Vacuum microelectronic electric field sensor with high precision

Abstract

The invention relates to the technical field of sensors, in particular to a high-precision vacuum microelectronic electric field sensor, which comprises a bracket, an outer shell, an inner shell, a shaft group, an anti-interference assembly and an electrostatic induction assembly, and is characterized in that the outer shell is arranged on the bracket, and the inner shell is arranged in the center of the inner part of the outer shell; the three shaft sets penetrate through the inner shell in the X-axis direction, the Y-axis direction and the Z-axis direction respectively, the inner shell can be divided into an upper part and a lower part which are the same, the three shaft sets are fixedly arranged in the half inner shell at the lower position, the two anti-interference assemblies are arranged, and each anti-interference assembly is arranged at the two ends of the corresponding shaft set. According to the invention, through the arrangement of the three axis groups along the X-axis direction, the Y-axis direction and the Z-axis direction and the corresponding anti-interference assemblies, each electrostatic induction assembly can be prevented from being influenced by the own electric field component and the electric field components at other positions during electric field induction signal detection, and the detection precision is effectively ensured.

Description

Technical Field

[0001] This invention relates to the field of sensor technology, specifically to a high-precision vacuum microelectronic electric field sensor. Background Technology

[0002] Vacuum microelectronic electric field sensors, as a type of intelligent sensor, are used to measure electrical variables. They determine the electric field strength by measuring the motion of electrons in an electric field and output the measurement results in the form of an electrical signal.

[0003] In the field of holographic radio technology, electrostatic fields in the environment can cause malfunctions in holographic radio equipment, affecting data transmission and even leading to system failures. Therefore, vacuum microelectronic electric field sensors are needed to measure the electric field strength in the environment to ensure the normal operation of holographic radio equipment. However, traditional vacuum microelectronic electric field sensors often have detection directions parallel or perpendicular to the sensor's main axis, limiting their detection direction to one-dimensional and two-dimensional. Since the electric field in the environment is in three-dimensional space, their detection accuracy is limited. To address these issues, existing technologies offer better solutions, such as a high-precision vacuum microelectronic electric field sensor (publication number CN113419117B). This sensor uses two Z-axis, Y-axis, and X-axis rods (each with two rods) mounted on the outer wall of a central sphere. A voltage detection mechanism detects the voltage values ​​of the distal plates on each Z-axis, Y-axis, and X-axis rod, thereby obtaining the corresponding three-dimensional coordinate values ​​and effectively improving its detection accuracy. However, the following defects still exist: Since the electric field is a vector, it can be decomposed into components in the Z-axis, Y-axis and X-axis directions. This causes the electric field induction signal detected by the measuring elements on different axes to be affected by the electric field components on the other two axes, resulting in deviations in detection accuracy, reducing detection accuracy, and thus hindering the normal use of the holographic wireless equipment.

[0004] Therefore, in order to solve the above problems, a high-precision vacuum microelectronic electric field sensor is proposed. Summary of the Invention

[0005] The purpose of this invention is to provide a high-precision vacuum microelectronic electric field sensor that solves the problem that the measuring elements at both ends of the shaft are affected by the electric field induction signal components at the ends of other shafts, thus reducing the detection accuracy. By using three shafts and anti-interference components installed at both ends of each shaft, when an electric field induction signal is detected in the environment, the sensor can block and interfere with the transmission path of the electric field induction signal, causing the electric field induction signal to be consumed during transmission and thus not affecting the detection results of other electrostatic induction components. Simultaneously, the internal space of the shafts allows for independent configuration of the connection lines between the near-electrode plates at both ends of each shaft, avoiding mutual interference between the transmission signals within different connection lines, further ensuring detection accuracy.

[0006] To achieve the above objectives, the present invention provides the following technical solution: A high-precision vacuum microelectronic electric field sensor, used in conjunction with a detector, includes a bracket, a housing, and an inner housing. The housing is mounted on the bracket, and the inner housing is located at the center inside the housing. It also includes shaft groups, anti-interference components, and electrostatic induction components. The shaft groups consist of three shafts that penetrate the inner housing along the X, Y, and Z axes, respectively. The inner housing can be configured as two identical parts (upper and lower). All three shaft groups are fixedly mounted in the lower half of the inner housing. Two anti-interference components are provided, each located at both ends of a corresponding shaft group. Two electrostatic induction components are also provided, each located at both ends of a corresponding shaft group, and each electrostatic induction component is located inside the corresponding anti-interference component.

