Super depth-of-field microscope and illumination method of super depth-of-field microscope

Abstract

The invention discloses a super-depth-of-field microscope and an illumination method. The super-depth-of-field microscope comprises an objective lens and an illumination device, the objective lens is provided with an imaging channel and a dark field light transmission channel; the lighting device comprises a light source, a spatial light modulator and a spectroscope, light emitted by the light source is emitted to the spatial light modulator, and the spatial light modulator is used for modulating the morphology of the light irradiated on the spatial light modulator into a first preset morphology or a second preset morphology; wherein the first preset morphology is different from the second preset morphology; the light with the first preset morphology passes through the spectroscope and then enters the imaging channel so as to form bright field illumination; and the light with the second preset morphology passes through the spectroscope and then enters the dark field light transmission channel to form dark field illumination. According to the scheme, the problem that the illumination device of the super-field-depth microscope is relatively high in control difficulty can be solved.

Description

Technical Field

[0001] This invention relates to the field of microscope illumination technology, and more particularly to a super depth-of-field microscope and a method for illuminating the super depth-of-field microscope. Background Technology

[0002] Super depth-of-field microscopes can magnify tiny objects to form clear stereoscopic images. They are widely used in industries such as automotive, petroleum, gas, medical equipment, semiconductors, batteries, and printing.

[0003] To adapt to various applications, ultra-depth-of-field microscopes offer multiple illumination modes. For example, they include bright-field and dark-field illumination modes. Bright-field illumination involves the light beam passing through the objective lens's imaging channel onto the surface of the object being observed, then reflecting or diffracting before returning to the objective lens's imaging channel to form an image. Dark-field illumination involves the light beam obliquely striking the surface of the object, then reflecting or diffracting before entering the objective lens's imaging channel to form an image. In bright-field mode, the ultra-depth-of-field microscope provides a bright and clear field of view, making it suitable for observing mirrored or similarly mirror-reflective objects; the dark-field mode offers high contour contrast, making it ideal for observing scattering objects.

[0004] In related technologies, ultra-depth-of-field microscopes are equipped with an illumination device, which includes multiple independently controlled light sources. By controlling the illumination of light sources at different positions and areas, it is possible to switch between bright field illumination mode and dark field illumination mode.

[0005] However, due to the large number of light sources in the lighting device, if each light source needs to be controlled independently, the control logic of the lighting device becomes cumbersome and complex, making the control of the lighting device of the ultra-depth-of-field microscope quite difficult. Summary of the Invention

[0006] This invention discloses a super depth-of-field microscope and a method for illuminating the super depth-of-field microscope, in order to solve the problem of the difficulty in controlling the illumination device of the super depth-of-field microscope.

[0007] To solve the above problems, the present invention adopts the following technical solution:

[0008] A super depth-of-field microscope, comprising:

[0009] Objective lens, wherein the objective lens has an imaging channel and a dark field light transmission channel;

[0010] An illumination device includes a light source, a spatial light modulator, and a beam splitter. Light emitted from the light source is directed toward the spatial light modulator, which modulates the shape of the light rays incident upon it to a first preset shape or a second preset shape; wherein the first preset shape and the second preset shape are different.

[0011] The light rays of the first preset shape pass through the beam splitter and enter the imaging channel to form bright field illumination; the light rays of the second preset shape pass through the beam splitter and enter the dark field light transmission channel to form dark field illumination.

[0012] An illumination method for a super depth-of-field microscope, the illumination method being applied to the aforementioned super depth-of-field microscope, the illumination method comprising:

[0013] Light morphology information is generated based on the illumination state of the ultra-depth-of-field microscope, and the light morphology information is input into the spatial light modulator;

[0014] The light emitted by the light source shines on the spatial light modulator, and the spatial light modulator adjusts the shape of the light shining on it according to the received light shape information.

[0015] The light modulated by the spatial light modulator passes through the beam splitter and enters the imaging channel or the dark field light transmission channel.

