Double-feedback control system and control method for extraction electrode of ion implanter

Abstract

The invention discloses a double-feedback control system and control method for an extraction electrode of an ion implanter. The invention discloses a double-feedback control system for an extraction electrode of an ion implanter. The driver is connected with the control module; the moving mechanism comprises a moving platform and a driving device, the driving device is in driving connection with the moving platform, the driving device comprises a motor, a transmission mechanism and a moving part, the motor is connected with the transmission mechanism, the transmission mechanism is connected with the moving part, the moving part is connected with the moving platform, and an encoder is arranged on the motor. A position detection piece is arranged on the moving part, and the encoder and the position detection piece are connected with the driver at the same time; and the extraction electrode is fixedly connected to the mobile platform. A double-feedback closed-loop control system is formed by installing the encoder at the driving end and installing the position detection piece at the load end, the position detection precision is improved, and the precision can be improved to the micron level.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of extraction electrodes, and more particularly to a double feedback control system and control method for an extraction electrode of an ion implanter. BACKGROUND

[0002] As shown in the prior art, in order to achieve implantation in an ion implantation process, a beam should be extracted first. When a beam is generated from an ion source, an extraction electrode is responsible for extracting the ion beam generated from the ion source and forming a preliminary beam. By applying an extraction voltage, the extraction electrode pulls ions out of the plasma of the ion source through the action of an electric field to form a directional beam passing through the gap of the extraction electrode. Figure 1

[0003] The conventional position control method for the extraction electrode is realized by using an encoder. A single encoder indirectly measures the position of the electrode through a lead screw and is susceptible to errors such as mechanical transmission and thermal expansion, which further causes the ion beam to deviate.

[0004] In addition, the conventional extraction electrode uses a potentiometer and a photoelectric switch to measure the position. The potentiometer cannot directly measure the motion displacement but distinguishes through a resistor. The resolution of the potentiometer is limited by the uniformity of the resistor material and has a large error. The photoelectric switch can only detect whether the electrode reaches a preset point and cannot provide continuous position feedback. SUMMARY

[0005] In view of the deficiencies of the prior art, the present application innovatively provides a double feedback control system and control method for an extraction electrode of an ion implanter, which can solve the technical problem of poor measurement accuracy of the extraction electrode in the prior art.

[0006] To achieve the above technical purposes, the present application discloses a double feedback control system for an extraction electrode of an ion implanter, comprising: a control module; a driver connected with the control module; a moving mechanism comprising a moving platform and a driving device drivingly connected with the moving platform, the driving device comprising a motor, a transmission mechanism and a moving component, the motor being connected with the transmission mechanism, the transmission mechanism being connected with the moving component, and the moving component being connected with the moving platform, wherein an encoder is arranged on the motor, and a position detection member is arranged on the moving component, the encoder and the position detection member being connected with the driver at the same time; an extraction electrode fixedly connected with the moving platform.

[0007] ​Further, the driving devices are provided in plurality, and the plurality of driving devices control the movement of the moving platform in different directions.

[0008] Further, the driving devices are provided in plurality, and the plurality of driving devices control the movement of the moving platform in different directions.

[0009] Further, the driving devices are provided in plurality, and the plurality of driving devices control the movement of the moving platform in different directions.

[0010] Further, the control module comprises a control terminal and an industrial computer, the control terminal is connected with the industrial computer, and the industrial computer is connected with the driving device. Further, the motor comprises any one or more of a servo motor, a stepping motor, a direct current motor and a linear motor.

[0011] Further, the plurality of driving devices are used to drive the moving platform to move linearly, and the driving directions of the plurality of driving devices are perpendicular to each other.

[0012] Further, the driving device comprises a first driving device, a second driving device and a third driving device, wherein the first driving device and the second driving device are used to drive the moving platform to move linearly, and the third driving device is used to drive the moving platform to swing. The first driving device comprises a first motor, a first transmission mechanism and a first moving part, the first motor is provided with a first encoder, and the first moving part is provided with a first grating ruler. The second driving device comprises a second motor, a second transmission mechanism and a second moving part, the second motor is provided with a second encoder, and the second moving part is provided with a second grating ruler. The third driving device comprises a third motor, a third transmission mechanism and a third moving part, the third motor is provided with a third encoder, and the third moving part is provided with a secondary encoder or a grating ruler.

