Hinge device and vacuum coating equipment

Abstract

The invention provides a hinge device and vacuum coating equipment. The hinge device comprises a first mounting seat assembly, a middle connecting piece, a second mounting seat assembly and a first threaded fastener, wherein the first mounting base assembly is used for being fixed to the side, provided with a door opening, of a vacuum cavity, the second mounting base assembly is used for bearing a door body, the first connecting end of the middle connecting piece is rotationally connected with the first mounting base assembly around a first vertical line, and the second connecting end of the middle connecting piece is rotationally connected with the second mounting base assembly around a second vertical line; the middle connecting piece is provided with a first through hole, the second mounting seat assembly is provided with a first threaded hole, the first threaded fastener penetrates through the first through hole and then is in threaded connection with the first threaded hole, and the first threaded fastener is in clearance fit with the first through hole; when the door body is closed, the door body can be adjusted to the angle parallel to the doorway, the situation that the near end, close to the hinge device, of the door body is damaged due to extrusion is effectively avoided, and therefore the service life of the door body is prolonged.

Description

Technical Field

[0001] This invention belongs to the field of coating, and more specifically, relates to a hinge device and a vacuum coating equipment. Background Technology

[0002] Vacuum coating equipment mainly consists of a vacuum chamber and a door. The vacuum chamber has a doorway, with a hinge device fixedly installed on one side. The door is rotatably connected to the vacuum chamber via this hinge device. During closing, the proximal end of the door near the hinge device contacts the vacuum chamber before its distal end, while the distal end remains at a distance. To ensure the distal end of the door also contacts the vacuum chamber, the proximal end inevitably experiences lateral compression. This compression can easily damage the proximal end of the door, thus affecting the equipment's lifespan. Summary of the Invention

[0003] The purpose of this invention is to provide a hinge device and a vacuum coating equipment to solve the problem in the prior art that the door is easily damaged due to the asynchronous displacement of the near and far ends of the door during the closing process, which causes the near end of the door to be subjected to lateral pressure.

[0004] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0005] This invention provides a hinge device, comprising:

[0006] The first mounting bracket assembly is used to fix it to the side of the vacuum chamber where the door is located;

[0007] An intermediate connector, the first connecting end of which is rotatably connected to the first mounting base assembly about a first vertical line;

[0008] The second mounting base assembly has a second connecting end of the intermediate connector that is rotatably connected to the second mounting base assembly around a second vertical line. The second mounting base assembly is used to support the door body.

[0009] The first threaded fastener has a first through hole in the intermediate connecting part and a first threaded hole in the second mounting base assembly. The first threaded fastener passes through the first through hole and is threadedly connected to the first threaded hole. The first threaded fastener and the first through hole are in clearance fit.

[0010] Furthermore, the intermediate connector is provided with a limiting member, which is located between the first connecting end and the second connecting end, and the limiting member is used to selectively abut against the second mounting base assembly.

[0011] Furthermore, the intermediate connector is provided with a second threaded hole, and the limiting member is a second threaded fastener, which is installed through the second threaded hole.

[0012] Furthermore, the first threaded fastener is disposed between the first connecting end and the second connecting end.

[0013] Furthermore, the first mounting base assembly includes a first mounting base and a first pin. The first mounting base is fixedly installed in the vacuum chamber. The first mounting base is provided with a first upper protruding connecting portion and a first lower protruding connecting portion at intervals. The first upper protruding connecting portion is provided with a second through hole, and the first lower protruding connecting portion is provided with a third through hole. The first connecting end is located between the first upper protruding connecting portion and the first lower protruding connecting portion, and the first connecting end is provided with a first shaft hole. The first pin is sequentially installed through the second through hole, the first shaft hole, and the third through hole.

[0014] Furthermore, a first stepped hole and a second stepped hole are provided at intervals in the first shaft hole. A deep groove ball bearing is provided in the first stepped hole, and a thrust ball needle bearing is provided in the second stepped hole. The deep groove ball bearing and the thrust ball needle bearing are alternately sleeved on the first pin shaft.

[0015] Furthermore, the upper end of the first pin is provided with a first limiting cover, the lower end of the first pin is provided with a first washer and a first threaded positioning member, the first limiting cover abuts against the first upper protruding connecting part, the first washer abuts against the first lower protruding connecting part, and the first threaded positioning member passes through the first washer and is threadedly connected to the first lower protruding connecting part.

[0016] Furthermore, the second mounting bracket assembly includes a second mounting bracket and a second pin. The second mounting bracket is fixedly mounted on the door body. The second mounting bracket is provided with a second upper protruding connecting portion and a second lower protruding connecting portion at intervals. The second upper protruding connecting portion is provided with a fourth through hole, and the second lower protruding connecting portion is provided with a fifth through hole. The second connecting end is located between the second upper protruding connecting portion and the second lower protruding connecting portion. The second connecting end is provided with a second shaft hole. The second pin is sequentially installed through the fourth through hole, the second shaft hole, and the fifth through hole.

[0017] Furthermore, a third stepped hole is provided in the second shaft hole, and a one-way thrust ball bearing is provided in the third stepped hole, which is sleeved on the second pin.

[0018] Furthermore, the upper end of the second pin is provided with a second limiting cover, and the lower end of the second pin is provided with a second washer and a second threaded positioning member. The second limiting cover abuts against the second upper protruding connecting part, the second washer abuts against the second lower protruding connecting part, and the second threaded positioning member passes through the washer and is threadedly connected to the second lower protruding connecting part.

[0019] The present invention also provides a vacuum coating apparatus, including a vacuum chamber, a door, and a hinge device as described above, wherein the door is rotatably connected to the vacuum chamber via the hinge device.