[0016] The technical solution adopted in this invention can achieve the following beneficial effects:

[0017] In the ultra-depth-of-field microscope disclosed in this invention, light emitted from a light source is directed towards a spatial light modulator. The spatial light modulator modulates the shape of the light rays incident upon it to either a first preset shape or a second preset shape, wherein the first and second preset shapes are different. Light rays with the first preset shape pass through a beam splitter and enter the imaging channel to form bright-field illumination; light rays with the second preset shape pass through a beam splitter and enter the dark-field illumination channel to form dark-field illumination. In this scheme, the shape of the light emitted from the light source is adjusted by the spatial light modulator. Light rays with different shapes have at least one difference in the position, size, and shape of the light spot, thus allowing light rays with different shapes to enter their corresponding illumination channels. Compared to ultra-depth-of-field microscopes in related technologies, the ultra-depth-of-field microscope disclosed in this application uses a spatial light modulator to modulate the light shape corresponding to different illumination modes, thereby enabling both bright-field and dark-field illumination with a single light source. Therefore, the ultra-depth-of-field microscope disclosed in this application does not require multiple independently controlled light sources, thereby simplifying the control logic of the light source of the illumination device and reducing the control difficulty of the illumination device of the ultra-depth-of-field microscope. Attached Figure Description

[0018] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this invention, illustrate exemplary embodiments of the invention and are used to explain the invention, but do not constitute an undue limitation of the invention. In the drawings:

[0019] Figure 1 This is a schematic diagram of the structure of the ultra-depth-of-field microscope disclosed in an embodiment of the present invention;

[0020] Figure 2 This is a schematic diagram of the spot morphology of the ultra-depth-of-field microscope disclosed in an embodiment of the present invention under bright-field incident illumination.

[0021] Figure 3 This is a schematic diagram of the objective lens optical path of the ultra-depth-of-field microscope disclosed in the embodiments of the present invention when it is under bright-field incident illumination.

[0022] Figure 4 This is a schematic diagram of the spot morphology of the ultra-depth-of-field microscope under bright-field sheet illumination as disclosed in an embodiment of the present invention;

[0023] Figure 5 This is a schematic diagram of the objective lens optical path of the ultra-depth-of-field microscope in bright-field sheet illumination mode, as disclosed in an embodiment of the present invention.

[0024] Figure 6 This is a schematic diagram of the spot morphology of the ultra-depth-of-field microscope disclosed in the embodiment of the present invention under dark-field incident illumination.

[0025] Figure 7 This is a schematic diagram of the objective lens optical path of the ultra-depth-of-field microscope disclosed in the embodiments of the present invention when it is under dark field incident illumination.

[0026] Figure 8 This is a schematic diagram of the spot morphology of the ultra-depth-of-field microscope under dark-field sheet illumination as disclosed in an embodiment of the present invention;

[0027] Figure 9 This is a schematic diagram of the objective lens optical path of the ultra-depth-of-field microscope in dark-field sheet illumination mode, as disclosed in an embodiment of the present invention.

[0028] Figures 10 to 12 This is a schematic diagram of the optical path of the ultra-depth-of-field microscope in sheet illumination mode as disclosed in an embodiment of the present invention;

[0029] Figure 13 This is a flowchart of the illumination method for a super depth-of-field microscope disclosed in an embodiment of the present invention.

[0030] Explanation of reference numerals in the attached figures:

[0031] 100-Objective lens, 101-Imaging channel, 102-Dark field light transmission channel, 110-Objective lens body, 120-Light shielding tube, 130-Annular reflector, 200-Illumination device, 210-Light source, 220-Spatial light modulator, 221-First preset morphology, 221a-Circular structure, 221b-First arc-shaped structure, 222-Second preset morphology, 222a-Annular structure, 222b-Second arc-shaped structure, 230-Beam splitter, 240-First condenser lens group, 250-Second condenser lens group, 300-Imaging device, 400-Sample stage, 500-Sample to be tested. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0033] The technical solutions disclosed in the various embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0034] like Figures 1 to 12 As shown, an embodiment of the present invention discloses a super depth-of-field microscope, which includes an objective lens 100 and an illumination device 200.

[0035] Objective lens 100 has an imaging channel 101 and a dark-field light transmission channel 102. Imaging channel 101 is used for imaging. Specifically, light reflected or diffracted by the sample 500 is emitted through imaging channel 101, thus achieving imaging. Imaging channel 101 is also used to transmit bright-field illumination light. In bright-field illumination mode, bright-field illumination light passes through imaging channel 101 and is then directed towards the sample 500, and after reflection or diffraction by the surface of the sample 500, it returns to imaging channel 101 for imaging. Dark-field light transmission channel 102 is used to transmit dark-field illumination light. In dark-field illumination mode, light is emitted at a large angle towards the sample 500, therefore dark-field illumination light cannot pass through imaging channel 101. Specifically, dark-field illumination light passes through dark-field light transmission channel 102 and is directed towards the sample 500, and after reflection or diffraction by the surface of the sample 500, it enters imaging channel 101 for imaging.

