Vacuum sample exchange system and method for a secondary ion mass spectrometer

Abstract

The application discloses a vacuum sample changing system and method for a secondary ion mass spectrometer. The vacuum sample changing system comprises a main box body, a sample changing box body, a sample box body, a first driving unit, a second driving unit and a third driving unit. The main box body is formed with an analysis cavity. The sample changing box body is formed with a sample changing cavity. The sample box body is formed with a sample cavity. The output end of the first driving unit extends into the sample cavity and is provided with a transfer target holder. The first driving unit is used for driving the transfer target holder to move between the sample cavity and the sample changing cavity. The second driving unit is arranged in the analysis cavity and is provided with a test target holder at the output end. The second driving unit is used for driving the test target holder to move. The output end of the third driving unit extends into the sample changing cavity and is provided with a clamping mechanism. The third driving unit is used for driving the clamping mechanism to move between the sample changing cavity and the analysis cavity so as to take and place samples relative to a predetermined position and a set position through the clamping mechanism. The application can significantly improve the sample target sample changing operation efficiency, reduce the test process time, and simultaneously realize automatic secondary ion mass spectrum analysis of the sample target.

Description

Technical Field

[0001] This application relates to the field of secondary ion mass spectrometry instrument application technology, specifically to a vacuum sample changing system and method for a secondary ion mass spectrometer. Background Technology

[0002] Secondary ion mass spectrometry (SIMS) is a highly sensitive, high spatial resolution surface analysis technique. It works by bombarding the sample surface with a high-energy ion beam (primary ions), causing atoms or molecules on the sample surface to be sputtered and ionized to form "secondary ions." The secondary ions are then analyzed by a mass spectrometer to obtain information such as the elemental composition, isotopic abundance, chemical structure, and depth distribution of the sample surface. Secondary ion mass spectrometry requires a very high vacuum level within the analytical chamber (typically less than 10⁻⁶). -6 To address this issue, existing technologies typically include an additional transition chamber. The sample target is first placed in the transition chamber, then evacuated. The sample target is then transferred from the transition chamber to the analysis chamber to ensure the analysis chamber maintains the required working vacuum. After completing the secondary ion mass spectrometry analysis of the sample target, it is transferred from the analysis chamber to the transition chamber, then the transition chamber is restored to atmospheric pressure, and the sample target is removed.

[0003] However, in practice, for the purpose of experimental comparison or obtaining more information, it is often necessary to perform secondary ion mass spectrometry analysis on multiple sample targets in a single experiment. But the transition cavity inevitably requires a vacuuming operation (usually lasting between 50 and 100 minutes) and an operation to restore the external atmospheric pressure state (usually lasting about 20 minutes) during each sample target loading and unloading operation. Therefore, the efficiency of the existing sample target changing operation is very low, which leads to the entire experimental process taking a very long time. Summary of the Invention

[0004] This application aims to address one of the technical problems in related technologies to a certain extent. To this end, this application provides a vacuum sample changing system and method for a secondary ion mass spectrometer.

[0005] To achieve the above objectives, this application adopts the following technical solution: a vacuum sample exchange system for a secondary ion mass spectrometer, the vacuum sample exchange system comprising:

[0006] The main housing contains an analytical chamber;

[0007] The sample changing chamber has a sample changing cavity, which is sealed and connected to the analysis cavity and a first gate is provided between them that can be opened and closed;

[0008] The sample box is formed with a sample cavity, the sample cavity is in sealed communication with the sample changing cavity, and a second gate is arranged between the sample cavity and the sample changing cavity and is openably and closably arranged.

[0009] The first driving unit has an output end extending into the sample cavity and is provided with a transfer target holder, the transfer target holder is provided with at least two transfer target positions for placing sample targets, and the first driving unit is used to drive the transfer target holder to move between the sample cavity and the sample changing cavity to drive the transfer target positions to be positioned at a predetermined position in the sample changing cavity.

[0010] The second driving unit is arranged in the analysis cavity and has an output end provided with a test target holder, the test target holder is provided with at least one test target position for placing sample targets, and the second driving unit is used to drive the test target holder to move to drive the test target positions to be positioned at a set position in the analysis cavity.

[0011] The third driving unit has an output end extending into the sample changing cavity and is provided with a clamping mechanism, and the third driving unit is used to drive the clamping mechanism to move between the sample changing cavity and the analysis cavity to take and place the sample relative to the predetermined position and the set position.

