Air purification device of clean room

Abstract

The invention relates to the technical field of clean room purification, in particular to an air purification device of a clean room, which comprises a first pipeline, a second pipeline, a filtering module, an air outlet module, an atomizing nozzle and an air baffle plate which are connected with one another, and the first pipeline and the second pipeline are respectively provided with an air inlet and an air outlet; the filtering module and the air outlet module are both arranged in the second pipeline and used for filtering and purifying airflow and controlling flowing of the airflow, the atomizing nozzle is fixedly connected into the first pipeline, and the air baffle is connected into the first pipeline and used for guiding air sucked in from the air inlet. The upper side of the wind shield is connected with a purification assembly for improving the air purification efficiency of the atomization nozzle, the purification assembly comprises a condensation plate with a surface air cooler, and the condensation plate is fixedly connected into the first pipeline. According to the technical scheme, the purification effect of the system is improved, the maintenance cost and the operation cost of equipment are effectively reduced, and the reliability and the long-term efficiency of the whole system are optimized.

Description

Technical Field

[0001] This invention relates to the field of cleanroom purification technology, and in particular to an air purification device for cleanrooms. Background Technology

[0002] Cleanrooms, also known as dust-free workshops, are special environments that have gradually emerged with the continuous development of society and technology. They are used to produce specific products with extremely high air quality requirements, such as semiconductors, pharmaceuticals, and precision instruments. The purpose of cleanroom design is to control the content of dust, particles, and other contaminants in the air, ensuring a clean environment during the production process to meet product quality requirements.

[0003] In the prior art, a filtration and air supply structure for a cleanroom, disclosed in publication number "CN214172420U", includes a filtration and air supply structure body, a first motor, a second motor, a water pump, and an atomizing nozzle. The bottom end of the filtration and air supply structure body has a drain outlet, a wastewater tank is fixedly installed at the bottom end of the filtration and air supply structure body, a water storage tank is fixedly installed at the top end of the filtration and air supply structure body, and a water pump is fixedly installed on the left side of the water storage tank. An atomizing nozzle is fixedly installed at the bottom end of the water pump. A ventilation duct is fixedly installed on the left side of the filtration and air supply structure body, a filter plate is fixedly installed inside the ventilation duct, a first motor is fixedly installed inside the ventilation duct, a fixing block is fixedly installed inside the ventilation duct, and a slider is inserted inside the fixing block. A rotating plate is rotatably connected inside the ventilation duct, and a second motor is fixedly installed at the top end of the ventilation duct, with a rotating disk fixedly installed at the output end of the second motor.

[0004] The aforementioned technology sprays liquid into the filtration area via atomization, aiming to reduce the dust content in the air. However, it faces several technical challenges in practical application. First, dust particles coated with atomized liquid tend to accumulate more easily on the filter screen during the filtration process compared to dry dust. This leads to filter clogging, increasing the workload of maintenance personnel. Frequent filter clogging also shortens the equipment's maintenance cycle, impacting not only the overall performance of the equipment but also reducing its practicality and efficiency. Summary of the Invention

[0005] The main objective of this invention is to provide an air purification device for cleanrooms, which aims not only to improve the purification effect of the system, but also to effectively reduce the maintenance and operating costs of the equipment, and optimize the overall system reliability and long-term performance.

[0006] To achieve the above objectives, the present invention provides an air purification device for a cleanroom, comprising:

[0007] A first pipe and a second pipe are connected to each other, and an air inlet and an air outlet are respectively opened on the first pipe and the second pipe;

[0008] The filter module and the air outlet module are both installed in the second duct and are used to filter and purify the airflow and control the airflow.

[0009] Atomizing nozzle, wherein the atomizing nozzle is fixedly connected inside the first pipe;

[0010] A baffle plate is connected inside the first duct and is used to guide the air drawn in by the air inlet. A purification component that improves the air purification efficiency of the atomizing nozzle is connected to the upper side of the baffle plate. The purification component includes a condenser plate with a surface cooler, and the condenser plate is fixedly connected inside the first duct.