[0020] Furthermore, the hinge device also includes a third threaded fastener, a fourth threaded fastener, a first positioning pin, and a second positioning pin. The first mounting base assembly includes a first mounting base, the upper end of which is provided with a sixth through hole and a first positioning round hole, and the lower end of which is provided with a seventh through hole and a second positioning waist hole. The third threaded fastener passes through the sixth through hole and is threadedly connected to the vacuum chamber, with a clearance fit between the third threaded fastener and the sixth through hole. The fourth threaded fastener passes through the seventh through hole and is threadedly connected to the vacuum chamber, with a clearance fit between the fourth threaded fastener and the seventh through hole. The first positioning pin passes through the first positioning round hole and is inserted into the vacuum chamber, and the second positioning pin passes through the second positioning waist hole and is inserted into the vacuum chamber.

[0021] Furthermore, the hinge device also includes a fifth threaded fastener, a sixth threaded fastener, a third locating pin, and a fourth locating pin. The second mounting base assembly includes a second mounting base, the upper end of which is provided with an eighth through hole and a third locating round hole, and the lower end of which is provided with a ninth through hole and a fourth locating round hole. The fifth threaded fastener passes through the eighth through hole and is threadedly connected to the door body, with a clearance fit between the fifth threaded fastener and the eighth through hole. The sixth threaded fastener passes through the ninth through hole and is threadedly connected to the door body, with a clearance fit between the sixth threaded fastener and the ninth through hole. The third locating pin passes through the third locating round hole and is inserted into the door body, and the fourth locating pin passes through the fourth locating round hole and is inserted into the door body.

[0022] Furthermore, the hinge device also includes a door opening limiter, which is fixedly installed on the first mounting base assembly and selectively abuts against the second mounting base assembly.

[0023] Compared with existing technologies, the hinge device and vacuum coating equipment provided by this invention have the following advantages: By setting a first threaded fastener in the intermediate connector and achieving a clearance fit between the first threaded fastener and the first through hole in the intermediate connector, the door can be adjusted to an angle parallel to the doorway when closed. This invention effectively prevents damage to the proximal end of the door near the hinge device due to compression, thereby extending its service life. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a perspective view of the vacuum coating equipment in a preferred embodiment of the present invention;

[0026] Figure 2 for Figure 1Enlarged view of point A in the middle;

[0027] Figure 3 This is a top view of the vacuum coating equipment in a preferred embodiment of the present invention;

[0028] Figure 4 for Figure 3 Enlarged view at point B in the middle;

[0029] Figure 5 for Figure 3 Enlarged view at point C;

[0030] Figure 6 This is an exploded view of the hinge device in a preferred embodiment of the present invention;

[0031] Figure 7 This is a cross-sectional view of the hinge device in a preferred embodiment of the present invention. Figure 1 ;

[0032] Figure 8 This is a cross-sectional view of the hinge device in a preferred embodiment of the present invention. Figure 2 ;

[0033] Figure 9 This is a cross-sectional view of the hinge device in a preferred embodiment of the present invention. Figure 3 ;

[0034] The main markings for each of the attached figures are as follows:

[0035] 100. Vacuum chamber; 200. Door body; 201. Sealing ring;

[0036] 10. First mounting base assembly; 110. First mounting base; 120. First pin; 1101. First upper protruding connecting part; 1102. First lower protruding connecting part; 1103. Door opening limiter; 1201. First limit cover; 1202. First gasket; 1203. First threaded positioning part;

[0037] 20. Second mounting bracket assembly; 210. Second mounting bracket; 220. Second pin; 2101. Second upper protruding connecting part; 2102. Second lower protruding connecting part; 2201. Second limiting cover; 2202. Second gasket; 2203. Second threaded positioning element;

[0038] 30. Intermediate connecting parts; 310. Deep groove ball bearings; 320. Needle roller bearings with thrust bearings; 330. One-way thrust ball bearings;

[0039] 41. First threaded fastener; 42. Second threaded fastener; 43. Third threaded fastener; 44. Fourth threaded fastener; 45. Fifth threaded fastener; 46. Sixth threaded fastener;

[0040] 51. First through hole; 52. Second through hole; 53. Third through hole; 54. Fourth through hole; 55. Fifth through hole; 56. Sixth through hole; 57. Seventh through hole; 58. Eighth through hole; 59. Ninth through hole;

[0041] 61. First threaded hole; 62. Second threaded hole;

[0042] 71. First shaft hole; 72. Second shaft hole;

[0043] 81. First positioning hole; 82. Second positioning slotted hole; 83. Third positioning hole; 84. Fourth positioning hole;

[0044] 91. First locating pin; 92. Second locating pin; 93. Third locating pin; 94. Fourth locating pin. Detailed Implementation

[0045] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0046] Vacuum coating equipment mainly consists of a vacuum chamber and a door. The vacuum chamber has a doorway, with a hinge device fixedly installed on one side. The door is rotatably connected to the vacuum chamber via this hinge device. During closing, the proximal end of the door near the hinge device contacts the vacuum chamber before its distal end, while the distal end remains at a distance. To ensure the distal end of the door also contacts the vacuum chamber, the proximal end inevitably experiences lateral compression. This compression can easily damage the proximal end of the door, thus affecting the equipment's lifespan.

[0047] Furthermore, as the substrate size increases, the area and weight of the door also increase. In magnetron sputtering (PVD) equipment, the size of a single substrate has already reached 1200mm*2400mm, and some carriers support multiple such substrates simultaneously, resulting in an even larger door area. With the increased door area, it is inevitable to add reinforcing ribs to the door, which will further increase its weight. At the same time, magnetron sputtering equipment requires opening the door for internal maintenance after a period of operation. In this case, a hinge that can meet the requirements of heavy-duty doors, opening and closing easily and reliably, is needed.