[0012] The application has the following beneficial effects: through cooperation of the first driving unit, the sample changing box and the sample box, the transfer of the sample targets between the sample cavity and the sample changing cavity can be realized. Through cooperation of the third driving unit, the sample changing box and the main box, the transfer of the sample targets between the analysis cavity and the sample changing cavity can be realized. A plurality of transfer target positions are arranged on the transfer target holder and a plurality of test target positions are arranged on the test target holder, the first driving unit is used to drive the transfer target holder to move, any transfer target position can be moved to the predetermined position as required, the second driving unit is used to drive the test target holder to move, any test target position can be moved to the set position as required (when the test target positions are not less than two, the second driving unit can be used, and when the test target position is one, one test target position can be prearranged at the set position), and then the third driving unit is used to drive the clamping mechanism to move, so that the transfer operation of the sample targets in the vacuum sample changing system can be realized before and after secondary ion mass spectrometry. Therefore, only one vacuumizing operation of the sample cavity and one operation of restoring the external atmospheric pressure are required, and the secondary ion mass spectrometry of the plurality of sample targets can be completed, the sample target sample changing operation efficiency can be significantly improved, and the test process time can be reduced. Meanwhile, the control program can be prearranged to control the driving units, and the automatic sample changing operation and the subsequent secondary ion mass spectrometry of the sample targets can be realized.

[0013] Optionally, the first driving unit is a first electric cylinder, the sample box is provided with a mounting hole, the output end of the first electric cylinder extends into the sample cavity through the mounting hole, and the first electric cylinder is sealed with the inner wall of the mounting hole.

[0014] Optionally, the second driving unit is a piezoelectric actuator, and an output end of the piezoelectric actuator is fixedly connected to the positioning target holder.

[0015] Optionally, the third driving unit is a second electric cylinder, the sample changing box is provided with an assembly hole, an output end of the second electric cylinder extends into the sample changing cavity through the assembly hole, and a space is sealed between the second electric cylinder and an inner wall of the assembly hole, and the clamping mechanism is an electric clamping jaw, and the electric clamping jaw is arranged on the output end of the second electric cylinder.

[0016] Optionally, the third driving unit further comprises a bellows, one end of the bellows is fixedly connected to an inner wall of the sample changing box, and the other end of the bellows is fixedly connected to the output end of the second electric cylinder.

[0017] Optionally, the sample changing box is arranged above the main box, the sample box and the sample changing box are arranged in a horizontal interval, the transfer target holder moves in a horizontal direction under the driving of the first driving unit, the clamping mechanism moves in a vertical direction under the driving of the third driving unit, and the predetermined position is directly above the set position.

[0018] Optionally, the transfer target holder comprises a first connecting seat and a first support frame arranged on the first connecting seat, the first connecting seat is used for fixedly mounting the output end of the first driving unit, and the first support frame is provided with the transfer target position; the test target holder comprises a second connecting seat and a second support frame arranged on the second connecting seat, the second connecting seat is used for fixedly mounting the output end of the second driving unit, and the second support frame is provided with the test target position.

[0019] Optionally, the vacuum sample changing system further comprises a first position detection unit, a second position detection unit and a third position detection unit, the first position detection unit is used for detecting position information of any of the transfer target positions, the second position detection unit is used for detecting position information of the clamping mechanism, and the third position detection unit is used for detecting position information of any of the test target positions.

[0020] Optionally, the vacuum sample changing system further comprises a vacuumizing device and a vacuum detector, the vacuumizing device is used for vacuumizing the analysis cavity, the sample changing cavity and the sample cavity, and the vacuum detector is used for detecting vacuum degrees of the analysis cavity, the sample changing cavity and the sample cavity.

[0021] In addition, the application also provides a vacuum sample changing method for a secondary ion mass spectrometer, the vacuum sample changing method is implemented by using the vacuum sample changing system according to any one of the above technical solutions, and the vacuum sample changing method comprises the following steps:

[0022] Placing sample targets: opening the first gate and closing the second gate, placing a plurality of sample targets on the transfer target holder located in the sample cavity at one time, and then vacuumizing the sample cavity to a target vacuum degree;

[0023] Transferring sample targets: controlling the opening and closing states of the first gate and the second gate, driving the transfer target holder to transfer between the sample cavity and the sample changing cavity by the first driving unit, so as to drive the sample targets to transfer between the sample cavity and the predetermined position; driving the clamping mechanism to transfer between the sample changing cavity and the analysis cavity by the third driving unit, so as to drive the sample targets to transfer between the predetermined position and the set position;

[0024] Taking out sample targets: driving the transfer target holder to move to the initial position of the transfer target holder by the first driving unit, closing the second gate, restoring the sample cavity to the external atmospheric pressure state, and taking out all the sample targets at one time.

[0025] The vacuum sample changing method provided in the present application has similar beneficial effect reasoning process as the foregoing vacuum sample changing system, and will not be described herein again.

