Input device

Abstract

The invention provides an input device. The force applied to the shaft portion can be detected with high sensitivity without increasing the amount of strain of the strain body. The input device includes: a shaft portion; a plate-shaped deformation part which is integrally formed with the shaft part and is orthogonal to the axial direction of the shaft part; a plurality of strain detection elements provided in the deformation part; and a detection circuit including: a first measurement circuit that includes some of the plurality of strain detection elements and detects a force applied to the shaft portion in a direction orthogonal to the axial direction; a second measurement circuit that includes other portions of the plurality of strain detection elements and detects a force applied to the shaft portion in a direction orthogonal to the axial direction; a first fixed resistor connected to the power supply voltage side of the first measurement circuit; and a second fixed resistor which is connected to the ground side of the second measurement circuit, and which detects a force applied to the shaft portion in the axial direction on the basis of a voltage between a connection point between the first measurement circuit and the first fixed resistor and a connection point between the second measurement circuit and the second fixed resistor.

Description

Technical Field

[0001] This invention relates to input devices. Background Technology

[0002] In the following Patent Document 1, regarding the input device, the following technology is disclosed: the strain of the strain body is detected by a voltage detection circuit having a bridging circuit consisting of four strain detection elements printed on a flexible substrate and a resistor connected to the bridging circuit, thereby detecting the operation applied to the operating member in the X-axis direction, Y-axis direction and Z-axis direction.

[0003] Furthermore, in Patent Document 2 below, regarding the input device, the following technology is disclosed: the strain of the strain body is detected by a detection circuit having a bridging circuit consisting of four strain detection elements printed on a flexible substrate and a resistor connected to the bridging circuit, thereby detecting the operation in each direction of the protrusion of the rod in the X-axis direction and the Z-axis direction.

[0004] Prior art literature

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent Application Publication No. 2000-047814

[0007] Patent Document 2: Japanese Patent Application Publication No. 2021-177291 Summary of the Invention

[0008] However, conventional input devices require a large strain on the strained body to increase the output of the detection circuit and thus improve the sensitivity of the detection operation, which may reduce the durability of the strained body.

[0009] One embodiment of the input device includes: a shaft portion; a plate-shaped deformable portion integrally formed with the shaft portion and orthogonal to the axial direction of the shaft portion; a plurality of strain detection elements disposed in the deformable portion; and a detection circuit, the detection circuit having: a first measuring circuit including a portion of the plurality of strain detection elements for detecting a force applied to the shaft portion in a direction orthogonal to the axial direction; a second measuring circuit including other portions of the plurality of strain detection elements for detecting a force applied to the shaft portion in a direction orthogonal to the axial direction; a first fixed resistor connected to the power supply voltage side of the first measuring circuit; and a second fixed resistor connected to the ground side of the second measuring circuit, the detection circuit detecting the force applied to the shaft portion in the axial direction based on the voltage between the connection point of the first measuring circuit and the first fixed resistor and the connection point of the second measuring circuit and the second fixed resistor.

[0010] -Invention Effects-

[0011] According to one embodiment of the input device, the force applied to the shaft can be detected with high sensitivity without increasing the strain of the strain body. Attached Figure Description

[0012] Figure 1 This is an exploded perspective view of the force sensor according to one embodiment, viewed from above (positive Z-axis direction).

[0013] Figure 2 This is an exploded perspective view of a force sensor according to one embodiment, viewed from below (negative Z-axis direction).

[0014] Figure 3 This is a bottom view of a force sensor according to one embodiment.

[0015] Figure 4 This is a circuit diagram of the detection circuit of a force sensor according to one embodiment.

[0016] Figure 5 This is a circuit diagram illustrating a first modified example of the structure of the detection circuit of a force sensor according to an embodiment.

[0017] Figure 6 This is a circuit diagram illustrating a second variation of the structure of the detection circuit included in a force sensor according to one embodiment.

[0018] Figure 7 This is a circuit diagram illustrating a third variation of the structure of the detection circuit included in a force sensor according to one embodiment.

[0019] Figure 8 This is a circuit diagram illustrating a fourth variation of the structure of the detection circuit included in a force sensor according to one embodiment.

[0020] Figure 9 This is a diagram illustrating a first modified example of a force sensor according to one embodiment.

[0021] Figure 10 This is a circuit diagram illustrating a fifth variation of the structure of the detection circuit included in a force sensor according to one embodiment.

[0022] Figure 11 This is a circuit diagram illustrating a sixth variation of the structure of the detection circuit included in a force sensor according to an embodiment.

[0023] Figure 12 This is a circuit diagram illustrating a seventh variation of the structure of the detection circuit included in a force sensor according to an embodiment.

[0024] Figure 13This is a circuit diagram illustrating the structure of the detection circuit of a force sensor according to one embodiment.

[0025] Figure 14 This is a diagram illustrating a modified example of a switch included in a force sensor according to one embodiment.

[0026] Figure 15 This is a diagram illustrating a first variation of the configuration of a plurality of strain detection elements in a force sensor according to an embodiment.

[0027] Figure 16 This is a diagram illustrating a second variation of the configuration of multiple strain detection elements in a force sensor according to one embodiment.

[0028] Figure 17 This is a diagram illustrating a third variation of the configuration of multiple strain detection elements in a force sensor according to one embodiment.

[0029] Figure 18 This is a cross-sectional view showing a second modified example of a force sensor according to one embodiment.

[0030] Figure 19 This is a cross-sectional view showing a third modified example of a force sensor according to one embodiment.

[0031] Figure 20 This is a cross-sectional view showing a fourth modified example of a force sensor according to one embodiment.

[0032] -Explanation of the reference numerals in the attached diagram-

[0033] 100, 100-2, 100-3, 100-4, 100-5: Force sensors

[0034] 110: Variant

[0035] 111: Base

[0036] 111A: Deformation section

[0037] 112: Shaft

[0038] 113: concave part

[0039] 114: Through hole

[0040] 120: Operation knob

[0041] 121: Shaft

[0042] 121A: Lower end face

[0043] 122: concave part

[0044] 130: Flexible substrate

[0045] 131: Base

[0046] 131A: Opening

[0047] 132: Introduction

[0048] 140: Strain detection element

[0049] SX1, SX2, SX3, SX4, SY1, SY2, SY3, SY4: Strain detection elements

[0050] S1, S2, S3, S4: Strain detection elements

[0051] 150, 150-2, 150-3, 150-4, 150-5, 150-6, 150-7, 150-8, 150-9: Detection circuit

[0052] 151: First measuring circuit

[0053] 151A: First X-axis series circuit

[0054] 151B: Second X-axis series circuit

[0055] 152: Second Measurement Circuit

[0056] 152A: First Y-axis series circuit

[0057] 152B: Second Y-axis series circuit

[0058] 153X, 153Y, 153Z: Differential amplifiers

[0059] 160: Movable contact component

[0060] 170-1, 170-2, 170-3: Elastic components

[0061] 180: Substrate

[0062] 182: Fixed contact

[0063] PX1: First X-axis connection point

[0064] PX2: Second X-axis connection point

[0065] PY1: First Y-axis connection point

[0066] PY2: Second Y-axis connection point

[0067] PZ1: First Z-axis connection point

[0068] PZ2: Second Z-axis connection point

[0069] R1: First fixed resistor

[0070] R2: Second fixed resistor

[0071] SXout: Output of the X-axis

[0072] SYout: Y-axis output

[0073] SZout: Output of the Z-axis. Detailed Implementation

[0074] The following describes one embodiment. For convenience, in the following description, the X-axis direction in the figures will be defined as the left-right direction, the Y-axis direction as the front-back direction, and the Z-axis direction as the up-down direction. Specifically, the positive X-axis direction will be defined as the right direction, the positive Y-axis direction as the front direction, and the positive Z-axis direction as the up direction. These represent relative positional relationships within the device and do not limit the device's installation or operating direction. Devices with the same relative positional relationships within the device, or devices with different installation or operating directions, are all included within the scope of this invention.

[0075] (Structure of force sensor 100)

[0076] Figure 1 This is an exploded perspective view of the force sensor 100 according to one embodiment, viewed from above (positive Z-axis direction). Figure 2 This is an exploded perspective view of the force sensor 100 according to one embodiment, viewed from below (negative Z-axis direction).

[0077] like Figures 5-8 As shown, the force sensor 100 (an example of an "input device") includes a strain gauge 110, an operation knob 120, and a flexible substrate 130.

[0078] The strain gauge 110 is a resin component that generates strain by receiving operational input from an operator. The strain gauge 110 has a base 111 and a shaft 112.

[0079] The base 111 is a horizontal, flat plate-like portion with a certain thickness in the vertical direction (Z-axis direction). The base 111 is square when viewed from above and below.

[0080] A recess 113 with an upwardly recessed shape is formed on the lower surface of the base 111. The recess 113 has a circular shape when viewed from below. The base 131 of the flexible substrate 130 is disposed in the recess 113.

[0081] A circular deformable portion 111A is provided at the center of the upper surface of the base 111. The deformable portion 111A is the portion that generates strain when an operating load is applied from the shaft portion 112. The deformable portion 111A is thinned by having a recess 113 on the back side, making it easy to generate strain.

[0082] Four through holes 114 are formed at the four corners of the base 111, extending through the base 111 in the vertical direction. The base 111 is fixed to any mounting surface (not shown) by four fixing screws (not shown) that pass through the four through holes 114.

[0083] The shaft portion 112 is erected at the center of the deformable portion 111A of the base portion 111, and is a cylindrical portion with the vertical direction (Z-axis direction) as the axial direction. The shaft portion 112 is integrally formed with the deformable portion 111A, and the deformable portion 111A is strained by transmitting the operating load applied by the operator to the deformable portion 111A.