[0036] The lighting device 200 includes a light source 210, a spatial light modulator 220, and a beam splitter 230. Light emitted from the light source 210 is directed towards the spatial light modulator 220, which modulates the shape of the light rays incident upon it into either a first preset shape 221 or a second preset shape 222. The first preset shape 221 and the second preset shape 222 are different. Here, the shape of the light rays refers to the external structure of the light spot formed on the spatial light modulator 220. Specifically, it can refer to parameters such as the shape, size, and position of the light spot. The light spot can be understood as a luminous surface or luminous area formed on the spatial light modulator 220. Different shapes of the light spot can be due to differences in the area, position, or shape of the luminous surface or luminous area. Therefore, at least one of the shape, size, and position of the first preset shape 221 and the second preset shape 222 is different.

[0037] Light rays from the first preset shape 221 pass through the beam splitter 230 and enter the imaging channel 101 to form bright-field illumination; light rays from the second preset shape 222 pass through the beam splitter 230 and enter the dark-field light transmission channel 102 to form dark-field illumination. Since the light rays from the first preset shape 221 and the second preset shape 222 formed by the spatial light modulator 220 have at least one different luminous area, position, or shape, their transmission position, illumination area, and incident direction are also different, thus allowing them to enter different channels according to their different shapes.

[0038] In the specific operation of the super depth-of-field microscope, when the microscope is in bright field illumination mode, the light emitted by the light source 210 illuminates the spatial light modulator 220. The spatial light modulator 220 modulates the shape of the light according to the illumination requirements, thereby modulating it into a light spot or emitting surface with a first preset shape 221. The light emitted from the light spot or emitting surface with the first preset shape 221 passes through the beam splitter 230 and enters the imaging channel 101. After passing through the imaging channel 101, it is projected onto the sample to be tested 500 on the sample stage 400. After being reflected by the sample to be tested 500, it returns to the imaging channel 101 and then enters the imaging device 300 of the super depth-of-field microscope, thereby acquiring the shape of the sample to be tested 500.

[0039] When the ultra-depth-of-field microscope is in dark field illumination mode, the spatial light modulator 220 modulates the shape of the light according to the illumination requirements, thereby modulating it into a light spot or emitting surface of the second preset shape 222. The light emitted from the light spot or emitting surface of the second preset shape 222 passes through the beam splitter 230 and enters the dark field light transmission channel 102. After passing through the dark field light transmission channel 102, it is projected onto the sample to be tested 500 on the sample stage 400. After being reflected or diffracted by the sample to be tested 500, it enters the imaging channel 101 and then enters the imaging device 300 of the ultra-depth-of-field microscope, thereby acquiring the shape of the sample to be tested 500.

[0040] In the embodiments disclosed in this application, the morphology of the light emitted by the light source 210 is adjusted by the spatial light modulator 220. Light with different morphologies has at least one difference in the position, size, and shape of its light spot, thus allowing light with different morphologies to enter the corresponding illumination channel. Compared to ultra-depth-of-field microscopes in related technologies, the ultra-depth-of-field microscope disclosed in this application uses the spatial light modulator 220 to modulate the light morphology corresponding to different illumination modes, thereby enabling bright-field and dark-field illumination with a single light source 210. Therefore, the ultra-depth-of-field microscope disclosed in this application does not require multiple independently controlled light sources, simplifying the control logic of the light source 210 in the illumination device 200 and reducing the control difficulty of the illumination device 200 in the ultra-depth-of-field microscope.

[0041] Furthermore, compared to other ultra-depth-of-field microscopes in the related art, the ultra-depth-of-field microscope disclosed in this application has fewer light sources 210, thus reducing energy consumption. Additionally, this application can achieve multiple different illumination modes using a single light source 210, resulting in a simpler structure. The smaller number of light sources 210 also reduces the installation space required for each light source.

[0042] Furthermore, the large number of light sources in related technologies indicates a higher failure rate for their lighting devices. In contrast, the lighting device 200 in this application can use a single light source 210 for illumination. The control and connection of a single light source 210 are simple, resulting in a lower failure rate. Therefore, the failure rate of the lighting device 200 in this application is lower than that of lighting devices in related technologies.

