Automatic girdling processing equipment for semiconductor-grade clean pipeline piece

Abstract

The invention discloses automatic girdling machining equipment for a semiconductor-grade clean pipeline piece, and relates to the technical field of clean pipeline piece machining, the automatic girdling machining equipment comprises a bottom plate, and further comprises a girdling mechanism, a pipe piece placing mechanism, a pipe piece fixing mechanism, a feeding and discharging mechanism and a cleaning mechanism, the girdling mechanism comprises a barrel frame, and the barrel frame is arranged at one end of the bottom plate; and the pipe fitting placing mechanism comprises a first supporting plate, a pipe fitting girdling cylinder, a supporting cylinder and an air blowing cylinder, the first supporting plate is arranged in the middle of the bottom plate, and the pipe fitting girdling cylinder is arranged in the middle of the first supporting plate. According to the pipe fitting girdling device, the pipe fitting girdling barrel is inserted into a pipe fitting before girdling of the pipe fitting, the pipe fitting is clamped by the two clamping plates while the pipe fitting girdling barrel is moved, and in the girdling process, material residues on the inner wall and the outer wall of the pipe fitting are absorbed through the air suction holes and the air suction grooves correspondingly; and through the air guide groove, material residues attached to the uncut position of the inner wall of the pipe fitting are also blown into the air suction hole, and the cleanliness of the pipe fitting subjected to ring cutting is improved.

Description

Technical Field

[0001] This invention relates to the field of clean piping component processing technology, specifically to an automatic circumferential cutting processing equipment for semiconductor-grade clean piping components. Background Technology

[0002] In the semiconductor manufacturing process, the quality of the high-purity gases and chemicals transported by the pipeline system directly determines the chip performance and yield. These pipeline components must meet the highest cleanliness requirements, with the core objective being to prevent any form of contamination. Chinese patent application No. 202411607934.1 discloses "a thermos cup ring cutting device with positioning function, including a base, a feeding component disposed on the base, an adjustment component and a laser cutting component disposed on the base, a transmission component disposed on the adjustment component, and a positioning locking mechanism disposed on the transmission component." The positioning and locking mechanism includes a positioning base, and a positioning block is movably installed inside the positioning base. This thermos cup ring-cutting device with positioning function can quickly and evenly distribute itself around the inner wall of the metal fitting through the positioning and locking mechanism. When the positioning plate contacts the inner wall of the metal fitting and applies appropriate pressure, the metal fitting is effectively pressed against it, thereby achieving a stable fixation of the metal fitting. This design not only fixes the metal fitting but also ensures that the metal fitting is centered while being clamped and positioned, thus greatly improving the stability and accuracy of the metal fitting during the cutting process.

[0003] This technical solution only addresses the problem of uneven force application during fixing, which can cause metal pipes to wobble or loosen during cutting due to uneven force. However, existing methods for circumferential cutting of pipes used in semiconductor manufacturing not only require ensuring stability during cutting but also preventing contamination. During the pipe cutting process, due to the high-speed rotation of the blade, fine slag is inevitably generated during the contact and cutting process with the pipe. This fine slag adheres to the inner and outer walls of the pipe, contaminating it and making it difficult to meet cleanliness standards. Summary of the Invention

[0004] The purpose of this invention is to provide an automated circumferential cutting equipment for semiconductor-grade clean piping components, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an automatic ring cutting processing equipment for semiconductor-grade clean piping components, including a base plate, and further including a ring cutting mechanism, a pipe placement mechanism, a pipe fixing mechanism, a loading and unloading mechanism, and a clean mechanism;

[0006] A circumferential cutting mechanism, the circumferential cutting mechanism including a cylindrical frame, the cylindrical frame being disposed at one end of a base plate;

[0007] A pipe fitting placement mechanism, comprising a first support plate, a pipe fitting circumferential cutting cylinder, a support cylinder, and a blower. The first support plate is disposed in the middle of the base plate, the pipe fitting circumferential cutting cylinder is disposed in the middle of the first support plate, the support cylinder is disposed at the end of the pipe fitting circumferential cutting cylinder away from the cylinder frame, and the blower is disposed on the side of the support cylinder away from the first support plate.

[0008] The pipe fitting fixing mechanism includes two support frames, which are located at the top of the base plate and between the cylinder frame and the first support plate, respectively on both sides of the pipe fitting circumferential cylinder.