[0084] An operating knob 120 is mounted on the upper end of the shaft portion 112 of the strain gauge 110. Specifically, a recess 122 with an upwardly recessed shape is formed on the lower surface of the operating knob 120. When viewed from below, the recess 122 has a circular shape with approximately the same diameter as the upper end of the shaft portion 112 of the strain gauge 110. The operating knob 120 is mounted on the upper end of the shaft portion 112 of the strain gauge 110 by inserting the upper end of the shaft portion 112 into the recess 122. The operating knob 120 receives operational input from the operator.

[0085] The flexible substrate 130 is a flexible, film-like wiring component. The flexible substrate 130 has a base 131 and a lead-out portion 132.

[0086] The base 131, when viewed from above, has an annular shape and is the portion disposed in the recess 113 of the strain gauge 110 and attached to the back side of the deformed portion 111A of the strain gauge 110. A circular opening 131A is formed in the center of the base 131.

[0087] The lead-out portion 132 is a strip-shaped portion extending outward from the outer periphery of the base portion 131 (in the positive X-axis and positive Y-axis directions). The lead-out portion 132 is electrically connected to an external connector (not shown) at its front end.

[0088] In the flexible substrate 130, eight strain sensing elements 140 are provided around the opening 131A on the lower surface of the base 131. Each of the eight strain sensing elements 140 is a resistor printed on the lower surface of the base 131. The eight strain sensing elements 140 are provided to detect the strain of the deformed portion 111A of the strain variant 110 in conjunction with the operator's input to the shaft portion 112 of the corresponding variant 110. The eight strain sensing elements 140 are arranged on the back side of the deformed portion 111A of the strain variant 110 by attaching the base 131 of the flexible substrate 130 to the back side of the deformed portion 111A of the strain variant 110.

[0089] The flexible substrate 130 can output strain detection signals (analog signals) to an external computer via the lead-out portion 132, which are detected by eight strain detection elements 140 respectively and represent the strain of the deformed portion 111A of the strain 110.

[0090] When the operator operates the shaft portion 112 of the corresponding variant 110 (tilting operation and pressing operation), the deformation portion 111A of the strained variant 110 generates strain, which can be detected by the eight strain detection elements 140 provided on the strained variant 110.

[0091] (Configuration of strain sensing element 140)

[0092] Next, refer to Figure 3 The configuration of the eight strain detection elements 140 in the force sensor 100 will be described. Figure 3 This is a bottom view of a force sensor 100 according to one embodiment.

[0093] like Figure 3 As shown, the force sensor 100 has two strain detection elements 140 on each of the four directions (front (positive Y-axis direction), rear (negative Y-axis direction), right (positive X-axis direction), and left (negative X-axis direction)) based on the opening 131A (i.e., the central part of the base 131).

[0094] These eight strain sensing elements 140 are resistive elements printed on the lower surface of the base 131 of the flexible substrate 130. Furthermore, these eight strain sensing elements 140 are rectangular with the sensing direction as their long side, and their two ends in the long side direction are connected to wiring (not shown) of the flexible substrate 130. These eight strain sensing elements 140, in accordance with the strain of the deformed portion 111A of the strained body 110, increase in resistance by elongating along the long side direction and decrease in resistance by contracting along the long side direction.

[0095] Specifically, on the lower surface of the base 131, on the right side (positive side of the X-axis) with reference to the opening 131A, strain detection element 140 marked "SX1" (hereinafter referred to as "strain detection element SX1") and strain detection element 140 marked "SX2" (hereinafter referred to as "strain detection element SX2") are arranged parallel to each other along the Y-axis direction.

[0096] Furthermore, on the lower surface of the base 131, on the left side (negative side of the X-axis) relative to the opening 131A, strain detection element 140 marked "SX3" (hereinafter referred to as "strain detection element SX3") and strain detection element 140 marked "SX4" (hereinafter referred to as "strain detection element SX4") are arranged parallel to each other along the Y-axis direction.

[0097] Furthermore, on the lower surface of the base 131, on the front side (positive side of the Y-axis) with reference to the opening 131A, strain detection element 140 marked "SY1" (hereinafter referred to as "strain detection element SY1") and strain detection element 140 marked "SY2" (hereinafter referred to as "strain detection element SY2") are arranged parallel to each other along the X-axis direction.

[0098] Furthermore, on the lower surface of the base 131, on the rear side (negative side of the Y-axis) relative to the opening 131A, strain detection element 140 marked "SY3" (hereinafter referred to as "strain detection element SY3") and strain detection element 140 marked "SY4" (hereinafter referred to as "strain detection element SY4") are arranged parallel to each other along the X-axis direction.

[0099] The eight strain detection elements 140 each have a rectangle whose long side is the detection direction, and are oriented with the tilting direction of the shaft portion 112 as the detection direction.

[0100] That is, the four strain detection elements 140 located on the right side (positive side of X-axis) and the left side (negative side of X-axis) are oriented with the X-axis direction as the detection direction.

[0101] Therefore, when the shaft 112 is tilted in the X-axis direction, the four strain detection elements 140 located on the right side (positive side of the X-axis) and the left side (negative side of the X-axis) extend or contract in the X-axis direction and their resistance values ​​change, thus detecting the tilting operation in the X-axis direction.

[0102] For example, in one embodiment, when an operating load is applied to the shaft portion 112 in the positive X-axis direction, the resistance value of the force sensor 100 changes in the positive direction due to the elongation of the two strain detection elements SX1 and SX2 on the positive X-axis side, and the resistance value changes in the negative direction due to the contraction of the two strain detection elements SX3 and SX4 on the negative X-axis side.

[0103] Conversely, in one embodiment, when an operating load is applied to the shaft portion 112 in the negative X-axis direction, the resistance value changes in the negative direction due to the contraction of the two strain detection elements SX1 and SX2 on the positive X-axis side, and the resistance value changes in the positive direction due to the extension of the two strain detection elements SX3 and SX4 on the negative X-axis side.

[0104] In addition, the four strain detection elements 140 located on the front (positive Y-axis side) and the rear (negative Y-axis side) are oriented with the Y-axis direction as the detection direction.

[0105] Therefore, when the shaft 112 is tilted in the Y-axis direction, the four strain detection elements 140 provided on the front (positive Y-axis side) and rear (negative Y-axis side) stretch or contract in the Y-axis direction and their resistance values ​​change, which can detect the tilting operation in the Y-axis direction.

[0106] For example, when an operating load is applied to the shaft 112 in the positive Y-axis direction, the force sensor 100 according to one embodiment extends through the two strain detection elements SY1 and SY2 on the positive Y-axis side, and the resistance value changes in the positive direction; and contracts through the two strain detection elements SY3 and SY4 on the negative Y-axis side, and the resistance value changes in the negative direction.

[0107] Conversely, when an operating load is applied to the shaft 112 in the negative Y-axis direction, the force sensor 100 according to one embodiment contracts through the two strain detection elements SY1 and SY2 on the positive Y-axis side, causing the resistance value to change in the negative direction, and extends through the two strain detection elements SY3 and SY4 on the negative X-axis side, causing the resistance value to change in the positive direction.

[0108] Furthermore, for example, when an operating load is applied to the shaft portion 112 in the negative Z-axis direction, all eight strain detection elements 140 of the force sensor 100 according to one embodiment extend, thereby changing the resistance value in the positive direction.

[0109] Furthermore, strain detection element SX1 is an example of a "first X-axis strain detection element". Additionally, strain detection element SX2 is an example of a "second X-axis strain detection element". Furthermore, strain detection element SX3 is an example of a "third X-axis strain detection element". Furthermore, strain detection element SX4 is an example of a "fourth X-axis strain detection element".

[0110] Furthermore, strain detection element SY1 is an example of a "first Y-axis strain detection element". Furthermore, strain detection element SY2 is an example of a "second Y-axis strain detection element". Furthermore, strain detection element SY3 is an example of a "third Y-axis strain detection element". Furthermore, strain detection element SY4 is an example of a "fourth Y-axis strain detection element".

[0111] (Structure of detection circuit 150)

[0112] Figure 4 This is a circuit diagram of the detection circuit 150 of the force sensor 100 according to one embodiment.

[0113] like Figure 4 As shown, the force sensor 100 has a detection circuit 150 including a first measurement circuit 151 and a second measurement circuit 152, each of which is composed of four strain detection elements 140.

[0114] The first measuring circuit 151 is a bridge circuit that connects in parallel a first X-axis series circuit 151A, which is formed by connecting strain sensing elements SX3 and SX1 in series, and a second X-axis series circuit 151B, which is formed by connecting strain sensing elements SX2 and SX4 in series. Strain sensing elements SX3 and SX2 are located on the +B side of the power supply. On the other hand, strain sensing elements SX1 and SX4 are located on the ground side.

[0115] The first measuring circuit 151 has a first X-axis connection point PX1 between strain detection element SX3 and strain detection element SX1, and a second X-axis connection point PX2 between strain detection element SX2 and strain detection element SX4.

[0116] In addition, the polarities of the voltage values ​​at the first X-axis connection point PX1 and the second X-axis connection point PX2 are reversed.

[0117] The second measuring circuit 152 is a bridge circuit formed by connecting in parallel a first Y-axis series circuit 152A, which consists of strain detection elements SY3 and SY1 connected in series, and a second Y-axis series circuit 152B, which consists of strain detection elements SY2 and SY4 connected in series. Strain detection elements SY3 and SY2 are located on the +B side of the power supply. On the other hand, strain detection elements SY1 and SY4 are located on the ground side.

[0118] The second measuring circuit 152 has a first Y-axis connection point PY1 between strain detection element SY3 and strain detection element SY1, and a second Y-axis connection point PY2 between strain detection element SY2 and strain detection element SY4.

[0119] In addition, the polarities of the voltage values ​​at the first Y-axis connection point PY1 and the second Y-axis connection point PY2 are reversed.

