide rail in the related art, and the thickness of the lifting mechanism, i.e., the dimension of the lifting mechanism in the Y-axis direction, can be reduced.

[0078] In one embodiment, as shown in Figures 2-5 The first connecting seat 120 is provided with notches 122 on opposite sides in the first direction, and the first lead screw 200 passes through the notches 122.

[0079] The first nut seat 320 is sleeved on the first lead screw 200 like the first nut body 310, and the first connecting seat 120 is arranged close to the first lead screw 200. In the first direction, the positions of the two notches 122 are opposite, and the openings of the notches 122 are located on one side of the first connecting seat 120. During assembly of the lifting mechanism, the first lead screw 200 can pass through the two notches 122.

[0080] Through the above arrangement, the dimension of the moving component 100 and the first lead screw nut pair in the Y-axis direction can be reduced, the thickness of the lifting mechanism is further reduced, and the moving precision of the horizontal translocation mechanism on the optical system is further improved.

[0081] In other embodiments, the first connecting portion 321 is formed on the upper side of the first nut 300. The first connecting portion 321 is higher than the first lead screw 200 in the Y-axis direction. In this case, after the first connecting seat 120 is arranged, the first lead screw 200 can be located below the first connecting seat 120. The first connecting seat 120 can not be provided with notches 122. For example, the first nut seat 320 can also be arranged on the upper side (in the Y-axis direction) of the first nut body 310. Correspondingly, the first connecting seat 120 is arranged on the upper side of the first lead screw 200, and the first lead screw 200 is not at the same height in the Y-axis direction. The above arrangement can avoid opening notches 122 on the first connecting seat 120, which is beneficial to improve the production efficiency of the lifting mechanism.

[0082] In a specific embodiment, the number of first rigid connecting members 410 is multiple, and the multiple first rigid connecting members 410 are respectively located on opposite sides of the first lead screw 200.

[0083] Specifically, along the second direction, the plurality of first rigid connectors 410 are respectively located on opposite sides of the first lead screw 200. The plurality of first rigid connectors 410 can be arranged at intervals along the second direction. For example, when the number of first rigid connectors 410 is two, the first rigid connectors 410 are respectively arranged on the left and right sides with the first lead screw 200 itself axis or the projection of the first lead screw 200 on the Y-axis driving direction (or Y-axis direction) as the demarcation line. Alternatively, the number of first rigid connectors 410 is not limited, for example, two, three or four, etc., which is not limited herein.

[0084] Through the above arrangement, the plurality of first rigid connectors 410 can improve the effective positioning of the first nut 300, further inhibit the excessive shaking of the first nut 300 relative to the moving part 100, and ensure the movement accuracy of the lifting mechanism.

[0085] Of course, it is not limited to this, when the first connecting part 321 is higher than the first lead screw 200 in the Y-axis direction, at this time, the first rigid connector 410 can also be provided as one. The first rigid connector 410 can be arranged at the center position of the first connecting part 321, or arranged at the same plane with the projection of the first lead screw 200 on the Y-axis driving direction. In this case, since there is no first lead screw 200 between the first connecting part 321 and the first connecting seat 120, the rigid connector can be located at the central axis of the first connecting seat 120, and the first nut 300 can be deflected in various directions around the point contact position of the rigid connector relative to the first connecting seat 120, the first nut 300 has higher freedom, which is beneficial to further reduce the processing and assembly requirements of the lifting mechanism, and further ensure the long-term movement accuracy stability and reliability of the moving part 100.

[0086] In one embodiment, as shown in Figures 3-6 The first nut 300 is provided with a positioning part 322 close to the upper side of the moving part 100. The positioning part 322 can be a block structure, which can be fixedly connected with the first nut body 310 and / or the first nut seat 320.

[0087] The first connecting seat 120 is provided with a receiving cavity 123, and the positioning part 322 extends into the receiving cavity 123 and has a gap between the wall surface of the receiving cavity 123. The shape of the receiving cavity 123 matches the positioning part 322. The positioning part 322 extends into the receiving cavity 123 and maintains a non-contact gap with the first connecting seat 120. The gap between the receiving cavity 123 and the positioning part 322 allows the positioning part 322 to be adjusted in position relative to the first connecting seat 120 after extending into the receiving cavity 123. It can be understood that the receiving cavity 123 can be in communication with the first receiving groove 121. Thus, it can be ensured that the positioning part 322 can extend into the receiving cavity 123.