[0043] The super depth-of-field microscope disclosed in this application also has better illumination and imaging effects. In specific applications, the entrance pupil size of the imaging channel 101 of the low-power objective is usually larger than that of the high-power objective. To avoid wasting light energy or allowing bright-field illumination light to enter the dark-field light transmission channel 102, the entrance pupil size of the high-power objective is usually used as the design benchmark. In this case, the size of the illumination spot received by the high-power and low-power objectives is the same. However, because the spot size of the low-power objective is too small, the entrance pupil and aperture cannot be completely filled, thereby reducing the illumination exit angle and imaging effect. The super depth-of-field microscope disclosed in this application can dynamically adjust the size of the spot through the spatial light modulator 220, so that it can perfectly match the entrance pupil size of different objectives 100, thereby achieving better illumination and imaging effects.

[0044] Optionally, the spatial light modulator 220 can be a DMD (Digital Micro-mirror Device), a liquid crystal spatial light modulator, or other types of spatial light modulator. The specific structure and principle of the spatial light modulator 220 are well-known technologies and are not limited herein.

[0045] In one specific embodiment, the spatial light modulator 220 can be a liquid crystal spatial light modulator. In this case, by controlling the liquid crystal with direct current, different pixel arrays are formed, and when light from the light source 210 shines onto the spatial light modulator 220, a light spot of corresponding shape can be formed. Of course, different types of spatial light modulators have different shape modulation principles. This article only lists one specific type and is not intended to limit the specific type of the spatial light modulator 220.

[0046] To further improve the illumination performance of the ultra-depth-of-field microscope, in another optional embodiment, the illumination device 200 may also include a first condenser lens group 240. The first condenser lens group 240 can be located between the beam splitter 230 and the spatial light modulator 220. Light emitted from the spatial light modulator 220 passes through the first condenser lens group 240 and then enters the beam splitter 230. In this embodiment, the first condenser lens group 240 has a focusing effect on the light emitted from the spatial light modulator 220, thereby allowing more light to enter the imaging channel 101 or the dark-field light transmission channel 102, thus further improving the light utilization rate and further enhancing the illumination performance of the ultra-depth-of-field microscope.

[0047] In the above embodiment, the beam splitter 230 can split light. The light passing through the beam splitter 230 can be split into transmitted light and reflected light. That is, part of the light is transmitted through the beam splitter 230, and the other part of the light is reflected by the beam splitter 230.

[0048] In one embodiment, the beam splitter 230 can be located between the objective lens 100 and the first condenser lens group 240, with the objective lens 100 and the first condenser lens group 240 positioned on opposite sides of the beam splitter 230. Light emitted from the spatial light modulator 220 can pass through the beam splitter 230 and enter the imaging channel 101 or the dark-field light transmission channel 102. Light reflected or diffracted by the sample 500 passes through the imaging channel 101 and then strikes the beam splitter 230, where it is reflected and enters the imaging device 300.

[0049] In another alternative embodiment, the beam splitter 230 may be located between the imaging device 300 and the objective lens 100, and the light emitted by the spatial light modulator 220 enters the imaging channel 101 or the dark field light transmission channel 102 after being reflected by the beam splitter 230.

[0050] In the specific operation process, the light from the first preset morphology 221 is reflected by the beam splitter 230 to form a first reflected light. The first reflected light is directed towards the sample 500 to be tested via the imaging channel 101, and then reflected by the sample 500 to form a second reflected light. The second reflected light passes through the imaging channel 101 and is directed towards the beam splitter 230. After passing through the beam splitter 230, the second reflected light is directed towards the imaging device 300. The light from the second preset morphology 222 is reflected by the beam splitter 230 to form a third reflected light. The third reflected light passes through the dark field light transmission channel 102 and is directed towards the sample 500 to be tested. After being reflected by the sample 500, it forms a fourth reflected light. The fourth reflected light passes through the imaging channel 101 and is directed towards the beam splitter 230. After passing through the beam splitter 230, the fourth reflected light is directed towards the imaging device 300.

[0051] In this scheme, the illumination light generated by the spatial light modulator 220 is reflected by the beam splitter 230, while the imaging light can be transmitted through the beam splitter 230. Therefore, the spatial light modulator 220 is not in the imaging light path, thereby avoiding the influence of the spatial light modulator 220 on the imaging light path and thus improving the imaging performance of the ultra-depth-of-field microscope.