[0009] The loading and unloading mechanism includes a second support plate, which is disposed at the top of the base plate and located at the end away from the cylinder frame;

[0010] The cleanroom mechanism includes an air guide groove and an air intake hole. The air guide groove is disposed on the pipe fitting circumferential cutting cylinder, and the air intake hole is disposed at one end of the pipe fitting circumferential cutting cylinder near the cylinder frame.

[0011] Preferably, the circumferential cutting mechanism includes a rotating cylinder, a circumferential cutting motor, a circumferential cutting gear, and a circumferential cutting ring. The rotating cylinder is movably installed in the middle of the cylinder frame. The circumferential cutting motor is fixedly installed at the top of the base plate and located below the cylinder frame. The circumferential cutting gear is fixedly installed on the output shaft of the circumferential cutting motor. The circumferential cutting ring is fixedly sleeved on the rotating cylinder and is movably connected to the circumferential cutting gear through meshing.

[0012] Preferably, the circumferential cutting mechanism includes a connecting column, a connecting frame, a sliding groove, and a connecting plate. The connecting column is fixedly installed on the side of the rotating cylinder away from the first support plate, the connecting frame is fixedly installed on the connecting column, the sliding groove is fixedly installed on the end of the connecting column away from the rotating cylinder, and the connecting plate is movably installed in the sliding groove.

[0013] Preferably, the circumferential cutting mechanism includes a lifting block, an electric push rod, a fixed frame, a blade, and a cutting motor. The lifting block is fixedly installed on the side of the connecting plate away from the connecting column. The electric push rod is fixedly installed at the top center of the connecting frame, and its output shaft passes through the connecting frame and is fixedly connected to the lifting block. The fixed frame is fixedly installed on the side of the lifting block away from the electric push rod. The blade is movably installed in the fixed frame at the end away from the lifting block. The cutting motor is fixedly installed at the bottom end of the fixed frame near the cylinder frame, and the blade is fixedly sleeved on the output shaft of the cutting motor.

[0014] Preferably, the pipe fitting fixing mechanism includes a support rod, a clamping plate, and a spring. There are two sets of support rods, which are fixedly installed in two support frames respectively. There are two clamping plates, which are movably installed at the upper and lower ends of the pipe fitting circumferential cutting cylinder respectively, and both ends are movably installed on the two sets of support rods. The spring is movably sleeved on the support rod and located between the two clamping plates.

[0015] Preferably, the pipe fixing mechanism includes a bidirectional lead screw, a translation sleeve, and a connecting arm. There are two bidirectional lead screws, which are movably installed in two support frames, and the ends of the lead screws near the first support plate pass through the first support plate. Two translation sleeves are provided on each bidirectional lead screw, and they are movably connected to both ends of the bidirectional lead screw by threads. Two connecting arms are provided on one side of each clamping plate, and they are movably installed at both ends of the clamping plate, and the other end is movably connected to the two sets of translation sleeves.

[0016] Preferably, the loading and unloading mechanism includes a slide rod, a translation screw, and a translation motor. The slide rod is fixedly installed between the first support plate and the second support plate. The translation screw is movably installed between the first support plate and the second support plate, with its two ends located at the middle of the bottom ends of the first support plate and the second support plate, respectively. The translation motor is fixedly installed at the top of the base plate, between the two support frames, and below the pipe fitting circumferential cutting cylinder. The output shaft of the translation motor is fixedly connected to one end of the translation screw.

[0017] Preferably, the loading and unloading mechanism includes a translation plate, a synchronous gear ring, a synchronous belt, and synchronous gears. The translation plate is movably sleeved on one end of the pipe fitting circumferential cutting cylinder located between the first support plate and the second support plate. The translation plate is movably sleeved on the slide rod. The bottom end of the translation plate is movably sleeved on the translation screw through a thread. The synchronous gear ring is movably installed on the side of the first support plate away from the cylinder frame and sleeved outside the pipe fitting circumferential cutting cylinder. The bottom end of the synchronous belt is movably sleeved on the translation screw, and the top end is movably sleeved on the synchronous gear ring. There are two synchronous gears, which are respectively fixedly sleeved on the ends of the two bidirectional screws away from the cylinder frame.

[0018] Preferably, the cleanroom mechanism includes an arc-shaped plate, an air intake groove, a first air intake pipe, and a second air intake pipe. There are two arc-shaped plates, which are respectively disposed on the upper and lower sides of the pipe fitting circumferential cutting cylinder, and the ends of the arc-shaped plates near the cylinder frame are located inside the rotating cylinder. The ends of the arc-shaped plates near the first support plate are respectively fixedly connected to two clamping plates. There are two air intake grooves, which are respectively fixedly installed on the ends of the two arc-shaped plates away from the first support plate. One end of the first air intake pipe is inserted into the air intake groove, and the second air intake pipe is inserted into the pipe fitting circumferential cutting cylinder.

