Material microscopic three-dimensional model construction device and method based on two-stage driving technology

Abstract

The invention relates to the technical field of material imaging equipment, and discloses a material microscopic three-dimensional model construction device and method based on a two-stage driving technology. The grinding and polishing mechanical arm second-stage driving device comprises a driving displacement output structure and an external supporting mechanism, a driving power generation unit is arranged in the driving displacement output structure, the bottom of the driving power generation unit is connected with a center force application platform, and the bottom of the center force application platform is sleeved with a nut and a floating connecting piece. According to the invention, two-dimensional images of a sample are acquired layer by layer based on a two-stage driving grinding and polishing process, and superposition software superposes all the images to generate a microscopic three-dimensional model of the sample, so that compared with the prior art, the vertical displacement stroke of equipment is 2 microns or above; the vertical movement stroke of the material sample in the grinding and polishing process can achieve the stroke below 10 microns which cannot be achieved by an original mechanical structure, and the precision of a constructed material microscopic three-dimensional model is further improved.

Description

Technical Field

[0001] This invention belongs to the field of materials imaging equipment technology, specifically, it relates to a device and method for constructing a microscopic three-dimensional model of materials based on two-stage driving technology. Background Technology

[0002] Three-dimensional characterization of the microstructure of material samples is of great significance in new materials research. A common method for constructing three-dimensional microscopic models of materials involves repeatedly polishing the sample to expose its internal structure, then using a microscope to acquire two-dimensional images of the polished surface after each polishing step, and finally using overlay software to construct the microscopic three-dimensional model. When using this method, to ensure the accuracy of the constructed microscopic model, the distance between the polished surfaces acquired during each two-dimensional image acquisition must be controlled within 250 μm. However, manually polishing materials to construct microscopic models is time-consuming, inefficient, and difficult to guarantee accuracy.

[0003] A search revealed that the invention patent with application number 202410327411.5 discloses an image acquisition method for an automatic grinding and polishing metallographic imaging device. This method can realize continuous and automated three-dimensional imaging of metallographic samples through grinding and polishing, replacing manual operation. It can effectively reduce labor intensity, improve the grinding, polishing and imaging quality and stability of metallographic samples, and increase the automation level and work efficiency of metallographic sample preparation.

[0004] However, through exploration, the inventors have discovered that this technical solution still has at least the following defects: due to its own structural limitations, the minimum displacement of the device is 10μm, which makes the constructed material micro-model unsatisfactory in terms of the internal microstructure of materials with small crystals and an average grain size of about 10μm or less, and it cannot accurately reproduce the internal three-dimensional structure of the material.

[0005] In view of this, the present invention proposes a material microscopic three-dimensional model construction device and method based on two-stage drive technology. Based on the technology disclosed in the invention patent automatic grinding and polishing metallographic imaging device image acquisition method, some mechanical structures are improved and a construction method for improving the accuracy of material microscopic models is given based on the improved equipment. Summary of the Invention

[0006] To solve the above-mentioned technical problems, the basic concept of the technical solution adopted by the present invention is as follows:

[0007] A material microscopic three-dimensional model construction device based on two-stage drive technology includes a second-stage drive device for a grinding and polishing robotic arm, wherein the second-stage drive device for the grinding and polishing robotic arm includes a drive displacement output structure and an external support mechanism.

[0008] The drive displacement output structure is equipped with a drive power generation unit. The bottom of the drive power generation unit is connected to a central force application platform. The bottom of the central force application platform is fitted with a nut and a floating connector. The nut is located above the floating connector. The bottom of the floating connector is provided with a U-shaped fixing member. The floating connector is embedded in the U-shaped opening of the U-shaped fixing member.

[0009] The external support mechanism includes a drive unit mounting plate, an I-beam, an intermediate plate, a three-jaw cylinder fixing plate, a guide rod, and a T-shaped connector. The guide rod and the T-shaped connector are arranged together between the drive unit mounting plate, the intermediate plate, and the three-jaw cylinder fixing plate, and the guide rod and the T-shaped connector are evenly distributed in a circle with the center line of the drive unit mounting plate, the intermediate plate, and the three-jaw cylinder fixing plate as the reference.

[0010] In a preferred embodiment of the present invention, the driving power generating unit includes a piezoelectric brake and a flexible hinge. The driving power generating unit uses a standardized piezoelectric brake to provide micron-level movement power, and the flexible hinge serves as the power transmission mechanism of the piezoelectric brake.