[0013] The second aspect of the present application discloses a control method of the double feedback control system for the extraction electrode of the ion implanter. The driving device receives the rotating speed of the motor detected by the encoder and the position of the moving part detected by the position detecting member. The driving device controls the operation of the motor according to the received data.

[0014] Further, the driving device calculates the data detected by the encoder and the position detecting member, performs dynamic compensation and sends a driving signal to the motor. The driver derives a nonlinear error of a transmission chain by calculating a difference value of detection data of the position detection member and the encoder, and superimposes the nonlinear error on a compensation amount to a control instruction to control the motor.

[0015] Further, the control method comprises: The control module sends a control instruction to the driver, the driver sends a driving signal to the motor, and the motor starts working, The encoder detects the motor speed and generates a pulse signal feedback to the driver, The moving part is driven by the motor to move, the position detection member detects the position of the moving part and feeds back a signal to the driver, The driver calculates the nonlinear error according to the data of the encoder and the position detection member, and generates the dynamic compensation signal to send to the motor.

[0016] The present application has the following advantages: The double feedback control system for the extraction electrode of the ion implanter provided by the present application forms a double feedback closed loop control system by installing an encoder at the driving end and a position detection member at the load end, thereby improving the position detection precision, which can be improved to the micron level. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 A schematic diagram of the principle of the extraction electrode extracting the beam is shown; Figure 2a A schematic diagram of the beam state when the distance between the extraction electrode and the ion source is too small is shown; Figure 2b A schematic diagram of the beam state when the distance between the extraction electrode and the ion source is moderate is shown; Figure 2c A schematic diagram of the beam state when the distance between the extraction electrode and the ion source is too large is shown; Figure 3a A schematic diagram of the beam state when the extraction electrode is horizontally and vertically offset is shown; Figure 3b A schematic diagram of the beam state when the extraction electrode is horizontally and vertically offset is shown; Figure 3c A schematic diagram of the beam state when the extraction electrode is horizontally and vertically offset is shown; Figure 4 A structural block diagram of the double feedback control system for the extraction electrode of the ion implanter according to the embodiment of the present application is shown; Figure 5 A partial structural schematic diagram of the double feedback control system for the extraction electrode of the ion implanter according to the embodiment of the present application is shown; Figure 6Figure 1 shows a partial structural schematic diagram of a double feedback control system for an extraction electrode of an ion implanter according to an embodiment of the present application; Figure 7 Figure 2 shows a structural block diagram of the double feedback control system for the extraction electrode of the ion implanter according to the embodiment of the present application; Figure 8 Figure 3 shows a partial structural schematic diagram of a double feedback control system for an extraction electrode of an ion implanter according to another embodiment of the present application; Figure 9 Figure 4 shows a partial structural schematic diagram of the double feedback control system for the extraction electrode of the ion implanter according to the embodiment of the present application; Figure 10 Figure 5 shows a structural block diagram of the double feedback control system for the extraction electrode of the ion implanter according to the embodiment of the present application; Figure 11 Figure 6 shows a partial structural schematic diagram of a double feedback control system for an extraction electrode of an ion implanter according to another embodiment of the present application; Figure 12 Figure 7 shows a partial structural schematic diagram of the double feedback control system for the extraction electrode of the ion implanter according to the embodiment of the present application; Figure 13 Figure 8 shows a structural block diagram of the double feedback control system for the extraction electrode of the ion implanter according to the embodiment of the present application.