[0120] One embodiment of the detection circuit 150 detects the force applied to the shaft portion 112 along the X-axis direction based on the voltage between the first X-axis connection point PX1 and the second X-axis connection point PX2. Furthermore, another embodiment of the detection circuit 150 detects the force applied to the shaft portion 112 along the Y-axis direction based on the voltage between the first Y-axis connection point PY1 and the second Y-axis connection point PY2.

[0121] Furthermore, in one embodiment, the detection circuit 150 has a first fixed resistor R1 connected to the power supply voltage (constant voltage terminal +B) side of the first measuring circuit 151, and a second fixed resistor R2 connected to the ground side of the second measuring circuit 152. Based on the voltage between the first Z-axis connection point PZ1 of the first measuring circuit 151 and the first fixed resistor R1 and the second Z-axis connection point PZ2 of the second measuring circuit 152 and the second fixed resistor R2, the force applied to the shaft portion 112 in the Z-axis direction is detected.

[0122] Thus, the detection circuit 150 according to one embodiment detects the operating load in the X-axis direction by setting up four strain sensing elements SX1, SX2, SX3, and SX4, which is twice the usual amount. This allows obtaining two voltage values: the voltage value output from the first X-axis connection point PX1 (the intermediate potential between strain sensing elements SX1 and SX2) and the voltage value output from the second X-axis connection point PX2 (the intermediate potential between strain sensing elements SX3 and SX4). Therefore, by measuring the difference between these two voltage values ​​using the differential amplifier 153X, twice the conventional output can be obtained as the X-axis output SXout. Therefore, according to the detection circuit 150 according to one embodiment, the force applied to the shaft 112 in the X-axis direction can be detected with high sensitivity without increasing the strain of the strain gauge 110. By doubling the sensitivity, the minimum detectable force is halved compared to the conventional limit. On the other hand, the maximum detectable force remains within the range where the strain gauge 110 and strain sensing elements 140 will not be damaged, as is the case previously. Therefore, the dynamic range is doubled compared to the conventional limit.

[0123] For example, the X-axis output SXout of the detection circuit 150 according to one embodiment is obtained by the following formula (1). Wherein, k is a constant based on the magnitude of the power supply voltage +B and the sensitivity of the strain detection element 140.

[0124] [Mathematical Expression 1]

[0125]

[0126] Similarly, in one embodiment, the detection circuit 150 detects the operating load in the Y-axis direction by setting up four strain detection elements SY1, SY2, SY3, and SY4, which are typically twice the number. This yields two voltage values: the voltage value output from the first Y-axis connection point PY1 (the intermediate potential between strain detection elements SY1 and SY2) and the voltage value output from the second Y-axis connection point PY2 (the intermediate potential between strain detection elements SY3 and SY4). Therefore, by measuring the difference between these two voltage values ​​using the differential amplifier 153Y, twice the conventional output can be obtained as the Y-axis output SYout. Thus, according to the detection circuit 150 of one embodiment, the force applied to the shaft 112 in the Y-axis direction can be detected with high sensitivity without increasing the strain of the strain variant 110. By doubling the sensitivity, the minimum detectable force is halved, and the dynamic range is doubled.

[0127] For example, the Y-axis output SYout of the detection circuit 150 according to one embodiment is obtained by the following formula (2). Wherein, k is a constant based on the magnitude of the power supply voltage +B and the sensitivity of the strain detection element 140.

[0128] [Mathematical Expression 2]

[0129]

[0130] Furthermore, the detection circuit 150 according to one embodiment detects the operating load in the Z-axis direction, obtaining two voltage values: a voltage value output from the first Z-axis connection point PZ1 (the intermediate potential between the first measuring circuit 151 and the first fixed resistor R1) and a voltage value output from the second Z-axis connection point PZ2 (the intermediate potential between the second measuring circuit 152 and the second fixed resistor R2). Therefore, by measuring the difference between these two voltage values ​​using the differential amplifier 153Z, twice the conventional output can be obtained as the Z-axis output SZout. Thus, according to the detection circuit 150 according to one embodiment, the force applied to the shaft 112 in the Z-axis direction can be detected with high sensitivity without increasing the strain of the strain variant 110. By doubling the sensitivity, the minimum detectable force is halved, and the dynamic range is doubled.

[0131] For example, the Z-axis output SZout of the detection circuit 150 according to one embodiment is obtained by the following formula (3). Wherein, k is a constant based on the magnitude of the power supply voltage +B and the sensitivity of the strain detection element 140. BRX represents the combined resistance of the strain detection elements SX1, SX2, SX3, and SX4 of the first measurement circuit 151. BRY represents the combined resistance of the strain detection elements SY1, SY2, SY3, and SY4 of the second measurement circuit 152.

[0132] [Mathematical Expression 3]

[0133]

[0134] Additionally, the detection circuit 150 may be implemented, for example, by an integrated circuit (IC). Furthermore, the detection circuit 150 may also include an A / D converter, located after the differential amplifiers 153X, 153Y, and 153Z, to convert the X-axis output SXout, Y-axis output SYout, and Z-axis output SZout into digital signals. Moreover, the grounding can be any potential considered as a reference potential, and may differ from the actual ground potential.

[0135] (First variation of the structure of detection circuit 150)

[0136] Figure 5 This is a circuit diagram illustrating a first modified example of the structure of the detection circuit 150 included in the force sensor 100 according to an embodiment.

[0137] Figure 5 The detection circuit 150-2 shown is... Figure 4 The difference in the detection circuit 150 shown is that the first fixed resistor R1 is connected to the power supply voltage (constant voltage terminal +B) side of the second measuring circuit 152, and the second fixed resistor R2 is connected to the ground side of the first measuring circuit 151.

[0138] in, Figure 5 The detection circuit 150-2 shown detects the operating load in the Z-axis direction, obtaining two voltage values: the voltage value output from the first Z-axis connection point PZ1 (the intermediate potential between the second measuring circuit 152 and the first fixed resistor R1) and the voltage value output from the second Z-axis connection point PZ2 (the intermediate potential between the first measuring circuit 151 and the second fixed resistor R2). At this point, the voltage values ​​are... Figure 4 The detection circuit shown is the same as 150.

[0139] therefore, Figure 5 The detection circuit 150-2 shown is... Figure 4Similarly, the detection circuit 150 shown can obtain twice the usual output as the Z-axis output SZout by measuring the difference between these two voltage values.

[0140] (Second variation of the structure of detection circuit 150)

[0141] Figure 6 This is a circuit diagram illustrating a second variation of the structure of the detection circuit 150 included in the force sensor 100 according to one embodiment.

[0142] exist Figure 6 In the detection circuit 150-8 shown, the first measuring circuit 151 is a bridge circuit that connects in parallel a first X-axis series circuit 151A formed by connecting strain sensing elements SX3 and SX1 in series, and a second X-axis series circuit 151B' formed by connecting strain sensing elements SX4 and SX2 in series. Strain sensing elements SX3 and SX4 are located on the +B side of the power supply. Strain sensing elements SX1 and SX2 are located on the ground side. Figure 4 Compared to the detection circuit 150 shown, the connection relationship between the strain detection element SX2 and the strain detection element SX4 constituting the second X-axis series circuit 151B' is reversed. That is, in Figure 4 In the detection circuit 150 shown, strain detection element SX2 is connected to the +B power supply side, and strain detection element SX4 is connected to the ground side. On the other hand, in Figure 6 In the detection circuit 150-8 shown, strain detection element SX4 is connected to the +B side of the power supply voltage, and strain detection element SX2 is connected to the ground side.

[0143] In addition, Figure 6 In the detection circuit 150-8 shown, the first measuring circuit 151 has a first X-axis connection point PX1 between strain detection element SX3 and strain detection element SX1, and a second X-axis connection point PX2' between strain detection element SX4 and strain detection element SX2.

[0144] In addition, Figure 6 In the detection circuit 150-8 shown, the second measuring circuit 152 is a bridge circuit that connects in parallel a first Y-axis series circuit 152A formed by connecting strain detection elements SY3 and SY1 in series, and a second Y-axis series circuit 152B' formed by connecting strain detection elements SY4 and SY2 in series. Strain detection elements SY3 and SY4 are located on the +B side of the power supply. Strain detection elements SY1 and SY2 are located on the ground side. Figure 4Compared to the detection circuit 150 shown, the connection relationship between strain detection element SY2 and strain detection element SY4, which constitute the second Y-axis series circuit 152B', is reversed. That is, in Figure 4 In the detection circuit 150 shown, strain detection element SY2 is connected to the +B power supply side, and strain detection element SY4 is connected to the ground side. On the other hand, in Figure 6 In the detection circuit 150-8 shown, strain detection element SY4 is connected to the +B side of the power supply, and strain detection element SY2 is connected to the ground side.

[0145] In addition, Figure 6 In the detection circuit 150-8 shown, the second measuring circuit 152 has a first Y-axis connection point PY1 between strain detection element SY3 and strain detection element SY1, and a second Y-axis connection point PY2' between strain detection element SY4 and strain detection element SY2.

[0146] In addition, Figure 6 In the detection circuit 150-8 shown, the voltage value at the first X-axis connection point PX1 is approximately equal to the voltage value at the second X-axis connection point PX2'. Furthermore, in Figure 6 In the detection circuit 150-8 shown, the voltage value of the first Y-axis connection point PY1 is approximately equal to the voltage value of the second Y-axis connection point PY2'.

[0147] Figure 6 The detection circuit 150-8 shown obtains two voltage values: the voltage value output from the first X-axis connection point PX1 (the intermediate potential between strain detection elements SX1 and SX3) and the voltage value output from the second X-axis connection point PX2' (the intermediate potential between strain detection elements SX2 and SX4). By using an adder circuit to sum these two voltage values, twice the previous output can be obtained, which is used as the X-axis output SXout.

