Modular robotic arm

Abstract

The application relates to the technical field of semiconductor equipment, and provides a modular mechanical arm, which comprises at least one arm body, the arm body comprises an arm main body with a cavity and a wall surrounding the cavity, at least one suspension is arranged in the cavity and forms at least one bearing surface along the height direction of the cavity, the suspension is detachably coupled with a reference wall in the wall or a wall opposite to the reference wall or a wall surrounding the periphery of the reference wall or is integrally formed with the wall, and at least one belt wheel is rotatably arranged on the bearing surface. According to the application, each belt wheel is independently mounted on the suspension and the suspension is rigidly fixed in the cavity, vibration transmission in the transmission process is reduced, mechanical interference between the belt wheels in the existing structure is eliminated, and transmission precision is improved. The suspension and the wall of the cavity are rigidly fixed, the overall rigidity of the transmission system is improved, radial load generated by synchronous belt tension is effectively resisted, wheel shaft angle deviation is reduced, and the positioning precision of an end effector is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, in particular to a modular mechanical arm. BACKGROUND

[0002] In the field of semiconductor manufacturing, wafer transfer robot as a key automated equipment in wafer processing process, its motion precision and structural stability directly affect the production efficiency and yield of wafer.

[0003] In the prior art, the large arm or small arm of the wafer transfer robot adopts an integrated structure design, in order to realize the independent operation of the large arm, the small arm and the end effector, a plurality of transmission mechanisms are arranged in the large arm and / or the small arm of the traditional robot, the plurality of pulleys are directly connected through bearings, when one pulley rotates, the vibration or displacement thereof will be transmitted to other pulleys through the bearings, aggravating the transmission error and affecting the stability of wafer transfer; in addition, the tension of the plurality of synchronous belts is accumulated step by step, resulting in that the wheel bearing bears a large radial load, which is easy to cause the angular displacement of the wheel shaft, and after being amplified by the plurality of transmission stages, the positioning accuracy of the end effector is finally reduced.

[0004] Therefore, it is necessary to provide a modular mechanical arm to solve the above problems. SUMMARY

[0005] The present application aims to provide a modular mechanical arm to solve the problem that the transmission accuracy of the end effector is affected by the connection between the plurality of pulleys through the bearings in the existing arm body.

[0006] The present application provides a modular mechanical arm, comprising at least one arm body, the arm body comprising:

[0007] An arm body having a cavity and a wall surrounding the cavity;

[0008] At least one suspension configured in the cavity and forming at least one bearing surface along the height direction of the cavity, the suspension being detachably coupled with or integrally constructed with a reference wall in the wall or a wall opposite to the reference wall or a wall surrounding the reference wall;

[0009] At least one pulley rotatably arranged on the bearing surface.

[0010] In a possible embodiment, for the case that the suspension is detachably coupled with the wall surrounding the reference wall, at least one fixing portion is formed on the periphery of the suspension, the wall surrounding the reference wall is provided with a groove corresponding to the fixing portion, and the fixing portion is detachably mounted in the corresponding groove.

[0011] In a possible embodiment, for the case that the suspension is integrally formed with the wall of the reference wall periphery, at least one fixing portion is formed on the periphery of the suspension, and the fixing portion is integrally formed with the wall of the reference wall periphery.

[0012] In a possible embodiment, the side of the pulley away from the other wheel body in transmission connection is determined as a back side, and at least one fixing point is provided between the suspension and the wall, and the at least one fixing point is located at the end side of the suspension close to the back side of the pulley.

[0013] In a possible embodiment, when the fixing point is one, the fixing point is located in the middle of the end side of the suspension close to the back side of the pulley, or the fixing point is at least one pair, each pair of the fixing point is symmetrically distributed on the periphery of the suspension, and one of each pair of the fixing point is located at the end side of the suspension close to the back side of the pulley.

[0014] In a possible embodiment, the bearing surface is provided with a mounting body in the form of a ring, and the pulley can rotate around the mounting body.

[0015] In a possible embodiment, the pulley is connected with the mounting body through a first bearing.

[0016] In a possible embodiment, the mounting body includes a support portion in the form of a ring and a protruding portion in the form of a ring formed along the vertical direction and protruding outward from the outer periphery of the support portion, and a limiting groove is formed by the protruding portion and the support portion to mount the first bearing.

[0017] In a possible embodiment, the suspension includes a frame body, and the top surface and the bottom surface of the frame body are the two bearing surfaces of the suspension.

