Method for preparing flexible device microstructure array based on 3D printing mechanism

By combining 3D printing processing with low-frequency ultrasonic resonance release technology and using capillary glass tubes to deposit silver nanoparticle ink, the complexity of the microstructure method for flexible pressure sensors has been solved, and efficient and precise fabrication of flexible device microstructure arrays has been achieved.

CN120963025APending Publication Date: 2025-11-18SUZHOU KEWO MICROELECTRONICS CO LTD
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Patent Information

Application Number
CN202511290623.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-09-10
Publication Date
2025-11-18

AI Technical Summary

Technical Problem

Existing methods for microstructuring flexible pressure sensors involve numerous and complex processes, lacking efficient and systematic production processes, making it difficult to achieve large-scale reproducible manufacturing.

Method used

By employing a 3D printing-based approach and utilizing low-frequency ultrasonic resonance release technology, silver nanoparticle ink is deposited through capillary glass tubes to achieve a high-precision and high-efficiency patterning process, thereby fabricating flexible device microstructure arrays.

Benefits of technology

It has achieved high-precision, low-cost, large-area, batch, and non-contact fabrication of flexible device microstructure arrays, meeting the widespread demand for microstructure fabrication.

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Abstract

The invention discloses a method for preparing a flexible device microstructure array based on a 3D printing mechanism, and the method comprises the steps: S1, sucking silver nanoparticle ink through a capillary glass tube, and adsorbing a substrate on a platform substrate; s2, setting a to-be-printed graph path through the upper computer; s3, proper voltage is set through an upper computer, set distribution voltage is output to a distributor, the distributor generates vibration according to the obtained distribution voltage, and the silver nanoparticle ink in the capillary glass tube continuously flows out from the tip; s4, the capillary glass tube is driven to be close to the platform substrate, liquid at the tip end of the capillary glass tube is made to make contact with the surface of the substrate, and a liquid bridge connected with the substrate is formed; s5, driving the capillary glass tube to move according to the pattern path, and forming a pattern on the substrate; according to the method for preparing the flexible device microstructure array based on the 3D printing mechanism, the existing defects are overcome, and the patterning process can be achieved in a high-precision and high-efficiency mode.
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Description

TECHNICAL FIELD

[0001] The present application relates to a method for preparing a flexible device microstructure array based on a 3D printing mechanism. BACKGROUND

[0002] Flexible electronic devices play an increasingly significant role in devices and systems such as electronic skin, human-computer interaction, and physiological signal monitoring.

[0003] As an important component of flexible electronic devices, flexible pressure sensors can sense small-range pressure and convert it into an electrical signal. The sensing mechanisms mainly include capacitive sensing, piezoresistive sensing, piezoelectric sensing, and triboelectric sensing. Sensors designed based on different sensing mechanisms have their own characteristics and application scenarios.

[0004] Among them, resistance-type flexible pressure sensors have become a hot topic in current scientific research due to their simple structure, easy testing, low preparation cost, and high sensitivity. In order to improve the performance of flexible piezoresistive pressure sensors, microstructuring is a widely used method.

[0005] Microstructure forming methods exhibit diversification and integration due to the complexity of materials, and there are various manufacturing processes such as reverse molding and laser direct writing. However, current microstructuring methods have multiple process steps, complex processes, and no efficient system production process to realize large-area repeated manufacturing of structures.

[0006] Therefore, a method for preparing a flexible device microstructure array based on a 3D printing mechanism is proposed to solve the above problems. SUMMARY

[0007] The present application aims to overcome the existing defects and provide a method for preparing a flexible device microstructure array based on a 3D printing mechanism, which can achieve a high-precision and high-efficiency patterning process.

[0008] To achieve the above-mentioned purpose, the present application provides the following technical solution: a method for preparing a flexible device microstructure array based on a 3D printing mechanism, the printing device comprising: a voltage source, a CCD industrial camera, a dispenser, a capillary glass tube, a vacuum suction device, a heating device, a platform substrate, and an upper computer;

[0009] The upper computer is respectively connected in communication with the voltage source and the CCD industrial camera, the voltage source is electrically connected to the dispenser, the dispenser is connected to the capillary glass tube, and the capillary glass tube is located above the platform substrate;

[0010] The platform substrate is respectively connected with the vacuum suction device and the heating device;

[0011] The CCD industrial camera is located above the platform substrate;

[0012] The method of microstructure array comprises the following steps:

[0013] Step S1, using a capillary glass tube to suck silver nanoparticle ink, and adsorbing a substrate on a platform substrate;

[0014] Step S2, setting a to-be-printed pattern path by a host computer;

[0015] Step S3, setting a suitable voltage by the host computer, outputting the set dispensing voltage to a dispenser, and making the dispenser vibrate according to the obtained dispensing voltage, so that the silver nanoparticle ink in the capillary glass tube continuously flows out from the tip;

[0016] Step S4, driving the capillary glass tube to approach the platform substrate, and making the liquid at the tip of the capillary glass tube contact the surface of the substrate and form a liquid bridge connected with the substrate;

[0017] Step S5, driving the capillary glass tube to move according to the pattern path, and forming a pattern on the substrate;

[0018] Step S6, after completing the pattern printing, using a heating device to evaporate the solvent in the silver nanoparticle ink deposited on the substrate, and completing the printing of the three-dimensional microstructure.