[0026] Optionally, the transferring sample targets comprises the following steps:

[0027] S200: closing the first gate and opening the second gate, driving the transfer target holder to move into the sample changing cavity until one transfer target position reaches the predetermined position by the first driving unit;

[0028] S210: driving the clamping mechanism to move to the predetermined position and clamp the sample targets by the third driving unit, driving the clamping mechanism to reset to the initial position of the clamping mechanism by the third driving unit, and driving the transfer target holder to reset to the initial position of the transfer target holder by the first driving unit;

[0029] S220: closing the second gate and opening the first gate, driving the clamping mechanism to move the sample targets to the set position by the third driving unit and placing the sample targets on the test target position on the test target holder at the set position, and driving the clamping mechanism to reset to the initial position of the clamping mechanism by the third driving unit;

[0030] S230: if the test target position is provided with a plurality of test target positions and the number of sample targets to be subjected to secondary ion mass spectrometry analysis is not less than two, steps S200 to S220 can be repeated until all the test target positions are placed with sample targets; if the test target position is provided with one test target position, step S240 is performed;

[0031] S240: closing the first gate and performing secondary ion mass spectrometry analysis on the sample targets until completion;

[0032] S250: opening the first gate, moving the clamping mechanism to a set position by the third driving unit and clamping the sample target, and driving the clamping mechanism to the initial position by the third driving unit;

[0033] S260: closing the first gate and opening the second gate, moving the transfer target holder into the sample changing chamber by the first driving unit until a transfer target position reaches a predetermined position;

[0034] S270: moving the clamping mechanism to a predetermined position by the third driving unit and placing the sample target on the corresponding transfer target position, and driving the clamping mechanism to the initial position by the third driving unit;

[0035] S280: if multiple test target positions are set and at least one test target position has a sample target placed thereon, steps S250 to S270 can be repeated until all test target positions are free of sample targets; if only one test target position is set, step S290 is performed;

[0036] S290: if the sample targets have all completed secondary ion mass spectrometry analysis, the step of removing the sample targets is performed; if the sample targets have not all completed secondary ion mass spectrometry analysis, the transfer target holder is moved to a transfer target position where a sample target has not completed secondary ion mass spectrometry analysis by the first driving unit until a predetermined position is reached, and then steps S210 to S280 are repeated.

[0037] The features and advantages of the present application will be disclosed in detail in the following specific embodiments and drawings. The best mode or means of the present application will be fully represented in combination with the drawings, but is not a limitation on the technical solutions of the present application. In addition, the features, elements and components appearing in each of the following text and drawings are multiple, and different symbols or numbers are marked for the convenience of representation, but all represent the same or similar structure or function of the components. BRIEF DESCRIPTION OF DRAWINGS

[0038] The present application will be further described in combination with the drawings as follows:

[0039] Figure 1 A structural schematic diagram of a vacuum sample changing system for a secondary ion mass spectrometer is provided for the embodiments of the present application;

[0040] Figure 2 An exploded view of the vacuum sample changing system;

[0041] Figure 3 A structural schematic diagram of the transfer target holder and the sample target;

[0042] Figure 4 A flowchart of a vacuum sample changing method realized by applying the vacuum sample changing system.

[0043] Wherein, 1, main box body; 10, analysis cavity; 2, sample changing box body; 20, sample changing cavity; 21, mounting hole; 22, first gate; 23, second gate; 3, sample box body; 30, sample cavity; 31, mounting hole; 32, sealing door; 4, first driving unit; 5, transfer target holder; 50, connecting seat; 51, support frame; 510, transfer target position; 6, sample target; 7, third driving unit; 70, clamping mechanism; 8, vacuumizing device; 9, base. DETAILED DESCRIPTION

[0044] Embodiments of the present application are described below in detail, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. Based on the embodiments in the embodiments, it is intended to explain the present application, and cannot be understood as a limitation of the present application.

[0045] In the present specification, "one embodiment" or "an example" or "an example" means that a particular feature, structure or characteristic described in connection with the embodiment itself can be included in at least one embodiment of the present disclosure. The appearance of the phrase "in one embodiment" at various locations in the specification does not necessarily refer to the same embodiment.

[0046] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "back", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specified and limited.

[0047] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "connected", "communicated", "connected" should be understood broadly, for example, it can be fixedly connected, or connected through an intermediate medium, or the internal connection of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0048] The present embodiment provides a vacuum sample changing system for a secondary ion mass spectrometer, such as Figure 1 and Figure 2As shown, the vacuum sample changing system comprises a main box 1, a sample changing box 2, a sample box 3, a first driving unit 4, a second driving unit (not shown in the figure), a third driving unit 7, a transfer target holder 5 and a test target holder. The main box 1 is formed with an analysis cavity 10, the sample changing box 2 is formed with a sample changing cavity 20, and the sample box 3 is formed with a sample cavity 30. The sample changing cavity 20 is in sealed communication with the analysis cavity 10, and a first gate 22 is arranged between the sample changing cavity 20 and the analysis cavity 10 in an openable and closable manner. The sample cavity 30 is in sealed communication with the sample changing cavity 20, and a second gate 23 is arranged between the sample changing cavity 20 and the sample cavity 30 in an openable and closable manner.

