A low reflection film thickness optical measuring device

Abstract

The application relates to the technical field of thin film thickness optical measurement, in particular to a low-reflection thin film thickness optical measurement device, which comprises a device base, a power mechanism is installed on one side of the upper end of the device base, a measurement and detection assembly and a vertical shaft piece are arranged on the power mechanism, and a rotating disc piece is fixed to the lower end of the vertical shaft piece; a clamping mechanism is arranged on the other side of the upper end of the device base, a bearing frame is arranged on the clamping mechanism, and an adjusting mechanism is arranged on the bearing frame. The application can quickly realize switching operation of a crystal oscillator probe assembly, so that different crystal oscillator probe assemblies can be quickly switched for use, the situation that replacement of a single crystal oscillator probe assembly influences equipment operation in a conventional scheme is avoided, the detection efficiency of optical film thickness is improved, and the low-reflection thin film thickness optical measurement precision can be effectively improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical measurement of thin film thickness, and particularly relates to a low-reflection thin film thickness optical measurement device. BACKGROUND

[0002] Optical film refers to depositing or coating one or more layers of dielectric film or metal film or a combination of the two types of films on an optical element or an independent substrate to change the transmission characteristics of light waves. Not only can it improve the overall performance of the optical element, but it is also a necessary means to meet the design goals. For example, after using anti-reflection film, the light flux loss of a complex optical lens can be reduced by ten times; using a high-reflection film mirror can increase the output power of a laser by several times; using optical film can improve the efficiency and stability of silicon cells, etc. In the semiconductor manufacturing process, wafers are subjected to multiple thin film deposition of various materials. The thickness of the optical film is an extremely important control parameter in the semiconductor preparation process, and is closely related to functional parameters such as optical performance, magnetic performance, and thermal conductivity. It not only affects the performance of the chip and the performance of the optical performance, but also plays an important role in the structural integrity, functional integration, and reliability of the final product. For example, in large-scale integrated circuits, any slight change in the thickness of the thin film will directly affect the performance of the integrated circuit.

[0003] Optical film measurement requires high precision, including the thickness and reflectivity, density, and other properties of the film, which need to be accurately measured to ensure that each process meets the design specifications. The overall technical barrier is also relatively high.

[0004] Because the optical film measurement technology in China started relatively late, the overall competitiveness of the product is weak, and there are still the following problems: 1. The traditional quartz crystal film thickness measurement device will have a short service life after a period of work, as the quartz crystal is sputtered by the film material for a long time. The quartz crystal in the measurement device needs to be replaced frequently to ensure the normal operation of the film thickness measurement. The crystal oscillator probe is frequently disassembled, which affects the detection efficiency and is not conducive to use. 2. The existing optical film thickness measurement instrument is not convenient to take and place, and the optical film lacks a good clamping structure. The overall measurement fixing effect is poor, resulting in large measurement errors, which is not conducive to accurate measurement of the optical film. Therefore, improvement is needed. SUMMARY

[0005] The purpose of the present application is to solve the problems in the prior art and provide a low-reflection thin film thickness optical measurement device.

[0006] In order to achieve the above purpose, the present application adopts the following technical scheme:

[0007] The application discloses a low-reflection thin film thickness optical measurement device, which comprises a device base, a power mechanism is arranged on one side of the upper end of the device base, a measurement detection assembly and a vertical shaft are arranged on the power mechanism, and a rotating disc is fixed to the lower end of the vertical shaft.

[0008] A clamping mechanism is arranged on the other side of the upper end of the device base, a bearing frame is arranged on the clamping mechanism, an adjusting mechanism is arranged on the bearing frame, the adjusting mechanism is connected with the vertical shaft, two placing tubes are arranged in the adjusting mechanism.

[0009] A plurality of apertures are arranged on the rotating disc at equal intervals, a plurality of reset mechanisms are arranged on the rotating disc at equal intervals, a moving frame assembly is arranged on each reset mechanism, the moving frame assemblies are arranged on the upper end of the apertures respectively, a positive and negative toothed screw is rotationally connected to the opposite side walls in the moving frame assembly, sliding clamping assemblies are screwed to the two ends of the positive and negative toothed screw, a resisting roller is arranged on one end of each sliding clamping assembly, a limiting inclined plate is arranged on the upper end of the rotating disc on the two sides of the aperture, the limiting inclined plate is fixed to the upper end of the rotating disc, the two resisting rollers are in abutment with the two limiting inclined plates respectively, and a crystal oscillator probe assembly is in abutment between the two sliding clamping assemblies.

[0010] The measurement detection assembly is connected with one of the crystal oscillator probe assemblies.

