Plane three-axis GMI magnetic sensor probe, magnetic field measurement method and equipment

Abstract

The invention discloses a planar three-axis GMI magnetic sensor probe and a magnetic field measurement method and equipment, and relates to the technical field of magnetic field detection. The planar three-axis GMI magnetic sensor probe comprises a sensitive element and a magnetic line orbital transfer structure; the sensitive element comprises a shaft probe and a shaft probe, and one end of the shaft probe is horizontally connected with the magnetic line orbital transfer structure. By implementing the planar three-axis GMI magnetic sensor probe and the magnetic field measurement method and equipment provided by the invention, the three-dimensional magnetic field measurement precision and efficiency can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of magnetic field detection, more particularly to a planar three-axis GMI magnetic sensor probe, a magnetic field measurement method and equipment. BACKGROUND

[0002] As a basic physical field of the earth, the geomagnetic field directly affects the motion characteristics of charged or magnetic objects in the earth system, and accurate detection of the geomagnetic field and its abnormal changes is of great significance for studying the internal structure and physical processes of the earth. The abnormal signal of the geomagnetic field is usually tens of nT, which is much smaller than the strength of the geomagnetic field itself (30000-60000nT), which puts extremely high requirements on the detection capability of the magnetic sensor. In recent years, with the deepening of magnetic research, weak magnetic field detection technology has become a research topic closely followed by domestic and foreign scholars. The giant magnetoimpedance (GMI) sensor can realize wideband (DC-kHz) magnetic signal detection due to its high sensitivity, high resolution and fast response characteristics, and has shown significant advantages in geomagnetic field detection. Moreover, since the geomagnetic field is a vector field, if we want to more accurately measure the components in the three directions of the geomagnetic field and the size of the total field, we generally use a three-axis magnetic sensor to better realize the measurement function. At present, three-axis magnetic sensors, especially three-axis measurement mode, have been widely studied at home and abroad, and three-axis magnetic sensors also have considerable application value.

[0003] At present, the most common three-axis magnetic sensor at home and abroad is composed of three single-axis magnetic sensors that are mutually orthogonal. This design has some shortcomings: the mutually orthogonal three-axis magnetic sensor has a large volume, a complex preparation process, low measurement accuracy, and it is difficult to ensure the orthogonality between the three axes of the magnetic sensor. Although the planar three-axis sensor in the prior art can perform planar measurement of three-dimensional vector magnetic fields, there are still many problems, including the problem of low conversion efficiency of the Z-axis, which directly affects the measurement accuracy of the sensor. Secondly, the in-plane magnetic field signal obtained by magnetic conduction cannot directly reflect the size of the earth's space magnetic field, and a series of calculations are needed to find the corresponding relationship between the output signal and the three-axis magnetic field, which is another key problem that needs to be solved. How to break through the limitations of the conventional three-axis sensor relying on a three-dimensional structure is a problem that needs to be solved. SUMMARY

[0004] The purpose of the present application is to provide a planar three-axis GMI magnetic sensor probe, a magnetic field measurement method and equipment, which can improve the three-dimensional magnetic field measurement accuracy and efficiency.

[0005] The present application provides a planar three-axis GMI magnetic sensor probe, which comprises a sensitive element and a magnetic field line variable track structure; the sensitive element comprises a first-axis probe, a second-axis probe, Shaft probe, the One end of the shaft probe is horizontally connected to the magnetic field line track-changing structure.

[0006] Furthermore, the aforementioned Shaft probe, Shaft probe, The shaft probe is made of cobalt-based amorphous thin strip material.

[0007] Furthermore, the aforementioned Shaft probe and Axis probe in Placed at a 90° angle within the plane.

[0008] Furthermore, the aforementioned Shaft probe, Shaft probe, The horizontal width, length, and thickness of the shaft probe are 10mm, 1mm, and 0.5mm, respectively.

[0009] Furthermore, the horizontal width of the magnetic field line changing track structure is 3mm, the height is 14mm, the relative magnetic permeability is 5000, and the length is 5mm.