[0019] Preferably, when the capillary glass tube is far away from the substrate and no liquid bridge is formed, the vibration of the dispenser does not make the silver nanoparticle ink in the capillary glass tube deposited on the substrate.

[0020] Preferably, the dispenser is arranged in linkage with the capillary glass tube, and the vibration generated by the dispenser directly acts on the capillary glass tube.

[0021] Preferably, the tip of the capillary glass tube is provided with a micro-needle.

[0022] Preferably, the CCD industrial camera monitors the patterning process in real time and displays on the host computer.

[0023] Preferably, the CCD industrial camera is provided with a light source for compensation.

[0024] Preferably, the dispenser is supplied with power by a voltage source.

[0025] Preferably, the capillary glass tube is controlled by the host computer to be inserted into a silver nanoparticle ink container, and the silver nanoparticle ink is sucked by capillary effect.

[0026] Preferably, the platform substrate adsorbs the substrate by a vacuum adsorption device.

[0027] Compared with the prior art, the beneficial effects of the present invention are as follows: The method for preparing flexible device microstructure arrays based on 3D printing mechanism utilizes low-frequency ultrasonic resonance release technology to precisely and quantitatively deposit silver nanoparticle ink on the substrate, achieving a patterning process with high precision and high efficiency. This meets the requirements of low cost, large area, batch production, and non-contact microstructure fabrication in recent years, and has broad application significance. Attached Figure Description

[0028] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings:

[0029] Figure 1 This is a schematic diagram of the printing equipment connection for the method of preparing flexible device microstructure arrays based on 3D printing mechanism according to the present invention.

[0030] In the diagram: 1. Voltage source; 2. CCD industrial camera; 3. Distributor; 4. Capillary glass tube; 5. Vacuum adsorption device; 6. Heating device; 7. Platform substrate; 8. Host computer. Detailed Implementation

[0031] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] like Figure 1 As shown, a method for fabricating flexible device microstructure arrays based on 3D printing processing is disclosed. The printing equipment includes: a voltage source 1, a CCD industrial camera 2, a distributor 3, a capillary glass tube 4, a vacuum adsorption device 5, a heating device 6, a platform substrate 7, and a host computer 8. The host computer 8 is communicatively connected to the voltage source 1 and the CCD industrial camera 2, respectively. The voltage source 1 is electrically connected to the distributor 3, and the distributor 3 is connected to the capillary glass tube 4, which is located above the platform substrate 7. The platform substrate 7 is connected to the vacuum adsorption device 5 and the heating device 6, respectively. The CCD industrial camera 2 is located above the platform substrate 7.

[0033] Specifically, the capillary glass tube 4 is mounted on and fits snugly against the distributor 3; a miniature needle is machined at the tip of the capillary glass tube 4; the distributor 3 is connected to the voltage source 1, controlling the vibration amplitude and frequency of the distributor 3; the vibration of the distributor 3 drives the capillary glass tube 4 to vibrate, causing the liquid in the capillary glass tube 4 to flow continuously from the tip. The core component of the distributor is a piezoelectric device, which generates mechanical resonance through the inverse piezoelectric effect when an electrical signal is input.

[0034] Specifically, the host computer 8 is connected with the voltage source 1, and controls the voltage source 1 to output the distribution voltage; the host computer 8 controls the movement track and the movement speed of the capillary glass tube 4, so that the capillary glass tube 4 moves according to the pre-planned route; the host computer 8 is connected with the CCD industrial camera 2, and monitors the patterning process on the substrate in real time, and then adjusts the action of the capillary glass tube 4, so that the patterning process proceeds in an orderly manner; the CCD industrial camera 2 is provided with a light source, so that the host computer 8 can monitor the patterning process in the case of insufficient light.

[0035] Specifically, the platform substrate 7 is connected with the vacuum adsorption device 5, so as to horizontally fix the substrate on the platform substrate; the platform substrate 7 is connected with the heating device 6, so as to quickly dry the silver nanoparticle ink deposited on the substrate after patterning.

[0036] The method for forming the microstructure array comprises the following steps:

[0037] In step S1, the capillary glass tube 4 sucks the silver nanoparticle ink, and the substrate is adsorbed on the platform substrate 7; the tip of the capillary glass tube 4 is provided with a micro-needle. The capillary glass tube 4 is controlled by the host computer 8 to be inserted into the silver nanoparticle ink container, and the silver nanoparticle ink is sucked by the capillary effect. The platform substrate 7 adsorbs the substrate by the vacuum adsorption device 5.

[0038] In step S2, the host computer 8 sets the printing pattern path.