[0011] Compared with the prior art, the application can quickly realize the switching operation of the crystal oscillator probe assembly, so that different crystal oscillator probe assemblies can be quickly switched for use, the situation that the replacement of a single crystal oscillator probe assembly affects the operation of the device in the conventional scheme is avoided, and the detection efficiency of the optical film thickness is improved. The application can also effectively convey the optical thin film material, so as to improve the precision of the low-reflection thin film thickness optical measurement.

[0012] Preferably, the power mechanism comprises a mounting frame structure arranged on one side of the upper end of the device base, a motor power assembly is arranged on the device base, the output shaft of the motor power assembly is rotationally sleeved in the mounting frame structure, the vertical shaft is rotationally sleeved on one side of the upper end of the mounting frame structure, a synchronous belt assembly is arranged between the vertical shaft and the output shaft of the motor power assembly, and the measurement detection assembly is arranged on the upper end of the mounting frame structure.

[0013] Further, in actual production preparation, the motor power assembly is composed of a motor part and a transmission shaft assembly, the transmission shaft assembly is connected with the motor shaft of the motor power assembly, the transmission shaft is rotatably sleeved on the mounting frame structure, corresponding accessories required for operation of the motor part are installed in the equipment base, such as power connection, control part, motor operation control part, etc., so as to facilitate the staff to start the control equipment to make the motor power assembly operate according to the pre-set program, and a reduction box assembly is also installed in the motor power assembly, so as to accurately control the rotating speed of the motor power assembly; the corresponding automatic part operation scheme in the application is prior art, and does not need to be published one by one.

[0014] The synchronous belt assembly is composed of two wheel bodies and a belt body sleeved on the wheel bodies, and tooth-shaped structures are arranged on the belt body and the wheel bodies to realize mutual meshing and facilitate transmission. The two wheel bodies are fixed on the transmission shaft and the vertical shaft of the motor power assembly respectively, so as to facilitate the rotation of the rotating disc by the vertical shaft, and the directional switching of the plurality of crystal oscillator probe assemblies can be realized by the rotation of the rotating disc.

[0015] Preferably, the clamping mechanism comprises a second electric telescopic assembly fixed on the other side of the upper end of the equipment base, and the output shaft of the second electric telescopic assembly is fixed with a moving plate, and a lifting mechanism is arranged on the moving plate, and a plurality of downward pressing extrusion shafts are arranged at equal intervals on the lifting mechanism, and the lifting mechanism is connected with the equipment base.

[0016] A power abutting conveying belt assembly is installed on the upper end of the equipment base, and the power abutting conveying belt assembly is located between the moving plate and the mounting frame structure. A plurality of rotating shafts and a plurality of bearing shafts are arranged at equal intervals on the side of the moving plate close to the power abutting conveying belt assembly, and the plurality of rotating shafts and the plurality of bearing shafts are arranged alternately.

[0017] The plurality of downward pressing extrusion shafts are arranged at the upper end of the plurality of bearing shafts.

[0018] Further, the second electric telescopic assembly is connected with the matching parts in the equipment base, can be controlled by the pre-set control program in the control equipment, and the moving plate can be moved towards the power abutting conveying belt assembly by the second electric telescopic assembly. With the movement of the moving plate, the bearing shafts can be inserted into the bottom of the power abutting conveying belt assembly, and with the movement of the moving plate towards the power abutting conveying belt assembly, the downward pressing extrusion shafts can be moved towards the bearing shafts. The front ends of the downward pressing extrusion shafts can extrude the optical film material, and the cooperation of the rotating shafts and the power abutting conveying belt assembly can realize the abutting and moving of the optical film material.

[0019] The power-resisting conveying belt assembly comprises a motor component, two long linkage shafts, two long linkage shafts rotatably sleeved on both sides of the upper end of the equipment base, a belt member commonly sleeved between the two long linkage shafts, and a plate member rotatably sleeved on the upper ends of the two long linkage shafts.

[0020] Preferably, the length of the bearing shaft is greater than the upper end of the downward extruding shaft, and the end of the bearing shaft close to the power-resisting conveying belt assembly is arc-shaped, and the end of the downward extruding shaft close to the power-resisting conveying belt assembly is convex.

[0021] Further, the optical film material can be effectively carried by the bearing shaft, and the convex end of the downward extruding shaft can facilitate extruding the edge of the optical film material, and the other end of the optical film material is in contact with the power-resisting conveying belt assembly, facilitating the movement of the optical film material.

[0022] Preferably, the lifting mechanism comprises two sliding grooves opened on one side of the upper end of the equipment base, a sliding block slidably installed in the sliding groove, an inclined plate rotatably connected to the upper end of the sliding block, and a resistance spring commonly fixed on the end wall in the sliding groove and the sliding block.

