Film defect online detection device with modular structure

Abstract

The invention relates to the technical field of film defect detection, and discloses a film defect online detection device with a modular structure, comprising: a rack table, both sides of which are provided with transmission modules for transmitting a film to be detected; the image acquisition module is mounted on the rack table and is used for acquiring an image of the surface of the thin film in real time; and the lighting module is mounted on the rack table. According to the film defect online detection device with the modular structure, film surface images can be acquired in real time from different angles and heights, so that the image processing module can more comprehensively identify defects on the surface of the film, and missing detection or misjudgment caused by acquisition at a single angle or height is avoided; and the transparent sheet and the non-transparent sheet of the shading cylinder are quickly converted to form pulse illumination, so that the imaging effect of the defect under different illumination conditions is changed, the contrast ratio between the defect and the background is increased, the motion blurring condition of the thin film is reduced, and the accuracy of defect detection is effectively improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of thin film defect detection, in particular to a thin film defect online detection device with modular structure. BACKGROUND

[0002] Thin film materials are widely used in many fields such as electronics, optics, packaging, etc. In the production process of thin films, surface defect detection is a key link to ensure product quality. Traditional manual detection methods are inefficient and easily affected by subjective factors, resulting in inaccurate detection results. With the development of technology, automated detection technology has been gradually applied to the field of thin film defect detection, but existing detection devices still have some shortcomings.

[0003] At present, the common thin film defect detection devices on the market mostly use single-angle or single-height image acquisition methods. This acquisition method is prone to miss detection or misjudgment due to angle limitations. For example, when there are small scratches or depressions on the surface of the thin film, single-angle image acquisition may not be able to clearly capture the characteristics of the defects, affecting the accuracy of detection. In addition, the traditional lighting method is usually continuous lighting, which cannot be flexibly adjusted according to the characteristics of different defects. On high-speed production lines, the rapid movement of thin films can cause motion blur in images, reducing the accuracy of defect detection. Moreover, existing detection devices mostly lack effective self-checking and fault handling mechanisms. Once a fault occurs, professional personnel need to be called for maintenance, resulting in long downtime and seriously affecting production efficiency.

[0004] In view of the shortcomings of the prior art, the present application provides a thin film defect online detection device with modular structure, which aims to solve the problems of low detection accuracy, insufficient flexibility and difficult fault handling in the prior art, to meet the needs of efficient and accurate defect detection in modern thin film production processes. SUMMARY

[0005] (I) Technical problems solved

[0006] In view of the shortcomings of the prior art, the present application provides a thin film defect online detection device with modular structure, which solves the problem that the traditional lighting method is usually continuous lighting and cannot be flexibly adjusted according to the characteristics of different defects.

[0007] (II) Technical solutions

[0008] To achieve the above-mentioned purposes, the present application provides the following technical solutions: a thin film defect online detection device with modular structure, comprising:

[0009] A rack table, both sides of the rack table are provided with a transmission module for transmitting the thin film to be detected;

[0010] An image acquisition module is installed on the rack table, and the image acquisition module is used to acquire images of the film surface in real time;

[0011] An illumination module is installed on the rack table, and the illumination module is used to provide uniform and pulsed illumination for the film surface, ensuring that the image acquisition module can clearly acquire images of the film surface;

[0012] A control system is installed on the rack table, and the control system includes an image processing module for processing and analyzing the acquired images to identify defects on the film surface.

[0013] Preferably, the transmission module, image acquisition module, illumination module, and image processing module are all embedded with intelligent self-checking circuits for real-time monitoring of the working state of the module;

[0014] When a fault is detected, the control system automatically issues an alarm and prompts the user through a software interface;

[0015] For automatically repairable faults, the control system automatically repairs them;

[0016] For faults that cannot be automatically repaired, the user can quickly resume production by replacing the faulty module.

[0017] Preferably, the image acquisition module includes a connection plate connected to the rack table, and at least one height- and angle-adjustable linear array camera is installed on the connection plate, which is used to acquire images of the film surface in real time at different angles or heights.