[0010] This invention also provides a magnetic field measurement method applied to the above-mentioned planar triaxial GMI magnetic sensor probe, comprising the following steps: S1: according to the magnetic field line trajectory changing structure Shaft probe voltage output and probe sensitivity, without magnetic field guide structure The shaft probe voltage output and its probe sensitivity are as follows: The directional magnetic field strength is obtained to determine the influence of the magnetic field line trajectory changing structure on the probe output; S2: Obtain the voltage output of each probe, and obtain the three-dimensional magnetic field information based on the influence of the magnetic field line trajectory changing structure on the probe output and the voltage output of each probe.

[0011] Furthermore, step S1 specifically includes: according to the magnetic field line orbital change structure Shaft probe voltage output and probe sensitivity, without magnetic field guide structure The shaft probe voltage output and its probe sensitivity are as follows: The directional magnetic field strength is given, and the influence of the magnetic field line trajectory-changing structure on the probe output is obtained, as shown in the formula: , in, The effect of the magnetic field line trajectory changing structure on the probe output; When it is a track-changing structure with magnetic field lines Shaft probe voltage output, This refers to the probe sensitivity at this time; When there is no magnetic field line changing structure Shaft probe voltage output, The time probe sensitivity is; For The direction magnetic field intensity.

[0012] Further, the step S2 specifically comprises: acquiring each probe voltage output, and obtaining three-dimensional magnetic field information according to the influence of the magnetic line variable track structure on the probe output and each probe voltage output, such as the formula: , , , Wherein, 、 And The three-dimensional magnetic field information, that is, 、 And The direction magnetic field intensity; 、 And 、 And The voltage output of the axis probe, that is, each probe voltage output; 、 And 、 And The sensitivity of the axis probe; The variable track coefficient of the magnetic line variable track structure.

[0013] The application also provides a computer readable storage medium, which stores a computer program, and the computer program is executed by a processor to realize the steps of the above-mentioned magnetic field measurement method.

[0014] The application also provides a computer device, which comprises a memory, a processor, and a computer program stored in the memory and executable on the processor, and the processor realizes the steps of the above-mentioned magnetic field measurement method when executing the program.

[0015] The plane three-axis GMI magnetic sensor probe, the magnetic field measurement method and the device provided by the application have the following beneficial effects: The application uses the high sensitivity, high resolution and fast response characteristics of the GMI sensor, combines the magnetic line variable track and the magnetic line gathering principle, and proposes a plane three-axis GMI magnetic sensor probe, which does not need to consider the three-axis orthogonality problem and can realize the measurement of the three-dimensional magnetic field, can realize the planarization measurement of the three-dimensional magnetic field, and improves the three-dimensional magnetic field ​​Direction measurement accuracy; the application makes full use of the advantages of the planar three-axis GMI magnetic sensor probe, such as high sensitivity, high resolution, fast response speed, wide frequency band, etc. The composition of the signal of the axial probe is analyzed, the error caused by the difficulty in ensuring the orthogonality of the conventional three-axis magnetic sensor is avoided by combining the magnetic line variable track and the magnetic line concentration principle, the solving method of the Z-direction magnetic field information is derived through simulation, and the magnetic field signal in the Z-direction is successfully obtained; the conversion efficiency of the axial probe is improved. BRIEF DESCRIPTION OF DRAWINGS

[0016] The application will be further described below in combination with the drawings and examples, and the drawings are as follows: Figure 1 It is the overall design flow chart of the planar three-axis GMI magnetic sensor provided by the application; Figure 2 It is the model construction diagram of the X-Z axial probe of the planar magnetic sensor provided by the application; Figure 3 It is a schematic diagram of the variable track coefficient changing with the horizontal width of the variable track structure provided by the application; Figure 4 It is a schematic diagram of the variable track coefficient changing with the height of the variable track structure provided by the application; Figure 5 It is a schematic diagram of the variable track coefficient changing with the length of the variable track structure provided by the application; Figure 6 It is a schematic diagram of the variable track coefficient changing with the relative permeability provided by the application; Figure 7 It is a schematic diagram of the space coordinate system provided by the application; Figure 8 It is the model construction diagram of the three-axis magnetic probe of the planar three-axis GMI magnetic sensor provided by the application; Figure 9 It is the grid subdivision diagram of the three-axis magnetic probe of the planar three-axis GMI magnetic sensor provided by the application; Figure 10 It is a schematic diagram of the magnetic flux density change of the sensitive material of each probe under the X-direction magnetic field provided by the application; Figure 11 It is a schematic diagram of the magnetic flux density change of the sensitive material of each probe under the Y-direction magnetic field provided by the application; Figure 12 It is a schematic diagram of the magnetic flux density change of the sensitive material of each probe under the Z-direction magnetic field provided by the application; Figure 13 It is a schematic diagram of the magnetic flux density change of the sensitive material of the X-Z axial probe with or without the magnetic line variable track structure provided by the application; Figure 14 It is a structural block diagram of a computer device provided by the application. DETAILED DESCRIPTION​