[0018] In the figures, 1, extraction electrode; 2, moving platform; 3, flange; 4, first driving device; 41, first motor; 42, first transmission mechanism; 43, first moving part; 44, first encoder; 45, first grating ruler; 5, second driving device; 51, second motor; 52, second transmission mechanism; 53, second moving part; 54, second encoder; 55, second grating ruler; 6, third driving device; 61, third motor; 62, third transmission mechanism; 63, third moving part; 64, third encoder; 65, third grating ruler; 65', secondary encoder. DETAILED DESCRIPTION

[0019] The double feedback control system for the extraction electrode of the ion implanter and the control method provided by the present application will be explained and described in detail below in conjunction with the accompanying drawings of the specification.

[0020] The position of the extraction electrode in each direction has certain influence on the beam, as shown in Figure 2a 、 Figure 2b 、 Figure 2c The distance between the extraction electrode and the ion source affects the focusing degree of the beam, as shown in Figure 2aAs shown, when the distance between the ion source and the extraction electrode is too small, the beam is under-focused, the beam diverges prematurely, and the degree of beam divergence through the extraction electrode slit is too large. Ultimately, the beam spot diameter hitting the wafer surface increases, energy dispersion is too great, and the beam diffuses laterally on the wafer surface. For example... Figure 2c As shown, when the distance between the ion source and the extraction electrode is too large, the beam is over-focused, excessively converges, and then diverges, ultimately resulting in the beam hitting the wafer surface and causing excessive dose at the center and insufficient dose at the edges. Figure 2b As shown, when the distance between the ion source and the extraction electrode is appropriate, the beam optics system reaches an optimal matching state, and most of the beam can pass through the extraction slot and finally be uniformly distributed on the wafer surface.

[0021] like Figure 2a , 2b As shown, the horizontal and vertical positions of the lead-in electrodes affect the symmetry of the beam cross-section and the amount of secondary electrons. When the position deviates too much, most of the beam will hit the lead-in electrodes, forming more secondary electrons, which may cause arcing. Furthermore, the asymmetry of beam energy through the lead-in electrodes results in an "asymmetric distribution" of the beam cross-section hitting the wafer surface, such as one side having a 20% higher current density and the other side having a 40% lower current density, leading to uneven doping in the wafer edge region. Figure 2c As shown, when the lead-out electrodes are positioned appropriately in the horizontal and vertical directions, the beam current is optimally matched with the lead-out electrode slot, allowing the beam current to pass through the lead-out electrode slot and ultimately resulting in a symmetrical and uniform distribution of the beam current on the wafer surface.

[0022] It is evident that the extraction electrode directly determines the energy stability, beam current intensity, and spatial distribution of the ion beam. As semiconductor process requirements become increasingly stringent, higher demands are placed on the position control precision of the extraction electrode.

[0023] The dual-feedback control system for the extraction electrode of an ion implanter provided by this invention forms a closed-loop control system with dual feedback by installing an encoder at the drive end and a position detection device at the load end, thereby improving the position detection accuracy to the micrometer level. The invention will be described in detail below with reference to specific embodiments: In some embodiments, the present invention provides a dual feedback control system for the extraction electrode of an ion implanter, such as... Figure 4 As shown, it includes: a control module, a driver, a moving mechanism, and lead-out electrodes. The control module is connected to the driver, the driver is connected to the moving mechanism, and the lead-out electrodes are disposed on the moving mechanism. The control module sends control commands to the driver, and the driver sends control commands to the moving mechanism to make the moving mechanism move. The moving mechanism drives the lead-out electrodes to move.

[0024] In some embodiments, the moving mechanism comprises a moving platform and a driving device, the extraction electrode is arranged on the moving platform, and the extraction electrode is optionally connected to the moving platform. The driving device is in driving connection with the moving platform and is used to drive the moving platform to move. In this embodiment, the driving device comprises a motor, a transmission mechanism and a moving component. The motor is connected to the transmission mechanism, the transmission mechanism is connected to the moving component, and the moving component is connected to the moving platform. An encoder is arranged on the motor, and a position detection member is arranged on the moving component. The encoder and the position detection member are simultaneously connected to a driver. The encoder is used to detect the rotating speed of the motor and convert the rotating speed into a pulse signal. The position detection member is used to detect the moving position of the moving component. When the moving component moves linearly, the position detection member is an optical grating ruler used to detect the displacement change of the moving component. When the moving component rotates, the position detection member is a secondary encoder used to detect the rotating angle of the moving component. The motor optionally comprises any one or more of a servo motor, a stepping motor, a direct current motor and a linear motor. The transmission mechanism optionally comprises any one or more of a gear mechanism, a synchronous belt, a belt or a lead screw. The moving component optionally comprises gears, a rack, a belt pulley, a lead screw nut and the like which are matched with the transmission mechanism. In this application, the specific structure and driving mode of the driving device are not limited. Any existing driving device or any driving device capable of achieving the required moving mode can be selected.