[0148] Figure 6 The X-axis output SXout of the detection circuit 150 involved in the detection circuit 150-8 shown is obtained by the following equation (4). Wherein, k is a constant based on the magnitude of the power supply voltage +B and the sensitivity of the strain detection element 140. l is the output constant when no load is applied. In addition, in order to simplify data processing, it can also be corrected in an external computer to obtain the value by subtracting the constant l.

[0149] [Mathematical Expression 4]

[0150]

[0151] Figure 6The detection circuit 150-8 shown obtains two voltage values: the voltage value output from the first Y-axis connection point PY1 (the intermediate potential between strain detection elements SY1 and SY3) and the voltage value output from the second Y-axis connection point PY2' (the intermediate potential between strain detection elements SY2 and SY4). By adding these two voltage values ​​using an adder circuit, twice the previous output can be obtained, which is used as the Y-axis output SYout.

[0152] Figure 6 The output SYout of the Y-axis of the detection circuit 150 involved in the detection circuit 150-8 shown is obtained by the following equation (5). Wherein, k is a constant based on the magnitude of the power supply voltage +B and the sensitivity of the strain detection element 140. l is the output constant when no load is applied. In addition, in order to simplify data processing, it can also be corrected in an external computer to obtain the value by subtracting the constant l.

[0153] [Mathematical Expression 5]

[0154]

[0155] and then, Figure 6 The detection circuit 150-8 shown has a first fixed resistor R1 connected to the power supply voltage (constant voltage terminal +B) side of the first measuring circuit 151, and a second fixed resistor R2 connected to the power supply voltage (constant voltage terminal +B) of the second measuring circuit 152. The force applied to the shaft portion 112 in the Z-axis direction is detected based on the voltage between the first fixed resistor R1 and the first Z-axis connection point PZ1 of the first measuring circuit 151 and the second fixed resistor R2 and the second Z-axis connection point PZ2' of the second measuring circuit 152.

[0156] Figure 6 The detection circuit 150-8 shown detects the operating load in the Z-axis direction, obtaining two voltage values: the voltage value output from the first Z-axis connection point PZ1 (the intermediate potential between the first fixed resistor R1 and the first measuring circuit 151) and the voltage value output from the second Z-axis connection point PZ2' (the intermediate potential between the second fixed resistor R2 and the second measuring circuit 152). By using an adder circuit to sum these two voltage values, twice the previous output can be obtained, which is used as the Z-axis output SZout.

[0157] Figure 6The Z-axis output SZout of the detection circuit 150 involved in the detection circuit 150-8 shown is obtained by the following equation (6). Wherein, k is a constant based on the magnitude of the power supply voltage +B and the sensitivity of the strain detection element 140. l is the output constant when no load is applied. In addition, in order to simplify data processing, it can also be corrected in an external computer to obtain the value by subtracting the constant l.

[0158] [Mathematical Expression 6]

[0159]

[0160] Figure 6 The detection circuit 150-8 shown has switches SW1 and SW2 between the power supply voltage +B and the first measurement circuit 151. Figure 6 The detection circuit 150-8 shown has switches SW3 and SW4 between the power supply voltage +B and the second measurement circuit 152.

[0161] Figure 6 When detecting the operating load on the X and Y axes, the detection circuit 150-8 shown switches switch SW1 to open and switch SW2 to open, thereby connecting the first measuring circuit 151 directly to the power supply voltage +B without passing through the first fixed resistor R1. Simultaneously, Figure 6 The detection circuit 150-8 shown switches switch SW3 to open and switch SW4 to open, thereby connecting the second measuring circuit 152 directly to the power supply voltage +B without passing through the second fixed resistor R2. Figure 8 The detection circuit 150-5 shown can prevent the reduction in detection sensitivity of the X-axis and Y-axis operating loads caused by the first fixed resistor R1 and the second fixed resistor R2.

[0162] also, Figure 6 When detecting the operating load on the Z-axis, the detection circuit 150-8 shown switches switch SW1 to the ON position and switch switch SW2 to the OFF position, thereby connecting the first measuring circuit 151 to the power supply voltage +B via the first fixed resistor R1. Simultaneously, Figure 6 The detection circuit 150-8 shown switches switch SW3 to ON and switch SW4 to OFF, thereby connecting the second measuring circuit 152 to the power supply voltage +B via the second fixed resistor R2. Figure 6 The detection circuit 150-8 shown can detect the operating load on the Z-axis.

[0163] (Third variation of the structure of detection circuit 150)

[0164] Figure 7This is a circuit diagram illustrating a third variation of the structure of the detection circuit 150 included in the force sensor 100 according to one embodiment.

[0165] exist Figure 6 The detection circuit 150-8 shown and Figure 7 In the detection circuit 150-9 shown, the connection positions of fixed resistor R1, fixed resistor R2, switch SW1, and switch SW2 are different. Figure 7 In the detection circuit 150-9 shown, a fixed resistor R1 is located on the ground side of the first measurement circuit 151. Similarly, a fixed resistor R2 is located on the ground side of the second measurement circuit 152.

[0166] Figure 7 The detection circuit 150-9 shown includes switches SW1 and SW2 between the first measurement circuit 151 and ground. Furthermore, switches SW3 and SW4 are provided between the second measurement circuit 152 and ground.

[0167] Figure 7 When detecting the operating load on the X and Y axes, the detection circuit 150-9 shown switches switch SW1 to open and switch SW2 to close, thereby preventing the first measuring circuit 151 from being grounded through the first fixed resistor R1. Simultaneously, Figure 7 The detection circuit 150-9 shown switches switch SW3 to open and switch SW4 to close, thereby preventing the second measuring circuit 152 from being grounded through the second fixed resistor R2. Thus, Figure 7 The detection circuit 150-9 shown can prevent the reduction in detection sensitivity of the X-axis and Y-axis operating loads caused by the first fixed resistor R1 and the second fixed resistor R2.

[0168] also, Figure 7 When detecting the operating load on the Z-axis, the detection circuit 150-9 shown switches switch SW1 to the ON position and switch switch SW2 to the OFF position, thereby grounding the first measuring circuit 151 via the first fixed resistor R1. Simultaneously, Figure 7 The detection circuit 150-9 shown switches switch SW3 to ON and switch SW4 to OFF, thereby grounding the second measuring circuit 152 via the second fixed resistor R2. Thus, Figure 7 The detection circuit 150-9 shown can detect the operating load on the Z-axis.

[0169] (Fourth variation of the structure of detection circuit 150)

[0170] Figure 8 This is a circuit diagram illustrating a fourth variation of the structure of the detection circuit 150 included in the force sensor 100 according to one embodiment.

[0171] exist Figure 8 In the detection circuit 150-3 shown, the first measuring circuit 151 is a bridge circuit that connects in parallel a first X-axis series circuit 151A formed by connecting strain detection elements SX3 and SX1 in series, and a first Y-axis series circuit 152A formed by connecting strain detection elements SY3 and SY1 in series.

[0172] In addition, Figure 8 In the detection circuit 150-3 shown, the first measuring circuit 151 has a first X-axis connection point PX1 between strain detection element SX3 and strain detection element SX1, and a first Y-axis connection point PY1 between strain detection element SY3 and strain detection element SY1.

[0173] In addition, Figure 8 In the detection circuit 150-3 shown, the second measuring circuit 152 is a bridge circuit that connects in parallel the second X-axis series circuit 151B formed by connecting the strain detection elements SX2 and SX4 in series, and the second Y-axis series circuit 152B formed by connecting the strain detection elements SY2 and SY4 in series.

[0174] In addition, Figure 8 In the detection circuit 150-3 shown, the second measuring circuit 152 has a second X-axis connection point PX2 between strain detection element SX2 and strain detection element SX4, and a second Y-axis connection point PY2 between strain detection element SY4 and strain detection element SY2.

[0175] In addition, Figure 8 In the detection circuit 150-3 shown, the polarities of the voltage values ​​at the first X-axis connection point PX1 and the second X-axis connection point PX2 are reversed. Furthermore, in Figure 8 In the detection circuit 150-3 shown, the polarities of the voltage values ​​at the first Y-axis connection point PY1 and the second Y-axis connection point PY2 are reversed.

[0176] Figure 8 The detection circuit 150-3 shown is... Figure 4 Similarly, the detection circuit 150 shown obtains two voltage values: the voltage value output from the first X-axis connection point PX1 (the intermediate potential between strain detection elements SX1 and SX2) and the voltage value output from the second X-axis connection point PX2 (the intermediate potential between strain detection elements SX3 and SX4). Therefore, by measuring the difference between these two voltage values, twice the previous output can be obtained, which is used as the X-axis output SXout.

[0177] also, Figure 8The detection circuit 150-3 shown is... Figure 4 Similarly, the detection circuit 150 shown obtains two voltage values: the voltage value output from the first Y-axis connection point PY1 (the intermediate potential between strain detection elements SY3 and SY4) and the voltage value output from the second Y-axis connection point PY2 (the intermediate potential between strain detection elements SY1 and SY2). Therefore, by measuring the difference between these two voltage values, twice the previous output can be obtained as the Y-axis output SYout.

[0178] also, Figure 8 The detection circuit 150-3 shown is... Figure 4 Similarly, the detection circuit 150 shown obtains two voltage values: the voltage value output from the first Z-axis connection point PZ1 (the intermediate potential between the first measuring circuit 151 and the first fixed resistor R1) and the voltage value output from the second Z-axis connection point PZ2 (the intermediate potential between the second measuring circuit 152 and the second fixed resistor R2). Therefore, by measuring the difference between these two voltage values, twice the previous output can be obtained, which is used as the Z-axis output SZout.

[0179] (First variation of force sensor 100)

[0180] Figure 9 This is a diagram illustrating a first modified example of a force sensor 100 according to one embodiment. Figure 9 The force sensor 100-2 shown is configured to detect tilting operations in the X-axis direction and pressing operations in the Z-axis direction of the shaft portion 112 of the strain 110 performed by the operator. Therefore, Figure 9 The force sensor 100-2 shown has two strain detection elements 140 arranged on the lower surface of the base 131 of the flexible substrate 130 in both the right (positive X-axis direction) and left (negative X-axis direction) directions.