[0011] In one possible implementation, the purification component further includes:

[0012] A transmission disc is rotatably connected to the inner wall of the first pipe. A transmission plate is hinged to the non-center part of the transmission disc. The transmission plate slides against the first pipe. A transmission block is hinged to the lower end of the transmission plate. The transmission block slides against the upper side of the windshield plate.

[0013] A first wiper assembly and a second wiper assembly, wherein the first wiper assembly and the second wiper assembly slide and abut against the windshield and the condenser plate respectively, and a linkage plate is hinged between the first wiper assembly and the second wiper assembly;

[0014] A drive source is fixedly connected to the outside of the first pipe. The drive shaft of the drive source is coaxially fixedly connected to the transmission disk and is used to drive the transmission disk to rotate.

[0015] In one possible implementation, both the first wiper assembly and the second wiper assembly consist of multiple wiper blades fixedly connected in parallel.

[0016] In one possible implementation, a telescopic sleeve is rotatably connected inside the first pipe, and an agitator column is slidably connected to the telescopic sleeve. Several agitator blades are fixedly connected to the surface of the agitator column. A snap-fit ​​sleeve is slidably engaged at the end of the agitator column away from the telescopic sleeve. The snap-fit ​​sleeve is rotatably connected to the inner wall of the first pipe away from the telescopic sleeve. A reciprocating groove is provided inside the snap-fit ​​sleeve. A positioning column is fixedly connected to the surface of the agitator column, and the positioning column abuts against the inner wall of the reciprocating groove.

[0017] The telescopic sleeve is coaxially fixedly connected to the first pulley on the side facing the drive source;

[0018] The transmission disc is coaxially fixedly connected to a second pulley on the side facing the drive source, and the first pulley and the second pulley are connected in a driving connection.

[0019] In one possible implementation, a protective cover is fixedly connected to the side of the first pipe near the drive source to protect the first pulley and the second pulley.

[0020] In one possible implementation, a support plate is hinged to the wind deflector, and a guide plate is hinged to the end of the support plate away from the wind deflector. The guide plate is rotatably connected to the inner wall of the first duct on the side near the air inlet.

[0021] In one possible implementation, a honeycomb block is fixedly connected to the guide plate on the side facing the support plate.

[0022] This invention's technical solution utilizes a surface cooler on the condenser plate in the purification assembly to condense the atomized liquid near the surface cooler in the first pipe, significantly reducing the water vapor content in the gas. The condensation process condenses water vapor into water droplets, effectively preventing water vapor from entering the filter module and avoiding its impact, thus ensuring the module's filtration stability. By reducing water vapor before the filter module, the combination of water vapor and dust to form sticky substances is prevented, reducing blockage problems, maintaining smooth gas flow and stable filtration effects, significantly improving the filter module's working efficiency and stability, extending the equipment's maintenance cycle, reducing equipment blockage caused by water vapor, lowering maintenance difficulty, and alleviating the workload of maintenance personnel. Furthermore, in conjunction with the first and second wiper components in the purification assembly, dirt and water mist adhering to the surfaces of the baffle and condenser plate can be effectively cleaned, improving their surface cleanliness. This allows the baffle and condenser plate to be repeatedly immersed in adsorption, enhancing the purification effect of subsequent airflow. The cleaning action of the wiper assembly also promotes the rapid settling of condensed water vapor, further reducing humidity within the pipes, alleviating the working pressure on the filter module, and further improving the stability and efficiency of the filter module. Overall, the synergistic effect of the condensation design and the wiper assembly not only enhances the purification effect of the system but also effectively reduces equipment maintenance and operating costs, optimizing the overall system reliability and long-term performance. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of an air purification device for a cleanroom according to the present invention. Figure 1 ;

[0025] Figure 2 This invention provides a schematic diagram of an air purification device for a cleanroom, highlighting the purification components. Figure 1 ;

[0026] Figure 3 This invention provides a schematic diagram of an air purification device for a cleanroom, highlighting the purification components. Figure 2 ;

[0027] Figure 4 This invention provides a schematic diagram of an air purification device for a cleanroom, highlighting the purification components. Figure 3 ;

[0028] Figure 5 This is a schematic diagram of the transmission disc and the agitator column of an air purification device for a clean room according to the present invention.