[0007] Preferably, the shaft assembly includes a bent section and a straight section. The bent section extends through the inner shell, and there are two straight sections, each located at one end of the bent section. The two straight sections are coaxially arranged, and the distance between each pair of the three bent sections inside the inner shell is equal.

[0008] By adopting the above scheme, each shaft group is divided into connected curved and straight sections. This can cover the connecting lines between the electrostatic induction components at both ends of each shaft group, avoiding mutual interference in the signal transmission of connecting lines between two different electrostatic induction components. At the same time, the three curved pipes can make the distance between the three connecting lines used to connect the corresponding two electrostatic induction components equal, further avoiding mutual interference in the signal transmission of different connecting lines, thereby ensuring the detection accuracy of the entire sensor.

[0009] Preferably, the straight section includes a first section, a corrugated pipe, a second section, a mounting block, and an elastic telescopic rod. One end of the first section is inserted into the corresponding curved section. The first section and the second section are coaxially arranged and connected by the corrugated pipe, which is a conductive rubber tube. Two mounting blocks are provided and are respectively provided on the first section and the second section. The elastic telescopic rod is provided between the two mounting blocks.

[0010] By adopting the above scheme, while ensuring that the three shafts are detachable, the elastic deformation effect of the elastic telescopic rod can be used to automatically press the anti-interference component inside the housing when detecting the electric field induction signal. This keeps the end of the anti-interference component sealed to the housing, reducing the dissipation of the electric field induction signal when it enters the anti-interference component and comes into contact with the corresponding electrostatic induction component, thus ensuring detection accuracy. At the same time, under the elastic action of the elastic telescopic rod, multiple electrostatic induction components and corresponding anti-interference components can be stably housed inside the housing. Furthermore, the housing can be configured as two parts, one smaller at the top and one larger at the bottom, so that the contact position between each anti-interference component and the housing is in a smooth transition state, further ensuring the detection accuracy of the sensor.

[0011] Preferably, the anti-interference component includes a shield and a guide tube. The shield is disposed on the second segment, and the guide tube is coaxial with the second segment and penetrates the outer shell. A partition is disposed inside the guide tube in the radial direction. The thickness of the partition is less than the thickness of the guide tube. The shield and the surface of the partition are sealed together.

[0012] By adopting the above scheme, the electrostatic field in the environment can enter the shell along the axial direction of the guide tube and come into contact with the electrostatic induction component set inside the corresponding anti-interference component. At the same time, under the action of the anti-interference component, the electrostatic field can be prevented from dissipating, which would cause the electric field component to affect the detection accuracy of other electrostatic induction components, thereby ensuring the detection accuracy of the electrostatic field in three-dimensional space.

[0013] Preferably, the electrostatic induction component includes a mounting frame, a near electrode plate, and a far electrode plate. The mounting frame is detachably mounted on the second segment. The near electrode plate and the far electrode plate are both disposed between the second segment and the mounting frame, and the near electrode plate and the far electrode plate are in contact with each other. The end of the mounting frame is annular, and the end of the mounting frame is in contact with the surface of the partition and coaxial with the partition.

[0014] By adopting the above scheme, the electrostatic field will come into contact with the corresponding far electrode plate along the axial direction of the mounting bracket after passing through the partition, reducing the diffusion of the electrostatic field to the surroundings. This allows the far electrode plate to detect all the electrostatic field entering the corresponding shielding component from the guide tube, preventing the electrostatic field from dissipating after entering the shielding component, thereby ensuring detection accuracy.

[0015] Preferably, the shielding component includes an inner cover, a middle cover, and an outer cover. The inner cover, middle cover, and outer cover are concentric and all fixedly fitted onto section two. The end faces of the inner cover, middle cover, and outer cover are all sealed and fitted to the surface of the partition. The thickness of the inner cover, middle cover, and outer cover increases progressively.

[0016] By adopting the above scheme, three types of protection are achieved for the corresponding electrostatic induction components using an inner cover, a middle cover, and an outer cover. This ensures that the electrostatic field is blocked to different degrees when it propagates and penetrates inside the inner cover, the middle cover, and the outer cover, thereby consuming the interference of the dissipated electrostatic field, avoiding interference between different electrostatic induction components, and improving the detection accuracy.

[0017] Preferably, the inner wall of the inner cover, middle cover and outer cover are all circumferentially arrayed with multiple sets of anti-interference protrusions, and each set of anti-interference protrusions is arranged in a spiral shape. The spiral direction of the anti-interference protrusions on the inner wall of the middle cover is opposite to that of the anti-interference protrusions on the inner cover and outer cover.