[0018] In a possible embodiment, the frame body is in the form of a ring, and a pair of transition portions symmetrically arranged are formed inward along the inner periphery of the frame body, and the transition portions are arranged one by one corresponding to the mounting body, and the mounting body is arranged in the corresponding transition portion.

[0019] In a possible embodiment, for the case that the suspension is detachably coupled or integrally formed with the wall of the reference wall periphery, the modular mechanical arm further includes a single wheel rotatably arranged on the reference wall, and / or the modular mechanical arm further includes a single wheel rotatably arranged on the wall opposite to the reference wall.

[0020] The modular mechanical arm provided by the present application has the following beneficial effects:

[0021] 1. Each pulley is independently mounted on the suspension and the suspension is rigidly fixed in the cavity, which reduces vibration transmission during the transmission process, eliminates mechanical interference between pulleys in the existing structure, and improves transmission accuracy.

[0022] 2. The rigidity of the suspension and the chamber walls improves the overall rigidity of the transmission system, effectively resists the radial load generated by the synchronous belt tension, reduces wheel axle angle deviation, and improves the positioning accuracy of the end effector.

[0023] 3. At least one of the fixing points is located on the end side of the suspension near the back side of its pulley to counteract the force of the timing belt on the pulley of the suspension and improve the stability of the structure.

[0024] 4. By rationally setting the suspension structure, each suspension is equipped with at least two pulleys, ensuring that different pulleys are located at different transmission heights while achieving a compact spatial layout. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the modular robotic arm of the present invention.

[0026] Figure 2 This is a schematic diagram of the segmented body, pulleys, and single-unit wheels in the modular robotic arm of the present invention.

[0027] Figure 3 This is a cross-sectional view of the mid-end body and single wheel of the modular robotic arm of the present invention.

[0028] Figure 4 This is a schematic diagram of the suspension and pulleys in the modular robotic arm of the present invention.

[0029] Figure 5 This is a cross-sectional view of the suspension and pulleys in the modular robotic arm of the present invention.

[0030] Figure 6 This is a schematic diagram of the suspension in the modular robotic arm of the present invention.

[0031] Figure 7 This is a cross-sectional view of the suspension in the modular robotic arm of the present invention.

[0032] Figure 8 This is a schematic diagram of a pair of suspensions, pulleys, and timing belts of the modular robotic arm of the present invention.

[0033] Figure 9 This is a schematic diagram of the modular robotic arm of the present invention, showing that the arm body is a segmented structure.

[0034] Reference signs: 100, arm body; 110, wall around the reference wall; 111, groove; 120, suspension; 121, frame body; 1211, bearing surface; 122, fixed part; 123, mounting body; 1231, support part; 1232, protruding part; 1233, limiting groove; 1234, gap; 124, transition part; 130, pulley; 131, wheel body; 1311, mounting groove; 132, sliding part; 133, back side; 134, gap; 140, first bearing; 150, single wheel; 160, second bearing; 170, synchronous belt; 180, anchor point; 190, segmented body; 191, connecting plate; 192, end body; 193, cover plate; 194, joint surface; 195, perforation; 196, plug; 197, slot; 198, fixing hole; 200, execution assembly; 210, first end effector; 220, second end effector. DETAILED DESCRIPTION

[0035] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0036] To solve the problems in the prior art, the embodiments of the present application provide a modular mechanical arm, referring to Figure 1 and Figure 2 The modular mechanical arm comprises at least one arm body 100, and the arm body 100 comprises an arm body, at least one suspension 120, and at least one pulley 130. The arm body has a cavity and a wall surrounding the cavity. The at least one suspension 120 is arranged in the cavity and forms at least one bearing surface 1211 along the height direction of the cavity. The suspension 120 is detachably coupled or integrally constructed with the reference wall or the wall opposite to the reference wall or the wall 110 surrounding the reference wall, and the reference wall is the top wall or the bottom wall of the cavity. The detachable coupling is fastener connection, buckle connection, etc. The at least one pulley 130 is rotatably arranged on the bearing surface 1211.

[0037] Compared with the prior art, in the embodiment, each pulley 130 is arranged on a bearing of different height of the suspension 120, and each bearing surface 1211 is provided with a pulley 130, so that different pulleys 130 are located at different transmission heights, and independent installation between the pulleys 130 is realized. The vibration of the pulley 130 is transmitted in the transmission process due to the rigid fixation of the suspension 120 and the independent setting of the pulley 130, thereby significantly reducing the transmission of the vibration between the pulleys 130, eliminating the mechanical interference between the pulleys 130, and improving the transmission accuracy.