[0018] Preferably, the connection plate is connected to the inner top of the rack table in an up-down sliding manner through two guide rails;

[0019] The linear array camera is rotatably connected to the connection plate through a rotating shaft;

[0020] The rack table is provided with a locking unit for locking the height-adjusted and / or angle-adjusted linear array camera.

[0021] Preferably, the illumination module includes a light source cover fixed to the inside of the rack table, and a glass plate is installed on the top of the light source cover, and a height-adjustable cylindrical block is arranged inside the light source cover, and a linear array light source is embedded in the top of the cylindrical block;

[0022] The outer surface of the cylindrical block is provided with a processing unit for pulsed illumination processing of the linear array light source;

[0023] The rack table is provided with a heat dissipation module for dissipating heat from the illumination elements inside the light source cover.

[0024] Preferably, both ends of the cylindrical block are slidably connected to the inside of the light source cover through the movement block in an up-down sliding manner; by adjusting the height of the linear array light source on the cylindrical block, the image acquisition module can detect defects of the film under different illumination intensities.

[0025] The adjusting cylinder is fixedly connected to the inside of the rack table, and the adjusting frame is fixedly connected to the telescopic end of the adjusting cylinder.

[0026] Preferably, the processing unit comprises a light-shielding cylinder rotatably connected to the outer surface of the cylindrical block, and the outer surface of the light-shielding cylinder is provided with at least one group of transparent pieces and opaque pieces.

[0027] The transparent pieces and opaque pieces on the light-shielding cylinder are rapidly converted at the irradiation end of the linear array light source through rapid rotation of the light-shielding cylinder, thereby forming pulsed illumination.

[0028] Preferably, the heat dissipation module comprises a refrigeration fan arranged on the top of the rack table, and the refrigeration fan is used for injecting cold air into the inside of the light source cover.

[0029] Both sides of the light source cover are respectively provided with air vents and heat dissipation fins.

[0030] (Three) beneficial effects

[0031] Compared with the prior art, the present application provides a film defect online detection device with a modular structure, which has the following beneficial effects:

[0032] The image acquisition module is equipped with a linear array camera with adjustable height and angle, which can collect film surface images in real time from different angles and heights, so that the image processing module can more comprehensively identify defects on the film surface, and avoid missed detection or misjudgment caused by single-angle or single-height collection.

[0033] The transparent pieces and opaque pieces of the light-shielding cylinder are rapidly converted to form pulsed illumination, so that the imaging effect of defects under different light conditions changes, the contrast between defects and background is increased, and film motion blur is reduced, thereby effectively improving the accuracy of defect detection.

[0034] The intelligent self-checking circuit is embedded in each module, so that the working state can be monitored in real time. The control system can automatically issue an alarm and prompt the user through a software interface. For automatically repairable faults, automatic repair is performed. For non-automatically repairable faults, production can be restored by quickly replacing the module, reducing downtime, ensuring production continuity, and adopting a modular structure. The functions of each module are independent and easy to replace and maintain, reducing maintenance cost and difficulty, improving the reliability and scalability of the equipment, and facilitating upgrading and optimization according to actual production needs. BRIEF DESCRIPTION OF DRAWINGS

[0035] Figure 1 Structure diagram of the film defect on-line detection device of the modular structure of the present application;

[0036] Figure 2 Structure side view of the film defect on-line detection device of the modular structure of the present application;

[0037] Figure 3 Combined diagram of the image acquisition module and the illumination module of the present application;

[0038] Figure 4 Structure diagram of the image acquisition module of the present application;

[0039] Figure 5 Partial sectional view of the guide frame of the present application;

[0040] Figure 6 Combined diagram of the illumination module and the heat dissipation module of the present application;

[0041] Figure 7 Structure side view of the present application Figure 6 ;

[0042] Figure 8 Cross-sectional diagram of the present application Figure 6 ;

[0043] Figure 9 Partial sectional view of the cylindrical block of the present application;

[0044] Figure 10 Structure diagram of the telescopic plate of the present application.