[0018] By adopting the above scheme, and utilizing the anti-interference protrusions with different spiral directions set on the inner wall of the inner cover, middle cover and outer cover, multiple anti-interference protrusions can come into contact during the propagation of the electrostatic field, thereby making the propagation path of the electrostatic field more complex and causing the energy of the electric field induction signal to be passively consumed, thus further improving the detection accuracy.

[0019] Preferably, the bracket includes a base plate and support tubes. The support tubes are disposed on the base plate and are arranged in a circumferential array of three. The upper end of each support tube extends into the interior of the outer shell, and the lower end of each support tube has a through hole.

[0020] By adopting the above scheme, the three support tubes can provide stable support for the outer shell while guiding the connecting wires between the two near-electrode plates in the corresponding shaft group, thereby reducing the exposed range of the connecting wires and reducing signal interference between different connecting wires to ensure the accuracy of the measurement results.

[0021] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. By setting three axis groups along the X, Y, and Z axes respectively, and anti-interference components at both ends of each axis group, the electrostatic induction component in each anti-interference component can be protected. This allows the electrostatic induction component to change the propagation path of the electric field induction signal during the detection process, so that the electric field energy is gradually consumed in the chaotic propagation process. This prevents the component of the electric field induction signal detected by the electrostatic induction component from affecting its own and the detection results at both ends of other axis groups, thereby improving the detection accuracy.

[0022] 2. By setting the bends in each shaft group, the three bends are arranged in pairs at equal distances through the inner shell. This can fix the routing path of the connecting wires used to connect the two ends of each shaft group near the electrode plates. That is, the distance between each pair of different connecting wires is equal and fixed. At the same time, with the signal shielding effect of the bends and straight sections, the transmission signals inside different connecting wires can be prevented from interfering with each other, thereby ensuring the detection accuracy.

[0023] 3. Through the mounting bracket and the partition inside the guide tube, the electric field induction signal in the environment will pass through the mounting bracket and contact the corresponding near plate and far plate along the axial direction after entering the guide tube. This prevents the electric field induction signal from escaping to the surroundings, and allows the near plate and far plate to detect all the electric field induction signals entering from the guide tube, further ensuring the detection accuracy. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is an exploded view of the present invention; Figure 3This is a schematic diagram of the connection structure between the lower half of the inner shell of the present invention and the three shaft groups and the corresponding anti-interference components; Figure 4 For the present invention Figure 3 Enlarged view of part A in the middle section; Figure 5 This is a cross-sectional view of the connection structure between the curved section, the anti-interference component, and the electrostatic induction component of the present invention. Figure 6 For the present invention Figure 5 Enlarged view of section B in the middle section; Figure 7 This is a cross-sectional view of the connection structure between segment two, the shielding component, and the guide tube of the present invention. Figure 8 This is an exploded view of segment two of the present invention, along with the anti-interference component and the electrostatic induction component.

[0025] In the picture: 1. Bracket; 11. Base plate; 12. Support tube; 121. Threading hole; 2. Outer shell; 3. Inner shell; 4. Shaft assembly; 41. Bent section; 42. Straight section; 421. Section 1; 422. Bellows; 423. Section 2; 424. Mounting block; 425. Flexible telescopic rod; 5. Anti-interference components; 51. Shielding components; 511. Inner cover; 512. Middle cover; 513. Outer cover; 52. Guide tube; 521. Partition; 53. Anti-interference protrusion; 6. Electrostatic induction assembly; 61. Mounting bracket; 62. Near electrode plate; 63. Far electrode plate. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] Please see Figures 1 to 8 This invention provides a high-precision vacuum microelectronic electric field sensor, the technical solution of which is as follows: For details, please refer to Figure 1 , Figure 2 , Figure 3 and Figure 4A high-precision vacuum microelectronic electric field sensor, used in conjunction with a detector, includes a bracket 1, a housing 2, and an inner housing 3. The housing 2 is mounted on the bracket 1, and the inner housing 3 is located at the center inside the housing 2. It also includes shaft groups 4, an anti-interference component 5, and an electrostatic induction component 6. The shaft groups 4 consist of three shafts that penetrate the inner housing 3 along the X, Y, and Z axes, respectively. The inner housing 3 can be configured as two identical parts, upper and lower. All three shaft groups 4 are fixedly mounted in the lower half of the inner housing 3. The upper and lower parts of the inner housing 3 are detachably connected to facilitate the installation of the three shaft groups 4. The bracket 1 includes a base plate 11 and support tubes 12. The support tubes 12 are mounted on the base plate 11 and are arranged in a circumferential array of three. The upper end of each support tube 12 penetrates into the interior of the housing 2, and the lower end of each support tube 12 has a through-hole 1. 21. The support tube 12, while supporting the outer shell 2, allows the connecting wires between the two electrostatic induction components 6 on different shaft groups 4 to be led out from the wire holes 121 on the corresponding support tube 12. This reduces mutual interference between the signals of different connecting wires and restricts the path of the connecting wires by using the axis of the support tube 12. This prevents the connecting wires from bending irregularly inside the outer shell 2 due to their own weight, thus ensuring stable signal transmission inside the connecting wires and ensuring the detection accuracy of the electrostatic field in the environment. Two anti-interference components 5 are provided, each of which is located at both ends of the corresponding shaft group 4. Two electrostatic induction components 6 are provided, each located at both ends of the corresponding shaft group 4. Each electrostatic induction component 6 is located inside the corresponding anti-interference component 5.