[0019] Preferably, the cleanroom mechanism includes a connecting pipe, a filter cartridge, a fan, and an air outlet pipe. One end of the connecting pipe is connected to the end of the first suction pipe away from the suction groove, and the other end is connected to the second suction pipe. The top end of the filter cartridge is inserted into the bottom end of the second suction pipe. The fan is fixedly installed on the side of the translation plate away from the first support plate and is located between the pipe fitting circumferential cutting cylinder and the translation screw. The bottom end of the filter cartridge is inserted into the air inlet of the fan. The top end of the air outlet pipe is inserted into the blower, and the bottom end is inserted into the air outlet of the fan.

[0020] Compared with the prior art, the beneficial effects of the present invention are:

[0021] This invention involves inserting a pipe circumferential cutting cylinder into the pipe before circumferential cutting, and simultaneously moving the clamping plates towards the pipe as the circumferential cutting cylinder moves. Upon completion of the cylinder's movement, the two clamping plates hold the pipe on the cylinder. During circumferential cutting, the slag on the inner and outer walls of the pipe is absorbed through the suction holes and suction grooves, respectively. Furthermore, the slag adhering to the uncut portion of the inner wall is blown into the suction holes through the air guide grooves. After circumferential cutting, the cylinder moves outward from the pipe, and during this movement, the slag on the outer wall is blown off by a blower. The cylinder, carrying the suction holes, moves within the cut pipe, resulting in efficient cleaning of the inner wall and improved cleanliness after circumferential cutting. Attached Figure Description

[0022] Figure 1 A schematic diagram of the overall structure is provided for embodiments of the present invention;

[0023] Figure 2 This is a schematic diagram of the circumferential cutting mechanism provided in an embodiment of the present invention;

[0024] Figure 3 Provided for embodiments of the present invention Figure 2 Enlarged structural diagram at point A in the middle;

[0025] Figure 4 This is a schematic diagram of a pipe fixing mechanism provided in an embodiment of the present invention;

[0026] Figure 5 This is a schematic diagram of the internal structure of the support frame provided in an embodiment of the present invention;

[0027] Figure 6 This is a schematic diagram of the loading and unloading mechanism provided in an embodiment of the present invention;

[0028] Figure 7 This is a schematic diagram of the bidirectional lead screw and translation lead screw transmission structure provided in an embodiment of the present invention;

[0029] Figure 8 This is a schematic diagram of the pipe fitting circumferential cut cylinder structure provided in an embodiment of the present invention;

[0030] Figure 9 This is a schematic diagram of a cleanroom mechanism provided in an embodiment of the present invention.

[0031] In the diagram: 1. Base plate;

[0032] 2. Ring cutting mechanism; 201. Cylindrical frame; 202. Rotating cylinder; 203. Ring cutting motor; 204. Ring cutting gear; 205. Ring cutting tooth ring; 206. Connecting column; 207. Connecting frame; 208. Slide groove; 209. Connecting plate; 210. Lifting block; 211. Electric push rod; 212. Fixed frame; 213. Blade; 214. Cutting motor;

[0033] 3. Pipe fitting placement mechanism; 301. First support plate; 302. Pipe fitting circumferential cutting cylinder; 303. Support cylinder; 304. Air blower;

[0034] 4. Pipe fitting fixing mechanism; 401. Support frame; 402. Support rod; 403. Clamping plate; 404. Spring; 405. Two-way lead screw; 406. Translation sleeve; 407. Connecting arm;

[0035] 5. Loading and unloading mechanism; 501. Second support plate; 502. Slide rod; 503. Translation screw; 504. Translation motor; 505. Translation plate; 506. Synchronous gear ring; 507. Synchronous belt; 508. Synchronous gear;

[0036] 6. Cleanroom structure; 601. Air guide channel; 602. Air intake port; 603. Arc plate; 604. Air intake channel; 605. First air intake pipe; 606. Second air intake pipe; 607. Connecting pipe; 608. Filter cartridge; 609. Fan; 610. Air outlet pipe. Detailed Implementation

[0037] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0038] This embodiment describes an automated circumferential cutting device for semiconductor-grade clean piping components, such as... Figures 1 to 9 As shown, it includes a base plate 1, a ring cutting mechanism 2, a pipe placement mechanism 3, a pipe fixing mechanism 4, a loading and unloading mechanism 5, and a cleaning mechanism 6. The ring cutting mechanism 2 includes a cylinder frame 201, which is located at one end of the base plate 1.

