Quality feedback production scheduling system

By designing a production scheduling system with quality feedback, the problem of the lack of correlation between production scheduling and quality feedback in semiconductor manufacturing was solved. This enabled automated capacity allocation and equipment early warning, improved production quality and factory adaptability, and reduced maintenance costs.

CN120930982APending Publication Date: 2025-11-11HITECH SEMICON WUXI
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Patent Information

Application Number
CN202510940069.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-07-09
Publication Date
2025-11-11

AI Technical Summary

Technical Problem

The lack of a direct link between production scheduling and quality feedback in semiconductor manufacturing companies has led to the continued operation of equipment with hidden problems, which are often misdiagnosed as product defects and require rework, making it impossible to identify the root cause.

Method used

Design a production scheduling system with quality feedback, including an input module, a calculation module, an allocation module, a quality analysis module, an early warning module, and a dynamic adjustment module. Through modular design and dynamic optimization mechanism, the system can automatically allocate production capacity, monitor equipment quality in real time and trigger early warnings, and dynamically adjust the production plan.

Benefits of technology

It has enabled automated capacity allocation, improved production quality, reduced rework, lowered maintenance costs, and enhanced factory adaptability and production efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention provides a production scheduling system with quality feedback, and the system comprises an input module which is used for receiving a product type and a target completion date corresponding to the product type; the calculation module is used for calculating the actual production time of each product according to the target completion date; the distribution module is used for carrying out initial capacity distribution based on the equipment quantity demand and the actual production time; the quality analysis module is used for counting quality data in the production process and generating an equipment quality index; the early warning module triggers equipment state early warning according to the equipment quality index; and the dynamic adjustment module adjusts the capacity distribution strategy according to the output result of the early warning module. According to the invention, manual production plan arrangement is reduced, and productivity distribution can be automatically carried out only by inputting a production target; the production quality is improved, early warning is carried out on procedures and equipment with hidden dangers, and maintenance is carried out in advance; and when the equipment has product adaptation difference, targeted production scheduling is carried out, the factory adaptability is improved, and the maintenance cost is reduced.
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Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing, and in particular to the field of production management technology, specifically a production scheduling system for quality feedback. Background Technology

[0002] Currently, semiconductor manufacturing companies often lack a direct link between production monitoring and production planning. They simply arrange production based on indicators such as production line availability and production targets, without a connection between production scheduling and quality feedback.

[0003] When production scheduling lacks interaction with quality feedback, if a hidden problem or potential quality issue arises in a particular process or on a particular piece of equipment, rework is often required only after acceptance testing, QRAGATE, and triggering an alarm mechanism. Furthermore, this mechanism is easily misinterpreted as a product defect, failing to fully identify the root cause, leading to the continued operation of faulty processes and equipment. Summary of the Invention

[0004] In view of the shortcomings of the prior art described above, the purpose of this invention is to provide a production scheduling system with quality feedback to solve the difficulties of the prior art.

[0005] To achieve the above and other related objectives, the present invention provides a production scheduling system for quality feedback, comprising:

[0006] The input module is used to receive the product type and its corresponding target completion date;

[0007] The calculation module calculates the actual production time for each product based on the target completion date;

[0008] The allocation module performs initial capacity allocation based on the equipment quantity requirement and the actual production time.

[0009] The quality analysis module is used to collect quality data during the production process and generate equipment quality indices.

[0010] The early warning module triggers equipment status early warnings based on the equipment quality index;

[0011] The dynamic adjustment module adjusts the capacity allocation strategy based on the output results of the early warning module.

[0012] According to the preferred scheme, the calculation module calculates the required number of equipment using the formula Equip_N = Tx / TATx, where Tx is the actual production time of the product and TATx is the production time during the mass production verification stage.

[0013] Based on the preferred scheme, product types (e.g., A, B, C, etc.), and the target completion date for each product, calculate the actual time available for production: Ta, Tb, Tc.

[0014] According to the preferred scheme, the quality analysis module includes:

[0015] The data acquisition unit, wherein the data acquisition sheet is used to acquire process parameters and equipment operating parameters;

[0016] The statistical unit analyzes product adaptability and potential quality issues based on statistical methods.

[0017] An index generation unit quantifies the analysis results into an equipment quality index.

[0018] According to the preferred scheme, the early warning module is configured as follows:

[0019] a) When a quality incident is detected, stop the production capacity allocation of the corresponding equipment;

[0020] b) When potential quality issues are discovered, a maintenance warning signal will be sent to the equipment maintenance department;

[0021] c) When there are differences in product adaptability, a second production scheduling instruction is triggered.