[0088] Optionally, the accommodating cavity 123 can be formed as an open structure, i.e., the side of the accommodating cavity 123 away from the cavity bottom of the first lead screw 200 (here corresponding to the top of the first connecting seat 120 close to the base plate 110) can be formed as an opening. In this case, the blocking effect of the top on the positioning part 322 can be eliminated, the spacing between the base plate 110 and the first lead screw 200 is reduced, and the thickness of the lifting mechanism is reduced. When the positioning part 322 extends into the accommodating cavity 123, it is necessary to ensure that at least part of it remains in the accommodating cavity 123, which facilitates the subsequent arrangement of the positioning member 430.

[0089] The opposite sides of the positioning part 322 in the second direction are respectively in abutment with the positioning member 430, and the positioning member 430 is in point contact with the positioning part 322. Specifically, the side of the positioning member 430 facing the positioning part 322 has a spherical surface, which is in abutment with the positioning part 322 to achieve point contact between the positioning member 430 and the positioning part 322.

[0090] Through the above arrangement, the first connecting seat 120 limits the first nut 300 from rotating with the first lead screw 200, and further enables the first nut 300 to have a certain degree of freedom relative to the first connecting seat 120.

[0091] In a specific embodiment, the side of the positioning part 322 away from the first lead screw 200 is connected with the first connecting seat 120 through an elastic member, and the elastic member is configured to push the positioning part 322.

[0092] The elastic member can be a spring, one end of the elastic member is in abutment with the positioning part 322, and the other end can be fixed to the first connecting seat 120 through a fastener. In a possible implementation, the side of the accommodating cavity 123 away from the first lead screw 200 is provided with an opening, and the opening can be blocked by a cover plate. The cover plate is fixedly connected with the first connecting seat 120 through a fastener. The end of the elastic member away from the positioning part 322 can be in abutment with the cover plate. By arranging the cover plate, the risk of the elastic member coming off can be reduced, and the assembly of the elastic member is facilitated. Optionally, a groove can be arranged on the positioning part 322 to accommodate the end of the elastic member.

[0093] In the embodiment, the positioning part 322 is movably arranged on the first nut body 310 or the first nut seat 320. After the elastic member is arranged, it is in a compressed state, and the elastic force applied to the positioning part 322 by the elastic member can achieve the positioning of the positioning part 322, and ensure the anti-rotation effect of the first nut body 310 and the first nut seat 320 by the positioning part 322. During the lifting process of the lifting mechanism, the excessive shaking of the moving part 100 relative to the first nut 300 is further inhibited, and the movement precision of the lifting mechanism is ensured.

[0094] In a possible implementation, the positioning part 322 has a space with the first nut body 310 or the first nut seat 320, the first nut body 310 or the first nut seat 320 is provided with a first groove, the positioning part 322 is provided with a second groove, and a positioning ball is arranged between the first nut body 310 or the first nut seat 320 and the positioning part 322, and the positioning ball respectively extends into the first groove and the second groove.

[0095] Illustratively, the first groove and the second groove can be spherical grooves, the positioning ball can be limited by the first groove and the second groove, and the positioning ball is prevented from being separated from the space between the positioning part 322 and the first nut body 310 or the first nut seat 320. During assembly of the lifting mechanism, the second groove on the first nut body 310 or the first nut seat 320 is used to place the rigid positioning ball, and the positioning part 322 is movably placed on the positioning ball by means of the first groove. The above arrangement can reduce the limitation of the positioning part 322 on the freedom of the first nut body 310 and the first nut seat 320. Considering stability and installation space, the number of the positioning ball and the elastic member can be two.

[0096] Considering that the elastic member is arranged, the function of the first elastic connecting member 420 is easily affected, the positioning part 322 in the embodiment is not fixedly connected with the first connecting part 321, but is movably connected with the first connecting part 321 by means of the positioning ball. When the first lead screw 200 is deformed, the first nut 300 can rotate left and right around the positioning ball to adapt to the adjustment of the first lead screw 200, so that the elastic connection of the positioning part 322 and the first connecting seat 120 does not have excessive influence at this time. Moreover, in the embodiment, the first connecting seat 120 also needs to be provided with the positioning member 430, which is used to abut against the positioning part 322 to limit the rotation of the first nut 300 following the first lead screw 200.