[0017] In order to make the technical features, objectives and effects of the present application more clearly understood, the specific embodiments of the present application will be described in detail with reference to the drawings.

[0018] In the embodiment, the planar three-axis GMI magnetic sensor probe includes a sensitive element and a magnetic line variable track structure; The sensitive element includes an axial probe, an axial probe, an axial probe, the one end of the axial probe is horizontally connected with the magnetic line variable track structure; In an exemplary embodiment, the axial probe, axial probe, the axial probe is made of cobalt-based amorphous thin strip material; In an exemplary embodiment, the axial probe and axial probe are placed at 90° in a plane; In an exemplary embodiment, the axial probe, axial probe, the horizontal width, length and thickness of the axial probe are 10mm, 1mm and 0.5mm respectively; In an exemplary embodiment, the horizontal width of the magnetic line variable track structure is 3mm, the height is 14mm, the relative permeability is 5000, and the length is 5mm.

[0019] The embodiment provides a magnetic field measurement method applied to the planar three-axis GMI magnetic sensor probe, and the method comprises the following steps: S1: according to the voltage output of the axial probe and the sensitivity of the axial probe with the magnetic line variable track structure, the voltage output of the axial probe and the sensitivity of the axial probe without the magnetic line variable track structure are the voltage output of the axial probe and the sensitivity of the axial probe without the magnetic line variable track structure are the magnetic field intensity in the direction is obtained, and the influence of the magnetic line variable track structure on the output of the probe is obtained. In an exemplary embodiment, step S1 specifically comprises: according to the voltage output of the axial probe and the sensitivity of the axial probe with the magnetic line variable track structure, the voltage output of the axial probe and the sensitivity of the axial probe without the magnetic line variable track structure are the voltage output of the axial probe and the sensitivity of the axial probe without the magnetic line variable track structure are the magnetic field intensity in the direction is obtained, and the influence of the magnetic line variable track structure on the output of the probe is obtained, as shown in the formula: , wherein, The magnetic line variable orbit structure affects the output of the probe; The magnetic line variable orbit structure affects the output of the probe; The voltage output of the axial probe, The sensitivity of the probe at this time; The magnetic line variable orbit structure affects the output of the probe; The voltage output of the axial probe, The sensitivity of the probe at this time; The magnetic line variable orbit structure affects the output of the probe; The magnetic field intensity in the direction; S2: Obtain the voltage output of each probe, and obtain the three-dimensional magnetic field information according to the magnetic line variable orbit structure affecting the output of the probe and the voltage output of each probe; In an exemplary embodiment, step S2 specifically comprises: obtaining the voltage output of each probe, and obtaining the three-dimensional magnetic field information according to the magnetic line variable orbit structure affecting the output of the probe and the voltage output of each probe, as shown in the formula: , , , Wherein, , and are the three-dimensional magnetic field information, that is, , and are the magnetic field intensity in the direction; , and are respectively , and are the voltage output of the axial probe, that is, the voltage output of each probe; , and are respectively , and are the sensitivity of the axial probe; is the variable orbit coefficient of the magnetic line variable orbit structure.

[0020] In some embodiments, the above-mentioned planar three-axis GMI magnetic sensor probe and magnetic field measurement method can also be implemented in the following manner.

[0021] In this embodiment, the overall design process is as follows Figure 1 as shown.