[0052] Furthermore, the image plane formed by the spatial light modulator 220 through the first condenser lens group 240 coincides with the back focal plane of the objective lens 100. At this point, the spatial light modulator 220 is imaged onto the back focal plane of the objective lens 100 through the first condenser lens group 240, causing the light rays in the field of view to exit in parallel form after passing through the objective lens 100. This results in a uniform illumination field at the sample 500 without any image of the light source. In this scheme, the first condenser lens group 240 is used to transmit the light spot generated by the spatial light modulator 220 to the entrance pupil of the objective lens 100 after reflection by the beam splitter 230. This, together with the objective lens 100, forms a Kohler illumination system, ensuring that the light generated by the spatial light modulator 220 exits parallel at its image plane. Therefore, the image of the light source formed by the spatial light modulator 220 will not appear in the illumination field, thus further improving the illumination and imaging performance of the ultra-depth-of-field microscope.

[0053] Optionally, the first condenser lens group 240 may be a combination of multiple lenses, or the first condenser lens group 240 may include only one lens. The specific structure of the first condenser lens group 240 is not limited herein.

[0054] In another optional embodiment, the illumination device 200 may further include a second condenser lens group 250, which may be located between the light source 210 and the spatial light modulator 220. Light emitted from the light source 210 can pass through the second condenser lens group 250 and then enter the spatial light modulator 220. In this configuration, the second condenser lens group 250 has a focusing effect on the light emitted from the light source 210, thereby allowing more light to enter the spatial light modulator 220, thus further improving the light utilization rate and further enhancing the illumination performance of the ultra-depth-of-field microscope.

[0055] Optionally, the second condenser lens group 250 can be a combination of multiple lenses, or the second condenser lens group 250 can include only one lens. The specific structure of the second condenser lens group 250 is not limited herein.

[0056] In another alternative embodiment, the dark-field illumination channel 102 can be a ring structure, and the dark-field illumination channel 102 can be arranged around the imaging channel 101. In this scheme, the dark-field illumination channel 102 is a ring structure, and the ring structure of the dark-field illumination channel 102 can be arranged around the sample 500 to be tested, thus enabling the dark-field light to be uniformly illuminated around the circumference of the sample 500 to achieve dark-field epi-illumination. In addition, dark-field light can also enter from a local area of ​​the dark-field illumination channel 102, thereby forming dark-field sheet illumination at different positions. Therefore, the ring structure of the dark-field illumination channel 102 can achieve both dark-field epi-illumination and dark-field sheet illumination, thereby further increasing the illumination modes and thus expanding the application scenarios of ultra-depth-of-field microscopes.

[0057] In one optional embodiment, the second preset shape 222 may include a ring structure 222a and a second arc-shaped structure 222b, where the second arc-shaped structure 222b may be a local area of ​​the ring structure 222a. When the lighting device 200 is in a dark field incident illumination state, the shape of the light modulated by the spatial light modulator 220 is the ring structure 222a, and the light spot of the ring structure 222a matches the annular dark field light transmission channel 102; when the bright field lighting device 200 is in a dark field sheet illumination state, the shape of the light modulated by the spatial light modulator 220 is the second arc-shaped structure 222b, and the light spot of the second arc-shaped structure 222b matches the local arc-shaped area of ​​the annular dark field light transmission channel 102.

[0058] like Figure 6 As shown, the spatial light modulator 220 modulates the light emitted by the light source 210 into a ring-shaped spot, and the size of the spot should change with the entrance size of the dark field light passage 102 of different objectives 100. For example... Figure 7As shown, the ring-shaped light spot generated by the spatial light modulator 220 is transmitted to the dark field channel position via the beam splitter 230 and illuminates the sample 500 to be tested at a large angle. If the sample exhibits scattering or diffraction, weaker scattered or diffracted light will enter the imaging channel 101 and eventually be captured by the imaging device 300.

[0059] like Figure 8 As shown, the spatial light modulator 220 modulates the light emitted by the light source 210 into an off-axis semi-circular or fan-shaped light spot, and the light spot corresponds to the effective entrance range of the dark field light passage 102. For example... Figure 9 As shown, the light emitted by the off-axis semi-circular or fan-shaped light spot enters a local area of ​​the dark field light channel 102 and illuminates the sample 500 to be tested at a large angle, thereby realizing the function required for dark field film projection.