[0045] In the figure:

[0046] 100, rack table; 101, transmission module;

[0047] 200, image acquisition module; 201, connecting plate; 202, linear array camera; 203, guide frame; 204, arc-shaped stress block; 205, sliding frame; 206, T-shaped abutting block; 207, bolt rod;

[0048] 300, illumination module; 301, light source cover; 302, cylindrical block; 303, linear array light source; 304, adjusting cylinder; 305, adjusting frame; 306, transmission rod; 307, light-shielding cylinder; 308, toothed disc; 309, rack; 310, telescopic plate; 311, spring set; 312, electromagnet;

[0049] 400, control system;

[0050] 500, heat dissipation module; 501, refrigeration fan; 502, air guide cylinder; 503, piston column; 504, transmission frame. DETAILED DESCRIPTION

[0051] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0052] Embodiment 1:

[0053] Referring to the drawings Figures 1 to 10 A thin film defect online detection device of a modular structure comprises:

[0054] A rack table 100 is provided with a transmission module 101 on both sides for transmitting the thin film to be detected.

[0055] Through the arrangement of the two groups of transmission modules 101, the thin film to be detected after production can be orderly transported to the defect detection area for detection work.

[0056] An image acquisition module 200 is installed on the rack table 100, and the image acquisition module 200 is used for real-time acquisition of the image of the surface of the thin film.

[0057] The image acquisition module 200 is equipped with a line array camera 202 with adjustable height and angle, which can real-time acquire the image of the surface of the thin film from different angles and heights, so that the image processing module can more comprehensively identify the defects on the surface of the thin film, and avoid missing detection or misjudgment caused by single angle or height acquisition.

[0058] An illumination module 300 is installed on the rack table 100, and the illumination module 300 is used for providing uniform and pulse illumination for the surface of the thin film, so as to ensure that the image acquisition module 200 can clearly acquire the image of the surface of the thin film.

[0059] The illumination module 300 is used for forming pulse illumination by rapid conversion, so that the imaging effect of the defects under different illumination conditions changes, the contrast between the defects and the background is increased, the thin film motion blur is reduced, and the accuracy of defect detection is effectively improved.

[0060] A control system 400 is installed on the rack table 100, and the control system 400 comprises an image processing module for processing and analyzing the acquired image to identify the defects on the surface of the thin film.

[0061] In the embodiment, the transmission module 101, the image acquisition module 200, the illumination module 300 and the image processing module are all embedded with intelligent self-checking circuits for real-time monitoring of the working state of the modules.

[0062] When a fault is detected, the control system 400 automatically issues an alarm and prompts the user through the software interface;

[0063] For automatically repairable faults, the control system 400 automatically repairs them;

[0064] For non-automatically repairable faults, the user quickly recovers production by replacing the faulty module;

[0065] A microcontroller (MCU) is embedded in each module to monitor key parameters such as power supply voltage, temperature, communication status, etc. Through existing self-checking algorithms, the module's fault type and location are quickly diagnosed, and the self-checking results are sent to the main control system through the communication interface;

[0066] By embedding intelligent self-checking circuits in each module, the working state can be monitored in real time. The control system 400 can automatically issue an alarm and prompt the user through the software interface. For automatically repairable faults, the control system 400 automatically repairs them. For non-automatically repairable faults, the user can quickly recover production by replacing the module, reducing downtime and ensuring production continuity.

[0067] The modular structure is adopted, and each module has independent functions and is easy to replace and maintain, reducing maintenance costs and difficulty, improving the reliability and scalability of the equipment, and facilitating upgrading and optimization according to actual production needs.

[0068] Referring to the accompanying drawings Figures 3 to 5 The image acquisition module 200 includes a connecting plate 201 connected to the rack table 100, and at least one height- and angle-adjustable linear array camera 202 is installed on the connecting plate 201. The linear array camera 202 is used to acquire images of the film surface in real time at different angles or different heights, and then the acquired images are processed and analyzed by the image processing module, so that the defects on the film surface can be identified.