[0028] As one embodiment of the present invention, refer to Figure 3 The shaft assembly 4 includes a bent section 41 and a straight section 42. The bent section 41 is disposed through the inner shell 3. There are two straight sections 42, which are respectively disposed at both ends of the bent section 41. The two straight sections 42 are coaxially disposed. The distance between each pair of the three bent sections 41 inside the inner shell 3 is equal.

[0029] Under the above-mentioned conditions, the connecting wires of the electrostatic induction components 6 used to connect the two ends of the same shaft group 4 are inserted inside the shaft group 4. The bent section 41 and the two straight sections 42 are all made of shielding material, which can achieve the blocking and shielding of the signal transmission of the connecting wire. At the same time, the distance limitation between the three bent sections 41 reduces the mutual interference of the transmission signals of the connecting wires inside different shaft groups 4. Furthermore, the bending radius of the bent section 41 is more than three times the radius of the connecting wire between the electrostatic transmission components at both ends of the shaft group 4. This can avoid interference between the transmission signals of different connecting wires, while the local effective linewidth of the connecting wire is increased due to the small bending radius. This avoids the impedance change of the connecting wire used for the connection between the two electrostatic induction components 6, which would affect the signal transmission quality and thus ensure the detection accuracy.

[0030] As one embodiment of the present invention, refer to Figure 5 and Figure 6 The straight section 42 includes section one 421, corrugated pipe 422, section two 423, mounting block 424, and elastic telescopic rod 425. One end of section one 421 is inserted into the corresponding bent section 41. Section one 421 and section two 423 are coaxially arranged and connected by corrugated pipe 422. Corrugated pipe 422 is a conductive rubber tube. Using conductive rubber tube can ensure signal shielding between section one 421 and section two 423 while achieving adjustable distance between them. This prevents the signal from escaping outward and causing mutual interference from the connecting wires used to connect the two electrostatic induction components 6 that pass through section one 421, corrugated pipe 422, and section two 423. Two mounting blocks 424 are provided and are respectively set on section one 421 and section two 423. The elastic telescopic rod 425 is set between the two mounting blocks 424.

[0031] Under the above-mentioned conditions, a detachable connection can be achieved between the curved section 41 and the two straight sections 42, so that the three shaft groups 4 respectively set along the X-axis, Y-axis and Z-axis can be installed inside the housing 2. At the same time, after installation, the elastic force of the elastic telescopic rod 425 can be used to squeeze the corresponding anti-interference component 5, so that the three shaft groups 4 can be stably installed while the anti-interference component 5 can be stably attached to the inner wall of the housing 2, thereby avoiding mutual interference between different electrostatic induction components 6 and ensuring detection accuracy.

[0032] As one embodiment of the present invention, refer to Figure 5 , Figure 7 and Figure 8 The anti-interference component 5 includes a shield 51 and a guide tube 52. The shield 51 is disposed on the second segment 423. The guide tube 52 is coaxial with the second segment 423 and passes through the outer shell 2. A partition 521 is disposed inside the guide tube 52 in the radial direction. The thickness of the partition 521 is less than the thickness of the guide tube 52. The shield 51 and the surface of the partition 521 are sealed and fitted together.