[0011] In a preferred embodiment of the present invention, the upper part of the drive displacement output structure is connected to the drive device mounting plate in the external support mechanism, and the bottom of the drive displacement output structure is connected to the three-jaw cylinder fixing plate in the external support mechanism.

[0012] In a preferred embodiment of the present invention, the I-beam is evenly distributed circumferentially between the mounting plate and the intermediate plate, with the center line connecting the driving device mounting plate and the intermediate plate as a reference, and the two ends of the I-beam are fixedly connected to the opposite side of the mounting plate and the intermediate plate, respectively.

[0013] In a preferred embodiment of the present invention, the T-shaped connector is evenly installed circumferentially on the drive shaft mounting plate and the intermediate plate. The guide rod passes through the through hole of the T-shaped connector on the drive device mounting plate and the intermediate plate, and the guide rod is slidably disposed in the through hole. The end of the guide rod is connected to the three-jaw cylinder fixing plate, and the guide rod and the three-jaw cylinder fixing plate move up and down synchronously.

[0014] In a preferred embodiment of the present invention, a three-jaw cylinder is installed at the bottom of the three-jaw cylinder fixing plate, a laser sensor connector is connected below the three-jaw cylinder fixing plate, a vibration isolation pad is connected to the end of the laser sensor connector, and a laser sensor is connected to the side of the vibration isolation pad.

[0015] In a preferred embodiment of the present invention, a first-stage drive device for the grinding and polishing robotic arm is also included. The first-stage drive device for the grinding and polishing robotic arm includes a first-stage vertical displacement servo motor drive. The bottom of the first-stage vertical displacement servo motor drive is connected to a shaft end baffle. The second-stage drive device for the grinding and polishing robotic arm is connected to the shaft end baffle through a drive device mounting plate, thereby realizing the mechanical connection between the first and second-stage drive devices of the grinding and polishing robotic arm. A force sensor is provided at the connection between the drive device mounting plate and the shaft end baffle.

[0016] In a preferred embodiment of the present invention, the device body and the material sample are also included. The device body includes a horizontal rotary servo motor, a polishing disc and a sample photography area, and the material sample is connected to a three-jaw cylinder.

[0017] In a preferred embodiment of the present invention, the polishing disc is positioned directly below the second-stage drive device of the polishing robot arm, and the sample photography area is equipped with a metallographic microscope and is located on the side of the second-stage drive device of the polishing robot arm.

[0018] A method for constructing a microscopic three-dimensional model of materials based on two-stage driving technology includes the following steps:

[0019] S1: The material sample is moved to the polishing disc under the monitoring of the laser sensor by the first-stage drive device and the second-stage drive device of the polishing robot arm to complete the polishing process.

[0020] S2: The first and second stage drive devices of the grinding and polishing robot arm are controlled by PLC to perform the cyclic grinding and polishing process of the material sample. After completing all the grinding and polishing processes required to acquire a two-dimensional image each time, the material sample is clamped to the sample photography point by a horizontal rotating servo motor to acquire its two-dimensional image.

[0021] S3: Generate a 3D model by overlaying all the acquired 2D images using overlay software.

[0022] Compared with the prior art, the present invention has the following advantages:

[0023] This invention is based on a two-stage driven grinding and polishing process to acquire two-dimensional images of the sample layer by layer. The software then overlays all the images to generate a microscopic three-dimensional model of the sample. Compared with the prior art, this invention achieves a vertical displacement stroke of 2μm or more, enabling the material sample to achieve a vertical movement stroke of less than 10μm during the grinding and polishing process, which is impossible for the original mechanical structure. The accuracy of the constructed microscopic three-dimensional model of the material is further improved, which is beneficial to subsequent material research.

[0024] The specific embodiments of the present invention will now be described in further detail with reference to the accompanying drawings. Attached Figure Description

[0025] In the attached diagram:

[0026] Figure 1 Schematic diagrams of various combinations of the piezoelectric actuator and flexible hinge of the present invention;

[0027] Figure 2 This is a schematic diagram of the drive displacement output mechanism of the present invention;

[0028] Figure 3 This is a schematic diagram of the external support mechanism structure of the present invention;

[0029] Figure 4 This is an exploded view of the external support mechanism of the present invention;

[0030] Figure 5 This is a schematic diagram of the device structure used in the driving method of the present invention;

[0031] Figure 6 Microscopic three-dimensional model of ceramic capacitor synthesized using the two-stage driving method;

[0032] Figure 7 A microscopic three-dimensional model of pure iron synthesized by applying a two-stage driving method.