[0069] Referring to the accompanying drawings Figures 3 to 5 The connecting plate 201 is connected to the inner top of the rack table 100 in an up-down sliding manner through two guide rails, facilitating height adjustment of the connecting plate 201 and the linear array camera 202;

[0070] The linear array camera 202 is pivotally connected to the connecting plate 201, so that the linear array camera 202 can be angle-adjusted around the pivot;

[0071] The rack table 100 is provided with a locking unit for locking the linear array camera 202 after height adjustment and / or angle adjustment, to ensure the stability of the linear array camera 202 after height adjustment and / or angle adjustment;

[0072] The locking unit comprises a guide frame 203 fixed to the rack table 100 by a support and an arc-shaped stress block 204 fixed to the linear array camera 202, and the center of the arc-shaped stress block 204 coincides with the rotation shaft axis of the linear array camera 202;

[0073] The center of the arc-shaped stress block 204 coincides with the rotation shaft axis of the linear array camera 202, so that the arc-shaped stress block 204 can rotate coaxially with the linear array camera 202 during angle adjustment, thereby facilitating synchronous locking of angle adjustment and height adjustment of the linear array camera 202;

[0074] The outer side surface of the guide frame 203 is slidingly connected with a sliding frame 205, the inner side surface of the sliding frame 205 is slidingly connected with a T-shaped abutting block 206 through a guide rod, and the sliding frame 205 is provided with a bolt rod 207 for driving the T-shaped abutting block 206 towards the arc-shaped stress block 204;

[0075] When the bolt rod 207 is rotationally driven by manual or additional electric mode, the T-shaped abutting block 206 can be driven towards the arc-shaped stress block 204, and the driving of the T-shaped abutting block 206 can abut and rub against the arc-shaped stress block 204 through the protruding abutting end, thereby ensuring the stability of the linear array camera 202 after angle adjustment;

[0076] The recessed end on both sides of the T-shaped abutting block 206 can abut and rub against the guide frame 203, thereby ensuring the stability of the sliding frame 205 after height adjustment, and the angle adjustment and height adjustment of the linear array camera 202 can be synchronized.

[0077] Referring to the accompanying drawings Figures 6 to 10 The illumination module 300 comprises a light source cover 301 fixed to the inside of the rack table 100, the top of the light source cover 301 is provided with a glass plate, the inside of the light source cover 301 is provided with a height-adjustable cylindrical block 302, and the top of the cylindrical block 302 is embeddedly provided with a linear array light source 303;

[0078] The linear array light source 303 is connected with the control system 400 in the existing connection mode, is used for emitting light, provides light for the collection position of the image collection module 200, and thereby enhances the detection effect of the film; the cylindrical block 302 is installed in a height-adjustable manner, so that different intensity illumination work can be formed by adjusting the height of the cylindrical block 302;

[0079] The outer surface of the cylindrical block 302 is provided with a processing unit for pulse illumination processing of the linear array light source 303;

[0080] Through the setting of the processing unit, the linear array light source 303 can be controlled in a pulse illumination mode, so that the linear array light source 303 has a pulse illumination work, and the imaging effect of the defect under different illumination conditions changes, thereby increasing the contrast between the defect and the background and improving the defect detection effect of the thin film.

[0081] The rack table 100 is provided with a heat dissipation module 500 for dissipating heat of the illumination element inside the light source cover 301.

[0082] Through the setting of the heat dissipation module 500, the heat dissipation of the illumination element inside the light source cover 301 is processed, which prevents the illumination element from working in a high-temperature environment, which not only easily affects the illumination effect, but also easily damages the light source of the illumination element, thereby causing the problem of reducing the service life.

[0083] Referring to the accompanying drawings Figures 6 to 10 The two ends of the cylindrical block 302 are slidably connected to the inside of the light source cover 301 through the movement blocks in an up-down sliding mode; through the height adjustment of the linear array light source 303 on the cylindrical block 302, the illumination intensity of the thin film is adjusted, and the image acquisition module 200 detects the defects of the thin film under different illumination intensities.

[0084] Through the height adjustment of the linear array light source 303 on the cylindrical block 302, the illumination intensity of the thin film by the linear array light source 303 can be adjusted, and through the adjustment of the illumination intensity, the thin film can be adaptively adjusted according to the material, thickness and surface characteristics.

[0085] Since different detection scenes may require different illumination intensities, the adjustment of the illumination intensity can ensure that clear images can be obtained under various conditions.