[0022] (1) X-Z single-axis magnetic probe modeling and simulation: The X-Z axis probe of the planar magnetic sensor is composed of a magnetic line variable track structure and a sensitive material. The method of magnetic line gathering has the advantages of enhancing the local magnetic field and improving the detectability of the magnetic field. The method of magnetic line variable track has the characteristic of causing distortion of the magnetic line by the variable track structure, thereby realizing the conversion of the three-dimensional vector magnetic field into a single planar magnetic field and ensuring the orthogonality of the three axes of the magnetic sensor. Therefore, the advantages of the magnetic line gathering principle and the magnetic line variable track principle are combined, the soft magnetic material with the magnetic line gathering effect is selected as the sensitive material of the probe, and the ferrite material with strong magnetic field variable track effect is used as the magnetic line variable track structure. Generally, the sensitive material is silicon steel material, nickel-iron material and cobalt-based material, etc. Through comparison, the cobalt-based amorphous thin strip material with strong GMI effect is used in the embodiment.

[0023] The model construction diagram of the X-Z axis probe of the planar magnetic sensor is shown in Figure 2 . The cobalt-based amorphous thin strip used as the sensitive material in the planar magnetic sensor probe has a fixed size, a horizontal width of 10 mm, a length of 1 mm and a thickness of 0.5 mm; the size of the magnetic line variable track structure is a horizontal width of , a height of , a length of , and a relative magnetic permeability of .

[0024] (2) Influence of variable track structure parameters on variable track efficiency: The simulation analyzes the influence of the variables of the parameters of the variable track structure, i.e. the horizontal width of , the height of , the length of and the relative magnetic permeability of , on the variable track ability of the magnetic line variable track structure.

[0025] First, the parameters of the cobalt-based amorphous thin strip structure are kept unchanged, the horizontal width of the variable track structure is , the height is , the length is , and the relative magnetic permeability is , the average value of the magnetic flux density mode in the axial direction of the cobalt-based amorphous thin strip is taken as the monitoring quantity to reflect the influence of the variable track structure parameters on the Z-direction magnetic field conversion efficiency. The influence of the variable track structure parameter changes on the variable track coefficient is obtained as Figure 3 , Figure 4 , Figure 5 , Figure 6 .

[0026] As can be seen from the simulation results of the planar magnetic sensor magnetic probe above, when the height, length and relative magnetic permeability of the magnetic line variable track structure increase, the variable track coefficient will increase to different degrees. When the horizontal width of the variable track structure is , the height is and relative permeability is When the horizontal width, height and length of the magnetic field trajectory changing structure are 3mm, 14mm and 5000 respectively, the magnetic field trajectory changing structure can obtain relatively high trajectory changing coefficient, and the length of the magnetic field trajectory changing structure According to the actual demand and the change trend of the trajectory changing coefficient obtained by simulation, a suitable value can also be determined. Therefore, within the range allowed by the actual structure and process conditions, the horizontal width, height and length of the magnetic field trajectory changing structure can be appropriately adjusted to effectively improve the trajectory changing coefficient of the magnetic field trajectory changing structure.

[0027] (3) Design of three-axis probe structure of magnetic sensor: Suppose there is an arbitrary magnetic source in a space of the earth , and the magnetic field intensity is , The angles between the magnetic field and the X-axis, Y-axis and Z-axis in the space coordinate system are , , , , respectively The angles between the magnetic field and the X-Y plane and the X-Z plane are shown in Figure 7 .

[0028] The magnetic field can be regarded as a combination of a three-component magnetic field. The relationship between the magnetic field intensity of the X, Y and Z directions and can be respectively expressed as: (1) (2) (3) From the spatial angle formula and the minimum angle law, we can obtain: (4) (5) (6) Simplifying, we can obtain the calculation formula of the angles between the magnetic field and the X-Y plane and the X-Z plane: and (7) (8) From the above formula, for an arbitrary magnetic field in the space of the earth, if the angles between the magnetic field and the coordinate system in the space are known, the angles between the magnetic field and the X-Y plane and the X-Z plane and ​​, if the three-component magnetic field strength is known, the corresponding total magnetic field strength can be calculated. According to the spatial rectangular coordinate system, it can be analyzed that in order to accurately measure the X direction and Y direction magnetic field components of the magnetic source , the designed X-axis probe and Y-axis probe need to be placed at 90° in the X-Y plane, and the specific modeling diagram of the three-axis magnetic probe is as shown in Figure 8 .