[0039] In this embodiment, as Figure 2As shown, the ring-cutting mechanism 2 includes a rotating cylinder 202, a ring-cutting motor 203, a ring-cutting gear 204, and a ring-cutting toothed ring 205. The rotating cylinder 202 is movably installed in the middle of the cylinder frame 201. The ring-cutting motor 203 is fixedly installed at the top of the base plate 1 and located below the cylinder frame 201. The ring-cutting gear 204 is fixedly installed on the output shaft of the ring-cutting motor 203. The ring-cutting toothed ring 205 is fixedly sleeved on the rotating cylinder 202 and is movably connected to the ring-cutting gear 204 through meshing. The ring-cutting motor 203 drives the ring-cutting gear 204 to rotate. When the ring-cutting gear 204 rotates, it drives the ring-cutting toothed ring 205 that meshes with it to rotate, so that the rotating cylinder 202 rotates on the cylinder frame 201 simultaneously with the ring-cutting toothed ring 205.

[0040] In this embodiment, as Figure 3 As shown, the circumferential cutting mechanism 2 includes a connecting column 206, a connecting frame 207, a sliding groove 208, and a connecting plate 209. The connecting column 206 is fixedly installed on the side of the rotating cylinder 202 away from the first support plate 301. The connecting frame 207 is fixedly installed on the connecting column 206. The sliding groove 208 is fixedly installed on the end of the connecting column 206 away from the rotating cylinder 202. The connecting plate 209 is movably installed in the sliding groove 208. The rotating cylinder 202 is connected through the connecting column 206, so that the rotating cylinder 202 can drive the blade 213 to rotate around the pipe at the same time.

[0041] In this embodiment, as Figure 3 As shown, the circumferential cutting mechanism 2 includes a lifting block 210, an electric push rod 211, a fixed frame 212, a blade 213, and a cutting motor 214. The lifting block 210 is fixedly installed on the side of the connecting plate 209 away from the connecting column 206. The electric push rod 211 is fixedly installed at the top center of the connecting frame 207, and its output shaft passes through the connecting frame 207 and is fixedly connected to the lifting block 210. The fixed frame 212 is fixedly installed on the side of the lifting block 210 away from the electric push rod 211. The blade 213 is movably installed on the fixed frame 212 away from the lifting block. Inside one end of 210, the cutting motor 214 is fixedly installed on the bottom side of the fixed frame 212 near the cylinder frame 201, and the blade 213 is fixedly sleeved on the output shaft of the cutting motor 214; the circumferential cutting motor 203 drives the circumferential cutting gear 204 to rotate, and the circumferential cutting gear ring 205 drives the rotating cylinder 202 to rotate, so that the connecting column 206 can follow the rotating cylinder 202 to rotate around the pipe. The electric push rod 211 pushes the blade 213 toward the pipe, and the cutting motor 214 drives the blade to rotate to perform circumferential cutting on the pipe.

[0042] At other levels, this embodiment also provides a pipe placement mechanism 3 for placing pipe fittings for circumferential cutting, such as... Figure 6 and Figure 8As shown, the pipe fitting placement mechanism 3 includes a first support plate 301, a pipe fitting circumferential cutting cylinder 302, a support cylinder 303, and a blower 304. The first support plate 301 is located in the middle of the base plate 1, the pipe fitting circumferential cutting cylinder 302 is located in the middle of the first support plate 301, the support cylinder 303 is located at the end of the pipe fitting circumferential cutting cylinder 302 away from the cylinder frame 201, and the blower 304 is located on the side of the support cylinder 303 away from the first support plate 301.

[0043] At other levels, this embodiment also provides a pipe fixing mechanism 4 for fixing pipe fittings, such as... Figure 4 and Figure 5 As shown, the pipe fitting fixing mechanism 4 includes a support frame 401. There are two support frames 401, which are set at the top of the base plate 1 and located between the cylinder frame 201 and the first support plate 301, respectively located on both sides of the pipe fitting circumferential cutting cylinder 302.