[0048] Common hinge types used in existing magnetron sputtering (PVD) equipment include top-and-bottom flag hinges and oblong-hole pin hinges. These hinges are adequate for normal use when the door is lightweight. However, as the area and weight of the equipment and door increase, top-and-bottom flag hinges frequently jam or become difficult to push or pull due to uneven force distribution during door opening and closing. Oblong-hole pin hinges, on the other hand, frequently jam because the pin is positioned within the oblong hole; the pin moves slightly within the hole with the door during opening and closing, accompanied by the pin impacting the inner wall of the oblong hole. The former is prone to jamming, affecting its lifespan; the latter, in addition, the pin moves within the oblong hole as the door opens, impacting the hole wall and further affecting its performance.

[0049] To address the aforementioned problems, the hinge device and vacuum coating equipment proposed in this invention firstly solve the problem of easy damage to the near end caused by asynchronous displacement between the near and far ends of the door. In addition, it also solves the problem that the hinge is prone to jamming when opening and closing the door under heavy load.

[0050] Please refer to the following: Figure 1 and Figure 2 The hinge device proposed in this invention includes a first mounting base assembly 10, an intermediate connector 30, a second mounting base assembly 20, and a first threaded fastener 41. The first mounting base assembly 10 is fixed to the side of the vacuum chamber 100 where a doorway is located. The second mounting base assembly 20 supports the door body 200. The first connecting end of the intermediate connector 30 is rotatably connected to the first mounting base assembly 10 about a first vertical line, and the second connecting end of the intermediate connector 30 is rotatably connected to the second mounting base assembly 20 about a second vertical line. The intermediate connector 30 has a first through hole 51, and the second mounting base assembly 20 has a first threaded hole 61. The first threaded fastener 41 passes through the first through hole 51 and is threadedly connected to the first threaded hole 61, with a clearance fit between the first threaded fastener 41 and the first through hole 51.

[0051] It is understandable that, such as Figures 2 to 5As shown, during the closing process, the operator pushes the end of the door 200 away from the hinge device (i.e., the far end) towards the doorway of the vacuum chamber 100. The first connecting end of the intermediate connector 30 rotates around the first vertical line, and the second mounting bracket assembly 20 and the door 200 rotate together around the second connecting end of the intermediate connector 30, so that the door 200 gradually approaches the doorway. When the end of the door 200 near the hinge device (i.e., the proximal end) contacts the vacuum chamber 100, the end of the door 200 away from the hinge device (i.e., the distal end) is pushed closer to the doorway of the vacuum chamber 100. Since the first threaded fastener 41 can swing within the first through hole 51, the first threaded fastener 41 does not lock the second connecting end of the second mounting bracket 20 and the intermediate connector 30. At this time, the second connecting end of the intermediate connector 30 and the second mounting bracket 20 are slightly offset away from the doorway of the vacuum chamber 100. Therefore, the end of the door 200 near the hinge device (i.e., the proximal end) can slide across the surface of the doorway of the vacuum chamber 100 with less pressure, preventing excessive wear on the part of the door 200 that contacts the vacuum chamber 100. This makes the end of the door 200 near the hinge device (i.e., the proximal end) and the end of the door 200 away from the hinge device (i.e., the distal end) tend to be parallel to the doorway. This invention not only ensures that the distal end of the door 200 can contact the vacuum chamber 100, but also effectively reduces the squeezing force on the proximal end of the door 200, thereby preventing damage.

[0052] The screw of the first threaded fastener 41 passes through the first through hole 51 of the intermediate connector 30 and is threadedly connected to the first threaded hole 61 of the second mounting base assembly 20. The nut of the first threaded fastener 41 is located on the side of the first through hole 51 away from the first threaded hole 61. Therefore, during the opening and closing process, the swing amplitude of the second mounting base assembly 20 relative to the intermediate connector 30 can be limited, thereby limiting the rotation amplitude of the door body 200. In particular, after the door body 200 is opened, the rotation amplitude of the door body 200 is limited to a certain extent, which can reduce safety risks.

[0053] This invention provides a first threaded fastener 41 to the intermediate connector 30, ensuring a clearance fit between the fastener 41 and the first through hole 51 of the intermediate connector 30. This allows the door 200 to be adjusted to an angle parallel to the doorway when closed. This invention effectively prevents damage to the proximal end of the door 200 near the hinge device due to compression, thus extending its service life. It also limits the rotation range of the door 200 relative to the intermediate connector 30, reducing safety risks.

[0054] In a further embodiment, the intermediate connector 30 is provided with a limiting member located between the first connecting end and the second connecting end, and the limiting member is used to selectively abut against the second mounting base assembly 20.

[0055] This invention provides a limiting member in the intermediate connector 30, positioned between the first connecting end and the second connecting end. Without considering installation or manufacturing errors of the door body 200, during the closing process, when the limiting member abuts against the second mounting base assembly 20, the second mounting base assembly 20 and the intermediate connector 30 stop rotating relative to each other. At this point, the door body 200 just closes the doorway of the vacuum chamber 100. This limiting member effectively restricts the swing amplitude of the second mounting base assembly 20 relative to the intermediate connecting block 30, thereby preventing the first threaded fastener 41 from being broken or deformed by the intermediate connecting block 30.

[0056] Among them, such as Figure 6 and Figure 7 As shown, the intermediate connector 30 is provided with a second threaded hole 62, and the limiting member is a second threaded fastener 42, which is installed through the second threaded hole 62.