[0025] In some embodiments, the driving device can be provided in plurality and is used to drive the moving platform to move in different directions to achieve multi-directional and multi-angle adjustment of the extraction electrode. Correspondingly, the driver is provided in plurality, and each driving device is connected to one driver.

[0026] The control module comprises a control terminal (PC) and an industrial computer. The control terminal is connected to the industrial computer, and the industrial computer is connected to the driver. The plurality of drivers are simultaneously connected to the industrial computer.

[0027] In some embodiments, the control method of the double feedback control system for the extraction electrode of the ion implanter provided by the application comprises the following steps: The driver receives the rotating speed of the motor detected by the encoder and the position of the moving component detected by the position detection member. The driver controls the motor to work according to the received data. Optionally, the driver calculates the data detected by the encoder and the position detection member, performs dynamic compensation and sends a driving signal to the motor; the driver calculates the nonlinear error of the transmission chain by calculating the difference between the detection data of the position detection member and the encoder, and adds the nonlinear error to the control instruction to control the motor.

[0028] In some embodiments, the control method comprises: The control module sends a control instruction to the driver, the driver sends a driving signal to the motor, and the motor starts to work, The encoder detects the motor speed and generates a pulse signal feedback to the driver, The moving part is driven by the motor to move, the position detecting member detects the position of the moving part and feeds back a signal to the driver, The driver calculates the non-linear error according to the data of the encoder and the position detecting member and generates a dynamic compensation signal sent to the motor.

[0029] The following several specific embodiments are listed to introduce the double feedback control system for the extraction electrode of the ion implanter: Embodiment one: As shown in Figure 5 、 Figure 6 、 Figure 7 The double feedback control system for the extraction electrode of the ion implanter includes an extraction electrode 1, a moving platform 2, a first driving device 4, a second driving device 5, and a control module and a first driver and a second driver, and the extraction electrode 1 is rigidly connected with the moving platform 2. Optionally, a flange 3 is arranged on the moving platform 2, and the flange 3 is used for the connection of the moving platform 2 with other equipment.

[0030] In this embodiment, the driving device can drive the moving platform 2 to move linearly in two directions, and the driving device includes the first driving device 4 and the second driving device 5, wherein the first driving device 4 is used to drive the vertical movement, and the second driving device 5 is used to drive the horizontal movement. Optionally, the first driving device 4 is used to drive the moving platform 2 to move up and down, and the second driving device 5 is used to drive the moving platform 2 to move forward and backward.

[0031] In this embodiment, the first driving device 4 includes a first encoder 44, a first motor 41, a first transmission mechanism 42, a first moving part 43, and a first grating ruler 45. The first encoder 44 and the first grating ruler 45 are connected with the first driver, and the first moving part 43 is connected with the moving platform 2. The first encoder 44 is connected with the first motor 41, and the first encoder 44 can detect the speed of the first motor 41 and feed back a pulse signal to the first driver. The first motor 41 drives the first moving part 43 to drive the moving platform 2 to move in the Y direction through the first transmission mechanism 42, and the first moving part 43 has the first grating ruler 45, which can detect the position in real time and feed back the position signal to the first driver.