[0023] The moving plate is provided with a connecting plate member penetrating therethrough, and the connecting plate member is slidably installed on the moving plate.

[0024] The upper ends of the two inclined plates are rotatably connected to one side of the connecting plate member.

[0025] Further, the movement of the moving plate towards the power-resisting conveying belt assembly can be achieved by the extension of the second electric telescopic assembly, and the movement of the connecting plate member following the movement of the moving plate can be achieved, and the movement of the connecting plate member can make the inclined plate rotate towards the direction parallel to the upper end of the equipment base, at this time, the external force is insufficient to stretch the sliding groove, which can make the inclined plate move towards the direction parallel to the upper end of the equipment base, and can ensure that the downward extruding shaft moves stably under the action of the connecting plate member, so that the downward extruding shaft moves towards the bearing shaft.

[0026] When the downward extruding shaft and the bearing shaft clamp the optical film material, the inclined plate cannot be deflected, the external force is transmitted to the sliding groove, and the sliding groove is stretched, so that the optical film material and the belt on the power-resisting conveying belt assembly are in contact.

[0027] Preferably, the adjusting mechanism comprises a first electric telescopic component mounted on the upper end of the bearing frame, the output shaft of the first electric telescopic component is fixed with an abutting piece, the vertical shaft is arranged through the abutting piece;

[0028] The lower end of the bearing frame is provided with a placing tube on both sides, one side of each of the two placing tubes is rotatably connected with an inclined rod, the upper end of the inclined rod extends to the upper end of the bearing frame, and the two inclined rods are rotatably sleeved on the two sides of the piston rod in the first electric telescopic component.

[0029] Further, when the vertical shaft is rotated to a suitable angle, the first electric telescopic component can drive the abutting piece to move towards the bearing frame, so that the abutting piece and the vertical shaft abut to fix the vertical shaft;

[0030] When the piston rod of the first electric telescopic component is retracted, the placing tube can be lifted through the inclined rod, which helps the crystal oscillator probe assembly to enter the placing tube for effective protection or convenient disassembly;

[0031] In actual production and preparation, the bearing frame has a large size, which can facilitate the rotation of the rotating disc, and a corresponding opening and closing plate structure can be arranged on the placing tube, which can facilitate the removal and replacement of the crystal oscillator probe assembly after disassembly.

[0032] Preferably, the reset mechanism comprises a moving fastening component fixed to the lower end of the moving frame assembly, the moving fastening component is slidably mounted on the upper end of the rotating disc, and the moving frame assembly and the rotating disc are jointly fixed with a reset spring.

[0033] Further, the force of the reset spring can drive the moving frame assembly to move towards the limiting inclined plate, and the movement of the moving frame assembly can drive the moving fastening component to move, and a screw rod is mounted on the moving fastening component, when the moving frame assembly is adjusted in place, the screw rod can be rotated to abut against the upper end of the rotating disc to fix the position of the moving frame assembly, and the clamping of the crystal oscillator probe assembly is completed.

[0034] Preferably, the opposite sides of the two limiting inclined plates are inclined, and the abutting roller abuts against the inclined surface of the limiting inclined plate.

[0035] Further, the inclination of the limiting inclined plate can gradually reduce the distance between the two sliding clamping assemblies, so that the sliding clamping assembly can fully clamp the crystal oscillator probe assembly.

[0036] Preferably, the length of the downward extrusion shaft is less than the length of the bearing shaft.

[0037] Further, the bearing shaft can effectively abut against the optical film material.

[0038] Preferably, the elastic telescopic rod assembly is fixed on the opposite side walls in the moving frame assembly, and the two elastic telescopic rod assemblies are connected with the sliding clamping assembly in the moving frame assembly respectively.

[0039] Further, the sliding clamping assembly can move stably through the action of the elastic telescopic rod assembly.

[0040] The beneficial effects of the present application are:

[0041] 1. When the crystal oscillator probe assembly sputters more coating materials, the rotating disc is rotated through the cooperation of multiple mechanisms, so that different crystal oscillator probe assemblies are switched to the upper end of the optical thin film material, the crystal oscillator probe assembly is conveniently and quickly replaced, and the detection efficiency of the optical film thickness is further improved.

[0042] 2. The thickness of the optical thin film material has strict requirements in specific application processes, and needs to be measured frequently by using a thickness measuring instrument. Through the cooperation of the downward extrusion shaft, the bearing shaft and the power abutting conveying belt assembly, the optical thin film material can be fully supported, clamped and conveyed, so that the optical thin film material can stably pass through the lower end of the corresponding crystal oscillator probe assembly, and the stable conveying of the optical thin film material is completed, so as to facilitate detection operation.