[0060] This solution can further improve the shadow rendering and depth compositing capabilities of the 500 samples to be tested.

[0061] In another optional embodiment, the first preset shape 221 may include a circular structure 221a and a first arc-shaped structure 221b; here, the first arc-shaped structure 221b may be a local area of ​​the circular structure 221a. When the illumination device 200 is in bright-field incident illumination mode, the shape of the light modulated by the spatial light modulator 220 may be the circular structure 221a, and the light spot of this circular structure matches the imaging channel 101. At this time, the light spot modulated by the spatial light modulator 220 is a circular light spot, which can also be understood as a circular light-emitting surface. When the bright-field illumination device 200 is in bright-field sheet illumination mode, the shape of the light modulated by the spatial light modulator 220 may be the first arc-shaped structure 221b. The light spot of this first arc-shaped structure 221b matches a local arc-shaped area of ​​the imaging channel 101.

[0062] like Figure 2 As shown, the spatial light modulator 220 modulates the light emitted by the light source 210 into a circular spot, and the size of the circular spot changes with the entrance pupil size of different objective lenses 100. Figure 3 As shown, the circular light spot generated by the spatial light modulator 220 is incident on the imaging channel 101 after passing through the beam splitter 230. At this time, the light rays converge parallel onto the sample 500 to be tested, thereby forming a uniform illumination field and achieving bright-field incident illumination. In this illumination mode, the sample 500 to be tested will be bright and shadow-free.

[0063] like Figure 4 As shown, the spatial light modulator 220 generates an off-axis, asymmetric semi-circular or fan-shaped light spot, and the light spot corresponds to the effective entrance pupil range of the objective lens 100. Figure 5As shown, the light generated by the spatial light modulator 220 will illuminate the sample 500 to be tested at an oblique angle, thereby achieving the function required for bright-field sheet illumination.

[0064] In this scheme, by adjusting the shape of the output light spot, the angle at which the sample 500 is illuminated can be further adjusted, thereby realizing the function of custom shadow rendering and depth synthesis of the shape of the sample 500.

[0065] Of course, the light spot generated by the spatial light modulator 220 is not limited to the few morphologies disclosed in this paper, but can also be other morphologies, which are not limited in this paper.

[0066] In another optional embodiment, under bright-field sheet illumination, the first arc-shaped structure 221b can have multiple height positions. At these different height positions, the first arc-shaped structure 221b can form multiple different bright-field illumination angles. This can be understood as, without changing the size and shape of the first arc-shaped structure, adjusting its height position on the spatial light modulator allows for obtaining different illumination angles. The height position can be understood as the distance between the first arc-shaped structure 221b and the central axis of the spatial light modulator; the farther the first arc-shaped structure 221b is from the central axis of the spatial light modulator, the higher its height position. Figures 10 to 12 As shown, Figures 10 to 12 The first arc-shaped structure 221b in the middle has the same shape. Figures 10 to 12 The first arc-shaped structure 221b gradually moves away from the central axis of the spatial light modulator, thus increasing the height of the off-axis light spot output by the spatial light modulator 220. Multiple bright-field illumination angles can be formed at different height positions through the first arc-shaped structure 221b, thereby allowing the sample 500 to obtain different shadow images.

[0067] Similarly, in the case of dark-field sheet illumination, the second arc-shaped structure 222b can have multiple height positions, and the second arc-shaped structure 222b can form multiple different dark-field illumination angles at multiple different height positions. For example... Figures 10 to 12 As shown, Figures 10 to 12 The second arc-shaped structure 222b in the middle has the same shape. Figures 10 to 12 The second arc-shaped structure 222b gradually moves away from the central axis of the spatial light modulator, thus increasing the height of the off-axis light spot output by the spatial light modulator 220. Multiple different dark field illumination angles can be formed at various height positions through the second arc-shaped structure 222b, thereby allowing the sample 500 to obtain different shadow images.

[0068] In the above scheme, the spatial light modulator 220 can generate a spatial amplitude light field of arbitrary form. Therefore, by adjusting the shape of its output light spot, the angle at which the sample is illuminated can be further adjusted, realizing the shadow rendering and depth synthesis functions customized according to the shape of the sample 500 to be tested. For example, in sheet-firing mode, adjusting the height of the off-axis light spot output by the spatial light modulator 220 can adjust the illumination angle of the output illumination light, thereby adjusting the shadow range of the sample 500 to be tested. Furthermore, by statistically analyzing the change in shadow with the height of the light spot shape, the depth information of the sample can be calculated using relevant algorithms.