[0057] It is understandable that the limiting element is not limited to threaded fasteners, such as screws, bolts, or studs. In addition, the limiting element can also be a non-threaded fastener, such as a cylindrical pin or a tapered pin, or the limiting element can be integrated with the intermediate connecting element 30.

[0058] Among them, such as Figure 6 and Figure 7 As shown, the first threaded fastener 41 is disposed between the first connecting end and the second connecting end.

[0059] It is understood that the first threaded fastener 41 can be a screw, etc. Furthermore, the number of first threaded fasteners 41 can be one or more, and their placement is not limited to between the first connecting end and the second connecting end. For example, the intermediate connector 30 has two first threaded fasteners 41 and one second threaded fastener 42, wherein the second threaded fastener 42 is located between the first connecting end and the second connecting end, while both first threaded fasteners 41 are located between the first connecting end and the second connecting end, and the two first threaded fasteners 41 are respectively located on the upper and lower sides of the second threaded fastener 42. Rotating the second threaded fastener 42 can adjust the gap between the screw of the second threaded fastener 42 and the second mounting base 210. Assembly and processing errors of the door body 200 will affect the sealing performance between the door body 200 and the doorway of the vacuum chamber 100. If the second threaded fastener is tightened... After part 42 is tightened against the second mounting base 210, if it is found that the door body 200 has not completely sealed the doorway of the vacuum chamber 100, then the second threaded fastener 42 is loosened to increase the gap between the second threaded fastener 42 and the second mounting base 210. The door body 200 is then pushed closer to the doorway of the vacuum chamber 100 until the door body 200 can finally seal the doorway of the vacuum chamber 100. Conversely, if the door body 200 has completely sealed the doorway of the vacuum chamber 100 but the second threaded fastener 42 has not yet contacted the second mounting base 210, then the second threaded fastener 42 is rotated to tighten against the second mounting base 210.

[0060] For example, the intermediate connector 30 is also provided with two first threaded fasteners 41 and one second threaded fastener 42. Both first threaded fasteners 41 are located on the side of the second pin 220 away from the first pin 120. At this time, the first threaded fasteners 41 can still play the aforementioned role. The difference is that the door body 200 restricts the installation space of the first threaded fasteners 41 at this position, and the first threaded fasteners 41 are not easy to disassemble or install.

[0061] In a further embodiment, such as Figure 6 As shown, the first mounting base assembly 10 includes a first mounting base 110 and a first pin 120. The first mounting base 110 is fixedly mounted in the vacuum chamber 100. The first mounting base 110 is provided with a first upper protruding connecting portion 1101 and a first lower protruding connecting portion 1102 at intervals. The first upper protruding connecting portion 1101 is provided with a second through hole 52, and the first lower protruding connecting portion 1102 is provided with a third through hole 53. The first connecting end is located between the first upper protruding connecting portion 1101 and the first lower protruding connecting portion 1102. The first connecting end is provided with a first shaft hole 71. The first pin 120 is sequentially installed through the second through hole 52, the first shaft hole 71 and the third through hole 53.

[0062] It is understandable that the first connecting end of the intermediate connector 30 is rotatably connected to the first mounting base assembly 10 about a first vertical line, which is the central axis of the first pin 120.

[0063] Among them, such as Figure 6 and Figure 8 As shown, a first stepped hole and a second stepped hole are provided in the first shaft hole 71 at intervals. A deep groove ball bearing 310 is provided in the first stepped hole, and a thrust ball needle bearing 320 is provided in the second stepped hole. The deep groove ball bearing 310 and the thrust ball needle bearing 320 are sleeved on the first pin 120 at intervals.

[0064] This invention, by setting a deep groove ball bearing 310 and a thrust ball needle bearing 320 in the intermediate connector 30, utilizes the deep groove ball bearing 310 to bear the radial force, and the thrust ball needle bearing 320 to bear the radial force and the axial force transmitted by the weight of the door 200, effectively avoiding the phenomenon of the door 200 getting stuck or difficult to push and pull during the opening and closing process, and ensuring that the hinge device can smoothly open and close the door 200.

[0065] Among them, such as Figure 6 and Figure 8 As shown, the upper end of the first pin 120 is provided with a first limiting cover 1201, and the lower end of the first pin 120 is provided with a first gasket 1202 and a first threaded positioning member 1203. The first limiting cover 1201 abuts against the first upper protruding connecting part 1101, the first gasket 1202 abuts against the first lower protruding connecting part 1102, and the first threaded positioning member 1203 passes through the first gasket 1202 and is threadedly connected to the first lower protruding connecting part 1102.

[0066] The present invention achieves axial positioning of the first pin 120 by providing a first limiting cover 1201, a first gasket 1202, and a first threaded positioning element 1203 on the first pin 120. The first threaded positioning element 1203 can be a screw or the like.

[0067] In a further embodiment, such as Figure 6 As shown, the second mounting base assembly 20 includes a second mounting base 210 and a second pin 220. The second mounting base 210 is fixedly mounted on the door body 200. The second mounting base 210 is provided with a second upper protruding connecting portion 2101 and a second lower protruding connecting portion 2102 at intervals. The second upper protruding connecting portion 2101 is provided with a fourth through hole 54, and the second lower protruding connecting portion 2102 is provided with a fifth through hole 55. The second connecting end is located between the second upper protruding connecting portion 2101 and the second lower protruding connecting portion 2102. The second connecting end is provided with a second shaft hole 72. The second pin 220 is sequentially installed through the fourth through hole 54, the second shaft hole 72 and the fifth through hole 55.