[0043] 3. When the vertical shaft is rotated to a suitable angle, the first electric telescopic assembly can drive the abutting piece to move towards the bearing frame, so that the abutting piece and the vertical shaft abut to realize the abutting fixation of the vertical shaft.

[0044] When the piston rod of the first electric telescopic assembly is retracted, the inclined pull rod can drive the placement tube to rise, which helps the crystal oscillator probe assembly to enter the placement tube for effective protection or convenient disassembly.

[0045] 4. The force of the reset spring can drive the moving frame assembly to move towards the limiting inclined plate, and the movement of the moving frame assembly can drive the sliding clamping assembly to move. The abutting roller on the sliding clamping assembly can abut against the corresponding limiting inclined plate, so that the distance between the two sliding clamping assemblies is reduced, and the synchronous reverse movement of the two sliding clamping assemblies can be ensured through the action of the forward and reverse screw rod, so as to accurately clamp the crystal oscillator probe assembly and complete the installation of the crystal oscillator probe assembly. BRIEF DESCRIPTION OF DRAWINGS

[0046] Figure 1 The structure diagram of the present application is shown in the figure;

[0047] Figure 2 The structure diagram of the bearing shaft, rotating shaft and moving plate in the present application is shown in the figure;

[0048] Figure 3 The enlarged view of A in the present application is shown in the figure; Figure 2 ​

[0049] Figure 4 It is the bottom structure view of the rotating disc part in the application;

[0050] Figure 5 It is the enlarged view of B in the application; Figure 4

[0051] Figure 6 It is the position relation view of the bearing frame and the rotating disc part in the application;

[0052] Figure 7 It is the structure view of the sliding clamping assembly, the moving frame assembly and the positive and negative toothed screw part in the application;

[0053] Figure 8 It is the position relation structure view of the bearing frame and two placed tubes in the application;

[0054] Figure 9 It is the bottom view of the rotating disc part in the application.

[0055] In the figure: 1 device base, 2 mounting frame structure, 3 motor power assembly, 4 synchronous belt assembly, 5 measurement detection assembly, 6 rotating disc part, 7 vertical shaft part, 8 abutting part, 9 first electric telescopic assembly, 10 inclined pull rod part, 11 bearing frame, 12 placed tube, 13 downward pressing and extruding shaft, 14 second electric telescopic assembly, 15 connecting plate part, 16 bearing shaft, 17 rotating shaft, 18 moving plate, 19 power abutting and conveying belt assembly, 20 sliding groove, 21 resistance spring part, 22 sliding block, 23 inclined pull plate part, 24 moving fastening assembly, 25 sliding clamping assembly, 26 limiting inclined plate part, 27 abutting roller part, 28 gap, 29 crystal vibration probe assembly, 30 reset spring part, 31 moving frame assembly, 32 positive and negative toothed screw part, 33 elastic telescopic rod assembly. DETAILED DESCRIPTION

[0056] The technical solutions in the embodiments of the application will be clearly and completely described below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments of the application.

[0057] With reference to Figures 1-9 A low-reflection thin film thickness optical measurement device includes a device base 1, a power mechanism is mounted on one side of the upper end of the device base 1, a measurement detection assembly 5 and a vertical shaft part 7 are arranged on the power mechanism, and a rotating disc part 6 is fixed to the lower end of the vertical shaft part 7; a clamping mechanism is arranged on the other side of the upper end of the device base 1, a bearing frame 11 is arranged on the clamping mechanism, an adjusting mechanism is arranged on the bearing frame 11, the adjusting mechanism is connected with the vertical shaft part 7, and two placed tubes 12 are arranged in the adjusting mechanism; the power mechanism can provide power for the rotation of the rotating disc part 6, the rotation of the rotating disc part 6 can switch different crystal vibration probe assemblies 29 to be detected, and the low-reflection thin film thickness optical measurement operation can be realized.​