[0038] In the prior art, each pulley is arranged in a multi-layer stacked manner in the height direction through a bearing to form a multi-stage transmission mechanism. The multi-stage synchronous belt tension force is accumulated step by step and acts on the bearings between the pulleys, so that the wheel bearing bears a large radial load, and the wheel shaft angle is offset. In the embodiment, the suspension 120 is rigidly fixed with the chamber wall, and the tension force of the synchronous belt 170 is dispersed to the overall structure of the suspension 120 and the chamber wall through the pulley 130, and is not transmitted to other pulleys 130, so that the problem of step-by-step accumulation of the tension force of the multi-stage synchronous belt 170 does not occur, and the angle offset of the pulley 130 due to the large radial load is avoided, and the positioning accuracy of the end effector is improved.

[0039] The specific fixing method of the suspension 120 will be explained in detail below.

[0040] In the first embodiment, referring to Figure 3 and Figure 4 , for the detachable coupling of the suspension 120 and the wall 110 on the side of the reference wall, at least one fixing portion 122 is formed on the side of the suspension 120, and the wall 110 on the side of the reference wall is provided with a groove 111 corresponding to the fixing portion 122. The groove 111 is matched with the fixing portion 122, and the fixing portion 122 is detachably installed in the corresponding groove 111. The fixing portion 122 is limited in the groove 111, and the groove 111 can effectively bear the fixing portion 122 and provide stable support force, so that the connection between the suspension 120 and the chamber wall is more firm and can withstand a larger load without loosening.

[0041] Further, referring to Figure 3 , the groove 111 extends from the top of the wall 110 on the side of the reference wall to the middle of the wall 110 on the side of the reference wall; and / or, the groove 111 extends from the bottom of the wall 110 on the side of the reference wall to the middle of the wall 110 on the side of the reference wall, and the fixing portion 122 is locked and fixed in the corresponding groove 111 by a fastener.

[0042] Further, the inner wall of the groove 111 and the fixing portion 122 are respectively provided with mounting holes, and the fixing portion 122 is locked and fixed in the groove 111 by fasteners passing through the mounting holes of the fixing portion 122 and the groove 111. The fasteners are bolts, screws, etc.

[0043] In the second embodiment, for the case that the suspension 120 is integrally formed with the wall 110 on the circumferential side of the reference wall, at least one fixing portion 122 is formed on the circumferential side of the suspension 120, and the fixing portion 122 is integrally formed with the wall 110 on the circumferential side of the reference wall. The design of integral formation improves the overall integrity and rigidity of the structure, and avoids assembly error problems caused by manufacturing processes.

[0044] In a preferred embodiment, referring to Figure 4 , the width of the fixing portion 122 in the horizontal direction gradually decreases from the end close to the suspension 120 to the end away from the suspension 120, facilitating the insertion of the small head of the fixing portion 122 into the groove 111 and facilitating installation. Specifically, the fixing portion 122 is in the shape of a triangle or a trapezoid.

[0045] In the third embodiment, for the case that the suspension 120 is detachably coupled or integrally formed with the reference wall or the wall opposite to the reference wall, at least one fixing rod is provided on the circumferential side of the suspension 120 through detachable coupling or integral formation, and the end of the fixing rod away from the suspension 120 is fixed to the reference wall or the wall opposite to the reference wall through detachable coupling or integral formation, so that the suspension 120 is hung or supported in the chamber.

[0046] In an embodiment, referring to Figure 8 , the side of the pulley 130 away from the other wheel body in transmission connection is determined as the back side 133, and there is at least one fixing point between the suspension 120 and the wall, and the at least one fixing point is located at the end side of the suspension 120 close to the back side 133 of the pulley 130. The fixing point is the connection between the suspension 120 and the wall of the chamber, and in the foregoing embodiment, the fixing point is the fixing portion 122.

[0047] The synchronous belt 170 exerts a force on the pulley 130 during transmission, and the direction of the force is consistent with the direction of movement of the synchronous belt 170. After the force of the pulley 130 is transmitted to the suspension 120, the suspension 120 will also be subjected to a force consistent with the direction of movement of the synchronous belt 170, and the back side 133 of the pulley 130, i.e. the side opposite to the direction of movement of the synchronous belt 170, i.e. the fixing point is arranged at the end side of the suspension 120 close to the back side 133 of the pulley 130, which can effectively offset the influence of the tangential force on the suspension 120, thereby improving the stability of the suspension 120.