[0033] In the diagram: 1. Drive displacement output mechanism; 1.1. Drive power generation unit; 1.11. Piezoelectric brake; 1.12. Flexible hinge; 1.2. Central force application platform; 1.3. Nut; 1.4. Floating connector; 1.5. U-shaped fixing component;

[0034] 2. External support mechanism; 2.1. Drive unit mounting plate; 2.2. I-beam; 2.3. Intermediate plate; 2.4. Three-jaw cylinder fixing plate; 2.5. Guide rod; 2.6. T-shaped connector;

[0035] 3. Shaft end baffle; 4. Force sensor; 5. Laser sensor connector; 6. Three-jaw cylinder; 7. Vibration isolation pad; 8. Laser sensor; 9. Material sample; 10. First-stage vertical displacement servo motor drive; 11. Horizontal rotation servo motor; 12. Grinding and polishing disc; 13. Sample photography area. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the accompanying drawings. The following embodiments are used to illustrate the present invention.

[0037] like Figures 1 to 5 As shown

[0038] A material microscopic three-dimensional model construction device based on two-stage drive technology includes a second-stage drive device for a grinding and polishing robotic arm. The second-stage drive device for the grinding and polishing robotic arm includes a drive displacement output structure 1 and an external support mechanism 2.

[0039] The drive displacement output structure 1 is equipped with a drive power generation unit 1.1. The bottom of the drive power generation unit 1.1 is connected to a central force application platform 1.2. The bottom of the central force application platform 1.2 is fitted with a nut 1.3 and a floating connector 1.4. The nut 1.3 is located above the floating connector 1.4. The bottom of the floating connector 1.4 is provided with a U-shaped fixing part 1.5. The floating connector 1.4 is embedded in the U-shaped opening of the U-shaped fixing part 1.5.

[0040] The external support mechanism 2 includes a drive unit mounting plate 2.1, an I-beam 2.2, an intermediate plate 2.3, a three-jaw cylinder fixing plate 2.4, a guide rod 2.5, and a T-shaped connector 2.6. The guide rod 2.5 and the T-shaped connector 2.6 are arranged together between the drive unit mounting plate 2.1, the intermediate plate 2.3, and the three-jaw cylinder fixing plate 2.4. The guide rod 2.5 and the T-shaped connector 2.6 are evenly distributed circumferentially with reference to the line connecting the centers of the drive unit mounting plate 2.1, the intermediate plate 2.3, and the three-jaw cylinder fixing plate 2.4.

[0041] Furthermore, the drive power generating unit 1.1 includes a piezoelectric brake 1.11 and a flexible hinge 1.12. The drive power generating unit 1.1 uses a standardized piezoelectric brake 1.11 to provide micron-level movement power, and the flexible hinge 1.12 serves as the power transmission mechanism for the piezoelectric brake 1.11. In practical applications, the layout of the piezoelectric brake 1.11 on the central force application platform 1.2 is adjusted according to the actual load size (for example, multiple sets of drive units are distributed in a circle with the center as the reference, or three sets of drive units are arranged in parallel at equal intervals).

[0042] Furthermore, the upper part of the drive displacement output structure 1 is connected to the drive device mounting plate 2.1 in the external support mechanism 2, and the bottom of the drive displacement output structure 1 is connected to the three-jaw cylinder fixing plate 2.4 in the external support mechanism 2, thereby realizing the fixed connection between the drive displacement output mechanism and the external support mechanism. The I-beam 2.2 is evenly distributed in a circle between the mounting plate 2.1 and the intermediate plate 2.3 with the center line connecting the drive device mounting plate 2.1 and the intermediate plate 2.3 as the reference. The two ends of the I-beam 2.2 are fixedly connected to the opposite side of the mounting plate 2.1 and the intermediate plate 2.3, respectively. The T-shaped connector 2.6 is evenly installed in a circle on the drive shaft mounting plate 2.1 and the intermediate plate 2.3. The guide rod 2.5 passes through the through hole of the T-shaped connector 2.6 on the drive device mounting plate 2.1 and the intermediate plate 2.3, and the guide rod 2.5 is slidably set in the through hole. The end of the guide rod 2.5 is connected to the three-jaw cylinder fixing plate 2.4. The guide rod 2.5 and the three-jaw cylinder fixing plate 2.4 move up and down synchronously.