[0097] In an embodiment, as shown in Figure 7 and Figure 8 , the substrate 110 is provided with a light source moving mechanism, the light source moving mechanism includes a second lead screw nut pair and a second connecting seat 600, and the second connecting seat 600 is provided with a light source (not shown).

[0098] As can be understood by those skilled in the art, the light source in the optical system is arranged around the periphery of the objective lens of the lens, and can move along the Z-axis direction relative to the lens, and the resolution of the lens is adjusted by adjusting the distance between the light source and the objective table. For this purpose, the lifting mechanism is provided with a light source moving mechanism to adjust the height of the light source. Optionally, a motor can be used to drive the second lead screw nut pair.

[0099] Illustratively, the second connecting seat 600 is provided with a second guide rail assembly 900 arranged in the vertical direction on the left and right sides thereof, where the left and right refer to the two sides in the radial direction of the second lead screw 510 (here corresponding to the driving direction of the X axis). The second guide rail assembly 900 can be a second guide rail connected with the second connecting seat 600 and a slider provided on an optical system frame (not shown) for defining the moving direction of the light source. In this case, the second connecting seat 600 can move along the slider on the optical system frame.

[0100] The second lead screw nut pair is configured to drive the second connecting seat 600 to move up and down. The second lead screw nut pair includes a second lead screw 510 and a second nut 520 sleeved on the second lead screw 510. The second nut 520 is provided with a second accommodating groove 523. The second lead screw 510 can be arranged in the vertical direction.

[0101] Specifically, the second nut 520 includes a second nut body 521 and a second nut seat 522 connected with each other. Because the distance between the lens and the workpiece to be measured during the measurement of the image meter is not too far, the movable space of the light source is also small, and therefore the threaded section of the second lead screw 510 does not need to be set too long. However, considering the length of the lens barrel of the lens, in order to set the light source on the side of the objective lens of the lens close to the object table, the second nut seat 522 can be formed as a long strip structure protruding from the side wall of the second nut body 521 and extending in the axial direction of the second lead screw 510. The second accommodating groove 523 can be arranged at one end of the second nut seat 522 away from the second nut body 521, and the second accommodating groove 523 can be a "U"-shaped groove.

[0102] The second connecting seat 600 is provided with a second connecting portion 610 extending into the second accommodating groove 523. The second connecting portion 610 can be a block-shaped structure. The second connecting portion 610 can be fixedly connected with the main body portion of the second connecting seat 600. The second connecting portion 610 can also be provided on the second connecting seat 600 by an integral molding process.

[0103] The second connecting portion 610 is connected with the second nut 520 through the second rigid connecting piece 810 on one side in the first direction. The second rigid connecting piece 810 is in point contact with the sidewall of the second accommodating groove 523 and / or the second connecting portion 610. The second connecting portion 610 is connected with the second nut 520 through the second elastic connecting piece 820. The second elastic connecting piece 820 is in point contact with the second connecting portion 610. Exemplarily, the structure of the second rigid connecting piece 810 can be the same as that of the first rigid connecting piece 410, and the structure of the second elastic connecting piece 820 can be the same as that of the first elastic connecting piece 420. In the examples of the present application, the structures of the second accommodating groove 523 and the second connecting portion 610 are not limited thereto, as long as the connection (e.g., point contact) through both the second accommodating groove 523 and the second connecting portion 610 can achieve the transmission of the second nut 520 to the second connecting seat 600. For example, the structures of the second accommodating groove 523 and the second connecting portion 610 are interchanged, i.e., the second accommodating groove 523 can be formed as a block structure, and the second connecting portion 610 can be formed as a “U”-shaped groove.

[0104] It is worth mentioning that the movement accuracy of the light source does not have a great impact on the measurement of the lens, so it is not necessary to additionally provide an anti-slip rail for the second nut 520 or to additionally provide a positioning component on the second connecting seat 600, and the second connecting seat 600 itself can directly utilize the function of hindering the rotation of the second nut seat 522.