[0029] Figure 6 This is a schematic diagram of the transmission between the agitator column and the snap-fit ​​sleeve in an air purification device for a cleanroom according to the present invention.

[0030] Explanation of icon numbers:

[0031] 11. First pipe; 12. Second pipe; 13. Air inlet; 14. Air outlet; 15. Atomizing nozzle; 16. Baffle plate; 17. Surface cooler; 18. Condensing plate; 21. Transmission disc; 22. Transmission plate; 23. Transmission block; 24. First wiper assembly; 25. Second wiper assembly; 26. Linkage plate; 27. Drive source; 31. Telescopic sleeve; 32. Agitator column; 321. Positioning column; 33. Agitator fan blade; 34. Snap-fit ​​sleeve; 341. Reciprocating groove; 35. First pulley; 36. Second pulley; 37. Protective cover; 41. Support plate; 42. Guide plate; 43. Honeycomb block.

[0032] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0034] This invention proposes an air purification device for cleanrooms.

[0035] Reference Figures 1 to 6 ,include;

[0036] The first pipe 11 and the second pipe 12 are interconnected, and the first pipe 11 and the second pipe 12 are respectively provided with an air inlet 13 and an air outlet 14.

[0037] The filter module and the air outlet module are both installed in the second duct 12 and are used to filter and purify the airflow and control the airflow.

[0038] Atomizing nozzle 15 is fixedly connected inside the first pipe 11;

[0039] A baffle plate 16 is connected inside the first pipe 11 to guide the air drawn in by the air inlet 13. A purification component that improves the air purification efficiency of the atomizing nozzle 15 is connected to the upper side of the baffle plate 16. The purification component includes a condenser plate 18 with a surface cooler 17. The condenser plate 18 is fixedly connected inside the first pipe 11.

[0040] The purification component is designed to condense the atomized liquid near the surface cooler 17 in the first pipe 11 through the surface cooler 17 on the condenser plate 18, effectively reducing the water vapor content in the gas. The condensation process condenses the water vapor into water droplets, preventing water vapor from being carried into the filter module and avoiding its impact on the filter module, thus ensuring the module's filtration stability. By reducing the water vapor before the filter module, the formation of sticky substances due to the combination of water vapor and dust is prevented, thus avoiding blockage of the filter module pores and affecting gas flow and filtration efficiency. This significantly improves the working efficiency and stability of the filter module, reduces equipment blockage caused by water vapor, extends the equipment maintenance cycle, reduces maintenance difficulty, and lightens the workload of maintenance personnel. Furthermore, in conjunction with the first and second wiper components 24 and 25 in the purification component, dirt and water mist adhering to the surfaces of the baffle plate 16 and the condenser plate 18 can be effectively cleaned, improving their surface cleanliness. This allows the baffle plate 16 and the condenser plate 18 to be repeatedly used for adsorption, improving the purification effect of subsequent airflow. The cleaning action of the wiper assembly also promotes the rapid settling of condensed water vapor, further reducing the humidity within the first duct 11. This alleviates the working pressure of the moisture-laden air on the filter module, further improving its stability and efficiency. Overall, the synergistic effect of the condensation design and the wiper assembly not only enhances the system's purification effect but also effectively reduces equipment maintenance and operating costs, optimizing the overall system's reliability and long-term performance.

[0041] Reference Figures 1 to 4 The purification components also include:

[0042] The transmission disc 21 is rotatably connected to the inner wall of the first pipe 11. A transmission plate 22 is hinged to the non-center part of the transmission disc 21. The transmission plate 22 slides and abuts against the first pipe 11. A transmission block 23 is hinged to the lower end of the transmission plate 22. The transmission block 23 slides and is connected to the upper side of the wind baffle 16.

[0043] The first wiper assembly 24 and the second wiper assembly 25 slide and abut against the windshield 16 and the condenser plate 18 respectively, and a linkage plate 26 is hinged between the first wiper assembly 24 and the second wiper assembly 25.