[0033] Under the above-mentioned conditions, the guide tube 52 is fixedly connected to the outer shell 2, and its end is on the same spherical surface as the outer wall of the outer shell 2. The guide tube 52 is a shielded tube, which allows the electric field induction signal in the environment to smoothly enter the interior of the guide tube 52 and pass through the partition 521 along the axis of the guide tube 52 to contact the corresponding electrostatic induction component 6. This enables the electrostatic induction component 6 to effectively detect the electric field induction signal in the environment. In the process of the electrostatic induction component 6 detecting the electric field induction signal, it can block the electric field induction signal entering the interior of the outer shell 2 from the guide tube 52, prevent the signals of the electrostatic induction components 6 at different positions from interfering with each other, thereby improving the detection accuracy.

[0034] As one embodiment of the present invention, refer to Figure 4 , Figure 5and Figure 7 The electrostatic induction component 6 includes a mounting frame 61, a near electrode plate 62, and a far electrode plate 63. The mounting frame 61 is detachably mounted on the second segment 423. The near electrode plate 62 and the far electrode plate 63 are both disposed between the second segment 423 and the mounting frame 61, and the near electrode plate 62 and the far electrode plate 63 are in contact with each other. The end of the mounting frame 61 is annular, and the end of the mounting frame 61 is in contact with the surface of the partition 521 and is coaxial with the partition 521.

[0035] Under the above-mentioned settings, with the end of the mounting bracket 61 in a ring shape, the near plate 62 and the far plate 63 in the electrostatic induction component 6 are coaxial with the end channel and guide tube 52, so that the electric field induction signal in the environment directly contacts the corresponding near plate 62 and far plate 63 after entering the inner shell 3, avoiding the dissipation process of the electrostatic field, thereby improving the detection accuracy.

[0036] As one embodiment of the present invention, refer to Figure 7 and Figure 8 The shielding component 51 includes an inner cover 511, a middle cover 512, and an outer cover 513. The inner cover 511, the middle cover 512, and the outer cover 513 are concentric and fixedly fitted onto section 2 423. The end faces of the inner cover 511, the middle cover 512, and the outer cover 513 are all sealed and fitted to the surface of the partition 521. The thickness of the inner cover 511, the middle cover 512, and the outer cover 513 increases progressively. The inner walls of the inner cover 511, the middle cover 512, and the outer cover 513 are circumferentially arrayed with multiple sets of anti-interference protrusions 53. Each set of anti-interference protrusions 53 is spirally arranged. The spiral direction of the anti-interference protrusions 53 on the inner wall of the middle cover 512 is opposite to that of the anti-interference protrusions 53 on the inner cover 511 and the outer cover 513.

[0037] Under the above-mentioned conditions, the inner cover 511, the middle cover 512, and the outer cover 513 can achieve three different levels of electrostatic field anti-escape effect. Furthermore, under the action of the anti-interference protrusions 53 on the inner walls of the inner cover 511, the propagation path of the electrostatic field after entering the inner cover 511 will be blocked by the anti-interference protrusions 53 at different positions, thereby changing the propagation path of the electric field induction signal. This causes the electric field induction signal that is dissipating to the outside of the outer cover 513 to be consumed during the dissipation process, thereby avoiding mutual interference between the signals of the electrostatic induction components 6 at both ends of different shaft groups 4, and further ensuring the detection accuracy.

[0038] Working principle: In use, the sensor and the accompanying detector are powered on. When an electric field exists in the environment, the electric field induced signal will propagate along the axial direction of different guide tubes 52 into the interior of the housing 2. Since the end of the mounting bracket 61 is annular and fits against the partition 521 inside the guide tube 52, the electric field induced signal will directly contact the corresponding near electrode 62 and far electrode 63 after passing through the partition 521, enabling the sensor to detect the electric field induced signal in the environment. During the detection process, the propagation path of the electric field induced signal will sequentially pass through the inner cover 511, the middle cover 512, and the outer cover 513. During propagation, the electric field induced signal will contact multiple anti-interference protrusions 53 set on the inner walls of the inner cover 511, the middle cover 512, and the outer cover 513, respectively, so that the inner cover 511, the middle cover 512, the outer cover 513, and the anti-interference protrusions 53 will act as anti-interference protrusions. By altering the propagation path, the electric field's propagation path becomes chaotic, thus consuming electric field energy. This allows the electrostatic induction components 6 located at different ends of the shaft group 4 to operate independently, preventing the electric field induction signal from affecting the detection results of other electrostatic induction components 6 after passing through the outer casing 513, effectively improving detection accuracy. Simultaneously, the connecting lines between the near-electrode plates 62 at both ends of the shaft group 4 along the X, Y, and Z axes are separated. When the sensor detects electric field induction signals in the environment, the distance between different connecting lines remains fixed, and the transmitted signals can operate independently. This allows the transmitted signals within the connecting lines to propagate along the axial direction of the corresponding shaft group 4, avoiding mutual interference between signals transmitted within different connecting lines. It also prevents excessive bending of the connecting lines after installation, which could lead to signal transmission loss, further improving detection accuracy.