[0105] In the present embodiment, the light source moving mechanism can drive the light source to move up and down relative to the lens. Under the action of the second rigid connecting piece 810 and the second elastic connecting piece 820, the flexible connection of the second connecting seat 600 and the second nut 520 can be achieved, and the point contact of the two is ensured by the spherical surface abutting. The presence of the second rigid connecting piece 810 can also achieve effective positioning of the second nut 520, and inhibit excessive shaking of the second nut 520 relative to the second connecting seat 600; and the force of the second elastic connecting piece 820 can ensure that the second nut 520 is in close contact with at least one second rigid connecting piece 810 in the axial direction, thereby ensuring the transmission performance of the second nut 520 to the second connecting seat 600.

[0106] In a specific embodiment, as shown in Figure 7 and Figure 8 the second connecting seat 600 is provided with a guide hole. The guide hole can extend in the vertical direction.

[0107] The light source moving mechanism further comprises a mounting column 720 which passes through the guide hole and is in sliding connection with the second connecting seat 600. The length of the mounting column 720 is greater than the length of the guide hole. The light source is mounted at the bottom end of the mounting column 720. The top end of the mounting column 720 away from the light source is provided with a blocking piece 730. Optionally, the blocking piece 730 can be connected with the mounting column 720 through a fastener.

[0108] It can be understood that the mounting column 720 can slide along the axis of the guide hole. The size of the blocking piece 730 is greater than the guide hole, and the blocking piece 730 is abutted against the second connecting seat 600 to avoid the mounting column 720 from being pulled out of the guide hole.

[0109] In order to reduce the damage of the light source caused by the impact of the workpiece or the objective table during the lifting process of the light source moving mechanism, the light source is movably suspended on the second connecting seat 600 due to the gravity of the light source and the blocking piece 730 when the light source moving mechanism lifts the light source. When the light source is impacted, the mounting column 720 moves relative to the second connecting seat 600 in the direction opposite to the direction of gravity. Alternatively, the side wall below the mounting column 720 (in the vertical direction) can be provided with a blocking part 710. The size of the blocking part 710 is greater than the guide hole. The blocking part 710 is spaced apart from the guide hole to ensure the lifting space and also serve as a mechanical limit to limit the excessive lifting, which may cause the collision of other components (such as the blocking piece 730 and the detection sensor 740) and cause damage.

[0110] In a more specific embodiment, as shown in Figure 7 and Figure 8 The light source moving mechanism further comprises a detection sensor 740 configured to obtain the position of the blocking piece 730.

[0111] When the blocking piece 730 rises to a preset height relative to the second connecting seat 600, the detection sensor 740 generates a detection signal.

[0112] The detection sensor 740 can be installed above the blocking piece 730, i.e. in the direction of reverse movement of the light source after being impacted. Exemplarily, a contact sensor or a non-contact sensor (such as an optical sensor) can be provided on the blocking piece 730 and the second guide rail assembly 900 to cooperate with each other. The optical sensor comprises a light emitting element and a photosensitive element opposite to the light emitting element, and the two are spaced apart. When the two are blocked by an external object, a trigger signal is generated to inform.

[0113] If the detection sensor 740 is an optical sensor, a light shielding plate can be installed on the blocking piece 730.

[0114] Specifically, the photoelectric sensor is arranged on the second guide rail assembly 900, when the light source moves back to the preset height after being hit, the light shield plate will extend into the gap between the two to block the light path, thus generating a corresponding detection signal. Alternatively, if a contact sensor is used, the contact sensor can include a first contact element on the blocking piece 730 and a second contact element on the second guide rail assembly 900, when the light source moves back to the preset height after being hit, the first contact element and the second contact element are in contact, thus generating a corresponding detection signal.

[0115] By arranging the detection sensor 740, when the blocking piece 730 moves to a certain position to trigger the detection sensor 740, a detection signal can be generated. The detection signal can indicate that the light source of the imager has been hit, so that the light source moving mechanism can be controlled to raise the position of the light source to reduce the damage to the light source.

[0116] The embodiment of the present application also provides an imager comprising the lifting mechanism described above. The imager provided by the present application has high assembly efficiency and high moving precision of the horizontal moving mechanism of the imager on the optical system due to the use of the lifting mechanism described above.