[0068] It is understood that the second connecting end of the intermediate connector 30 is rotatably connected to the second mounting base assembly 20 about the second vertical line, which is the central axis of the second pin 220.

[0069] Among them, such as Figure 6 and Figure 9 As shown, a third stepped hole is provided in the second shaft hole 72, and a one-way thrust ball bearing 330 is provided in the third stepped hole. The one-way thrust ball bearing 330 is sleeved on the second pin 220.

[0070] The present invention provides a one-way thrust ball bearing 330 in the intermediate connector 30. The one-way thrust ball bearing 330 bears the axial force transmitted by the weight of the door body 200, while avoiding direct contact between the second mounting base 210 and the intermediate connector 30. This effectively reduces the friction between the two and facilitates small-amplitude angle adjustments to the door body 200 during the closing process.

[0071] The second pin 220 has a second limiting cover 2201 at its upper end and a second gasket 2202 and a second threaded positioning member 2203 at its lower end. The second limiting cover 2201 abuts against the second upper protruding connecting part 2101, the second gasket 2202 abuts against the second lower protruding connecting part 2102, and the second threaded positioning member 2203 passes through the gasket and is threadedly connected to the second lower protruding connecting part 2102.

[0072] This invention achieves axial positioning of the second pin 220 by providing a second limiting cover 2201, a second washer 2202, and a second threaded positioning element 2203 on the second pin 220. The second threaded positioning element 2203 can be a screw or the like.

[0073] Please refer to the following: Figures 1 to 5 The vacuum coating equipment proposed in this invention includes a vacuum chamber 100, a door 200, and a hinge device as described above. The door 200 is rotatably connected to the vacuum chamber 100 via the hinge device. In addition, a sealing ring 201 is provided on the side of the door 200 facing the opening of the vacuum chamber 100 to enhance the sealing effect.

[0074] The vacuum coating equipment of this invention can be either a vertical magnetron sputtering coating equipment (PVD) or a plasma deposition equipment (RPD). This vacuum coating equipment is primarily used in the field of solar perovskite cells, and is particularly suitable for coating technologies using large-size glass substrates. Furthermore, this vacuum coating equipment can also play an important role in other coating industries, such as the manufacture of display panels.

[0075] Understandably, the door body 200 is relatively heavy, while the hinge device is relatively light. First, the hinge device is installed on the door body 200, and then the door body 200 and the hinge device are installed as a whole on the vacuum chamber 100.

[0076] In a further embodiment, such as Figure 6 As shown, the hinge device also includes a third threaded fastener 43, a fourth threaded fastener 44, a first positioning pin 91, and a second positioning pin 92. The first mounting base assembly 10 includes a first mounting base 110. The upper end of the first mounting base 110 is provided with a sixth through hole 56 and a first positioning round hole 81. The lower end of the first mounting base 110 is provided with a seventh through hole 57 and a second positioning waist hole 82. The third threaded fastener 43 passes through the sixth through hole 56 and is threadedly connected to the vacuum chamber 100. The third threaded fastener 43 and the sixth through hole 56 are in clearance fit. The fourth threaded fastener 44 passes through the seventh through hole 57 and is threadedly connected to the vacuum chamber 100. The fourth threaded fastener 44 and the seventh through hole 57 are in clearance fit. The first positioning pin 91 passes through the first positioning round hole 81 and is inserted into the vacuum chamber 100. The second positioning pin 92 passes through the second positioning waist hole 82 and is inserted into the vacuum chamber 100.

[0077] Understandably, firstly, the first positioning pin 91 is passed through the first positioning hole 81 of the first mounting base 110 and inserted into the positioning hole of the vacuum chamber 100. Ignoring other factors, the first positioning pin 91 has two degrees of freedom: one is to move along its own central axis (but the installer will not actively pull out the first positioning pin 91 after inserting it into the first positioning hole 81, so this degree of freedom is not considered), and the other is to rotate around its own central axis. Next, the second positioning pin 92 is passed through the second positioning slot 82 of the second mounting base 210. Because the elongated shape of the second positioning slot 82 makes it easier to align with the positioning hole of the vacuum chamber 100 (at this time, the intermediate connector 30, the second mounting assembly, and the door 200 have been pre-assembled; due to the large weight of the door 200, it is designed as an elongated slot), it is easier to insert the second positioning pin 92 into the positioning hole of the vacuum chamber 100. Subsequently, a third threaded fastener 43 is passed through the sixth through hole 56 and inserted into the threaded hole of the vacuum chamber 100, while a fourth threaded fastener 44 is passed through the seventh through hole 57 and inserted into the threaded hole of the vacuum chamber 100.

[0078] Due to machining errors, it cannot be guaranteed that the sixth through hole 56 and the threaded hole of the vacuum chamber 100 are perfectly aligned; the central axis of the sixth through hole 56 and the central axis of the threaded hole of the vacuum chamber 100 may not be coaxial. The third threaded fastener 43 has a clearance fit with the sixth through hole 56, providing room for movement within the sixth through hole 56 to compensate for machining errors and achieve a threaded connection. Similarly, the fourth threaded fastener 44 has a clearance fit with the seventh through hole 57, providing room for movement within the seventh through hole 57 to compensate for machining errors and achieve a threaded connection.

[0079] It should be noted that both the first locating pin 91 and the second locating pin 92 are used for pre-positioning and can be removed after the third threaded fastener 43 and the fourth threaded fastener 44 are fixed. The number of the first locating pin 91 and the second locating pin 92 can each be one, while the number of the third threaded fastener 43 and the fourth threaded fastener 44 can each be multiple. For example, the first mounting base 110 has four third threaded fasteners 43 and one first locating pin 91, with the four third threaded fasteners 43 arranged around the first locating pin 91. The second mounting base 210 has four fourth threaded fasteners 44 and one second locating pin 92, with the four fourth threaded fasteners 44 arranged around the second locating pin 92.