[0044] Drive source 27 is fixedly connected to the outside of the first pipe 11. The drive shaft of drive source 27 is coaxially fixedly connected to transmission disk 21 and is used to drive transmission disk 21 to rotate.

[0045] The drive source 27 in the purification assembly directly drives the transmission disc 21, causing the transmission plate 22 to reciprocate, thereby pushing the first wiper assembly 24 and the second wiper assembly 25 to reciprocate along the surfaces of the baffle plate 16 and the condenser plate 18. As these wiper assemblies move, water droplets and dirt clumps condensed during the gas-liquid reaction can slide off the surfaces of the baffle plate 16 and the condenser plate 18 more quickly. This process effectively improves the cleanliness of the surfaces of the baffle plate 16 and the condenser plate 18, allowing them to be repeatedly immersed in adsorption, thus enhancing the purification effect on subsequent airflow. Furthermore, through the cleaning by the wiper assemblies, condensed water vapor can quickly settle, effectively reducing the humidity in the first pipe 11 and alleviating the working pressure of the moisture-laden air on the filter module. This reduction in humidity allows the filter module to operate more stably, extending its service life. By reducing the burden caused by moisture, the working efficiency of the filter module is improved, and the overall stability and reliability of the equipment are enhanced. Furthermore, the baffle 16 moves up and down under the drive of the transmission plate 22. This movement causes the airflow guided by the baffle 16 to vibrate, further promoting the settling of dust particles in the air due to gas-liquid reaction. Through this vibration, airborne particles can settle more easily, improving the efficiency of the gas-liquid reaction and thus enhancing the air purification effect. Overall, this design not only improves the cleaning and purification efficiency of the equipment but also optimizes the working environment and service life of the filter module, ensuring the efficient operation of the entire system.

[0046] Reference Figures 2 to 4 Both the first wiper assembly 24 and the second wiper assembly 25 consist of multiple wiper blades fixedly connected in parallel.

[0047] By arranging multiple wiper blades side-by-side, the first wiper assembly 24 and the second wiper assembly 25 can effectively cover the surfaces of the baffle plate 16 and the condenser plate 18. Thus, during the movement of the first wiper assembly 24 and the second wiper assembly 25, dirt clumps condensed on the surfaces of the baffle plate 16 and the condenser plate 18 due to gas-liquid reaction can be thoroughly cleaned. Because of the side-by-side arrangement of the wiper blades, they can clean the surface evenly and thoroughly, ensuring that dirt clumps are completely removed, thereby improving the cleaning effect of the equipment. Furthermore, the side-by-side arrangement of multiple wiper blades eliminates the need for adaptation and adjustment of the outer diameter of the drive disc 21. This avoids complex adjustments to the size of the drive disc 21, thereby reducing the difficulty of equipment design and manufacturing. For the production process of the drive disc 21, no additional adaptation issues need to be considered, reducing the complexity and cost of component manufacturing, further improving production efficiency and reducing production costs.

[0048] Reference Figures 5 to 6 The first pipe 11 is rotatably connected to a telescopic sleeve 31, and a slidable agitator column 32 is slidably connected to the telescopic sleeve 31. Several agitator fan blades 33 are fixedly connected to the column surface of the agitator column 32. A snap-fit ​​sleeve 34 is slidably engaged at the end of the agitator column 32 away from the telescopic sleeve 31. The snap-fit ​​sleeve 34 is fixedly connected to the inner wall of the first pipe 11 away from the telescopic sleeve 31. A reciprocating groove 341 is opened in the snap-fit ​​sleeve 34. A positioning column 321 is fixedly connected to the column surface of the agitator column 32. The positioning column 321 abuts against the inner wall of the reciprocating groove 341.

[0049] The telescopic sleeve 31 is coaxially fixedly connected to the first pulley 35 on the side facing the drive source 27;

[0050] A second pulley 36 is coaxially fixedly connected to the transmission disc 21 on the side facing the drive source 27, and the first pulley 35 is connected to the second pulley 36 in a transmission connection.