[0043] Furthermore, a three-jaw cylinder 6 is mounted on the bottom of the three-jaw cylinder mounting plate 2.4, and a laser sensor connector 5 is connected below the three-jaw cylinder mounting plate 2.4. A vibration isolation pad 7 is connected to the end of the laser sensor connector 5, and a laser sensor 8 is connected to the side of the vibration isolation pad 7. The system also includes a first-stage drive device for the grinding and polishing robotic arm, comprising a first-stage vertical displacement servo motor drive 10. A shaft end baffle 3 is connected to the bottom of the first-stage vertical displacement servo motor drive 10. The second-stage drive device for the grinding and polishing robotic arm is connected to the shaft via a drive device mounting plate 2.1. The end baffle 3 is connected to realize the mechanical connection between the first and second stage drive devices of the grinding and polishing robot arm. A force sensor 4 is set at the connection between the drive device mounting plate 2.1 and the shaft end baffle 3. The device also includes the main body of the equipment and the material sample 9. The main body of the equipment includes a horizontal rotation servo motor 11, a grinding and polishing disc 12 and a sample photography area 13. The material sample 9 is connected to a three-jaw cylinder 6. The grinding and polishing disc 12 is set directly below the second stage drive device of the grinding and polishing robot arm. The sample photography area 13 is a metallographic microscope and is located on the side of the second stage drive device of the grinding and polishing robot arm.

[0044] Example 1:

[0045] The driving power generation unit 1.1 of the second-stage drive device of the grinding and polishing robotic arm is a piezoelectric brake 1.11. It is cylindrical, 179mm long and 20mm in diameter, and can output moving power and finely adjust displacement. The piezoelectric brake 1.11 has a maximum stroke of 240μm, a positioning accuracy of 0.1nm in open-loop control, and can withstand 800N force.

[0046] In the selection of the piezoelectric drive power transmission mechanism, the flexible hinge 1.12 is suitable as the power transmission mechanism of the piezoelectric brake 1.11 because it has high positioning accuracy, no mechanical friction, small size and shock absorption. Therefore, in this embodiment, the flexible hinge 1.12 is selected to cooperate with the piezoelectric brake 1.11 to realize micron-level movement transmission. The selected piezoelectric brake 1.11 and flexible hinge 1.22 form the drive power generation unit 1.1. In this embodiment, two sets of this unit 1.1 are used.

[0047] Furthermore, in this embodiment, two sets of driving power generating units 1.1 are arranged in parallel on the central force application platform 1.2 as follows: Figure 2 As shown, the laser sensor 8 is equipped with a reference distance of 70mm, a measurement range of ±10mm, a linearity of ±2.0μm, and a resolution of ±0.25μm. The three-jaw cylinder 6 is installed at the bottom of the three-jaw cylinder fixing plate 2.4.

[0048] The microscopic three-dimensional model of ceramic capacitor material sample 9 was constructed using a method based on two-stage driving technology. The detailed steps are as follows:

[0049] S1: Manually control the three-jaw cylinder 6 to hold the ceramic capacitor material sample 9 (hereinafter referred to as material sample 9) to be polished to construct a micro three-dimensional model and place it on the polishing disc 12 through the human-computer interaction interface;

[0050] S2: Manually control the first-stage vertical displacement servo motor drive 10 of the grinding and polishing robotic arm through the human-machine interface to move the material sample 9 to a higher position on its lower surface than the grinding and polishing disc 12 and stop it. Set this position as a reference position, which will be used as the reference position for the material sample 9 to move up to the grinding and polishing disc 12 to change the station after each grinding and polishing process, and for the cleaning translation and rotation station.

[0051] S3: Manually control the first-stage vertical displacement servo motor drive 10 of the grinding and polishing robotic arm through the human-machine interface to move the material sample 9 to contact the surface of the grinding and polishing disc 12. When the force sensor 4 provides feedback, the system automatically records the distance value between the lower surface of the laser sensor 8 and the lower surface of the material sample 9. After the grinding and polishing starts, subtract this distance from the data monitored by the laser sensor 8 to allow the system to determine the position of the lower surface of the material sample 9 from the grinding and polishing disc 12.

[0052] S4: Start the pre-programmed PLC control program. The PLC automatically controls the first-stage vertical displacement servo motor to drive the clamping material sample 9 to move to the preset first reference position.

[0053] S5: The PLC automatically drives the first-stage vertical displacement servo motor 10 to move the clamped material sample 9 into the measurable range of the laser sensor 8 and start working. Under the real-time monitoring of the laser sensor 8, it moves down to stop 5mm away from the surface of the polishing disc 12 on the sample surface to be polished.