[0049] The output end of the first driving unit 4 in the embodiment extends into the sample cavity 30, and the transfer target holder 5 is arranged at the output end of the first driving unit 4. The transfer target holder 5 is provided with four transfer target positions 510 for placing sample targets 6. The first driving unit 4 is used to drive the transfer target holder 5 to move between the sample cavity 30 and the sample changing cavity 20, so as to drive any transfer target position 510 to be positioned at a predetermined position in the sample changing cavity 20. The second driving unit in the embodiment is arranged in the analysis cavity 10, and the test target holder is arranged at the output end of the second driving unit. The test target holder is provided with two test target positions for placing sample targets 6. The second driving unit is used to drive the test target holder to move so as to drive any test target position to be positioned at a set position in the analysis cavity 10. The output end of the third driving unit 7 in the embodiment extends into the sample changing cavity 20, and the output end of the third driving unit 7 is provided with a clamping mechanism 70. The third driving unit 7 is used to drive the clamping mechanism 70 to move between the sample changing cavity 20 and the analysis cavity 10, so as to take and place the sample relative to the predetermined position and the set position by the clamping mechanism 70.

[0050] The sample target 6 can be transferred between the sample cavity 30 and the sample changing cavity 20 by cooperation of the first driving unit 4, the sample changing box 2 and the sample box 3. The sample target 6 can be transferred between the analysis cavity 10 and the sample changing cavity 20 by cooperation of the third driving unit 7, the sample changing box 2 and the main box 1. A plurality of transfer target positions 510 are arranged on the transfer target holder 5, and a plurality of test target positions are arranged on the test target holder. The first driving unit 4 drives the transfer target holder 5 to move, so that any transfer target position 510 can be moved to a predetermined position as needed. The second driving unit drives the test target holder to move, so that any test target position can be moved to a set position as needed. Then, the third driving unit 7 drives the clamping mechanism 70 to move, so that the sample target 6 can be transferred in the vacuum sample changing system before and after the secondary ion mass spectrometry, respectively. Thus, only one vacuum operation and recovery of external atmospheric pressure operation of the sample cavity 30 is needed, so that the secondary ion mass spectrometry of a plurality of sample targets 6 can be completed, the sample target 6 sample changing operation efficiency can be significantly improved, and the test process time can be reduced. At the same time, the control program can be preset to control each driving unit, so that the sample target 6 can be automatically changed and the subsequent secondary ion mass spectrometry can be realized.

[0051] It should be noted that the first gate 22 and the second gate 23 in the embodiment are both electric gates, that is, the gate plates can be driven by electric devices to realize the communication or closure between different cavities. In other alternative embodiments, manual gates or pneumatic gates can be used as the first gate 22 and the second gate 23. The above-mentioned electric gates, manual gates and pneumatic gates can be directly purchased from the market, and their structures and working principles are prior art, which will not be described here.

[0052] In addition, the transfer target holder 5 in the embodiment is provided with four transfer target positions 510, and the test target holder is provided with two test target positions. The number of transfer target positions 510 can be set according to the test needs, and generally the number of transfer target positions 510 is designed to be the same as the number of sample targets 6 required for the test. Therefore, in other alternative embodiments, the number of transfer target holders 5 is not less than two, and the number of test target holders is not less than one.

[0053] The first driving unit 4 in the embodiment is a first electric cylinder, the sample box 3 is provided with a mounting hole 31, the output end of the first electric cylinder extends into the sample cavity 30 through the mounting hole 31, and the first electric cylinder is sealed with the inner wall of the mounting hole 31. The third driving unit 7 in the embodiment is a second electric cylinder, the sample changing box 2 is provided with an assembly hole 21, the output end of the second electric cylinder extends into the sample changing cavity 20 through the assembly hole 21, and the second electric cylinder is sealed with the inner wall of the assembly hole 21. The electric cylinder is a modular product integrating a servo motor and a lead screw, which can convert the rotary motion of the servo motor into the linear motion of the lead screw, and can realize accurate control of the linear motion of the lead screw by using the advantage that the servo motor can accurately control the rotating speed. Therefore, the electric cylinder is used as the first driving unit 4 and the second driving unit, which can realize accurate control of the moving position of the sample changing position 510 and the clamping mechanism 70, ensure accurate positioning of the clamping mechanism 70 relative to the predetermined position and the set position, and also meet the requirement of large moving stroke of the sample changing position 510 and the clamping mechanism 70.