[0044] In this embodiment, as Figure 4 As shown, the pipe fitting fixing mechanism 4 includes a support rod 402, a clamping plate 403, and a spring 404. There are two sets of support rods 402, which are fixedly installed in two support frames 401 respectively. There are two clamping plates 403, which are movably installed at the upper and lower ends of the pipe fitting circumferential cutting cylinder 302 respectively, and both ends are movably installed on the two sets of support rods 402. The spring 404 is movably sleeved on the support rod 402 and is located between the two clamping plates 403. The support rod 402 and the bidirectional screw 405 are supported and installed by the support frame 401, and the two clamping plates 403 are separated on the support rod 402 by the spring 404.

[0045] In this embodiment, as Figure 5 As shown, the pipe fitting fixing mechanism 4 includes a bidirectional lead screw 405, a translation sleeve 406, and a connecting arm 407. There are two bidirectional lead screws 405, which are movably installed in two support frames 401, and the ends of the two screws 405 near the first support plate 301 pass through the first support plate 301. Two translation sleeves 406 are provided on each bidirectional lead screw 405, and are respectively threadedly connected to both ends of the bidirectional lead screw 405. Two connecting arms 407 are provided on one side of each clamping plate 403, and are movably installed at both ends of the clamping plate 403, with the other end movably connected to the two sets of translation sleeves 406 respectively. The two translation sleeves 406 on the bidirectional lead screw 405 are driven to move simultaneously towards the middle of the bidirectional lead screw 405, and the two clamping plates 403 are driven to move simultaneously towards the pipe fitting circumferential cutting cylinder 302 through the connecting arm 407. When the displacement of the pipe fitting circumferential cutting cylinder 302 is completed, the clamping plate 403 also clamps and fixes the pipe fitting.

[0046] At other levels, this embodiment also provides a loading and unloading mechanism 5 for pushing the circumcised pipe fittings, such as... Figure 6 and Figure 7As shown, the loading and unloading mechanism 5 includes a second support plate 501, which is disposed at the top of the base plate 1 and located at the end away from the cylinder frame 201.

[0047] In this embodiment, as Figure 6 As shown, the loading and unloading mechanism 5 includes a slide rod 502, a translation screw 503, and a translation motor 504. The slide rod 502 is fixedly installed between the first support plate 301 and the second support plate 501. The translation screw 503 is movably installed between the first support plate 301 and the second support plate 501, with both ends located at the bottom middle of the first support plate 301 and the second support plate 501, respectively. The translation motor 504 is fixedly installed at the top of the base plate 1, located between the two support frames 401, and below the pipe fitting circumferential cutting cylinder 302. The output shaft of the translation motor 504 is fixedly connected to one end of the translation screw 503. The translation motor 504 drives the translation screw 503 to rotate, thereby driving the translation plate 505 to move from the second support plate 501 to the first support plate 301. The translation plate 505 drives the support cylinder 303 to move simultaneously, causing the pipe fitting circumferential cutting cylinder 302 to move simultaneously and be inserted into the pipe fitting.

[0048] In this embodiment, as Figure 7 As shown, the loading and unloading mechanism 5 includes a translation plate 505, a synchronous gear ring 506, a synchronous belt 507, and a synchronous gear 508. The translation plate 505 is movably sleeved on one end of the pipe fitting circumferential cutting cylinder 302 located between the first support plate 301 and the second support plate 501. The translation plate 505 is movably sleeved on the slide rod 502. The bottom end of the translation plate 505 is movably sleeved on the translation screw 503 via a thread. The synchronous gear ring 506 is movably installed on the first support plate 301 away from the cylinder frame 2. On one side of 01, and sleeved outside the pipe fitting circumferential cutting cylinder 302, the bottom end of the synchronous belt 507 is movably sleeved on the translation screw 503, and the top end is movably sleeved on the synchronous gear ring 506. There are two synchronous gears 508, which are respectively fixedly sleeved on the ends of the two bidirectional screws 405 away from the cylinder frame 201. The synchronous belt 507 drives the synchronous gear ring 506 to rotate simultaneously, and when the synchronous gear ring 506 rotates, the bidirectional screw 405 is driven to rotate through the synchronous gear 508.

[0049] At other levels, this embodiment also provides a cleaning mechanism 6 for adsorbing the slag generated during ring cutting, such as... Figure 8 As shown, the cleanroom mechanism 6 includes an air guide groove 601 and an air suction hole 602. The air guide groove 601 is disposed on the pipe fitting circumferential cutting cylinder 302, and the air suction hole 602 is disposed at one end of the pipe fitting circumferential cutting cylinder 302 near the cylinder frame 201.