[0069] In another alternative embodiment, the objective lens 100 may include an objective lens body 110 and a light-shielding tube 120. The objective lens body 110 may have an imaging channel 101, and the light-shielding tube 120 may be disposed around the objective lens body 110. A dark-field light transmission channel 102 can be formed between the light-shielding tube 120 and the objective lens body 110. In this solution, the dark-field light transmission channel 102 can be formed by fitting a light-shielding tube 120 on the outside of the objective lens body 110, thus facilitating the formation of the dark-field light transmission channel 102 and making the structure of the objective lens 100 simpler.

[0070] Furthermore, the objective lens 100 may also include a ring reflector 130, which may be located within the dark field light transmission channel 102 and may be arranged around the objective lens body 110. The ring reflector 130 is used to reflect the light incident into the dark field light transmission channel 102 to the location of the sample 500 to be tested. In this design, the ring reflector 130 enables more dark field light to illuminate the sample 500 to be tested, thereby improving the dark field illumination effect.

[0071] In an alternative embodiment, the spatial light modulator 220 can be a pure amplitude spatial light modulator 220. The pure amplitude spatial light modulator 220 has a better modulation effect on the shape of light, thereby further improving the illumination performance of the ultra-depth-of-field microscope.

[0072] Based on the ultra-depth-of-field microscope disclosed in the embodiments of this application, this application discloses an illumination method for the ultra-depth-of-field microscope. The disclosed ultra-depth-of-field microscope uses this illumination method for illumination, such as... Figure 13 As shown, the disclosed lighting method includes:

[0073] S100: Generate light morphology information based on the illumination state of the ultra-depth-of-field microscope, and input the light morphology information into the spatial light modulator 220.

[0074] In this step, the parameters of the objective lens 100 of the super depth-of-field microscope need to be confirmed, specifically the entrance dimensions of the imaging channel 101 and the dark-field light transmission channel 102 of the objective lens 100. Then, the illumination mode of the super depth-of-field microscope needs to be confirmed, and ray morphology information is generated based on the illumination mode and the parameters of the objective lens 100. This ray morphology information can specifically include the size, position, and shape information of the generated light spot. In one specific embodiment, a ray morphology map can be generated on a computer or in a pre-loaded program based on the ray morphology information, and the ray morphology map can be directly input into the spatial light modulator 220.

[0075] S200, the light emitted by the light source 210 shines on the spatial light modulator 220, and the spatial light modulator 220 adjusts the shape of the light shining on it according to the received light shape information.

[0076] The imaging device 300 in the above embodiments may include an imaging device and a zoom device. The imaging device is used to capture an image, while the zoom device is used to adjust the focal length and image distance. The zoom device is located on opposite sides of the imaging device and the beam splitter 230.

[0077] In this step, the spatial light modulator 220 modulates the shape of the light rays based on the input light morphology information. In one specific embodiment, the spatial light modulator 220 modulates the light morphology with the light morphology... Figure 1 To.

[0078] S300, the light modulated by the spatial light modulator 220 passes through the beam splitter 230 and enters the imaging channel 101 or the dark field light transmission channel 102.

[0079] In the embodiments disclosed in this application, the shape of the light emitted by the light source 210 is adjusted by the spatial light modulator 220. Light with different shapes has at least one difference in the position, size, and shape of the light spot, so light with different shapes can enter the corresponding illumination channel. By modulating the light shape corresponding to different illumination modes by the spatial light modulator 220, bright field illumination and dark field illumination can be achieved with a single light source 210.

[0080] The above embodiments of the present invention focus on describing the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be described in detail here.

[0081] The above description is merely an embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principle of the present invention should be included within the scope of the claims of the present invention.

Claims

1. A super depth-of-field microscope, characterized in that, include: Objective lens (100), said objective lens (100) having an imaging channel (101) and a dark field light transmission channel (102); An illumination device (200) includes a light source (210), a spatial light modulator (220), and a beam splitter (230). Light emitted from the light source (210) is directed toward the spatial light modulator (220), which modulates the shape of the light incident on it to a first preset shape (221) or a second preset shape (222). The first preset shape (221) and the second preset shape (222) are different. The light from the first preset shape (221) passes through the beam splitter (230) and enters the imaging channel (101) to form bright field illumination; the light from the second preset shape (222) passes through the beam splitter (230) and enters the dark field light transmission channel (102) to form dark field illumination.