[0080] In a further embodiment, such as Figure 6 As shown, the hinge device also includes a fifth threaded fastener 45, a sixth threaded fastener 46, a third positioning pin 93, and a fourth positioning pin 94. The second mounting base assembly 20 includes a second mounting base 210. The upper end of the second mounting base 210 is provided with an eighth through hole 58 and a third positioning round hole 83. The lower end of the second mounting base 210 is provided with a ninth through hole 59 and a fourth positioning round hole 84. The fifth threaded fastener 45 passes through the eighth through hole 58 and is threadedly connected to the door body 200. The fifth threaded fastener 45 and the eighth through hole 58 are in clearance fit. The sixth threaded fastener 46 passes through the ninth through hole 59 and is threadedly connected to the door body 200. The sixth threaded fastener 46 and the ninth through hole 59 are in clearance fit. The third positioning pin 93 passes through the third positioning round hole 83 and is inserted into the door body 200. The fourth positioning pin 94 passes through the fourth positioning round hole 84 and is inserted into the door body 200.

[0081] Understandably, firstly, the third positioning pin 93 passes through the third positioning hole 83 of the second mounting base 210 and is inserted into the positioning hole of the door body 200. Then, the fourth positioning pin 94 passes through the fourth positioning hole 84 of the second mounting base 210 (since the hinge device is lightweight, it is unnecessary to make it an oblong hole) and is inserted into the positioning hole of the door body 200. Subsequently, the fifth threaded fastener 45 passes through the eighth through hole 58 and is inserted into the threaded hole of the door body 200. Finally, the sixth threaded fastener 46 passes through the ninth through hole 59 and is inserted into the threaded hole of the door body 200.

[0082] Due to machining errors, it cannot be guaranteed that the eighth through hole 58 and the threaded hole of the door body 200 are perfectly aligned; the central axis of the eighth through hole 58 and the central axis of the threaded hole of the door body 200 may not be coaxial. The fifth threaded fastener 45 is clearance-fitted with the eighth through hole 58, with room for movement within the eighth through hole 58 to compensate for machining errors and achieve a threaded connection. Similarly, the sixth threaded fastener 46 is clearance-fitted with the ninth through hole 59, with room for movement within the ninth through hole 59 to compensate for machining errors and achieve a threaded connection.

[0083] It should be noted that both the third locating pin 93 and the fourth locating pin 94 are used for pre-positioning and can be removed after the fifth threaded fastener 45 and the sixth threaded fastener 46 are fixed. The number of third locating pins 93 and fourth locating pins 94 can each be set to one, while the number of fifth threaded fasteners 45 and sixth threaded fasteners 46 can each be set to multiple. For example, the second mounting base 210 has four fifth threaded fasteners 45 and one third locating pin 93, with the four fifth threaded fasteners 45 arranged around the third locating pin 93. The second mounting base 210 also has four sixth threaded fasteners 46 and one fourth locating pin 94, with the four sixth threaded fasteners 46 arranged around the fourth locating pin 94.

[0084] In a further embodiment, such as Figure 6 As shown, the hinge device also includes a door opening limiter 1103, which is fixedly installed on the first mounting base assembly 10 and selectively abuts against the second mounting base assembly 20.

[0085] Understandably, the door opening limiter 1103 can be made of rubber. When the door 200 is opened to a certain angle, the second mounting bracket assembly 20 fits tightly with the door opening limiter 1103, thereby limiting the opening angle of the door 200. If not limited, the second mounting bracket assembly 20 can rotate freely around the second vertical line. In practical applications, the first mounting bracket assembly 10 includes a first mounting base 110, which is provided with a first upper protruding connecting portion 1101 and a first lower protruding connecting portion 1102 at intervals. The door opening limiter 1103 can be added only to the first upper protruding connecting portion 1101 or the first lower protruding connecting portion 1102, or it can be added to both.

[0086] To better understand the present invention, the hinge device in the preferred embodiment of the present invention will be described in its entirety below.

[0087] The hinge assembly consists of the following components: a first mounting base 110, a first pin 120, a second mounting base 210, a second pin 220, an intermediate connector 30, a deep groove ball bearing 310, a thrust ball bearing 320, a one-way thrust ball bearing 330, two first threaded fasteners 41, one second threaded fastener 42, four third threaded fasteners 43, four fourth threaded fasteners 44, four fifth threaded fasteners 45, four sixth threaded fasteners 46, a first locating pin 91, a second locating pin 92, a third locating pin 93, a fourth locating pin 94, and a door opening limiter 1103.

[0088] The first mounting base 110 has a first upper protruding connecting portion 1101 and a first lower protruding connecting portion 1102 spaced apart in the middle. The first upper protruding connecting portion 1101 has a second through hole 52, and the first lower protruding connecting portion 1102 has a third through hole 53. The upper end of the first mounting base 110 has a first positioning circular hole 81 and four sixth through holes 56, and the lower end of the first mounting base 110 has a second positioning waist hole 82 and four seventh through holes 57.

[0089] The second mounting base 210 has a second upper protruding connecting portion 2101 and a second lower protruding connecting portion 2102 spaced apart at its center. The second upper protruding connecting portion 2101 has a fourth through hole 54, and the second lower protruding connecting portion 2102 has a fifth through hole 55. The upper end of the second mounting base 210 has a third positioning circular hole 83 and four eighth through holes 58, and the lower end of the second mounting base 210 has a fourth positioning circular hole 84 and four ninth through holes 59. The second mounting base 210 has four first threaded holes 61 located in the middle between the second upper protruding connecting portion 2101 and the second lower protruding connecting portion 2102.