[0048] In the first specific embodiment, when the fixing point is one, the fixing point is located in the middle of the end side of the suspension 120 close to the back side 133 of the pulley 130.

[0049] In a second embodiment, referring to Figure 8 , the fixing points are at least one pair, each pair of fixing points is symmetrically distributed on the circumferential side of the suspension 120, and one of each pair of fixing points is located on the end side of the suspension 120 close to the back side 133 of the pulley 130. The symmetrically arranged fixing points form a symmetric support fixing, effectively counteracting and dispersing the load of the suspension 120.

[0050] In a third embodiment, referring to Figure 6 , the fixing points are a plurality of and are uniformly spaced along the circumferential side of the suspension 120, for example, every 180°, 90°, or 60°, and the load of the suspension 120 is uniformly dispersed to the chamber wall through the uniformly distributed plurality of fixing points.

[0051] The specific structure of the suspension 120 will be explained in detail below.

[0052] In an embodiment, referring to Figure 5 and Figure 7 , the bearing surface 1211 is provided with a mounting body 123 in the form of a ring, and the pulley 130 can rotate around the mounting body 123.

[0053] Further, referring to Figure 5 , the pulley 130 is connected to the mounting body 123 through a first bearing 140. The first bearing 140 reduces friction, making the pulley 130 rotate more smoothly. Specifically, the first bearing 140 is a cross-roller bearing.

[0054] Still further, referring to Figure 5 , Figure 6 and Figure 7 , the mounting body 123 includes a support portion 1231 in the form of a ring and a protruding portion 1232 in the form of a ring formed along the vertical direction on the outer periphery of the support portion 1231, and a limiting groove 1233 is formed by the protruding portion 1232 and the support portion 1231 to install the first bearing 140.

[0055] In an embodiment, referring to Figure 5 , the pulley 130 includes a wheel body 131 in the form of a ring and a sliding portion 132 provided on the circumferential side of the wheel body 131 along the outer periphery of the wheel body 131, and the wheel body 131 is provided with a mounting groove 1311 on the side close to the mounting body 123 to install the end portion of the first bearing 140, so that a gap 134 is formed between the wheel body 131 and the protruding portion 1232, and the sliding portion 132 is arranged around the mounting body 123 and can rotate around the mounting body 123. The pulley 130 is similar to a flat structure, and the installation between the pulley 130 and the mounting body 123 is compact, achieving a compact layout in the vertical direction.

[0056] In an embodiment, referring to Figure 5 ,Figure 6 and Figure 7 The suspension 120 comprises a suspension body 121, and the top surface and the bottom surface of the suspension body 121 are two bearing surfaces 1211 of the suspension 120.

[0057] Further, referring to Figure 5 and Figure 7 The suspension body 121 is annular and inwardly protrudes along the inner periphery of the suspension body 121 to form a pair of transition portions 124 arranged symmetrically, and the transition portions 124 are arranged one by one corresponding to the mounting bodies 123 arranged in the corresponding transition portions 124. The pair of transition portions 124 arranged symmetrically on the suspension body 121 and the pair of mounting bodies 123 arranged symmetrically make the structure force more balanced and the load distribution more uniform.

[0058] Further, referring to Figure 5 A gap 1234 is formed between the pair of mounting bodies 123 of the suspension body 121, and the pair of mounting bodies 123 are distributed at intervals in the vertical direction of the small gap 1234, so that the two pulleys 130 mounted on the suspension body 121 are not too close or too far apart in the vertical direction, avoiding mutual interference and achieving compact layout in the vertical space.

[0059] In one specific embodiment, referring to Figure 2 For the case that the suspension 120 is detachably coupled or integrally constructed with the wall 110 around the reference wall, the modular robotic arm further comprises a single pulley 150 rotatably arranged on the reference wall. Specifically, the single pulley 150 is rotatably arranged on the reference wall through the second bearing 160.

[0060] In another specific embodiment, referring to Figure 2 The modular robotic arm further comprises a single pulley 150 rotatably arranged on the wall opposite to the reference wall. Specifically, the single pulley 150 is rotatably arranged on the wall opposite to the reference wall through the second bearing 160.

[0061] By arranging the suspension 120 on the wall 110 around the reference wall to mount the pulley 130, and arranging the single pulley 150 on the reference wall and / or the wall opposite to the reference wall, the space inside the chamber is fully utilized to meet the multi-wheel layout requirement, and compact layout in the vertical space is achieved.