[0054] It should be noted that in other optional embodiments, a four-axis mechanical arm, a five-axis mechanical arm or a six-axis mechanical arm can also be used as the first driving unit 4 or the second driving unit.

[0055] Further, the third driving unit 7 in the embodiment further includes a bellows, one end of the bellows is sealingly and fixedly connected with the inner wall of the sample changing box 2, and the other end of the bellows is sealingly and fixedly connected with the output end of the second electric cylinder. The structure design can further enhance the sealing performance of the sample changing cavity 20.

[0056] The second driving unit in the embodiment is a piezoelectric actuator, and the output end of the piezoelectric actuator is fixedly connected with the positioning target holder. The piezoelectric actuator has the advantages of small size, high control precision and being applicable to a vacuum environment, and the piezoelectric actuator used as the second driving unit is convenient to install into the analysis cavity 10, which can reduce the opening setting on the main box 1 and further improve the sealing performance of the analysis cavity 10. In addition, the required moving stroke of the test target holder is small, and the piezoelectric actuator can completely meet the requirement of the moving stroke of the test target holder.

[0057] The clamping mechanism 70 in the embodiment is an electric gripper, which is arranged on the output end of the second electric cylinder. The electric gripper can be controlled to open and close through a solenoid valve, and the opening and closing force of the electric gripper can be adjusted in real time through a three-dimensional force sensor, so as to avoid deformation of the clamped sample target 6 caused by excessive clamping force.

[0058] As Figure 1As shown, the sample changing box 2 in the embodiment is arranged above the main box 1, and the sample box 3 is horizontally spaced from the sample changing box 2. That is, the transfer target holder 5 in the embodiment moves in the horizontal direction under the drive of the first driving unit 4, and the clamping mechanism 70 moves in the vertical direction under the drive of the third driving unit 7, so that the predetermined position is located directly above the set position. It is easy to understand that in other alternative embodiments, the main box 1, the sample changing box 2 and the sample box 3 can be arranged on the same horizontal plane, and the main box 1, the sample changing box 2 and the sample box 3 can be arranged in a triangular shape, and the sample box 3 is located on the perpendicular line of the connecting line between the main box 1 and the sample changing box 2.

[0059] The transfer target holder 5 in the embodiment and the test target holder have substantially the same structure, and the difference between them is only the number of target positions arranged. For the purpose of distinguishing, the target holder located in the analysis cavity 10 is referred to as the test target holder, and the target holder with the initial position located in the sample cavity 30 is referred to as the transfer target holder 5. Taking the transfer target holder 5 as an example, as shown in Figure 3 As shown, the transfer target holder 5 in the embodiment includes a first connecting seat 50 and a first support frame 51 arranged on the first connecting seat 50, the first connecting seat 50 is used for fixedly mounting with the output end of the first driving unit 4, and the first support frame 51 is provided with a transfer target position 510. Similarly, the test target holder in the embodiment includes a second connecting seat 50 and a second support frame 51 arranged on the second connecting seat 50, the second connecting seat 50 is used for fixedly mounting with the output end of the second driving unit, and the second support frame 51 is provided with a test target position. During the sample changing operation, the sample target 6 can be directly placed on the transfer target position 510 or the test target position.

[0060] The vacuum sample changing system provided in the embodiment further includes a vacuumizing device 8 and a vacuum detector, the vacuumizing device 8 is used for vacuumizing the analysis cavity 10, the sample changing cavity 20 and the sample cavity 30, and the vacuum detector is used for detecting the vacuum degree of the analysis cavity 10, the sample changing cavity 20 and the sample cavity 30. Figure 1 and Figure 2 Only the vacuumizing device 8 mounted on the sample box 3 is shown in the figure, and the vacuumizing devices 8 mounted on the main box 1 and the sample changing box 2 are not shown.

[0061] In addition, the vacuum sample changing system provided in this embodiment also includes a first position detection unit, a second position detection unit, and a third position detection unit. The first position detection unit is used to detect the position information of any transfer target 510, the second position detection unit is used to detect the position information of the clamping mechanism 70, and the third position detection unit is used to detect the position information of any test target. In this embodiment, limit switches are used as the first, second, and third position detection units. In other optional embodiments, infrared detectors, distance sensors, etc., can also be used as the first, second, and third position detection units. The limit switches and infrared detectors can determine whether the transfer target 510, clamping mechanism 70, and test target are located at a predetermined or set position by sensing their specific positions. The distance sensor can determine whether the transfer target 510, clamping mechanism 70, and test target are located at a predetermined or set position by detecting the moving distance of the transfer target 510, clamping mechanism 70, and test target. The setup and working principle of the aforementioned limit switches, infrared detectors, and ranging sensors can all be referenced from existing technologies, and will not be elaborated here.

[0062] The vacuum sample changing system provided in this embodiment also includes a base 9, on which all the above-mentioned structures are mounted.