[0029] (4) Simulation of planar three-axis magnetic sensor probe structure: The basic structure of the probe determined in the previous step is consistent, the horizontal width of the cobalt-based amorphous thin strip is 10 mm, the length is 1 mm, and the thickness is 0.5 mm. According to the simulation results of the X-Z axis probe, the horizontal width , height and relative permeability of the variable rail structure are selected as 3mm, 14mm and 5000, and the length is 5mm. The following is the modeling of the probe structure by using the simulation software COMSOL. Figure 9

[0030] Place the planar three-axis GMI magnetic sensor three-axis magnetic probe in the air domain, now apply a magnetic field along the horizontal X direction from 0 to 200A / m to the magnetic probe, the magnetic field direction is the negative direction of the X axis, the simulation result is as shown in Figure 10 .

[0031] Keep other conditions unchanged, only change the direction of the applied magnetic field, now apply a magnetic field along the vertical Y direction from 0 to 200A / m to the magnetic probe, the magnetic field direction is the negative direction of the Y axis, the simulation result is as shown in Figure 11 .

[0032] In order to verify the response of the X-Z axis probe to the vertical Z direction magnetic field, the direction of the applied magnetic field is changed again, now a magnetic field along the vertical Z direction from 0 to 200A / m is applied to the magnetic probe, the magnetic field direction is the negative direction of the Z axis, the simulation result is as shown in Figure 12 ; According to the simulation and its calculation results above, the response characteristics of the magnetic probe structure designed in this embodiment to the magnetic field can be obtained, the three probes can independently realize the function and the measurement results do not interfere with each other, but the magnetic force line variable rail structure will have a certain influence on the X direction magnetic field, this problem will be analyzed and solved in the next step.

[0033] (5) Signal composition of three-axis magnetic probe and magnetic field solving method: According to the analysis of the above steps, it can be known that the X-axis probe can directly detect the X direction magnetic field strength, the magnetic field size is , the Y-axis probe can directly detect the Y direction magnetic field strength, the magnetic field size is ​And the output of the X-Z axis probe is affected by the magnetic line of force variable structure, which is due to the fact that the magnetic line of force variable structure itself has the function of gathering magnetic field. The magnetic field detected by the X-Z axis probe is not simply the superposition of the X direction magnetic field and the Z direction magnetic field.

[0034] In order to explore the influence of the magnetic line of force variable structure on the output signal of the X-Z axis probe, the model of the three-axis magnetic probe in the last section is simulated by using COMSOL, and the output of the X-Z axis probe is analyzed under the condition of with or without the magnetic line of force variable structure. Now apply a magnetic field along the horizontal X direction from 0 to 200A / m to the magnetic probe, and take the average value of the magnetic flux density of the sensitive material of the probe as the monitoring quantity. Under the condition of with or without the magnetic line of force variable structure, the magnetic flux density in the sensitive material of the X-Z axis probe is calculated. Now let the magnetic field intensity detected by the X-Z axis probe with the magnetic line of force variable structure under the action of the X direction magnetic field be The magnetic field intensity detected by the X-Z axis probe without the magnetic line of force variable structure is The influence of the magnetic line of force variable structure on the magnetic field intensity detected by the X-Z axis probe is The X direction magnetic field intensity is Then the magnetic field intensity detected by the probe with or without the magnetic line of force variable structure has the following relationship: (9) (10) Now export the simulation data and draw the magnetic flux density variation curve of the X-Z axis probe under the condition of with or without the magnetic line of force variable structure, as shown in Figure 13 From the figure, it can be observed that the magnetic flux density module of the sensitive material of the X-Z axis probe with the magnetic line of force variable structure is greater than that without the magnetic line of force variable structure. The magnetic flux density module of the sensitive material of the X-Z axis probe with or without the magnetic line of force variable structure will change with the change of the X direction magnetic field, and their change trend is linear.

[0035] Now calculate the data obtained by simulation as follows: subtract (10) from (9) and divide by the X direction magnetic field Get: (11) Substitute the simulation data to calculate the constant, let it be k, then the influence of the magnetic line of force variable structure on the magnetic field intensity detected by the X-Z axis probe And the X direction magnetic field intensity There is the following relationship: (12) Now let the voltage output of the X-Z axis probe with the magnetic line of force variable structure be , the probe sensitivity is S1, and the X-Z axis probe voltage output without the magnetic line variable orbit structure is , the probe sensitivity is S2, and the relationship between the probe voltage output and the measured magnetic field is: (13) (14) Then the relationship between the k value of the influence of the magnetic line variable orbit structure on the probe output and the probe voltage output and the measured magnetic field is: (15) In the actual sensor manufacturing process, errors caused by the non-perpendicularity of the magnetic line variable orbit structure installation and the probe, etc. can be considered as the influence of the magnetic line variable orbit structure on the probe output. Such errors can be integrated and corrected in the calculation process of the above k value.

