Nano-cavity sensor for efficiently exciting fluorescence and use method of nano-cavity sensor

By setting a frustum-shaped microlens layer on a quartz substrate and forming a nanopore on its top, the problem of non-focusing excitation light in traditional zero-mode waveguide devices is solved, achieving efficient fluorescence excitation and high-sensitivity detection.

CN120908156AActive Publication Date: 2025-11-07SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
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Patent Information

Application Number
CN202511097123.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-08-06
Publication Date
2025-11-07
Estimated Expiration
2045-08-06

AI Technical Summary

Technical Problem

In traditional zero-mode waveguide devices, the excitation light cannot be focused onto the nanopore test point, resulting in low system excitation efficiency.

Method used

A frustum-shaped microlens layer with an upward protrusion is set on a quartz substrate, and a nanopore is formed on its top. The beam is focused to the bottom of the nanopore through the frustum-shaped microlens to form a zero-mode waveguide effect, thereby achieving localized enhancement excitation of the beam.

Benefits of technology

It improves fluorescence excitation efficiency, retains the subwavelength optical field localization characteristics of zero-mode waveguide devices, enhances the excitation effect of the optical path system on fluorescence, and improves detection sensitivity.

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Abstract

The invention discloses a nano-cavity sensor for efficiently exciting fluorescence. The nano-cavity sensor comprises a quartz substrate layer, a micro-lens layer and a metal film layer which are sequentially arranged from bottom to top, the micro-lens layer is located above the quartz substrate layer and comprises a plurality of spherical-table-shaped micro-lenses protruding upwards; and the metal film layer is positioned on the quartz substrate layer and the micro lens layer, and is provided with through nano holes which are in one-to-one correspondence with the centers of the top planes of the table-shaped micro lenses. When exciting light enters, the spherical table type micro lens can focus a light beam emitted into the lens cavity from the bottom to the bottom of the nanopore to form a zero-mode waveguide effect, and fluorescent substances in the nanopore are excited through an evanescent field. The spherical table type micro lens modulates the direction of an excitation light beam, the light beam is converted into local enhanced excitation from parallel incidence, modulation of excitation photoelectric magnetic field distribution at the bottom of a nanopore and in a nanocavity in a solution environment is achieved, and distribution of an electromagnetic field is described by using a caustics line. According to the device, the excitation efficiency of a light path system on fluorescence is remarkably improved.
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