[0032] The second driving device 5 comprises a second encoder 54, a second motor 51, a second transmission mechanism 52, a second moving component 53 and a second grating ruler 55. The second encoder 54 and the second grating ruler 55 are connected with the second driver, and the second moving component 53 is connected with the moving platform 2. The second encoder 54 is connected with the second motor 51, and can detect the speed of the second motor 51 and feed back a pulse signal to the second driver. The second motor 51 drives the second moving component 53 to drive the moving platform 2 to move in the Z direction through the second transmission mechanism 52, and the second moving component 53 is provided with the second grating ruler 55, which can detect the position in real time and feed back a position signal to the second driver.

[0033] The control method flow in the embodiment is shown in Figure 7 The PC issues an instruction to the industrial computer, the industrial computer issues a signal to the first driver and the second driver according to the issued instruction, the first driver and the second driver issue driving signals to the first motor 41 and the second motor 51 respectively, the first encoder 44 and the second encoder 54 convert the speed into pulse signals and feed back the pulse signals to the first driver and the second driver respectively, the first motor 41 and the second motor 51 drive the first moving component 43 and the second moving component 53 to move linearly through the first transmission mechanism 42 and the second transmission mechanism 52 respectively, the first grating ruler 45 and the second grating ruler 55 detect the position and feed back a signal to the first driver and the second driver, the first driver and the second driver calculate the nonlinear error of the transmission chain in real time through the difference between the grating ruler and the encoder, and add the compensation amount to the control instruction, so as to realize the control of the movement of the extraction electrode 1 in the micron level.

[0034] Embodiment two: As shown in Figure 8 , Figure 9 , Figure 10 In the embodiment, the double feedback control system for the extraction electrode of the ion implanter comprises the extraction electrode 1, the moving platform 2, the first driving device 4, the second driving device 5, the third driving device 6, and the control module, the first driver, the second driver and the third driver. The extraction electrode 1 is rigidly connected with the moving platform 2.

[0035] In the embodiment, the driving device can drive the moving platform 2 to move in three directions, and the driving device comprises the first driving device 4, the second driving device 5 and the third driving device 6. The first driving device 4 is used to drive the moving platform 2 to move vertically, and the second driving device 5 and the third driving device 6 are used to drive the moving platform 2 to move horizontally. Alternatively, the first driving device 4 is used to drive the moving platform 2 to move up and down, the second driving device 5 is used to drive the moving platform 2 to move forward and backward, and the third driving device 6 is used to drive the moving platform 2 to move left and right.

[0036] The first driving device 4 and the second driving device 5 have the same structure as in the first embodiment, which will not be repeated here. The third driving device 6 comprises a third encoder 64, a third motor 61, a third transmission mechanism 62, a third moving component 63 and a third grating ruler 65. The third encoder 64 and the third grating ruler 65 are connected with the third driver, and the third moving component 63 is connected with the moving platform 2. The third encoder 64 is connected with the third motor 61, and can detect the speed of the third motor 61 and feed back a pulse signal to the third driver. The third motor 61 drives the third moving component 63 to move the moving platform 2 in the X direction through the third transmission mechanism 62, and the third moving component 63 has the third grating ruler 65, which can detect the position in real time and feed back a position signal to the third driver.

[0037] The control method flow in the embodiment is shown in Figure 10 The PC issues an instruction to the industrial computer, the industrial computer issues a signal to the third driver, the first driver and the second driver according to the issued instruction, the three drivers respectively issue a driving signal to the third motor 61, the first motor 41 and the second motor 51, the third encoder 64, the first encoder 44 and the second encoder 54 convert the speed into a pulse signal and feed back to the third driver, the first driver and the second driver respectively, the third motor 61, the first motor 41 and the second motor 51 respectively drive the third moving component 63, the first moving component 43 and the second moving component 53 to move linearly through the third transmission mechanism 62, the first transmission mechanism 42 and the second transmission mechanism 52, the third grating ruler 65, the first grating ruler 45 and the second grating ruler 55 detect the position and feed back a signal to the third driver, the first driver and the second driver respectively, the third driver, the first driver and the second driver calculate the nonlinear error of the transmission chain in real time through the difference between the grating ruler and the encoder, and add the compensation amount to the control instruction, so as to realize the control of the movement of the extraction electrode 1 in the micron level.