[0039] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-precision vacuum microelectronic electric field sensor, comprising a support (1), a shell (2), and an inner shell (3), wherein the shell (2) is disposed on the support (1), and the inner shell (3) is disposed at the center inside the shell (2), characterized in that: It also includes a shaft assembly (4), an anti-interference component (5), and an electrostatic induction component (6). The shaft assembly (4) has three shafts that pass through the inner shell (3) along the X-axis, Y-axis, and Z-axis directions, respectively. There are two anti-interference components (5), each of which is located at both ends of the corresponding shaft assembly (4). There are two electrostatic induction components (6), each of which is located at both ends of the corresponding shaft assembly (4). Each electrostatic induction component (6) is located inside the corresponding anti-interference component (5).

2. The high-precision vacuum microelectronic electric field sensor according to claim 1, characterized in that: The shaft assembly (4) includes a bent section (41) and a straight section (42). The bent section (41) is arranged through the inner shell (3). There are two straight sections (42) respectively located at both ends of the bent section (41). The two straight sections (42) are coaxially arranged. The distance between each pair of the three bent sections (41) inside the inner shell (3) is equal.

3. The high-precision vacuum microelectronic electric field sensor according to claim 2, characterized in that: The straight section (42) includes section one (421), a corrugated pipe (422), section two (423), a mounting block (424), and an elastic telescopic rod (425). One end of section one (421) is inserted into the corresponding bent section (41). Section one (421) and section two (423) are coaxially arranged and connected through the corrugated pipe (422). The corrugated pipe (422) is a conductive rubber tube. There are two mounting blocks (424) and they are respectively arranged on section one (421) and section two (423). The elastic telescopic rod (425) is arranged between the two mounting blocks (424).

4. The high-precision vacuum microelectronic electric field sensor according to claim 3, characterized in that: The anti-interference component (5) includes a shield (51) and a guide tube (52). The shield (51) is disposed on the second segment (423). The guide tube (52) is coaxial with the second segment (423) and passes through the outer shell (2). A partition (521) is disposed inside the guide tube (52) in the radial direction. The thickness of the partition (521) is less than the thickness of the guide tube (52). The shield (51) and the surface of the partition (521) are sealed and fitted together.

5. A high-precision vacuum microelectronic electric field sensor according to claim 4, characterized in that: The electrostatic induction component (6) includes a mounting frame (61), a near electrode plate (62), and a far electrode plate (63). The mounting frame (61) is detachably mounted on the second segment (423). The near electrode plate (62) and the far electrode plate (63) are both located between the second segment (423) and the mounting frame (61), and the near electrode plate (62) and the far electrode plate (63) are in contact. The end of the mounting frame (61) is annular, and the end of the mounting frame (61) is in contact with the surface of the partition plate (521) and coaxial with the partition plate (521).

6. A high-precision vacuum microelectronic electric field sensor according to claim 4, characterized in that: The shielding component (51) includes an inner cover (511), a middle cover (512), and an outer cover (513). The inner cover (511), the middle cover (512), and the outer cover (513) are concentric and fixedly fitted on section two (423). The end faces of the inner cover (511), the middle cover (512), and the outer cover (513) are sealed and fitted to the surface of the partition (521). The thickness of the inner cover (511), the middle cover (512), and the outer cover (513) increases progressively.

7. A high-precision vacuum microelectronic electric field sensor according to claim 6, characterized in that: The inner wall of the inner cover (511), middle cover (512) and outer cover (513) is circumferentially arrayed with multiple sets of anti-interference protrusions (53). Each set of anti-interference protrusions (53) is spirally arranged. The anti-interference protrusions (53) on the inner wall of the middle cover (512) are spiraled in the opposite direction to the anti-interference protrusions (53) on the inner cover (511) and outer cover (513).

8. A high-precision vacuum microelectronic electric field sensor according to claim 1, characterized in that: The bracket (1) includes a base plate (11) and a support tube (12). The support tube (12) is arranged on the base plate (11) and there are three tubes in a circumferential array. The upper end of each support tube (12) extends into the interior of the outer shell (2), and the lower end of each support tube (12) has a wire hole (121) on its tube wall.

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