[0054] S6: Under the real-time monitoring of the laser sensor 8, the first-stage vertical displacement servo motor drive 10 moves the clamped material sample 9 down to 20μm on the surface of the grinding and polishing disc 12 and stops, and the grinding and polishing disc 12 starts.

[0055] S7: The drive power generation unit 1.1 in the second-level drive device of PLC automatic control transmits the micron-level movement generated by the piezoelectric brake 1.11 to the external support mechanism 2 through the central force application platform 1.2. Then, the material sample 9 clamped below is driven by the three-jaw cylinder fixing plate 2.4 connected to the bottom of the external support mechanism 2. The force sensor 4 stops after receiving feedback of the force.

[0056] S8: Under the real-time monitoring of the laser sensor 8 and the real-time feedback of the force sensor 4, the piezoelectric actuator 1.11 moves the lower surface of the material sample 9 by 4μm to complete the polishing. Thereafter, the downward micro-movement stroke of the material sample 9 during each polishing process is set to 4μm.

[0057] S9: After each grinding and polishing process is completed, the PLC automatically controls the grinding and polishing disc 12 to stop rotating and controls the first-stage vertical displacement servo motor drive 10 to move the material sample 9 to the first reference position for cleaning, and completes the replacement of the grinding and polishing disc 12.

[0058] S10: The PLC automatic control equipment cycles through S5 to S8 until all processes required to acquire a two-dimensional structural image of the polished surface of a material sample 9 are completed.

[0059] S11: Whenever the process required to acquire a two-dimensional structural image is completed, the PLC automatically controls the horizontal rotation servo motor 11 to rotate the material sample 9 that has completed the predetermined process to the sample imaging point 13 (metallurgical microscope) to acquire the structural image of the two-dimensional material sample 9.

[0060] S12: The PLC automatic control equipment cycles through S5 to S810 until the 50 two-dimensional structural image acquisitions required to construct the microscopic three-dimensional model of material sample 9 are completed according to the actual research needs, and then terminates. Finally, the microscopic three-dimensional model of ceramic capacitor material sample 9 is generated by superimposing all the two-dimensional structural images through the superposition software.

[0061] Example 2:

[0062] The microscopic three-dimensional model of pure iron material sample 9 was constructed in this embodiment. Based on the characteristics of different materials in sample 9, the equipment used was changed from that in Embodiment 1 only to a cylindrical piezoelectric actuator 1.11 with a length of 28 mm and a diameter of 10 mm. All other conditions remained unchanged. After the change, the maximum stroke of the piezoelectric actuator 1.11 became 270 μm, and it continued to be used. Figure 5 A microscopic three-dimensional model of pure iron material sample 9 was constructed using the complete machine equipment. The detailed steps were the same as those described in Example 1, and will not be repeated here.

[0063] The detailed description of this invention and the method for constructing microscopic three-dimensional models of material samples based on this invention is based on embodiments, but it should be understood that this invention is not limited to these specific embodiments. Those skilled in the art can make various modifications or improvements to the invention based on the content disclosed in this specification, and all such modifications or improvements should be included within the scope of protection of the claims of this invention.

Claims

1. A material microscopic three-dimensional model construction device based on two-stage drive technology, comprising a second-stage drive device for a grinding and polishing robotic arm, wherein the second-stage drive device for the grinding and polishing robotic arm comprises a drive displacement output structure (1) and an external support mechanism (2), characterized in that: The drive displacement output structure (1) is provided with a drive power generation unit (1.1). The drive power generation unit (1.1) is connected to a central force application platform (1.2) at its bottom. The central force application platform (1.2) is fitted with a nut (1.3) and a floating connector (1.4) at its bottom. The nut (1.3) is located above the floating connector (1.4). The floating connector (1.4) is provided with a U-shaped fixing member (1.5) at its bottom. The floating connector (1.4) is embedded in the U-shaped opening of the U-shaped fixing member (1.5). The external support mechanism (2) includes a drive device mounting plate (2.1), an I-beam (2.2), an intermediate plate (2.3), a three-jaw cylinder fixing plate (2.4), a guide rod (2.5), and a T-shaped connector (2.6). The guide rod (2.5) and the T-shaped connector (2.6) are arranged together between the drive device mounting plate (2.1), the intermediate plate (2.3), and the three-jaw cylinder fixing plate (2.4). The guide rod (2.5) and the T-shaped connector (2.6) are evenly distributed in a circle with the center line of the drive device mounting plate (2.1), the intermediate plate (2.3), and the three-jaw cylinder fixing plate (2.4) as the reference.