[0038] Embodiment three: As shown in Figure 11 , Figure 12 , Figure 13 In this embodiment, the double feedback control system for the extraction electrode of the ion implanter comprises an extraction electrode 1, a moving platform 2, a first driving device 4, a second driving device 5, a third driving device 6, and a control module and a first driver, a second driver and a third driver, and the extraction electrode 1 is rigidly connected with the moving platform 2.

[0039] In the embodiment, the driving device can drive the moving platform 2 to move in three directions, and the driving device comprises a first driving device 4, a second driving device 5 and a third driving device 6, wherein the first driving device 4 and the second driving device 5 are used to drive linear movement, and the third driving device is used to drive swinging. Optionally, the first driving device 4 is used to drive the moving platform 2 to move up and down in the vertical direction, the second driving device 5 is used to drive the moving platform 2 to move forward and backward in the horizontal direction, and the third driving device 6 is used to drive the moving platform 2 to swing left and right.

[0040] The first driving device 4 and the second driving device 5 have the same structure as in the first embodiment, which will not be repeated here. The third driving device 6 comprises a third encoder 64, a third motor 61, a third transmission mechanism 62, a third moving part 63 and a secondary encoder 65'. The third encoder 64 and the secondary encoder 65' are connected with the third driver, and the third encoder 64 is connected with the third motor 61, which can detect the rotation angle in real time and feed back the pulse signal to the third driver. The third moving part 63 is connected with the moving platform 2, and the third motor 61 drives the third moving part 63 to drive the moving platform 2 to swing in the X direction through the third transmission mechanism 62. The third moving part 63 has the secondary encoder 65' thereon, which can detect the rotation angle in real time and feed back the signal to the third driver.

[0041] The control method flow of the embodiment is shown in Figure 13 The PC issues instructions to the industrial computer, and the industrial computer issues signals to the first driver, the second driver and the third driver according to the issued instructions. The three drivers respectively issue driving signals to the first motor 41, the second motor 51 and the third motor 61. The first encoder 44, the second encoder 54 and the third encoder 64 respectively convert the speed into pulse signals and feed back the pulse signals to the first driver, the second driver and the third driver. The first motor 41 and the second motor 51 respectively drive the first moving part 43 and the second moving part 53 to move linearly through the first transmission mechanism 42 and the second transmission mechanism 52. The third motor 61 drives the third moving part 63 to swing through the third transmission mechanism 62. The first grating ruler 45, the second grating ruler 55 and the secondary encoder 65' detect the position information and feed back the signals to the first driver, the second driver and the third driver. The three drivers calculate the nonlinear error of the transmission chain in real time through the difference between the grating ruler and the encoder, and add the compensation amount to the control instruction, so as to realize the control of the movement of the extraction electrode 1 in the micron level. Optionally, in the embodiment, the secondary encoder 65' can also be replaced by a grating ruler.

[0042] The double feedback control system for the extraction electrode of the ion implanter provided by the application eliminates the mechanical errors such as backlash and elastic deformation by detecting the actual position of the extraction electrode by the grating ruler, and realizes the double-dimensional precision calibration of "mechanical-electrical".

[0043] The double closed-loop control system also has high-speed response and enhanced stability, optimizes the process rhythm, uses the encoder for the inner loop, can quickly suppress the disturbance caused by the ion beam current fluctuation, uses the grating ruler for the outer loop, and has improved stability, and can ensure the consistency of the implantation dose. The double closed-loop control system can dynamically distribute the weights of the encoder and the grating ruler, the encoder has a large weight in the high-speed scanning stage, and the response speed can be improved; the grating ruler has a large weight in the low-speed fine adjustment stage, and the final positioning precision can be ensured. The double closed-loop control system can greatly reduce the automatic beam guiding time, increase the success rate of automatic beam guiding, improve the utilization rate of the ion implanter equipment, and improve the production efficiency of the ion implanter equipment.