[0050] In this embodiment, as Figure 9As shown, the cleanroom mechanism 6 includes an arc-shaped plate 603, an air intake groove 604, a first air intake pipe 605, and a second air intake pipe 606. There are two arc-shaped plates 603, which are respectively set on the upper and lower sides of the pipe fitting circumferential cutting cylinder 302. The ends of the plates near the cylinder frame 201 are located inside the rotating cylinder 202, and the ends near the first support plate 301 are respectively fixedly connected to two clamping plates 403. There are two air intake grooves 604, which are respectively fixedly installed on the ends of the two arc-shaped plates 603 away from the first support plate 301. One end of the first air intake pipe 605 is inserted into the air intake groove 604, and the second air intake pipe 606 is inserted into the pipe fitting circumferential cutting cylinder 302. Material residue is sucked in through the air intake hole 602. The sucked-in material residue enters the second air intake pipe 606, while the material residue in the first air intake pipe 605 and the second air intake pipe 606 enters the filter cylinder 608 and is collected.

[0051] In this embodiment, as Figure 9 As shown, the cleanroom mechanism 6 includes a connecting pipe 607, a filter cartridge 608, a fan 609, and an exhaust pipe 610. One end of the connecting pipe 607 is connected to the end of the first suction pipe 605 away from the suction groove 604, and the other end is connected to the second suction pipe 606. The top end of the filter cartridge 608 is inserted into and installed at the bottom end of the second suction pipe 606. The fan 609 is fixedly installed on the side of the translation plate 505 away from the first support plate 301, and is located between the pipe fitting circumferential cutting cylinder 302 and the translation screw 503. The bottom end of the filter cartridge 608 is inserted into and installed at the bottom end of the second suction pipe 606. The top end of the air outlet pipe 610 is inserted into the blower 304 and the bottom end is inserted into the air outlet of the blower 609. By starting the blower 609 before cutting begins, the fine cutting slag generated on the outer wall of the pipe at the blade 213 during the cutting process can be sucked into the first suction pipe 605 through the suction groove 604. The air blown out by the blower 609 is guided by the air guide groove 601 and blown towards the slag on the inner wall of the pipe, and the slag is sucked in through the suction hole 602.

[0052] Working principle: In use, the end of the semiconductor-grade clean tubing is placed against the side wall of the first support plate 301 and fitted onto the end of the tubing circumferential cutting cylinder 302 located at the first support plate 301. Then, the translation motor 504 is started, driving the translation screw 503 to rotate, thereby driving the translation plate 505 to move from the second support plate 501 to the first support plate 301. The translation plate 505 simultaneously moves the support cylinder 303, causing the tubing circumferential cutting cylinder 302 to move and insert into the tubing. While the translation screw 503 rotates, the synchronous belt 507 drives the synchronous gear ring 506 to rotate simultaneously. When the synchronous gear ring 506 rotates, the synchronous gear 508 drives the bidirectional screw 405 to rotate. The bidirectional screw 405 drives the two translation sleeves 406 on it to move simultaneously towards the middle of the bidirectional screw 405. The connecting arm 407 drives the two clamping plates 403 to move simultaneously towards the pipe fitting circumferential cutting cylinder 302. When the displacement of the pipe fitting circumferential cutting cylinder 302 is completed, the clamping plates 403 also clamp and fix the pipe fitting.

[0053] After the pipe fitting is placed and fixed, the circumferential cutting motor 203 is started. The circumferential cutting motor 203 drives the circumferential cutting gear 204 to rotate, and the circumferential cutting gear ring 205 drives the rotating cylinder 202 to rotate, so that the connecting column 206 can follow the rotating cylinder 202 to rotate around the pipe fitting. The electric push rod 211 pushes the blade 213 toward the pipe fitting, and the cutting motor 214 drives the blade to rotate to perform circumferential cutting on the pipe fitting.

[0054] Before cutting begins, the blower 609 is started so that during the cutting process, the fine cutting slag generated on the outer wall of the pipe at the blade 213 can be sucked into the first suction pipe 605 through the suction groove 604. The air blown out by the blower 609 is guided by the air guide groove 601 and blown towards the slag on the inner wall of the pipe, and is sucked into the slag through the suction hole 602. The sucked-in slag enters the second suction pipe 606, and the slag in the first suction pipe 605 and the second suction pipe 606 enter the filter cylinder 608 for collection.