[0090] The intermediate connector 30 has a first connecting end and a second connecting end. The first connecting end is provided with a first shaft hole 71, and the second connecting end is provided with a second shaft hole 72. There are two first through holes 51 and a second threaded hole 62 between the first connecting end and the second connecting end.

[0091] The upper end of the first pin 120 is provided with a first limiting cover 1201, and the lower end of the first pin 120 is provided with a first washer 1202 and a first threaded positioning element 1203. The upper end of the second pin 220 is provided with a second limiting cover 2201, and the lower end of the second pin 220 is provided with a second washer 2202 and a second threaded positioning element 2203.

[0092] When assembling the hinge assembly, firstly, the deep groove ball bearing 310 and the thrust ball bearing 320 are placed into the first shaft hole 71 of the intermediate connector 30, and then the one-way thrust ball bearing 330 is placed into the second shaft hole 72 of the intermediate connector 30. Next, the first pin 120 is sequentially passed through the second through hole 52 of the first upper protruding connecting part 1101, the first shaft hole 71 of the intermediate connector 30, and the third through hole 53 of the first lower protruding connecting part 1102. Similarly, the second pin 220 is sequentially passed through the fourth through hole 54 of the second upper protruding connecting part 2101, the second shaft hole 72 of the intermediate connector 30, and the fifth through hole 55 of the second lower protruding connecting part 2102. Subsequently, two first threaded fasteners 41 are respectively inserted into the two first through holes 51 of the intermediate connector 30 and connected to the corresponding two first threaded holes 61 of the second mounting base 210 by threads. Then, the second threaded fastener 42 is inserted into the second threaded hole 62 of the intermediate connector 30. Finally, the door opening limiter 1103 is fixedly installed on the first upper protruding connecting part 1101.

[0093] During the installation of the hinge assembly and the door body 200, firstly, the third positioning pin 93 is passed through the third positioning hole 83 and inserted into the positioning hole of the door body 200. Similarly, the fourth positioning pin 94 is passed through the fourth positioning hole 84 and inserted into the positioning hole of the door body 200. Next, the four fifth threaded fasteners 45 are passed through the corresponding eighth through holes 58 of the second mounting base 210 and tightened into the threaded holes of the door body 200. Similarly, the four sixth threaded fasteners 46 are passed through the corresponding ninth through holes 59 of the second mounting base 210 and tightened into the threaded holes of the door body 200.

[0094] During the installation of the hinge device and door 200 into the vacuum chamber 100, firstly, the first positioning pin 91 is passed through the first positioning hole 81 and inserted into the positioning hole of the vacuum chamber 100. Similarly, the second positioning pin 92 is passed through the second positioning hole 82 and inserted into the positioning hole of the vacuum chamber 100. Next, four third threaded fasteners 43 are passed through the corresponding sixth through holes 56 of the first mounting base 110 and tightened into the threaded holes of the vacuum chamber 100. Similarly, four fourth threaded fasteners 44 are passed through the corresponding seventh through holes 57 of the first mounting base 110 and tightened into the threaded holes of the vacuum chamber 100.

[0095] During the closing process, when the door body 200 has not yet contacted the vacuum chamber 100, the first connecting end of the intermediate connecting member 30 is rotated around the first pin 120 (the position of the rotation axis remains fixed), and the door body 200 and the second mounting base 210 are rotated around the second pin 220.

[0096] In addition, the intermediate connecting piece 30 is equipped with a deep groove ball bearing 310, a thrust ball needle bearing 320 and a one-way thrust ball bearing 330. The three types of bearings bear the loads in various directions caused by the weight of the door body 200, so that the door body 200 will not jam or be difficult to push or pull when opening and closing.

[0097] Production line testing has shown that the hinge device of this invention opens and closes the door 200 extremely smoothly under heavy loads, without jamming or difficulty in pushing or pulling. When closing the door 200, the hinge device can make small-amplitude angle adjustments to the door 200, and the adjustment angle is controlled within a limited range, thereby adjusting the door 200 to a state parallel to the opening, effectively preventing the near-end sealing ring 201 of the door 200 from being damaged by compression first.

[0098] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A hinge device, characterized in that, include: The first mounting bracket assembly (10) is used to fix the vacuum chamber (100) to the side where the door is located; Intermediate connector (30), the first connecting end of the intermediate connector (30) is rotatably connected to the first mounting base assembly (10) about a first vertical line; The second mounting base assembly (20) is rotatably connected to the second mounting base assembly (20) about the second vertical line at the second connecting end of the intermediate connector (30). The second mounting base assembly (20) is used to support the door body (200). The first threaded fastener (41) has a first through hole (51) in the intermediate connector (30) and a first threaded hole (61) in the second mounting base assembly (20). The first threaded fastener (41) passes through the first through hole (51) and is threadedly connected to the first threaded hole (61). The first threaded fastener (41) and the first through hole (51) are in clearance fit.

2. The hinge device according to claim 1, characterized in that, The intermediate connector (30) is provided with a limiting member, which is located between the first connecting end and the second connecting end, and is used to selectively abut against the second mounting base assembly (20).

3. The hinge device according to claim 2, characterized in that, The intermediate connector (30) is provided with a second threaded hole (62), and the limiting member is a second threaded fastener (42), which is installed through the second threaded hole (62).

4. The hinge device according to claim 1, characterized in that, The first threaded fastener (41) is disposed between the first connecting end and the second connecting end.