[0058] In the embodiment, a plurality of openings 28 are equidistantly arranged on the rotating disc 6, and a plurality of reset mechanisms are equidistantly arranged on the rotating disc 6. A moving frame assembly 31 is arranged on each reset mechanism. The moving frame assembly 31 is arranged at the upper end of each opening 28. A reversible screw rod 32 is rotatably connected to the opposite side walls in the moving frame assembly 31. A sliding clamp assembly 25 is screwed to each end of the reversible screw rod 32. A contact roller 27 is arranged at one end of each sliding clamp assembly 25. A limiting inclined plate 26 is arranged at the upper end of each opening 28. The two limiting inclined plates 26 are arranged at opposite sides and are inclined. The contact roller 27 and the inclined surface of the limiting inclined plate 26 are in contact. The limiting inclined plate 26 is fixed to the upper end of the rotating disc 6. The two contact rollers 27 are in contact with the two limiting inclined plates 26. A crystal oscillator probe assembly 29 is in contact with the two sliding clamp assemblies 25. The moving frame assembly 31 can be moved and fixed by the reset mechanism. When the moving frame assembly 31 moves towards the limiting inclined plate 26, the contact roller 27 and the limiting inclined plate 26 are in contact. The two sliding clamp assemblies 25 are relatively and synchronously moved. The reversible screw rod 32 ensures that the two sliding clamp assemblies 25 are synchronously and reversely moved. The two sliding clamp assemblies 25 clamp the crystal oscillator probe assembly 29. The crystal oscillator probe assembly 29 is installed. When it is necessary to disassemble, the moving frame assembly 31 is moved away from the limiting inclined plate 26. The crystal oscillator probe assembly 29 is disassembled. The efficiency of disassembling and replacing the crystal oscillator probe assembly 29 is improved.

[0059] In the embodiment, the measuring and detecting assembly 5 is connected to one of the crystal oscillator probe assemblies 29. The opposite side walls in the moving frame assembly 31 are fixedly connected to elastic telescopic rod assemblies 33. The two elastic telescopic rod assemblies 33 are connected to the sliding clamp assemblies 25 in the moving frame assembly 31. The sliding clamp assemblies 25 are stably moved by the elastic telescopic rod assemblies 33. In actual operation, screw nut assemblies are arranged on the sliding clamp assemblies 25. The reversible screw rod 32 is a screw rod assembly with reverse threads at both ends. The two screw nut assemblies are screwed to the two ends of the reversible screw rod 32. The reversible screw rod 32 is rotated by the movement of the sliding clamp assemblies 25. The two sliding clamp assemblies 25 are reversely moved. The upper ends of the four clamp assemblies are arranged at the lower end of the sliding clamp assemblies 25. The four clamp assemblies are in contact with the upper end of the crystal oscillator probe assembly 29. The crystal oscillator probe assembly 29 is fully clamped. The in-place adjusted crystal oscillator probe assembly 29 is connected to the measuring and detecting assembly 5. The measuring operation is performed.

[0060] In the embodiment, the power mechanism comprises a mounting frame structure 2 mounted on one side of the upper end of the equipment base 1, a motor power assembly 3 is mounted on the equipment base 1, the output shaft of the motor power assembly 3 is rotatably sleeved in the mounting frame structure 2, a vertical shaft 7 is rotatably sleeved on one side of the upper end of the mounting frame structure 2, a synchronous belt assembly 4 is jointly mounted between the vertical shaft 7 and the output shaft of the motor power assembly 3, and a measurement and detection assembly 5 is mounted on the upper end of the mounting frame structure 2; in actual production and preparation, the motor power assembly 3 is composed of a motor part and a transmission shaft assembly, the transmission shaft assembly is connected with the motor shaft of the motor power assembly 3, the transmission shaft is rotatably sleeved on the mounting frame structure 2, and corresponding accessories required for operation of the motor part, such as power connection, control parts, motor operation control parts, etc., are mounted in the equipment base 1, so as to facilitate workers to start the control equipment to make the motor power assembly 3 operate according to the preset program, and a speed reducer assembly is also mounted in the motor power assembly 3, so as to accurately control the rotating speed of the motor power assembly 3.

[0061] The synchronous belt assembly 4 is composed of two wheel bodies and a belt body sleeved on the wheel bodies, and toothed structures are arranged on the belt body and the wheel bodies to achieve mutual meshing and facilitate transmission. The two wheel bodies are respectively fixed on the transmission shaft of the motor power assembly 3 and the vertical shaft 7, so as to facilitate the rotation of the rotating disc 6 through the vertical shaft 7, and the directional switching of the plurality of crystal oscillator probe assemblies 29 can be realized through the rotation of the rotating disc 6.

[0062] In the embodiment, the clamping mechanism comprises a second electric telescopic assembly 14 fixed on the other side of the upper end of the equipment base 1, the output shaft of the second electric telescopic assembly 14 is fixed with a moving plate 18, the moving plate 18 is provided with a lifting mechanism, a plurality of downward pressing shafts 13 are arranged at equal intervals on the lifting mechanism, and the lifting mechanism is connected with the equipment base 1.