[0055] After the circumferential cutting is completed, the translation screw 503 is reversed by the translation motor 504 to drive the two clamping plates 403 to open, release the clamping of the pipe, and drive the pipe circumferential cutting cylinder 302 to move outward of the pipe. During this process, air is continuously blown onto the inner wall of the pipe through the air guide groove 601, so that dust and slag are blown down and air is sucked in through the air suction hole 602, so that the pipe can achieve semiconductor-level cleanliness after the circumferential cutting is completed.

[0056] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0057] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An automatic circumferential cutting equipment for semiconductor-grade clean piping components, comprising a base plate (1), characterized in that, It also includes a ring cutting mechanism (2), a pipe fitting placement mechanism (3), a pipe fitting fixing mechanism (4), a loading and unloading mechanism (5), and a cleanroom mechanism (6): A ring-cutting mechanism (2) includes a cylindrical frame (201) which is disposed at one end of a base plate (1); The pipe fitting placement mechanism (3) includes a first support plate (301), a pipe fitting circumferential cutting cylinder (302), a support cylinder (303), and a blower (304). The first support plate (301) is located in the middle of the base plate (1). The pipe fitting circumferential cutting cylinder (302) is located in the middle of the first support plate (301). The support cylinder (303) is located at one end of the pipe fitting circumferential cutting cylinder (302) away from the cylinder frame (201). The blower (304) is located on the side of the support cylinder (303) away from the first support plate (301). Pipe fitting fixing mechanism (4), the pipe fitting fixing mechanism (4) includes a support frame (401), there are two support frames (401), and they are set at the top of the base plate (1), and located between the cylinder frame (201) and the first support plate (301), and respectively located on both sides of the pipe fitting ring-cut cylinder (302); The loading and unloading mechanism (5) includes a second support plate (501), which is located at the top of the base plate (1) and at the end away from the cylinder frame (201). Cleaning mechanism (6), the cleaning mechanism (6) includes an air guide groove (601) and an air suction hole (602), the air guide groove (601) is disposed on the pipe fitting circumferential cutting cylinder (302), and the air suction hole (602) is disposed at one end of the pipe fitting circumferential cutting cylinder (302) near the cylinder frame (201).

2. The automatic circumferential cutting equipment for semiconductor-grade clean piping components according to claim 1, characterized in that: The ring-cutting mechanism (2) includes a rotating cylinder (202), a ring-cutting motor (203), a ring-cutting gear (204), and a ring-cutting toothed ring (205). The rotating cylinder (202) is movably installed in the middle of the cylinder frame (201). The ring-cutting motor (203) is fixedly installed at the top of the base plate (1) and located below the cylinder frame (201). The ring-cutting gear (204) is fixedly installed on the output shaft of the ring-cutting motor (203). The ring-cutting toothed ring (205) is fixedly sleeved on the rotating cylinder (202) and is movably connected to the ring-cutting gear (204) through meshing.

3. The automatic circumferential cutting equipment for semiconductor-grade clean piping components according to claim 2, characterized in that: The circumferential cutting mechanism (2) includes a connecting column (206), a connecting frame (207), a sliding groove (208), and a connecting plate (209). The connecting column (206) is fixedly installed on the side of the rotating cylinder (202) away from the first support plate (301). The connecting frame (207) is fixedly installed on the connecting column (206). The sliding groove (208) is fixedly installed on the end of the connecting column (206) away from the rotating cylinder (202). The connecting plate (209) is movably installed in the sliding groove (208).

4. The automatic circumferential cutting equipment for semiconductor-grade clean piping components according to claim 3, characterized in that: The ring cutting mechanism (2) includes a lifting block (210), an electric push rod (211), a fixed frame (212), a blade (213), and a cutting motor (214). The lifting block (210) is fixedly installed on the side of the connecting plate (209) away from the connecting column (206). The electric push rod (211) is fixedly installed at the top center of the connecting frame (207), and its output shaft passes through the connecting frame (207) and is fixedly connected to the lifting block (210). The fixed frame (212) is fixedly installed on the side of the lifting block (210) away from the electric push rod (211). The blade (213) is movably installed in the end of the fixed frame (212) away from the lifting block (210). The cutting motor (214) is fixedly installed at the bottom end of the fixed frame (212) near the cylinder frame (201), and the blade (213) is fixedly sleeved on the output shaft of the cutting motor (214).