[0086] The inside of the rack table 100 is fixedly connected with an adjusting cylinder 304, and the telescopic end of the adjusting cylinder 304 is fixedly connected with an adjusting frame 305, and the adjusting frame 305 is fixedly connected with two movement blocks through two groups of transmission rods 306.

[0087] The adjusting cylinder 304 is connected with the control system 400, for driving the adjusting frame 305 to move up and down, and then the two groups of transmission rods 306 can drive the cylindrical block 302 to move up and down, and finally the linear array light source 303 can be adjusted in height inside the light source cover 301, and the illumination intensity adjustment work of the linear array light source 303 is formed.

[0088] Referring to the accompanying drawings Figures 8 to 10 The processing unit includes a light-shielding cylinder 307 rotatably connected to the outer surface of the cylindrical block 302, and the outer surface of the light-shielding cylinder 307 is provided with at least one group of transparent and opaque pieces.

[0089] The rapid rotation of the light shielding cylinder 307 causes the transparent sheet and the opaque sheet on the light shielding cylinder 307 to rapidly switch on the irradiation end of the linear array light source 303, forming pulsed illumination, and having the function of illumination switching;

[0090] By controlling the on-off frequency and angle of the light source, the imaging effect of the defect under different light conditions changes, thereby increasing the contrast between the defect and the background; for example, in some cases, the defect may exhibit more obvious light and dark changes under the irradiation of pulsed light, facilitating the recognition of the detection system;

[0091] Moreover, in a high-speed production line, the rapid movement of the film may cause motion blur in the image under traditional continuous illumination, affecting the detection accuracy; and pulsed illumination can provide instant high-intensity illumination at a specific position or time of film movement, in combination with the synchronous triggering of the camera, effectively reducing motion blur and thus obtaining clearer images and improving the accuracy of defect detection.

[0092] The existing pulsed illumination needs to be equipped with a corresponding pulse control module and an accurate synchronous triggering device, which not only increases the complexity and cost of the system, but also requires high control accuracy and stability of the light source, otherwise it may affect the reliability of the detection results.

[0093] Moreover, the light source of the existing pulsed illumination needs to frequently flash at high intensity in a short time, which may accelerate the aging of the light source and shorten its service life, while the pulsed illumination of the present application does not require the light source to frequently flash at high intensity in a short time, thereby preventing the aging of the light source and improving the service life.

[0094] Embodiment 2: differs from embodiment 1 in that

[0095] Referring to the accompanying Figures 8 to 10 Both ends of the light shielding cylinder 307 are fixedly connected with a gear disc 308, and the inside of the light source cover 301 is provided with two groups of gear racks 309 engaged with the gear disc 308;

[0096] By fixing the gear disc 308 on both ends of the light shielding cylinder 307 and arranging the gear rack 309 inside the light source cover 301 to engage with the gear disc 308, when the light shielding cylinder 307 is driven up and down, the gear disc 308 and the gear rack 309 can be engaged to make the light shielding cylinder 307 rotate synchronously, thereby rapidly switching between the transparent sheet and the opaque sheet and achieving pulsed illumination;

[0097] In combination with the height adjustment of the light shielding cylinder 307 and the linear array light source 303, the pulsed illumination under the illumination intensity can be enhanced, the contrast can be improved, and the film motion blur can be reduced;

[0098] The inner side of the light source cover 301 is slidably connected with the telescopic plate 310 through a guide rod, and the two racks 309 are fixedly connected with the telescopic plate 310;

[0099] Through the setting of the telescopic plate 310, the two racks 309 are installed in the interior of the light source cover 301 in a telescopic manner;

[0100] The inner side of the light source cover 301 is fixedly connected with the spring group 311 for extruding the telescopic plate 310 and the electromagnet 312 for magnetically attracting the telescopic plate 310, and the inner side of the telescopic plate 310 is fixedly connected with the metal sheet for being attracted by the electrified electromagnet 312;

[0101] Through the elastic extrusion of the spring group 311 on the telescopic plate 310, the telescopic plate 310 drives the rack 309 to expand, and the toothed disc 308 in the light shielding cylinder 307 moving upward is engaged with the rack 309, so that the light shielding cylinder 307 is automatically converted to form pulse illumination work;

[0102] On the contrary, through the setting of the electromagnet 312, the telescopic plate 310 can be magnetically attracted by the self-attraction force, so that the two racks 309 are contracted, and the light shielding cylinder 307 does not rotate when the linear array light source 303 and the light shielding cylinder 307 move upward, thereby the illumination intensity can be adjusted alone, and the function of multi-mode illumination conversion is achieved, which is suitable for defect detection of different films;

[0103] It should be noted that the inner upper side of the light source cover 301 is provided with a shielding part for shielding the telescopic plate 310, the rack 309 and other components to prevent the components from affecting the illumination light.