[0063] The upper end of the equipment base 1 is provided with a power resistance conveying belt assembly 19, which is located between the moving plate 18 and the mounting frame structure 2. The moving plate 18 is provided with a plurality of rotating shafts 17 and a plurality of bearing shafts 16 at equal intervals on the side close to the power resistance conveying belt assembly 19, and the rotating shafts 17 and the bearing shafts 16 are arranged alternately. A plurality of downward pressing and extruding shafts 13 are arranged at the upper ends of the bearing shafts 16, respectively. The second electric telescopic assembly 14 is connected with the matching components in the equipment base 1 and can be controlled through the control program preset in the control equipment. The second electric telescopic assembly 14 can push the moving plate 18 to move towards the power resistance conveying belt assembly 19. With the movement of the moving plate 18, the bearing shafts 16 can be inserted into the bottom of the power resistance conveying belt assembly 19. At the same time, with the movement of the moving plate 18 towards the power resistance conveying belt assembly 19, the downward pressing and extruding shafts 13 can move towards the bearing shafts 16. The front ends of the downward pressing and extruding shafts 13 can extrude the optical film material, and the rotating shafts 17 and the power resistance conveying belt assembly 19 can cooperate to realize resistance to the optical film material and make it move.

[0064] The power resistance conveying belt assembly 19 comprises a motor component, two long linkage shafts, two long linkage shafts rotatably sleeved on both sides of the upper end of the equipment base 1, a belt member commonly sleeved between the two long linkage shafts, and a plate member commonly rotatably sleeved at the upper ends of the two long linkage shafts. Short shafts are rotatably sleeved at equal intervals on the lower end of the plate member, and the short shafts abut against one end of the side wall of the belt member to realize belt rotation. In use, the bearing shafts 16 are located between the two long linkage shafts and can pass through the position between the lower end of the belt and the upper end of the equipment base 1, so as to adapt to optical film materials of different specifications.

[0065] In this embodiment, the length of the downward pressing and extruding shaft 13 is less than the length of the bearing shaft 16, so that the bearing shaft 16 can effectively resist the optical film material. The length of the bearing shaft 16 is greater than the upper end of the downward pressing and extruding shaft 13. The end of the bearing shaft 16 close to the power resistance conveying belt assembly 19 is arranged in an arc shape, and the end of the downward pressing and extruding shaft 13 close to the power resistance conveying belt assembly 19 is arranged in a convex shape. The bearing shaft 16 can effectively bear the optical film material, and the convex shape of one end of the downward pressing and extruding shaft 13 can facilitate extruding the edge of the optical film material. At the same time, the other end of the optical film material abuts against the power resistance conveying belt assembly 19, facilitating the movement of the optical film material.

[0066] In this embodiment, the lifting mechanism comprises two sliding grooves 20 opened on one side of the upper end of the equipment base 1. A sliding block 22 is slidably installed in the sliding groove 20. An inclined plate member 23 is rotatably connected to the upper end of the sliding block 22. A resistance spring member 21 is commonly fixed on one end of the side wall in the sliding groove 20 and the sliding block 22.

[0067] The connecting plate member 15 is arranged through the mobile plate 18 and is slidingly installed on the mobile plate 18, and the plurality of downward pressing and extruding shafts 13 are connected with the connecting plate member 15;

[0068] The upper ends of the two inclined pull plate members 23 are respectively rotationally connected on one side of the connecting plate member 15; the stretching and shrinking of the second electric telescopic assembly 14 can make the mobile plate 18 move towards the direction of the power resistance and contact conveying belt assembly 19, and the movement of the mobile plate 18 can make the connecting plate member 15 move along with the mobile plate 18, the movement of the connecting plate member 15 can make the inclined pull plate member 23 rotate towards the direction parallel to the upper end of the equipment base 1, at this time, the external force is not enough to make the chute 20 be stretched, which can make the inclined pull plate member 23 move towards the direction parallel to the upper end of the equipment base 1, and can ensure that the downward pressing and extruding shaft 13 stably move downward under the action of the connecting plate member 15, so that the downward pressing and extruding shaft 13 moves towards the direction of the bearing shaft 16;

[0069] When the downward pressing and extruding shaft 13 and the bearing shaft 16 clamp the optical film material, the inclined pull plate member 23 cannot be deflected, and the external force is transmitted to the chute 20, so that the chute 20 is stretched, which can make the optical film material and the belt on the power resistance and contact conveying belt assembly 19 resist each other.