[0051] Through the transmission connection between the first pulley 35 and the second pulley 36, the power of the drive source 27 can be precisely transmitted to the agitator column 32, enabling it to rotate synchronously with the drive source 27. Specifically, by adjusting the diameter ratio of the first pulley 35 to the second pulley 36, the rotational speed of the drive source 27 can be flexibly controlled, thereby achieving the normal flipping action of the baffle 16. This adjustment not only ensures that the baffle 16 flips at the correct angle but also effectively drives the multiple agitator blades 33 on the agitator column 32 to generate sufficient wind force, enhancing the stability of gas flow and atomization reaction. Furthermore, the snap-fit ​​sleeve 34 further optimizes the movement of the agitator column 32. During the rotation of the agitator column 32, the snap-fit ​​sleeve 34 ensures that the agitator column 32 moves back and forth along the reciprocating groove 341, thereby enabling the agitator blades 33 on the agitator column 32 to continuously generate sufficient wind force. This reciprocating movement not only improves the stability of the wind force but also adds an oscillation effect to the agitator blades 33. The oscillation effect helps improve the uniformity of airflow and atomization, while enhancing the contact and mixing efficiency between gas and liquid in the gas-liquid reaction process, thereby improving the overall atomization effect. Through this ingenious design, the equipment not only ensures stable airflow output, but also further enhances the gas-liquid reaction through oscillation, improving the equipment's working efficiency and reaction effect, and ensuring a more efficient and stable gas-liquid reaction.

[0052] Reference Figures 2 to 6 A protective cover 37 is fixedly connected to the side of the first pipe 11 near the drive source 27 to protect the first pulley 35 and the second pulley 36.

[0053] By installing the protective cover 37, not only is disassembly and maintenance of the equipment convenient, but the various components between the first pipe 11 and the protective cover 37 are also effectively protected. This protection prevents accidental human contact or external factors from affecting the components, ensuring that the equipment is not damaged unnecessarily during operation. The design of the protective cover effectively isolates external interference, avoiding equipment failure caused by external impacts or accidental contact, thereby improving the stability and durability of each component. With enhanced component protection, the overall operational stability of the equipment is significantly improved, while also extending its service life. By reducing the risk of equipment damage and maintenance frequency, the long-term reliability and operating efficiency of the equipment are further improved, reducing downtime and maintenance costs caused by malfunctions.

[0054] Reference Figures 2 to 4 A support plate 41 is hinged to the wind baffle 16. A guide plate 42 is hinged to the end of the support plate 41 away from the wind baffle 16. The guide plate 42 is rotatably connected to the inner wall of the first pipe 11 on the side near the air inlet 13.

[0055] By adjusting the angle of the baffle plate 16, the supporting plate 41 can be rotated accordingly. This rotation changes the direction of airflow guided by the baffle plate 16, directing the airflow to different areas of the first duct 11. This significantly increases the contact area between the airflow and the atomized liquid, enhancing the contact opportunities and reaction time between the gas and liquid. This improvement helps accelerate the efficiency of the gas-liquid reaction, thereby improving the binding and removal effect of the atomized liquid with dust in the gas. In this way, dust in the airflow can be filtered more effectively, improving the overall air purification effect. Simultaneously, the change in airflow direction ensures the uniformity and stability of the airflow, further optimizing the filtration process.

[0056] Reference Figures 2 to 4 A honeycomb block 43 is fixedly connected to the guide plate 42 on the side facing the supporting plate 41;

[0057] By incorporating honeycomb blocks 43 into the design, the airflow entering through the air inlet 13 can be effectively guided. Guided by the baffle 16, the air flows along the baffle 16 to the guide plate 42, and then is accelerated through the mesh on the honeycomb blocks 43, significantly increasing the airflow velocity. This acceleration enhances the impact force between the dust-laden gas and the atomized liquid, allowing dust particles in the gas to contact the atomized liquid more effectively, thereby promoting the gas-liquid reaction efficiency and significantly improving the air purification effect. More importantly, under this strong gas-liquid reaction, condensed dirt clumps are carried by the airflow and directly adhere to the inner wall of the first duct 11, ensuring clean and effective gas flow. Simultaneously, this design allows the purification components to more easily scrape the inner wall of the duct, thereby optimizing the gas purification effect. Furthermore, because dirt clumps can effectively adhere and accumulate, the workload of subsequent filter modules is reduced, extending the equipment maintenance cycle and reducing the frequency of manual intervention. Ultimately, this not only improves the overall system operating efficiency but also reduces maintenance costs and equipment failure rates, providing a strong guarantee for long-term stable operation.