[0181] Specifically, in Figure 9 In the force sensor 100-2 shown, on the right side (positive X-axis side) of the lower surface of the base 131, strain detection elements SX1 and SX2 are arranged parallel to each other in the Y-axis direction.

[0182] In addition, Figure 9 In the force sensor 100-2 shown, on the left side (negative X-axis side) of the lower surface of the base 131, strain detection elements SX3 and SX4 are arranged parallel to each other in the Y-axis direction.

[0183] In addition, Figure 9In the force sensor 100-2 shown, the strain detection elements SX1, SX2, SX3 and SX4 are rectangular and arranged with their long sides parallel to the X-axis, so that the X-axis direction becomes the detection direction.

[0184] (Fifth variation of the structure of detection circuit 150)

[0185] Figure 10 It means Figure 9 The circuit diagram of the fifth variation of the structure of the detection circuit 150 of the force sensor 100-2.

[0186] Figure 10 The detection circuit 150-4 shown is similar to the one that does not have a structure for detecting operational loads in the Y-axis direction. Figure 4 The detection circuit 150 shown is different. The structure for detecting the operating load in the X-axis direction and the structure for detecting the operating load in the Z-axis direction are different. Figure 4 The detection circuit 150 shown and Figure 10 The detection circuit 150 shown is the same. For example, Figure 10 The detection circuit 150-4 shown is used for a force sensor 100-2 capable of tilting in the X-axis direction and pressing in the Z-axis direction.

[0187] Specifically, Figure 10 The detection circuit 150-4 shown has a first measuring circuit 151. The first measuring circuit 151 has a structure in which a first X-axis series circuit 151A, which is formed by connecting strain detection elements SX3 and SX1 in series, and a second X-axis series circuit 151B, which is formed by connecting strain detection elements SX2 and SX4 in series, are connected in parallel.

[0188] In addition, Figure 10 In the detection circuit 150-4 shown, the first fixed resistor R1 is connected to the power supply voltage (constant voltage terminal +B) side of the second X-axis series circuit 151B, and the second fixed resistor R2 is connected to the ground side of the first X-axis series circuit 151A.

[0189] Figure 10 The detection circuit 150-4 shown is... Figure 4 Similarly, the detection circuit 150 shown obtains two voltage values: the voltage value output from the first X-axis connection point PX1 (the intermediate potential between strain detection elements SX1 and SX3) and the voltage value output from the second X-axis connection point PX2 (the intermediate potential between strain detection elements SX2 and SX4). Therefore, by measuring the difference between these two voltage values, twice the usual output can be obtained as the X-axis output SXout.

[0190] also, Figure 10 The detection circuit 150-4 shown obtains two voltage values: the voltage value output from the first Z-axis connection point PZ1 (the intermediate potential between the second X-axis series circuit 151B and the first fixed resistor R1) and the voltage value output from the second Z-axis connection point PZ2 (the intermediate potential between the first X-axis series circuit 151A and the second fixed resistor R2). Therefore, by measuring the difference between these two voltage values, twice the usual output can be obtained, which is used as the Z-axis output SZout.

[0191] (Sixth variation of the structure of detection circuit 150)

[0192] Figure 11 This is a circuit diagram illustrating a sixth variation of the structure of the detection circuit 150 included in the force sensor 100 according to one embodiment.

[0193] Figure 11 The detection circuit 150 shown is... Figure 4 The difference in the detection circuit 150 shown is that it includes switches SW1 and SW2 between the first measuring circuit 151 and the power supply voltage (constant voltage terminal +B). Switch SW1 is positioned between the first fixed resistor R1 and the power supply voltage (constant voltage terminal +B). Figure 11 In this circuit, a switch SW1 is provided between the fixed resistor R1 and the power supply voltage +B. Alternatively, the switch SW1 can be provided between the first measuring circuit 151 and the fixed resistor R1.

[0194] also, Figure 11 The detection circuit 150-5 shown has switches SW3 and SW4 between the second measuring circuit 152 and ground, which is similar to... Figure 4 The detection circuit 150 shown is different. In Figure 11 In this circuit, a switch SW3 is provided between the second fixed resistor R2 and ground. Alternatively, the switch SW3 may be provided between the second measuring circuit 152 and the fixed resistor R2.

[0195] Figure 11 The detection circuit 150-5 shown switches SW1, SW2, SW3, and SW4 at high speed in a time-division manner.

[0196] For example, Figure 11 When detecting the operating load on the X and Y axes, the detection circuit 150-5 shown switches switch SW1 to open and switch SW2 to open, thereby connecting the first measuring circuit 151 directly to the power supply voltage (constant voltage terminal +B) without passing through the first fixed resistor R1. Simultaneously, Figure 11The detection circuit 150-5 shown switches switch SW3 to open and switch SW4 to open, thereby connecting the second measuring circuit 152 directly to ground without passing through the second fixed resistor R2. Figure 11 The detection circuit 150-5 shown can prevent the reduction in detection sensitivity of the X-axis and Y-axis operating loads caused by the first fixed resistor R1 and the second fixed resistor R2.

[0197] also, Figure 11 When detecting the Z-axis operating load, the detection circuit 150-5 shown switches switch SW1 to ON and switch switch SW2 to OFF, thereby connecting the first measuring circuit 151 to the power supply voltage (constant voltage terminal +B) via the first fixed resistor R1. Simultaneously, Figure 11 The detection circuit 150-5 shown switches switch SW3 to ON and switch SW4 to OFF, thereby connecting the second measuring circuit 152 to ground via the second fixed resistor R2. Thus, Figure 11 The detection circuit 150-5 shown can detect the operating load on the Z-axis.

[0198] (Seventh variation of the structure of detection circuit 150)

[0199] Figure 12 This is a circuit diagram illustrating a seventh variation of the structure of the detection circuit 150 included in the force sensor 100 according to one embodiment.

[0200] Figure 12 The detection circuit 150-6 shown is... Figure 8 The difference in the detection circuit 150-3 shown is that it includes switches SW1 and SW2 between the first measuring circuit 151 and the power supply voltage (constant voltage terminal +B). Switch SW1 is located between the first fixed resistor R1 and the power supply voltage (constant voltage terminal +B).

[0201] also, Figure 12 The detection circuit 150-6 shown is... Figure 8 The difference in the detection circuit 150-3 shown is that it includes switches SW3 and SW4 between the second measuring circuit 152 and ground. Switch SW3 is located between the second fixed resistor R2 and ground.

[0202] Figure 12 The detection circuit 150-6 shown switches SW1, SW2, SW3, and SW4 at high speed in a time-division manner.

[0203] For example, Figure 12When detecting the operating load on the X and Y axes, the detection circuit 150-6 shown switches switch SW1 to open and switch SW2 to open, thereby connecting the first measuring circuit 151 directly to the power supply voltage (constant voltage terminal +B) without passing through the first fixed resistor R1. Simultaneously, Figure 12 The detection circuit 150-6 shown switches switch SW3 to open and switch SW4 to open, thereby connecting the second measuring circuit 152 directly to ground without passing through the second fixed resistor R2. Figure 12 The detection circuit 150-6 shown can suppress power consumption.

[0204] also, Figure 12 When detecting the Z-axis operating load, the detection circuit 150-6 shown switches switch SW1 to the ON position and switch SW2 to the OFF position, thereby connecting the first measuring circuit 151 to the power supply voltage (constant voltage terminal +B) via the first fixed resistor R1. Simultaneously, Figure 12 The detection circuit 150-6 shown switches switch SW3 to ON and switch SW4 to OFF, thereby connecting the second measuring circuit 152 to ground via the second fixed resistor R2. Thus, Figure 12 The detection circuit 150-6 shown can detect the operating load on the Z-axis.

[0205] (Eighth variation of the structure of detection circuit 150)

[0206] Figure 13 This is a circuit diagram illustrating an eighth variation of the structure of the detection circuit 150 included in the force sensor 100 according to one embodiment.

[0207] Figure 13 The detection circuit 150-7 shown is... Figure 10 The difference in the detection circuit 150-4 shown is that it includes switches SW1 and SW2 between the first measuring circuit 151 and the power supply voltage (constant voltage terminal +B). Switch SW1 is located between the first fixed resistor R1 and the power supply voltage (constant voltage terminal +B).

[0208] also, Figure 13 The detection circuit 150-7 shown is... Figure 10 The difference in the detection circuit 150-4 shown is that it includes switches SW3 and SW4 between the first measuring circuit 151 and ground. Switch SW3 is located between the second fixed resistor R2 and ground.

[0209] Figure 13 The detection circuit 150-7 shown switches SW1, SW2, SW3, and SW4 at high speed in a time-division manner.

[0210] For example, Figure 13 When detecting the operating load on the X-axis, the detection circuit 150-7 shown switches SW1 to open and SW2 to close, thereby connecting the first measuring circuit 151 directly to the power supply voltage (constant voltage terminal +B) without passing through the first fixed resistor R1.

[0211] at the same time, Figure 13 The detection circuit 150-7 shown switches switch SW3 to open and switch SW4 to open, thereby connecting the first measuring circuit 151 directly to ground without passing through the second fixed resistor R2. Figure 13 The detection circuit 150-7 shown can suppress power consumption.

[0212] also, Figure 13 When detecting the Z-axis operating load, the detection circuit 150-7 shown switches switch SW1 to ON and switch SW2 to OFF, thereby connecting the first measuring circuit 151 to the power supply voltage (constant voltage terminal +B) via the first fixed resistor R1. Simultaneously, Figure 13 The detection circuit 150-7 shown switches switch SW3 to ON and switch SW4 to OFF, thereby connecting the first measuring circuit 151 to ground via the second fixed resistor R2. Thus, Figure 13 The detection circuit 150-7 shown can detect the operating load on the Z-axis.