[0036] Through the above analysis, it can be known that when there is a magnetic line variable orbit structure, the relationship between the magnetic field intensity detected by the X-Z axis probe and the X direction magnetic field intensity is: (16) Through the above analysis of the influence of the magnetic line variable orbit structure on the magnetic field intensity detected by the X-Z axis probe, it can be deduced that under the action of a three-dimensional magnetic field, the magnetic field intensity detected by the X-Z axis probe is , the Z direction magnetic field is twisted to the X direction magnetic field component , and the X direction magnetic field component is , and the magnetic field intensity detected by the X-Z axis probe has the following relationship: (17) Substituting formula (16) into formula (17) can obtain: (18) is the X direction magnetic field intensity, k is a constant, is the variable orbit coefficient of the magnetic line variable orbit structure, is the magnetic field intensity of the Z direction magnetic field guided to the X direction by the magnetic line variable orbit structure.

[0037] At this time, assuming that the three-axis magnetic probe sensitivity , , is linear within a certain range, the relationship between the voltage output of each probe , , and the measured magnetic field can be obtained: (19) (20) (21) Thus the expression of the three components of the magnetic field can be obtained: (22) (23) (24) Therefore the three-dimensional magnetic field information 、 、 can be obtained by calculation, and thus the signal calculation of the planar three-axis GMI magnetic sensor three-axis magnetic probe is completed.

[0038] The function of the sensor is realized by hardware circuit. The final experiment shows that the measurement range of the planar three-axis GMI magnetic sensor is ± 370 μT, and the output voltage sensitivities of the sensor in X direction, Y direction and Z direction are S x = 1416 V / T, S y = 1424 V / T, S z = 628.3 V / T, and the output noise levels of the X-axis probe, Y-axis probe and X-Z-axis probe are 、 、 respectively. The variable track coefficient of the magnetic field line variable track structure is tested by designing an experiment, and the variable track coefficient is 0.446. The accuracy of the calculation method is verified, and the error between the actual test result and the calculation result is not more than 3.48%.

[0039] The embodiment provides a computer readable storage medium, which stores a computer program. The computer program is executed by a processor to realize the steps of the magnetic field measurement method. The storage medium can be a disc, an optical disc, a read-only memory (ROM), a random access memory (RAM), a flash memory, a hard disk drive (HDD) or a solid-state drive (SSD), etc. The storage medium can also include a combination of the above types of memories.

[0040] The embodiment provides a computer device, which includes a memory, a processor and a computer program stored in the memory and executable on the processor. The processor executes the program to realize the steps of the magnetic field measurement method.

[0041] As Figure 14As shown, the computer device 120 can include at least one processor 121, such as a central processing unit (CPU), at least one communication interface 123, a memory 124, and at least one communication bus 122. The communication bus 122 is configured to enable communication between these components. The communication interface 123 can include a display, a keyboard, and optionally the communication interface 123 can further include a standard wired interface, a wireless interface. The memory 124 can be a high-speed random access memory (RAM), and can also be a non-volatile memory, such as at least one disk memory. The memory 124 can also be at least one storage device located away from the aforementioned processor 121. The memory 124 stores an application program, and the processor 121 invokes the program code stored in the memory 124 to execute any of the above method steps. The communication bus 122 can be a peripheral component interconnect (PCI) bus or an extended industry standard architecture (EISA) bus, etc. The communication bus 122 can be divided into an address bus, a data bus, a control bus, etc. For ease of representation, Figure 14The bus 123 is used to connect the above-mentioned elements in the system 120, and only one line is used for representation, but it does not mean that there is only one bus or one type of bus. Among them, the memory 124 can include volatile memory such as random-access memory (RAM); the memory can also include non-volatile memory such as flash memory, a hard disk drive (HDD) or a solid-state drive (SSD); the memory 124 can also include a combination of the above-mentioned types of memory. Among them, the processor 121 can be a central processing unit (CPU), a network processor (NP) or a combination of CPU and NP. The processor 121 can further include a hardware chip. The hardware chip can be an application-specific integrated circuit (ASIC), a programmable logic device (PLD) or a combination thereof. The PLD can be a complex programmable logic device (CPLD), a field-programmable gate array (FPGA), a generic array logic (GAL) or any combination thereof. Alternatively, the memory 124 is also used to store program instructions. The processor 121 can invoke the program instructions to implement the magnetic field measurement method as in the embodiment.