[0062] In one embodiment, referring to Figure 8 and Figure 9 The suspension 120 is at least one pair, and each pair of suspensions 120 is located at the two ends of the arm body 100, i.e., the power input end and the power output end. The pulleys 130 of each pair of suspensions 120 are arranged one by one, and the corresponding two pulleys 130 in each pair of suspensions 120 are wound with a synchronous belt 170.

[0063] In another embodiment, the suspension 120 is located at one end of the arm body 100, i.e. the power input end or the power output end.

[0064] In yet another embodiment, the suspension 120 is at least two, and the at least two suspensions 120 are distributed along the vertical direction.

[0065] In a specific embodiment, referring to Figure 8 , the synchronous belt 170 is an open loop belt, and the peripheral side surface of the pulley 130 and the peripheral side surface of the single wheel 150 are each provided with two anchor points 180, a pair of open loop belts are wound on the pulley 130, and the ends of the open loop belts are fixed to the peripheral side surface of the corresponding pulley 130 through the anchor points 180; and / or, a pair of open loop belts are wound on the single wheel 150, and the ends of the open loop belts are fixed to the peripheral side surface of the corresponding single wheel 150 through the anchor points 180.

[0066] The specific structure of the arm body will be explained in detail below.

[0067] In an embodiment, referring to Figure 1 , Figure 2 and Figure 9 , the arm body 100 is of a segmented structure and includes at least two detachably connected segment bodies 190, the segment body 190 has a segment chamber formed inside, and the segment body 190 has an open side facing the segment body 190 adjacent thereto, and the open side is provided with a connecting plate 191, and the segment body 190 is detachably connected to the segment body 190 adjacent thereto through the connecting plate 191. For example, the connecting plate 191 is a connecting flange.

[0068] The arm body 100 is designed in a segmented structure, and the structural size of the arm body 100 can be adjusted by replacing segment bodies 190 of different lengths to adapt to different wafer sizes or work station layout requirements, without the need to redesign and process the entire arm, thereby improving the flexibility of the arm structure, reducing material costs and production cycles, and adapting to the rapid iteration requirements of flexible manufacturing. If the arm body 100 is partially damaged, the entire arm body 100 does not need to be replaced, and only the damaged segment body 190 needs to be replaced, which greatly shortens the maintenance time and reduces the cost of spare parts.

[0069] Further, referring to Figure 2 , the segment body 190 at the end of the arm body includes an end body 192 and a cover plate 193, the end body 192 has a segment chamber and has an opening at the top, and the cover plate 193 is buckled at the opening.

[0070] In some embodiments, the two adjacent segment bodies 190 are joined by regular surfaces or irregular surfaces.

[0071] In some embodiments, at least one joint surface 194 of at least one segment body 190 is trapezoidal.

[0072] In an embodiment, referring to Figure 2 , Figure 3 and Figure 9 , the joint surface 194 of the segment body 190 is provided with a through hole 195 for passing the timing belt 170. According to the arrangement path of the timing belt of the arm body 100, the through hole 195 is arranged on the joint surface 194 of each segment body 190, so that the timing belt 170 can pass through each segment body 190 after the segment bodies 190 are assembled.

[0073] Further, referring to Figure 2 , Figure 3 and Figure 9 , the through hole 195 of the joint surface 194 of each segment body 190 is a pair of through holes 195 arranged near the two sides of the arm body in the width direction. Specifically, the through hole 195 is a strip hole.

[0074] In an embodiment, the joint surface 194 of the segment body 190 is provided with a plug-in part, and the plug-in parts of the joint surfaces 194 of two adjacent segment bodies 190 are connected by plug-in connection to limit the relative displacement of the two segment bodies 190 in the vertical direction and the horizontal direction.

[0075] Further, referring to Figure 2 , Figure 3 and Figure 9 , among the plug-in parts of the joint surfaces 194 of two adjacent segment bodies 190, one plug-in part is a plug-in block 196, and the other plug-in part is a plug-in slot 197 matched with the plug-in block 196, and the plug-in slot 197 can or can not pass through the corresponding joint surface 194.

[0076] Further, referring to Figure 2 and Figure 9 , the plug-in part is located at the center position of the joint surface 194, and the shape and size of the plug-in part are not limited here and can be flexibly arranged according to actual process requirements, for example, the plug-in part is in a rectangular shape.

[0077] In an embodiment, two adjacent segment bodies 190 are fixedly connected by a locking part.