2. The ultra-depth-of-field microscope according to claim 1, characterized in that, The dark field light transmission channel (102) has a ring structure and is arranged around the imaging channel (101).

3. The ultra-depth-of-field microscope according to claim 2, characterized in that, The lighting device (200) has a bright field incident lighting state, a bright field patch lighting state, a dark field incident lighting state, and a dark field patch lighting state; The first preset shape (221) includes a circular structure (221a) and a first arc-shaped structure (221b); when the lighting device (200) is in the bright field incident illumination state, the shape of the light modulated by the spatial light modulator (220) is the circular structure (221a); ​​when the lighting device (200) is in the bright field scattering illumination state, the shape of the light modulated by the spatial light modulator (220) is the first arc-shaped structure (221b). The second preset morphology (222) includes a ring structure (222a) and a second arc structure (222b). When the lighting device (200) is in a dark field incident illumination state, the morphology of the light modulated by the spatial light modulator (220) is the ring structure (222a); when the lighting device (200) is in the dark field incident illumination state, the morphology of the light modulated by the spatial light modulator (220) is the second arc structure (222b).

4. The ultra-depth-of-field microscope according to claim 3, characterized in that, In the bright field sheet illumination state, the first arc-shaped structure (221b) has multiple height positions, and the first arc-shaped structure (221b) can form multiple different bright field illumination angles at multiple different height positions; In the dark field sheet illumination state, the second arc-shaped structure (222b) has multiple height positions, and the second arc-shaped structure (222b) can form multiple different dark field illumination angles at multiple different height positions.

5. The ultra-depth-of-field microscope according to claim 1, characterized in that, The lighting device (200) further includes a first condenser lens group (240), which is located between the beam splitter (230) and the spatial light modulator (220). The light emitted by the spatial light modulator (220) passes through the first condenser lens group (240) and then enters the beam splitter (230).

6. The ultra-depth-of-field microscope according to claim 5, characterized in that, The image plane formed by the spatial light modulator (220) through the first condenser lens group (240) coincides with the back focal plane of the objective lens (100).

7. The ultra-depth-of-field microscope according to claim 5 or 6, characterized in that, The ultra-depth-of-field microscope also includes an imaging device (300), a beam splitter (230) located between the imaging device (300) and the objective lens (100), and light emitted by the spatial light modulator (220) enters the imaging channel (101) or the dark field light transmission channel (102) after being reflected by the beam splitter (230).

8. The ultra-depth-of-field microscope according to claim 1, characterized in that, The lighting device (200) further includes a second condenser lens group (250), which is located between the light source (210) and the spatial light modulator (220). The light emitted by the light source (210) passes through the second condenser lens group (250) and then enters the spatial light modulator (220).

9. The ultra-depth-of-field microscope according to claim 2, characterized in that, The objective lens (100) includes an objective lens body (110) and a light-shielding tube (120). The objective lens body (110) has the imaging channel (101). The light-shielding tube (120) is arranged around the objective lens body (110), and the dark field light transmission channel (102) is formed between the light-shielding tube (120) and the objective lens body (110).

10. The ultra-depth-of-field microscope according to claim 9, characterized in that, The objective lens (100) also includes an annular reflector (130), which is located within the dark field light transmission channel (102) and surrounds the objective lens body (110). The annular reflector (130) is used to reflect the light entering the dark field light transmission channel (102) to the location of the sample to be tested (500).

11. The ultra-depth-of-field microscope according to claim 1, characterized in that, The spatial light modulator (220) is a pure amplitude spatial light modulator.

12. An illumination method for a super depth-of-field microscope, characterized in that, The illumination method is applied to the ultra-depth-of-field microscope according to any one of claims 1 to 11, and the illumination method comprises: Light morphology information is generated based on the illumination state of the ultra-depth-of-field microscope, and the light morphology information is input into the spatial light modulator (220); The light emitted by the light source (210) illuminates the spatial light modulator (220), and the spatial light modulator (220) adjusts the shape of the light illuminating it according to the received light shape information. The light modulated by the spatial light modulator (220) passes through the beam splitter (230) and enters the imaging channel (101) or the dark field light transmission channel (102).

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