5. The automatic circumferential cutting equipment for semiconductor-grade clean piping components according to claim 4, characterized in that: The pipe fitting fixing mechanism (4) includes a support rod (402), a clamping plate (403), and a spring (404). There are two sets of support rods (402), which are fixedly installed in two support frames (401). There are two clamping plates (403), which are movably installed on the upper and lower ends of the pipe fitting circumferential cutting cylinder (302), and both ends are movably installed on the two sets of support rods (402). The spring (404) is movably sleeved on the support rod (402) and located between the two clamping plates (403).

6. The automatic circumferential cutting equipment for semiconductor-grade clean piping components according to claim 5, characterized in that: The pipe fixing mechanism (4) includes a bidirectional lead screw (405), a translation sleeve (406), and a connecting arm (407). There are two bidirectional lead screws (405), which are movably installed in two support frames (401) respectively, and the end of each screw close to the first support plate (301) passes through the first support plate (301). There are two translation sleeves (406) on each bidirectional lead screw (405), which are movably connected to both ends of the bidirectional lead screw (405) by threads. There are two connecting arms (407) on one side of each clamping plate (403), which are movably installed at both ends of the clamping plate (403), and the other end is movably connected to the two sets of translation sleeves (406).

7. The automatic circumferential cutting equipment for semiconductor-grade clean piping components according to claim 6, characterized in that: The loading and unloading mechanism (5) includes a slide rod (502), a translation screw (503), and a translation motor (504). The slide rod (502) is fixedly installed between the first support plate (301) and the second support plate (501). The translation screw (503) is movably installed between the first support plate (301) and the second support plate (501), with both ends located at the bottom middle of the first support plate (301) and the second support plate (501), respectively. The translation motor (504) is fixedly installed at the top of the base plate (1), between the two support frames (401), and below the pipe fitting circumferential cutting cylinder (302). The output shaft of the translation motor (504) is fixedly connected to one end of the translation screw (503).

8. The automatic circumferential cutting equipment for semiconductor-grade clean piping components according to claim 7, characterized in that: The loading and unloading mechanism (5) includes a translation plate (505), a synchronous gear ring (506), a synchronous belt (507), and a synchronous gear (508). The translation plate (505) is movably sleeved on one end of the pipe fitting circumferential cutting cylinder (302) located between the first support plate (301) and the second support plate (501). The translation plate (505) is movably sleeved on the slide rod (502). The bottom end of the translation plate (505) is movably sleeved on the translation screw (508) through a thread. On 03), the synchronous gear ring (506) is movably installed on the side of the first support plate (301) away from the cylinder frame (201) and sleeved on the outside of the pipe fitting circumferential cylinder (302). The bottom end of the synchronous belt (507) is movably sleeved on the translation screw (503) and the top end is movably sleeved on the synchronous gear ring (506). There are two synchronous gears (508), which are respectively fixedly sleeved on the ends of the two bidirectional screws (405) away from the cylinder frame (201).

9. The automatic circumferential cutting equipment for semiconductor-grade clean piping components according to claim 8, characterized in that: The cleanroom mechanism (6) includes an arc-shaped plate (603), an air intake groove (604), a first air intake pipe (605), and a second air intake pipe (606). There are two arc-shaped plates (603), which are respectively set on the upper and lower sides of the pipe fitting ring-cutting cylinder (302). The end of each plate near the cylinder frame (201) is located inside the rotating cylinder (202), and the end near the first support plate (301) is fixedly connected to two clamping plates (403). There are two air intake grooves (604), which are respectively fixedly installed on the ends of the two arc-shaped plates (603) away from the first support plate (301). One end of the first air intake pipe (605) is inserted into the air intake groove (604), and the second air intake pipe (606) is inserted into the pipe fitting ring-cutting cylinder (302).

10. The automatic circumferential cutting equipment for semiconductor-grade clean piping components according to claim 9, characterized in that: The cleanroom mechanism (6) includes a connecting pipe (607), a filter cartridge (608), a fan (609), and an air outlet pipe (610). One end of the connecting pipe (607) is connected to the end of the first suction pipe (605) away from the suction groove (604), and the other end is connected to the second suction pipe (606). The top end of the filter cartridge (608) is inserted into the bottom end of the second suction pipe (606). The fan (609) is fixedly installed on the side of the translation plate (505) away from the first support plate (301) and is located between the pipe fitting ring-cutting cylinder (302) and the translation screw (503). The bottom end of the filter cartridge (608) is inserted into the air inlet of the fan (609). The top end of the air outlet pipe (610) is inserted into the blower (304), and the bottom end is inserted into the air outlet of the fan (609).

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