[0022] According to the preferred scheme, the secondary production scheduling instruction includes a production allocation adjustment strategy, specifically by reducing the production proportion of unsuitable products while increasing the capacity weight of suitable products.

[0023] According to the preferred scheme, the dynamic adjustment module includes:

[0024] a) Instruction generation unit, which generates adjustment instructions based on equipment quality index;

[0025] b) Production scheduling optimization unit, which uses dynamic programming algorithm to reallocate equipment resources.

[0026] A computer-readable storage medium storing a computer program that, when executed by a processor, implements the operating logic of the production scheduling device according to any one of claims 1-6.

[0027] The present invention has the following beneficial effects:

[0028] 1. Reduce manpower for production planning; simply input production targets to automatically allocate production capacity.

[0029] 2. Improve production quality by providing early warnings for processes and equipment with potential hazards and carrying out maintenance in advance;

[0030] 3. When equipment exhibits differences in adaptability to different products, such as producing product A well but product B poorly, targeted production scheduling can be implemented to improve factory adaptability and reduce maintenance costs.

[0031] The preferred embodiments of the invention will be described in more detail below with reference to the accompanying drawings, so as to facilitate an understanding of the features and advantages of the invention. Attached Figure Description

[0032] Figure 1 The diagram shown is a structural schematic of the present invention. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. The same reference numerals in the drawings represent the same components. It should be noted that the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0034] Compared to the embodiments shown in the accompanying drawings, feasible embodiments within the scope of protection of this invention may have fewer components, other components not shown in the drawings, different components, components arranged differently, or components with different connections, etc. Furthermore, two or more components in the drawings may be implemented in a single component, or a single component shown in the drawings may be implemented as multiple separate components.

[0035] Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms “first,” “second,” and similar terms used in this patent application specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, “an” or “a” and similar terms do not necessarily indicate a quantity limitation. Terms such as “comprising” or “including” mean that the element or object preceding the word encompasses the element or object listed following the word and its equivalents, without excluding other elements or objects. Terms such as “connected” or “linked” are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as “upper,” “lower,” “left,” and “right” are used only to indicate relative positional relationships; these relative positional relationships may change accordingly when the absolute position of the described object changes.

[0036] This invention proposes a quality feedback scheduling system for use in semiconductor manufacturing processes. This invention does not limit the type of products produced, but this quality feedback scheduling system is particularly suitable for memory modules.

[0037] Overall, the quality feedback scheduling system proposed in this invention mainly includes an input module, a calculation module, an allocation module, a quality analysis module, an early warning module, and a dynamic adjustment module. See also... Figure 1 It shows the arrangement of the input module, calculation module, allocation module, quality analysis module, early warning module and dynamic adjustment module.

[0038] To achieve rapid feedback on production quality and address the shortcomings of existing technologies that rely on production line idle status and production targets, the current approach lacks a clear link between production scheduling and quality feedback. Without this interaction, if hidden problems or potential quality issues arise in a particular process or on a specific piece of equipment, rework is often required only after acceptance testing, QRAGATE, and triggering an alarm mechanism. Furthermore, this mechanism is prone to misinterpretation as product defects, failing to fully identify the root cause and leading to continued operation of faulty processes and equipment. Therefore, the technical solution provided in this embodiment utilizes modular design and dynamic optimization mechanisms to reduce manual production planning. Only production targets need to be input for automatic capacity allocation; production quality is improved by providing early warnings for potentially problematic processes and equipment, enabling proactive maintenance. When equipment exhibits differences in product adaptability (e.g., good for product A but poor for product B), targeted production scheduling can be implemented, improving factory adaptability and reducing maintenance costs.

[0039] Specifically, the system is configured with an input module, a calculation module, an allocation module, a quality analysis module, an early warning module, and a dynamic adjustment module. The input module is configured to receive user input regarding the product type (e.g., A, B, C, etc.) and its corresponding target completion date; for example, the target completion date for product A is June 30, 2024, and for product B it is July 15, 2024. The input module obtains this information through a graphical interface or data interface and transmits it to the calculation module.