[0042] The embodiments of the present application are described above in conjunction with the drawings, but the present application is not limited to the specific embodiments described above, and the specific embodiments described above are only illustrative but not restrictive, and those skilled in the art can make many forms under the inspiration of the present application without departing from the purpose of the present application and the scope protected by the claims, which are all within the protection of the present application.

Claims

1. A planar triaxial GMI magnetic sensor probe, characterized in that, It includes a sensitive element and a magnetic field line trajectory-changing structure; the sensitive element includes Shaft probe, Shaft probe, Shaft probe, the One end of the shaft probe is horizontally connected to the magnetic field line track-changing structure.

2. The planar triaxial GMI magnetic sensor probe according to claim 1, characterized in that, The Shaft probe, Shaft probe, The shaft probe is made of cobalt-based amorphous thin strip material.

3. The planar triaxial GMI magnetic sensor probe according to claim 1 or 2, characterized in that, The Shaft probe and Axis probe in Placed at a 90° angle within the plane.

4. The planar triaxial GMI magnetic sensor probe according to claim 3, characterized in that, The Shaft probe, Shaft probe, The horizontal width, length, and thickness of the shaft probe are 10mm, 1mm, and 0.5mm, respectively.

5. The planar triaxial GMI magnetic sensor probe according to claim 4, characterized in that, The magnetic field line changing track structure has a horizontal width of 3mm, a height of 14mm, a relative magnetic permeability of 5000, and a length of 5mm.

6. A method for measuring the magnetic field applied to the planar triaxial GMI magnetic sensor probe of any one of claims 1-5, characterized in that, Includes the following steps: S1: Based on the magnetic field line changing track structure Shaft probe voltage output and probe sensitivity, without magnetic field guide structure The shaft probe voltage output and its probe sensitivity are as follows: The directional magnetic field strength is given, and the influence of the magnetic field line orbital structure on the probe output is obtained. S2: Obtain the voltage output of each probe, and obtain three-dimensional magnetic field information based on the influence of the magnetic field line trajectory changing structure on the probe output and the voltage output of each probe.

7. The magnetic field measurement method according to claim 6, characterized in that, Step S1 specifically includes: based on the magnetic field line changing track structure Shaft probe voltage output and probe sensitivity, without magnetic field guide structure The shaft probe voltage output and its probe sensitivity are as follows: The directional magnetic field strength is given, and the influence of the magnetic field line trajectory-changing structure on the probe output is obtained, as shown in the formula: ， in, The effect of the magnetic field line trajectory changing structure on the probe output; When it is a track-changing structure with magnetic field lines Shaft probe voltage output, This refers to the probe sensitivity at this time; When there is no magnetic field line changing structure Shaft probe voltage output, The probe sensitivity at this time is: for Directional magnetic field strength.

8. The magnetic field measurement method according to claim 6, characterized in that, Step S2 specifically includes: acquiring the voltage output of each probe, and obtaining three-dimensional magnetic field information based on the influence of the magnetic field line trajectory changing structure on the probe output and the voltage output of each probe, as shown in the formula: ， ， ， in, , and This refers to three-dimensional magnetic field information, that is, , and Directional magnetic field strength; , and They are respectively , and The voltage output of the shaft probe, i.e., the voltage output of each probe; , and They are respectively , and Sensitivity of the shaft probe; is the trajectory change coefficient of the magnetic field line trajectory changer structure.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that, When executed by a processor, the computer program implements the steps of the magnetic field measurement method as described in any one of claims 6-8.

10. A computer device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the computer program, it implements the steps of the magnetic field measurement method as described in any one of claims 6-8.

Images