[0063] like Figure 4 As shown, the vacuum sample changing method implemented using this vacuum sample changing system is described, and the vacuum sample changing method includes the following steps:

[0064] Step S10: For the sample target 6 placement step, open the first gate 22 and close the second gate 23, placing multiple sample targets 6 at once onto the transfer target holder 5 located within the sample chamber 30. Then, evacuate the sample chamber 30 to the target vacuum level. It is easy to understand that an openable and closable sealing door 32 can be installed on the sample housing 3. When placing the sample targets 6, open the sealing door 32 to place the sample targets 6 onto the transfer target holder 5 within the sample chamber 30. At this time, the sample target 6 holder is in its initial position. Additionally, during this step, it is necessary to ensure that the vacuum levels inside the sample exchange chamber 20 and the analysis chamber 10 reach the target vacuum level. In this embodiment, the target vacuum level is 10. -7 Pa. Vacuum pumping device 8 can be used to evacuate the sample exchange chamber 20 and the analysis chamber 10. It should be noted that when the vacuum sample exchange system is not being used for the first time, the vacuum level in the sample exchange chamber 20 and the analysis chamber 10 will be maintained at the target vacuum level, so there is no need to perform vacuum pumping again.

[0065] Step S20: transferring the sample targets 6, controlling the opening and closing states of the first gate 22 and the second gate 23, driving the transfer target holder 5 to transfer between the sample cavity 30 and the sample changing cavity 20 by the first driving unit 4, so as to drive the sample targets 6 to transfer between the sample cavity 30 and the predetermined position; driving the clamping mechanism 70 to transfer between the sample changing cavity 20 and the analysis cavity 10 by the third driving unit 7, so as to drive the sample targets 6 to transfer between the predetermined position and the set position;

[0066] Step S30: taking out the sample targets 6, driving the transfer target holder 5 to move to the initial position of the transfer target holder 5 by the first driving unit 4, closing the second gate 23, and restoring the sample cavity 30 to the external atmospheric pressure state, so as to take out all the sample targets 6 at one time.

[0067] The plurality of sample targets 6 are put in at one time, and the transfer target holder 5 is driven to move by the first driving unit 4, so that any transfer target position 510 can be moved to the predetermined position as needed, the test target holder is driven to move by the second driving unit, so that any test target position can be moved to the set position as needed, and then the clamping mechanism 70 is driven to move by the third driving unit 7, so that the transfer operation of the sample targets 6 in the vacuum sample changing system can be realized before and after the secondary ion mass spectrometry, and then the plurality of sample targets 6 are taken out at one time. Therefore, only one vacuumizing operation and one operation of restoring the sample cavity 30 to the external atmospheric pressure state are needed, so as to complete the secondary ion mass spectrometry on the plurality of sample targets 6, which can significantly improve the sample target 6 sample changing operation efficiency and reduce the test process time.

[0068] Further, the transferring of the sample targets 6 in step S20 comprises the following steps:

[0069] S200: closing the first gate 22 and opening the second gate 23, driving the transfer target holder 5 to move into the sample changing cavity 20 by the first driving unit 4 until one transfer target position 510 reaches the predetermined position; the predetermined position in the embodiment refers to the position directly below the clamping mechanism 70 and directly above the set position.

[0070] S210: driving the clamping mechanism 70 to move to the predetermined position and clamp the sample targets 6 by the third driving unit 7, driving the clamping mechanism 70 to drive the sample targets 6 to reset to the initial position of the clamping mechanism 70 by the third driving unit 7, and driving the transfer target holder 5 to reset to the initial position of the transfer target holder 5 by the first driving unit 4; thereby, one of the sample targets 6 can be positioned on the clamping mechanism 70, and one sample target 6 is located directly above one test target position.

[0071] S220: close the second gate 23 and open the first gate 22, drive the clamping mechanism 70 to move to the set position by the third driving unit 7, place the sample target 6 on the test target site at the set position on the test target holder, and reset the clamping mechanism 70 to the initial position where the clamping mechanism 70 is located by the third driving unit 7; thus, one sample target 6 can be transferred to one test target site, facilitating the subsequent secondary ion mass spectrometry analysis of the sample target 6.

[0072] S230: if the test target site is provided with multiple test target sites and the number of sample targets 6 to be subjected to secondary ion mass spectrometry analysis is not less than two, steps S200 to S220 can be repeated until all test target sites are provided with sample targets 6; if the test target site is provided with one test target site, step S240 is performed; for the case where two test target sites are provided in the embodiment, steps S200 to S220 are repeated once, and another sample target 6 can be placed on another test target site. It is easy to understand that before the second sample target 6 is placed on the corresponding test target site, the test target holder needs to be moved to the set position by the second driving unit.