[0213] Figure 14 This is a diagram showing a modified example of the switch included in a force sensor 100 according to one embodiment.

[0214] Figure 6 , Figure 7 , Figures 11-13 The switches SW1, SW2, SW3, and SW4 shown are implemented, for example, using transistors integrated into an IC. Furthermore, the connection order of the first fixed resistor R1 and switch SW1 can be arbitrary. Figure 14 As shown in (a), switch SW1 can also be located closer to the power supply voltage side than the first fixed resistor R1. Figure 14 As shown in (b), switch SW1 can also be closer to the ground side than fixed resistor R1. Similarly, the connection order of the second fixed resistor R2 and switch SW3 can be arbitrary. Furthermore, in Figures 11-13 In the detection circuits 150-150-7 shown, an SPDT-type switch capable of switching the connection destination to the first fixed resistor R1 and the first measurement circuit 151 can be used instead of the two SPST-type switches SW1 and SW2. In this case, the connection order of the switch and the first fixed resistor R1 can also be arbitrary. Figure 14As shown in (c), the switching switch can also be located further away from the power supply voltage side than the first fixed resistor R1. Figure 14 As shown in (d), the toggle switch can also be closer to the ground side than the fixed resistor R1. Similarly, the connection order of the second fixed resistor R2 and the toggle switch can be arbitrary. Alternatively, two resistors can be used instead. Figure 14 The switch of (c) is used, and Figure 14 The DPDT (double-pole double-throw switch) shown in (e) is similarly applicable. Figure 14 The double-pole double-throw (DPDT) switch shown in (f) is used to replace Figure 14 The two switches shown in (d) are as follows.

[0215] (First variation of the configuration of multiple strain sensing elements 140)

[0216] Figure 15 This is a diagram illustrating a first variation of the arrangement of a plurality of strain detection elements 140 in a force sensor 100 according to an embodiment.

[0217] Figure 15 It is relative to Figure 3 The structure of strain detection element SX3 and strain detection element SX4 has been changed. Figure 15 Structure and Figure 3 The structure connects strain detection elements SX3 and SX1 to form a first X-axis series circuit 151A. Furthermore, strain detection elements SX2 and SX4 are connected to form a second X-axis series circuit 151B. Figure 3 In the structure, strain detection elements SX3 and SX1, located at linearly symmetrical positions, are connected in series to form the first X-axis series circuit 151A. On the other hand, in Figure 15 In the structure, strain detection element SX3 and strain detection element SX1, which are located at symmetrical positions at 180 degrees, are connected in series to form the first X-axis series circuit 151A.

[0218] Figure 15 Structure and Figure 3 The structure consists of strain detection elements SX3 and SX4 positioned on the negative side of the X-axis. Therefore, even if the positions of strain detection elements SX3 and SX4 are interchanged, the voltage value at the first X-axis connection point PX1 remains unchanged.

[0219] Similarly, in Figure 3 In the structure, strain detection elements SX2 and SX4, located at linearly symmetrical positions, are connected in series to form a second X-axis series circuit 151B. On the other hand, in Figure 15In the structure, strain detection elements SX4 and SX2, which are located at symmetrical positions at 180 degrees, are connected in series to form the second X-axis series circuit 151B.

[0220] Figure 15 Structure and Figure 3 The structure consists of strain detection elements SX3 and SX4 positioned on the negative side of the X-axis. Therefore, even if the positions of strain detection elements SX3 and SX4 are interchanged, the voltage value at the second X-axis connection point PX2 remains unchanged.

[0221] Therefore, even if the configuration of strain detection element SX3 and strain detection element SX4 is changed, the force sensor 100 according to one embodiment can obtain twice the output of the previous one by measuring the difference between the first X-axis connection point PX1 and the second X-axis connection point PX2, as the X-axis output SXout.

[0222] also, Figure 15 Becoming relative to Figure 3 The configuration of strain detection element SY3 and strain detection element SY4 has been changed. Figure 15 Structure and Figure 3 The structure connects strain detection elements SY3 and SY1 to form a first Y-axis series circuit 152A. Furthermore, strain detection elements SY2 and SY4 are connected to form a second Y-axis series circuit 152B. Figure 3 In the structure, strain detection element SY3 and strain detection element SY1, located at linearly symmetrical positions, are connected in series to form a first Y-axis series circuit 152A. On the other hand, in Figure 15 In the configuration, strain detection element SY3 and strain detection element SY1, which are located at symmetrical positions at 180 degrees, are connected in series to form the first Y-axis series circuit 152A.

[0223] Figure 15 Structure and Figure 3 The structure places strain detection elements SY3 and SY4 on the negative side of the Y-axis. Therefore, even if the positions of strain detection elements SY3 and SY4 are swapped, the voltage value of the first Y-axis connection point PY1 remains unchanged.

[0224] Similarly, in Figure 3 In the structure, strain detection elements SY2 and SY4, located at linearly symmetrical positions, are connected in series to form a second Y-axis series circuit 152B. On the other hand, in Figure 15 In the structure, strain detection elements SY2 and SY4, which are located at symmetrical positions at 180 degrees, are connected in series to form the second Y-axis series circuit 152B.

[0225] Figure 15 Structure and Figure 3 The structure places strain detection elements SY3 and SY4 on the negative side of the Y-axis. Therefore, even if the positions of strain detection elements SY3 and SY4 are swapped, the voltage value at the second Y-axis connection point PY2 remains unchanged.

[0226] Therefore, even if the configuration of strain detection element SY3 and strain detection element SY4 is changed, the force sensor 100 according to one embodiment can obtain twice the output as the previous output SYout by measuring the difference between the first Y-axis connection point PY1 and the second Y-axis connection point PY2.

[0227] (A second variation of the configuration of multiple strain sensing elements 140)

[0228] Figure 16 This is a diagram illustrating a second variation of the arrangement of a plurality of strain detection elements 140 in a force sensor 100 according to one embodiment.

[0229] like Figure 12 As shown, in one embodiment, the force sensor 100 may also have eight strain detection elements 140 arranged radially on the lower surface of the base 131 of the flexible substrate 130. That is, two strain detection elements 140 are paired with equal intervals and equal angles relative to the four directions (front, back, left, and right). Moreover, four pairs (a total of eight) of strain detection elements 140 corresponding to the four directions (front, back, left, and right) may also be provided.

[0230] For example, in Figure 16 In the example shown, the direction between SX1 and SX2 is the positive direction of the X-axis. The direction between SX3 and SX4 is the negative direction of the X-axis. The direction between SY1 and SY2 is the positive direction of the Y-axis. The direction between SY3 and SY4 is the negative direction of the Y-axis. Figure 16 In the example shown, eight strain sensing elements 140 are arranged radially at equal intervals (i.e., 45° intervals).

[0231] (A third variation of the configuration of multiple strain sensing elements 140)

[0232] Figure 17 This is a diagram illustrating a third variation of the arrangement of a plurality of strain detection elements 140 in a force sensor 100 according to one embodiment.

[0233] like Figure 17As shown, in one embodiment, the force sensor 100 may also have four strain detection elements 140 corresponding to four directions provided on the upper surface of the base 131 of the flexible substrate 130, and four strain detection elements 140 corresponding to four directions provided on the lower surface of the base 131 of the flexible substrate 130. In this case, the four strain detection elements 140 on the upper surface of the base 131 and the four strain detection elements 140 on the lower surface of the base 131 may also be arranged to overlap each other. This allows two overlapping strain detection elements 140 to deform (contract or elongate) equally.

[0234] For example, such as Figure 17 As shown in (a), a strain detection element SX1 is provided in the positive X-axis direction and a strain detection element SX4 is provided in the negative X-axis direction on the lower surface of the flexible substrate 130. A strain detection element SY1 is provided in the positive Y-axis direction and SY4 is provided in the negative Y-axis direction. Furthermore, as... Figure 17 As shown in (b), a strain detection element SX2 is provided on the upper surface of the flexible substrate 130 in the negative X-axis direction, SX3 is provided in the positive X-axis direction, SY2 is provided in the negative Y-axis direction, and SY3 is provided in the positive Y-axis direction.

[0235] In addition, Figure 17 In the example shown, the strain sensing element SX1 on the positive X-axis side of the upper surface of the base 131 and the strain sensing element SX3 on the positive X-axis side of the lower surface of the base 131 are configured to overlap each other.

[0236] In addition, Figure 17 In the example shown, the strain sensing element SX2 on the negative X-axis side of the upper surface of the base 131 and the strain sensing element SX4 on the negative X-axis side of the lower surface of the base 131 are configured to overlap each other.

[0237] In addition, Figure 17 In the example shown, the strain detection element SY2 on the positive Y-axis side of the upper surface of the base 131 and the strain detection element SY4 on the positive Y-axis side of the lower surface of the base 131 are configured to overlap each other.

[0238] In addition, Figure 17 In the example shown, the strain detection element SY1 on the negative Y-axis side of the upper surface of the base 131 and the strain detection element SY3 on the negative Y-axis side of the lower surface of the base 131 are configured to overlap each other.

[0239] When an operating load is applied in the positive X-axis direction, SX1 and SX2 elongate, and their resistance changes in the positive direction. On the other hand, when an operating load is applied in the positive X-axis direction, SX3 and SX4 contract, and their resistance changes in the negative direction.

[0240] Conversely, if an operating load is applied in the negative X-axis direction, SX1 and SX2 contract, and their resistance values ​​change in the negative direction. On the other hand, when an operating load is applied in the negative X-axis direction, SX3 and SX4 extend, and their resistance values ​​change in the positive direction.

[0241] Furthermore, if an operating load is applied in the positive Y-axis direction, SY1 and SY2 will elongate, and their resistance values ​​will change in the positive direction. On the other hand, if an operating load is applied in the positive Y-axis direction, SY3 and SY4 will contract, and their resistance values ​​will change in the negative direction.