[0078] Further, referring to Figure 2 , Figure 3 and Figure 9 , the joint surface 194 of the segment body 190 is provided with a fixing hole 198, and the locking part passes through the fixing holes 198 of the two segment bodies 190 to realize the fixed connection between the segment bodies 190. The locking part is a bolt, a screw, etc. The fixing hole 198 is a plurality of fixing holes 198 and is arranged at intervals around the plug-in part.

[0079] In an embodiment, referring to Figure 1The multi-section mechanical arm further comprises an execution assembly 200 rotatably arranged at the end of the extension direction of the at least one arm body 100, the execution assembly 200 comprising a first end effector 210 and a second end effector 220, and the coordinated rotation of the at least one arm body 100 and the execution assembly 200 realizes the radial extension or retraction action.

[0080] In the description of the present application, it should be understood that the terms "including" and "having" and any variations thereof used herein are intended to cover a non-exclusive inclusion, for example, a process, method, system, product or device including a series of steps or units does not have to be limited to those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0081] It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0082] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise stated, the meaning of "a plurality of" is two or more.

[0083] Although the embodiments of the present application have been described in detail above, it will be apparent to those skilled in the art that various modifications and changes can be made to the embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the present application as described in the claims. Moreover, the present application described herein can have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the usual meaning understood by those skilled in the art.

Claims

1. A modular robotic arm, characterized by, The application relates to an arm body (100) comprising: an arm body having a cavity and a wall surrounding the cavity; at least one suspension (120) arranged in the cavity and forming at least one bearing surface (1211) in the height direction of the cavity, the suspension (120) being detachably coupled with or integrally formed with a reference wall or a wall opposite to the reference wall or a wall (110) surrounding the reference wall; at least one belt wheel (130) rotatably arranged on the bearing surface (1211); the bearing surface (1211) is provided with a mounting body (123) in the form of a ring, and the belt wheel (130) can rotate around the mounting body (123); the belt wheel (130) is connected with the mounting body (123) through a first bearing (140); the mounting body (123) comprises a support portion (1231) in the form of a ring and a protruding portion (1232) in the form of a ring protruding from the outer periphery of the support portion (1231) in the vertical direction, and a limiting groove (1233) is formed by surrounding the protruding portion (1232) and the support portion (1231) to mount the first bearing (140); the suspension (120) comprises a frame body (121) in the form of a ring, and a pair of transition portions (124) symmetrically arranged are formed by protruding inward from the inner periphery of the frame body (121), and the mounting body (123) is arranged on the corresponding transition portion (124). For the case that the suspension (120) is detachably coupled with the wall (110) surrounding the reference wall, at least one fixing portion (122) is formed on the periphery of the suspension (120), and the wall (110) surrounding the reference wall is provided with a groove (111) corresponding to the fixing portion (122), and the fixing portion (122) is detachably mounted in the corresponding groove (111).

2. The modular robotic arm of claim 1, wherein, For the case that the suspension (120) is integrally formed with the wall (110) surrounding the reference wall, at least one fixing portion (122) is formed on the periphery of the suspension (120), and the fixing portion (122) is integrally formed with the wall (110) surrounding the reference wall.

3. The modular robotic arm of claim 1, wherein, The side of the belt wheel (130) away from the other wheel body connected with the belt wheel (130) is determined as the back side (133), and the suspension (120) and the wall have at least one fixing point, and at least one fixing point is located on the end side of the suspension (120) close to the back side (133) of the belt wheel (130).

4. The modular robotic arm of any one of claims 1-3, wherein, When the fixing point is one, the fixing point is located in the middle of the end side of the suspension (120) close to the back side (133) of the belt wheel (130); or 5. The modular robotic arm of claim 4, wherein, the fixing points are at least one pair, each pair of the fixing points is symmetrically distributed on the periphery of the suspension (120), and one of each pair of the fixing points is located on the end side of the suspension (120) close to the back side (133) of the belt wheel (130). The top surface and the bottom surface of the frame body (121) are the two bearing surfaces (1211) of the suspension (120).

6. The modular robotic arm of claim 1, wherein, ​ 7. The modular robotic arm of claim 6, wherein, The transition portion (124) is arranged one-to-one corresponding to the mounting body (123).

8. The modular robotic arm of any of claims 1-3, 6-7, wherein, In the case that the suspension (120) is detachably coupled or integrally configured with the wall (110) on the circumference of the reference wall, the modular mechanical arm further comprises a single wheel (150) rotatably arranged on the reference wall; and / or, The modular mechanical arm further comprises a single wheel (150) rotatably arranged on the wall opposite to the reference wall.

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