[0044] Compared with the traditional single encoder or the combination of the potentiometer and the photoelectric switch, the double feedback control system for the extraction electrode of the ion implanter provided by the application has improved reliability, sets a fault tolerance mechanism, can automatically switch to the encoder mode when the grating ruler is abnormal, and loads the historical error model to avoid shutdown. The double closed-loop feedback system can significantly improve the process stability and equipment reliability of the ion implanter.

[0045] In the description of the application, it should be understood that the orientations or positional relationships indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the application.

[0046] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0047] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0048] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0049] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, and simple improvements made on the substantive content of the present invention should be included within the protection scope of the present invention.

Claims

1. A dual-feedback control system for the extraction electrode of an ion implanter, characterized in that, The utility model relates to a kind of control system for ion implantation machine extraction electrode, including: Control module; Driver, which is connected with the control module; Moving mechanism, including moving platform and driving device, the driving device is driven connection with the moving platform, The driving device includes motor, transmission mechanism and moving part, the motor is connected with the transmission mechanism, the transmission mechanism is connected with the moving part, the moving part is connected with the moving platform, wherein, encoder is arranged on the motor, position detection piece is arranged on the moving part, The encoder and the position detection piece are simultaneously connected with the driver; Extraction electrode, which is fixedly connected to the moving platform.

2. The dual feedback control system for an extraction electrode of an ion implanter of claim 1, wherein, The driving device is provided in plurality, and the plurality of driving devices control the moving platform to move in different directions.

3. The dual feedback control system for an extraction electrode of an ion implanter of claim 2, wherein, The driver is provided in plurality, and each driving device is connected with one driver.

4. The dual feedback control system for an extraction electrode of an ion implanter of claim 3, wherein, The control module includes a control terminal and an industrial computer, the control terminal is connected with the industrial computer, and the industrial computer is connected with the driver.

5. The dual feedback control system for an extraction electrode of an ion implanter of claim 4, wherein, The motor includes any one or more of a servo motor, a stepper motor, a DC motor and a linear motor. The transmission mechanism includes any one or more of a gear mechanism, a synchronous belt, a belt or a lead screw.

6. The dual feedback control system for an extraction electrode of an ion implanter of claim 3, wherein, The plurality of driving devices are used to drive the moving platform to move linearly, and the driving directions of the plurality of driving devices are perpendicular to each other.

7. The dual feedback control system for an extraction electrode of an ion implanter of claim 3, wherein, The driving device includes a first driving device, a second driving device and a third driving device, wherein the first driving device and the second driving device are used to drive the moving platform to move linearly, and the third driving device is used to drive the moving platform to swing. The first driving device includes a first motor, a first transmission mechanism and a first moving part, a first encoder is arranged on the first motor, and a first grating ruler is arranged on the first moving part. The second driving device includes a second motor, a second transmission mechanism and a second moving part, a second encoder is arranged on the second motor, and a second grating ruler is arranged on the second moving part. The third driving device includes a third motor, a third transmission mechanism and a third moving part, a third encoder is arranged on the third motor, and a secondary encoder or a grating ruler is arranged on the third moving part.

8. A control method for the double feedback control system of the extraction electrode of the ion implantation machine according to any one of claims 1-7, wherein The driver receives the rotational speed of the motor detected by the encoder and the position of the moving part detected by the position detection piece. The driver controls the motor according to the received data.

9. The control method according to claim 8, characterized by, The driver dynamically compensates the data detected by the encoder and the position detection piece and sends a driving signal to the motor. The driver calculates the nonlinear error of the transmission chain by calculating the difference between the detection data of the position detection piece and the encoder, adds the nonlinear error to the control command, and controls the motor.

10. The control method according to claim 9, characterized by, The control method includes: The control module sends a control command to the driver, the driver sends a driving signal to the motor, and the motor starts working, The encoder detects the motor speed and generates a pulse signal feedback to the driver, The moving part is driven by the motor to move, and the position detection member detects the position of the moving part and feeds back a signal to the driver, The driver calculates the non-linear error according to the data of the encoder and the position detection member, and generates the dynamic compensation signal sent to the motor.

Images