[0242] Conversely, if an operating load is applied in the negative Y-axis direction, SY1 and SY2 contract, and their resistance values ​​change in the negative direction. On the other hand, when an operating load is applied in the negative Y-axis direction, SY3 and SY4 extend, and their resistance values ​​change in the positive direction.

[0243] In addition, Figure 17 In the example shown, if an operating load is applied in the negative Z-axis direction, SX1, SX4, SY1, and SY4 elongate, and the resistance value changes in the positive direction. On the other hand, when an operating load is applied in the positive Z-axis direction, SX2, SX3, SY2, and SY3 contract, and the resistance value changes in the negative direction. Therefore, SZout determines the load in the Z-direction based on SX1, SX4, SY1, SY4, R1, and R2 (or SX2, SX3, SY2, SY3, R1, and R2).

[0244] (Second to fourth modifications of force sensor 100)

[0245] Figure 18 This is a cross-sectional view showing a second modified example of the force sensor 100 according to one embodiment. Figure 19 This is a cross-sectional view showing a third modified example of the force sensor 100 according to one embodiment. Figure 20 This is a cross-sectional view showing a fourth modified example of the force sensor 100 according to one embodiment.

[0246] Figures 18-20 The force sensors 100-3 to 100-5 shown have the same structure as force sensor 100, which detects the strain generated in the deformation portion 111A of the strained body 110 due to the operator's tilting operation by using eight strain detection elements 140 provided on the strained body 110.

[0247] on the other hand, Figures 18-20 In the force sensors 100-3 to 100-5 shown, strain gauge 110 is stacked on the substrate 180. Furthermore, Figures 18-20The force sensors 100-3 to 100-5 shown are configured such that a shaft portion 121 extending downward from the lower surface of the operation knob 120 passes through a shaft portion 112 of the strained body 110 in the vertical direction. Furthermore, a metal, dome-shaped movable contact member 160 is provided opposite to the lower end face 121A of the shaft portion 121 of the operation knob 120.

[0248] Figures 18-20 When the operator presses the operation knob 120, the lower end face 121A of the shaft portion 121 of the operation knob 120 presses the top (center) of the movable contact member 160, which can cause the movable contact member 160 to flip from a convex shape to a concave shape.

[0249] as a result, Figures 18-20 The force sensors 100-3 to 100-5 shown present a click sensation when the operator presses the button, and make the center of the movable contact member 160 contact the fixed contact 182, switching the switch consisting of the movable contact member 160 and the fixed contact 182 to the on state, thus detecting the operator's pressing operation.

[0250] Here, Figure 18 The force sensor 100-3 shown has a horizontal, flat, elastic member 170-1 made of an elastic material (such as rubber, silicone, etc.) between the lower end face 121A of the shaft portion 121 of the operating knob 120 and the top of the movable contact member 160. Thus, Figure 18 The force sensor 100-3 shown can absorb the contact sound between the lower end face 121A of the shaft portion 121 of the operating knob 120 and the top of the movable contact member 160 by means of an elastic member 170-1, thereby suppressing the contact sound.

[0251] In addition, Figure 18 In the example shown, a protrusion 171 is provided on the lower surface of the elastic member 170-1, through which the top of the movable contact member 160 can be reliably pressed.

[0252] also, Figure 19 The force sensor 100-4 shown has a block-shaped elastic member 170-2 made of an elastic material (such as rubber, silicone, etc.) disposed on the lower side of the center portion of the movable contact member 160 (within the recess 181 of the substrate 180). Therefore, Figure 19 The force sensor 100-4 shown can absorb the contact sound between the movable contact member 160 and the substrate 180 caused by the flipping action of the movable contact member 160 using an elastic member 170-2 on the lower side of the central portion of the movable contact member 160, thereby suppressing the contact sound. Furthermore, Figure 19 The force sensor 100-4 shown can reduce the movement speed of the shaft portion 121 of the operating knob 120 by means of the elastic member 170-2. As a result, it can suppress the contact sound between the lower end face 121A of the shaft portion 121 of the operating knob 120 and the top of the movable contact member 160.

[0253] also, Figure 20 The force sensor 100-5 shown has a ring-shaped elastic member 170-3 made of an elastic material (such as rubber, silicone, etc.) disposed between the lower surface of the operating knob 120 and the upper surface of the shaft portion 121 of the operating knob 120, such that it surrounds the shaft portion 121 of the operating knob 120. Therefore, Figure 20 The force sensor 100-5 shown can absorb the contact sound between the lower surface of the operating knob 120 and the upper surface of the shaft portion 121 of the operating knob 120 by means of an elastic member 170-3, thereby suppressing the contact sound.

[0254] The above describes one embodiment of the present invention in detail, but the present invention is not limited to these embodiments. Various modifications or alterations can be made within the scope of the spirit of the present invention as set forth in the claims.

[0255] For example, in each of the above detection circuits, it is also possible not to provide a structure for detecting the operating load applied to the shaft 112 in the Z-axis direction (i.e., the first fixed resistor R1, the second fixed resistor R2, the differential amplifier 153Z, etc.).

Claims

1. An input device, characterized in that, have: Shaft portion; The plate-shaped deformable portion is integrally formed with the shaft portion and is orthogonal to the axial direction of the shaft portion; Multiple strain detection elements are disposed on the deformed portion; as well as Detection circuit, The detection circuit has the following features: The first measuring circuit includes a portion of the plurality of strain detection elements, which detects the force applied to the shaft in a direction orthogonal to the axial direction; The second measuring circuit includes other parts of the plurality of strain detection elements, and detects the force applied to the shaft in a direction orthogonal to the axial direction; The first fixed resistor is connected to the power supply voltage side of the first measuring circuit; as well as The second fixed resistor is connected to the ground side of the second measuring circuit. The detection circuit detects the force applied to the shaft in the axial direction based on the voltage between the connection point of the first measuring circuit and the first fixed resistor and the connection point of the second measuring circuit and the second fixed resistor.

2. The input device according to claim 1, wherein, The plurality of strain detection elements include: The first X-axis strain detection element and the second X-axis strain detection element are disposed on the positive side of the X-axis, which is orthogonal to the axial direction; The third X-axis strain detection element and the fourth X-axis strain detection element are disposed on the negative side of the X-axis; A first Y-axis strain detection element and a second Y-axis strain detection element are disposed on the positive side of the Y-axis, which is orthogonal to the axial direction and the X-axis; and The third and fourth Y-axis strain detection elements are located on the negative side of the Y-axis. The first measuring circuit is a bridge circuit that connects in parallel a first X-axis series circuit formed by connecting the first X-axis strain detection element and the third X-axis strain detection element in series, and a second X-axis series circuit formed by connecting the second X-axis strain detection element and the fourth X-axis strain detection element in series. The first X-axis strain detection element and the fourth X-axis strain detection element are disposed on the grounding side. The second X-axis strain detection element and the third X-axis strain detection element are disposed on the power supply voltage side. The first measuring circuit has a first X-axis connection point between the first X-axis strain detection element and the third X-axis strain detection element, and a second X-axis connection point between the second X-axis strain detection element and the fourth X-axis strain detection element. The second measuring circuit is a bridge circuit that connects in parallel a first Y-axis series circuit formed by connecting the first Y-axis strain detection element and the third Y-axis strain detection element in series, and a second Y-axis series circuit formed by connecting the second Y-axis strain detection element and the fourth Y-axis strain detection element in series. The first Y-axis strain detection element and the fourth Y-axis strain detection element are disposed on the ground side. The second Y-axis strain detection element and the third Y-axis strain detection element are disposed on the power supply voltage side. The second measuring circuit has a first Y-axis connection point between the first Y-axis strain detection element and the third Y-axis strain detection element, and a second Y-axis connection point between the second Y-axis strain detection element and the fourth Y-axis strain detection element. The detection circuit detects the force applied along the X-axis based on the voltage between the first X-axis connection point and the second X-axis connection point, and detects the force applied along the Y-axis based on the voltage between the first Y-axis connection point and the second Y-axis connection point.

3. The input device according to claim 1, wherein, The plurality of strain detection elements include: The first X-axis strain detection element and the second X-axis strain detection element are disposed on the positive side of the X-axis, which is orthogonal to the axial direction; The third X-axis strain detection element and the fourth X-axis strain detection element are disposed on the negative side of the X-axis; A first Y-axis strain detection element and a second Y-axis strain detection element are disposed on the positive side of the Y-axis, which is orthogonal to the axial direction and the X-axis; and The third and fourth Y-axis strain detection elements are located on the negative side of the Y-axis. The first measuring circuit is a bridge circuit that connects in parallel a first X-axis series circuit formed by connecting the first X-axis strain detection element and the third X-axis strain detection element in series, and a first Y-axis series circuit formed by connecting the third Y-axis strain detection element and the first Y-axis strain detection element in series. The first measuring circuit has a first X-axis connection point between the first X-axis strain detection element and the third X-axis strain detection element, and a first Y-axis connection point between the third Y-axis strain detection element and the first Y-axis strain detection element. The second measuring circuit is a bridge circuit that connects in parallel a second X-axis series circuit formed by connecting the second X-axis strain detection element and the fourth X-axis strain detection element in series, and a second Y-axis series circuit formed by connecting the second Y-axis strain detection element and the fourth Y-axis strain detection element in series. The second measuring circuit has a second X-axis connection point between the second X-axis strain detection element and the fourth X-axis strain detection element, and a second Y-axis connection point between the second Y-axis strain detection element and the fourth Y-axis strain detection element. The first X-axis strain detection element and the fourth X-axis strain detection element are disposed on the grounding side. The second X-axis strain detection element and the third X-axis strain detection element are disposed on the power supply voltage side. The first Y-axis strain detection element and the fourth Y-axis strain detection element are disposed on the ground side. The second Y-axis strain detection element and the third Y-axis strain detection element are disposed on the power supply voltage side. The detection circuit detects the force applied along the X-axis based on the voltage between the first X-axis connection point and the second X-axis connection point, and detects the force applied along the Y-axis based on the voltage between the first Y-axis connection point and the second Y-axis connection point.