[0073] S240: close the first gate 22 and perform secondary ion mass spectrometry analysis on the sample target 6 until completion.

[0074] S250: open the first gate 22, drive the clamping mechanism 70 to move to the set position by the third driving unit 7, and clamp the sample target 6, and reset the clamping mechanism 70 to the initial position where the clamping mechanism 70 is located by the third driving unit 7;

[0075] S260: close the first gate 22 and open the second gate 23, drive the transfer target holder 5 to move into the sample exchange chamber 20 by the first driving unit 4 until one transfer target site 510 reaches the predetermined position;

[0076] S270: drive the clamping mechanism 70 to move to the predetermined position by the third driving unit 7 and place the sample target 6 on the corresponding transfer target site 510, and reset the clamping mechanism 70 to the initial position where the clamping mechanism 70 is located by the third driving unit 7; through the above steps, the sample target 6 subjected to secondary ion mass spectrometry analysis can be exchanged to the transfer target site 510 and removed.

[0077] S280: If multiple test targets are set and at least one of the test targets has the sample target 6 placed thereon, the steps S250 to S270 are repeated until all the test targets have no sample target 6; if one test target is set, the step S290 is performed; for the case of two test targets set in the embodiment, the steps S250 to S270 are repeated once, and the other sample target 6 which has completed secondary ion mass spectrum analysis is transferred to the other transfer target site 510.

[0078] S290: If all the sample targets 6 have completed secondary ion mass spectrum analysis, the step S30 of taking out the sample target 6 is performed; if not all the sample targets 6 have completed secondary ion mass spectrum analysis, the first driving unit 4 is driven to move the transfer target holder 5 to the transfer target site 510 where the sample target 6 which has not completed secondary ion mass spectrum analysis is placed to a predetermined position, and then the steps S210 to S280 are repeated. By repeating the steps S210 to S280, all the sample targets 6 can be placed on the test targets in the analysis cavity 10 in batches, and the sample targets 6 are transferred to the transfer target site 510 after completing secondary ion mass spectrum analysis.

[0079] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, and those skilled in the art should understand that the present application includes but is not limited to the contents described in the above specific embodiment and the accompanying drawings. Any modification which does not deviate from the functional and structural principles of the present application shall be included in the scope of the claims.

Claims

1. A vacuum sample changing system for a secondary ion mass spectrometer, characterized in that, The vacuum sample changing system includes: The main housing contains an analytical chamber; The sample changing chamber has a sample changing cavity, which is sealed and connected to the analysis cavity and a first gate is provided between them that can be opened and closed; The sample box has a sample cavity, which is sealed and connected to the sample exchange cavity and a second gate is provided between the two that can be opened and closed. The first driving unit has its output end extending into the sample chamber and is provided with a transfer target holder. The transfer target holder is provided with at least two transfer target positions for placing sample targets. The first driving unit is used to drive the transfer target holder to move between the sample chamber and the sample exchange chamber so as to drive the transfer target positions to be positioned at a predetermined position in the sample exchange chamber. A second driving unit, disposed within the analytical chamber and having a test target holder at its output end, wherein the test target holder has at least one test target position for placing a sample target, and the second driving unit is used to drive the test target holder to move so as to position the test target position to a predetermined position within the analytical chamber; and... The third driving unit has its output end extending into the sample changing chamber and is equipped with a clamping mechanism. The third driving unit is used to drive the clamping mechanism to move between the sample changing chamber and the analysis chamber so as to pick up and put down samples relative to the predetermined position and the set position through the clamping mechanism. The vacuum sample changing system also includes a vacuum pumping device, which is used to evacuate the analysis chamber, the sample changing chamber and the sample chamber. The vacuum pumping device is used to evacuate the sample chamber to the target vacuum level after the sample target is placed into the sample chamber. The analysis chamber and the sample changing chamber are also maintained at the target vacuum level during the sample changing operation.

2. The vacuum sample changing system as described in claim 1, characterized in that, The first driving unit is a first electric cylinder. The sample box is provided with a mounting hole. The output end of the first electric cylinder extends into the sample chamber through the mounting hole, and the first electric cylinder is sealed to the inner wall of the mounting hole.

3. The vacuum sample changing system as described in claim 1, characterized in that, The second driving unit is a piezoelectric actuator, and the output end of the piezoelectric actuator is fixedly connected to the positioning target holder.

4. The vacuum sample changing system as described in claim 1, characterized in that, The third drive unit is a second electric cylinder. The sample changing box is provided with an assembly hole. The output end of the second electric cylinder extends into the sample changing chamber through the assembly hole, and the second electric cylinder is sealed to the inner wall of the assembly hole. The clamping mechanism is an electric gripper, which is located at the output end of the second electric cylinder.