5. The hinge device according to claim 1, characterized in that, The first mounting base assembly (10) includes a first mounting base (110) and a first pin (120). The first mounting base (110) is fixedly mounted on the vacuum chamber (100). The first mounting base (110) is provided with a first upper protruding connecting portion (1101) and a first lower protruding connecting portion (1102) spaced apart. The first upper protruding connecting portion (1101) is provided with a second through hole (52), and the first lower protruding connecting portion (1102) is provided with a third through hole (53). The first connecting end is located between the first upper protruding connecting portion (1101) and the first lower protruding connecting portion (1102). The first connecting end is provided with a first shaft hole (71). The first pin (120) is sequentially installed through the second through hole (52), the first shaft hole (71), and the third through hole (53).

6. The hinge device according to claim 5, characterized in that, The first shaft hole (71) is provided with a first stepped hole and a second stepped hole at intervals. The first stepped hole is provided with a deep groove ball bearing (310), and the second stepped hole is provided with a thrust ball needle bearing (320). The deep groove ball bearing (310) and the thrust ball needle bearing (320) are sleeved on the first pin (120) at intervals.

7. The hinge device according to claim 5, characterized in that, The first pin (120) has a first limiting cover (1201) at its upper end and a first gasket (1202) and a first threaded positioning member (1203) at its lower end. The first limiting cover (1201) abuts against the first upper protruding connecting part (1101), the first gasket (1202) abuts against the first lower protruding connecting part (1102), and the first threaded positioning member (1203) passes through the first gasket (1202) and is threadedly connected to the first lower protruding connecting part (1102).

8. The hinge device according to claim 1, characterized in that, The second mounting base assembly (20) includes a second mounting base (210) and a second pin (220). The second mounting base (210) is fixedly installed on the door body (200). The second mounting base (210) is provided with a second upper protruding connecting portion (2101) and a second lower protruding connecting portion (2102) at intervals. The second upper protruding connecting portion (2101) is provided with a fourth through hole (54), and the second lower protruding connecting portion (2102) is provided with a fifth through hole (55). The second connecting end is located between the second upper protruding connecting portion (2101) and the second lower protruding connecting portion (2102). The second connecting end is provided with a second shaft hole (72). The second pin (220) is sequentially installed through the fourth through hole (54), the second shaft hole (72), and the fifth through hole (55).

9. The hinge device according to claim 8, characterized in that, The second shaft hole (72) is provided with a third stepped hole, and a one-way thrust ball bearing (330) is provided in the third stepped hole. The one-way thrust ball bearing (330) is sleeved on the second pin (220).

10. The hinge device according to claim 8, characterized in that, The second pin (220) has a second limiting cover (2201) at its upper end and a second gasket (2202) and a second threaded positioning member (2203) at its lower end. The second limiting cover (2201) abuts against the second upper protruding connecting part (2101), the second gasket (2202) abuts against the second lower protruding connecting part (2102), and the second threaded positioning member (2203) passes through the second gasket (2202) and is threadedly connected to the second lower protruding connecting part (2102).

11. A vacuum coating apparatus, characterized in that, It includes a vacuum chamber (100), a door (200), and a hinge device as described in any one of claims 1-10, wherein the door (200) is rotatably connected to the vacuum chamber (100) via the hinge device.

12. The vacuum coating equipment as described in claim 11, characterized in that, The hinge device further includes a third threaded fastener (43), a fourth threaded fastener (44), a first positioning pin (91), and a second positioning pin (92). The first mounting base assembly (10) includes a first mounting base (110). The upper end of the first mounting base (110) is provided with a sixth through hole (56) and a first positioning round hole (81). The lower end of the first mounting base (110) is provided with a seventh through hole (57) and a second positioning waist hole (82). The third threaded fastener (43) passes through the sixth through hole (56) and is threadedly connected to the vacuum cavity. The third threaded fastener (43) is clearance-fitted with the sixth through hole (56), the fourth threaded fastener (44) passes through the seventh through hole (57) and is threadedly connected to the vacuum chamber (100), the fourth threaded fastener (44) is clearance-fitted with the seventh through hole (57), the first positioning pin (91) passes through the first positioning round hole (81) and is inserted into the vacuum chamber (100), and the second positioning pin (92) passes through the second positioning waist hole (82) and is inserted into the vacuum chamber (100).

13. The vacuum coating equipment as described in claim 11, characterized in that, The hinge device further includes a fifth threaded fastener (45), a sixth threaded fastener (46), a third locating pin (93), and a fourth locating pin (94). The second mounting base assembly (20) includes a second mounting base (210). The upper end of the second mounting base (210) is provided with an eighth through hole (58) and a third locating round hole (83). The lower end of the second mounting base (210) is provided with a ninth through hole (59) and a fourth locating round hole (84). The fifth threaded fastener (45) passes through the eighth through hole (58) and is then threaded. The fifth threaded fastener (45) is fitted with the eighth through hole (58) with a clearance fit to the door body (200). The sixth threaded fastener (46) passes through the ninth through hole (59) and is threadedly connected to the door body (200). The sixth threaded fastener (46) is fitted with the ninth through hole (59) with a clearance fit to the door body (200). The third positioning pin (93) passes through the third positioning round hole (83) and is inserted into the door body (200). The fourth positioning pin (94) passes through the fourth positioning round hole (84) and is inserted into the door body (200).

14. The vacuum coating equipment as described in claim 11, characterized in that, The hinge device further includes a door opening limiter (1103), which is fixedly installed on the first mounting base assembly (10) and selectively abuts against the second mounting base assembly (20).

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