[0040] Next, the calculation module calculates the actual available production time for each product, such as Ta, Tb, and Tc, based on the target completion date, the production calendar, and holiday exclusion rules. Furthermore, it calculates the required equipment quantity based on the formula Equip_N = Tx / TATx, where:

[0041] Tx: Actual production time of the product (Ta is the remaining production days of product A);

[0042] TATx: Standard production time during the mass production validation phase (TATx for product A is 5 days / batch).

[0043] This formula can be used to determine the minimum number of devices required to meet the target completion date.

[0044] Then, the allocation module performs initial capacity allocation based on the equipment demand output by the calculation module and the current equipment availability. For example, if product A requires 3 machines and product B requires 2 machines, then idle machines are prioritized for allocation to the production queue of the corresponding products.

[0045] Based on this, in this embodiment, the quality data of each product will be collected during the production process. The data acquisition unit collects process parameters (such as temperature and pressure) and equipment operating parameters (such as failure rate and maintenance records) in real time during the production process. The statistical unit uses statistical methods (such as analysis of variance and control charts) to analyze product adaptability (such as the compatibility of a certain equipment with product B) and potential quality problems (such as a decrease in yield caused by parameter deviation). The index generation unit quantifies the analysis results into an equipment quality index (Q value), which is calculated by the formula Q = (1 - failure rate) × yield × compatibility coefficient, and is used to comprehensively evaluate the equipment status.

[0046] As mentioned above, if there is a product incompatibility (such as a quality incident), the capacity allocation for that equipment will be stopped. Therefore, an early warning module is also configured: a) When a quality incident (such as three consecutive batches of defects) is detected for a certain equipment, the capacity allocation for that equipment will be stopped immediately.

[0047] b) When the equipment quality index is below the threshold, a warning signal is sent to the maintenance department and a maintenance work order is generated;

[0048] c) When product adaptability differences are detected (e.g., the yield of product A produced by equipment X is significantly lower than that of product B), a secondary production scheduling instruction is triggered to adjust the production allocation strategy.

[0049] It can also be combined with dynamic adjustment modules to optimize production capacity. The 6 dynamic adjustment modules include:

[0050] a) Instruction generation unit: Generates adjustment instructions based on the warning results, such as reducing the production ratio of unsuitable product A by 10% and increasing the production capacity weight of suitable product B.

[0051] b) Production Scheduling Optimization Unit: Employing a dynamic programming algorithm, this unit reallocates equipment resources with the goal of minimizing total production time. For example, it may reassign two machines originally allocated to product A to product B and optimize the production sequence.

[0052] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A production scheduling system for quality feedback, characterized in that, include: The input module is used to receive the product type and its corresponding target completion date; The calculation module calculates the actual production time for each product based on the target completion date; The allocation module performs initial capacity allocation based on the equipment quantity requirement and the actual production time. The quality analysis module is used to collect quality data during the production process and generate equipment quality indices. The early warning module triggers equipment status early warnings based on the equipment quality index; The dynamic adjustment module adjusts the capacity allocation strategy based on the output results of the early warning module.

2. The production scheduling system for quality feedback according to claim 1, characterized in that, The calculation module calculates the required number of devices using the formula Equip_N = Tx / TATx, where Tx is the actual production time of the product and TATx is the production time during the mass production verification phase.

3. The production scheduling system for quality feedback according to claim 2, characterized in that, The quality analysis module includes: The data acquisition unit, wherein the data acquisition sheet is used to acquire process parameters and equipment operating parameters; The statistical unit analyzes product adaptability and potential quality issues based on statistical methods. An index generation unit quantifies the analysis results into an equipment quality index.

4. The production scheduling system for quality feedback according to claim 3, characterized in that, The early warning module is configured as follows: a) When a quality incident is detected, stop the production capacity allocation of the corresponding equipment; b) When potential quality issues are discovered, a maintenance warning signal will be sent to the equipment maintenance department; c) When there are differences in product adaptability, a second production scheduling instruction is triggered.

5. The production scheduling system for quality feedback according to claim 4, characterized in that, The secondary production scheduling instruction includes a production allocation adjustment strategy, which specifically reduces the production proportion of unsuitable products while increasing the production capacity weight of suitable products.

6. The production scheduling system for quality feedback according to claim 5, characterized in that, The dynamic adjustment module includes: a) Instruction generation unit, which generates adjustment instructions based on the equipment quality index; b) Production scheduling optimization unit: uses dynamic programming algorithm to reallocate equipment resources.

7. A computer-readable storage medium storing a computer program, characterized in that, When the computer program is executed by the processor, it implements the operating logic of the production scheduling device according to any one of claims 1-6.