[0104] Embodiment 3: Different from embodiment 1 is that;

[0105] Referring to the accompanying drawings, Figure 7 and Figure 8 The heat dissipation module 500 includes the refrigeration fan 501 arranged on the top of the rack table 100, and the refrigeration fan 501 is used for injecting cold air into the interior of the light source cover 301;

[0106] In this embodiment, the refrigeration fan 501 is a fan capable of refrigeration in the prior art, and the temperature of the illumination module 300 can be quickly reduced by injecting cold air into the interior of the light source cover 301, thereby improving the service life of the illumination module 300 and avoiding the problem of light emission decrease caused by the illumination environment temperature being too high;

[0107] The two sides of the light source cover 301 are respectively provided with air vents and heat dissipation fins;

[0108] The gas inside the light source cover 301 is discharged after heat exchange, and the gas circulation efficiency is improved; the heat dissipation fins are arranged to dissipate heat of the lighting module 300 in the normal mode, and different modes of heat dissipation work are realized in different working states of the lighting module 300.

[0109] One side of the light source cover 301 is fixedly connected with a gas guide cylinder 502, and the air outlet of the refrigeration fan 501 is communicated with the inside of the gas guide cylinder 502 through an air outlet pipe;

[0110] The air outlet of the refrigeration fan 501 is communicated with the inside of the gas guide cylinder 502 through the air outlet pipe, so that the gas entering the inside of the gas guide cylinder 502 directly enters the light source cover 301 to perform heat dissipation work of the lighting element;

[0111] The inside of the gas guide cylinder 502 is provided with a piston column 503, one end of the piston column 503 is hingedly connected with an inclined transmission frame 504, and the bottom end of the transmission frame 504 is hingedly connected with the adjusting frame 305;

[0112] When the piston column 503 moves in the inside of the gas guide cylinder 502, not only the amount of gas output by the refrigeration fan 501 can be increased, but also the speed of cold air entering the inside of the light source cover 301 can be accelerated, further enhancing the heat dissipation performance of the lighting module 300, and solving the problem that when the lighting module 300 is adjusted in intensity or pulse illumination, the temperature of the lighting module 300 itself will also be significantly increased, and the ordinary heat dissipation mode cannot effectively cool down;

[0113] The piston column 503 is connected with the adjusting frame 305 through the transmission frame 504, so that when the adjusting frame 305 adjusts the intensity or pulse of the linear array light source 303, the heat dissipation mode of the heat dissipation module 500 can be enhanced without separate control and start;

[0114] It should be noted that the piston movement of the piston column 503 can also be driven by a separately arranged cylinder to enhance the heat dissipation intensity of the heat dissipation module 500;

[0115] The output end of the gas guide cylinder 502 is provided with a one-way valve, and the air outlet pipe is provided with a branch pipe, and the branch pipe is provided with a one-way valve;

[0116] By setting the one-way valve piece at the output end of the air guide cylinder 502, the output gas will not appear backflow phenomenon, and by setting the branch pipe on the air outlet pipe, and setting the one-way valve on the branch pipe; for when the piston column 503 in the air guide cylinder 502 performs piston movement, the inside of the air guide cylinder 502 will present a negative pressure state, however, when the gas supplemented by the refrigeration fan 501 cannot make up the negative pressure state in the air guide cylinder 502, a part of the gas can be drained through the branch pipe to neutralize, so as to realize the working protection of the refrigeration fan 501, and avoid the problem of failure caused by the large working load of the refrigeration fan 501.