[0070] In the embodiment, the adjusting mechanism includes a first electric telescopic assembly 9 installed on the upper end of the bearing frame 11, and the output shaft of the first electric telescopic assembly 9 is fixed with a resistance member 8, and a vertical shaft member 7 is arranged through the resistance member 8;

[0071] The lower end of the bearing frame 11 is provided with a placing pipe 12 on both sides, and the upper end of the placing pipe 12 is rotationally connected with an inclined pull rod member 10, and the upper end of the inclined pull rod member 10 extends to the upper end of the bearing frame 11, and the two inclined pull rod members 10 are respectively rotationally sleeved on both sides of the piston rod in the first electric telescopic assembly 9; when the vertical shaft member 7 is rotated to a suitable angle, the first electric telescopic assembly 9 can drive the resistance member 8 to move towards the bearing frame 11, so that the resistance member 8 and the vertical shaft member 7 resist each other to realize the resistance and fixation of the vertical shaft member 7;

[0072] When the piston rod of the first electric telescopic assembly 9 is retracted, the placing pipe 12 can be lifted through the inclined pull rod member 10, which is helpful for the crystal oscillator probe assembly 29 to enter the placing pipe 12, and effectively protects or facilitates disassembly;

[0073] In actual production and preparation, the specification of the bearing frame 11 is larger, which can facilitate the rotation of the rotating disc member 6, and the corresponding opening and closing plate structure can be arranged on the placing pipe 12, which can facilitate the disassembly of the crystal oscillator probe assembly 29 and the taking out and replacement through the opening and closing plate structure.

[0074] In the embodiment, the reset mechanism comprises a moving fastening assembly 24 fixed at the lower end of the moving frame assembly 31, the moving fastening assembly 24 is slidingly installed at the upper end of the rotating disc piece 6, and the moving frame assembly 31 and the rotating disc piece 6 are jointly fixed with a reset spring piece 30; the force of the reset spring piece 30 can make the moving frame assembly 31 move towards the direction of the limiting inclined plate piece 26, and the movement of the moving frame assembly 31 can drive the movement of the moving fastening assembly 24, and a screw piece is installed on the moving fastening assembly 24; when the moving frame assembly 31 is adjusted to the position, the screw piece can be rotated to abut against the upper end of the rotating disc piece 6, thereby fixing the position of the moving frame assembly 31, and the clamping and fixing of the crystal oscillator probe assembly 29 are completed.

[0075] In the embodiment, the reset mechanism comprises a moving fastening assembly 24 fixed at the lower end of the moving frame assembly 31, the moving fastening assembly 24 is slidingly installed at the upper end of the rotating disc piece 6, and the moving frame assembly 31 and the rotating disc piece 6 are jointly fixed with a reset spring piece 30; the force of the reset spring piece 30 can make the moving frame assembly 31 move towards the direction of the limiting inclined plate piece 26, and the movement of the moving frame assembly 31 can drive the movement of the moving fastening assembly 24, and a screw piece is installed on the moving fastening assembly 24; when the moving frame assembly 31 is adjusted to the position, the screw piece can be rotated to abut against the upper end of the rotating disc piece 6, thereby fixing the position of the moving frame assembly 31, and the clamping and fixing of the crystal oscillator probe assembly 29 are completed.

[0076] Through the action of the second electric telescopic assembly 14, the moving plate 18 can move towards the direction of the power abutting conveying belt assembly 19, and the downward pressing of the extrusion shaft 13 can cooperate with the clamping of the bearing shaft 16 on the optical film material; through the power abutting conveying belt assembly 19, the optical film material can move below the crystal oscillator probe assembly 29, thereby facilitating the measurement operation.

[0077] The above is only the preferred specific implementation of the present application, but the protection scope of the present application is not limited to this, any person skilled in the art can make equivalent replacement or change according to the technical scheme and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. A low reflection thin film thickness optical measurement device comprising a device base (1), characterized in that: The upper end of the device base (1) is provided with a power mechanism, and the power mechanism is provided with a measurement detection assembly (5) and a vertical shaft (7), and the lower end of the vertical shaft (7) is fixedly provided with a rotating disc (6); The other side of the upper end of the device base (1) is provided with a clamping mechanism, and the clamping mechanism is provided with a bearing frame (11), and the bearing frame (11) is provided with an adjusting mechanism, and the adjusting mechanism is connected with the vertical shaft (7), and the adjusting mechanism is provided with two placing pipes (12); A plurality of openings (28) are formed at equal intervals on the rotating disc (6), and a plurality of reset mechanisms are provided at equal intervals on the rotating disc (6), and the reset mechanisms are provided with a moving frame assembly (31), and a plurality of moving frame assemblies (31) are respectively arranged at the upper end of the plurality of openings (28), and the opposite side walls in the moving frame assembly (31) are jointly connected with a positive and negative tooth screw rod (32), and the two ends of the positive and negative tooth screw rod (32) are screwed with a sliding clamping assembly (25), and one end of the two sliding clamping assemblies (25) is provided with a resisting roller (27), and the upper end of the opening (28) is provided with a limiting inclined plate (26) on both sides, and the limiting inclined plate (26) is fixed on the upper end of the rotating disc (6), and the two resisting rollers (27) respectively abut against the two limiting inclined plates (26), and the two sliding clamping assemblies (25) jointly abut against a crystal oscillator probe assembly (29); The measurement detection assembly (5) is connected with one of the crystal oscillator probe assemblies (29).