4. The input device according to claim 1, wherein, The plurality of strain detection elements include: The first X-axis strain detection element and the second X-axis strain detection element are disposed on the positive side of the X-axis, which is orthogonal to the axial direction; and The third and fourth X-axis strain detection elements are located on the negative side of the X-axis. The first measuring circuit is a first X-axis series circuit formed by connecting the third X-axis strain detection element and the first X-axis strain detection element in series. The second measuring circuit is a second X-axis series circuit composed of a second X-axis strain detection element and a fourth X-axis strain detection element connected in series. The first X-axis strain detection element and the fourth X-axis strain detection element are disposed on the grounding side. The second X-axis strain detection element and the third X-axis strain detection element are disposed on the power supply voltage side. It has a first X-axis connection point between the first X-axis strain detection element and the third X-axis strain detection element, and a second X-axis connection point between the second X-axis strain detection element and the fourth X-axis strain detection element. The force applied along the X-axis is detected based on the voltage between the first X-axis connection point and the second X-axis connection point.

5. The input device according to any one of claims 1 to 3, wherein, When the detection circuit detects a force applied to the shaft in a direction orthogonal to the axial direction, it connects the power supply voltage and the first measuring circuit via the first fixed resistor, and grounds the second measuring circuit via the second fixed resistor. When detecting a force applied to the shaft in the axial direction, it directly connects the power supply voltage and the first measuring circuit, and directly grounds the second measuring circuit.

6. An input device, characterized in that, have: Shaft portion; The plate-shaped deformable portion is integrally formed with the shaft portion and is orthogonal to the axial direction of the shaft portion; Multiple strain detection elements are disposed on the deformed portion; as well as Detection circuit, The detection circuit has the following features: The first measuring circuit includes a portion of the plurality of strain detection elements, which detects the force applied to the shaft in a direction orthogonal to the axial direction; The second measuring circuit includes other parts of the plurality of strain detection elements, and detects the force applied to the shaft in a direction orthogonal to the axial direction; The first fixed resistor is connected to the power supply voltage side or the ground side of the first measuring circuit; as well as The second fixed resistor is connected to either the power supply voltage side or the ground side of the second measuring circuit. With the first fixed resistor connected to the power supply voltage side of the first measuring circuit, the second fixed resistor is connected to the power supply voltage side of the second measuring circuit. With the first fixed resistor connected to the ground side of the first measuring circuit, the second fixed resistor is connected to the ground side of the second measuring circuit. The force applied to the shaft in the axial direction is detected by adding the voltage at the connection point of the first measuring circuit and the first fixed resistor and the voltage at the connection point of the second measuring circuit and the second fixed resistor.

7. The input device according to claim 6, wherein, The plurality of strain detection elements include: The first X-axis strain detection element and the second X-axis strain detection element are disposed on the positive side of the X-axis, which is orthogonal to the axial direction; The third X-axis strain detection element and the fourth X-axis strain detection element are disposed on the negative side of the X-axis; A first Y-axis strain detection element and a second Y-axis strain detection element are disposed on the positive side of the Y-axis, which is orthogonal to the axial direction and the X-axis; and The third and fourth Y-axis strain detection elements are located on the negative side of the Y-axis. The first measuring circuit is a bridge circuit that connects in parallel a first X-axis series circuit formed by connecting the first X-axis strain detection element and the third X-axis strain detection element in series, and a second X-axis series circuit formed by connecting the second X-axis strain detection element and the fourth X-axis strain detection element in series. The first X-axis strain detection element and the second X-axis strain detection element are disposed on the ground side. The third X-axis strain detection element and the fourth X-axis strain detection element are located on the power supply voltage side. The first measuring circuit has a first X-axis connection point between the first X-axis strain detection element and the third X-axis strain detection element, and a second X-axis connection point between the second X-axis strain detection element and the fourth X-axis strain detection element. The second measuring circuit is a bridge circuit that connects in parallel a first Y-axis series circuit formed by connecting the first Y-axis strain detection element and the third Y-axis strain detection element in series, and a second Y-axis series circuit formed by connecting the second Y-axis strain detection element and the fourth Y-axis strain detection element in series. The first Y-axis strain detection element and the second Y-axis strain detection element are disposed on the grounding side. The third Y-axis strain detection element and the fourth Y-axis strain detection element are located on the power supply voltage side. The second measuring circuit has a first Y-axis connection point between the first Y-axis strain detection element and the third Y-axis strain detection element, and a second Y-axis connection point between the second Y-axis strain detection element and the fourth Y-axis strain detection element. The detection circuit adds the voltage of the first X-axis connection point and the voltage of the second X-axis connection point to detect the force applied along the X-axis direction, and adds the voltage of the first Y-axis connection point and the voltage of the second Y-axis connection point to detect the force applied along the Y-axis direction.

8. An input device, characterized in that, have: Shaft portion; The plate-shaped deformable portion is integrally formed with the shaft portion and is orthogonal to the axial direction of the shaft portion; Multiple strain detection elements are disposed on the deformed portion; as well as Detection circuit, The detection circuit has the following features: The first measuring circuit includes a portion of the plurality of strain detection elements, which detects the force applied to the shaft in a direction orthogonal to the axial direction; as well as The second measuring circuit, including other parts of the plurality of strain detection elements, detects the force applied to the shaft in a direction orthogonal to the axial direction. The plurality of strain detection elements include: The first X-axis strain detection element and the second X-axis strain detection element are disposed on the positive side of the X-axis, which is orthogonal to the axial direction; The third X-axis strain detection element and the fourth X-axis strain detection element are disposed on the negative side of the X-axis; A first Y-axis strain detection element and a second Y-axis strain detection element are disposed on the positive side of the Y-axis, which is orthogonal to the axial direction and the X-axis; and The third and fourth Y-axis strain detection elements are located on the negative side of the Y-axis. The first measuring circuit is a bridge circuit that connects in parallel a first X-axis series circuit formed by connecting the first X-axis strain detection element and the third X-axis strain detection element in series, and a second X-axis series circuit formed by connecting the second X-axis strain detection element and the fourth X-axis strain detection element in series. The first measuring circuit has a first X-axis connection point between the first X-axis strain detection element and the third X-axis strain detection element, and a second X-axis connection point between the second X-axis strain detection element and the fourth X-axis strain detection element. The second measuring circuit is a bridge circuit that connects in parallel a first Y-axis series circuit formed by connecting the first Y-axis strain detection element and the third Y-axis strain detection element in series, and a second Y-axis series circuit formed by connecting the second Y-axis strain detection element and the fourth Y-axis strain detection element in series. The second measuring circuit has a first Y-axis connection point between the first Y-axis strain detection element and the third Y-axis strain detection element, and a second Y-axis connection point between the second Y-axis strain detection element and the fourth Y-axis strain detection element. The detection circuit detects the force applied along the X-axis based on the voltage between the first X-axis connection point and the second X-axis connection point, and detects the force applied along the Y-axis based on the voltage between the first Y-axis connection point and the second Y-axis connection point.

9. The input device according to any one of claims 2, 3, and 8, wherein, The input device includes: a flexible substrate disposed in the deformable portion. The first X-axis strain detection element and the second X-axis strain detection element are arranged adjacent to each other on the positive side of the X-axis with the axis portion as a reference on one side of the flexible substrate. The third X-axis strain detection element and the fourth X-axis strain detection element are arranged adjacent to each other on the negative side of the X-axis with the axis portion as a reference on one side of the flexible substrate. The first Y-axis strain detection element and the second Y-axis strain detection element are arranged adjacent to each other on the positive side of the Y-axis with reference to the axis portion on one side of the flexible substrate. The third Y-axis strain detection element and the fourth Y-axis strain detection element are arranged adjacent to each other on the negative side of the Y-axis with reference to the axis portion on one side of the flexible substrate.

10. The input device according to claim 9, wherein, The first X-axis strain detection element and the second X-axis strain detection element are arranged parallel to each other. The third X-axis strain detection element and the fourth X-axis strain detection element are arranged parallel to each other. The first Y-axis strain detection element and the second Y-axis strain detection element are arranged parallel to each other. The third Y-axis strain detection element and the fourth Y-axis strain detection element are arranged in parallel to each other.

11. The input device according to claim 9, wherein, The plurality of strain sensing elements are configured radially centered on the shaft portion.

12. The input device according to any one of claims 2, 3, and 8, wherein, The input device includes: a flexible substrate disposed in the deformable portion. The first X-axis strain detection element is disposed on the positive side of the X-axis with the axial portion as a reference on one side of the flexible substrate. The second X-axis strain detection element is disposed on the positive side of the X-axis, with the axis portion as a reference, on another surface of the flexible substrate, at a position overlapping with the first X-axis strain detection element. The third X-axis strain detection element is disposed on the negative side of the X-axis with the axial portion as a reference on one side of the flexible substrate. The fourth X-axis strain detection element is disposed on the negative side of the X-axis, with the axis portion as a reference, on the other surface of the flexible substrate, at a position overlapping with the third X-axis strain detection element. The first Y-axis strain detection element is disposed on the positive side of the Y-axis with the axis portion as a reference on one side of the flexible substrate. The second Y-axis strain detection element is disposed on the positive side of the Y-axis, with reference to the axis portion, on the other surface of the flexible substrate, at a position overlapping with the first Y-axis strain detection element. The third Y-axis strain detection element is disposed on the negative side of the Y-axis with the axis portion as a reference on one side of the flexible substrate. The fourth Y-axis strain detection element is disposed on the negative side of the Y-axis, with the axis portion as a reference, on the other surface of the flexible substrate, at a position overlapping with the third Y-axis strain detection element.

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