2. The material microscopic three-dimensional model construction device based on two-stage driving technology according to claim 1, characterized in that, The drive power generating unit (1.1) includes a piezoelectric brake (1.11) and a flexible hinge (1.12). The drive power generating unit (1.1) uses a standardized piezoelectric brake (1.11) to provide micron-level movement power, and the flexible hinge (1.12) serves as the power transmission mechanism for the piezoelectric brake (1.11).

3. The material microscopic three-dimensional model construction device based on two-stage driving technology according to claim 1, characterized in that, The upper part of the drive displacement output structure (1) is connected to the drive device mounting plate (2.1) in the external support mechanism (2), and the bottom part of the drive displacement output structure (1) is connected to the three-jaw cylinder fixing plate (2.4) in the external support mechanism (2).

4. The material microscopic three-dimensional model construction device based on two-stage driving technology according to claim 1, characterized in that, The I-beam (2.2) is evenly distributed in a circle between the mounting plate (2.1) and the intermediate plate (2.3) with the center line of the drive device mounting plate (2.1) and the intermediate plate (2.3) as the reference. The two ends of the I-beam (2.2) are fixedly connected to the opposite side of the mounting plate (2.1) and the intermediate plate (2.3) respectively.

5. The material microscopic three-dimensional model construction device based on two-stage driving technology according to claim 1, characterized in that, The T-shaped connector (2.6) is evenly installed in a circular pattern on the drive shaft mounting plate (2.1) and the intermediate plate (2.3). The guide rod (2.5) passes through the through hole of the T-shaped connector (2.6) on the drive device mounting plate (2.1) and the intermediate plate (2.3), and the guide rod (2.5) is slidably disposed in the through hole. The end of the guide rod (2.5) is connected to the three-jaw cylinder fixing plate (2.4). The guide rod (2.5) and the three-jaw cylinder fixing plate (2.4) move up and down synchronously.

6. The material microscopic three-dimensional model construction device based on two-stage driving technology according to claim 1, characterized in that, A three-jaw cylinder (6) is installed at the bottom of the three-jaw cylinder fixing plate (2.4). A laser sensor connector (5) is connected below the three-jaw cylinder fixing plate (2.4). A vibration isolation pad (7) is connected to the end of the laser sensor connector (5). A laser sensor (8) is connected to the side of the vibration isolation pad (7).

7. The material microscopic three-dimensional model construction device based on two-stage driving technology according to claim 1, characterized in that, It also includes a first-stage drive device for the grinding and polishing robotic arm, which includes a first-stage vertical displacement servo motor drive (10). The bottom of the first-stage vertical displacement servo motor drive (10) is connected to a shaft end baffle (3). The second-stage drive device for the grinding and polishing robotic arm is connected to the shaft end baffle (3) through a drive device mounting plate (2.1) to realize the mechanical connection between the first and second-stage drive devices of the grinding and polishing robotic arm. A force sensor (4) is provided at the connection between the drive device mounting plate (2.1) and the shaft end baffle (3).

8. The material microscopic three-dimensional model construction device based on two-stage driving technology according to claim 6, characterized in that, It also includes the main body of the equipment and the material sample (9). The main body of the equipment includes a horizontal rotary servo motor (11), a polishing disc (12) and a sample photography area (13). The material sample (9) is connected to a three-jaw cylinder (6).

9. The material microscopic three-dimensional model construction device based on two-stage driving technology according to claim 8, characterized in that, The polishing disc (12) is located directly below the second-stage drive device of the polishing robot arm. The sample photography area (13) is a metallographic microscope and is located on the side of the second-stage drive device of the polishing robot arm.

10. A method for constructing a material microscopic three-dimensional model based on two-stage driving technology according to any one of claims 1-9, characterized in that, Includes the following steps: S1: The material sample (9) is moved down to the polishing disc (12) under the monitoring of the laser sensor (8) by the first-stage drive device and the second-stage drive device of the polishing robot arm to complete the polishing process; S2: The first and second level drive devices of the grinding and polishing robot arm are controlled by PLC to perform the cyclic grinding and polishing process of the material sample (9). After completing all the grinding and polishing processes required to collect a two-dimensional image each time, the material sample (9) is clamped by the horizontal rotation servo motor (11) to the sample photography location (13) to collect its two-dimensional image. S3: Generate a 3D model by overlaying all the acquired 2D images using overlay software.

Images