2. A low reflection thin film thickness optical measurement device according to claim 1, characterized by: The power mechanism comprises a mounting frame structure (2) mounted on one side of the upper end of the device base (1), and the device base (1) is provided with a motor power assembly (3), and the output shaft of the motor power assembly (3) is rotatably sleeved in the mounting frame structure (2), and the vertical shaft (7) is rotatably sleeved on one side of the upper end of the mounting frame structure (2), and the vertical shaft (7) and the output shaft of the motor power assembly (3) are jointly provided with a synchronous belt assembly (4), and the measurement detection assembly (5) is mounted on the upper end of the mounting frame structure (2).

3. The low reflection thin film thickness optical measurement device of claim 1, wherein: The clamping mechanism comprises a second electric telescopic assembly (14) fixed on the other side of the upper end of the device base (1), and the output shaft of the second electric telescopic assembly (14) is fixedly provided with a moving plate (18), and the moving plate (18) is provided with a lifting mechanism, and the lifting mechanism is provided with a plurality of downward pressing and extruding shafts (13) at equal intervals, and the lifting mechanism is connected with the device base (1); The upper end of the device base (1) is provided with a power resisting conveying belt assembly (19), and the power resisting conveying belt assembly (19) is located between the moving plate (18) and the mounting frame structure (2), and the side of the moving plate (18) close to the power resisting conveying belt assembly (19) is provided with a plurality of rotating shafts (17) and a plurality of bearing shafts (16) at equal intervals, and the plurality of rotating shafts (17) and the plurality of bearing shafts (16) are arranged alternately; A plurality of downward pressing and extruding shafts (13) are arranged at the upper end of the plurality of bearing shafts (16).

4. The low-reflectance thin film thickness optical measurement device of claim 3, wherein: The length of the bearing shaft (16) is greater than the upper end of the lower pressing shaft (13), the bearing shaft (16) is arranged in an arc shape near one end of the power contact conveying belt assembly (19), and the lower pressing shaft (13) is arranged in a convex shape near one end of the power contact conveying belt assembly (19).

5. The low-reflectance thin film thickness optical measurement device of claim 3, wherein: The lifting mechanism comprises two sliding grooves (20) formed on one side of the upper end of the equipment base (1), a sliding block (22) slidably installed in the sliding groove (20), and a diagonal pull plate (23) rotatably connected to the upper end of the sliding block (22), wherein a resistance spring (21) is fixed to the sliding block (22) and one end of the side wall in the sliding groove (20). The moving plate (18) is provided with a connecting plate (15) penetrating therethrough, the connecting plate (15) is slidably installed on the moving plate (18), and the plurality of lower pressing shafts (13) are connected with the connecting plate (15). The upper ends of the two diagonal pull plates (23) are rotatably connected to one side of the connecting plate (15).

6. The low reflection thin film thickness optical measurement device of claim 1, wherein: The adjusting mechanism comprises a first electric telescopic assembly (9) installed on the upper end of the bearing frame (11), a contact piece (8) fixed to the output shaft of the first electric telescopic assembly (9), and a vertical shaft (7) penetratingly arranged in the contact piece (8). The lower end of the bearing frame (11) is provided with a placing pipe (12) penetratingly arranged on both sides, and the placing pipe (12) is rotatably connected with a diagonal pull rod (10) on one side.

7. The low reflection thin film thickness optical measurement device of claim 1, wherein: The reset mechanism comprises a moving fastening assembly (24) fixed to the lower end of the moving frame assembly (31), and the moving fastening assembly (24) is slidably installed on the upper end of the rotating disc (6).

8. The low reflection thin film thickness optical measurement device of claim 1, wherein: The opposite sides of the two limiting inclined plate assemblies (26) are arranged in an inclined manner, and the contact roller (27) and the inclined surface of the limiting inclined plate assembly (26) are in contact.

9. The low reflection thin film thickness optical measurement device of claim 3, wherein: The length of the lower pressing shaft (13) is less than the length of the bearing shaft (16).

10. The low reflection thin film thickness optical measurement device of claim 1, wherein: The opposite side walls in the moving frame assembly (31) are fixed with elastic telescopic rod assemblies (33), and the two elastic telescopic rod assemblies (33) are connected with the sliding clamping assembly (25) in the moving frame assembly (31).

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