[0058] In the accompanying drawings of this embodiment, the same or similar reference numerals correspond to the same or similar components. In the description of this application, it should be understood that if terms such as "upper," "lower," "left," and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, they are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the accompanying drawings are only for illustrative purposes and should not be construed as limiting this patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0059] The above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An air purification device for a cleanroom, characterized in that, include: A first pipe (11) and a second pipe (12) are connected to each other, and an air inlet (13) and an air outlet (14) are respectively opened on the first pipe (11) and the second pipe (12); The filter module and the air outlet module are both installed in the second pipe (12) for filtering and purifying the airflow and controlling the airflow. Atomizing nozzle (15), which is fixedly connected inside the first pipe (11); A baffle plate (16) is connected inside the first pipe (11) to guide the air drawn in by the air inlet (13). The baffle plate (16) is connected to a purification component on its upper side to improve the air purification efficiency of the atomizing nozzle (15). The purification component includes a condenser plate (18) with a surface cooler (17). The condenser plate (18) is fixedly connected inside the first pipe (11).

2. The air purification device for a cleanroom according to claim 1, characterized in that, The purification component also includes: A transmission disc (21) is rotatably connected to the inner wall of the first pipe (11). A transmission plate (22) is hinged to the non-center part of the transmission disc (21). The transmission plate (22) slides and abuts against the first pipe (11). A transmission block (23) is hinged to the lower end of the transmission plate (22). The transmission block (23) slides and connects to the upper side of the wind baffle (16). The first wiper assembly (24) and the second wiper assembly (25) are respectively sliding and abutting against the windshield (16) and the condenser plate (18). A linkage plate (26) is hinged between the first wiper assembly (24) and the second wiper assembly (25). The drive source (27) is fixedly connected to the outside of the first pipe (11). The drive shaft of the drive source (27) is coaxially fixedly connected to the transmission disk (21) for driving the transmission disk (21) to rotate.

3. The air purification device for a cleanroom according to claim 2, characterized in that, The first wiper assembly (24) and the second wiper assembly (25) are both multiple wiper blades fixedly connected in parallel.

4. The air purification device for a cleanroom according to claim 2, characterized in that, A telescopic sleeve (31) is rotatably connected inside the first pipe (11). An agitator column (32) is slidably connected to the telescopic sleeve (31). Several agitator fan blades (33) are fixedly connected to the column surface of the agitator column (32). A snap-fit ​​sleeve (34) is slidably engaged at one end of the agitator column (32) away from the telescopic sleeve (31). The snap-fit ​​sleeve (34) is fixedly connected to the inner wall of the first pipe (11) away from the telescopic sleeve (31). A reciprocating groove (341) is opened inside the snap-fit ​​sleeve (34). A positioning column (321) is fixedly connected to the column surface of the agitator column (32). The positioning column (321) abuts against the inner wall of the reciprocating groove (341). The telescopic sleeve (31) is coaxially fixedly connected to the first pulley (35) on the side facing the drive source (27); The transmission disc (21) is coaxially fixedly connected to a second pulley (36) on the side facing the drive source (27), and the first pulley (35) is connected to the second pulley (36) in a transmission connection.

5. The air purification device for a cleanroom according to claim 4, characterized in that, A protective cover (37) is fixedly connected to the side of the first pipe (11) near the drive source (27) to protect the first pulley (35) and the second pulley (36).

6. The air purification device for a cleanroom according to claim 1, characterized in that, A support plate (41) is hinged to the wind baffle (16). A guide plate (42) is hinged to the end of the support plate (41) away from the wind baffle (16). The guide plate (42) is rotatably connected to the inner wall of the first pipe (11) on the side near the air inlet (13).

7. The air purification device for a cleanroom according to claim 6, characterized in that, The guide plate (42) is fixedly connected to a honeycomb block (43) on the side facing the support plate (41).

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