5. The vacuum sample changing system as described in claim 4, characterized in that, The third drive unit also includes a bellows, one end of which is sealed and fixed to the inner wall of the sample changing box, and the other end of which is sealed and fixed to the output end of the second electric cylinder.

6. The vacuum sample changing system as described in any one of claims 1 to 5, characterized in that, The sample changing box is arranged above the main box, and the sample box and the sample changing box are arranged horizontally at intervals. The transfer target holder moves horizontally under the drive of the first drive unit, and the clamping mechanism moves vertically under the drive of the third drive unit. The predetermined position is located directly above the set position.

7. The vacuum sample changing system as described in any one of claims 1 to 5, characterized in that, The transfer target holder includes a first connecting seat and a first support frame disposed on the first connecting seat. The first connecting seat is used to be fixedly installed with the output end of the first drive unit, and the first support frame is provided with the transfer target position. The test target holder includes a second connecting seat and a second support frame disposed on the second connecting seat. The second connecting seat is used for fixed installation with the output end of the second drive unit, and the second support frame is provided with the test target position.

8. The vacuum sample changing system as described in any one of claims 1 to 5, characterized in that, The vacuum sample changing system further includes a first position detection unit, a second position detection unit, and a third position detection unit. The first position detection unit is used to detect the position information of any of the transport target positions, the second position detection unit is used to detect the position information of the clamping mechanism, and the third position detection unit is used to detect the position information of any of the test target positions.

9. The vacuum sample changing system as described in any one of claims 1 to 5, characterized in that, The vacuum sample changing system also includes a vacuum detector, which is used to detect the vacuum level of the analysis chamber, the sample changing chamber, and the sample chamber.

10. A vacuum sample changing method for a secondary ion mass spectrometer, characterized in that, The vacuum sample exchange method is implemented using the vacuum sample exchange system as described in any one of claims 1 to 9, and the vacuum sample exchange method includes: Place the sample targets: Open the first gate and close the second gate, place multiple sample targets at once on the transfer target holder located in the sample chamber, and then evacuate the sample chamber to the target vacuum level; Transferring the sample target: Controlling the opening and closing states of the first and second gates, the first drive unit drives the transfer target holder to transfer between the sample chamber and the sample exchange chamber, thereby moving the sample target between the sample chamber and the predetermined position; the third drive unit drives the clamping mechanism to transfer between the sample exchange chamber and the analysis chamber, thereby moving the sample target between the predetermined position and the set position. Sample target removal: The first drive unit drives the transfer target holder to move to its initial position, closes the second gate, restores the sample chamber to the external atmospheric pressure state, and removes all sample targets at once.

11. The vacuum sample changing method as described in claim 10, characterized in that, The transfer sample target includes the following steps: S200: Close the first gate and open the second gate, and drive the transfer target holder to move into the sample exchange chamber through the first drive unit until a transfer target position reaches the predetermined position. S210: Drive the clamping mechanism to move to the predetermined position and clamp the sample target through the third drive unit, drive the clamping mechanism to reset the sample target to the initial position of the clamping mechanism through the third drive unit, and drive the transfer target holder to reset to the initial position of the transfer target holder through the first drive unit. S220: Close the second gate and open the first gate. Drive the clamping mechanism through the third drive unit to move the sample target to the set position and place the sample target on the test target holder at the set position. Drive the clamping mechanism through the third drive unit to reset to the initial position of the clamping mechanism. S230: If there are multiple test target sites and the number of sample targets to be analyzed by secondary ion mass spectrometry is no less than two, then steps S200 to S220 can be repeated until all test target sites are filled with sample targets; if there is only one test target site, then proceed to step S240. S240: Close the first gate and perform a second ion mass spectrometry analysis on the sample target until completion; S250: Open the first gate, drive the clamping mechanism to move to the set position through the third drive unit and clamp the sample target, and drive the clamping mechanism through the third drive unit to reset the sample target to the initial position of the clamping mechanism. S260: Close the first gate and open the second gate, and drive the transfer target holder to move into the sample exchange chamber through the first drive unit until a transfer target position reaches the predetermined position. S270: Drive the clamping mechanism to move to the predetermined position through the third drive unit and place the sample target on the corresponding transfer target position. Drive the clamping mechanism to reset to the initial position of the clamping mechanism through the third drive unit. S280: If there are multiple test target positions and at least one test target position is also occupied by a sample target, then steps S250 to S270 can be repeated until all test target positions are free of sample targets; if there is only one test target position, then proceed to step S290. S290: If the sample target has completed all secondary ion mass spectrometry analysis, then proceed with the step of removing the sample target; if the sample target has not completed all secondary ion mass spectrometry analysis, then the first driving unit drives the transport target holder to move to the transport target position where the sample target that has not undergone secondary ion mass spectrometry analysis is placed, and then repeat steps S210 to S280.

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