[0117] Finally, it should be noted that: the above is only the preferred embodiments of the present application, and is not intended to limit the present application, although the foregoing embodiments of the present application are described in detail, for those skilled in the art, it still can be modified to the technical solution recorded in the foregoing embodiments, or equivalent replacement of some technical features, any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application, should be included in the protection scope of the present application.

Claims

1. An apparatus for on-line detection of defects in a thin film of a modular structure, characterized by, The utility model relates to a kind of film defect detection device, including: Rack table (100), both sides of rack table (100) are provided with transmission module (101) for the transmission of film to be detected; Image acquisition module (200), installed on rack table (100), and image acquisition module (200) is used for real-time acquisition of the image of film surface; Illumination module (300), installed on rack table (100), and illumination module (300) is used for providing uniform and pulse illumination for film surface, to ensure that image acquisition module (200) can clearly obtain the image of film surface; Control system (400), installed on rack table (100), and control system (400) includes image processing module for processing and analyzing collected image, to identify the defect of film surface.

2. The apparatus for on-line detection of defects in thin films of a modular structure according to claim 1, characterized in that: The transmission module (101), image acquisition module (200), illumination module (300) module and image processing module are embedded with intelligent self-checking circuit for real-time monitoring of the working state of module; When detecting fault, control system (400) automatically issues alarm, and prompts user through software interface; For automatically repairable fault, control system (400) automatically repairs; For non-automatic repairable fault, user recovers production quickly by replacing fault module.

3. The apparatus for on-line detection of defects in thin films of a modular structure according to claim 1, characterized in that: The image acquisition module (200) includes connecting plate (201) connected to rack table (100), at least one height and angle adjustable line array camera (202) is installed on the connecting plate (201), and the line array camera (202) is used for real-time acquisition of the image of film surface at different angles or different heights.

4. The apparatus for on-line detection of defects in thin films of a modular structure according to claim 3, characterized in that: The connecting plate (201) is connected to the inner top of rack table (100) in up-down sliding mode through two guide rails; The line array camera (202) is pivotally connected to the connecting plate (201); The rack table (100) is provided with locking unit for locking line array camera (202) after height adjustment and / or angle adjustment.

5. The apparatus for on-line detection of defects in thin films of a modular structure according to claim 1, characterized in that: The illumination module (300) includes light source cover (301) fixed in the interior of rack table (100), and glass plate is installed on the top of light source cover (301), height-adjustable cylindrical block (302) is arranged in the interior of light source cover (301), and line array light source (303) is embeddedly installed on the top of cylindrical block (302); The outer surface of cylindrical block (302) is provided with processing unit for pulse illumination processing of line array light source (303); The rack table (100) is provided with heat dissipation module (500) for heat dissipation of illumination element in the interior of light source cover (301).

6. The apparatus for on-line detection of defects in thin films of a modular structure according to claim 5, characterized in that: Both ends of the cylindrical block (302) are slidably connected to the interior of the light source cover (301) in up-down sliding mode through a motion block;Through height adjustment of line array light source (303) on the cylindrical block (302), image acquisition module (200) carries out defect detection of film at different illumination intensities; The inside of the rack table (100) is fixedly connected with an adjusting cylinder (304), and the telescopic end of the adjusting cylinder (304) is fixedly connected with an adjusting frame (305), which is fixedly connected with two moving blocks through two groups of transmission rods (306).

7. The apparatus for on-line detection of defects in thin films of a modular structure according to claim 6, characterized in that: The processing unit comprises a light-shielding cylinder (307) rotatably connected to the outer surface of the cylindrical block (302), and the outer surface of the light-shielding cylinder (307) is provided with at least one group of transparent sheets and opaque sheets. The transparent sheets and opaque sheets on the light-shielding cylinder (307) are rapidly switched on the irradiation end of the line array light source (303) through the rapid rotation of the light-shielding cylinder (307), forming pulsed illumination.

8. The apparatus for on-line detection of defects in thin films of a modular structure according to claim 5, characterized in that: The heat dissipation module (500) comprises a refrigeration fan (501) arranged on the top of the rack table (100), and the refrigeration fan (501) is used for injecting cold air into the inside of the light source cover (301). Both sides of the light source cover (301) are respectively provided with air vents and heat dissipation fins.

Images