[0039] In step S3, the host computer 8 sets the appropriate voltage, outputs the set distribution voltage to the dispenser 3, and makes the dispenser 3 vibrate according to the obtained distribution voltage, so that the silver nanoparticle ink in the capillary glass tube 4 continuously flows out from the tip; when the capillary glass tube 4 is far away from the substrate and no liquid bridge is formed, the vibration of the dispenser 3 will not make the silver nanoparticle ink in the capillary glass tube 4 deposited on the substrate. The dispenser 3 and the capillary glass tube 4 are jointly arranged, and the vibration generated by the dispenser 3 directly acts on the capillary glass tube 4. The dispenser 3 is supplied with power by the voltage source 1.

[0040] In step S4, the capillary glass tube 4 is driven to approach the platform substrate 7, and the liquid at the tip of the capillary glass tube 4 contacts the surface of the substrate, and a liquid bridge connected with the substrate is formed.

[0041] In step S5, the capillary glass tube 4 is driven to move according to the pattern path, and a pattern is formed on the substrate.

[0042] In step S6, after the printing of the pattern is completed, the heating device 6 is used to evaporate the solvent in the silver nanoparticle ink deposited on the substrate, and the printing of the three-dimensional microstructure is completed.

[0043] The CCD industrial camera 2 monitors the patterning process in real time and displays on the host computer 8. The CCD industrial camera 2 is provided with a light source for compensation.

[0044] The method for preparing flexible device microstructure array based on 3D printer mechanism, utilizes low-frequency ultrasonic resonance release technology, accurately deposits silver nanoparticle ink on the substrate, realizes the patterning process with high precision and high efficiency, meets the requirements of low cost, large area, batch and non-contact in microstructure manufacturing in recent years, and has wide popularization significance.

[0045] Finally, it should be noted that: the above is only the preferred embodiments of the present application, and is not intended to limit the present application, although the foregoing embodiments of the present application are described in detail, for those skilled in the art, it still can be modified, or equivalent replacement for part of the technical features recorded in the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A method for fabricating a flexible device microstructure array based on a 3D printing mechanism, the printing apparatus comprising: A voltage source (1), a CCD industrial camera (2), a dispenser (3), a capillary glass tube (4), a vacuum suction device (5), a heating device (6), a platform base plate (7) and a host computer (8); The host computer (8) is respectively connected with the voltage source (1) and the CCD industrial camera (2), the voltage source (1) is connected with the dispenser (3), the dispenser (3) is connected with the capillary glass tube (4), and the capillary glass tube (4) is located above the platform base plate (7); The platform base plate (7) is respectively connected with the vacuum suction device (5) and the heating device (6); The CCD industrial camera (2) is located above the platform base plate (7); The method of the microstructure array comprises the following steps: S1, the capillary glass tube (4) is used to suck silver nanoparticle ink, and the substrate is adsorbed on the platform base plate (7); S2, the host computer (8) is used to set a to-be-printed pattern path; S3, the host computer (8) is used to set a suitable voltage, the set dispensing voltage is output to the dispenser (3), and the dispenser (3) is vibrated according to the obtained dispensing voltage, so that the silver nanoparticle ink in the capillary glass tube (4) continuously flows out from the tip; S4, the capillary glass tube (4) is driven to be close to the platform base plate (7), and the liquid at the tip of the capillary glass tube (4) contacts the substrate surface and forms a liquid bridge connected with the substrate; S5, the capillary glass tube (4) is driven to move according to the pattern path, and a pattern is formed on the substrate; S6, after the pattern printing is completed, the heating device (6) is used to evaporate the solvent in the silver nanoparticle ink deposited on the substrate, and the printing of the three-dimensional microstructure is completed.

2. The method for fabricating a flexible device microstructure array based on a 3D printer principle according to claim 1, characterized in that, When the capillary glass tube (4) is away from the substrate and no liquid bridge is formed, the vibration of the dispenser (3) will not cause the silver nanoparticle ink in the capillary glass tube (4) to be deposited on the substrate.

3. The method for fabricating a flexible device microstructure array based on a 3D printer principle according to claim 1, characterized in that, The dispenser (3) and the capillary glass tube (4) are arranged in linkage, and the vibration generated by the dispenser (3) directly acts on the capillary glass tube (4).

4. The method for fabricating a flexible device microstructure array based on a 3D printer principle according to claim 1, characterized in that, The tip of the capillary glass tube (4) is provided with a micro-needle.

5. The method for fabricating a flexible device microstructure array based on a 3D printer principle according to claim 1, characterized in that, The CCD industrial camera (2) monitors the patterning process in real time and displays on the host computer (8).

6. The method for fabricating a flexible device microstructure array based on a 3D printer principle according to claim 5, characterized in that, The CCD industrial camera (2) is provided with a light source for compensation.

7. The method for fabricating a flexible device microstructure array based on a 3D printer principle according to claim 1, wherein, The dispenser (3) is supplied with power by the voltage source (1).

8. The method for fabricating a flexible device microstructure array based on a 3D printer principle according to claim 1, characterized in that, The capillary glass tube (4) is controlled by the host computer (8) to be inserted into a silver nanoparticle ink container and to suck the silver nanoparticle ink through the capillary effect.

9. The method for fabricating a flexible device microstructure array based on a 3D printer principle according to claim 1, wherein, The platform base plate (7) adsorbs the substrate through the vacuum suction device (5).