[0117] The technical features of the above embodiments can be combined in any manner. To make the description concise, all possible combinations of the technical features in the above embodiments are not described, but as long as the combinations of the technical features do not exist contradictory, they should be considered as the scope of the present application.

[0118] The above embodiments only express several implementation manners of the present application, and the description is specific and detailed, but it should not be understood as a limitation on the patent scope of the present application. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. A lifting mechanism, characterized in that The moving component comprises a base plate and a first connecting seat mounted on the base plate, and the first connecting seat is provided with a first accommodating groove; The first screw nut pair is configured to drive the moving component to move up and down, and comprises a first screw rod and a first nut sleeved on the first screw rod, and the first nut is provided with a first connecting portion which extends into the first accommodating groove; The first connecting portion has a first side and a second side which are oppositely arranged along a first direction, the first side is connected with the first connecting seat through a first rigid connecting piece which is in point contact with the side wall of the first accommodating groove and / or the first side; The second side is connected with the first connecting seat through a first elastic connecting piece which is in point contact with the second side, and the first elastic connecting piece has a plurality of first elastic connecting pieces which are respectively arranged on opposite sides of the first screw rod; The opposite sides of the first connecting seat are respectively provided with positioning pieces, and the opposite sides of the first nut in a second direction are respectively in abutment with the positioning pieces; The first direction is parallel to the lifting direction of the moving component, and the second direction is perpendicular to the first direction. The opposite sides of the first connecting seat along the first direction are respectively provided with notches, and the first screw rod passes through the notches.

2. The lifting mechanism of claim 1, wherein, The first rigid connecting piece has a plurality of first rigid connecting pieces which are respectively arranged on opposite sides of the first screw rod.

3. The lifting mechanism of claim 2, wherein, The side of the first nut close to the moving component is provided with a positioning portion; 4. The lift mechanism of claim 1, wherein, The first connecting seat is provided with an accommodating cavity, the positioning portion extends into the accommodating cavity and has a gap with the wall surface of the accommodating cavity; The opposite sides of the positioning portion in the second direction are respectively in abutment with the positioning pieces, and the positioning pieces are in point contact with the positioning portion. The side of the positioning portion away from the first screw rod is connected with an elastic piece between the positioning portion and the first connecting seat, and the elastic piece is configured to push the positioning portion.

5. The lifting mechanism of claim 4, wherein, The positioning portion and the first nut body or the first nut seat of the first nut have a spacing, the positioning portion is provided with a first groove, the first nut body or the first nut seat is provided with a second groove, and a positioning ball is arranged between the first nut body or the first nut seat and the positioning portion, and the positioning ball extends into the first groove and the second groove respectively.

6. The lifting mechanism of claim 5, wherein, The base plate is provided with a light source moving mechanism, the light source moving mechanism comprises a second screw nut pair and a second connecting seat, and the second connecting seat is provided with a light source; 7. The lifting mechanism according to any one of claims 1-6, characterized in that, The second screw nut pair is configured to drive the second connecting seat to move up and down, and comprises a second screw rod and a second nut sleeved on the second screw rod, and the second nut is provided with a second accommodating groove; The second connecting seat is provided with a second connecting portion which extends into the second accommodating groove; ​ The second connecting part is connected with the second nut through a second rigid connecting piece on one side in the first direction, and the second rigid connecting piece is in point contact with the side wall of the second accommodating groove and / or the second connecting part; The second connecting part is connected with the second nut through a second elastic connecting piece, and the second elastic connecting piece is in point contact with the second connecting part.

8. The lifting mechanism of claim 7, wherein, The second connecting seat is provided with a guide hole; The light source moving mechanism further comprises a mounting column, the mounting column passes through the guide hole and is in sliding connection with the second connecting seat, the length of the mounting column is greater than the length of the guide hole, the light source is mounted at the bottom end of the mounting column, and the top end of the mounting column is provided with a blocking piece.

9. The lifting mechanism of claim 8, wherein, The light source moving mechanism further comprises a detection sensor configured to obtain the position of the blocking piece. When the blocking piece rises to a preset height relative to the second connecting seat, the detection sensor generates a detection signal.

10. An imager, comprising: The lifting mechanism comprises any one of claims 1-9.

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